CN117091492A - 3D three-dimensional structure joint sensor - Google Patents

3D three-dimensional structure joint sensor Download PDF

Info

Publication number
CN117091492A
CN117091492A CN202311044398.4A CN202311044398A CN117091492A CN 117091492 A CN117091492 A CN 117091492A CN 202311044398 A CN202311044398 A CN 202311044398A CN 117091492 A CN117091492 A CN 117091492A
Authority
CN
China
Prior art keywords
joint sensor
laser
sensor
dimensional structure
stereoscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311044398.4A
Other languages
Chinese (zh)
Inventor
程琳
姜兆辉
刘爱萍
陈冠政
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Sci Tech University ZSTU
Original Assignee
Zhejiang Sci Tech University ZSTU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Sci Tech University ZSTU filed Critical Zhejiang Sci Tech University ZSTU
Priority to CN202311044398.4A priority Critical patent/CN117091492A/en
Publication of CN117091492A publication Critical patent/CN117091492A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)

Abstract

The invention discloses a 3D three-dimensional structure joint sensor and a preparation method thereof, wherein the sensor comprises a laser-induced graphene sensitive element, the laser-induced graphene sensitive element is a circular discretized cutting unit, a wire is connected with two ends of the graphene sensitive element through silver colloid, the sensor has excellent flexibility and biocompatibility, can be used for measuring physiological signals of human fingers, and has the advantages of strong wearability, high following performance, simple manufacturing process and the like.

