CN117167283A - Foreline for vacuum pump - Google Patents
Foreline for vacuum pump Download PDFInfo
- Publication number
- CN117167283A CN117167283A CN202311445474.2A CN202311445474A CN117167283A CN 117167283 A CN117167283 A CN 117167283A CN 202311445474 A CN202311445474 A CN 202311445474A CN 117167283 A CN117167283 A CN 117167283A
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- pipe
- sealing ring
- wall
- vacuum pump
- filter screen
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- 238000004140 cleaning Methods 0.000 claims abstract description 18
- 238000006243 chemical reaction Methods 0.000 claims abstract description 12
- 238000007789 sealing Methods 0.000 claims description 38
- 238000001125 extrusion Methods 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 4
- 238000009423 ventilation Methods 0.000 claims description 4
- 239000013013 elastic material Substances 0.000 claims description 3
- 238000011068 loading method Methods 0.000 claims description 3
- 230000006978 adaptation Effects 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 230000001276 controlling effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention relates to the technical field of vacuum pipelines, and discloses a foreline for a vacuum pump, wherein the vacuum pump comprises a pump shell, a driving box, a blade-shaped rotor, a roll shaft, a gear and a driving motor, an air inlet at the top of the pump shell is fixedly sleeved with an air inlet pipe, the top end of the air inlet pipe is fixedly connected with a conversion head, the left side and the right side of the top of the conversion head are mirror images and are provided with two front diversion parts, the bottom of the front diversion part is provided with a cleaning part, an air outlet at the bottom of the pump shell is fixedly sleeved with an exhaust pipe, and the left side and the right side of the exhaust pipe are mirror images and are provided with two rear diversion parts; according to the invention, whether the surface of the filter screen needs to be cleaned or not is intelligently identified and judged by monitoring the protruding state of the filter screen and whether the air flow exists in the front-stage pipe, the system can be automatically reset after the cleaning is finished and is circularly and alternately used, so that the continuous output performance of the pump for automatically cleaning the surface of the filter element and maintaining the surface of the filter element is realized.
Description
Technical Field
The invention relates to the technical field of vacuum pipelines, in particular to a foreline for a vacuum pump.
Background
The dry vacuum pump avoids the occurrence of reverse flow because no liquid medium is used, which makes the dry vacuum pump widely applied in a plurality of fields, however, when the vacuum environment is manufactured, if dust and other impurities are entrained in the extracted gas, the impurities can enter the pump together with the air flow, so that the pump is easy to be blocked, the vacuum effect is lost in a short time, even the condition of vacuum reverse filling occurs, and a protection device (a front pipeline) of a pump body is needed to be provided at the air inlet end of the vacuum pump;
the chinese patent publication No. CN109869314a discloses a foreline for a vacuum pump, the foreline comprising: a main pipe vertically installed; the receiver is arranged at the bottom of the main pipe and is provided with an opening, and the opening is connected with the bottom of the main pipe in a sealing way; the branch pipe is a nonlinear pipeline, one end of the branch pipe is connected with the main pipe, and the other end of the branch pipe is connected with the vacuum pump; one of the airflows is used for entering the vacuum pump after sequentially passing through the main pipe and the branch pipe, and the receiver is used for receiving substances dropped by the airflows when passing through the main pipe through the opening; the air flow with a large amount of dust and sundries is filtered and dedusted in the front-stage pipeline and then enters the vacuum pump, so that dust entering the pump body is reduced, the possibility of occurrence of a pump clamping phenomenon is reduced, the continuous operation time of the vacuum pump is prolonged, the productivity is increased, and the economic cost is reduced.
Regarding the pump body protection device of the air inlet end of the current vacuum pump, there are some defects that need to be improved: the filtering device arranged in the front-stage pipeline has limited filtering capability on particles and dust in the gas, and a user is required to frequently replace a filter element, so that the process is inconvenient and the continuous operation capability of the pump is affected, which is not friendly for enterprise users; it is then necessary to consider how to achieve automatic cleaning of the filter cartridge surface and how to maintain the output capacity of the pump, which is particularly important for protecting the pump while guaranteeing its sustained output performance, which is a problem that needs to be solved for me enterprises.
Thus, a new foreline for a vacuum pump is needed.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a foreline for a vacuum pump, which solves the problems of how to automatically clean the surface of a filter element and how to maintain the continuous output capability of the pump in the prior art.
