CN117191278A - Special fluid control component life test system and test method - Google Patents
Special fluid control component life test system and test method Download PDFInfo
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- CN117191278A CN117191278A CN202311169421.2A CN202311169421A CN117191278A CN 117191278 A CN117191278 A CN 117191278A CN 202311169421 A CN202311169421 A CN 202311169421A CN 117191278 A CN117191278 A CN 117191278A
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- 238000012360 testing method Methods 0.000 title claims abstract description 59
- 239000012530 fluid Substances 0.000 title claims abstract description 23
- 238000010998 test method Methods 0.000 title abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 9
- 238000012544 monitoring process Methods 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Abstract
The invention discloses a special fluid control component life test system and a special fluid control component life test method, wherein the test system comprises a gas cylinder; one end of the first pipeline is connected with the air outlet of the air bottle, the first pipeline is sequentially connected with a first pressure reducing valve, a second pressure reducing valve and a first pressure gauge, and the other end of the first pipeline is provided with two connecting ports; one end of the second pipeline is connected with one connecting port, and the second pipeline is sequentially connected with the first diaphragm valve, the second diaphragm valve and the second pressure gauge; one end of the third pipeline is connected with the other connecting port, and the third pipeline is sequentially connected with a third diaphragm valve, a fourth diaphragm valve and a third pressure gauge; the other end of the second pipeline and the other end of the third pipeline are both communicated with the water container; the to-be-tested flow control component is connected between the second pipeline and the third pipeline through a fourth pipeline; and a control system. The test system has small occupied area and convenient use; the life test can be carried out on the to-be-tested fluidic component with smaller opening pressure, and the requirements of the semiconductor industry are met.
Description
Technical Field
The invention relates to the technical field of valve life test, in particular to a special fluid control component life test system and a special fluid control component life test method.
Background
A special fluidic component, such as a one-way valve, is a valve that allows fluid medium to flow in only one direction, where the valve is open when the upstream pressure of the one-way valve is higher than the downstream pressure by a certain amount, and closed when the downstream pressure is higher than the upstream pressure by a certain amount. The one-way valve used in the semiconductor industry has the characteristics of small opening pressure, generally 5-7 Psig, long service time, high opening times, high reliability and the like.
The existing check valve life test system generally uses liquid medium for testing, but often needs larger equipment such as a water tank, a water pump and the like, so that the test system occupies a large area and is inconvenient to use.
Therefore, how to provide a special fluid control component life test system and test method with small occupied area and convenient use is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides a special flow control component life test system and a special flow control component life test method which are small in occupied area and convenient to use.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
a special fluidic component life test system comprising:
a gas cylinder;
the device comprises a first pipeline, wherein one end of the first pipeline is connected with an air outlet of the air cylinder, a first pressure reducing valve, a second pressure reducing valve and a first pressure gauge are sequentially connected to the first pipeline, two connecting ports are formed in the other end of the first pipeline, an exhaust pipe is connected to a position, close to the air outlet of the air cylinder, of the first pipeline, and an exhaust ball valve is connected to the exhaust pipe;
one end of the second pipeline is connected with one connecting port at the other end of the first pipeline, and the second pipeline is sequentially connected with a first diaphragm valve, a second diaphragm valve and a second pressure gauge;
one end of the third pipeline is connected with another connecting port at the other end of the first pipeline, and the third pipeline is sequentially connected with a third diaphragm valve, a fourth diaphragm valve and a third pressure gauge;
the other end of the second pipeline and the other end of the third pipeline are both communicated into the water container;
the to-be-tested flow control component is connected between the second pipeline and the third pipeline through a fourth pipeline, the inlet end of the to-be-tested flow control component is positioned between the first diaphragm valve and the second diaphragm valve, and the outlet end of the to-be-tested flow control component is positioned between the third diaphragm valve and the fourth diaphragm valve;
the control system is electrically connected with the first diaphragm valve, the second diaphragm valve, the third diaphragm valve and the fourth diaphragm valve and used for controlling the on-off and the opening and closing times of the first diaphragm valve, the second diaphragm valve, the third diaphragm valve and the fourth diaphragm valve.
