CN117153724A - Method and device for managing bearing device, electronic equipment and storage medium - Google Patents
Method and device for managing bearing device, electronic equipment and storage medium Download PDFInfo
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- 238000003860 storage Methods 0.000 title claims abstract description 74
- 238000001514 detection method Methods 0.000 claims abstract description 45
- 238000012795 verification Methods 0.000 claims abstract description 12
- 238000007726 management method Methods 0.000 claims description 128
- 230000008569 process Effects 0.000 claims description 41
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- 238000004590 computer program Methods 0.000 claims description 16
- 230000002159 abnormal effect Effects 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 238000005516 engineering process Methods 0.000 claims description 11
- 230000001186 cumulative effect Effects 0.000 claims 3
- 230000000694 effects Effects 0.000 abstract description 7
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- 239000004065 semiconductor Substances 0.000 description 14
- 238000009792 diffusion process Methods 0.000 description 10
- 230000000007 visual effect Effects 0.000 description 9
- 238000004891 communication Methods 0.000 description 8
- 238000012423 maintenance Methods 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
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- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
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- 238000005229 chemical vapour deposition Methods 0.000 description 1
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K17/00—Methods or arrangements for effecting co-operative working between equipments covered by two or more of main groups G06K1/00 - G06K15/00, e.g. automatic card files incorporating conveying and reading operations
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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Abstract
The invention discloses a method and a device for managing a bearing device, electronic equipment and a storage medium. The method comprises the following steps: acquiring current management data corresponding to the bearing device; performing condition verification on the current management data to obtain a device detection result; when the detection result of the device is detected to be a preset result, determining the current state of the bearing device; wherein the current state comprises a temporary storage state or a boat-out state; and determining the current position of the bearing device based on the current state so as to maintain and manage the bearing device based on the current position. The problem of among the prior art artificial judgement bearing device need maintain the management, lead to management cost high, the effect is poor is solved, realizes in the reduction management cost, improves management efficiency, in time accurate prediction bearing device's life, reaches the technical effect that improves bearing device's life.
Description
Technical Field
The present invention relates to the field of semiconductor processing technologies, and in particular, to a method and an apparatus for managing a carrier device, an electronic device, and a storage medium.
Background
At present, in the stages of semiconductor research and development or production, a carrier device (such as a boat) is generally used to load the semiconductor wafers for processing (such as a boron diffusion process, a phosphorus diffusion process and chemical vapor deposition), in this process, certain damage is caused to the carrier device along with multiple uses of the carrier device, the carrier device reaches a maintenance limit and is damaged during use, and the damage to the carrier device in the process also causes damage to the semiconductor wafers, which affects the processing efficiency and the production cost, so that the management of the carrier device is a technical problem to be solved.
In the prior art, the management of the carrying device is generally to judge whether the carrying device is damaged or not by manually recording the service condition of the carrying device according to the appearance condition of the carrying device or whether replacement cleaning is needed or not. The management mode has the problems of high management cost and incapability of timely maintaining and managing the bearing device.
Disclosure of Invention
The invention provides a method, a device, electronic equipment and a storage medium for managing a bearing device, so that the service life of the bearing device is predicted timely and accurately while management cost is reduced and management efficiency is improved, and the technical effect of improving the service life of the bearing device is achieved.
According to an aspect of the present invention, there is provided a method of managing a load-bearing apparatus, the method comprising:
acquiring current management data corresponding to the bearing device;
performing condition verification on the current management data to obtain a device detection result;
when the detection result of the device is detected to be a preset result, determining the current state of the bearing device; wherein the current state comprises a temporary storage state or a boat-out state;
and determining the current position of the bearing device based on the current state so as to maintain and manage the bearing device based on the current position.
According to another aspect of the present invention, there is provided a management device for a load-bearing device, the device comprising:
the data acquisition module is used for acquiring current management data corresponding to the bearing device;
the detection result determining module is used for performing condition verification on the current management data to obtain a device detection result;
the current state determining module is used for determining the current state of the bearing device when the detection result of the device is detected to be a preset result; wherein the current state comprises a temporary storage state or a boat-out state;
and the current position determining module is used for determining the current position of the bearing device based on the current state so as to maintain and manage the bearing device based on the current position.