The invention provides the following technical scheme: the utility model provides a foreline for vacuum pump, the vacuum pump is by including pump case, drive box, leaf rotor, roller, gear and driving motor, wherein pump case and drive box fixed connection are in the same place, the inner wall of pump case is provided with two leaf rotors that mesh, two leaf rotor's axle center is all fixed the penetration by the roller, two rollers respectively with be located two engaged driving motor in the drive box inner chamber and fix the cup joint, wherein arbitrary the axle center of gear and the output shaft of driving motor go on fix the cup joint, the air inlet at pump case top is fixed the cup joint with the intake pipe, the top fixedly connected with of intake pipe changes the head, the left and right sides at change head top is the mirror image and is provided with two preceding shunts, clearance portion is installed to the bottom of preceding shunts, the gas outlet and the blast pipe of pump case bottom go on fix the cup joint, the left and right sides of blast pipe is the mirror image and is provided with two back shunts, install the controller on the outer wall that keeps away from drive box one end;
the front diversion part comprises a front-stage pipe, a first electromagnetic valve, a sealing ring, a filter screen and a limit frame, wherein the front-stage pipe is obliquely arranged at the top of the side wall of the conversion head, the first electromagnetic valve is fixedly arranged at the top end of the front-stage pipe, the sealing ring attached to the inner wall of the front-stage pipe is movably sleeved in the inner cavity of the front-stage pipe, the filter screen is fixedly arranged in the inner wall of the sealing ring, the surface of the filter screen is provided with a mesh for ventilation, the filter screen rebounds to the inside of the sealing ring when the filter screen is not subjected to external force, an opening for the sealing ring to pass through is formed in the wall body of the front-stage pipe, and the limit frame communicated with the opening is arranged on the outer wall of the front-stage pipe;
the front diversion part further comprises an electric push rod, a first fixing frame, an air flow sensor, an infrared emitter and an infrared receiver, wherein the electric push rod is fixedly installed on the outer wall of a front-stage pipe opposite to the limiting frame through the first fixing frame, the movable end of the electric push rod penetrates through the wall body of the front-stage pipe and is fixedly connected with the outer side wall of the sealing ring, the air flow sensor located below the sealing ring is arranged in the inner cavity of the front-stage pipe, and the infrared emitter and the infrared receiver are symmetrically arranged on the inner wall of the section, located between the sealing ring and the air flow sensor, of the front-stage pipe.
Further, the inside of spacing frame is provided with the cavity that is used for loading the sealing ring, and the through-hole with sealing ring and stripper plate surface diameter looks adaptation has been seted up at the middle part of spacing frame, spacing frame sets up to elastic material.
Further, the cleaning part comprises a pipe sleeve, a movable pipe, a second fixing frame, an extrusion plate and an ash guiding head, wherein the pipe sleeve is fixedly arranged at the bottom of the outer wall of the foreline through the second fixing frame, the movable pipe is movably sleeved in an inner cavity of the pipe sleeve, the top end of the movable pipe movably penetrates through the top of the pipe sleeve and is fixedly connected with the bottom surface of the extrusion plate, and the ash guiding head used for dredging meshes on the surface of the filter screen is arranged on the surface of the extrusion plate.
Further, capillary holes for exhausting are formed in the bottom surface of the pipe sleeve, and a pressure sensor is arranged on the surface of the extrusion plate.
Further, the back shunting part comprises a branch pipe, a second electromagnetic valve and a flow guiding hose, wherein the branch pipe is fixedly connected to the surface of the exhaust pipe, the second electromagnetic valve is fixedly arranged at the outer end of the branch pipe, and the outer end of the second electromagnetic valve is communicated with the bottom of the inner cavity of the pipe sleeve through the flow guiding hose.
Further, the aperture of the guide hose is larger than that of the capillary holes.
The invention has the technical effects and advantages that:
the invention monitors the protruding state of the filter screen and whether the air flow exists in the front stage pipe by arranging the left front flow dividing part, the right front flow dividing part, the cleaning part and the rear flow dividing part, thereby intelligently identifying and judging whether the surface of the filter screen needs cleaning, then regulating and controlling the flow path of the distributed air by the controller, controlling the expansion and contraction of the cleaning part by utilizing the air output by the vacuum pump, automatically cleaning the surface of the filter screen moving out of the pipe body, automatically resetting the system after the cleaning is finished, and circularly and alternately using the system, thereby realizing the automatic cleaning of the surface of the filter element and the continuous output performance of the maintenance pump.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the present invention.
