CN117123457A - Air gap type piezoelectric vibrator - Google Patents
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- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
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Abstract
The invention relates to an air gap type piezoelectric vibrator, and belongs to the technical field of piezoelectric sensors. The invention aims to solve the problems of strong rigidity, weak electromechanical conversion capability and poor acoustic matching of the traditional piezoelectric vibrator, and provides an air gap type piezoelectric vibrator. The air gap type piezoelectric vibrator is prepared by compounding the piezoelectric phase and the air base two phases, and the air base is used for replacing the polymer as the filler, so that the thickness vibration mode of the piezoelectric vibrator can be promoted, the transverse coupling problem caused by the polymer can be solved, and the electromechanical conversion capability of the piezoelectric vibrator is enhanced. On the other hand, because the acoustic impedance of air is lower, the acoustic impedance of the piezoelectric vibrator can be further reduced by compounding the air with a piezoelectric phase material, so that the piezoelectric vibrator is easy to carry out acoustic matching with water and human tissues, and has great application value in the aspect of developing a high-sensitivity ultrasonic/underwater acoustic transducer.
Description
Technical Field
The invention relates to an air gap type piezoelectric vibrator, in particular to an air gap type piezoelectric vibrator with high electromechanical coupling coefficient and low acoustic impedance, and belongs to the technical field of piezoelectric sensors.
Background
The ultrasonic transducer is an electronic device for realizing electroacoustic signal conversion based on piezoelectric effect, and has wide application in the fields of medical detection, marine exploration, signal perception and the like. The sensitivity of the transducer is one of key indexes for considering the receiving performance of the transducer, the principle is that after the transducer receives an external sound signal, acoustic energy is converted into electric energy, and the higher the sensitivity of the transducer is, the stronger the capability of the transducer for sensing the external signal is, and the better the receiving performance is. In the process, the piezoelectric vibrator is used as a transduction element in the ultrasonic transducer, and when external sound waves act on the transducer, the piezoelectric vibrator is deformed to generate an electric signal, so that a researcher can evaluate the sensitivity of the transducer through the electric signal. Therefore, the improvement of the transducer sensitivity is closely related to the performance of the internal piezoelectric vibrator.
At present, researches on piezoelectric vibrators are focused on improvement and promotion of electromechanical conversion capability, piezoelectric coefficient, acoustic matching and the like, and the types of the piezoelectric vibrators comprise piezoelectric ceramics, piezoelectric single crystals, piezoelectric polymers, piezoelectric composites and other piezoelectric materials. In contrast, the vibrator made of the piezoelectric composite material has high piezoelectric property and high electromechanical conversion strength (high thickness electromechanical coupling coefficient k) t ) The advantages of low acoustic impedance, easy preparation and the like are currently the main flow sensitive elements for developing the ultrasonic transducer.
The piezoelectric composite material generally refers to a two-phase piezoelectric material formed by compounding piezoelectric ceramics or piezoelectric single crystals and polymers, and has ten connectivity composite material structures of 0-0, 0-1, 0-2, 0-3, 1-1, 1-2, 1-3, 2-2, 2-3 and 3-3 according to the communication structure. Due to the filling of the polymer, the piezoelectric composite vibrator has stronger electromechanical conversion capability and acoustic matching property than a common piezoelectric material. For example, the piezoelectric vibrator material commonly used in the market consists of one-dimensional communicated piezoelectric ceramic columns and three-dimensional communicated epoxy resin, wherein the existence of the epoxy resin not only effectively weakens the transverse coupling of the original piezoelectric ceramic, so that the thickness vibration energy of the vibrator is concentrated, and the electromechanical conversion capability is obviously enhanced (electromechanical coupling coefficient k t About 0.6), and the toughness of the material is increased, the overall acoustic impedance of the material is greatly reduced, and the acoustic matching property of the material is improved (about 20M Rayls).
However, although the 1-3 piezoelectric vibrator promotes vibration in the thickness direction of the original piezoelectric ceramic or piezoelectric single crystal, the rigidity of the polymer itself still brings about slight transverse coupling, thereby limiting k thereof t And (5) lifting the value. On the other hand, the introduction of the polymer increases the flexibility of the whole piezoelectric vibrator, effectively reduces the original acoustic impedance, but the acoustic impedance value is still higher, the difference between water and human tissues is still larger, and the acoustic energy is reflected due to the overlarge difference of the acoustic impedance between media when the acoustic wave is transmitted, so that the acoustic energy is damaged. In view of the foregoing, development of a piezoelectric vibrator having a high electromechanical coupling coefficient and a low acoustic impedance is still a current problem to be solved.
Disclosure of Invention
The invention aims to solve the problems of strong rigidity, weak electromechanical conversion capability and poor acoustic matching of the traditional piezoelectric vibrator, and provides an air gap type piezoelectric vibrator. The air gap type piezoelectric vibrator is prepared by compounding the piezoelectric phase and the air base two phases, and the air base is used for replacing the polymer as the filler, so that the thickness vibration mode of the piezoelectric vibrator can be promoted, the transverse coupling problem caused by the polymer can be solved, and the electromechanical conversion capability of the piezoelectric vibrator is enhanced. On the other hand, because the acoustic impedance of air is lower, the acoustic impedance of the piezoelectric vibrator can be further reduced by compounding the air with a piezoelectric phase material, so that the piezoelectric vibrator is easy to carry out acoustic matching with water and human tissues, and has great application value in the aspect of developing a high-sensitivity ultrasonic/underwater acoustic transducer.
