CN117073991B - Detection device and detection method for microscope rotary drum - Google Patents
Detection device and detection method for microscope rotary drum Download PDFInfo
- Publication number
- CN117073991B CN117073991B CN202311339866.0A CN202311339866A CN117073991B CN 117073991 B CN117073991 B CN 117073991B CN 202311339866 A CN202311339866 A CN 202311339866A CN 117073991 B CN117073991 B CN 117073991B
- Authority
- CN
- China
- Prior art keywords
- optical axis
- drum
- microscope
- standard deviation
- rotary drum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 25
- 230000003287 optical effect Effects 0.000 claims abstract description 168
- 230000006870 function Effects 0.000 claims abstract description 68
- 238000005457 optimization Methods 0.000 claims abstract description 38
- 238000004422 calculation algorithm Methods 0.000 claims abstract description 34
- 230000008859 change Effects 0.000 claims abstract description 11
- 238000013178 mathematical model Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 7
- 238000007781 pre-processing Methods 0.000 claims description 4
- 230000002068 genetic effect Effects 0.000 claims description 3
- 238000005305 interferometry Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 239000013598 vector Substances 0.000 description 13
- 238000003384 imaging method Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000000523 sample Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000007619 statistical method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
- G06F17/10—Complex mathematical operations
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Data Mining & Analysis (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Mathematical Analysis (AREA)
- Computational Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Optimization (AREA)
- Algebra (AREA)
- Pure & Applied Mathematics (AREA)
- Databases & Information Systems (AREA)
- Software Systems (AREA)
- General Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a detection device and a detection method for a microscope rotary drum, comprising the following steps: obtaining values of standard deviation and distance variation range of an optical axis of a microscope rotary drum of the same type, selecting two objective functions, constructing a fitness function, and obtaining the minimum value of the fitness function by adopting a multi-objective optimization algorithm; calculating the standard deviation of the optical axis of the microscope rotating drum to be detected and the numerical value of the range of the distance change to obtain the fitness function numerical value of the microscope rotating drum to be detected, and calculating the distance between the fitness function numerical value and the optimal balance point; and repeating the steps, and evaluating the consistency and definition performance of the optical axis of the microscope drum to be detected. The performance of the rotary drum can be more comprehensively evaluated by comprehensively considering the consistency error and the definition of the optical axis without manual intervention and trial and error.
Description
Technical Field
The invention relates to the technical field of structural part testing, in particular to the technical field of optical element testing, and essentially relates to a detection device and a detection method for a microscope rotary drum.
Background
In microscope systems, a rotating drum is one of the very important optical element switching devices that can be used to switch different eyepieces, objectives and filters to achieve different magnification and observation modes. The ocular lens is used for observing the overall shape and position of the sample, and the objective lens is used for magnifying the details and structure of the sample. By rotating the drum, different ocular and objective lenses can be switched, thereby realizing different magnification and observation modes.
The drum optical axis uniformity error refers to a deviation or inconsistency that occurs when light propagates along the optical axis in the optical path of the microscope. The definition evaluation is to compare the actual image imaged by the rotary drum with the image of the theoretical model or the standard sample, so as to obtain the definition level of the rotary drum.
In the prior art, when detecting a microscope drum, two different indexes of the consistency and the definition of the optical axis of the drum are required to be considered, and evaluation and optimization are respectively carried out. However, when the drum is adjusted to the consistency of the optical axis of the drum, parameters such as the focal length, the optical path alignment, etc. of the optical system may be adjusted, and these adjustments may affect the sharpness of the image.
When the consistency of the optical axis of the drum is adjusted, the length of the optical path may be changed, resulting in a change in the propagation path of the light, and a shift in the focusing position of the light, thereby affecting the sharpness of the image. If improperly adjusted, an image may be blurred or out of focus. Furthermore, adjusting the optical axis consistency of the drum may also involve adjusting the alignment of the optical paths. If the adjustment is inaccurate, the light may be deviated or scattered, thereby affecting the sharpness of the image.
Therefore, adjusting the consistency of the optical axis of the drum may affect the sharpness of the image, and in order to ensure the sharpness optimization, it is necessary to comprehensively consider parameters and requirements of the optical system and perform accurate adjustment and optimization when adjusting the consistency of the optical axis.
Disclosure of Invention
The invention overcomes the defects of the prior art and provides a detection device and a detection method for a microscope drum.
In order to achieve the above purpose, the invention adopts the following technical scheme: a detection method for a microscope drum, comprising the steps of:
s1, acquiring standard deviation of optical axes of rotating drums of the same type of microscopeAnd distance variation range>Taking the standard deviation of the optical axis and the range of the distance variation as two objective functions, constructing a fitness function, and adopting a multi-objective optimization algorithm to obtain the minimum value of the fitness function->，/>The best balance point expressed as the consistency and definition of the optical axis of the drum of the current type;
s2, calculating standard deviation of optical axis of microscope drum to be detectedAnd distance variation range>Is substituted into the fitness function constructed by S1 to obtain the value of the microscope drum to be detected>，/>The fitness function value of the ith microscope drum to be detected is obtained;
s3, calculatingAnd the optimal balance point>A distance therebetween;
s4, repeating the steps S2 and S3, and evaluating the performance of consistency and definition of the optical axis of the microscope drum to be detected.
In a preferred embodiment of the present invention, in step S1, the method specifically includes the following steps:
s11, establishing a microscope rotary drum mathematical model, rotating the rotary drum, and calculating the distances from n arbitrary points in the rotary drum to the optical axis to obtain the standard deviation and the distance variation range from n arbitrary points in the rotary drum to the optical axis;
s12, repeating the operation of S11 to obtain standard deviation and distance variation ranges of optical axes of a plurality of groups of rotary drums with the same type; carrying out data preprocessing on a plurality of groups of standard deviation and distance variation ranges;
s13, according to the preprocessed data, taking the standard deviation and the distance variation range of the optical axis as two objective functions, and constructing an adaptability function; and searching a group of optimal solutions through a multi-objective optimization algorithm, wherein the optimal solutions represent optimal balance points of optical axis consistency and definition.
In a preferred embodiment of the present invention, in S11, distances from n arbitrary points inside the computation drum to the optical axis are respectivelyCalculate->Wherein->D is the diameter of the drum, < > and>is the included angle between the corresponding measuring point and the optical axis.
In a preferred embodiment of the invention, the angle between any point and the optical axisCan be obtained by interferometry, and specifically comprises:
placing the rotary drum in an interference light path, and adjusting the position and angle of the rotary drum until the optical axis coincides with the rotation axis; turning on the laser to generate an interference pattern; calculating the included angle theta between the test point and the optical axis according to the change of the interference pattern, wherein the formula isWhere λ is the wavelength of the light source, d is the distance between the two mirrors in the interference light path, and N is the number of movements of the interference fringes.
In a preferred embodiment of the present invention, the standard deviation from n arbitrary points of the drum to the optical axis is:
。
in a preferred embodiment of the present invention, the range of distance variation:wherein->Maximum distance>Is the minimum value of the distance.
In a preferred embodiment of the present invention, the fitness function is:the method comprises the steps of carrying out a first treatment on the surface of the Wherein (1)>An objective function representing the standard deviation of the optical axis, +.>An objective function representing the range of optical axis distance variation, +.>And->Is the weight of the corresponding standard deviation of the optical axis and the range of the distance variation.
In a preferred embodiment of the invention, the multi-objective optimization algorithm comprises a non-dominant order genetic algorithm, a multi-objective particle swarm optimization algorithm, or a MOEA/D algorithm.
In a preferred embodiment of the present invention, if the fitness function value of the drum to be detected isAnd->The optical axis consistency and definition of the rotary drum are very close to the optimal balance point, and the performance of the rotary drum is estimated to be good; on the contrary, if the distance between the fitness function value of the rotating drum to be detected and the minimum value is larger than x, the consistency and definition of the optical axis of the rotating drum are far away from the optimal balance point, and further adjustment and optimization are needed.
In a preferred embodiment of the invention, the same type of microscope drum refers to a microscope drum having the same function and purpose.
The invention provides a detection device for a microscope rotary drum, which is based on the detection method for the microscope rotary drum, and comprises the following steps:
the microscope rotary drum is used for placing the microscope rotary drum to be detected and the rotary drums of the same type so as to measure and compare the optical axes;
the optical measurement device comprises a laser interferometer, a laser distance meter and an optical sensor and is used for measuring the standard deviation and the distance variation range of an optical axis;
the data acquisition system is used for recording and processing the data acquired from the optical measurement equipment and calculating standard deviation and distance variation range;
the rotating device is used for rotating the microscope rotary drum to obtain the distances from different points in the corresponding rotary drum to the optical axis;
a mathematical model describing the movement of the microscope drum and the variation of the optical axis;
and the computer is used for carrying out data processing, constructing a fitness function and running a multi-objective optimization algorithm.
The invention solves the defects existing in the background technology, and has the following beneficial effects:
the invention provides a detection method for a microscope rotary drum, which is characterized in that an optimal balance point of consistency and definition of optical axes of the same type of microscope rotary drum is found, and the fitness function value of the microscope rotary drum to be detected is compared with the minimum value of the fitness function of the optimal balance pointAnd calculating the distance and evaluating the consistency and definition performance of the optical axis of the microscope drum to be detected.
The invention utilizes mathematical modeling and optimization algorithm to realize automatic optimization of the consistency and definition of the optical axis. The standard deviation and the distance variation range of the important index optical axis are selected to respectively represent the consistency error and the definition of the drum optical axis, two indexes are used as two objective functions to construct an adaptability function, a group of optimal solutions are searched through an MOEA/D algorithm, the consistency error and the definition performance of the drum optical axis are judged through the optimal solutions and the designated threshold range, the consistency error and the definition of the drum optical axis can reach better performance, manual intervention and trial and error are not needed, and only one index is not optimized. Compared with the single evaluation in the prior art, only one index is concerned, and the interaction between the two indexes is ignored; the invention can evaluate the performance of the rotary drum more comprehensively by comprehensively considering the consistency error and the definition of the optical axis.
The invention can improve the accuracy of the data through data preprocessing and analysis of multiple groups of data. Meanwhile, the optimization algorithm can quickly search the optimal solution, and the optimization efficiency and accuracy are improved.
The invention is applicable to different types of rotary drums and microscope systems, has higher universality, and can be customized and optimized according to actual requirements by adjusting the adaptability function and the parameters of the optimization algorithm.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art;
FIG. 1 is a schematic structural view of a preferred embodiment of the present invention;
fig. 2 is a schematic diagram of an interference light path of a preferred embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those described herein, and therefore the scope of the present invention is not limited to the specific embodiments disclosed below.
As shown in fig. 1, the present invention provides a detection method for a microscope drum, the detection method comprising the steps of:
s1, acquiring standard deviation of optical axes of rotating drums of the same type of microscopeAnd distance variation range>Taking the standard deviation of the optical axis and the range of the distance variation as two objective functions, constructing a fitness function, and adopting a multi-objective optimization algorithm to obtain the minimum value of the fitness function->，/>The best balance point expressed as the consistency and definition of the optical axis of the drum of the current type;
s2, calculating standard deviation of optical axis of microscope drum to be detectedAnd distance variation range>Is substituted into the fitness function constructed by S1 to obtain the value of the microscope drum to be detected>，/>The fitness function value of the ith microscope drum to be detected is obtained;
s3, calculatingAnd the optimal balance point>A distance therebetween;
s4, repeating the steps S2 and S3, and evaluating the consistency and definition performance of the optical axis of the microscope drum to be detected; the smaller the distance is, the closer the new fitness function is to the optimal balance point, and the better the consistency and definition of the optical axis of the microscope drum to be detected are.
In step S1, the same type of microscope drum refers to a microscope drum having the same function and purpose, which may differ in structure somewhat, but generally belong to the same category. The structural differences may be represented by differences in decision variables including, but not limited to, diameter, length, coefficient of friction, weight distribution or stiffness, among others. In the following optimization problem, parameter adjustment and range limitation are required for the same type of microscope drum to achieve a specific optimization objective.
According to the invention, the values of the standard deviation and the distance variation range of the optical axis of the rotating drums of the same type of microscope are obtained, and the consistency and the definition of the optical axis of the rotating drums of the same type of microscope can be compared and evaluated by obtaining the values, so that the rotating drum with better consistency and definition of the optical axis is selected, and the imaging quality and the measuring precision of the microscope are improved.
In one embodiment, step S1 specifically includes the steps of:
s11, establishing a microscope rotary drum mathematical model, rotating the rotary drum, and calculating distances from n arbitrary points in the rotary drum to the optical axis to obtain standard deviation from n arbitrary points in the rotary drum to the optical axisAnd distance variation range>；
S12, repeating the operation of S11 to obtain standard deviation and distance variation ranges of optical axes of a plurality of groups of rotary drums with the same type; carrying out data preprocessing on a plurality of groups of standard deviation and distance variation ranges;
s13, according to the preprocessed data, taking the standard deviation and the distance variation range of the optical axis as two objective functions, and constructing an adaptability function; and searching a group of optimal solutions through a multi-objective optimization algorithm, wherein the optimal solutions represent optimal balance points of optical axis consistency and definition.
The establishment of a microscope rotary drum mathematical model, wherein the optical axis of the rotary drum coincides with the rotation axis, defaults that the distances from each point inside the rotary drum to the optical axis are uniformly distributed. The distances from n arbitrary points in the rotary drum to the optical axis are respectively as followsCalculation ofWherein->D is the diameter of the drum, < > and>is the included angle between the corresponding measuring point and the optical axis.
The drum in the present invention may be a triangular drum, a tetragonal drum, a pentagonal drum, or a hexagonal drum. The above measurement of the distance of n arbitrary points from the optical axis requires rotating the drum to an angle to cover all possible directions and to ensure the stability of the viewing optical axis at different angles and alignment with the drum rotation axis.
In one embodiment, the angle between any point and the optical axisCan be obtained by interferometry, and specifically comprises:
placing the rotary drum in an interference light path by adopting a Frouke interferometer, and adjusting the position and angle of the rotary drum until the optical axis coincides with the rotation axis; the laser is turned on to create an interference pattern. Interference pattern is formed by alternately bright and dark fringes produced by interference of two beams of light, and the interference fringes are determined by observing the cycle number of the interference fringe movementNumber of movements of the pattern. Calculating the included angle between the test point and the optical axis according to the change of the interference patternThe formula is +.>Where λ is the wavelength of the light source, d is the distance between the two mirrors in the interference light path, and N is the number of movements of the interference fringes.
As shown in fig. 2, the laser emits monochromatic light, the monochromatic light is split into two beams by the beam splitter, one beam of light is reflected by the rotary drum, the other beam of light is reflected by the movable reflecting mirror, the two beams of light are converged by the beam splitter to generate interference, and the interference light spots are received by the detector.
The standard deviation from the optical axis of n arbitrary points of the drum is calculated here as。
The present invention evaluates the consistency of the optical axis by using the standard deviation of n arbitrary points of the drum to the optical axis. The standard deviation is a statistic that measures the degree of dispersion of data, and is used to measure the degree of dispersion of a set of data. The smaller the standard deviation, the closer the distance of these points to the optical axis is to the average value, and the better the uniformity of the optical axis. Conversely, a larger standard deviation indicates a larger change in the position of the optical axis and poorer uniformity of the optical axis.
The invention uses a range of distance variation to characterize the sharpness of the drum, where the range of distance variation describes the magnitude of the range of distance to the optical axis at a selected point, obtained by calculating the difference between the maximum and minimum values of distance. Namely, range of distance variation:wherein->Maximum distance>Is the minimum of the distanceValues.
The smaller the range of the distance from any point in the drum to the optical axis, the more uniform the distance distribution from the point to the optical axis, the better the imaging quality in the drum, and the higher the definition. Conversely, if the range of the distance change is larger, the distance distribution from these points to the optical axis becomes more uneven, and the imaging quality in the drum becomes worse, and the sharpness is also lowered. The distance variation range can be obtained by calculating the distances from n arbitrary points in the rotary drum to the optical axis, so that the distribution condition of the points in the rotary drum and the consistency of the optical axis can be evaluated. This index can be used for quality control and optimization of the micromirror drum to improve imaging quality and definition.
In the invention, after the standard deviation and the distance variation range of the optical axis of n arbitrary points of a group of rotary drums are obtained, the steps are repeated to obtain the standard deviation and the distance variation ranges of the optical axes of a plurality of groups of rotary drums with the same type, and the purpose is that: and obtaining standard deviation and distance variation ranges of the optical axes of the multiple groups of rotary drums of the same type. By comparing and analyzing the multiple sets of data, the influence of individual data can be reduced, so that the stability and consistency of the test result can be improved, and the imaging quality and definition of the rotary drum can be more comprehensively evaluated.
The steps are repeated, n arbitrary points can be selected again for the same rotary drum, and n arbitrary points can be selected for the same rotary drum.
After the standard deviation and the distance variation range of the optical axes of k groups of rotary drums with the same type are obtained, the data of a plurality of groups of data are required to be preprocessed, and the data are more accurate, reliable and comparable mainly for removing noise and abnormal values in the data.
The pretreatment steps in the invention comprise: and (5) outlier removal processing. Here, the outlier removal may be determined using a statistical method (e.g., 3 sigma principle).
In the step S3, an objective function is constructed and optimized, and a minimized objective function of the standard deviation and the distance variation range of the optical axis is constructed according to the data preprocessed in the step S2.
For the drum design problem, a minimized objective function of standard deviation of the optical axis and range of distance variation can be constructed. The definition of the objective function may be determined according to specific design requirements and constraints.