Compared with the prior art, the special flow control component life test system provided by the invention uses a gas medium for test, and compared with a liquid medium for test, larger equipment such as a water tank and a water pump is not required to be prepared, so that the test system occupies a smaller area and is more convenient to use; the two pressure reducing valves are used for reducing the outlet pressure of the gas cylinder, so that the life test of the to-be-tested flow control component with smaller opening pressure, such as a one-way valve, can be realized, and the requirements of the semiconductor industry are met; in addition, the gas medium has compressibility, and when the check valve was closed, the gas cylinder was not closed this moment, and the gas pressure in the pipeline can not increase in the twinkling of an eye, can not exert an influence to test system.
The invention relates to a service life testing method of a special fluid control component, which comprises the following testing steps of:
step S1: firstly, opening the exhaust ball valve to empty the gas in the test pipeline;
step S2: opening the gas cylinder, decompressing the gas in the gas cylinder through the first decompressing valve and the second decompressing valve, reducing the pressure to a preset pressure of 5-7 Psig, monitoring by the first pressure gauge, and then performing switching control on the first diaphragm valve, the second diaphragm valve, the third diaphragm valve and the fourth diaphragm valve alternately for N times by using a solenoid valve in the control system as follows:
simultaneously opening the first diaphragm valve and the fourth diaphragm valve, simultaneously closing the second diaphragm valve and the third diaphragm valve, and performing forward opening test on the to-be-tested fluid control component, wherein in the process, the value of the third pressure gauge is slightly smaller than that of the first pressure gauge, and the water container is provided with bubbles to indicate that the to-be-tested fluid control component works normally; then closing the first diaphragm valve and the fourth diaphragm valve simultaneously, and opening the second diaphragm valve and the third diaphragm valve simultaneously, and performing reverse closing test on the to-be-tested fluid control component, wherein in the process, the value of the second pressure gauge is 0, the water container has no bubble, which indicates that the to-be-tested fluid control component has no leakage, and otherwise, the to-be-tested fluid control component has leakage;
wherein a counter in the control system counts the number of alternations and a relay in the control system times the alternations;
step S3: if the number of times of testing reaches N times, and the first diaphragm valve and the fourth diaphragm valve are in a closed state, the second diaphragm valve and the third diaphragm valve are in an open state, and when the value of the second pressure gauge is not 0 and the water container has bubbles, the service life of the to-be-tested flow control component is indicated to be N times; otherwise, the control system is continuously set to be N times of alternation times until the first diaphragm valve and the fourth diaphragm valve are in a closed state, the second diaphragm valve and the third diaphragm valve are in an open state, the value of the second pressure gauge is not 0, and the water container has bubbles.
Compared with the prior art, the invention discloses a life test method for special flow control components, which is characterized in that residual gas in a test pipeline is firstly emptied, the influence of the residual gas pre-stored in the test pipeline on the test effect is avoided, and the outlet pressure of a gas cylinder is reduced by two reducing valves, so that the life test of the to-be-tested flow control components with smaller opening pressure, such as a one-way valve, can be realized, and the requirements of the semiconductor industry are met; in addition, the test method uses the gas medium for testing, the gas medium has compressibility, when the one-way valve is closed, the gas cylinder is not closed at the moment, the gas pressure in the pipeline cannot be increased instantaneously, and the test system cannot be influenced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a life test system for a special fluid control component provided by the invention.
Fig. 2 is a schematic diagram of the flow direction of the gas in the test system when the fluidic component to be tested is opened.