The invention aims at realizing the following technical scheme:
the first part, the invention provides an air gap type piezoelectric vibrator, which comprises a piezoelectric layer and an electrode layer. The piezoelectric layer is formed by a plurality of piezoelectric small column arrays, and the gaps of the arrays are not filled with polymers; the electrode layer uniformly covers the upper surface and the lower surface of the piezoelectric layer and is fixedly connected with the upper surface and the lower surface of the piezoelectric small column.
Further, the piezoelectric layer is composed of a plurality of piezoelectric small column units, the piezoelectric small column units can be arranged in a periodic manner or in a non-periodic manner, and the upper surface and the lower surface of each piezoelectric small column are communicated with the electrode layer. Preferably, the piezoelectric layer material can be made of PZT piezoelectric ceramics or piezoelectric single crystals with higher piezoelectric coefficients, so that the composite material has strong piezoelectricity; the section of each piezoelectric small column can be uniform square or round, and the width-to-longitudinal ratio of each piezoelectric small column is 1:3.
Further, the gaps of the piezoelectric layers are filled by air instead of a polymer matrix to form an air-based piezoelectric composite material; the air is uniformly filled between each unit of the piezoelectric pillars.
Further, the electrode layer is composed of a top electrode and a bottom electrode; the electrode layer material is made of a metal material with good conductivity, and the thickness of the electrode layer material is controlled to be 0.1-0.3 mm.
Further, the top electrode and the bottom electrode are made of the same metal material and have the same thickness; when the electrode layer is flexible, the air gap type piezoelectric vibrator can be bent into a curved surface structure, and each small column of the piezoelectric layer can be led out through the flexible electrode, so that the detection precision of the ultrasonic transducer is improved, and multi-array element control can be realized.
Further, the top electrode and the bottom electrode are two uniform metal panels, and a thin layer of conductive adhesive is coated between the metal panels and the piezoelectric layer for realizing the fixed connection of the piezoelectric layer and the electrode layer. Preferably, the bottom electrode is made of a copper foil tape with good conductivity and low resistivity.
Further, when preparing a periodic air gap type piezoelectric vibrator, a high electromechanical coupling coefficient k can be prepared by changing the piezoelectric layer column width m and the gap n t And a high performance piezoelectric vibrator with dual effects of low acoustic impedance Z:
step one, the air gap type piezoelectric vibrator is formed by compounding a piezoelectric phase and an air phase, so that the constitutive relation of the whole piezoelectric vibrator is obtained by weighting the piezoelectric phase and the air phase according to volume fractions; the vibrator is uniform in inside, and the polarized piezoelectric phase is unfolded according to an e-type piezoelectric equation, as shown in formula (1):
delta in i Representing stress, ε i Indicating strain, E k Represents the electric field strength, D h For the purpose of electrical displacement,e is the elastic constant component under constant electric field ij For the piezoelectric stress constant component>Is the permittivity component at constant strain (i, j=1, 2,., 6, h, k=1, 2, 3).
Step two, the air base in the gap is a uniform isotropic medium, and the algebraic equation is developed according to a matrix form, as shown in a formula (2):
step three, the vibration energy of the air gap type piezoelectric vibrator only exists in the thickness direction, and no transverse strain and no shear strain exist, so that:
wherein the upper corner mark a represents the piezoelectric phase and b represents the air phase.
Since the metal plates are uniformly covered on the upper and lower surfaces of the piezoelectric vibrator, there are no electric fields and electric displacements in the lateral and shearing directions, and then:
the air gap type piezoelectric vibrator has symmetry in the xoy plane, so that the two lateral stress components are equal.
Step four, simplifying the formula (1) and the formula (2) according to the step three to obtain a formula (6) and a formula (7):
in the z direction, because the piezoelectric phase and the air phase are in parallel connection, the vertical strain of the whole air gap type piezoelectric vibrator is equal to that of the internal components, and the vertical stress of the vibrator is jointly influenced by the piezoelectric phase and the air phase:
similarly, according to the parallel structure of the piezoelectric phase and the air phase, the vertical electric field of the vibrator is the same as the vertical electric field of the piezoelectric phase and the air phase, and the vertical electric displacement of the vibrator is obtained by weighting the piezoelectric phase and the air phase:
in the above (8) to (9), the upper corner mark m represents the air gap type piezoelectric vibrator, v a And v b V represents the volume fraction of piezoelectric vibrator occupied by piezoelectric phase and air phase b ＝1-v a 。
Step six, the air gap type piezoelectric vibrator is a vibration mode with uniform thickness, so that the transverse strain of the whole vibrator is zero, and the piezoelectric phase and the polymer phase are connected in series in the x and y directions, the transverse strain of the vibrator can be obtained by weighting the piezoelectric phase and the polymer phase, and the transverse stress is equal to the piezoelectric phase, the polymer phase and the transverse stress:
substituting the formula (10) into the formulas (6) to (7) to simplify the formula, the transverse strain epsilon of the piezoelectric phase and the air phase can be obtained 1 With respect to vertical strain ε 3 And a vertical electric field E 3 Is defined by the relation:
the relation of formula (11) can be used to cancel transverse strain ε 1 A component in which the equation relationship is substituted into equations (6) to (7) and δ can be calculated 1 、δ 3 And D 3 With respect to epsilon 3 And E is 3 Is defined by the relation:
the upper and lower equations in equation (12) are the simplified piezoelectric equations for the piezoelectric phase and the air phase, respectively.