According to another aspect of the present invention, there is provided an electronic apparatus including:
at least one processor; and
a memory communicatively coupled to the at least one processor; wherein,
the memory stores a computer program executable by the at least one processor to enable the at least one processor to perform the method of managing a load bearing apparatus according to any one of the embodiments of the present invention.
According to another aspect of the present invention, there is provided a computer readable storage medium storing computer instructions for causing a processor to implement the method for managing a carrier according to any one of the embodiments of the present invention when executed.
According to the technical scheme, the current management data corresponding to the bearing device is obtained; performing condition verification on the current management data to obtain a device detection result; when the detection result of the device is detected to be a preset result, determining the current state of the bearing device; wherein the current state comprises a temporary storage state or a boat-out state; the method comprises the steps of determining the current position of the bearing device based on the current state, maintaining and managing the bearing device based on the current position, manually judging whether the bearing device needs to be maintained and managed in the prior art, and accordingly, high management cost and poor effect are achieved.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the invention or to delineate the scope of the invention. Other features of the present invention will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a flowchart of a method for managing a carrier according to a first embodiment of the present invention;
fig. 2 is a schematic structural diagram of a management device for a carrying device according to a third embodiment of the present invention;
fig. 3 is a schematic structural diagram of an electronic device implementing a method for managing a carrier according to an embodiment of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Example 1
Fig. 1 is a flowchart of a method for managing a carrier according to a first embodiment of the present invention, where the method may be performed by a device for managing a carrier, the device for managing a carrier may be implemented in hardware and/or software, and the device for managing a carrier may be configured in a computing device. As shown in fig. 1, the method includes:
S110, acquiring current management data corresponding to the bearing device.
The carrier means may be a means for carrying a semiconductor, such as a silicon wafer, such as a boat. The management data is related to the carrying device, and may be, for example, a device number, a temporary storage location, a number of times of use, a carrying body, a use, and the like.
In this embodiment, when a change in management data corresponding to the bearer device is detected, the management data corresponding to the bearer device may be acquired as current management data. Or, when detecting that the data of the preset management item in the management data corresponding to the bearing device changes, the management data corresponding to the bearing device may be obtained. Or, when detecting that the management data corresponding to the bearing device or the data of the preset management item changes, the method can acquire the changed data corresponding to the bearing device as the current management data. To determine the manner of management of the load bearing apparatus by the current management data.
In order to improve the management efficiency and convenience of the carrying device, when the management data of the carrying device is managed, the information of the carrying device may be acquired, and the information may be collected, stored, processed, and the like for use.
In this embodiment, the management method further includes: determining device identification information of the bearing device; determining association information associated with the carrier based on the device identification information; and updating the information management record corresponding to the bearing device based on the association information.
The device identification information may be represented in the form of a bar code, a two-dimensional code, a graphic, a character, or the like. The association information includes device identification information, lot number, and date of manufacture. The device identification information may be used to characterize the uniqueness of the carrier device. The information management record is used for recording management data of the bearing device.
In practical application, device identification information of the bearing device is identified by a method such as manual or visual detection, and associated information associated with the bearing device in the device identification information is obtained. The associated information may be updated (e.g., added or replaced) to the information management record corresponding to the carrier. The batch number and the serial number of the device can be identified on the bearing device by an etching technology, then the quality condition of the bearing device can be detected by a manual or visual detection method, and if the quality is qualified, the batch number, the serial number, the production date and the like of the bearing device are automatically recorded.
In this embodiment, the current management data includes accumulated number of times of boat output, and the management method further includes: when detecting that the carrying device carries out a temporary storage position corresponding to the carrying device, updating the accumulated number of times of boat output in the information management record; acquiring current management data corresponding to the bearing device, including: and acquiring the accumulated number of boat-out times corresponding to the bearing device from the information management record.