Fig. 3 is a schematic diagram of the flow direction of the gas in the test system when the fluidic component to be tested is closed.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1, an embodiment of the present invention discloses a special fluid control component life test system, including:
a gas cylinder 1;
the first pipeline 16, one end of the first pipeline 16 is connected with the air outlet of the air bottle 1, the first pipeline 16 is sequentially connected with the first pressure reducing valve 3, the second pressure reducing valve 4 and the first pressure gauge 5, two connecting ports are arranged at the other end of the first pipeline 16, an exhaust pipe 19 is connected to the position, close to the air outlet of the air bottle 1, of the first pipeline 16, and an exhaust ball valve 2 is connected to the exhaust pipe 19;
one end of the second pipeline 17 is connected with a connecting port on the other end of the first pipeline 16, and the second pipeline 17 is sequentially connected with a first diaphragm valve 6, a second diaphragm valve 7 and a second pressure gauge 8;
one end of the third pipeline 18 is connected with another connecting port on the other end of the first pipeline 16, and the third pipeline 18 is sequentially connected with a third diaphragm valve 13, a fourth diaphragm valve 11 and a third pressure gauge 10;
the other end of the second pipeline 17 and the other end of the third pipeline 18 are both communicated with the water container 9;
a to-be-measured fluidic component 12 (such as a one-way valve), wherein the to-be-measured fluidic component 12 is connected between the second pipeline 17 and the third pipeline 18 through the fourth pipeline 20, the inlet end of the to-be-measured fluidic component 12 is positioned between the first diaphragm valve 6 and the second diaphragm valve 7, and the outlet end of the to-be-measured fluidic component 12 is positioned between the third diaphragm valve 13 and the fourth diaphragm valve 11;
the control system 14 is electrically connected with the first diaphragm valve 6, the second diaphragm valve 7, the third diaphragm valve 13 and the fourth diaphragm valve 11, and is used for controlling the on-off and the opening and closing times of the first diaphragm valve 6, the second diaphragm valve 7, the third diaphragm valve 13 and the fourth diaphragm valve 11.
The invention relates to a service life testing method for a special fluid control component, which comprises the following testing steps of:
step S1: firstly, opening an exhaust ball valve 2 to empty gas in a test pipeline;
step S2: the gas cylinder 1 is opened, the gas in the gas cylinder 1 is depressurized through the first depressurization valve 3 and the second depressurization valve 4, the pressure is reduced to a predetermined pressure of 5Psig to 7Psig, the pressure is monitored by the first pressure gauge 5, and then the first diaphragm valve 6, the second diaphragm valve 7, the third diaphragm valve 13 and the fourth diaphragm valve 11 are alternately on-off controlled by the solenoid valve 22 in the control system 14 as follows N times:
simultaneously opening the first diaphragm valve 6 and the fourth diaphragm valve 11, simultaneously closing the second diaphragm valve 7 and the third diaphragm valve 13, and performing a forward opening test on the to-be-tested flow control component 12, wherein in the process, the value of the third pressure gauge 10 is slightly smaller than the value of the first pressure gauge 5 (due to pressure loss), the water container 9 has bubbles, which indicates that the to-be-tested flow control component 12 works normally (see fig. 2), wherein when the value of the third pressure gauge 10 differs greatly from the value of the first pressure gauge 5, the to-be-tested flow control component is not completely opened, and the internal structure part is invalid, so that the service life and the performance limit are reached; then simultaneously closing the first diaphragm valve 6 and the fourth diaphragm valve 11, simultaneously opening the second diaphragm valve 7 and the third diaphragm valve 13, and performing a reverse closing test on the to-be-tested flow control component 12, wherein in the process, the value of the second pressure gauge 8 is 0, the water container 9 has no bubble, which indicates that the to-be-tested flow control component 12 has no leakage, otherwise, the to-be-tested flow control component 12 has leakage, and the service life and the performance limit are reached (see fig. 3);
wherein the counter 15 in the control system 14 counts the number of alternations, the relay 21 in the control system 14 times the alternation time, for example 0.5min the first diaphragm valve 6 and the fourth diaphragm valve 11 are simultaneously opened, the second diaphragm valve 7 and the third diaphragm valve 13 are simultaneously closed, after 1min the first diaphragm valve 6 and the fourth diaphragm valve 11 are simultaneously closed, the second diaphragm valve 7 and the third diaphragm valve 13 are simultaneously opened, after 1.5min the first diaphragm valve 6 and the fourth diaphragm valve 11 are simultaneously opened again, the second diaphragm valve 7 and the third diaphragm valve 13 are simultaneously closed again, after 2min the first diaphragm valve 6 and the fourth diaphragm valve 11 are simultaneously closed again, the second diaphragm valve 7 and the third diaphragm valve 13 are simultaneously opened again until N alternations;