Epsilon of two formulas (12) is expressed by formulas (8) and (9) 3 And E is 3 Weighted sum by volume fraction, then there is:
the formula (13) is the piezoelectric equation of the air gap type piezoelectric vibrator, and c is caused by almost no elasticity of the air medium 11 And c 12 Equal to zero, each piezoelectric unit column width of the piezoelectric layer is m, and the air gap is n, v a ＝m 2 /(m+n) 2 ，v b ＝(n 2 +2mn)/(m+n) 2 Substituted into formula (13):
converting equation (14) into a standard form of an e-type piezoelectric equation:
wherein,
and->The thickness of the air gap type piezoelectric vibrator is more concentrated, so that the air gap type piezoelectric vibrator can exert larger electromechanical conversion capability;
the thickness electromechanical coupling coefficient k of the air gap type piezoelectric vibrator is shown as (15) t The density ρ and the acoustic impedance Z formula can be changed to obtain the high-k piezoelectric material t Air gap type piezoelectric vibrator with low Z value.
The invention provides a preparation method of an air gap periodic piezoelectric vibrator, which comprises the following steps:
step one, determining the working frequency of an ultrasonic transducer and setting the working parameters of an air gap type piezoelectric vibrator;
and step two, preparing a pre-cut sample. And preparing a pre-cut piezoelectric material block, adhering the lower surface of the pre-cut piezoelectric material block with the metal panel coated with the conductive adhesive, and fixing the pre-cut piezoelectric material block on a cutting substrate to prepare a pre-cut sample.
And step three, preparing a primary cutting framework. Finding the pre-cut sample in an optical area of an operation interface of the cutting machine, and setting cutting steps to be (m+n) mm; and (3) operating the cutting machine to enable the blade to cut unidirectionally along the y axis to form a one-time cutting framework, and setting the cutting depth to be the same as the thickness of the piezoelectric material block during cutting so as to ensure that the bottom metal panel is not touched.
And step four, preparing a secondary cutting framework. And (3) rotating a sample stage of the cutting machine to 90 degrees, repeating the third step, and keeping the cutting parameters unchanged, so that the blade is subjected to unidirectional cutting along the x-axis to form a secondary cutting framework.
And step five, covering the top electrode. And (3) taking the metal panel coated with the conductive adhesive in the second step, and attaching the metal panel to the top of the framework in the fourth step to prepare the top electrode.
And step six, removing the cutting substrate to form the air gap type piezoelectric vibrator.
The invention provides a preparation method of an air gap non-periodic piezoelectric vibrator, which comprises the following steps:
step one, determining the working frequency of an ultrasonic transducer, setting the working parameters of an air gap type piezoelectric vibrator and the size of a pouring die; the size of the die is required to be matched with the shape of the designed ultrasonic transducer;
step two, preparing an aperiodic piezoelectric small column array by using an injection molding process;
step three, preparing epoxy resin glue solution with certain quality, and pouring and shaping; preferably, the epoxy resin can be WSR618 type or E51 type epoxy with good viscosity, so that the cured epoxy has high rigidity;
polishing the ceramic substrate to form a 1-3 piezoelectric vibrator structure;
step five, sticking metal panels on the upper side and the lower side;
step six, injecting a polymer dissolving agent to fully dissolve the rigid epoxy and forming the air gap type piezoelectric vibrator; the polymer dissolvent ensures that no chemical reaction is generated between the polymer dissolvent and the conductive adhesive between the metal panels, so that the electrode layer can be stably fixed at the two ends of the piezoelectric layer after the epoxy is dissolved.
Advantageous effects
1. The air gap type piezoelectric vibrator adopts air to replace the traditional polymer matrix, so that the acoustic impedance of the whole vibrator can be further reduced, and the vibrator is easy to match with water and biological tissues.
2. The air gap type piezoelectric vibrator has a concentrated and stable thickness vibration mode, can greatly improve the electromechanical conversion capability of the vibrator, and is beneficial to improving the sensitivity of an ultrasonic transducer.
3. The air gap type piezoelectric vibrator can further reduce the overall quality of the vibrator, so that the novel transducer developed by using the air gap type piezoelectric vibrator as a sensitive material has the characteristics of small volume, light weight, high portability and the like.
4. Compared with the traditional piezoelectric vibrator preparation process, the air gap type piezoelectric vibrator is easy to prepare, has simple process flow and can further reduce the production cost of materials.
Drawings
FIG. 1 is k in example 1 t MATLAB value calculation results of Z values;
fig. 2 is a schematic three-dimensional structure of a square air gap piezoelectric vibrator according to the present invention;
FIG. 3 is a side view of an air gap type piezoelectric vibrator under the structure of FIG. 1;
FIG. 4 is a top view of an air gap type piezoelectric vibrator under the structure of FIG. 1;
FIG. 5 is a flow chart of the preparation of an air gap type periodic piezoelectric vibrator according to example 1;
FIG. 6 is a schematic diagram of a three-dimensional structure of a conventional 1-3 type piezoelectric vibrator;
FIG. 7 is a graph showing the admittance test of an air gap type piezoelectric vibrator according to example 1 and conventional piezoelectric vibrators 1-3;
fig. 8 is a flow chart of the preparation of the air gap type aperiodic piezoelectric vibrator according to embodiment 2.