Description

3D three-dimensional structure joint sensor
Technical Field
The invention relates to the field of sensors, in particular to a joint sensor with a 3D (three-dimensional) structure.
Background
In order to obtain information from the outside, people must resort to the sense organs. The sensor is created for strengthening and researching natural phenomena and rules and perception activities during production activities. With the development of intelligent terminals, the requirements of people on intelligent environments are continuously improved, and the high-performance flexible sensor is one of the popular electronic sensors. Besides the continuous mapping function, the flexible sensor has the characteristics of high sensitivity, good flexibility, simple manufacturing process and the like, has actual and potential application in the aspects of temperature and pulse detection, facial expression recognition, motion monitoring and the like, and is widely applied to the emerging fields of wearable equipment, medical care, soft robots, human-computer interaction and the like.
However, most wearable devices based on flexible strain sensors still have the freedom degree limited in a two-dimensional plane when worn on a human body, lack of programmability, and are still fixed by an adhesive tape, which further restricts the application of the wearable devices in the wearable and man-machine interaction fields. The further structural design of the flexible strain sensor is an important way to improve its sensing, wearable and interactive performance. For example, a two-dimensional planar shape material is expanded into a 3D shape through a proper mode (folding, bending and cutting), and a material with a programmable shape is constructed to endow the material with special performance, so that the material has wider attraction in the fields of intelligent wearable sensing, programmable machines, artificial intelligence, functional biomedical equipment and the like.
Development of improved tactile sensors in the wearable and human-computer interaction fields is a current need for solving the problem.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides the 3D three-dimensional structure joint sensor, the LIG material with the 2D planar structure is flexibly expanded to 3D through a simple laser cutting process, and the 3D three-dimensional structure joint sensor provides omnibearing multifunctional intelligent wearable application for human finger detection and has the advantages of strong wearability, high following performance, simple manufacturing process and the like.
Technical proposal
A3D three-dimensional structure joint sensor and a preparation method thereof are characterized in that: and carrying out laser-induced patterning on the PI film, and then carrying out laser secondary shearing to obtain the 3D three-dimensional structure joint sensor.
The method comprises the following steps:
step one, preparing circular laser-induced graphene: and preparing the patterned laser-induced graphene on the substrate film by using an ultraviolet laser to prepare the circular laser-induced graphene.
Step two, circular laser induced graphene is cut again: and shearing the round laser-induced graphene by secondary shearing of laser in a primary marking cutting mode, dividing the round into a plurality of parallel discrete units, and obtaining the 3D three-dimensional structure joint sensor.
Preferably, the shape of the patterned laser-induced graphene in the first step is a circle with the diameter of 15-25 mm;
preferably, the material of the base film is selected from one of Polyimide (PI), phenolic Resin (PR), polydimethylsiloxane (PDMS), polyether Ether Ketone (PEEK), polyetherimide (PEI), polyethersulfone (PES).
Preferably, the parameters of the ultraviolet laser in the first step are as follows: the pulse wave frequency is 100-140 kHz, the pulse width is 1-4 mu s, the scanning speed is set to 15-45 mm/s, and the scanning interval is 0.005-0.02 mm;
preferably, in the second step, the shearing mode is a mode perpendicular to the laser-induced direction, and the cutting pitch is 0.1-10 mm. Meanwhile, the laser cutting parameters are that the pulse wave frequency is 15-25 kHz, the Q pulse width is 0.3-0.7 mu s, and the scanning speed is set to be 10-30 mm/s.
Furthermore, the invention also provides a 3D three-dimensional structure joint sensor, and the 3D three-dimensional structure joint sensor is prepared by the preparation method.
Furthermore, the invention also provides an application of the joint sensor with the 3D structure, wherein three-dimensional expansion can be realized by cutting the graphene in a plane by one-step laser, and the joint sensor can be ideally attached to each part of a body and is used for detecting the movement of limbs; the 3D three-dimensional structure joint sensor is used for detecting human finger movement information and is used for intelligent wearable or bionic artificial limbs.
Advantageous effects
Compared with the prior art, the invention has the following beneficial effects:
1. the shearing structure design is carried out, the manufacturing process is simple, and the LIG material with a two-dimensional plane structure can be flexibly expanded to be three-dimensional so as to adapt to complex curved surfaces;
2. the existing joint sensor is insufficient in the condition of being attached to the skin when in movement, and the joint sensor can completely fit the skin to make related actions, and has strong following performance and high adaptability; the skin cutting and following effects are good after cutting, and the skin cutting and following effects are beneficial to the fields of artificial intelligence, motion detection, man-machine interaction and the like;
drawings
FIG. 1 is an optical view of a 3D stereo joint sensor prepared in example 1;
FIG. 2 is a scanning electron microscope image of the 3D stereo joint sensor prepared in example 1;
FIG. 3 is an electrical signal response of tensile strain of the 3D stereo joint sensor prepared in example 1;
FIG. 4 is a graph showing the relative resistance change of the 3D stereo joint sensor prepared in example 1 at different tensile strains;
FIG. 5 is the cyclic stability of the 3D stereo joint sensor prepared in example 1 at different frequency strains;
FIG. 6 is the cyclic stability of the 3D stereo joint sensor prepared in example 1 at various tensile strains;
FIG. 7 is a graph of cyclic stretch-recovery test performance of the 3D stereo joint sensor prepared in example 1;
FIG. 8 is a graph showing the wearing of the 3D stereo joint sensor prepared in example 1 at a wooden finger model joint and its electrical signal variation;
FIG. 9 is a bending optical view of a conventional LIG flexible sensor;
FIG. 10 is a graph showing the detection of finger movement signals by applying the 3D stereo joint sensor prepared in example 1 to a human finger joint;
FIG. 11 is a graph showing the detection of finger movement signals by applying the 3D stereo joint sensor prepared in example 1 to a human knee joint;
FIG. 12 is an optical plot and corresponding electrical signal response to tensile strain for a 3D stereo joint sensor prepared in example 2;
fig. 13 is an optical diagram of the 3D stereoscopic joint sensor prepared in example 3 and the corresponding electrical signal response to tensile strain.
Detailed Description
The following is a clear and complete description of the present invention, taken in conjunction with the accompanying drawings, and it is evident that the described embodiments are some, but not all, embodiments of the present invention. Other embodiments of the invention, which are encompassed by the present invention, are within the scope of the invention as would be within the skill of those of ordinary skill in the art without undue burden. In addition, it will be appreciated by those skilled in the art that the 3D stereoscopic joint sensor according to the present invention can be applied to different joints of the human body to perform its detection function, wherein the joints include, but are not limited to, finger joints, knee joints, ankle joints, etc.
Example 1
The 3D three-dimensional structure joint sensor and the preparation method thereof are characterized by comprising the following steps:
step one, preparing circular laser-induced graphene: and preparing the patterned laser-induced graphene on the PI film, and preparing the circular laser-induced graphene by using an ultraviolet laser.
