CN117091695A - Device and method for calibrating linear error of photoelectric detector by array spectroscope - Google Patents
Device and method for calibrating linear error of photoelectric detector by array spectroscope Download PDFInfo
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- CN117091695A CN117091695A CN202311069926.1A CN202311069926A CN117091695A CN 117091695 A CN117091695 A CN 117091695A CN 202311069926 A CN202311069926 A CN 202311069926A CN 117091695 A CN117091695 A CN 117091695A
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- 238000001514 detection method Methods 0.000 claims description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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Abstract
The invention relates to a device and a method for calibrating a linear error of a photoelectric detector by adopting an array spectroscope, comprising the following steps: the laser comprises a laser light source, an array spectroscope, a photoelectric detector and an optical power meter, wherein the laser light source is provided with a beam shaper, and the photoelectric detector is connected with the optical power meter. The traditional power or energy adjustment method for calibrating the linear error of the photoelectric detector has the problems of high calibration difficulty, high calibration cost, low calibration efficiency and the like. Under the same specific wavelength light source, the photoelectric detector receives the reflected light or the transmitted light of the array spectroscope respectively, so that a photoelectric detector measured value and a laser power theoretical value can be obtained; fitting the laser power value of each point measured by the photoelectric detector with the corresponding laser power theoretical value to obtain the functional relation between the laser power theoretical value and the photoelectric detector measured value, wherein the power theoretical value=the power measured value×the calibration coefficient.
Description
Technical Field
The invention belongs to the technical field of photoelectric detector calibration, and particularly relates to a device and a method for calibrating a photoelectric detector linearity error by adopting an array spectroscope.
Background
The photoelectric detector is a sensing device, which converts a certain optical radiation into an electrical signal, and then performs signal processing to achieve a certain purpose, and is a core component of the photoelectric system, and the performance of the photoelectric system is directly affected by the performance of the photoelectric system.
At present, photoelectric detectors are of various types and widely applied to various fields of military and national economy, such as meteorological monitoring, photometry, industrial automatic control, thermal imaging, infrared remote sensing and the like. Along with the continuous development of technology, the precision requirement of the photoelectric detector is higher and higher, and the nonlinear error is a main factor influencing the precision of the photoelectric detector, and the measurement precision and reliability of the detector can be greatly improved by periodically calibrating and correcting the nonlinear error.
The existing method for calibrating the linear error of the photoelectric detector has the problems of high calibration difficulty, high calibration cost, low calibration efficiency and the like, and is not suitable for rapidly calibrating the photoelectric detector.
Disclosure of Invention
Aiming at the problems, the invention aims to provide a method for calibrating the linear error of a photoelectric detector by using an array spectroscope, which is used for simply, accurately and rapidly calibrating and testing the linear error of the photoelectric detector.
The technical scheme of the invention is as follows:
an apparatus for calibrating a linear error of a photodetector using an array spectroscope, comprising: the device comprises a laser light source, an array spectroscope, a photoelectric detector and an optical power meter;
the laser light source is used for emitting laser, and is provided with a beam shaper which is used for converting light emitted by the laser light source into parallel laser;
the optical power meter is used for converting energy received by the photoelectric detector into power;
the photoelectric detector is connected with the optical power meter.
Further, the output power of the laser light source is mW level.
Further, the divergence angle of the beam shaper is better than 1mrad, and the size of the shaped light spot is smaller than the size of the detection target surface of the optical power meter.
Further, the array spectroscope has a spectral ratio which is calibrated and tested by a high-precision spectrophotometer, and the transmittance error is better than 0.5%.