In the figure, 1-piezoelectric layer, 2-electrode layer, 3-top electrode, 4-bottom electrode, 5-air-based, 6-piezoelectric pillar array, 7-rigid polymer-based
Detailed Description
The present invention will be described in further detail with reference to specific embodiments and drawings for the purpose of making the objects, technical solutions and advantages of the present invention more apparent.
Example 1
The perception of weak acoustic signals has been a major concern for related researchers, and when an ultrasonic transducer is used for perceiving pulse signals of a human body or using the ultrasonic transducer to perceive underwater signals, sensitivity indexes play an important role, and the higher the sensitivity is, the stronger the capability of the ultrasonic transducer to perceive signals is, and the more acoustic information the ultrasonic transducer carries. The improvement of the sensitivity of the transducer depends on the improvement of the electromechanical coupling coefficient of the piezoelectric vibrator and the reduction of the acoustic impedance. Aiming at the problem, the invention provides the air gap type piezoelectric vibrator which has light weight, small volume, easy preparation and excellent performance, eliminates the transverse coupling of the traditional piezoelectric vibrator, and promotes the thickness vibration mode of the vibrator to be more concentrated so as to further improve the sensitivity and the signal sensing capability of the ultrasonic transducer. The invention provides an analysis method of an air gap type piezoelectric vibrator, which can realize high electromechanical coupling coefficient k by changing the column width m of a piezoelectric layer and a gap n t And a high performance piezoelectric vibrator with dual effects of low acoustic impedance Z.
In order to achieve the above purpose, the present invention provides an air gap type piezoelectric vibrator, which comprises the following specific design processes:
step one, the air gap type piezoelectric vibrator is formed by compounding a piezoelectric phase and an air phase, so that the constitutive relation of the whole piezoelectric vibrator is obtained by weighting the piezoelectric phase and the air phase according to volume fractions; the vibrator is uniform in inside, and the polarized piezoelectric phase is unfolded according to an e-type piezoelectric equation, as shown in formula (1):
delta in i Representing stress, ε i Indicating strain, E k Represents the electric field strength, D h For the purpose of electrical displacement,e is the elastic constant component under constant electric field ij Is piezo-electric stressConstant component->Is the permittivity component at constant strain (i, j=1, 2,., 6, h, k=1, 2, 3);
step two, the air base in the gap is a uniform isotropic medium, and the algebraic equation is developed according to a matrix form, as shown in a formula (2):
step three, if vibration energy of the air gap type piezoelectric vibrator exists only in the thickness direction and no transverse strain or shear strain exists, the vibration energy of the air gap type piezoelectric vibrator exists
Wherein the upper corner mark a represents a piezoelectric phase and b represents an air phase;
since the metal plates are uniformly covered on the upper and lower surfaces of the piezoelectric vibrator, there are no electric fields and electric displacements in the transverse and shearing directions
The air gap type piezoelectric vibrator has symmetry in the xoy plane, so that two transverse stress components are equal;
step four, simplifying the formula (1) and the formula (2) according to the step three to obtain a formula (6) and a formula (7):
in the z direction, the piezoelectric phase and the air phase are connected in parallel, so that the vertical strain of the whole air gap type piezoelectric vibrator is equal to that of the internal components, and the vertical stress of the vibrator is acted by the piezoelectric phase and the air phase together
Similarly, according to the parallel structure of the piezoelectric phase and the air phase, the vertical electric field of the vibrator is the same as that of the piezoelectric phase and the air phase, and the vertical electric displacement of the vibrator is obtained by weighting the piezoelectric phase and the air phase
In the above (8) to (9), the upper corner mark m represents the air gap type piezoelectric vibrator, v a And v b V represents the volume fraction of piezoelectric vibrator occupied by piezoelectric phase and air phase b ＝1-v a ；
Step six, the air gap type piezoelectric vibrator is a vibration mode with uniform thickness, so that the transverse strain of the whole vibrator is zero, and the piezoelectric phase and the polymer phase are connected in series in the x and y directions, the transverse strain of the vibrator is obtained by weighting the piezoelectric phase and the polymer phase, and the transverse stress is equal to the piezoelectric phase, the polymer phase and the polymer phase:
substituting formula (10) into formulas (6) to (7) to reduce the strain epsilon of the piezoelectric phase and the air phase 1 With respect to vertical strain ε 3 And a vertical electric field E 3 Is defined by the relation:
the relation of formula (11) is used for eliminating transverse strain ε 1 And (3) substituting the formula (11) into the formulas (6) to (7) to obtain delta 1 、δ 3 And D 3 With respect to epsilon 3 And E is 3 Is defined by the relation:
the upper and lower formulas in the formula (12) are respectively a simplified piezoelectric equation of a piezoelectric phase and an air phase;
epsilon of two formulas (12) according to formulas (8) and (9) 3 And E is 3 Weighted sum by volume fraction, then there is:
the formula (13) is the piezoelectric equation of the air gap type piezoelectric vibrator, and c is caused by almost no elasticity of the air medium 11 And c 12 Equal to zero.