Fig. 2 is a schematic view of the whole structure and a partial cross section of the present invention.
FIG. 3 is a schematic view of a front shunt portion structure and a partial cross section thereof according to the present invention.
Fig. 4 is a schematic diagram of the structure of fig. 3 a according to the present invention.
Fig. 5 is a schematic diagram of the structure of fig. 3B according to the present invention.
The reference numerals are: 1. a vacuum pump; 101. a pump housing; 102. a drive box; 103. a blade-shaped rotor; 104. a roll shaft; 105. a gear; 106. a driving motor; 2. an air inlet pipe; 3. a conversion head; 4. a front split section; 401. a foreline; 402. a first electromagnetic valve; 403. a seal ring; 404. a filter screen; 405. a limit frame; 406. an electric push rod; 407. a first fixing frame; 408. an air flow sensor; 409. an infrared emitter; 410. an infrared receiver; 5. a cleaning part; 501. a pipe sleeve; 502. a movable tube; 503. the second fixing frame; 504. an extrusion plate; 505. an ash guiding head; 6. an exhaust pipe; 7. a rear split flow section; 701. a branch pipe; 702. a second electromagnetic valve; 703. a guide hose; 8. and a controller.
Detailed Description
The embodiments of the present invention will be clearly and completely described below with reference to the drawings in the present invention, and the configurations of the structures described in the following embodiments are merely examples, and a foreline for a vacuum pump according to the present invention is not limited to the structures described in the following embodiments, and all other embodiments obtained by a person having ordinary skill in the art without making any inventive effort are within the scope of the present invention.
Referring to fig. 1-5, the invention provides a foreline for a vacuum pump, comprising a vacuum pump 1, wherein the vacuum pump 1 comprises a pump shell 101, a driving box 102, a blade-shaped rotor 103, a roll shaft 104, gears 105 and a driving motor 106, wherein the pump shell 101 and the driving box 102 are fixedly connected together, two meshed blade-shaped rotors 103 are arranged on the inner wall of the pump shell 101, the axes of the two blade-shaped rotors 103 are fixedly penetrated by the roll shaft 104, the two roll shafts 104 are fixedly sleeved with the two meshed driving motors 106 in the inner cavity of the driving box 102 respectively, and the axes of any one gear 105 is fixedly sleeved with the output shaft of the driving motor 106;
the air inlet at the top of the pump shell 101 is fixedly sleeved with the air inlet pipe 2, the top end of the air inlet pipe 2 is fixedly connected with the conversion head 3, the left side and the right side at the top of the conversion head 3 are provided with two front diversion parts 4 in a mirror image mode, the cleaning part 5 is installed at the bottom of the front diversion parts 4, the air outlet at the bottom of the pump shell 101 is fixedly sleeved with the air outlet pipe 6, the left side and the right side of the air outlet pipe 6 are provided with two rear diversion parts 7 in a mirror image mode, and the outer wall, far away from one end of the driving box 102, of the pump shell 101 is provided with the controller 8.
In this embodiment, it should be specifically described that the vacuum pump 1 is specifically configured as a roots vacuum pump, when in use, the driving motor 106 is started, and then the output shaft of the driving motor 106 drives one gear 105 connected with the driving motor to rotate, and then the two meshed gears 105 are reversely driven, so that the pair of the lobed rotors 103 synchronously reversely rotate, the gap between the two impellers is gradually reduced, the gas in the pump body is pumped into the gap between the lobed rotors 103, and after the gas enters the lobed rotors 103, the rotation of the lobed rotors 103 also drives the gas to rotate, so that the gas is compressed and discharged, and the rotation of the lobed rotors 103 discharges the gas to the outlet to form vacuum, so as to form circulating airflow.