The invention also provides a method for calibrating the linear error of the photoelectric detector by adopting the array spectroscope, the array spectroscope comprises different spectroscopes, the reflectivity and the transmissivity of the different spectroscopes are different, the reflectivity of the spectroscope is R, and the transmissivity is T, and the method comprises the following steps:
1) The laser emitted by the laser source irradiates the photoelectric detector, the reading of an optical power meter connected with the photoelectric detector is X, and the power of the laser is P;
2) Laser emitted by the laser light source is transmitted into the photoelectric detector through a spectroscope, the reading of an optical power meter connected with the photoelectric detector is X1, and the theoretical value P1 of the laser power is T multiplied by P;
3) Laser emitted by the laser light source is reflected by a spectroscope and enters the photoelectric detector, the reading of an optical power meter connected with the photoelectric detector is X2, and the theoretical value P2 of the laser power is R multiplied by P;
4) The spectroscope is sequentially arranged to form an array, and the optical power meter reading Xi and the laser power theoretical value Pi which are connected with the photoelectric detector are recorded, wherein the theoretical value of the laser power is the product of the transmittance of one or more spectroscopes through which laser emitted by the laser passes and the reflectance of one or more spectroscopes through which the laser passes and the laser power;
5) The reading of the optical power meter connected with the photoelectric detector is a photoelectric detector measured value, fitting is carried out according to the measured value obtained by measuring the photoelectric detector and a corresponding laser power theoretical value, and a functional relation between the laser power theoretical value and the photoelectric detector measured value is obtained, wherein the laser power theoretical value = the photoelectric detector measured value x a calibration coefficient, and the calibration coefficient is a linear error.
The invention has the following beneficial technical effects:
the calibrated spectroscopes are selected for experiments, the spectroscopes with different spectroscopes ratios are arranged and combined, the theoretical values of the reflectivity and the transmissivity of the spectroscope group are uniformly distributed from 0 to 100, and the fitting result is more accurate.
Drawings
FIG. 1 is a schematic diagram of an array spectroscope calibrating a photodetector linearity error.
FIG. 2 is a schematic view of the detector positioned directly above the first beam splitter 2-1.
Fig. 3 is a schematic view of the detector placed directly above the second beam splitter 2-2.
FIG. 4 is a schematic view of the detector positioned directly above the third beam splitter 2-3.
FIG. 5 is a schematic view of the detector positioned directly behind the third beam splitter 2-3.
The reference numerals of the parts in the drawings illustrate:
1-laser source, 2-1-first spectroscope, 2-2-second spectroscope, 2-3-third spectroscope, 2-N-Nth spectroscope, 3-photoelectric detector, 4-optical power meter.
Detailed Description
For a better understanding of the present invention, the following examples are set forth to illustrate the present invention further, but are not to be construed as limiting the present invention.
Taking a spectroscope array formed by three spectroscopes as an example, the reflectivities of the first spectroscope 2-1, the second spectroscope 2-2 and the third spectroscope 2-3 are respectively R1, R2 and R3, the transmittances are respectively T1, T2 and T3, and the laser power is P. To improve the accuracy of the fitting result, the spectroscope may select that the theoretical values of reflectivity and transmissivity are uniformly distributed from 0 to 100, for example, r1=0.05, t1=0.95, r2=0.2, t2=0.8, r3=0.4, t3=0.6.
FIG. 1 is a schematic diagram of a spectroscopic array for calibrating the linearity errors of a photodetector. And through different spectroscope combinations, the indication value of the optical power meter connected with the photoelectric detector when the spectroscope reflects and transmits is measured and used as a photoelectric detector measurement value, the photoelectric detector measurement value is fitted with a laser power theoretical value, and the functional relation between the laser power theoretical value and the photoelectric detector measurement value is further obtained. The spectroscope array comprises N spectroscopes, in particular a first spectroscope 2-1, a second spectroscope 2-2 and a third spectroscope 2-3, and the spectroscope array comprises N spectroscopes 2-N.
Fig. 2 is a schematic view of the photodetector disposed directly above the first beam splitter 2-1. The photoelectric detector 3 is arranged right above the first spectroscope 2-1, laser is reflected by the first spectroscope 2-1 to enter the photoelectric detector 3, the theoretical value of laser power is P1=PxR1, and the indication value of the optical power meter 4 connected with the photoelectric detector 3 is X1.
