CN117091581B - Vibration gyro damping coupling inhibition method based on double-axis frequency division multiplexing - Google Patents
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- G—PHYSICS
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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- G—PHYSICS
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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Abstract
The invention discloses a vibration gyro damping coupling inhibition method based on double-axis frequency division multiplexing. The conventional force feedback control applies driving force to a driving mode, maintains the driving mode in a resonance state, and the detection mode applies feedback force and maintains the driving mode in a displacement-free state, but due to damping coupling, the problem of inaccurate angular velocity measurement exists. The technology utilizes the frequency mismatch of the X mode and the Y mode, applies driving forces with different frequencies to the two modes simultaneously, so that the two modes vibrate respectively and simultaneously at respective resonant frequencies, angular velocity is measured simultaneously on the two modes, and damping coupling can be restrained through the operation of the output quantity of a control frame on the two modes. The invention suppresses damping coupling and improves the measurement accuracy of the gyroscope.
Description
Technical Field
The invention relates to a vibration gyro damping coupling inhibition method based on double-axis frequency division multiplexing, and belongs to the technical field of gyroscopes.
Background
MEMS coriolis vibrating gyroscopes have been the focus of gyroscopes for neighborhood research due to their small size, low power consumption, high reliability, and the like, and will also be the main research reversal for some time later. The classical control framework of the gyroscope comprises a driving mode and a detection mode, but due to unavoidable error items such as manufacturing errors and the like, coupling error items exist between the two modes, and the errors can cause deviation of the finally measured angular velocity. In order to solve this problem, methods such as quadrature stiffness tuning are widely used. Practical researches show that the stiffness coupling of the coriolis vibrating gyroscope can be greatly reduced by a quadrature stiffness tuning mode. In practical applications, it is found that in the quadrature stiffness tuning mode, a damping coupling term still exists, resulting in an angular velocity measurement that is still affected by the damping coupling.
Disclosure of Invention
Technical problems: under the conventional control mode, the angular velocity measurement has damping coupling errors, which are in phase with the same frequency as the Goos signal, and cannot be removed through phase-sensitive demodulation, so that the angular velocity measurement result is influenced by damping coupling.
The technical scheme is as follows: in order to solve the technical problems, in the vibration gyro damping coupling inhibition method based on double-axis frequency division multiplexing, in the scheme, when a Goldrake vibration gyro harmonic oscillator works normally in a conventional force feedback mode, the vibration gyro harmonic oscillator is divided into a driving mode and a detection mode, the driving mode is provided with an amplitude control loop and a frequency control loop, the driving mode can vibrate stably under the mode resonance frequency in a stable state, when external angular velocity input exists, the frequency can be coupled to the detection mode in a Goldrake force mode, and the detection mode keeps stable by applying feedback force. The technology utilizes the frequency mismatch of a driving mode and a detection mode, applies driving forces with different frequencies to the two modes simultaneously, enables the two modes to vibrate respectively and simultaneously at respective resonant frequencies, simultaneously measures the angular velocity on the two modes, and can restrain damping coupling through the operation of the output quantity of a control frame on the two modes.
In order to achieve the above object, the technical scheme of the present invention is as follows: a vibration gyro damping coupling suppression system based on double-axis frequency division multiplexing comprises a gyro harmonic oscillator, a first capacitance/voltage conversion circuit, a second capacitance/voltage conversion circuit, a first demodulation circuit, a second demodulation circuit, a first amplitude-phase control and angular velocity measurement circuit, a second amplitude-phase control and angular velocity measurement circuit, a first voltage/driving force conversion circuit and a second voltage/driving force conversion circuit, The two modal capacitance detection values d x and d y of the gyro harmonic oscillator are respectively converted into an electric signal v x representing the X modal vibration displacement and an electric signal v y representing the Y modal vibration displacement through a first capacitance/voltage conversion circuit and a second capacitance/voltage conversion circuit, Demodulated outputs c x1,sx1,sy1 through sin omega x t and cos omega x t, demodulated outputs c y2,sx2,sy2 through sin omega y t and cos omega y t, Where ω x denotes the X-mode vibration frequency at steady state, ω y denotes the Y-mode vibration frequency at steady state, c x1 denotes the cos ω x t component of the displacement signal v x, s x1 denotes the sin ω x t component of the displacement signal v x, s y1 denotes the sin ω x t component of the displacement signal v y, c y2 denotes the cos omega y t component of the displacement signal v y, s x2 denotes the sin omega y t component of the displacement signal v x, s y2 represents sin omega y t component of displacement signal v y, and after input of first amplitude-phase control and angular velocity measurement and second amplitude-phase control and angular velocity measurement, voltage signals vf y2 and vf x2 of coupling force can be obtained respectively, The driving force voltage signals vf x and vf y, and v 1 and v 2 containing angular velocity information, which are finally applied to the XY mode.
