CN117086693A - Deformation compensation system and compensation method for processing microstructure on surface of thin-wall pipe-type workpiece - Google Patents
Deformation compensation system and compensation method for processing microstructure on surface of thin-wall pipe-type workpiece Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/12—Adaptive control, i.e. adjusting itself to have a performance which is optimum according to a preassigned criterion
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- B—PERFORMING OPERATIONS; TRANSPORTING
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Abstract
The invention relates to the technical field of precise cutting processing of a microstructure on the surface of a thin-wall workpiece, in particular to a deformation compensation system and a compensation method for processing the microstructure on the surface of a thin-wall pipe-shaped workpiece. A deformation compensation system for processing a microstructure on the surface of a thin-wall tubular workpiece comprises a workpiece rotating mechanism, a cutter assembly and a detection and control assembly; the tool assembly comprises a tool, a micro driver for the tool and a tool displacement sensor, wherein the tool displacement sensor is used for detecting the feeding or retreating position of the tool along the X-axis direction, the detection and control assembly comprises a feedback control module and at least three workpiece detection sensors, the workpiece detection sensors are used for detecting the deformation of workpieces, and the feedback control module is used for receiving detection signals sent by the workpiece detection sensors and detection signals sent by the tool displacement sensor. The invention has the advantages of detecting and compensating the processing deformation in real time and improving the dimensional accuracy of the microstructure of the processed surface of the thin-wall tubular workpiece.
Description
Technical Field
The invention relates to the technical field of precise cutting processing of a microstructure on the surface of a thin-wall workpiece, in particular to a deformation compensation system and a compensation method for processing the microstructure on the surface of a thin-wall pipe-shaped workpiece.
Background
The ultra-precise cutting technology is an important means for manufacturing the ultra-precise cutting material with a micro-nano fine structure or a high-precision morphology, is widely applied to the fields of aerospace, national defense and military industry, information communication, life science, material science and the like, and is an important branch in the ultra-precise machining field. The ultra-precise cutting method based on single-point diamond has the advantages that the ultra-precise lathe with nano-scale positioning precision and diamond with sharp cutting edge, high hardness and good wear resistance are used as a cutter, and the geometric surface is formed by precisely controlling the relative motion track between the cutter and a workpiece, so that the nano-scale surface roughness and the micro-nano structure surface with submicron-scale shape precision can be obtained. When the workpiece is a thin-wall tubular workpiece, one end of the thin-wall tubular workpiece is solid so as to facilitate clamping and fixing of the workpiece, and after micro machining (machining precision reaches 20-0.01 microns) is performed on the outer surface of the thin-wall tubular workpiece, the solid part is cut off, so that the thin-wall tubular workpiece with two penetrating ends is obtained.
The thin-wall structure has the characteristics of small characteristic structure size, stable mechanical property, high relative strength and the like, and is widely applied to various special fields. An important problem and a challenge faced by machining of a thin-wall structure based on ultra-precise turning of a single-point diamond tool are that the thin-wall part is elastically deformed due to the action of cutting force in the machining process due to the weak rigidity characteristic of the thin-wall structure, so that the actual cutting amount and the designed cutting amount are different, and the final machining dimensional accuracy of the microstructure on the surface of the thin-wall part is limited. The microstructure machined on the thin-wall structural member plays a plurality of roles in the field of lubrication and sealing, and can obviously improve the performance of the sealing ring and prolong the service life. The traditional method needs a lot of time to explore proper technological parameters, but the processing process changes in real time, the processing states in different material environments are quite different, and good microstructural dimensional accuracy is difficult to realize.
Disclosure of Invention
The invention aims to provide a deformation compensation system for processing the micro-structure of the surface of the thin-wall tubular workpiece, which can detect the deformation of the surface of the workpiece when the surface of the thin-wall tubular workpiece is not processed, so as to assist in controlling the feeding or the retraction of a cutter, thereby compensating the processing deformation of the micro-structure of the surface of the workpiece and improving the dimensional accuracy of the micro-structure of the processed surface.
In order to achieve the above purpose, the invention adopts a deformation compensation system for processing the microstructure of the surface of the thin-wall pipe-shaped workpiece, which comprises a workpiece rotating mechanism, a cutter assembly, a cutter displacement mechanism and a detection and control assembly;
the workpiece rotating mechanism is used for realizing the autorotation of the workpiece on the workpiece fixing position by taking the axis of the workpiece as the center;
the cutter displacement mechanism is used for enabling the cutter to move slightly along the Z-axis direction parallel to the axis of the workpiece;
the cutter component comprises a cutter, a micro driver for the cutter and a cutter displacement sensor, wherein the cutter is positioned in the X-axis direction perpendicular to the Z axis, the micro driver for the cutter is used for enabling the cutter to move slightly along the X-axis direction, and the cutter displacement sensor is used for detecting the feeding or retreating position of the cutter along the X-axis direction;
the detection and control assembly comprises a feedback control module and at least three workpiece detection sensors, wherein the workpiece detection sensors are used for detecting the deformation of the workpiece, two adjacent workpiece detection sensors are spaced along the Z-axis direction, the feedback control module is used for receiving detection signals sent by the workpiece detection sensors and detection signals sent by the cutter displacement sensors, and the feedback control module is electrically connected with the cutter micro-driver and used for controlling the cutter micro-driver.
According to the invention, the deformation condition of the thin-wall tubular workpiece in the machining process is detected in real time by arranging at least three workpiece detection sensors, the real-time position of the cutter is transmitted to the feedback control module through the cutter detection detectors, the deformation is calculated in real time through the existing feedback control module, and after the deformation of the machining point of the machined thin-wall tubular workpiece is obtained through the feedback control module, the cutter is controlled to drive the cutter to feed or retract by the micro driver, so that the machining deformation of the thin-wall tubular workpiece is compensated in real time, and the dimensional accuracy of the microstructure of the machined surface of the thin-wall tubular workpiece is improved.
The micro driver for the cutter can adopt micro servo motors such as a piezoelectric ceramic motor, a voice coil motor and the like, the workpiece detection sensor and the cutter detection sensor can both adopt displacement sensors, and the workpiece rotating mechanism can adopt a lathe of any existing workpiece microstructure processing equipment. The workpiece is fixedly positioned into a part which is conventionally used for placing and positioning the workpiece, and a corresponding positioning structure and a corresponding clamp can be selected according to the actual shape and the size of the workpiece. The number of the workpiece detection sensors is at least three, deformation at a processing point can be monitored and determined better and more accurately, and the dimensional accuracy of the microstructure on the surface of the workpiece is further improved. When the rotating mechanism drives the workpiece to rotate, the workpiece is positioned relative to the workpiece detection sensor, so that the workpiece detection sensor can monitor the deformation of the area where the processing point is positioned.
Preferably, at least three of the workpiece detection sensors are arranged side by side. That is, at least three workpiece detection sensors are sequentially arranged at intervals along the axial direction of the workpiece and are arranged side by side. The arrangement enables the data relevance detected by the two adjacent workpiece detection sensors to be higher, is more convenient for calculating the processing deformation of the cutter after the cutter is contacted with the workpiece, and is more convenient for processing compensation.
Preferably, the workpiece detection sensor, the tool, and the workpiece axis on the workpiece fixing position are located on the same plane. Namely, the measuring point detected by the workpiece detection sensor, the cutting point where the cutter contacts with the workpiece and the axis of the workpiece are positioned on the same plane. The arrangement can enable the data detected by the workpiece detection sensor to be more accurate.
Preferably, the workpiece detection sensors are all fixed on a fixed plate, the fixed plate is arranged on a sensor translation mechanism, and the sensor translation mechanism is used for enabling the workpiece detection sensors to slightly move along the X-axis direction. The fixing plate is a member for fixing and supporting the workpiece detection sensor. The sensor translation mechanism can adopt any existing mechanism which can realize single displacement of micro-stroke movement by electric control or manual operation and can be accurate to 0.01 mm. Through setting up sensor translation mechanism to make work piece detection sensor can be close to the work piece and avoid with the work piece contact, thereby improve and detect the accuracy.
Preferably, the tool displacement sensor and the workpiece detection sensor are non-contact displacement sensors, and the tool displacement sensor and the workpiece detection sensor are one of a capacitive displacement sensor, a laser three-point method displacement sensor, a spectral confocal displacement sensor and an eddy current displacement sensor.
The workpiece detection sensor is not contacted with the workpiece when in use, the cutter displacement sensor is not contacted with the cutter when in use, the deformation of the thin-wall tubular workpiece caused by the contact of the sensor can be avoided, and the deformation detection precision can be further improved. Wherein, a capacitive displacement sensor with output of 0-10v and measuring range of 50-100 micrometers can be adopted.
Preferably, the workpiece rotating mechanism is arranged on a workpiece translating mechanism, and the workpiece translating mechanism is used for enabling a workpiece positioned at a workpiece fixing position to move in the X-axis direction. The workpiece translation mechanism is used for aligning the workpiece with the cutter before machining.
Preferably, the micro driver for the cutter of the cutter assembly is arranged on a triaxial macro-micro motion device, the workpiece rotating mechanism is a part of the triaxial macro-micro motion device, the positioning precision of the triaxial macro-micro motion device is smaller than 1 micron, and the rotation precision of the triaxial macro-micro motion device is better than 0.001 degree. The three-axis macro-micro motion device (three-axis machine tool) is adopted to carry out translation of a workpiece and adjustment of the position of a cutter, so that the production and detection precision is higher, the existing three-axis macro-micro motion device can be adopted, the production cost is further reduced, automation is convenient to realize, and the manufacturing difficulty is reduced.
The invention also discloses a compensation method of the deformation compensation system, which comprises the following steps,
s1, determining the position of a measuring point and the position of a cutting machining point:
the method comprises the steps that a workpiece detection sensor and a cutter are arranged on the circumferential side of a thin-wall tubular workpiece, at least three workpiece detection sensors are sequentially arranged on the cutter side, the position of the workpiece corresponding to the workpiece detection sensor is a measuring point, the position of the workpiece corresponding to the cutter is a cutting machining point, and the measuring point at least comprisesCutting point position is->；
S2, the workpiece rotating mechanism drives the workpiece to rotate so as to perform rotary machining, and meanwhile, the deformation of the measuring point position and the cutting machining point position is measured:
to be used forThe difference between the measured value and the measured value of other measured point positions is used as a measured result, and the measured result forms a measuring deformation matrix; wherein (1)>Subtracting +.>Measurement results are obtained from the measured values->，/>Subtracting +.>Measurement results are obtained from the measured values->Measuring deformation matrix +.>The deformation of the processing point is +.>；
S3, calculating harmonic response deformation coefficients and static deformation coefficients of the cutting machining points and the positions of all the measuring points:
calculating the axial direction and Zhou Xiangxie response deformation of the thin-wall tubular workpiece and normalizing to obtain a harmonic response deformation coefficient;the harmonic response deformation coefficients of (a) are +.>；
Calculating and normalizing the axial and circumferential static deformation of the thin-wall tubular workpiece to obtain a static deformation coefficient;the static deformation coefficients of (2) are +.>；
The harmonic response deformation coefficient is a steady-state response amplitude of the structure when the structure is subjected to a load changing according to a sine (simple harmonic) rule with time; the static deformation coefficient is the deformation of the structure under the action of unit force;
s4, calculating the machining deformation of the cutting machining point:
from the following components、/>And->Deformation coefficient composition matrix of points>The coefficients of static deformation and resonance response deformation in the actual deformation are respectively +.>、/>Composing coefficient matrix->Therefore there is->I.e.，
Coefficient matrix，
Thereby obtaining a processing pointZtDeformation amount:
，
and S5, transmitting the processing deformation data of the cutting point to a micro driver for the cutter by the feedback control module, and controlling the cutter to feed or retreat, thereby completing microstructure cutting processing depth compensation.
Preferably, the workpiece detection sensor is used for detection at the same ambient temperature. The workpiece detection sensor is at the same ambient temperature, so that the detection precision can be further improved, and the microstructure processing precision is ensured.
Preferably, the position of the workpiece corresponding to the workpiece detection sensor farthest from the tool is taken as a measuring point. The workpiece detection sensor furthest from the tool is minimally affected by the machining in order to be +.>Data comparison was performed with reference.
The invention has the advantages of detecting and compensating the processing deformation in real time and improving the dimensional accuracy of the microstructure of the processed surface of the thin-wall tubular workpiece.
Drawings
FIG. 1 is a schematic diagram of a compensation system according to the present invention.
Fig. 2 is a flow chart of a deformation calculation of the compensation method of the present invention.
Fig. 3 is a schematic structural diagram of a triaxial macro-micro motion device according to the present invention.
Fig. 4 is a schematic structural diagram of a workpiece rotation mechanism and a sensor translation mechanism of the triaxial macro-micro motion device according to the present invention.
Fig. 5 is a schematic view of the cutter assembly of the present invention.
Detailed Description
The invention is further described below with reference to the drawings and specific embodiments.
Example 1
As shown in fig. 3 to 5, the embodiment discloses a deformation compensation system for processing a microstructure on the surface of a thin-walled tubular workpiece, which comprises a triaxial macro-micro motion device 1, wherein the triaxial macro-micro motion device is provided with a tool displacement mechanism 110 for realizing movement in the Z-axis direction, a workpiece translation mechanism 120 for realizing movement in the X-axis direction and a workpiece rotation mechanism 130, and the triaxial macro-micro motion device 1 is matched with a detection and control assembly. The positioning accuracy of the triaxial macro-micro motion device 1 of the present embodiment is less than 1 micron, and the rotation accuracy of the triaxial macro-micro motion device is better than 0.001 degree. The workpiece 200 in this embodiment is a thin-walled tubular workpiece, and has a solid portion that is convenient to be clamped and fixed, and a tubular portion with an annular cross section.
The workpiece rotating mechanism 130 is provided with a workpiece fixing position, a clamp 210 for clamping and fixing the workpiece 200 is arranged at the workpiece fixing position, the workpiece rotating mechanism 130 is used for realizing the rotation of the workpiece 200 on the workpiece fixing position by taking the axis of the workpiece as the center, the clamp 210 in the embodiment is a hoop clamp, the workpiece rotating mechanism 130 is arranged on the workpiece translation mechanism 120, and the workpiece translation mechanism 120 is used for enabling the workpiece 200 at the workpiece fixing position to move along the X-axis direction.
The tool displacement mechanism 110 is provided with a tool assembly including a tool 3, a micro-actuator 31 for the tool, and a tool displacement sensor 32, the tool 3 being located in the X-axis direction of the workpiece, the micro-actuator 31 for the tool being configured to micro-move the tool 3 in the X-axis direction, the tool displacement sensor 32 being configured to detect a feed or a retreat position of the tool 3 in the X-axis direction. Wherein the tool displacement mechanism 110 is used for moving the tool 3 in the Z-axis direction for micro-movement. Wherein the cutter displacement sensor 32 is a capacitive displacement sensor with voltage output analog quantity of 0-10v and measuring range of 100 micrometers; a fixing frame 321 is fixed on the casing (the part which is fixed relative to the cutter) of the micro driver 31 for the cutter, the fixing frame 321 is provided with a second fixing tube 322 which extends laterally (extends along the X-axis direction), the cutter displacement sensor 32 extends into the second fixing tube 322 and is locked and fixed through a bolt, the detection end of the second fixing tube 322 extends out of the second fixing tube 322 and faces the cutter 3, and the second fixing tube 322 is provided with a bolt hole matched with the bolt. The tool 3 may be a turning tool such as a diamond tool, a hard alloy tool, a ceramic tool, etc. The micro driver 31 for the cutter may be a piezoelectric ceramic motor or a voice coil motor.
The detection and control assembly of the present embodiment includes a feedback control module 300 and three workpiece detection sensors 4, the tool detection sensors 31 record driving positions and transmit the driving positions to the feedback control module 300 in real time, the workpiece detection sensors 4 are used for detecting deformation of workpieces, the three workpiece detection sensors 4 are arranged side by side and are arranged at intervals along the Z-axis direction, the feedback control module is used for receiving detection signals sent by the workpiece detection sensors 4 and detection signals sent by the tool displacement sensors 32, and the feedback control module is electrically connected with the micro driver 31 for tools and is used for controlling the micro driver 31 for tools. Wherein, the axes of the workpiece detection sensor 4, the cutter 3 and the workpiece 200 positioned on the workpiece fixing position are positioned on the same plane.
The workpiece translation mechanism 120 is provided with a sensor translation mechanism 140, the sensor translation mechanism 140 of the embodiment is a manual displacement table with the precision of 0.01mm and the full stroke of 10mm, and the sensor translation mechanism 140 is used for enabling the workpiece detection sensor 4 to slightly move along the X-axis direction. The sensor translation mechanism 140 is provided with a fixing plate 41, the fixing plate 41 is provided with three first fixing pipes 42 which extend laterally (extend along the X-axis direction) and are arranged side by side, the workpiece detection sensor 4 stretches into the first fixing pipes 42 and is locked and fixed through bolts, the detection end of the workpiece detection sensor 4 stretches out of the first fixing pipes 42 and faces the workpiece 200, and the first fixing pipes 42 are provided with bolt holes matched with the bolts. The workpiece detection sensor 4 in this embodiment is a capacitive displacement sensor with a voltage output analog quantity of 0-10v and a measuring range of 50 micrometers, and the three workpiece detection sensors are used for detection at the same ambient temperature, and the model structures of the three workpiece detection sensors are the same.