Additionally, if the column width of each piezoelectric unit of the piezoelectric layer is m and the air gap is n, v a ＝m 2 /(m+n) 2 ，v b ＝(n 2 +2mn)/(m+n) 2 Substituted into formula (13):
converting equation (14) into a standard form of an e-type piezoelectric equation:
in the method, in the process of the invention,
and->All are zero, so that the air gap type piezoelectric vibrator has no transverse stress; the vibration mode of the air gap type piezoelectric vibrator is completely concentrated on the thickness vibration mode, so that larger electromechanical conversion capability can be exerted;
the thickness electromechanical coupling coefficient k of the air gap type piezoelectric vibrator is shown as (15) t The density ρ and acoustic impedance Z formula, and the corresponding k can be solved by correspondingly taking the photoelastic parameters of formula (14) into formula (15) t And Z. In this example, piezoelectric ceramic PZT-5A is used as the piezoelectric phase, and the material parameters are shown in Table 1 below:
TABLE 1 Material parameter Table of PZT-5A
The data calculation software MATLAB 2019 is used for carrying the parameters into formula calculation, and k can be obtained t And Z is related to the volume fraction v of the piezoelectric ceramic a As shown in fig. 1. As can be seen from the curve change of FIG. 1, as the volume fraction of the piezoelectric ceramic increases, k t The value tends to be constant after a rapid rise and at v a > 0.4 post k t Can reach 0.702, and is close to the length expansion vibration mode k of the piezoelectric ceramics 33 The mechanical loss of thickness mode energy hardly exists when the structural vibrator works is described; as for acoustic impedance, when the volume ratio of the piezoelectric ceramic is gradually increased, the density of the air gap type piezoelectric vibrator is also gradually increased, and the acoustic impedance is also higher and higher, so that the air gap type piezoelectric vibrator is prepared by mixing water and waterThe volume fraction of the piezoelectric ceramic should be as small as possible for low acoustic impedance environments such as human tissue.
In view of the above analysis, the present embodiment selects the volume fraction v of the piezoelectric ceramic a The size specification of =0.44 was used for the preparation of the air gap type piezoelectric vibrator. Volume fraction v of piezoelectric ceramic a The following relationship exists with the piezoelectric column width m and the air gap n: v a ＝m 2 /(m+n) 2 ，v b ＝(n 2 +2mn)/(m+n) 2 Let the column width m=1.0 mm, bring in v a Air gap n=0.5 mm was found=0.5.
Fig. 2 and 3 are schematic three-dimensional structure diagrams and side views of an air gap type piezoelectric vibrator, respectively, wherein a piezoelectric layer 1 is fixed by electrode layers 2 on upper and lower end surfaces, and a plurality of piezoelectric pillars 6 are arranged in the piezoelectric layer. The piezoelectric pillars 6 between the piezoelectric layers 1 are weak in chemical structure, and the pillar gaps are filled by the air base 5, so that the vibrator has no transverse mechanical behavior, and the vibration is completely concentrated in the thickness direction, so that the thickness electromechanical coupling coefficient k of the integral piezoelectric vibrator can be realized t Longitudinal electromechanical coupling coefficient k closer to single piezoelectric column 33 . The top electrode 3 and the bottom electrode 4 together form an electrode layer for connecting all piezoelectric pillars 6 and transmitting electric signals, wherein 3 and 4 can be made of flexible electrode materials, and the manufactured air gap type piezoelectric vibrator can bend in a common mode.
In this embodiment, a case is given in which the square piezoelectric pillars 6 are arranged in a periodic manner, as shown in fig. 4, but the design of the present invention is not limited to a square structure, and the air gap type piezoelectric vibrator may have a circular, rectangular, annular or other shape. In addition, the cross section of the piezoelectric pillars 6 is not limited to square, and may be made into a diamond, column, cone, etc. structure according to the mold structure, but the upper and lower end surfaces of all the piezoelectric pillars are planar structures, and the upper and lower end surfaces of each pillar are strictly parallel, as shown in the side view of the air gap type piezoelectric vibrator in fig. 3.
For the structural dimensions designed in this embodiment, a method for preparing an air gap periodic piezoelectric vibrator is described below, as shown in fig. 5, and the specific steps are as follows:
s1, determining the working frequency of an ultrasonic transducer, and setting cutting parameters;
the working frequency of the ultrasonic transducer is divided into a low frequency, a medium frequency and a high frequency, and the frequency selection is determined according to factors such as a transmission medium, a working environment and the like. In this embodiment, the ultrasonic transducer is set to have an operating frequency of about 300kHz, and thus the thickness of the air gap type piezoelectric vibrator is set to 5mm.
S2, preparing a pre-cut sample;
preparing a PZT-5A block, adhering the lower surface of the PZT-5A block with a copper foil, and fixing the PZT-5A block on a cutting substrate to prepare a pre-cut sample. Before adhesion, the upper and lower surfaces of the piezoelectric ceramic block should be repeatedly cleaned and wiped by absolute ethyl alcohol so as to ensure that the surface is smooth and free of impurities.