A vibration gyro damping coupling suppression method based on biaxial frequency division multiplexing, comprising the following steps:
Step 1) exciting XY modes to respective resonance frequencies respectively;
Step 2) respectively constructing detection loops in two modes, setting the XY mode displacement of a gyroscope to be A xcosωx t and A ycosωy t respectively, outputting c x1,sx1,sy1 and c y2,sx2,sy2 respectively through a demodulation module and a PI module, inputting the demodulated signals into a first amplitude-phase control and angular velocity measurement module and a second amplitude-phase control and angular velocity measurement module, respectively obtaining voltage signals vf y2 and vf x2 of coupling force, finally applying driving force voltage signals vf x and vf y on the XY mode and v 1 and v 2 containing angular velocity information, wherein the signal vf y2 output by the first amplitude-phase control and angular velocity measurement module is input into the balanced coupling force of the amplitude-phase control and angular velocity measurement module, vf x is applied to the X mode through a first voltage/driving force conversion circuit, and the signal vf x2 output by the amplitude-phase control and angular velocity measurement module is input into the balanced coupling force of the amplitude-phase control and angular velocity measurement module, and vf y is applied to the Y through a second voltage/driving force conversion circuit;
And 4) processing the outputs v 1 and v 2 to inhibit damping coupling.
Further, step 1) excites XY modes to respective resonance frequencies, the oscillation of the X mode is coupled to the Y mode in the form of a coriolis force, the oscillation of the Y mode is coupled to the X mode in the form of a coriolis force, and the two mode capacitance detection values d x and d y of the gyro are respectively converted into an electric signal v x representing the X mode vibration displacement and an electric signal v y representing the Y mode vibration displacement through the first capacitance/voltage conversion circuit and the second capacitance/voltage conversion circuit, respectively.
Further, in the step 2), the electric signal v x indicating the X-mode vibration displacement and the electric signal v y indicating the Y-mode vibration displacement are outputted c x1,sx1,sy1 through demodulation of sin ω x t and cos ω x t, the demodulated output c y2,sx2,sy2,cx1 from sin omega y t and cos omega y t represents the cos omega x t component of the displacement signal v x, s x1 denotes the sin ω x t component of the displacement signal v x, s y1 denotes the sin ω x t component of the displacement signal v y, c y2 denotes the cos omega y t component of the displacement signal v y, s x2 denotes the sin omega y t component of the displacement signal v x, s y2 represents the sin ω y t component of the displacement signal v y.
Further, in step 3), after the demodulated signal is input into the first amplitude-phase control and angular velocity measurement and the second amplitude-phase control and angular velocity measurement, the voltage signals vf y2 and vf x2 of the coupling force can be obtained respectively, and finally the driving force voltage signals vf x and vf y applied on the XY mode and v 1 and v 2,vfx and vf y containing the angular velocity information are multiplied by sin ω x t and sin ω y t respectively to obtain vf x1 and vf y1, which are part of the driving force voltage signals of the XY mode.
Further, in step 4), v 1 is multiplied by the Y mode vibration frequency ω y at the time of stabilization, v 2 is multiplied by the X mode vibration frequency ω x at the time of stabilization, and then the two products are subtracted, thereby suppressing the damping coupling.
