CN117140057A - Device for assembling heating lamp applied to semiconductor equipment - Google Patents
Device for assembling heating lamp applied to semiconductor equipment Download PDFInfo
- Publication number
- CN117140057A CN117140057A CN202311393693.0A CN202311393693A CN117140057A CN 117140057 A CN117140057 A CN 117140057A CN 202311393693 A CN202311393693 A CN 202311393693A CN 117140057 A CN117140057 A CN 117140057A
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- Prior art keywords
- heating lamp
- pull ring
- clamping
- driving
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 83
- 239000004065 semiconductor Substances 0.000 title claims abstract description 24
- 239000013013 elastic material Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 7
- 238000009434 installation Methods 0.000 abstract description 5
- 238000012423 maintenance Methods 0.000 abstract description 2
- 238000002310 reflectometry Methods 0.000 description 6
- 239000004033 plastic Substances 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
- B23P19/04—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes for assembling or disassembling parts
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
- H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Fastening Of Light Sources Or Lamp Holders (AREA)
Abstract
The application provides a device for assembling a heating lamp applied to semiconductor equipment, which comprises a plurality of clamping pieces, a pull ring and a sliding structure, wherein the clamping pieces are arranged along the circumferential direction of the pull ring, and each clamping piece comprises a driving part and a clamping part connected with one end of the driving part in the length direction; the driving parts are arranged in the pull ring and are mutually arranged at intervals, and the clamping parts are mutually arranged at intervals and are enclosed to form a containing cavity for containing the heating lamp; each driving part is in sliding connection with the pull ring through a sliding structure, and the pull ring can slide along the length direction of the driving part so as to enable the pull ring to be in contact with or separated from the outer wall of the driving part; when the pull ring is abutted against the outer wall of the driving part, the driving parts are mutually close to each other so that the clamping parts clamp the heating lamp; when the pull ring is separated from the outer wall of each driving part, each driving part is away from each other so that each clamping part releases the heating lamp. The application improves the disassembly and assembly efficiency, the after-sale maintenance efficiency and the installation precision of the heating lamp, and simultaneously can prevent the lamp from being damaged and scratched on the side edge of the lamp socket in the disassembly and assembly process.
Description
Technical Field
The application belongs to the technical field of semiconductors, and particularly relates to a device for assembling a heating lamp applied to semiconductor equipment.
Background
In the semiconductor industry, rapid Thermal Processing (RTP) apparatuses are widely used, in which a socket with a heating lamp embedded in a lamphouse is used for heating a reaction chamber, but due to the number of the heating lamps, the number of single-chamber assemblies can reach hundreds, and the disassembly and assembly operation space is severely insufficient. Currently, the assembly is generally performed in two ways: in order to assemble the heating lamp 2 by sleeving the plastic hose 1, as shown in fig. 1, the assembly speed is low, the positioning accuracy is poor, and after the assembly is finished, the lamp is easy to take out and the lamp tube is easy to damage; in addition, the distance between the heating lamp and the side wall of the lamp socket is very close to the common standard spacing by 2-2.5mm, and the risk of scratching the side wall of the lamp socket is caused in the tool inserting process, so that the reflectivity of the lamp socket is affected.
Disclosure of Invention
Based on the technical problems existing in the prior art, the application provides a device for assembling a heating lamp applied to semiconductor equipment, which is a simple tool applied to assembling and disassembling the heating lamp of RTP equipment; the problems that a heating lamp in a lamphouse of RTP equipment is inconvenient to assemble, low in assembly speed, poor in installation accuracy and easy to damage, and the side wall of the lamphouse is easy to wear in the assembly process, so that the reflectivity of the lamphouse is affected are solved.
In order to achieve the above object, there is provided an apparatus for assembling a heating lamp applied to a semiconductor device, including a plurality of clips, a tab, and a sliding structure, the plurality of clips being disposed along a circumference of the tab, each clip including a driving part and a clamping part connected to one end of the driving part in a length direction; the driving parts are arranged in the pull ring and are mutually arranged at intervals, and the clamping parts are mutually arranged at intervals and are enclosed to form a containing cavity for containing the heating lamp; each driving part is in sliding connection with the pull ring through a sliding structure, and the pull ring can slide along the length direction of the driving part so as to enable the pull ring to be in contact with or separated from the driving part; when the pull ring is abutted against the outer wall of the driving part, the driving parts are mutually close to each other so that the clamping parts clamp the heating lamp; when the pull ring is separated from the outer wall of each driving part, each driving part is away from each other so that each clamping part releases the heating lamp.