Referring to fig. 2-5, the front shunt part 4 comprises a front stage pipe 401, a first electromagnetic valve 402, a sealing ring 403, a filter screen 404 and a limit frame 405, wherein the front stage pipe 401 is obliquely arranged at the top of the side wall of the conversion head 3, the top end of the front stage pipe 401 is fixedly provided with the first electromagnetic valve 402, the inner cavity of the front stage pipe 401 is movably sleeved with the sealing ring 403 attached to the inner wall of the front stage pipe, the inner wall of the sealing ring 403 is fixedly provided with the filter screen 404, the surface of the filter screen 404 is provided with a mesh for ventilation, when the filter screen 404 is not subjected to external force, the filter screen 404 rebounds to the inside of the sealing ring 403, an opening for the sealing ring 403 to pass through is formed in the wall body of the front stage pipe 401, and the limit frame 405 communicated with the opening is arranged on the outer wall of the front stage pipe 401; in addition, a cavity for loading the sealing ring 403 is arranged in the limiting frame 405, a through hole matched with the surface diameters of the sealing ring 403 and the extrusion plate 504 is formed in the middle of the limiting frame 405, and the limiting frame 405 is made of an elastic material;
the front diversion part 4 further comprises an electric push rod 406, a first fixing frame 407, an air flow sensor 408, an infrared emitter 409 and an infrared receiver 410, wherein the electric push rod 406 is fixedly arranged on the outer wall of the front-stage pipe 401 opposite to the limit frame 405 through the first fixing frame 407, the movable end of the electric push rod 406 penetrates through the wall body of the front-stage pipe 401 and is fixedly connected with the outer side wall of the sealing ring 403, the air flow sensor 408 positioned below the sealing ring 403 is arranged in the inner cavity of the front-stage pipe 401, and the infrared emitter 409 and the infrared receiver 410 are symmetrically arranged on the inner wall of the section of the front-stage pipe 401 positioned between the sealing ring 403 and the air flow sensor 408;
the cleaning part 5 comprises a pipe sleeve 501, a movable pipe 502, a second fixing frame 503, an extrusion plate 504 and an ash guiding head 505, wherein the pipe sleeve 501 is fixedly arranged at the bottom of the outer wall of the front-stage pipe 401 through the second fixing frame 503, the movable pipe 502 is movably sleeved in the inner cavity of the pipe sleeve 501, the top end of the movable pipe 502 movably penetrates through the top of the pipe sleeve 501 and is fixedly connected with the bottom surface of the extrusion plate 504, and the ash guiding head 505 used for dredging meshes on the surface of the filter screen 404 is arranged on the surface of the extrusion plate 504; in addition, capillary holes for exhausting are formed in the bottom surface of the pipe sleeve 501, and a pressure sensor is arranged on the surface of the extruding plate 504;
the rear diversion part 7 comprises a branch pipe 701, a second electromagnetic valve 702 and a diversion hose 703, wherein the branch pipe 701 is fixedly connected to the surface of the exhaust pipe 6, the second electromagnetic valve 702 is fixedly arranged at the outer end of the branch pipe 701, and the outer end of the second electromagnetic valve 702 is communicated with the bottom of the inner cavity of the pipe sleeve 501 through the diversion hose 703; in addition, the diameter of the guide hose 703 is larger than that of the capillary holes.
The invention automatically cleans the surface of the filter screen 404 arranged in the front pipeline:
s1, an air extraction stage: the outer ends of the front diversion parts 4 on the left side and the right side are connected with a container cavity, at the moment, the vacuum pump 1 only pumps air from the container cavity through the front diversion part 4 on the right side, the air flow sequentially passes through the front diversion part 4 on the right side, the conversion head 3 and the air inlet pipe 2 and then is led into the vacuum pump 1, under the continuous compression driving of the vacuum pump 1, the air is led into the exhaust pipe 6 connected with the vacuum pump 1 through the output end of the vacuum pump 1, and finally is discharged from the bottom port of the exhaust pipe 6;
s2, an airflow monitoring stage: along with the high-strength gas pumping of the vacuum pump 1, the particulate impurities carried in the gas are intercepted by the filter screen 404 in the inner cavity of the foreline 401, so that the ventilation property of the filter screen 404 is reduced, the suction attraction of the filter screen 404 by the vacuum pump 1 is gradually increased, and then the filter screen 404 is gradually raised along the gas flow direction;