S2, preparing a primary cutting framework;
finding the pre-cut sample in an optical area of an operation interface of the cutting machine, selecting a metal blade with the width of 0.5mm, and setting the cutting step to be 1.5mm so as to ensure that the width of the piezoelectric column is 1.0mm and the kerf is 0.5mm; and (3) operating the cutting machine to enable the blade to cut unidirectionally along the y axis to form a one-time cutting framework. The bottom electrode is ensured not to be cut through during cutting, namely the cutting depth is set to be the same as the thickness of the ceramic.
S3, preparing a secondary cutting framework;
and (3) rotating a sample stage of the cutting machine to 90 degrees, repeating the step S2, and keeping the cutting step unchanged, so that the blade is cut unidirectionally along the x axis to form a secondary cutting framework.
S4, covering the top electrode to finish the preparation of the air gap type piezoelectric vibrator;
and (3) taking the sample in the step (S3) from a sample table of the cutting machine, cleaning the sample by absolute ethyl alcohol, and drying the sample to remove ceramic impurities in a framework gap. And then, covering a copper foil film with proper size on the top of the secondary cutting framework, pressing and shaping to form the air-based piezoelectric composite material. And finally, lightly removing the cutting substrate to finish the preparation of the air gap periodic piezoelectric vibrator.
The air gap vibrator prepared in this example was tested for performance as follows. The air gap type with the same external dimension is selected and prepared simultaneously with the traditional 1-3 type, and the structural dimension design of the material is shown in table 1. Fig. 6 is a schematic three-dimensional structure of a conventional 1-3 piezoelectric vibrator, wherein each piezoelectric pillar 6 is uniformly filled with a rigid polymer base 7, and a top electrode 3 and a bottom electrode 4 are respectively covered on the upper and lower end surfaces of the vibrator. The piezoelectric pillars 6 in this example are made of PZT-5A piezoelectric ceramics, and the rigid polymer base is made of WSR epoxy resin, and in this example, the conventional 1-3 piezoelectric vibrator can be used as a control group for performance comparison with the present invention.
TABLE 2 external dimension of two piezoelectric vibrators
| Array size | Column width (mm) | Slit width (mm) | Thickness (mm) |
| 8×8 | 1.0 | 0.5 | 5.0 |
| 8×8 | 1.0 | 0.5 | 5.0 |
After the preparation, the admittance curve information is read by an impedance analyzer, as shown in fig. 7, and the test results of the resonance frequency, the antiresonance frequency, the thickness electromechanical coupling coefficient and the acoustic impedance are recorded in table 3 for comparison.
TABLE 3 simulation results of two piezoelectric composites
According to FIG. 7, the air gap type piezoelectric vibrator of the invention takes air as a filling phase, so that the electrical performance of the traditional piezoelectric vibrator is greatly improved, compared with admittance curves of two vibrators, the admittance curves of the air gap type piezoelectric vibrator are smooth and pure, no other coupling resonance peak exists, the thickness vibration effect is obviously enhanced, and the thickness electromechanical coupling coefficient is improved by 10% compared with that of the type 1-3; the traditional 1-3 piezoelectric vibrator has the advantages that the transverse coupling of the piezoelectric vibrator influences the concentration of the vibration modes with the thickness of the composite material due to the existence of rigid epoxy resin in the gaps of the piezoelectric columns, and the transverse coupling is also an important reason for the existence of coupling resonance peaks in the admittance curves of the piezoelectric vibrator. In addition, the acoustic impedances of the two vibrators are obviously different, and under the same condition, the acoustic impedance of the air gap type piezoelectric vibrator is only 12.74MRayls, so that the vibrator has better matching compatibility in the aspect of developing an ultrasonic transducer. According to the analysis of the test result, the air gap type piezoelectric vibrator has the characteristics of remarkable high electromechanical coupling coefficient and low acoustic impedance, and can further improve the sensitivity and the signal sensing capability of the ultrasonic transducer so as to meet the expected requirement.
Example 2 air gap type aperiodic piezoelectric vibrator
An air gap type piezoelectric vibrator may have a piezoelectric layer formed in an aperiodic array. Fig. 8 is a flowchart of the preparation of an air gap type non-periodic piezoelectric vibrator in this embodiment, wherein the piezoelectric material is PZT piezoelectric ceramic, and the electrode layer material is a circular copper foil sheet. The air gap type non-periodic piezoelectric vibrators can be manufactured into a non-periodic arrangement mode by combining an injection molding method, and the array arrangement mode is flexible and reliable and is suitable for preparing a large-area hydrophone array. However, unlike the simple mechanical cutting method, the preparation method of the solution is to cure and shape the rigid polymer (such as epoxy, polyurethane and the like) and dissolve the rigid polymer filled between the gaps by a polymer dissolving agent, and the preparation method comprises the following specific steps:
s1, determining the working frequency of an ultrasonic transducer, and setting the size of a perfusion mold;
as in example 1, the operating frequency of the ultrasonic transducer is mainly dependent on the thickness parameters of the piezoelectric material, so the height of the potting mold (curing and demolding the array of moldable ceramic pillars after pouring the ceramic slurry, determining the ceramic pillar height) will be decisive for the operating frequency of the transducer. The non-periodic infusion mold is customized so that the array elements in the mold are arranged in the same manner as in the structure of fig. 6.