step S3: if the number of tests reaches N times and the first diaphragm valve 6 and the fourth diaphragm valve 11 are in a closed state, the second diaphragm valve 7 and the third diaphragm valve 13 are in an open state, and when the value of the second pressure gauge 8 is not 0 and the water container 9 has bubbles, the leakage of the to-be-tested flow control component 12 is indicated, and the service life of the to-be-tested flow control component is N times; on the contrary, the number of alternations of the control system 14 is continuously set to N times until the first diaphragm valve 6 and the fourth diaphragm valve 11 are closed, the second diaphragm valve 7 and the third diaphragm valve 13 are opened, the value of the second pressure gauge 8 is not 0, and the water container 9 has bubbles.
Compared with the liquid medium test, the test system and the test method do not need to prepare larger equipment such as a water tank, a water pump and the like, and the test system has smaller occupied area and more convenient use; the two pressure reducing valves are used for reducing the outlet pressure of the gas cylinder, so that the life test of a to-be-tested flow control component with smaller opening pressure, such as a one-way valve, can be realized, and the requirements of the semiconductor industry are met (the pressure of the gas cylinder is reduced to 5Psig, the span is too large, and one pressure reducing valve is difficult to realize, so that two pressure reducing valves are needed for two-stage pressure reduction, the first pressure reducing valve is specifically regulated to enable the outlet pressure to reach 1MPa, and then the second pressure reducing valve is regulated to enable the value of the first pressure gauge 5 to reach 5 Psig-7 Psig); in addition, the gas medium has compressibility, and when the check valve was closed, the gas cylinder was not closed this moment, and the gas pressure in the pipeline can not increase in the twinkling of an eye, can not exert an influence to test system. The system can directly judge the working state of the one-way valve according to the abnormal values of the first pressure gauge, the second pressure gauge and the third pressure gauge, and can also observe whether the water container at the tail end of the test system generates bubbles to judge whether the working state of the one-way valve is abnormal, so that the test result is more visual and easy to judge.
In addition, the service life of the check valves can be tested simultaneously by the test system, and the check valves are connected in parallel on the test pipeline, so that the service life of the check valves can be tested simultaneously.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (2)
1. A special fluidic component life test system, comprising:
a gas cylinder (1);
the gas cylinder comprises a first pipeline (16), wherein one end of the first pipeline (16) is connected with a gas outlet of the gas cylinder (1), a first pressure reducing valve (3), a second pressure reducing valve (4) and a first pressure gauge (5) are sequentially connected to the first pipeline (16), two connecting ports are formed in the other end of the first pipeline (16), an exhaust pipe (19) is connected to a position, close to the gas outlet of the gas cylinder (1), of the first pipeline (16), and an exhaust ball valve (2) is connected to the exhaust pipe (19);
one end of the second pipeline (17) is connected with one connecting port at the other end of the first pipeline (16), and the second pipeline (17) is sequentially connected with a first diaphragm valve (6), a second diaphragm valve (7) and a second pressure gauge (8);
one end of the third pipeline (18) is connected with the other connecting port at the other end of the first pipeline (16), and the third pipeline (18) is sequentially connected with a third diaphragm valve (13), a fourth diaphragm valve (11) and a third pressure gauge (10);
the other end of the second pipeline (17) and the other end of the third pipeline (18) are both communicated with the water container (9);
the to-be-detected flow control component (12) is connected between the second pipeline (17) and the third pipeline (18) through a fourth pipeline (20), the inlet end of the to-be-detected flow control component (12) is positioned between the first diaphragm valve (6) and the second diaphragm valve (7), and the outlet end of the to-be-detected flow control component (12) is positioned between the third diaphragm valve (13) and the fourth diaphragm valve (11);
the control system (14), control system (14) all with first diaphragm valve (6), second diaphragm valve (7), third diaphragm valve (13) with fourth diaphragm valve (11) electricity is connected, is used for controlling first diaphragm valve (6), second diaphragm valve (7), third diaphragm valve (13) with the break-make of fourth diaphragm valve (11) and the number of times of opening and closing.