The proposal utilizes the fact that the resonance frequencies of two modes are unequal, applies driving force to the two modes at the same time, leads the two modes to vibrate respectively at the same time under the respective resonance frequencies, designs detection mode loops respectively, and the XY modes are excited under the frequencies omega x and omega y, wherein omega x represents the vibration frequency of the X mode when stable, omega y represents the Y-mode vibration frequency at steady state, The two modal capacitance detection values d x and d y are respectively converted into an electric signal c x representing the X-modal vibration displacement and an electric signal c y representing the Y-modal vibration displacement by the first capacitance/voltage conversion circuit and the second capacitance/voltage conversion circuit, Through demodulation output c x1,sx1,sy1 of sin omega x t and cos omega x t, the demodulated output c y2,sx2,sy2,cx1 from sin omega y t and cos omega y t represents the cos omega x t component of the displacement signal v x, s x1 denotes the sin ω x t component of the displacement signal v x, s y1 denotes the sin ω x t component of the displacement signal v y, c y2 denotes the cos omega y t component of the displacement signal v y, s x2 denotes the sin omega y t component of the displacement signal v x, s y2 represents sin omega y t component of displacement signal v y, and after input of first amplitude-phase control and angular velocity measurement and second amplitude-phase control and angular velocity measurement, voltage signals vf y2 and vf x2 of coupling force can be obtained respectively, The driving force voltage signals vf x and vf y that are finally applied to the XY mode, And v 1, v 2,vfx, and vf y, which contain angular velocity information, are multiplied by sin ω x t and sin ω y t, respectively, to obtain vf x1 and vf y1, which are part of the XY modal driving force voltage signal, respectively.
Compared with the prior art, the invention has the following advantages: under conventional control, due to the existence of damping coupling and certain error of an angular velocity measurement result, the vibration gyro damping coupling suppression method based on biaxial frequency division multiplexing is adopted, v 1 and v 2 containing angular velocity information are output by the system, v 1 is multiplied by Y-mode vibration frequency omega y in the stable state, v 2 is multiplied by X-mode vibration frequency omega x in the stable state, and then the products are subtracted, so that the final result is 2kA yωxωyΩ+2kAyωxωy omega, no damping coupling item exists, and damping coupling of the vibration gyro is suppressed.
Drawings
FIG. 1 is a block diagram of a system implementation of the present invention;
FIG. 2 is a block diagram of an implementation of a demodulation module according to the present invention;
FIG. 3 is a block diagram of a demodulation module according to the present invention;
FIG. 4 is a block diagram of an implementation of a module for controlling amplitude and phase and measuring angular velocity according to the present invention;
fig. 5 is a block diagram showing the implementation of two modules of the invention for controlling the amplitude and phase and measuring the angular velocity.
Detailed Description
In order to enhance the understanding of the present invention, the present embodiment will be described in detail with reference to the accompanying drawings.
Example 1: a vibration gyro damping coupling suppression system based on double-axis frequency division multiplexing is shown in figure 1, and comprises a gyro harmonic oscillator, a first capacitance/voltage conversion circuit, a second capacitance/voltage conversion circuit, a first demodulation, a second demodulation, a first amplitude-phase control and angular velocity measurement, a second amplitude-phase control and angular velocity measurement, a first voltage/driving force conversion circuit and a second voltage/driving force conversion circuit, The two modal capacitance detection values d x and d y of the gyro harmonic oscillator are respectively converted into an electric signal v x representing the X modal vibration displacement and an electric signal v y representing the Y modal vibration displacement through a first capacitance/voltage conversion circuit and a second capacitance/voltage conversion circuit, Demodulated outputs c x1,sx1,sy1 through sin omega x t and cos omega x t, demodulated outputs c y2,sx2,sy2 through sin omega y t and cos omega y t, Where ω x denotes the X-mode vibration frequency at steady state, ω y denotes the Y-mode vibration frequency at steady state, c x1 denotes the cos ω x t component of the displacement signal v x, s x1 denotes the sin ω x t component of the displacement signal v x, s y1 denotes the sin ω x t component of the displacement signal v y, c y2 denotes the cos omega y t component of the displacement signal v y, s x2 denotes the sin omega y t component of the displacement signal v x, s y2 represents sin omega y t component of displacement signal v y, and after input of first amplitude-phase control and angular velocity measurement and second amplitude-phase control and angular velocity measurement, voltage signals vf y2 and vf x2 of coupling force can be obtained respectively, The driving force voltage signals vf x and vf y, and v 1 and v 2 containing angular velocity information, which are finally applied to the XY mode.
Example 2: as shown in FIG. 1, a vibration gyro damping coupling suppression method based on biaxial frequency division multiplexing is provided, and a gyro harmonic oscillator basic equation is as follows:
Wherein m represents modal equivalent mass, C x,Cy is a damping coefficient of XY mode respectively, k x,ky is a stiffness coefficient of XY mode respectively, C xy,kxy is a damping coupling coefficient and a stiffness coupling coefficient between two modes respectively, F x and F y are driving forces of XY mode respectively, k is a precession factor, Ω is an external input angular velocity, x and y are displacements of XY mode respectively, And (3) withThe corresponding primary differential value and secondary differential value respectively.