Step two, circular laser induced graphene is cut again: and (3) carrying out secondary shearing on the round laser-induced graphene by laser, and dividing the round graphene into a plurality of parallel discrete units. And shearing in a one-time marking cutting mode to obtain the 3D three-dimensional structure joint sensor.
The method comprises the core steps of the invention, and the 3D joint sensor with the three-dimensional structure can be obtained by performing laser secondary shearing on the patterned laser-induced graphene on the PI film.
Specifically, in the first step, an ultraviolet laser is selected for preparing the patterned laser-induced graphene on the PI film, the shape of the patterned laser-induced graphene is a circle with the diameter of 15-25 mm, and the parameters of the ultraviolet laser are as follows: the pulse wave frequency is 120kHz, the pulse width is 2 mu s, the scanning speed is set to be 30mm/s, and the scanning interval is 0.01mm;
and secondly, carrying out secondary shearing on the round laser-induced graphene through laser, and dividing the round graphene into a plurality of parallel discrete units. The shearing mode was a direction perpendicular to the laser-induced direction (tangential direction), and the cutting pitch was 0.5mm. Meanwhile, the laser cutting parameters are selected to be 20kHz of pulse wave frequency, 0.5 mu s of Q pulse width and 20mm/s of scanning speed.
Fig. 1 is an optical diagram of the sensor, fig. 2 is a scanning electron microscope diagram of a cut graphene material, fig. 3 is an electrical signal response of tensile strain, the sensor shows a response of an electrical signal exceeding 15% when being stretched, and the sensor shows sensitive and symmetrical electrical signal changes in the stretching and recovering processes, so that the linearity is good. Fig. 4 shows the relative resistance change of the sensor at different tensile strains, where it can be seen that at 20% tensile strain the sensor exhibits a more linear relative resistance change with a sensitivity factor of 0.84. Figures 5 and 6 show the cycling stability of the sensor at different frequencies and different tensile strains, respectively, in which the sensor can be observed to have a stable electrical signal response at the same tensile strain, and the sensor is free from the effects of tensile frequency, with excellent frequency independence. The durability of the sensor under the preparation process is also an important parameter for measuring the practical application value of the sensor. As shown in FIG. 7, the 3D three-dimensional structure joint sensor with the line width of 0.5mm is subjected to a cyclic stretching-recovering test on a universal testing machine, and experimental results show that in the cyclic test of 1000s, the relative resistance change of the sensor is basically unchanged, and the electric response curves amplified at the early stage, the middle stage and the later stage of the cyclic test, namely about 170s, 500s and 825s, are observed, so that the sensor can be clearly found to have stable and excellent electric signal response, and the durability of the practical application of the sheared and stretched 3D three-dimensional structure joint sensor is verified.
LIG sheared by laser not only has the tensile property of LIG confinement on the original PI film, but also shows obvious advantages in bending performance. As shown in fig. 8, the cut circular LIG was simply fixed at both ends to joints of the wooden finger model. The joint was gradually bent from an initial parallel angle of 0 ° to 30 °, 45 °, 60 ° and 90 °, and the corresponding sensor electrical signal change also showed a stepwise gradual increase with the bending angle, and when the finger was bent to 90 °, the sensor electrical signal change was about 3.5%. It can be observed that although the sensor is simply fixed at two ends, the sensor can still be well attached to the joint, in the process of bending fingers, the sheared circular LIG flexible strain sensor is unfolded from the original planar 2D structure to the 3D three-dimensional structure, the sheared small sensor units at the joint are in a structure from dense to gradually sparse, the circumferential position of the circular structure LIG sensor can be tightly attached to the hand joint without the aid of an external adhesive, which is incomparable with the traditional 2D planar sensor, fig. 9 is an optical diagram of the uncut LIG flexible sensor, and can be used for showing the condition that LIG on a PI film is completely unattached to the skin when bending due to inextensibility, and the prepared planar LIG well solves the problem of attaching to the human skin under the addition of a laser shearing technology, so that the flexible strain sensor can be applied to intelligent wearable equipment.
Fig. 10 is an optical diagram of finger movement, in which an electrical response curve shows that the sensor can accurately capture signals of finger bending, the sensor detects about 4% of changes of relative resistance when the finger bends, and the corresponding peak value of the electrical signal at each time is basically consistent when the sensor bends at the same angle, which proves that the sensor is feasible to be worn on the finger for sensing and man-machine interaction.
Example 2
The 3D three-dimensional structure joint sensor and the preparation method thereof are characterized by comprising the following steps:
step one, preparing patterned laser-induced graphene on a PI film, wherein an ultraviolet laser is selected as the patterned laser-induced graphene, the shape of the patterned laser-induced graphene is a circle with the diameter of 15-25 mm, and the parameters of the ultraviolet laser are as follows: the pulse wave frequency is 120kHz, the pulse width is 2 mu s, the scanning speed is set to be 30mm/s, and the scanning interval is 1mm;
and secondly, carrying out secondary shearing on the round laser-induced graphene through laser, and dividing the round graphene into a plurality of parallel discrete units. The shearing mode is a direction (tangential direction) perpendicular to the laser induction direction, and the cutting interval is 0.1-10 mm. Meanwhile, the laser cutting parameters are selected to be 20kHz of pulse wave frequency, 0.5 mu s of Q pulse width and 20mm/s of scanning speed.
Fig. 12 is an optical diagram of the 3D stereoscopic structure joint sensor prepared in example 2 and the corresponding electrical signal response to tensile strain, the sensor shows sensitive and symmetrical electrical signal changes in the stretching and recovering processes, the linearity is good, and the degree of electrical signal change is reduced compared with example 1.
Example 3
The 3D three-dimensional structure joint sensor and the preparation method thereof are characterized by comprising the following steps:
step one, preparing patterned laser-induced graphene on a PI film, wherein an ultraviolet laser is selected as the patterned laser-induced graphene, the shape of the patterned laser-induced graphene is a circle with the diameter of 15-25 mm, and the parameters of the ultraviolet laser are as follows: the pulse wave frequency is 120kHz, the pulse width is 2 mu s, the scanning speed is set to be 30mm/s, and the scanning interval is 0.01mm;
and secondly, carrying out secondary shearing on the round laser-induced graphene through laser, and dividing the round graphene into a plurality of parallel discrete units. The shearing mode was a direction perpendicular to the laser-induced direction (tangential direction), and the cutting pitch was 2mm. Meanwhile, the laser cutting parameters are selected to be 20kHz of pulse wave frequency, 0.5 mu s of Q pulse width and 20mm/s of scanning speed.
Fig. 13 is an optical diagram of the 3D stereoscopic joint sensor prepared in example 3 and the corresponding electrical signal response to tensile strain, the sensor exhibiting sensitive and symmetrical electrical signal changes during both stretching and recovery, good linearity, and increased response time compared to other examples.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the technical solution of the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that the technical solution described in the foregoing embodiments may be modified or some of the technical features thereof may be equally substituted; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (9)