s3, a judging stage of waiting to be cleaned: until the filter screen 404 protruding along the gas flow direction shields information communication between the infrared transmitters 409 and the infrared receivers 410 symmetrically arranged at two sides of the inner wall of the front-stage pipe 401, so that the infrared receivers 410 cannot receive infrared transmitting signals output by the infrared transmitters 409, and at the moment, the air flow sensor 408 detects that gas flows through the inner cavity of the front-stage pipe 401, at the moment, the infrared receivers 410 convey barrier information to the controller 8 and the air flow sensor 408 conveys air flow information to the controller 8, so that the controller 8 receives barrier information and air flow information at the same time, it is determined that ash removal is needed on the surface of the filter screen 404 at the moment, and then the front diversion parts 4 at the left side and the right side of the controller 8 convey control instructions respectively;
s4, driving and regulating stage: receiving control instructions output by the controller 8 through the front shunting parts 4 at the left side and the right side respectively, for specifically controlling the first electromagnetic valve 402 in the front shunting part 4 at the right side to close the valve, controlling the movable end of the electric push rod 406 to drive the sealing ring 403 connected with the valve and the filter screen 404 retracted on the inner wall of the sealing ring 403 to gradually pass through the side wall of the front-stage pipe 401 and move towards the inner cavity of the limiting frame 405 until the sealing ring 403 is aligned to the through hole in the middle part of the limiting frame 405, and simultaneously controlling the first electromagnetic valve 402 in the front shunting part 4 at the left side to open the valve, so that the vacuum pump 1 is switched into a mode of pumping the container chamber connected with the valve through the front shunting part 4 at the left side;
s5, cleaning: after judging that the surface of the filter screen 404 needs to be cleaned, the controller 8 also outputs a control instruction for the second electromagnetic valve 702 in the right rear shunt part 7, controls the second electromagnetic valve 702 to open a valve, and further controls the airflow entering from the left front shunt part 4 to sequentially flow through the conversion head 3, the air inlet pipe 2 and the vacuum pump 1, part of the airflow output from the vacuum pump 1 is converged into the guide hose 703 through the branch pipe 701 and the valve-opening second electromagnetic valve 702, is led into the inner cavity of the sleeve 501 through the guide hose 703, so that the pressure of the inner cavity of the branch pipe 701 is increased, the air pressure pushes the movable pipe 502 to gradually separate from the inner cavity of the sleeve 501 and move outwards, and the extrusion plate 504 and the ash guide head 505 connected with the outer end of the movable pipe 502 jointly move towards the surface of the sealing ring 403 positioned in the middle through hole of the limiting frame 405 until the ash guide head 505 is inserted into the surface mesh of the filter screen 404 on the inner wall of the sealing ring 403, and the surface mesh of the filter screen 404 is dredged;
s6, resetting: after the extrusion of the extrusion plate 504 is detected by the pressure sensor arranged on the edge of the bottom surface of the sealing ring 403, it is judged that the dredging and cleaning process is finished at the moment, then the controller 8 receives pressure information transmitted by the pressure sensor and then outputs a reset instruction to the front diversion part 4 and the rear diversion part 7 on the right side, then the movable end of the electric push rod 406 in the front diversion part 4 on the right side is controlled to drive the sealing ring 403 and the filter screen 404 to retract into the inner cavity of the front-stage pipe 401, and the second electromagnetic valve 702 in the rear diversion part 7 on the right side is controlled to close the valve, at the moment, the capillary holes on the bottom surface of the pipe sleeve 501 decompress gas reserved between the pipe sleeve 501 and the movable pipe 502, so that the movable pipe 502, the extrusion plate 504 and the ash guiding head 505 retract to the side of the pipe sleeve 501 to an initial state;
s7, when the filter screen 404 in the left front diversion part 4 needs to be cleaned, executing the operation and control process with the same step principle in the S1-S6 process taking the left front diversion part 4 and the rear diversion part 7 as main bodies, so that the vacuum pump 1 is switched to a mode of exhausting the container chamber connected with the front diversion part 4 through the right front diversion part again;
s8, executing the cyclic control process of S1-S7 so as to automatically clean the surface of the filter element and maintain the continuous output capacity of the pump body.
The above is only one preferred specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art will be within the technical scope of the present invention; equivalent substitutions or modifications are made according to the technical plan of the present invention and its modified idea, which should be included under the protection of the present invention.