In fig. 1, ω x represents the X-mode vibration frequency at which the resonator vibrates stably, ω y represents the Y-mode vibration frequency at which the resonator vibrates stably, c x1 represents the cos ω x t component of the displacement signal v x, s x1 denotes the sin ω x t component of the displacement signal v x, s y1 denotes the sin ω x t component of the displacement signal v y, c y2 denotes the cos omega y t component of the displacement signal v y, s x2 denotes the sin omega y t component of the displacement signal v x, s y2 represents sin omega y t component of displacement signal v y, d x and d y are gyro XY mode output capacitance detection signals, v x and v y are voltage signals representing XY modal vibration displacements, vf x and vf y are voltage signals of XY modal driving forces, v 1 and v 2 are voltage signals including angular velocity, vf x2 is a partial driving force voltage signal for canceling coupling force in the X mode, vf y2 is a partial driving force voltage signal for canceling coupling force in the Y mode, The first capacitance-voltage conversion circuit and the second capacitance-voltage conversion circuit are respectively conversion circuits for converting the capacitance detection signals d x and d y into XY mode vibration displacement voltage signals v x and v y, The first and second voltage/driving force conversion circuits are conversion circuits for converting the XY mode driving force voltage signals vf x and vf y into XY mode driving force.
The invention comprises the following steps:
(1) In the dual-axis frequency division multiplexing mode, the gyroscope generates capacitance detection signals d x and d y in the XY mode, and an electric signal v x representing the X-mode vibration displacement and an electric signal v y representing the Y-mode vibration displacement are obtained after the capacitance detection signals are converted by a first capacitance-voltage conversion circuit and a second capacitance-voltage conversion circuit, With sin omega xt,cosωxt,sinωyt,cosωy t, under the action of the demodulation one module and the demodulation two modules, as shown in fig. 2 and 3, demodulation is performed to output c x1,sx1,sy1 and c y2,sx2,sy2 respectively, where c x1 represents the cos omega x t component of the displacement signal v x, s x1 denotes the sin ω x t component of the displacement signal v x, s y1 denotes the sin ω x t component of the displacement signal v y, c y2 denotes the cos omega y t component of the displacement signal v y, s x2 denotes the sin omega y t component of the displacement signal v x, s y2 denotes the sin omega y t component of the displacement signal v y, omega x denotes the X-mode vibration frequency at stability, Omega y represents the Y mode vibration frequency at steady state. Omega x represents the X-mode vibration frequency when the resonator is vibrating stably, and omega y represents the Y-mode vibration frequency when the resonator is vibrating stably. The LPF 1,LPF2,LPF3,LPF4,LPF5,LPF6 is a low-pass filter with a smaller cut-off frequency, and is used for filtering the second harmonic component and the high-frequency component after the corresponding products.
(2) In the vibration gyro for biaxial detection, each demodulated component signal is input into a first module for amplitude-phase control and angular velocity measurement and a second module for amplitude-phase control and angular velocity measurement, as shown in fig. 5 of fig. 4, where c x1 is cosω x t component of displacement signal v x in fig. 4, After passing through the amplitude reference A x and PI 2, A fx,PI2 is a proportional integral module, A fx is used as an amplitude representation of the force for maintaining stable vibration of the X mode under omega x, Multiplying a fx by sin omega x t gives vf x1,vfx1 as part of the X-mode driving force voltage signal. s x1 is sin omega x t component of the voltage signal v x representing displacement, and is input into the DDS 1 module after passing through the PI 5, The modules for generating sin omega x t and cos omega xt,DDS1 are direct frequency synthesizers, can output the needed sine and cosine signals according to the input voltage signals, PI 5 is a proportional integral module, s y1 is a sin omega x t component representing a displacement signal v y, The voltage signal v 1,PI1 containing the angular velocity can be obtained through PI 1 as a proportional integral module, The product of the voltage signal v 1 and sin omega x t can be used as a voltage signal of the voltage signal v x, which is obtained by adding the partial force vf y2,vfx1 of the Y mode for counteracting the coupling force and vf x2 from the two modules of amplitude-phase control and angular velocity measurement, as the driving force of the X mode. In the context of the illustration of figure 5, c y2 is the cos omega y t component representing the displacement signal v y, A fy,PI4 is the proportional integral module obtained after the amplitude reference A y and PI 4, a fy is representative of the magnitude of the force that maintains the Y-mode stable vibration