Fig. 3 is a schematic view showing the placement of the detector directly above the second beam splitter 2-2. The first spectroscope 2-1 and the second spectroscope 2-2 are positioned at the original positions, laser is transmitted through the first spectroscope 2-1 and reflected through the second spectroscope 2-2 to enter the photoelectric detector 3, the theoretical value of laser power is P2=PxT1 xR 2, and the indication value of the optical power meter 4 connected with the photoelectric detector 3 is X2; taking the first spectroscope 2-1 away, enabling the second spectroscope 2-2 to be located at an original position, reflecting laser to enter the photoelectric detector 3 through the second spectroscope 2-2, enabling a theoretical value of laser power to be P3=PxR2, and enabling an indication value of an optical power meter 4 connected with the photoelectric detector 3 to be X3;
fig. 4 is a schematic view showing that the photodetector 3 is placed right above the third beam splitter 2-3. The photoelectric detector 3 is arranged right above the third spectroscope 2-3, the first spectroscope 2-1, the second spectroscope 2-2 and the third spectroscope 2-3 are positioned at original positions, laser is transmitted by the first spectroscope 2-1 and the second spectroscope 2-2 and reflected by the third spectroscope 2-3 to enter the photoelectric detector 3, the theoretical value of laser power is P4=PxT1 xT2 xR 3, and the indication value of the optical power meter 4 connected with the photoelectric detector 3 is X4; taking the first spectroscope 2-1 away, enabling the second spectroscope 2-2 and the third spectroscope 2-3 to be positioned at original positions, transmitting laser through the second spectroscope 2-2 and reflecting the laser through the third spectroscope 2-3 to enter the photoelectric detector 3, wherein the theoretical value of laser power is P5=PxT2xR 3, and the indication value of an optical power meter 4 connected with the photoelectric detector 3 is X5; taking the second spectroscope 2-2 away, enabling the first spectroscope 2-1 and the third spectroscope 2-3 to be located at original positions, transmitting laser through the first spectroscope 2-1 and reflecting the laser through the third spectroscope 2-3 to enter the photoelectric detector 3, wherein the theoretical value of laser power is P6=PxT1 xR 3, and the indication value of an optical power meter 4 connected with the photoelectric detector 3 is X6; the first spectroscope 2-1 and the second spectroscope 2-2 are taken away, the third spectroscope 2-3 is located at an original position, laser is reflected by the third spectroscope 2-3 to enter the photoelectric detector 3, the theoretical value of laser power is P7=PxR3, and the indication value of the optical power meter 4 connected with the photoelectric detector 3 is X7.
Fig. 5 is a schematic view of the photodetector positioned right behind the third beam splitter 2-3. The photoelectric detector 3 is arranged right behind the third spectroscope 2-3, the first spectroscope 2-1, the second spectroscope 2-2 and the third spectroscope 2-3 are positioned at original positions, laser is transmitted into the photoelectric detector 3 through the first spectroscope 2-1, the second spectroscope 2-2 and the third spectroscope 2-3, the theoretical value of laser power is P8=PxT1 xT2 xT 3, and the indication value of the optical power meter 4 connected with the photoelectric detector 3 is X8; taking the first spectroscope 2-1 away, enabling the second spectroscope 2-2 and the third spectroscope 2-3 to be located at original positions, enabling laser to be transmitted into the photoelectric detector 3 through the second spectroscope 2-2 and the third spectroscope 2-3, enabling a theoretical value of laser power to be P9=PxT2 xT 3, and enabling an indication value of an optical power meter 4 connected with the photoelectric detector 3 to be X9; taking the second spectroscope 2-2 away, enabling the first spectroscope 2-1 and the third spectroscope 2-3 to be located at original positions, enabling laser to be transmitted into the photoelectric detector 3 through the first spectroscope 2-1 and the third spectroscope 2-3, enabling a theoretical value of laser power to be P10=PxT1 xT 3, and enabling an indication value of an optical power meter 4 connected with the photoelectric detector 3 to be X10; taking the third spectroscope 2-3, enabling the first spectroscope 2-1 and the second spectroscope 2-2 to be located at original positions, enabling laser to be transmitted into the photoelectric detector 3 through the first spectroscope 2-1 and the second spectroscope 2-2, enabling a theoretical value of laser power to be P11=PxT1 xT 2, and enabling an indication value of an optical power meter 4 connected with the photoelectric detector 3 to be X11; taking the first spectroscope 2-1 and the second spectroscope 2-2, enabling the third spectroscope 2-3 to be located at an original position, transmitting laser into the photoelectric detector 3 through the third spectroscope 2-3, wherein the theoretical value of laser power is P12=PxT3, and the indication value of an optical power meter 4 connected with the photoelectric detector 3 is X12; taking the first spectroscope 2-1 and the third spectroscope 2-3, enabling the second spectroscope 2-2 to be located at an original position, transmitting laser into the photoelectric detector 3 through the second spectroscope 2-2, wherein the theoretical value of laser power is P13=PxT2, and the indication value of an optical power meter 4 connected with the photoelectric detector 3 is X13; taking the second spectroscope 2-2 and the third spectroscope 2-3 away, enabling the first spectroscope 2-1 to be located at an original position, enabling laser to be transmitted into the photoelectric detector 3 through the first spectroscope 2-1, enabling a theoretical value of laser power to be P14=PxT1, and enabling an indication value of an optical power meter 4 connected with the photoelectric detector 3 to be X14; and taking out the first spectroscope 2-1, the second spectroscope 2-2 and the third spectroscope 2-3 (no spectroscope exists between the laser and the photoelectric detector), wherein the theoretical value of laser power is P15=P, and the indication value of the optical power meter 4 connected with the photoelectric detector 3 is X15.