Optionally, a side surface of each clamping part, which is close to each other, is arc-shaped.
Optionally, the side of each clamping portion that is adjacent to each other is covered with a layer of elastic material.
Optionally, the elastic material layer is made of rubber.
Optionally, the plurality of clips are uniformly arranged along the pull ring, and a distance between two adjacent driving portions is the same as a distance between two adjacent clamping portions.
Optionally, the distance between two adjacent driving parts is 0.6mm-2mm.
Optionally, each driving part is enclosed to form a cone, and the outer diameter of the cone is gradually reduced from one end far away from the clamping part to one end close to the clamping part; when each clamping part clamps the heating lamp, the inner wall of the pull ring is abutted with the outer wall of the cone; when each clamping part loosens the heating lamp, the inner wall of the pull ring is arranged at intervals with the outer wall of the cone.
Optionally, the inner wall of the tab is parallel to the outer wall of the cone.
Optionally, the number of clamping pieces is two, and sliding structure includes guide arm and track, is provided with the track on two drive division respectively, and two tracks extend along the length direction of two drive division respectively, and each track is logical groove, and two tracks are worn to locate respectively and are connected with the pull ring at the both ends of guide arm.
Optionally, sliding connection has anti-rotation piece between two clamping parts, and anti-rotation piece interval sets up in the heating lamp top.
The device for assembling the heating lamp applied to the semiconductor equipment has the beneficial effects that:
(1) The pull ring is connected with each driving part through the sliding structure, and each driving part is close to or far away from each other through the sliding pull ring, so that the clamping parts can clamp or loosen the heating lamp rapidly;
(2) Because the holding parts are enclosed to form the holding cavity, the heating lamp can be placed in the holding cavity, thereby facilitating the assembly of the heating lamp and improving the probability of success of quick assembly and disassembly;
(3) Because the pull ring can slide, the radial displacement of the clamping part can be controlled by sliding the pull ring to a preset position, so that the opening and closing degree of the clamping piece is controlled, the installation accuracy is improved, the moving range of the clamping part is effectively limited, the lamp is prevented from being damaged in the process of dismounting, the side edge of the lamp socket is prevented from being scratched, and the reflectivity of the lamphouse is influenced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a plastic hose and a heating lamp assembled;
FIG. 2 is a schematic structural view of a scissor tooling;
fig. 3 is a schematic structural view of an apparatus for heating lamp assembly applied to a semiconductor device according to the present application;
fig. 4 is a schematic front view showing the structure of an apparatus for heating lamp assembly applied to a semiconductor device according to the present application;
FIG. 5 is a schematic cross-sectional view taken along line A-A of FIG. 4;
FIG. 6 is a schematic view of a tab according to the present application.
Reference numerals related to the above figures are as follows:
1. a plastic hose; 2. a heating lamp;
100. a clamping piece; 101. a driving section; 102. a clamping part; 103. a receiving chamber; 104. an elastic material layer;
200. a pull ring; 201. a first through hole; 202. a second through hole;
300. a sliding structure; 301. a guide rod; 302. a track; 303. a nut;
400. an anti-rotation member.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element. Embodiments of the application and features of the embodiments may be combined with each other without conflict. The application will be described in detail below with reference to the drawings in connection with embodiments.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are merely for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "plurality" is two or more unless specifically defined otherwise.
As noted in the background, there are currently two main ways of assembling a socket with a heat lamp embedded in the lamphouse: one is to assemble with plastic hose, the other is to clamp the heating lamp with scissors type tooling. However, the two methods have the following disadvantages: the lamp tube is assembled in a plastic hose mode, the assembly is slow, the positioning accuracy is poor, and after the assembly is finished, the lamp is easily carried out, and the lamp tube is easily damaged; the assembly is carried out by using a scissor-type tool, the side wall of the camphouse is easy to scratch, the use is inconvenient, and the reflectivity of the camphouse is affected.