In practical application, the carrying device can be temporarily stored in the temporary storage position without using the carrying device, and the temporary storage position area can be provided with a sensor and the like, so that whether the carrying device enters the temporary storage position or not and whether the carrying device is transported out of the temporary storage position or not can be detected by the sensor. For example, when the carrier device enters the temporary storage location area, the visual sensor may be used to identify the device identification information of the carrier device, and the device identification information and the temporary storage location (i.e., the current temporary storage location) may be associated and stored into the information management record. If there is a history temporary location associated with the device identification information in the information management record and the history temporary location is inconsistent with the current temporary location, the history temporary location may be updated to the current temporary location. When the carrier device is transported out of the temporary storage location area, the accumulated number of boat-out times associated with the device identification information can be found from the information management record through the device identification information of the carrier device and updated, for example, one is added on the basis of the original accumulated number of boat-out times. Correspondingly, in the process of acquiring the accumulated number of boat-out times in the current management data corresponding to the bearing device, the accumulated number of boat-out times corresponding to the bearing device can be acquired from the information management record, and the accumulated number of boat-out times at the moment is the latest recorded number of boat-out times, so that whether the bearing device needs to be managed or not can be judged through the accumulated number of boat-out times. The advantages of this mode arrangement are that: the temporary storage area information is associated with the device identification information by identifying the device identification information of the bearing device, so that the storage position area of the bearing device can be quickly and conveniently searched through the device identification information.
In this embodiment, the current management data includes the accumulated process times; the management method further comprises the following steps: when the bearing device is detected to enter a processing technology, updating the accumulated technology times in the information management record; the obtaining current management data corresponding to the bearing device comprises the following steps: and acquiring the accumulated process times corresponding to the bearing device from the information management record.
In a practical scenario, during a semiconductor processing process, the semiconductor is typically placed on a carrier device, and the carrier device carrying the semiconductor is transported to a corresponding processing apparatus (e.g., a boron diffusion furnace) for processing. In this way, the carrying device may be damaged to some extent after the processes are performed synchronously, which reduces the service life of the carrying device. For example, the carrier may be involved in the process by entering the furnace with the semiconductor during the process, or white dust may be generated during the transport of the semiconductor, thereby causing the carrier to be contaminated. In order to reduce the technological influence of semiconductors, the bearing device can be replaced, the service life of the bearing device can be prolonged, the bearing device can be cleaned, the damage condition of the bearing device can be predicted in advance by counting the times of entering the processing technology of the bearing device, and the equipment can be accurately used, regularly maintained and maintained according to the predicted damage condition and time effectively.
In practical application, the object on the carrying device is recorded when the object passes through the processing technology, and when the object is detected to enter the processing technology, the carrying device is considered to be detected to enter the processing technology, and at the moment, the accumulated process times in the information management record can be increased by one. Alternatively, the carrier device may be identified by a visual sensor at the processing step, and after identification information of the carrier device is identified, the number of steps associated with the identification information in the information management record may be increased by one from the original record. Based on the above, the accumulated process times corresponding to the carrying device are obtained from the information management record, and the accumulated process times at this time are the latest recorded times, so as to judge whether the carrying device needs to be managed or not through the accumulated process times.
When the carrier device is put into the process flow of boron diffusion, the vision sensor detects that the carrier device is transported out of the temporary storage area, the information is sent to the system, the system automatically records that the carrier device is transported out of the boat once, the accumulated number of times of transporting out the boat is updated, and the accumulated number of times of transporting out the boat and the area information are associated with the information such as batch number, number and the like of the carrier device. And after the bearing device enters the diffusion furnace, performing a boron diffusion process, and simultaneously recording the process times of the bearing device.
In this embodiment, the current management data includes accumulated transportation times, and the management method further includes: when the device identification information of the bearing device is identified at a preset carrying position, updating the accumulated transportation times associated with the device identification information in the information management record; acquiring current management data corresponding to the bearing device, including: the accumulated number of transportation times corresponding to the carrying device is obtained from the information management record.
In practical application, when bearing device is the boat, can utilize oar auxiliary boat to transport, the oar can exist when being in non-operating condition, and the oar can be with boat transport to the technology stove when being in operating condition to the temporary storage that can exist to put the oar. Based on this, a plurality of transfer positions corresponding to the process furnaces may be set in advance, and when it is detected that the paddle transfers the boat to the transfer position, it is considered that the paddle is about to transfer the boat to the process furnace. The device identification information such as the lot number, etc. of the boat may be identified from the preset conveyance position by a manual or visual sensor, thereby updating the accumulated number of shipments associated with the device identification information of the boat in the information management record, such as the number of shipments count plus one. Further, the accumulated number of transportation corresponding to the carrying device is obtained from the information management record, and the accumulated number of transportation at this time is the number of the latest record, so as to judge whether the carrying device needs to be managed or not through the accumulated number of transportation.
S120, performing condition verification on the current management data to obtain a device detection result.
In practical application, the preset data detection conditions can be utilized to perform condition verification on the current management data, and whether the current management data is in a reasonable requirement or not is judged, so that a device detection result of the bearing device is obtained.
Optionally, the implementation manner of performing condition verification on the current management data to obtain the device detection result may be: and determining that the detection result of the device is a preset result when at least one condition that the accumulated boat-out times in the current management data are larger than a preset first threshold value, the accumulated process times in the current management data are larger than a preset second threshold value and the accumulated transportation times in the current management data are larger than a preset third threshold value is detected.
The determining mode of presetting the first threshold value, presetting the second threshold value and presetting the third threshold value can be obtained by processing historical data through a mean value algorithm or a discrete function through statistics historical data, such as the damage time, the polluted time and the like of a record boat; or the setting can be performed by staff according to the actual working condition. The preset result may be abnormal, and the abnormal device detection result represents that the bearing device has a certain damage.
In this embodiment, the accumulated number of boat-out times in the current management data may be compared with a preset first threshold, and if the accumulated number of boat-out times is greater than the preset first threshold, it may be indicated that the number of times of use of the carrying device is excessive, there is a certain damage, and the device detection result may be confirmed as abnormal. The accumulated process times in the current management data and the preset second threshold value can be compared, if the accumulated process times are larger than the preset second threshold value, the fact that the carrying device is subjected to high-temperature treatment for too many times is indicated, certain damage exists, and the device detection result can be confirmed to be abnormal. The accumulated transportation times in the current management data and the preset third threshold value can be compared, if the accumulated transportation times are larger than the preset third threshold value, the fact that the transportation times of the bearing device are too large can be indicated, and the device detection result can be confirmed to be abnormal. When the detection result of the device is abnormal, the bearing device is managed in time.
For example, whether the accumulated number of transportation times is greater than a preset third threshold may be detected, and if so, an abnormal device detection result may be generated to prompt that the carrier device has entered a lifetime exhaustion stage based on the abnormal detection result, and prompt a technician to replace the carrier device. The method can also detect the accumulated process times of the bearing device, judge whether the accumulated process times are larger than a preset second threshold value, if so, prompt the bearing device to enter a life exhaustion stage, prompt a technician to replace or find the bearing device for cleaning and maintenance, so as to improve the service life of the bearing device.
S130, when the detection result of the device is detected to be a preset result, determining the current state of the bearing device.
The current state comprises a temporary storage state or a boat-out state.
It should be noted that, the current state of the carrying device may also be recorded in the information recording table, and the current state of the carrying device may be updated to be a temporary storage state when the carrying device is detected to enter the temporary storage position area; when the carrying device is detected to be carried out of the temporary storage position, updating the current state of the carrying device to be a boat-out state; the current state of the carrier device can also be updated to the maintenance state when the carrier device is detected to be in the maintenance state. The technical effect of monitoring the current state of the bearing device is achieved.
In practical application, when the detection result of the device is detected to be an abnormal result, the current state corresponding to the bearing device in the information record table can be queried. Or, when the detection result of the device is an abnormal result, generating abnormal prompt information corresponding to the bearing device, and feeding back the abnormal prompt information to the user, so that a worker can check whether the current state of the bearing device is in a temporary storage state or a boat-out state through inquiring the information record table.
And S140, determining the current position of the bearing device based on the current state so as to maintain and manage the bearing device based on the current position.
In this embodiment, the current position of the carrying device may be determined by the current state of the carrying device. For example, if the current state is a temporary storage state, the position of the area where the carrying device is not transported out of temporary storage is indicated, and the position can be used as the current position; if the current state is the ship-out state, the position of the area where the carrying device is transported out of temporary storage is indicated, and the carrying device is in a working state, the current position of the carrying device can be determined by searching the process equipment where the carrying device is located, and the current position of the semiconductor arranged on the carrying device can also be determined by searching the position of the semiconductor arranged on the carrying device. Wherein, the maintenance management of the bearing device comprises cleaning, replacing, repairing and the like of the bearing device.
In particular, the implementation of determining the current position of the carrier based on the current state may be: if the current state is a temporary storage state, temporary storage position information corresponding to the bearing device is obtained from the information management record, and the current position is determined based on the temporary storage position information; or if the current state is the boat-out state, acquiring the current service equipment corresponding to the bearing device from the information management record, and determining the current position based on the equipment position information of the current service equipment.