1. The preparation method of the 3D three-dimensional structure joint sensor is characterized by comprising the following steps of: and preparing the patterned laser-induced graphene on the substrate film, and then performing secondary shearing of laser, wherein the secondary shearing is perpendicular to the direction of the laser-induced direction, and dividing the circle into a plurality of parallel discrete units by adopting a primary marking cutting mode, so as to obtain the 3D three-dimensional structure joint sensor.
2. A 3D stereoscopic joint sensor according to claim 1, wherein: the material of the substrate film is selected from one of Polyimide (PI), phenolic Resin (PR), polydimethylsiloxane (PDMS), polyether Ether Ketone (PEEK), polyetherimide (PEI), polyethersulfone (PES).
3. A 3D stereoscopic joint sensor according to claim 1, wherein: and preparing the patterned laser-induced graphene on the PI film by using an ultraviolet laser, wherein the shape of the patterned laser-induced graphene is a circle with the diameter of 15-25 mm.
4. The method for manufacturing the joint sensor with the 3D stereo structure according to claim 1, wherein the method comprises the following steps: the laser parameters for preparing the patterned laser-induced graphene are as follows: the pulse wave frequency is 100-140 kHz, the pulse width is 1-4 mu s, the scanning speed is set to 15-45 mm/s, and the scanning interval is 0.005-0.02 mm.
5. The method for manufacturing the joint sensor with the 3D stereo structure according to claim 4, wherein the method comprises the following steps: the cutting interval of the secondary shearing is 0.1-10 mm.
6. The method for manufacturing the joint sensor with the 3D stereo structure according to claim 4, wherein the method comprises the following steps: the parameters of the selected secondary shear are: the pulse wave frequency is 15-25 kHz, the pulse width is 0.3-0.7 mu s, and the scanning speed is set to be 10-30 mm/s.
7. A 3D stereoscopic joint sensor, characterized in that the 3D stereoscopic joint sensor is prepared according to the preparation method of claims 1-6.
8. Use of a 3D stereoscopic joint sensor according to claim 7, characterized in that: the 3D three-dimensional structure joint sensor is used for detecting human finger movement information.
9. Use of a 3D stereoscopic joint sensor according to claim 8, characterized in that: the 3D three-dimensional structure joint sensor is used for intelligent wearable or bionic artificial limbs.
CN202311044398.4A 2023-08-18 2023-08-18 3D three-dimensional structure joint sensor Pending CN117091492A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311044398.4A CN117091492A (en) 2023-08-18 2023-08-18 3D three-dimensional structure joint sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311044398.4A CN117091492A (en) 2023-08-18 2023-08-18 3D three-dimensional structure joint sensor