2. A method for testing the life of a special fluid control component, characterized in that the following testing steps are performed by using the testing system according to claim 1:
step S1: firstly, opening the exhaust ball valve (2) to empty gas in a test pipeline;
step S2: opening the gas cylinder (1), reducing the pressure of the gas in the gas cylinder (1) through the first pressure reducing valve (3) and the second pressure reducing valve (4) to a preset pressure of 5-7 Psig, monitoring by the first pressure gauge (5), and then performing switching control on the first diaphragm valve (6), the second diaphragm valve (7), the third diaphragm valve (13) and the fourth diaphragm valve (11) alternately for N times by a solenoid valve (22) in the control system (14):
simultaneously opening the first diaphragm valve (6) and the fourth diaphragm valve (11), simultaneously closing the second diaphragm valve (7) and the third diaphragm valve (13), and performing forward opening test on the to-be-tested fluid control component (12), wherein in the process, the value of the third pressure gauge (10) is slightly smaller than the value of the first pressure gauge (5), and the water container (9) has bubbles to indicate that the to-be-tested fluid control component (12) works normally; then simultaneously closing the first diaphragm valve (6) and the fourth diaphragm valve (11), simultaneously opening the second diaphragm valve (7) and the third diaphragm valve (13), and performing reverse closing test on the to-be-tested fluid control component (12), wherein in the process, the value of the second pressure gauge (8) is 0, the water container (9) has no bubble, which indicates that the to-be-tested fluid control component (12) has no leakage, and otherwise, the to-be-tested fluid control component (12) has leakage;
wherein a counter (15) in the control system (14) counts the number of alternations, and a relay (21) in the control system (14) times the alternations;
step S3: if the number of tests reaches N times and the first diaphragm valve (6) and the fourth diaphragm valve (11) are in a closed state, the second diaphragm valve (7) and the third diaphragm valve (13) are in an open state, and when the value of the second pressure gauge (8) is not 0 and the water container (9) has bubbles, the service life of the to-be-tested flow control component (12) is described as N times; on the contrary, the number of alternations of the control system (14) is continuously set to N times until the second diaphragm valve (7) and the third diaphragm valve (13) are in an open state and the value of the second pressure gauge (8) is not 0 and the water container (9) has bubbles when the first diaphragm valve (6) and the fourth diaphragm valve (11) are in a closed state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311169421.2A CN117191278A (en) | 2023-09-12 | 2023-09-12 | Special fluid control component life test system and test method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311169421.2A CN117191278A (en) | 2023-09-12 | 2023-09-12 | Special fluid control component life test system and test method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117191278A true CN117191278A (en) | 2023-12-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311169421.2A Pending CN117191278A (en) | 2023-09-12 | 2023-09-12 | Special fluid control component life test system and test method |
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| Country | Link |
|---|---|
| CN (1) | CN117191278A (en) |
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- 2023-09-12 CN CN202311169421.2A patent/CN117191278A/en active Pending
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