at ω y, and multiplying a fy by sin ω y t yields vf y1,vfy1 as part of the Y-mode driving force voltage signal. s y2 is sin omega y t component representing displacement signal v y, and is input into DDS 2 module after PI 6, The modules for generating sin omega y t and cos omega yt,DDS2 are direct frequency synthesizers, can output the needed sine and cosine signals according to the input voltage signals, PI 6 is a proportional integral module, s x2 is a sin omega y t component representing a displacement signal v x, After PI 3, an electric signal v 2,PI3 containing angular velocity can be obtained as a proportional integral module, The product of v 2 and sin omega y t can be used as a voltage signal of vf y obtained by adding partial force vf x2,vfy1 of the X mode for counteracting the coupling force and vf y2 from an amplitude-phase control and angular velocity measurement module as a Y mode driving force;
(3) In the vibration gyro with double-axis detection, two groups of electric signals v 1 and v 2 containing angular velocity can be obtained in the mode of (2), and v1＝-CxyAyωy-2kAyωyΩ,v2＝-CxyAxωx+2kAxωxΩ;
(4) As shown in fig. 1, vf x is input to the top X mode through the first voltage/driving force conversion circuit as the driving force of the X mode, and vf y is input to the top Y mode through the second voltage/driving force conversion circuit as the driving force of the Y mode. Subsequent processing of v 1 and v 2 may be to subtract the product of v 2 and ω 2 from the product of v 1 and ω y and then coefficient scale.
(5)v1ωy-v2ωx＝2kAxωxωyΩ+2kAyωxωyΩ
The left side in the above formula is data which can be output in a loop, the right side is omega term with coefficient, v 1 and v 2 are voltage signals containing angular velocity, omega x represents X mode vibration frequency when a harmonic oscillator vibrates stably, omega y represents Y mode vibration frequency when the harmonic oscillator vibrates stably, omega xωy can be obtained according to system output, A x and A y are XY mode vibration amplitude values, the standard can be set to be equal, k is precession factor, omega is external input angular velocity, and damping coupling term does not exist in the result, so vibration gyro damping coupling can be restrained through calibration of the coefficient.
It should be noted that the above-mentioned embodiments are not intended to limit the scope of the present invention, and equivalent changes or substitutions made on the basis of the above-mentioned technical solutions fall within the scope of the present invention as defined in the claims.
Claims (5)
1. A vibration gyro damping coupling suppression system based on double-axis frequency division multiplexing is characterized by comprising a gyro harmonic oscillator, a first capacitance/voltage conversion circuit, a second capacitance/voltage conversion circuit, a first demodulation, a second demodulation, a first amplitude-phase control and angular velocity measurement, a second amplitude-phase control and angular velocity measurement, a first voltage/driving force conversion circuit and a second voltage/driving force conversion circuit, The two modal capacitance detection values d x and d y of the gyro harmonic oscillator are respectively converted into an electric signal v x representing the X modal vibration displacement and an electric signal v y representing the Y modal vibration displacement through a first capacitance/voltage conversion circuit and a second capacitance/voltage conversion circuit, the electric signal v x of the X-mode vibration displacement and the electric signal v y of the Y-mode vibration displacement are demodulated to output c x1,sx1,sy1 of sin omega x t and cos omega x t, The electric signal v x of the X-mode vibration displacement and the electric signal v y of the Y-mode vibration displacement are demodulated to output c y2,sx2,sy2 of sin omega y t and cos omega y t, Where ω x denotes the X-mode vibration frequency at steady state, ω y denotes the Y-mode vibration frequency at steady state, c x1 denotes the cos ω x t component of the displacement signal v x, s x1 denotes the sin ω x t component of the displacement signal v x, s y1 denotes the sin ω x t component of the displacement signal v y, c y2 denotes the cos omega y t component of the displacement signal v y, s x2 denotes the sin omega y t component of the displacement signal v x, s y2 represents the sin omega y t component of the displacement signal v y, c x1,sx1,sy1 and c y2,sx2,sy2 are respectively input into the first amplitude control and angular velocity measurement and the second amplitude control and angular velocity measurement, The voltage signals vf y2 and vf x2 of the coupling force can be obtained respectively, and finally the driving force voltage signals vf x and vf y applied on the XY mode are output, And v 1 and v 2 containing angular velocity information, multiplying v 1 by the Y-mode vibration frequency at steady state ω y, And multiplying v 2 by the X-mode vibration frequency omega x in the stable state, and subtracting the products to inhibit damping coupling.