Publications (1)

Publication Number Publication Date
CN117091492A true CN117091492A (en) 2023-11-21

Family

ID=88769147

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311044398.4A Pending CN117091492A (en) 2023-08-18 2023-08-18 3D three-dimensional structure joint sensor

Country Status (1)

Country Link
CN (1) CN117091492A (en)

Similar Documents

Publication Publication Date Title
Chen et al. Advances in graphene-based flexible and wearable strain sensors
Nie et al. High-performance piezoresistive electronic skin with bionic hierarchical microstructure and microcracks
Wang et al. Electronic skin for closed-loop systems
Zhu et al. Energy autonomous hybrid electronic skin with multi-modal sensing capabilities
Chen et al. Noncontact heartbeat and respiration monitoring based on a hollow microstructured self-powered pressure sensor
Zazoum et al. Recent advances in flexible sensors and their applications
Dong et al. Stretchable human machine interface based on smart glove embedded with PDMS-CB strain sensors
Zhang et al. Compressible and stretchable magnetoelectric sensors based on liquid metals for highly sensitive, self-powered respiratory monitoring
US20170172439A1 (en) Electrodes and sensors having nanowires
CN110013234A (en) A kind of pliable pressure sensor and pulse-taking instrument
Chen et al. Recent progress in graphene-based wearable piezoresistive sensors: From 1D to 3D device geometries
Deng et al. Smart wearable systems for health monitoring
Huang et al. Protrusion microstructure-induced sensitivity enhancement for zinc oxide–carbon nanotube flexible pressure sensors
Ji et al. Highly sensitive and stretchable piezoelectric strain sensor enabled wearable devices for real-time monitoring of respiratory and heartbeat simultaneously
Zhou et al. Textile-based mechanical sensors: A review
Hu et al. A triangular wavy substrate-integrated wearable and flexible piezoelectric sensor for a linear pressure measurement and application in human health monitoring
Zang et al. A facile, precise radial artery pulse sensor based on stretchable graphene-coated fiber
CN117091492A (en) 3D three-dimensional structure joint sensor
Nan et al. A review of epidermal flexible pressure sensing arrays
Yu et al. Biomimetic flexible sensors and their applications in human health detection
Li et al. AI-assisted disease monitoring using stretchable polymer-based sensors
Zhan et al. Ultra-highly sensitive and self-healing flexible strain sensor with a wide measuring range based on a bilayer structure
Shu et al. Flexible resistive tactile pressure sensors
Wang et al. Efficient Fabrication of TPU/MXene/Tungsten Disulfide Fibers with Ultra-Fast Response for Human Respiratory Pattern Recognition and Disease Diagnosis via Deep Learning
KR20180078560A (en) carbon nanotube network film and a pressure sensor including the same

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination