CN117089811A - Device for preparing optical coating film - Google Patents
Device for preparing optical coating film Download PDFInfo
- Publication number
- CN117089811A CN117089811A CN202311338316.7A CN202311338316A CN117089811A CN 117089811 A CN117089811 A CN 117089811A CN 202311338316 A CN202311338316 A CN 202311338316A CN 117089811 A CN117089811 A CN 117089811A
- Authority
- CN
- China
- Prior art keywords
- coating
- umbrella stand
- rotating shaft
- coating film
- optical coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 80
- 238000000576 coating method Methods 0.000 title claims abstract description 80
- 230000003287 optical effect Effects 0.000 title claims abstract description 24
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 24
- 230000007246 mechanism Effects 0.000 claims abstract description 22
- 238000007740 vapor deposition Methods 0.000 claims abstract description 5
- 230000001360 synchronised effect Effects 0.000 claims description 13
- 230000001681 protective effect Effects 0.000 claims description 10
- 239000007888 film coating Substances 0.000 claims description 8
- 238000009501 film coating Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 abstract description 16
- 239000010408 film Substances 0.000 description 30
- 239000000463 material Substances 0.000 description 7
- 238000007747 plating Methods 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a device for preparing an optical coating, which comprises a vacuum coating chamber, a rotating shaft, a coating umbrella stand and a vapor deposition source, wherein the rotating shaft is connected with and arranged at the top of the vacuum coating chamber, the vapor deposition source is arranged at the bottom of the vacuum coating chamber, the coating umbrella stand is coaxially connected with the rotating shaft, the rotating shaft is a telescopic rotating shaft, a groove-shaped slideway is coaxially arranged on the inner wall of the vacuum coating chamber along the axial direction of the rotating shaft, a height adjusting mechanism is arranged at the bottom plate of the slideway, an annular flange extending into the slideway is arranged at the outer edge of the coating umbrella stand in an extending manner, the bottom of the annular flange is connected with the height adjusting mechanism, the coating umbrella stand is moved downwards before coating to conveniently and safely place a substrate, the coating umbrella stand is lifted to a working position during the operation without influencing the rotation of the coating umbrella stand, the coating umbrella stand is moved downwards after the coating is finished, the substrate on the coating umbrella stand is conveniently taken out, the operation difficulty can be effectively reduced, the high-position operation can be avoided, the operation can be operated by a single person, the coating cost can be effectively reduced, and the coating efficiency can be improved.
Description
Technical Field
The invention relates to the technical field of optical coating, in particular to a device for preparing an optical coating.
Background
Optical coating is widely used in many fields such as sensors, semiconductor lasers, interferometers, spectacles, optical fiber communication components, etc., and is usually achieved by interference, i.e. one or more dielectric films or metal films are coated on the optical component or the independent substrate to change the light wave transmission characteristics.
At present, the optical coating is usually carried out by adopting a physical distillation method, the method is to convert a film material from a solid state into a gaseous state or an ionic state, the gaseous state or the ionic state material passes through a space from an evaporation source to reach the surface of a substrate, the material is deposited to form a film after reaching the surface of the substrate, in order to ensure the purity of the film, the film is usually coated in a vacuum environment, generally, the substrate is cleaned by ultrasonic waves, then is put into a fixture, is sent into a coating machine to be heated and vacuumized, after the specified condition is met, the film material is heated by an electron gun or a resistor, the film material is changed into the ionic state, the film coating operation is carried out on the substrate, the film coating time is different according to the number of layers, and after the film coating is completed, the substrate is cooled and then taken out.
The existing optical coating equipment adopts a fixture which is a coating umbrella stand, the coating umbrella stand comprises a bearing frame of an umbrella rib structure and a placing plate of a fan-shaped umbrella surface structure which is placed on the bearing frame, fixing grooves for placing substrates are uniformly distributed on the placing plate, the bearing frame is fixedly connected with a rotating shaft, after each time of coating is completed, the placing plate is required to be taken out from the bearing frame to take out the substrates, because the size of the substrates is smaller, the primary coating amount is larger, the existing optical coating equipment is larger in size, the fixture is higher from the ground, when the placing plate is detached, the least two people are required to cooperate to operate, one person steps on a high platform to carry out the detachment operation, the other person is assisted to carry out material transfer, the operation cost is high, and the great potential safety hazard exists.
Disclosure of Invention
Aiming at the problems, the invention provides a device for preparing an optical coating, wherein the height of a coating umbrella stand is adjustable, a placing plate can be conveniently installed and detached, the operation can be carried out by a single person, the operation risk can be effectively reduced, and the operation cost is reduced.
The technical scheme of the invention is as follows:
the utility model provides a device of preparation optical coating film, includes vacuum coating chamber, axis of rotation, coating film umbrella stand and coating by vaporization source, rotation axis connection sets up at vacuum coating chamber's top, the coating film source sets up the bottom at vacuum coating chamber, coating film umbrella stand and axis of rotation coaxial coupling, the axis of rotation is flexible rotation axis, vacuum coating chamber inner wall sets up the slide of recess type along its axis direction is coaxial, slide bottom plate department sets up high adjustment mechanism, coating film umbrella stand outward flange extends and sets up annular flange, annular flange stretches into in the slide, slide length is greater than annular flange thickness, annular flange bottom and high adjustment mechanism contact.
The slideway and the inner wall of the vacuum coating chamber are of an integrated structure.
The height adjusting mechanism comprises three synchronous telescopic cylinders uniformly distributed in the slide way, a cylinder barrel of each synchronous telescopic cylinder is fixedly connected with the slide way, and a piston of each synchronous telescopic cylinder is in contact with the annular flange.
The surface of one surface of the annular flange facing the height adjusting mechanism is provided with a wear-resistant layer.
And each synchronous telescopic cylinder is coaxially sleeved with a protective cover, and the protective covers are fixedly connected with the piston.
And the surface of the protective cover is provided with a wear-resistant layer.
The rotating shaft comprises a main shaft, a fixed disc coaxially and fixedly connected with the main shaft, an adjusting disc parallel to the fixed disc, and a plurality of sliding rods connecting the fixed disc and the adjusting disc, wherein the axis direction of each sliding rod is parallel to the axis direction of the main shaft, the adjusting disc is coaxially and fixedly connected with a film coating umbrella stand, through holes corresponding to the sliding rods are uniformly distributed on the fixed disc by taking the axis as a rotation center, one sliding rod is slidably arranged in each through hole, and each sliding rod is fixedly connected with the adjusting disc.
The slide rod length is greater than the piston length.
The number of the sliding rods is three.
The beneficial effects of the invention are as follows:
the vacuum coating chamber is internally provided with the height adjusting mechanism, the telescopic rotating shaft is matched, the coating umbrella stand can be moved downwards before coating, the substrate can be conveniently and safely placed, the substrate can be conveniently lifted to the working position during operation, the rotation of the coating umbrella stand can not be influenced, after coating is finished, the coating umbrella stand can be conveniently moved downwards, the substrate on the coating umbrella stand can be conveniently taken out, the operation difficulty can be effectively reduced, the high-altitude operation is avoided, the operation can be carried out by a single person, the coating cost can be effectively reduced, and the coating efficiency is improved.
Drawings
FIG. 1 is a schematic view showing the overall structure of an apparatus for producing an optical coating film according to an embodiment of the present invention;
FIG. 2 is a view showing a state of a lower film-plating umbrella stand of an apparatus for preparing an optical film according to an embodiment of the present invention;
FIG. 3 is a schematic view showing a structure of a rotation shaft of an apparatus for preparing an optical coating film according to an embodiment of the present invention;
FIG. 4 is a top view of a rotating shaft of an apparatus for preparing an optical coating according to an embodiment of the present invention;
fig. 5 is a schematic structural view of a height adjusting mechanism of an apparatus for preparing an optical coating according to an embodiment of the present invention.
Reference numerals illustrate:
the vacuum coating device comprises a vacuum coating chamber 1, a rotating shaft 2, a coating umbrella stand 3, a vapor deposition source 4, a slideway 11, a height adjusting mechanism 12, a main shaft 21, a fixed disc 22, an adjusting disc 23, a sliding rod 24, an annular flange 31, a cylinder barrel 121, a piston 122, a protective cover 123 and a through hole 221.
Detailed Description
Embodiments of the present invention are further described below with reference to the accompanying drawings.
Examples:
as shown in fig. 1-2, a device for preparing an optical coating film comprises a vacuum coating chamber 1, a rotating shaft 2, a coating film umbrella stand 3 and an evaporation source 4, wherein the rotating shaft 2 is connected with and arranged at the top of the vacuum coating chamber 1, the evaporation source 4 is arranged at the bottom of the vacuum coating chamber 1, the coating film umbrella stand 3 is coaxially connected with the rotating shaft 2, the rotating shaft 2 is a telescopic rotating shaft, a groove-type slideway 11 is coaxially arranged on the inner wall of the vacuum coating chamber 1 along the axial direction of the vacuum coating film, a height adjusting mechanism 12 is arranged at the bottom plate of the slideway 11, an annular flange 31 is arranged at the outer edge of the coating film umbrella stand 3 in an extending manner, the annular flange 31 stretches into the slideway 11, the length of the slideway 11 is larger than the thickness of the annular flange 31, and the bottom of the annular flange 31 is in contact with the height adjusting mechanism 12.