For example, it may be determined whether the current state is in a temporary storage or a ship-out state, and if so, the carrier is found by acquiring temporary storage position information corresponding to the carrier from the information management record and by the temporary storage position information; if the device is in the boat-out state, the host information corresponding to the bearing device can be used for finding out which service equipment (such as which diffusion furnace) the bearing device is in use, so that the current position of the bearing device is determined through the equipment position information of the service equipment, and the bearing device is found out from the current position to replace the bearing device.
According to the technical scheme, current management data corresponding to the bearing device is obtained; performing condition verification on the current management data to obtain a device detection result; when the detection result of the device is detected to be a preset result, determining the current state of the bearing device; wherein the current state comprises a temporary storage state or a boat-out state; the method comprises the steps of determining the current position of the bearing device based on the current state, maintaining and managing the bearing device based on the current position, manually judging whether the bearing device needs to be maintained and managed in the prior art, and accordingly, high management cost and poor effect are achieved.
Example two
As an alternative embodiment of the foregoing embodiment, a specific application scenario example is given to make the technical solution of the embodiment of the present invention further clear to those skilled in the art. In particular, reference may be made to the following details.
By way of example, the technical solution provided in this embodiment may predict the life of the boat according to a preset or statistical cycle management rule by recording information such as the production lot number, production date, number of use (including the number of transportation, the number of processes entering the diffusion furnace, and the number of boat discharge), temporary storage area, and corresponding host number of the boat (i.e., carrying device), thereby reminding an operator to replace the boat and further avoiding the problem of damaging the silicon wafer due to the damage of the boat. The specific implementation mode of the method can be as follows:
after a new batch of boats is produced, the batch number and the serial number of the boats can be identified on the boats by etching, then the quality condition of the boats is detected by manual or visual detection and other methods, and if the quality is qualified, the related information of the batch number and the serial number of the boats, the production time and the like, which are related to the boats, is automatically recorded.
Further, after the boat detection is completed, a temporary storage area of the boat can temporarily exist, and the temporary storage area is provided with a visual sensor for identifying the related information of the boat. The association information and temporary region information (i.e., temporary locations) corresponding to the boat are sent to the system. The system correlates the temporary storage area information with the boat correlation information and records the current state of the boat, and temporarily stores or is in the boat-out state. The storage area and the current state of the boat can be quickly and conveniently found through the associated information. When the boat is put into the process flow of boron diffusion, the visual sensor detects that the boat is transported out of the temporary storage area, the transportation information is sent to the system, the system automatically records that the boat is transported out once, the current state is updated into the boat-out state, and the number of times of the boat is transported out, the current state and the area information are associated with the association information of the boat. When the boat is transported by the paddle, the number of times the boat is transported may be recorded and the number of times of transportation may be correlated with the record of the boat.
Further, it may be detected whether the number of shipments is greater than a preset third threshold, and if so, the boat may be prompted to enter a life exhaustion stage, prompting a technician to replace the boat. The process times of the boat can be detected, whether the process times are larger than a preset second threshold value is judged, if so, the boat is prompted to enter a life exhaustion stage, and technicians are prompted to replace the boat.
A worker can check whether the current state of the boat is in a temporary storage or a boat discharge state according to the number and the production batch corresponding to the boat, and if the current state is in the temporary storage, the worker can find the boat at the position of the temporary storage area for replacement according to the storage information corresponding to the boat; if the boat is in the boat-out state, the host computer corresponding to the boat can be found out to be used by the host computer corresponding to the boat, so that replacement and cleaning are performed, and the service life of the boat is prolonged.
According to the technical scheme, the production batch number, the production date and the use times (including the transportation times and the process times of entering the diffusion furnace) of the boat, the temporary storage area, the corresponding host machine number and other management information are managed, and the life of the boat is predicted through a preset or statistical periodic management rule, so that a person is reminded of replacing the boat, and further the bearing object damage of the boat caused by the boat damage is avoided.
Example III
Fig. 2 is a schematic structural diagram of a management device for a carrying device according to a third embodiment of the present invention. As shown in fig. 2, the apparatus includes: a data acquisition module 210, a detection result determination module 220, a current state determination module 230, and a current location determination module 240.