Example 2
As shown in fig. 1 to 2, the present embodiment discloses a compensation method for a deformation compensation system for surface microstructure processing of a thin-walled tubular workpiece of embodiment 1, comprising the steps of,
s1, determining the position of a measuring point and the position of a cutting machining point: setting workpiece detection sensors and cutters on the circumferential side of the workpiece, wherein the three workpiece detection sensors are arranged on the side of the cutters and on the X-axis side of the workpiece, the position of the workpiece corresponding to the workpiece detection sensors is a measuring point, the position of the workpiece corresponding to the cutters is a cutting point, and the measuring point comprisesCutting point position is->；
Wherein the position of the workpiece corresponding to the workpiece detecting sensor furthest from the tool assembly (i.e. the workpiece detecting sensor in the middle of the left side of FIG. 2) is taken asCorresponding to the workpieceThe position of the workpiece detecting sensor located in the middle (i.e., the workpiece detecting sensor located in the upper left side of fig. 2) is +.>The position of the workpiece corresponding to the uppermost workpiece detection sensor (i.e. the workpiece detection sensor at the lower left part of FIG. 2) is +.>The method comprises the steps of carrying out a first treatment on the surface of the Wherein the tubular portion of the work piece of this embodiment has a thickness of 0.5mm, a diameter of 60mm, a length of 30mm,、/>、/>the adjacent distance is 5mm;
s2, the workpiece rotating mechanism drives the workpiece to rotate for rotary machining, and deformation of the measuring point position and the cutting machining point position is measured in real time: to be used forThe difference between the measured value and the measured value of other measured point positions is used as a measured result, and the measured result forms a measuring deformation matrix; wherein (1)>Subtracting +.>Measurement results are obtained from the measured values->，/>Subtracting +.>Measurement results are obtained from the measured values->Measuring deformation matrix +.>Processing Point->Is +.>；
S3, calculating harmonic response deformation coefficients of the cutting machining point and the positions of all the measuring points through a feedback control module: calculating and normalizing the axial and circumferential resonance response deformation of the workpiece to obtain a resonance response deformation coefficient;
the harmonic response deformation coefficients of (a) are +.>The method comprises the steps of carrying out a first treatment on the surface of the Calculating and normalizing the axial and circumferential static deformation of the workpiece to obtain a static deformation coefficient; />The static deformation coefficients of (2) are +.>The method comprises the steps of carrying out a first treatment on the surface of the The deformation coefficient can be calculated by the existing finite element simulation and numerical analysis method, can also be calculated by physical model analysis, and can be obtained by any existing calculation method;
s4, calculating the machining deformation of the cutting machining point:
from the following components、/>And->Deformation coefficient composition matrix of points>The coefficients of static deformation and resonance response deformation in the actual deformation are respectively +.>Composing coefficient matrix->Therefore there is->I.e.，
Coefficient matrix，
Thereby obtaining a processing pointZtDeformation amount:
，
s5, the feedback control module cuts the machining pointZtAnd (3) transmitting the processing deformation data to a micro driver for the cutter to control the feeding or the retreating of the cutter, thereby completing the depth compensation of the microstructure cutting processing.
According to the embodiment, three identical workpiece detection sensors are used for differential calculation, so that interference on a measurement result due to temperature and homologous vibration can be effectively eliminated, and stable measurement of deformation is realized; the three workpiece detection sensors are fixed and are non-contact displacement sensors and are used for measuring deformation of three fixed X-direction positions of the workpiece, so that deformation of a processing point is calculated and monitored in real time, calculated deformation information is fed back to a micro driver for a cutter, compensation of deformation of the processing point caused by cutting force is achieved, and the processing size precision and the structural consistency of the microstructure can be remarkably improved. The invention also has the advantages of reducing the production process requirement, reducing the difficulty of processing the microstructure on the surface of the workpiece with thin wall relation and being convenient for automation.
Claims (10)
1. The deformation compensation system for the microstructure machining of the surface of the thin-wall tubular workpiece is characterized by comprising a workpiece rotating mechanism, a cutter assembly, a cutter displacement mechanism and a detection and control assembly;
the workpiece rotating mechanism is used for realizing the autorotation of the workpiece on the workpiece fixing position by taking the axis of the workpiece as the center;
the cutter displacement mechanism is used for enabling the cutter to move slightly along the Z-axis direction parallel to the axis of the workpiece;
the cutter component comprises a cutter, a micro driver for the cutter and a cutter displacement sensor, wherein the cutter is positioned in the X-axis direction perpendicular to the Z axis, the micro driver for the cutter is used for enabling the cutter to move slightly along the X-axis direction, and the cutter displacement sensor is used for detecting the feeding or retreating position of the cutter along the X-axis direction;
the detection and control assembly comprises a feedback control module and at least three workpiece detection sensors, wherein the workpiece detection sensors are used for detecting the deformation of the workpiece, two adjacent workpiece detection sensors are spaced along the Z-axis direction, the feedback control module is used for receiving detection signals sent by the workpiece detection sensors and detection signals sent by the cutter displacement sensors, and the feedback control module is electrically connected with the cutter micro-driver and used for controlling the cutter micro-driver.
2. The deformation compensation system for use in the microstructure fabrication of thin wall tubular workpieces of claim 1 wherein at least three of said workpiece detection sensors are disposed side-by-side.
3. The deformation compensation system for micro-structural machining of the surface of a thin-walled tubular workpiece according to claim 2, wherein the workpiece detection sensor, the tool, and the workpiece axis on the workpiece fixing position are on the same plane.
4. A deformation compensation system for micro-structural processing of the surface of a thin-walled tubular workpiece according to claim 1, 2 or 3, wherein the workpiece detection sensors are all fixed on a fixed plate, the fixed plate is arranged on a sensor translation mechanism, and the sensor translation mechanism is used for micro-moving the workpiece detection sensors along the X-axis direction.
5. The deformation compensation system for micro-structural processing of the surface of the thin-walled tubular workpiece according to claim 1, 2 or 3, wherein the tool displacement sensor and the workpiece detection sensor are both non-contact displacement sensors, and the tool displacement sensor and the workpiece detection sensor are one of a capacitive displacement sensor, a laser three-point method displacement sensor, a spectral confocal displacement sensor and an eddy current displacement sensor.
6. The deformation compensation system for micro-structural machining of the surface of a thin-walled tubular workpiece according to claim 1, wherein the workpiece rotating mechanism is arranged on a workpiece translating mechanism for moving the workpiece at the workpiece fixing position in the X-axis direction.
7. The deformation compensation system for micro-structural machining of the surface of a thin-walled tubular workpiece according to claim 1, wherein the micro-driver for the tool of the tool assembly is arranged on a triaxial macro-micro motion device, the workpiece rotating mechanism is a part of the triaxial macro-micro motion device, the positioning precision of the triaxial macro-micro motion device is less than 1 micron, and the rotation precision of the triaxial macro-micro motion device is better than 0.001 degree.
8. A compensation method for a compensation system according to any one of claims 1 to 7, characterized in that it comprises the steps of,
s1, determining the position of a measuring point and the position of a cutting machining point:
the method comprises the steps that a workpiece detection sensor and a cutter are arranged on the circumferential side of a thin-wall tubular workpiece, at least three workpiece detection sensors are sequentially arranged on the cutter side, the position of the workpiece corresponding to the workpiece detection sensor is a measuring point, the position of the workpiece corresponding to the cutter is a cutting machining point, and the measuring point at least comprisesCutting point position is->；
S2, the workpiece rotating mechanism drives the workpiece to rotate for rotary machining, and deformation of the measuring point position and the cutting machining point position is measured in real time:
to be used forThe difference between the measured value and the measured value of other measured point positions is used as a measured result, and the measured result forms a measuring deformation matrix; wherein (1)>Subtracting +.>Measurement results are obtained from the measured values->，/>Subtracting +.>Measurement results are obtained from the measured values->Measuring deformation matrix +.>Processing Point->Is +.>；
S3, calculating harmonic response deformation coefficients and static deformation coefficients of the cutting machining points and the positions of all the measuring points:
calculating the axial direction and Zhou Xiangxie response deformation of the thin-wall tubular workpiece and normalizing to obtain a harmonic response deformation coefficient;the harmonic response deformation coefficients of (a) are +.>；
Calculating and normalizing the axial and circumferential static deformation of the thin-wall tubular workpiece to obtain a static deformation coefficient;the static deformation coefficients of (2) are +.>；
S4, calculating the machining deformation of the cutting machining point:
from the following componentsAnd->Deformation coefficient composition matrix of points>The coefficients of static deformation and resonance response deformation in the actual deformation are respectively +.>Composing coefficient matrix->Therefore there is->I.e.，
Coefficient matrix，
Thereby obtaining a processing pointZtDeformation amount:
，
s5, the feedback control module transmits the processing deformation data of the cutting point to a micro driver for the cutter to control the cutter to feed or retreat, so that the microstructure cutting depth compensation is completed.
9. The compensation method of claim 8, wherein the workpiece detection sensor is used for detection at the same ambient temperature.
10. The compensation method according to claim 8, wherein a position of the workpiece corresponding to a workpiece detection sensor farthest from the tool is taken as a measurement point。
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Citations (9)
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|---|---|---|---|---|
| WO1997031749A2 (en) * | 1996-03-01 | 1997-09-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process and device for correcting dynamic misalignments in cutting machine tools |
| KR19980072253A (en) * | 1997-03-03 | 1998-11-05 | 윤덕용 | Waveform Correction System for Precision Machining Using Piezoelectric Microincision Device |
| CN1214003A (en) * | 1996-11-07 | 1999-04-14 | 大隈株式会社 | Error correction appts. for NC machine tool |
| TWM331406U (en) * | 2007-11-19 | 2008-05-01 | Nat Univ Chin Yi Technology | Self-compensating synchronous precision positioning device for Z-axis of ultra-precision processing machine |
| CN103358183A (en) * | 2013-07-09 | 2013-10-23 | 上海理工大学 | Device and method for measuring deformation of milling cutter on line |
| CN203527149U (en) * | 2013-08-19 | 2014-04-09 | 浙江大学 | High-speed rotation intelligent boring rod radial micrometric displacement real-time detection device |
| CN106541300A (en) * | 2015-09-18 | 2017-03-29 | 天津航天长征火箭制造有限公司 | A kind of deformation-compensated method of large-scale wallboard Flank machining |
| CN109070295A (en) * | 2016-03-28 | 2018-12-21 | 斗山机床株式会社 | The thermal walking compensating parameter automatic transfer equipment and conversion method of lathe |
| CN208391626U (en) * | 2017-02-23 | 2019-01-18 | 上海睿涛信息科技有限公司 | Vibration of Computerized Numerical Control Machine compensation control system |
-
2023
- 2023-10-20 CN CN202311360479.5A patent/CN117086693B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997031749A2 (en) * | 1996-03-01 | 1997-09-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process and device for correcting dynamic misalignments in cutting machine tools |
| CN1214003A (en) * | 1996-11-07 | 1999-04-14 | 大隈株式会社 | Error correction appts. for NC machine tool |
| KR19980072253A (en) * | 1997-03-03 | 1998-11-05 | 윤덕용 | Waveform Correction System for Precision Machining Using Piezoelectric Microincision Device |
| TWM331406U (en) * | 2007-11-19 | 2008-05-01 | Nat Univ Chin Yi Technology | Self-compensating synchronous precision positioning device for Z-axis of ultra-precision processing machine |
| CN103358183A (en) * | 2013-07-09 | 2013-10-23 | 上海理工大学 | Device and method for measuring deformation of milling cutter on line |
| CN203527149U (en) * | 2013-08-19 | 2014-04-09 | 浙江大学 | High-speed rotation intelligent boring rod radial micrometric displacement real-time detection device |
| CN106541300A (en) * | 2015-09-18 | 2017-03-29 | 天津航天长征火箭制造有限公司 | A kind of deformation-compensated method of large-scale wallboard Flank machining |
| CN109070295A (en) * | 2016-03-28 | 2018-12-21 | 斗山机床株式会社 | The thermal walking compensating parameter automatic transfer equipment and conversion method of lathe |
| CN208391626U (en) * | 2017-02-23 | 2019-01-18 | 上海睿涛信息科技有限公司 | Vibration of Computerized Numerical Control Machine compensation control system |
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