Referring to fig. 3, 4 and 5, in order to solve the above problems, an embodiment of the present application provides an apparatus for assembling a heating lamp applied to a semiconductor device, mainly for assembling and disassembling a heating lamp in an RTP device, the apparatus including a plurality of clips 100, a tab 200 and a sliding structure 300, the plurality of clips 100 being disposed along a circumference of the tab 200, each clip 100 including a driving part 101 and a clamping part 102 connected to one end of the driving part 101 in a length direction; the driving parts 101 are arranged in the pull ring 200 at intervals, and the clamping parts 102 are arranged at intervals and enclose to form a containing cavity 103 for containing the heating lamp; each driving part 101 is slidably connected with the pull ring 200 through a sliding structure 300, and the pull ring 200 can slide along the length direction of the driving part 101 so as to enable the pull ring 200 to be abutted against or separated from the outer wall of the driving part 101; when the pull ring 200 is abutted against the outer wall of the driving part 101, the driving parts 101 are mutually close to enable the clamping parts 102 to clamp the heating lamp; when the tab 200 is separated from the outer wall of each of the driving portions 101, each of the driving portions 101 is separated from each other to cause each of the grip portions 102 to release a heating lamp (not shown). It should be noted that the number of the clips 100 is two or more, and the clips 100 may be made of metal materials, such as aluminum; each clamping part 102 is enclosed into a cylindrical shape or other shapes, the appearance and the size of the accommodating cavity 103 are matched with those of the heating lamp, and the inner diameter size of the accommodating cavity 103 is 10mm-50mm when the heating lamp is not clamped; the pull ring 200 has a ring structure, such as a circular ring, a square ring, etc.; the sliding structure 300 may take various forms, such as a sliding chute structure, which is not limited in the embodiment of the present application.
By applying the technical scheme of the application, when the driving parts 101 are close to each other by abutting the sliding pull ring 200 on the outer wall of each driving part 101, the gaps between the clamping parts 102 shrink, so that the accommodating space of the accommodating cavity 103 becomes smaller, and the heating lamp in the accommodating cavity 103 is clamped; when the pull ring 200 is separated from the outer wall of each driving part 101 by sliding the pull ring 200, and when each driving part 101 is far away from each other, the gap between each clamping part 102 is enlarged, so that the accommodating space of the accommodating cavity 103 is enlarged, and the heating lamp in the accommodating cavity 103 is loosened; the holding parts 102 are enclosed to form the holding cavity 103, and the heating lamp is placed in the holding cavity 103, so that the heating lamp can be aligned to facilitate disassembly and assembly, and the probability of success of quick disassembly and assembly is improved; the radial displacement of the clamping part 102 can be controlled by sliding the pull ring 200 to a preset position, so that the opening and closing degree of the clamping piece 100 is controlled, the installation precision is improved, the moving range of the clamping part 102 is effectively limited, the lamp is prevented from being damaged in the dismounting process, the side edge of a lamp socket is prevented from being scratched, and the reflectivity of a lamphouse is influenced.
The following describes the use of the apparatus for assembling a heating lamp applied to a semiconductor device according to an embodiment of the present application:
disassembling the heating lamp: the clamping part 102 is inserted into the lamp socket, the lamp holder of the heating lamp is placed in the accommodating cavity 103, the pull ring 200 is stressed to slide from the initial position to the preset position, and gaps between the driving parts 101 are contracted, so that the clamping part 102 clamps the lamp holder, the heating lamp is disassembled, and after the disassembly is completed, the pull ring 200 is stressed to slide from the preset position to the initial position, so that the heating lamp is loosened.
Assembling a heating lamp: the lamp cap of the heating lamp is placed in the accommodating cavity 103, the pull ring 200 is stressed to slide from the initial position to the preset position, gaps among the driving parts 101 are contracted, the clamping parts 102 clamp the lamp cap, the heating lamp is placed in the lamp socket of the lamphouse for assembly, and after the assembly is completed, the pull ring 200 is stressed to slide from the preset position to the initial position, so that the heating lamp is loosened.