The data obtaining module 210 is configured to obtain current management data corresponding to the carrier; the detection result determining module 220 is configured to perform condition verification on the current management data to obtain a device detection result; the current state determining module 230 is configured to determine a current state of the load-bearing device when the device detection result is detected to be a preset result; wherein the current state comprises a temporary storage state or a boat-out state; the current position determining module 240 is configured to determine a current position of the carrier device based on the current state, so as to perform maintenance management on the carrier device based on the current position.
According to the technical scheme, current management data corresponding to the bearing device is obtained; performing condition verification on the current management data to obtain a device detection result; when the detection result of the device is detected to be a preset result, determining the current state of the bearing device; wherein the current state comprises a temporary storage state or a boat-out state; the method comprises the steps of determining the current position of the bearing device based on the current state, maintaining and managing the bearing device based on the current position, manually judging whether the bearing device needs to be maintained and managed in the prior art, and accordingly, high management cost and poor effect are achieved.
On the basis of the device, optionally, the device comprises a recording module, wherein the recording module comprises an identification information determining unit, an association information determining unit and a recording unit.
An identification information determining unit configured to determine device identification information of the carrier device;
an association information determining unit configured to determine association information associated with the carrier based on the device identification information; wherein the association information includes device identification information, lot number, and production date;
and the recording unit is used for updating the information management record corresponding to the bearing device based on the association information.
On the basis of the device, optionally, the current management data comprises accumulated number of times of boat discharge, and the device comprises a number of times of boat discharge updating module.
The boat-out number updating module is used for updating the accumulated boat-out number in the information management record when detecting that the bearing device is transported out of the temporary storage position corresponding to the bearing device;
and the data acquisition module 210 is configured to acquire the accumulated number of boat-out times corresponding to the carrying device from the information management record.
On the basis of the device, optionally, the current management data comprises accumulated process times, and the device comprises a process times updating module.
The process frequency updating module is used for updating the accumulated process frequency in the information management record when the bearing device is detected to enter a processing process;
the data obtaining module 210 is configured to obtain the accumulated process times corresponding to the carrying device from the information management record.
Optionally, the device is further provided with a current management data, wherein the current management data comprises accumulated transportation times, and the device comprises a transportation times updating module.
The transportation times updating module is used for updating the accumulated transportation times in the information management record when detecting that the auxiliary transportation piece in the bearing device is changed from the non-working state to the working state;
and the data acquisition module 210 is configured to acquire the accumulated number of transportation corresponding to the carrying device from the information management record.
On the basis of the above device, optionally, the detection result determining module 220 is specifically configured to determine that the detection result of the device is a preset result when at least one condition that the number of times of the accumulated boat in the current management data is greater than a preset first threshold, the number of times of the accumulated process in the current management data is greater than a preset second threshold, and the number of times of the accumulated transportation in the current management data is greater than a preset third threshold is detected; wherein the preset result is abnormal.
On the basis of the above device, optionally, the current position determining module 240 is specifically configured to obtain temporary storage position information corresponding to the carrier device from the information management record if the current state is a temporary storage state, and determine the current position based on the temporary storage position information; or if the current state is the ship-out state, acquiring current service equipment corresponding to the bearing device from the information management record, and determining the current position based on the equipment position information of the current service equipment.
The device for managing the bearing device provided by the embodiment of the invention can execute the method for managing the bearing device provided by any embodiment of the invention, and has the corresponding functional modules and beneficial effects of the executing method.
Example IV
Fig. 3 shows a schematic diagram of the structure of an electronic device 10 that may be used to implement an embodiment of the invention. Electronic devices are intended to represent various forms of digital computers, such as laptops, desktops, workstations, personal digital assistants, servers, blade servers, mainframes, and other appropriate computers. Electronic equipment may also represent various forms of mobile devices, such as personal digital processing, cellular telephones, smartphones, wearable devices (e.g., helmets, glasses, watches, etc.), and other similar computing devices. The components shown herein, their connections and relationships, and their functions, are meant to be exemplary only, and are not meant to limit implementations of the inventions described and/or claimed herein.