The working principle of the technical scheme is as follows:
the inner wall of the vacuum coating chamber 1 is provided with a groove-type slideway 11, the bottom of the slideway 11 is provided with a height adjusting mechanism 12, the coating umbrella stand 3 is lifted by the height adjusting mechanism 12, the outer edge of the coating umbrella stand 3 is provided with an annular flange 31 and is contacted with the slideway 11, the coating umbrella stand 3 can be ensured to slide along the slideway 11, the rotating shaft 2 is a telescopic rotating shaft, when the height of the coating umbrella stand 3 is adjusted by the height adjusting mechanism 12, the coating umbrella stand 3 can be ensured not to be separated from the rotating shaft 2, the rotating reliability of the coating umbrella stand 3 in the coating operation process can be ensured, the coating umbrella stand 3 is lowered to a lower position by the height adjusting mechanism 12 before coating, a substrate is placed on the coating umbrella stand 3, after the placing is confirmed to be free, the coating umbrella stand 3 is lifted to a working height position by the height adjusting mechanism 12, after the vacuum coating chamber 1 is closed, the inside of a coating condition is reached, the coating operation is carried out by the evaporation source 4, the coating umbrella stand 3 is rotated by the rotating shaft 2, the uniformity of the coating film can be ensured, the coating umbrella stand 3 can be prevented from being polluted by the annular flange 31, the back surface of the lens can be prevented from polluting the surface of the coating film, and the back surface of the lens can be effectively prevented.
The slideway 11 and the inner wall of the vacuum coating chamber 1 are of an integrated structure, and the integrated structure is formed by machining, so that the stability of the structure can be improved.
The height adjusting mechanism 12 comprises three synchronous telescopic cylinders uniformly distributed in the slide way 11, the stability of the film coating umbrella stand in the moving process can be ensured through a three-leg mode, the cylinder barrel 121 of each synchronous telescopic cylinder is fixedly connected with the slide way 11, the piston 122 of each synchronous telescopic cylinder is contacted with the annular flange 31, the annular flange 31 is provided with a wear-resisting layer facing the surface of the height adjusting mechanism 12, the rotating action of the film coating umbrella stand 3 can not be influenced, and the ball, the roller or the bearing can be arranged on one side of the annular flange 31 facing the height adjusting mechanism, so that the durability of the film coating umbrella stand can be further improved.
As shown in fig. 5, each synchronous telescopic cylinder is coaxially sleeved with a protective cover 123, the protective cover 123 is fixedly connected with the piston 122, a wear-resistant layer is arranged on the surface of the protective cover 123, the synchronous telescopic cylinders can be protected through the protective cover 123, the cylinders are prevented from being damaged by plating materials, and the service life of the height adjusting mechanism 12 can be prolonged.
As shown in fig. 3 and 4, the rotating shaft 2 includes a main shaft 21, a fixed disc 22 coaxially and fixedly connected with the main shaft 21, an adjusting disc 23 parallel to the fixed disc 22, and a plurality of sliding rods 24 connecting the fixed disc 22 and the adjusting disc 23, wherein the axial direction of each sliding rod 24 is parallel to the axial direction of the main shaft 21, the adjusting disc 23 is coaxially and fixedly connected with the film plating umbrella frame 3, through holes 221 corresponding to the sliding rods 24 are uniformly distributed on the fixed disc 22 by taking the axial line as a rotation center, one sliding rod 24 is slidably arranged in each through hole 221, each sliding rod 24 is fixedly connected with the adjusting disc 23, the length of the sliding rod 24 is greater than the length of a piston 122, the number of the sliding rods 24 is three, the fixed disc 22 and the adjusting disc 23 are connected through the sliding rods 24, so that the adjusting disc 23 and the fixed disc 22 can synchronously rotate along with the rotation of the main shaft 21, the adjusting disc 23 and the film plating umbrella frame 3 are fixedly connected through bolts, the rotation of the film plating umbrella frame 3 along with the rotation of the rotating shaft 2 can be ensured, the reliability of film plating operation can be ensured, the length of the sliding rods 24 is greater than the length of the piston 122, the sliding rods 24 can be prevented from retracting to the limit position, when the piston 122 is separated from the limit block 24, the diameter of the sliding rods 24 can be actually required to be increased, and the diameter of the limiting block 24 can be increased, and the diameter can be determined, and the diameter can be increased, and can be increased according to the diameter of the sliding rod can be actually.
Through this kind of structure, can be effectual the height of regulation coating film umbrella stand 3, can ensure the normal rotary motion of coating film umbrella stand 3 simultaneously, do not need the overhead operation, can effectually reduce the risk of shifting the substrate around the coating film, improve operating personnel's operation security, single just can operate, can effectual reduction operation cost, improve the operating efficiency.