Claims (6)
1. Foreline for vacuum pump, vacuum pump (1) is by including pump case (101), drive box (102), lobe rotor (103), roller (104), gear (105) and driving motor (106), wherein pump case (101) and drive box (102) fixed connection together, the inner wall of pump case (101) is provided with two lobe rotors (103) that mesh mutually, two the axle center of lobe rotor (103) is all fixed the run through by roller (104), and two roller (104) are fixed with two driving motor (106) that mesh mutually that are arranged in the inner chamber of drive box (102) respectively and are cup jointed, and wherein arbitrary the axle center of gear (105) is fixed cup joint with the output shaft of driving motor (106), its characterized in that: the air inlet at the top of the pump shell (101) is fixedly sleeved with the air inlet pipe (2), the top end of the air inlet pipe (2) is fixedly connected with the conversion head (3), two front diversion parts (4) are arranged on the left side and the right side of the top of the conversion head (3) in a mirror image mode, a cleaning part (5) is arranged at the bottom of the front diversion parts (4), an air outlet at the bottom of the pump shell (101) is fixedly sleeved with the exhaust pipe (6), two rear diversion parts (7) are arranged on the left side and the right side of the exhaust pipe (6) in a mirror image mode, and a controller (8) is arranged on the outer wall, far away from one end of the driving box (102), of the pump shell (101);
the front flow dividing part (4) comprises a front-stage pipe (401), a first electromagnetic valve (402), a sealing ring (403), a filter screen (404) and a limiting frame (405), wherein the front-stage pipe (401) is obliquely arranged at the top of the side wall of the conversion head (3), the first electromagnetic valve (402) is fixedly arranged at the top end of the front-stage pipe (401), the sealing ring (403) attached to the inner wall of the front-stage pipe (401) is movably sleeved in the inner cavity of the front-stage pipe, the filter screen (404) is fixedly arranged in the inner wall of the sealing ring (403), the surface of the filter screen (404) is provided with a mesh for ventilation, the filter screen (404) rebounds to the inside of the sealing ring (403) when the filter screen (404) is not subjected to external force, an opening through which the sealing ring (403) passes is formed in the wall body of the front-stage pipe (401), and the limiting frame (405) communicated with the opening is arranged on the outer wall of the front-stage pipe (401).
The front flow dividing part (4) further comprises an electric push rod (406), a first fixing frame (407), an air flow sensor (408), an infrared emitter (409) and an infrared receiver (410), wherein the electric push rod (406) is fixedly arranged on the outer wall of a front-stage pipe (401) opposite to the limiting frame (405) through the first fixing frame (407), the movable end of the electric push rod (406) penetrates through the wall body of the front-stage pipe (401) and is fixedly connected with the outer side wall of the sealing ring (403), the air flow sensor (408) located below the sealing ring (403) is arranged in the inner cavity of the front-stage pipe (401), and the infrared emitter (409) and the infrared receiver (410) are symmetrically arranged on the inner wall of the section between the sealing ring (403) and the air flow sensor (408).
2. A foreline for a vacuum pump according to claim 1, wherein: the inside of spacing frame (405) is provided with the cavity that is used for loading sealing ring (403), and the through-hole with sealing ring (403) and stripper plate (504) surface diameter looks adaptation is seted up at the middle part of spacing frame (405), spacing frame (405) set up to elastic material.
3. A foreline for a vacuum pump according to claim 1, wherein: cleaning part (5) are including pipe box (501), movable pipe (502), second mount (503), stripper plate (504) and ash guiding head (505), wherein pipe box (501) are through the bottom of second mount (503) fixed mounting at preceding pipe (401) outer wall, movable pipe (502) have been cup jointed in the inner chamber of pipe box (501) activity, the top activity of movable pipe (502) runs through the top of pipe box (501) and carries out fixed connection with the bottom surface of stripper plate (504), the surface of stripper plate (504) is provided with ash guiding head (505) that are used for dredging filter screen (404) surface mesh.
4. A foreline for a vacuum pump according to claim 3, wherein: capillary holes for exhausting are formed in the bottom surface of the pipe sleeve (501), and a pressure sensor is arranged on the surface of the extrusion plate (504).
5. A foreline for a vacuum pump according to claim 1, wherein: the rear flow dividing part (7) comprises a branch pipe (701), a second electromagnetic valve (702) and a flow guide hose (703), wherein the branch pipe (701) is fixedly connected to the surface of the exhaust pipe (6), the second electromagnetic valve (702) is fixedly arranged at the outer end of the branch pipe (701), and the outer end of the second electromagnetic valve (702) is communicated with the bottom of an inner cavity of the pipe sleeve (501) through the flow guide hose (703).
6. A foreline for a vacuum pump as set forth in claim 5, wherein: the aperture of the guide hose (703) is larger than the aperture of the capillary holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311445474.2A CN117167283B (en) | 2023-11-02 | 2023-11-02 | Foreline for vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311445474.2A CN117167283B (en) | 2023-11-02 | 2023-11-02 | Foreline for vacuum pump |
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| Publication Number | Publication Date |
|---|---|
| CN117167283A true CN117167283A (en) | 2023-12-05 |
| CN117167283B CN117167283B (en) | 2024-02-13 |
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| CN202311445474.2A Active CN117167283B (en) | 2023-11-02 | 2023-11-02 | Foreline for vacuum pump |
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