As shown in fig. 3, the electronic device 10 includes at least one processor 11, and a memory, such as a Read Only Memory (ROM) 12, a Random Access Memory (RAM) 13, etc., communicatively connected to the at least one processor 11, in which the memory stores a computer program executable by the at least one processor, and the processor 11 may perform various appropriate actions and processes according to the computer program stored in the Read Only Memory (ROM) 12 or the computer program loaded from the storage unit 18 into the Random Access Memory (RAM) 13. In the RAM 13, various programs and data required for the operation of the electronic device 10 may also be stored. The processor 11, the ROM 12 and the RAM 13 are connected to each other via a bus 14. An input/output (I/O) interface 15 is also connected to bus 14.
Various components in the electronic device 10 are connected to the I/O interface 15, including: an input unit 16 such as a keyboard, a mouse, etc.; an output unit 17 such as various types of displays, speakers, and the like; a storage unit 18 such as a magnetic disk, an optical disk, or the like; and a communication unit 19 such as a network card, modem, wireless communication transceiver, etc. The communication unit 19 allows the electronic device 10 to exchange information/data with other devices via a computer network, such as the internet, and/or various telecommunication networks.
The processor 11 may be a variety of general and/or special purpose processing components having processing and computing capabilities. Some examples of processor 11 include, but are not limited to, a Central Processing Unit (CPU), a Graphics Processing Unit (GPU), various specialized Artificial Intelligence (AI) computing chips, various processors running machine learning model algorithms, digital Signal Processors (DSPs), and any suitable processor, controller, microcontroller, etc. The processor 11 performs the respective methods and processes described above, for example, a management method for the bearer.
In some embodiments, the method of managing a carrier may be implemented as a computer program tangibly embodied on a computer-readable storage medium, such as the storage unit 18. In some embodiments, part or all of the computer program may be loaded and/or installed onto the electronic device 10 via the ROM 12 and/or the communication unit 19. When the computer program is loaded into the RAM 13 and executed by the processor 11, one or more steps of the above-described method of managing a carrier may be performed. Alternatively, in other embodiments, the processor 11 may be configured to perform the method of managing the carrying device in any other suitable way (e.g. by means of firmware).
Various implementations of the systems and techniques described here above may be implemented in digital electronic circuitry, integrated circuit systems, field Programmable Gate Arrays (FPGAs), application Specific Integrated Circuits (ASICs), application Specific Standard Products (ASSPs), systems On Chip (SOCs), load programmable logic devices (CPLDs), computer hardware, firmware, software, and/or combinations thereof. These various embodiments may include: implemented in one or more computer programs, the one or more computer programs may be executed and/or interpreted on a programmable system including at least one programmable processor, which may be a special purpose or general-purpose programmable processor, that may receive data and instructions from, and transmit data and instructions to, a storage system, at least one input device, and at least one output device.
A computer program for carrying out methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus, such that the computer programs, when executed by the processor, cause the functions/acts specified in the flowchart and/or block diagram block or blocks to be implemented. The computer program may execute entirely on the machine, partly on the machine, as a stand-alone software package, partly on the machine and partly on a remote machine or entirely on the remote machine or server.
In the context of the present invention, a computer-readable storage medium may be a tangible medium that can contain, or store a computer program for use by or in connection with an instruction execution system, apparatus, or device. The computer readable storage medium may include, but is not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any suitable combination of the foregoing. Alternatively, the computer readable storage medium may be a machine readable signal medium. More specific examples of a machine-readable storage medium would include an electrical connection based on one or more wires, a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.
To provide for interaction with a user, the systems and techniques described here can be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to a user; and a keyboard and a pointing device (e.g., a mouse or a trackball) through which a user can provide input to the electronic device. Other kinds of devices may also be used to provide for interaction with a user; for example, feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form, including acoustic input, speech input, or tactile input.
The systems and techniques described here can be implemented in a computing system that includes a background component (e.g., as a data server), or that includes a middleware component (e.g., an application server), or that includes a front-end component (e.g., a user computer having a graphical user interface or a web browser through which a user can interact with an implementation of the systems and techniques described here), or any combination of such background, middleware, or front-end components. The components of the system can be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: local Area Networks (LANs), wide Area Networks (WANs), blockchain networks, and the internet.