Fitting the theoretical values P1, …, P15 to the measured values X1, …, X15 can obtain a functional relationship between the theoretical laser power value and the measured value of the photodetector, pi=xi×ki, where ki is a calibration coefficient. The more spectroscope types used, the more accurate the fitting result.
Parts of the invention not set forth in detail are well known in the art.
While the invention has been described with respect to specific embodiments thereof, it will be appreciated that the invention is not limited thereto, but rather encompasses modifications and substitutions within the scope of the present invention as will be appreciated by those skilled in the art.
Claims (5)
1. An apparatus for calibrating a linear error of a photodetector using an array spectroscope, comprising: the device comprises a laser light source, an array spectroscope, a photoelectric detector and an optical power meter;
the laser light source is used for emitting laser, and is provided with a beam shaper which is used for converting light emitted by the laser light source into parallel laser;
the optical power meter is used for converting energy received by the photoelectric detector into power;
the photoelectric detector is connected with the optical power meter.
2. The apparatus of claim 1 wherein the laser source output power is of the order of mW.
3. The apparatus of claim 1, wherein the beam shaper diverges at an angle of better than 1mrad and the shaped spot size is less than the detection target size of the optical power meter.
4. The apparatus of claim 1, wherein the array beam splitter has a split ratio that is calibrated by a high precision spectrophotometer and a transmittance error that is better than 0.5%.
5. A method for calibrating a linear error of a photoelectric detector by adopting an array spectroscope is characterized in that the array spectroscope comprises different spectroscopes, the reflectivities and the transmittances of the different spectroscopes are different, the reflectivities of the spectroscopes are R, and the transmittances of the spectroscopes are T, and the method comprises the following steps:
1) The laser emitted by the laser source irradiates the photoelectric detector, the reading of an optical power meter connected with the photoelectric detector is X, and the power of the laser is P;
2) Laser emitted by the laser light source is transmitted into the photoelectric detector through a spectroscope, the reading of an optical power meter connected with the photoelectric detector is X1, and the theoretical value P1 of the laser power is T multiplied by P;
3) Laser emitted by the laser light source is reflected by a spectroscope and enters the photoelectric detector, the reading of an optical power meter connected with the photoelectric detector is X2, and the theoretical value P2 of the laser power is R multiplied by P;
4) The spectroscope is sequentially arranged to form an array, and the optical power meter reading Xi and the laser power theoretical value Pi which are connected with the photoelectric detector are recorded, wherein the theoretical value of the laser power is the product of the transmittance of one or more spectroscopes through which laser emitted by the laser passes and the reflectance of one or more spectroscopes through which the laser passes and the laser power;
5) The reading of the optical power meter connected with the photoelectric detector is a photoelectric detector measured value, fitting is carried out according to the measured value obtained by measuring the photoelectric detector and a corresponding laser power theoretical value, and a functional relation between the laser power theoretical value and the photoelectric detector measured value is obtained, wherein the laser power theoretical value = the photoelectric detector measured value x a calibration coefficient, and the calibration coefficient is a linear error.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311069926.1A CN117091695A (en) | 2023-08-24 | 2023-08-24 | Device and method for calibrating linear error of photoelectric detector by array spectroscope |
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| CN202311069926.1A CN117091695A (en) | 2023-08-24 | 2023-08-24 | Device and method for calibrating linear error of photoelectric detector by array spectroscope |
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