Referring to fig. 1, each of the clamping portions 102 in this embodiment has an arc-shaped side surface adjacent to each other to be adapted to the heating lamp.
Since one side surface of the clamping portion 102, which is close to each other, is an inner side surface, the inner side surface of the clamping portion 102 is used for contacting the heating lamp, and the inner side surface of the clamping portion 102 needs to be designed according to the size and the shape of the heating lamp, so that the heating lamp can be fully contacted with the inner side surface of the clamping portion 102, and the clamping portion has stability.
Referring to fig. 1 and 5, in this embodiment, the side of each clamping portion 102 close to each other is covered with an elastic material layer 104, and the elastic material layer 104 is made of a material with a certain elasticity to cover the inner side wall of the clamping portion 102, so as to protect the heating lamp from damage.
The material of the elastic material layer 104 in this embodiment is rubber. Of course, other elastic materials, such as silica gel, may be used, and the application is not limited thereto.
Referring to fig. 1 and 3, the clips 100 in this embodiment are uniformly arranged along the pull ring 200, and the distance between two adjacent driving portions 101 is the same as the distance between two adjacent clamping portions 102, so as to ensure that the heating lamps are uniformly stressed and prevent damage caused by uneven stress.
The distance between two adjacent driving parts in this embodiment is 0.6mm-2mm. The range of the bearing force of the lamp cap of the heating lamp is usually between 0 and 1.5N, when the clamping force of the clamping pieces 100 is too large, the lamp cap can be cracked, and through verification, the clamping force can be controlled to be not more than 1.5N when the gap between two adjacent clamping pieces 100 is 0.6mm-2mm, so that the normal clamping of the lamp is satisfied, as shown in the table 1.
TABLE 1
Referring to fig. 3 to 5, each driving portion 101 in the present embodiment is enclosed to form a cone, and the outer diameter of the cone gradually decreases from one end far from the clamping portion 102 to one end near the clamping portion 102; when each clamping part 102 clamps the heating lamp, the inner wall of the pull ring 200 is abutted with the outer wall of the cone; when each clamping part 102 releases the heating lamp, the inner wall of the pull ring 200 is arranged at intervals with the outer wall of the cone. Specifically, the driving portion 101 and the clamping portion 102 are sequentially disposed from top to bottom, and the conical cylinder is inverted, that is, the top outer diameter of the conical cylinder is larger than the bottom outer diameter of the conical cylinder, and the bottom outer diameter of the conical cylinder is smaller than the inner diameter of the pull ring 200. The pull ring 200 is slid from the initial position to the top of the cone, when the pull ring 200 is abutted against the outer wall of the cone, the pull ring 200 presses the driving parts 101 inwards, so that each driving part 101 drives gaps between the clamping parts 102 to shrink, and the lamp holder is clamped; when the pull ring 200 is abutted against the outer wall of the cone, the pull ring 200 is slid to the initial position towards the bottom direction of the cone, so that the pull ring 200 is separated from the outer wall of the cone, and the gaps between the clamping parts 102 are enlarged by the driving parts 101, so that the lamp cap is released.
Referring to fig. 5, the inner wall of the pull ring 200 in the present embodiment is parallel to the outer wall of the cone, so that the contact area between the inner wall of the pull ring 200 and the outer wall of the cone can be increased, so as to ensure that the inner side of the pull ring 200 compresses the driving part 101.
Referring to fig. 3, the number of the clips 100 in the present embodiment is two, the sliding structure 300 includes a guide rod 301 and a track 302, the tracks 302 are respectively disposed on the two driving portions 101, the two tracks 302 respectively extend along the length directions of the two driving portions 101, each track 302 is a through slot, and two ends of the guide rod 301 respectively penetrate through the two tracks 302 and are connected with the pull ring 200. It will be appreciated that by sliding the guide bar 301 against the track 302, the track 302 acts as a guide to enable the guide bar 301 to move in the direction of the track 302.
Referring to fig. 3 and 6, in some alternative embodiments, the guide rod 301 is a bolt, the pull ring 200 is provided with a first through hole 201 and a second through hole 202, the first through hole 201 and the second through hole 202 are arranged at intervals, one end of the bolt sequentially penetrates through the first through hole 201, the two rails 302 and the second through hole 202, a nut 303 is further connected to the bolt, the pull ring 200 is located between a screw head of the bolt and the nut 303, and the nut 303 is used for preventing the bolt from being separated from the pull ring 200.