2. The vibration gyro damping coupling inhibition method based on biaxial frequency division multiplexing is characterized by comprising the following steps of:
Step 1) exciting XY modes to respective resonance frequencies respectively;
Step 2) respectively constructing detection loops in two modes, setting the XY mode displacement of the gyroscope to be A xcosωx t and A ycosωy t respectively, respectively outputting c x1,sx1,sy1 and c y2,sx2,sy2 through demodulation of a demodulation first module and a demodulation second module and a PI module, Where ω x denotes the X-mode vibration frequency at steady state, ω y denotes the Y-mode vibration frequency at steady state, c x1 denotes the cos ω x t component of the displacement signal v x, s x1 denotes the sin ω x t component of the displacement signal v x, s y1 denotes the sin ω x t component of the displacement signal v y, c y2 denotes the cos omega y t component of the displacement signal v y, s x2 denotes the sin omega y t component of the displacement signal v x, s y2 denotes the sin ω y t component of the displacement signal v y; A x and A y are XY mode vibration amplitude values;
step 3) inputting the demodulated signals into a first amplitude-phase control and angular velocity measurement circuit and a second amplitude-phase control and angular velocity measurement circuit, obtaining voltage signals vf y2 and vf x2 of coupling force respectively, finally outputting driving force voltage signals vf x and vf y applied on an XY mode and v 1 and v 2 containing angular velocity information, wherein the signal vf y2 output by the first amplitude-phase control and angular velocity measurement circuit is input into a balanced coupling force of the second amplitude-phase control and angular velocity measurement circuit, vf x is applied to the X mode through a first voltage/driving force conversion circuit, the signal vf x2 output by the second amplitude-phase control and angular velocity measurement circuit is input into a balanced coupling force of the first amplitude-phase control and angular velocity measurement circuit, and vf y is applied to the Y mode through a second voltage/driving force conversion circuit;
Step 4) processing the output v 1 and v 2 to inhibit damping coupling, multiplying v 1 by the stable Y-mode vibration frequency omega y, multiplying v 2 by the stable X-mode vibration frequency omega x, and subtracting the products to inhibit damping coupling.
3. The vibration gyro damping coupling suppression method based on biaxial frequency division multiplexing according to claim 2, wherein step 1) excites XY modes at respective resonance frequencies, respectively, oscillations of the X mode are coupled to the Y mode in the form of coriolis force, oscillations of the Y mode are coupled to the X mode in the form of coriolis force, and the gyro two mode capacitance detection values d x and d y are converted into an electric signal v x representing X mode vibration displacement and an electric signal v y representing Y mode vibration displacement, respectively, through a capacitance/voltage conversion circuit one and a capacitance/voltage conversion circuit one.
4. The vibration gyro damping coupling suppression method based on biaxial frequency division multiplexing according to claim 2, wherein in step 2), the electric signal v x representing the X-mode vibration displacement and the electric signal v y representing the Y-mode vibration displacement are output c x1,sx1,sy1 through demodulation of sin ω x t and cos ω x t, the demodulated output c y2,sx2,sy2,cx1 from sin omega y t and cos omega y t represents the cos omega x t component of the displacement signal v x, s x1 denotes the sin ω x t component of the displacement signal v x, s y1 denotes the sin ω x t component of the displacement signal v y, c y2 denotes the cos omega y t component of the displacement signal v y, s x2 denotes the sin omega y t component of the displacement signal v x, s y2 represents the sin ω y t component of the displacement signal v y.
5. The vibration gyro damping coupling suppression method based on biaxial frequency division multiplexing according to claim 2, wherein in step 3), after the demodulated signals are input into the first and second amplitude-phase control and angular velocity measurement, the voltage signals vf y2 and vf x2 of the coupling force can be obtained respectively, and finally the driving force voltage signals vf x and vf y applied on the XY mode and v 1 and v 2,vfx and vf y containing the angular velocity information are multiplied by sin ω x t and sin ω y t respectively to obtain vf x1 and vf y1, which are part of the driving force voltage signals of the XY mode respectively.
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| CN108332731A (en) * | 2018-01-26 | 2018-07-27 | 珠海全志科技股份有限公司 | Micromechanics simple oscialltor three-axis gyroscope |
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