S2, preparing a piezoelectric ceramic array
Putting a certain dose of N-methylol acrylamide into water, and uniformly dispersing solute by using a magnetic stirrer; the mixed solution is continuously stirred by using a glass rod, and piezoelectric ceramic powder and a cross-linking agent with certain mass are continuously added into the mixed solution, so that the mixed solution is uniformly mixed to form piezoelectric ceramic slurry. And taking a prefabricated aperiodic array filling and sealing die, slowly injecting the piezoelectric ceramic slurry, curing and demolding to form the piezoelectric ceramic column array with the ceramic substrate.
S3, pouring epoxy resin, curing and shaping
Weighing epoxy resin glue solution with certain mass, and then, according to the mass ratio of epoxy resin: curing agent: softener = 10:1:1 preparing a curing agent and a softener, then injecting the epoxy resin glue solution, rapidly stirring in a glass cup during injection, placing the mixed glue solution into a vacuum box after stirring uniformly, vacuumizing, and draining bubbles. And finally, pouring the evacuated epoxy resin into the piezoelectric ceramic array prepared in the step S2 for solidification and shaping.
S4, removing the ceramic substrate
And (3) taking the sample solidified in the step (S3), buckling and fixing the sample in a sample table of a cutting machine, setting a cutting step and a knife speed, and polishing a ceramic substrate of the sample. And taking a polished sample, gently wiping the surface of the sample with an acetone reagent, and drying.
S5, attaching copper foil to prepare 1-3 type piezoelectric vibrator
And (3) taking circular copper foil sheets with matched size specifications, sticking the circular copper foil sheets on the upper and lower surfaces of the S4 sample, and then pressing and forming the circular copper foil sheets to prepare the 1-3 piezoelectric vibrator.
S6, injecting a polymer dissolving agent to prepare the air gap type piezoelectric vibrator
And (5) fixing the piezoelectric vibrator manufactured in the step (S5) on a table surface, injecting a polymer dissolving agent into the gap of the piezoelectric knob to dissolve epoxy resin, and finally forming the air gap type non-periodic piezoelectric vibrator.
While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (10)
1. An air gap type piezoelectric vibrator, which is characterized in that: comprises a piezoelectric layer and an electrode layer; the piezoelectric layer is formed by a plurality of piezoelectric small column arrays; the electrode layer uniformly covers the upper surface and the lower surface of the piezoelectric layer and is fixedly connected with the upper surface and the lower surface of the piezoelectric small column.
2. An air gap type piezoelectric vibrator according to claim 1, wherein: the piezoelectric small column units are arranged in a periodic mode or in an aperiodic mode.
3. An air gap type piezoelectric vibrator according to claim 1, wherein: the piezoelectric layer material is PZT piezoelectric ceramics or piezoelectric single crystals.
4. An air gap type piezoelectric vibrator according to claim 1, wherein: the section of the piezoelectric small column is uniform square or round.
5. An air gap type piezoelectric vibrator according to claim 1 or 4, wherein: the aspect ratio of each piezoelectric pillar is 1:3.
6. An air gap type piezoelectric vibrator according to claim 1, wherein: the electrode layer is made of metal material, and the thickness is controlled to be 0.1 mm-0.3 mm; leads can be derived.
7. An air gap type piezoelectric vibrator according to claim 1 or 6, wherein: when the electrode layer is made of flexible metal materials, the air gap type piezoelectric vibrator is bent into a curved surface structure, each small column of the piezoelectric layer is led out through the flexible electrode, the detection precision of the transducer is improved, and the multi-array element control of the transducer is realized.
8. An air gap type piezoelectric vibrator according to claim 1 or 2, wherein: when preparing the periodic air gap type piezoelectric vibrator, the high electromechanical coupling coefficient k is prepared by changing the column width m of the piezoelectric layer and the gap n t And a high performance piezoelectric vibrator with dual effects of low acoustic impedance Z:
step one, the air gap type piezoelectric vibrator is formed by compounding a piezoelectric phase and an air phase, so that the constitutive relation of the whole piezoelectric vibrator is obtained by weighting the piezoelectric phase and the air phase according to volume fractions; the vibrator is uniform in inside, and the polarized piezoelectric phase is unfolded according to an e-type piezoelectric equation, as shown in formula (1):
delta in i Representing stress, ε i Indicating strain, E k Represents the electric field strength, D h For the purpose of electrical displacement,e is the elastic constant component under constant electric field ij For the piezoelectric stress constant component>Is the permittivity component at constant strain (i, j=1, 2,., 6, h, k=1, 2, 3);
step two, the air base in the gap is a uniform isotropic medium, and the algebraic equation is developed according to a matrix form, as shown in a formula (2):
step three, if vibration energy of the air gap type piezoelectric vibrator exists only in the thickness direction and no transverse strain or shear strain exists, the vibration energy of the air gap type piezoelectric vibrator exists
Wherein the upper corner mark a represents a piezoelectric phase and b represents an air phase;
since the metal plates are uniformly covered on the upper and lower surfaces of the piezoelectric vibrator, there are no electric fields and electric displacements in the transverse and shearing directions
The air gap type piezoelectric vibrator has symmetry in the xoy plane, so that two transverse stress components are equal;
step four, simplifying the formula (1) and the formula (2) according to the step three to obtain a formula (6) and a formula (7):