Referring to fig. 3, an anti-rotation member 400 is slidably connected between the two clamping portions 102 in this embodiment, and the anti-rotation member 400 is disposed above the heating lamp at intervals. By providing the anti-rotation member 400 to prevent rattle between the two clips 100, the use efficiency and the clamping effect are affected.
Referring to fig. 3 and 5, in some embodiments, the anti-rotation member 400 is a bolt, a screw rod of the bolt is inserted between the two clamping portions 102, and a nut is further connected to the screw rod of the bolt to prevent the bolt from being separated from the clamping portions 102, and a screw head and the nut of the bolt are respectively located outside the two clamping portions 102.
Referring to fig. 3, in this embodiment, in order to conform to the ergonomics, the user is more comfortable during the use, when the tab 200 is located at the end of the track 302 near the clamping portion 102, the distance from the top end of the tab 200 to the top end of the clamping piece 100 is 30 mm-90 mm, so as to ensure a sufficient length, and facilitate the use of the user.
In summary, the device for assembling the heating lamp applied to the semiconductor device provided by the embodiment has at least the following beneficial technical effects:
(1) The driving parts 101 are close to or far away from each other through the sliding pull ring 200, so that the clamping parts 102 can clamp or loosen the heating lamp quickly, the structure is simple, the use is convenient, and the disassembly and assembly efficiency and the after-sale maintenance efficiency of the heating lamp are improved;
(2) The holding parts 102 are enclosed to form the holding cavity 103, and the heating lamp can be placed in the holding cavity 103, so that the assembly of the heating lamp is facilitated, and the probability of success of quick assembly and disassembly is improved;
(3) The radial displacement of the clamping part 102 can be controlled by sliding the pull ring 200 to a preset position, so that the opening and closing degree of the clamping piece 100 is controlled, the installation precision is improved, the moving range of the clamping part 102 is effectively limited, the lamp is prevented from being damaged in the process of dismounting, the side edge of a lamp socket is prevented from being scratched, and the reflectivity of a lamphouse is influenced;
(4) The application is not only suitable for RTA, ISSG, PNA and other projects, but also suitable for taking and placing articles in other narrow spaces.
The foregoing description of the preferred embodiments of the application is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the application.
Claims (10)
1. An apparatus for assembling a heating lamp applied to a semiconductor device, characterized in that it comprises a plurality of clips, a pull ring, and a sliding structure, a plurality of the clips being disposed along a circumference of the pull ring, each of the clips comprising a driving portion and a clamping portion connected to one end of the driving portion in a length direction;
the driving parts are arranged in the pull ring and are mutually distributed at intervals, and the clamping parts are mutually distributed at intervals and are enclosed to form a containing cavity for containing the heating lamp;
each driving part is in sliding connection with the pull ring through the sliding structure, and the pull ring can slide along the length direction of the driving part so as to enable the pull ring to be abutted or separated from the outer wall of the driving part; when the pull ring is abutted against the outer wall of the driving part, the driving parts are mutually close to each other so that the clamping parts clamp the heating lamp; when the pull ring is separated from the outer wall of each driving part, each driving part is far away from each other so that each clamping part releases the heating lamp.
2. The apparatus for heating lamp assembly applied to semiconductor equipment as recited in claim 1, wherein each of the clamping portions has an arc-shaped side surface which is adjacent to each other.
3. The apparatus for heating lamp assembly applied to semiconductor devices as recited in claim 1, wherein a side of each of the clamping portions, which is adjacent to each other, is covered with an elastic material layer.
4. A device for heating lamp assembly applied to a semiconductor apparatus as claimed in claim 3, wherein the elastic material layer is made of rubber.
5. The apparatus for heating lamp assembly applied to semiconductor devices as claimed in claim 1, wherein the plurality of clips are uniformly arranged along the tab, and a distance between two adjacent driving parts is the same as a distance between two adjacent clamping parts.
6. The apparatus for heating lamp assembly applied to semiconductor devices as claimed in claim 5, wherein a distance between two adjacent driving parts is 0.6mm to 2mm.
7. The apparatus for heating lamp assembly applied to a semiconductor device according to claim 1, wherein each of the driving parts is enclosed to form a cone, and an outer diameter of the cone is gradually reduced from an end away from the clamping part to an end close to the clamping part;
when each clamping part clamps the heating lamp, the inner wall of the pull ring is abutted with the outer wall of the cone;
when each clamping part loosens the heating lamp, the inner wall of the pull ring is arranged at intervals with the outer wall of the cone.
8. The apparatus for heating lamp assembly for semiconductor devices as recited in claim 7, wherein the inner wall of the tab is parallel to the outer wall of the cone.
9. The apparatus for assembling a heating lamp for a semiconductor device according to claim 8, wherein the number of the clips is two, the sliding structure comprises a guide rod and rails, the rails are respectively arranged on the two driving parts, the rails respectively extend along the length directions of the two driving parts, each rail is a through groove, and two ends of the guide rod respectively penetrate through the two rails and are connected with the pull ring.
10. The apparatus for heating lamp assembly applied to semiconductor equipment according to claim 9, wherein an anti-rotation member is slidably connected between the two clamping portions, and the anti-rotation member is disposed above the heating lamp at a spacing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311393693.0A CN117140057A (en) | 2023-10-26 | 2023-10-26 | Device for assembling heating lamp applied to semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311393693.0A CN117140057A (en) | 2023-10-26 | 2023-10-26 | Device for assembling heating lamp applied to semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117140057A true CN117140057A (en) | 2023-12-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311393693.0A Pending CN117140057A (en) | 2023-10-26 | 2023-10-26 | Device for assembling heating lamp applied to semiconductor equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN117140057A (en) |
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| JPH09323268A (en) * | 1996-06-05 | 1997-12-16 | Fujiken Eng Kk | Used tube drawing machine of heat exchanger |
| CN102152143A (en) * | 2011-03-21 | 2011-08-17 | 安徽瑞达机械有限公司 | Concealed clamp device |
| CN104674811A (en) * | 2015-03-03 | 2015-06-03 | 厦门市金海明工贸有限公司 | Anchor and locking and unlocking method thereof |
| CN114284832A (en) * | 2021-12-13 | 2022-04-05 | 广州番禺电缆集团有限公司 | Voltage-free wiring terminal and processing method thereof |
| CN216371214U (en) * | 2021-10-26 | 2022-04-26 | 中山市捷上同程数控机床有限公司 | Clamping device for electric spindle chuck |
| CN114767203A (en) * | 2022-05-07 | 2022-07-22 | 唐岸柳 | Closed clamp suitable for alimentary canal scope |
| CN218233176U (en) * | 2022-10-31 | 2023-01-06 | 郭田甜 | Auxiliary mounting device for anchor clamping piece |
-
2023
- 2023-10-26 CN CN202311393693.0A patent/CN117140057A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09323268A (en) * | 1996-06-05 | 1997-12-16 | Fujiken Eng Kk | Used tube drawing machine of heat exchanger |
| CN2262974Y (en) * | 1996-09-25 | 1997-09-24 | 卢新明 | Toolframe device |
| CN102152143A (en) * | 2011-03-21 | 2011-08-17 | 安徽瑞达机械有限公司 | Concealed clamp device |
| CN104674811A (en) * | 2015-03-03 | 2015-06-03 | 厦门市金海明工贸有限公司 | Anchor and locking and unlocking method thereof |
| CN216371214U (en) * | 2021-10-26 | 2022-04-26 | 中山市捷上同程数控机床有限公司 | Clamping device for electric spindle chuck |
| CN114284832A (en) * | 2021-12-13 | 2022-04-05 | 广州番禺电缆集团有限公司 | Voltage-free wiring terminal and processing method thereof |
| CN114767203A (en) * | 2022-05-07 | 2022-07-22 | 唐岸柳 | Closed clamp suitable for alimentary canal scope |
| CN218233176U (en) * | 2022-10-31 | 2023-01-06 | 郭田甜 | Auxiliary mounting device for anchor clamping piece |
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