The computing system may include clients and servers. The client and server are typically remote from each other and typically interact through a communication network. The relationship of client and server arises by virtue of computer programs running on the respective computers and having a client-server relationship to each other. The server can be a cloud server, also called a cloud computing server or a cloud host, and is a host product in a cloud computing service system, so that the defects of high management difficulty and weak service expansibility in the traditional physical hosts and VPS service are overcome.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present invention may be performed in parallel, sequentially, or in a different order, so long as the desired results of the technical solution of the present invention are achieved, and the present invention is not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (10)
1. A method of managing a load-bearing apparatus, comprising:
acquiring current management data corresponding to the bearing device;
performing condition verification on the current management data to obtain a device detection result;
when the detection result of the device is detected to be a preset result, determining the current state of the bearing device; wherein the current state comprises a temporary storage state or a boat-out state;
and determining the current position of the bearing device based on the current state so as to maintain and manage the bearing device based on the current position.
2. The method as recited in claim 1, further comprising:
determining device identification information of the bearing device;
determining association information associated with the carrier device based on the device identification information; wherein the association information includes device identification information, lot number, and production date;
and updating an information management record corresponding to the bearing device based on the association information.
3. The method of claim 2, wherein the current management data comprises a cumulative number of boat-out times, the method further comprising:
when the carrying device is detected to carry out the temporary storage position corresponding to the carrying device, updating the accumulated boat-out times in the information management record;
the obtaining the current management data corresponding to the bearing device includes:
and acquiring the accumulated number of boat-out times corresponding to the bearing device from the information management record.
4. The method of claim 2, wherein the current management data comprises a cumulative number of processes; the method further comprises the steps of:
when the bearing device is detected to enter a processing technology, updating the accumulated technology times in the information management record;
The obtaining the current management data corresponding to the bearing device includes:
and acquiring the accumulated process times corresponding to the bearing device from the information management record.
5. The method of claim 2, wherein the current management data comprises a cumulative number of shipments, the method further comprising:
when the device identification information of the bearing device is identified at a preset carrying position, updating the accumulated transportation times associated with the device identification information in the information management record;
the obtaining the current management data corresponding to the bearing device includes:
and acquiring the accumulated transportation times corresponding to the bearing device from the information management record.
6. The method of claim 1, wherein the performing the condition check on the current management data to obtain a device detection result comprises:
when at least one condition that the accumulated boat-out times in the current management data are larger than a preset first threshold value, the accumulated process times in the current management data are larger than a preset second threshold value and the accumulated transportation times in the current management data are larger than a preset third threshold value is detected, determining that the detection result of the device is a preset result; wherein the preset result is abnormal.
7. The method of claim 1, wherein the determining the current location of the carrier based on the current state comprises:
if the current state is a temporary storage state, temporary storage position information corresponding to the bearing device is obtained from an information management record, and the current position is determined based on the temporary storage position information; or,
and if the current state is the ship-out state, acquiring current service equipment corresponding to the bearing device from the information management record, and determining the current position based on the equipment position information of the current service equipment.
8. A device for managing a load-bearing apparatus, comprising:
the data acquisition module is used for acquiring current management data corresponding to the bearing device;
the detection result determining module is used for performing condition verification on the current management data to obtain a device detection result;
the current state determining module is used for determining the current state of the bearing device when the detection result of the device is detected to be a preset result; wherein the current state comprises a temporary storage state or a boat-out state;
and the current position determining module is used for determining the current position of the bearing device based on the current state so as to maintain and manage the bearing device based on the current position.
9. An electronic device, the electronic device comprising:
at least one processor; and
a memory communicatively coupled to the at least one processor; wherein,
the memory stores a computer program executable by the at least one processor to enable the at least one processor to perform the method of managing a load bearing apparatus of any one of claims 1-7.
10. A computer readable storage medium storing computer instructions for causing a processor to implement the method of managing a carrier according to any one of claims 1-7 when executed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311118824.4A CN117153724A (en) | 2023-08-31 | 2023-08-31 | Method and device for managing bearing device, electronic equipment and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311118824.4A CN117153724A (en) | 2023-08-31 | 2023-08-31 | Method and device for managing bearing device, electronic equipment and storage medium |
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| Publication Number | Publication Date |
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| CN117153724A true CN117153724A (en) | 2023-12-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311118824.4A Pending CN117153724A (en) | 2023-08-31 | 2023-08-31 | Method and device for managing bearing device, electronic equipment and storage medium |
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| Country | Link |
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| CN (1) | CN117153724A (en) |
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2023
- 2023-08-31 CN CN202311118824.4A patent/CN117153724A/en active Pending
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