in the z direction, the piezoelectric phase and the air phase are connected in parallel, so that the vertical strain of the whole air gap type piezoelectric vibrator is equal to that of the internal components, and the vertical stress of the vibrator is acted by the piezoelectric phase and the air phase together
Similarly, according to the parallel structure of the piezoelectric phase and the air phase, the vertical electric field of the vibrator is the same as that of the piezoelectric phase and the air phase, and the vertical electric displacement of the vibrator is obtained by weighting the piezoelectric phase and the air phase
In the above (8) to (9), the upper corner mark m represents the air gap type piezoelectric vibrator, v a And v b V represents the volume fraction of piezoelectric vibrator occupied by piezoelectric phase and air phase b ＝1-v a ；
Step six, the air gap type piezoelectric vibrator is a vibration mode with uniform thickness, so that the transverse strain of the whole vibrator is zero, and the piezoelectric phase and the polymer phase are connected in series in the x and y directions, the transverse strain of the vibrator is obtained by weighting the piezoelectric phase and the polymer phase, and the transverse stress is equal to the piezoelectric phase, the polymer phase and the polymer phase:
substituting formula (10) into formulas (6) to (7) to reduce the strain epsilon of the piezoelectric phase and the air phase 1 With respect to vertical strain ε 3 And a vertical electric field E 3 Is defined by the relation:
the relation of formula (11) is used for eliminating transverse strain ε 1 And (3) substituting the formula (11) into the formulas (6) to (7) to obtain delta 1 、δ 3 And D 3 With respect to epsilon 3 And E is 3 Is defined by the relation:
the upper and lower formulas in the formula (12) are respectively a simplified piezoelectric equation of a piezoelectric phase and an air phase;
epsilon of two formulas (12) according to formulas (8) and (9) 3 And E is 3 Weighted sum by volume fraction, then there is:
the formula (13) is the piezoelectric equation of the air gap type piezoelectric vibrator, and c is caused by almost no elasticity of the air medium 11 And c 12 Equal to zero, each piezoelectric unit column width of the piezoelectric layer is m, and the air gap is n, v a ＝m 2 /(m+n) 2 ，v b ＝(n 2 +2mn)/(m+n) 2 Substituted into formula (13):
converting equation (14) into a standard form of an e-type piezoelectric equation:
wherein,
and->All are zero, so the air gap type piezoelectric vibrator does not have a transverse directionStress in the direction; the vibration mode of the air gap type piezoelectric vibrator is completely concentrated on the thickness vibration mode, so that larger electromechanical conversion capability can be exerted;
the thickness electromechanical coupling coefficient k of the air gap type piezoelectric vibrator is shown as (15) t The density rho and acoustic impedance Z formula are adopted to prepare the piezoelectric resonator with high k by changing the width m of the piezoelectric resonator and the air gap n t Air gap type piezoelectric vibrator with low Z value.
9. A method of manufacturing the air gap type piezoelectric vibrator according to claim 8, characterized in that: the preparation method of the air gap type periodic piezoelectric vibrator comprises the following steps:
step one, determining the working frequency of an ultrasonic transducer and setting the working parameters of an air gap type piezoelectric vibrator;
step two, preparing a pre-cut sample; preparing a pre-cut piezoelectric material block, adhering the lower surface of the pre-cut piezoelectric material block with a metal panel coated with conductive adhesive, and fixing the pre-cut piezoelectric material block on a cutting substrate to prepare a pre-cut sample;
step three, preparing a primary cutting framework; finding the pre-cut sample in the second step in the visual area of the operation interface of the cutting machine, and setting the cutting step as (m+n) mm; the cutting machine is operated to enable the blade to cut unidirectionally along the y axis to form a primary cutting framework, and the cutting depth is set to be the same as the thickness of the piezoelectric material block during cutting so as to ensure that the bottom metal panel is not touched;
step four, preparing a secondary cutting framework; rotating a sample table of the cutting machine to 90 degrees, repeating the third step and keeping the cutting step parameters unchanged, so that the blade is cut unidirectionally along the x axis to form a secondary cutting framework;
step five, covering the top electrode; taking the metal panel coated with the conductive adhesive in the second step again, and attaching the metal panel to the top of the framework in the fourth step to prepare a top electrode;
and step six, removing the cutting substrate to form the air gap type piezoelectric vibrator.
10. A method of manufacturing an air gap type piezoelectric vibrator according to claim 2, characterized in that: the preparation method of the air gap type non-periodic piezoelectric vibrator comprises the following steps:
step one, determining the working frequency of an ultrasonic transducer, setting the working parameters of an air gap type piezoelectric vibrator and the size of a pouring die;
step two, preparing an aperiodic piezoelectric small column array; taking the filling and sealing die in the first step, slowly injecting the piezoelectric ceramic slurry into the die by using an injection molding process, and solidifying and demolding to form a piezoelectric ceramic column array with a ceramic substrate;
pouring epoxy resin and curing;
polishing the ceramic substrate;
attaching metal panels to the upper side and the lower side to manufacture a 1-3 piezoelectric vibrator;
and step six, injecting a polymer dissolving agent to fully dissolve the rigid epoxy and forming the air gap type piezoelectric vibrator.
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