The foregoing examples merely illustrate specific embodiments of the invention, which are described in greater detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention.
Claims (7)
1. The device for preparing the optical coating comprises a vacuum coating chamber, a rotating shaft, a coating umbrella stand and a vapor deposition source, wherein the rotating shaft is connected with and arranged at the top of the vacuum coating chamber, the vapor deposition source is arranged at the bottom of the vacuum coating chamber, and the coating umbrella stand is coaxially connected with the rotating shaft;
the height adjusting mechanism comprises three synchronous telescopic cylinders uniformly distributed in the slideway, a cylinder barrel of each synchronous telescopic cylinder is fixedly connected with the slideway, and a piston of each synchronous telescopic cylinder is in contact with the annular flange;
the rotating shaft comprises a main shaft, a fixed disc coaxially and fixedly connected with the main shaft, an adjusting disc parallel to the fixed disc, and a plurality of sliding rods connecting the fixed disc and the adjusting disc, wherein the axis direction of each sliding rod is parallel to the axis direction of the main shaft, the adjusting disc is coaxially and fixedly connected with a film coating umbrella stand, through holes corresponding to the sliding rods are uniformly distributed on the fixed disc by taking the axis as a rotation center, one sliding rod is slidably arranged in each through hole, and each sliding rod is fixedly connected with the adjusting disc.
2. The apparatus for preparing an optical coating film according to claim 1, wherein the slide is integrally formed with the inner wall of the vacuum coating chamber.
3. An apparatus for producing an optical coating film according to claim 1, wherein a surface of the annular flange facing the height adjusting mechanism is provided with a wear layer.
4. The apparatus for producing an optical coating film according to claim 1, wherein each of the synchronous telescopic cylinders is coaxially provided with a protective cover fixedly connected with the piston.
5. The apparatus for producing an optical coating film according to claim 4, wherein the surface of the protective cover is provided with a wear-resistant layer.
6. The apparatus for producing an optical coating film according to claim 1, wherein the slide rod has a length longer than a length of the piston.
7. The apparatus for producing an optical coating film according to claim 1, wherein the number of the slide bars is three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311338316.7A CN117089811B (en) | 2023-10-17 | 2023-10-17 | Device for preparing optical coating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311338316.7A CN117089811B (en) | 2023-10-17 | 2023-10-17 | Device for preparing optical coating film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117089811A true CN117089811A (en) | 2023-11-21 |
| CN117089811B CN117089811B (en) | 2024-01-30 |
Family
ID=88783604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311338316.7A Active CN117089811B (en) | 2023-10-17 | 2023-10-17 | Device for preparing optical coating film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117089811B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004035964A (en) * | 2002-07-04 | 2004-02-05 | Tokki Corp | Vapor deposition apparatus |
| JP2004099946A (en) * | 2002-09-06 | 2004-04-02 | Shincron:Kk | Thin-film-forming apparatus |
| US20110259266A1 (en) * | 2010-04-22 | 2011-10-27 | Hon Hai Precision Industry Co., Ltd. | Coating system |
| CN102234762A (en) * | 2010-04-23 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | Coating system |
| CN202968673U (en) * | 2012-12-14 | 2013-06-05 | 福建福光光电科技有限公司 | Lens coating device |
| CN207313698U (en) * | 2017-08-25 | 2018-05-04 | 江苏恒盛光学器材有限公司 | Vacuum coating equipment with warning device |
| CN108468035A (en) * | 2018-05-25 | 2018-08-31 | 无锡清鑫光学技术有限公司 | A kind of gradual change type optical mirror slip arc-shaped double-layer combined type film coating umbrella stand |
-
2023
- 2023-10-17 CN CN202311338316.7A patent/CN117089811B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004035964A (en) * | 2002-07-04 | 2004-02-05 | Tokki Corp | Vapor deposition apparatus |
| JP2004099946A (en) * | 2002-09-06 | 2004-04-02 | Shincron:Kk | Thin-film-forming apparatus |
| US20110259266A1 (en) * | 2010-04-22 | 2011-10-27 | Hon Hai Precision Industry Co., Ltd. | Coating system |
| CN102234762A (en) * | 2010-04-23 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | Coating system |
| CN202968673U (en) * | 2012-12-14 | 2013-06-05 | 福建福光光电科技有限公司 | Lens coating device |
| CN207313698U (en) * | 2017-08-25 | 2018-05-04 | 江苏恒盛光学器材有限公司 | Vacuum coating equipment with warning device |
| CN108468035A (en) * | 2018-05-25 | 2018-08-31 | 无锡清鑫光学技术有限公司 | A kind of gradual change type optical mirror slip arc-shaped double-layer combined type film coating umbrella stand |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117089811B (en) | 2024-01-30 |
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