In designing the fitness function, the standard deviation of the optical axis and the range of the distance variation are taken as two objective functions. Assuming that the standard deviation of the optical axis is s, the range of distance variation is r, and the fitness function is:。
wherein,an objective function representing the standard deviation of the optical axis, +.>An objective function representing the range of optical axis distance variation.And->Is the weight of the corresponding standard deviation of the optical axis and the range of the distance variation. The values of standard deviation s and range r of the optical axis are obtained by the test described above for the same type of drum.
Because the requirements of different types of microscope drums for optical axis consistency and definition are not consistent, thenThe determination of the size is also different.
The size varies depending on the application scenario and system requirements. If the requirement for the consistency of the optical axis is higher, namely the optical axis is distributed more uniformly in the rotary drum, the weight of the standard deviation of the optical axis can be increased, so that the standard deviation of the optical axis occupies a larger specific weight in the fitness function, namely the weight is increased +.>Can be determined by the numerical value of (a)The distance difference between the points inside the drum and the optical axis is kept small, and the consistency of the optical axis is improved. If the definition requirement is higher, namely the range of the distance from the point around the optical axis to the optical axis is smaller, the weight of the range of the distance change can be increased, so that the weight of the range of the distance change occupies a larger proportion in the fitness function, the change of the distance from the point inside the rotary drum to the optical axis can be ensured to be smaller, and the imaging definition is improved.
The specific weight selection should be adjusted and optimized according to the actual requirements, and the optimal weight combination can be determined through experiments and evaluation so as to achieve the optimal optical axis consistency and definition.
In one embodiment, for a microscope that requires observation and analysis of microscopic structures such as cells, tissues, etc., weightsThe optical axis consistency optimization can be set to be 0.6-0.7 so as to emphasize the optimization of the optical axis consistency, ensure that the propagation directions of light rays on different view fields and focal planes are consistent when a microscope images, ensure the definition and resolution of the image, and facilitate the observation and analysis of the detail information of the microstructure; />And is correspondingly set to 0.3-0.4.
In one embodiment, for a microscope that requires observation and analysis of the microstructure and properties of a material, the microscope needs to have high depth perception capability, weightCan be set to 0.6-0.7 to ensure that the change of microstructure and property inside the material can be captured when the microscope images; weight->And is correspondingly set to 0.3-0.4.
According to the method, after the fitness function is constructed, a group of optimal solutions are searched through a multi-objective optimization algorithm. The multi-objective optimization algorithm herein includes, but is not limited to, employing a non-dominant ordered genetic algorithm, a multi-objective particle swarm optimization algorithm, or a MOEA/D algorithm. The invention is preferably a MOEA/D algorithm.
Before optimization with the MOEA/D algorithm, the decision variables in the present invention need to be constrained, i.e., each decision variable has an allowable range.
These constraints may be hard constraints (which must be satisfied) or soft constraints (which may be partially satisfied). By limiting the range of values of the decision variables, it can be ensured that the generated solution is feasible in the problem space and meets the practical application requirements. These constraints may be implemented by defining upper and lower bounds, ranges, or discrete values for the variables.
The procedure for finding a set of optimal solutions using the MOEA/D algorithm is described herein as follows:
a1, initializing a group of solution vectors as an initial population according to the constraint range of a decision variable;
a2, calculating the fitness value of each solution vector according to the objective function;
a3, generating a new solution vector by using the crossing and selecting operation of the MOEA/D algorithm, and selecting the solution vector with better adaptability;
a4, replacing the newly generated solution vector with the initial population to form a new population;
a5, repeating the steps A3 and A4 until the termination condition is reached;
and A6, selecting a solution vector with the optimal fitness function value as an optimal solution according to the optimization target.
In step A1, a set of solution vectors representing different possibilities of parallelism and sharpness of the drum optical axis may be initialized as an initial population using a random or other heuristic method.
In step A3, a new solution vector is generated using the crossover, specifically as follows: two parent solution vectors are selected, a cross point is selected, the two parent solution vectors are combined in front and back to obtain a new solution vector, and a sufficient number of solution vectors are obtained repeatedly.
In step A4, the termination condition here may be that the maximum number of iterations is reached or that a certain convergence condition is met.
In step A6, the optimization objective is to find an optimal balance point, and it is to be noted that the optimal balance point does not necessarily mean the same importance of the drum optical axis consistency and definition, but that the drum optical axis consistency and definition are satisfied within a reasonable range. The optimization targets are formed by setting the range of the standard deviation of the optical axis and the size of the range of the distance variation, namely the fitness function valueThe smaller the balance point representing the parallelism and sharpness of the optical axis, the better.
And selecting a solution vector with the optimal fitness function value as an optimal solution according to the optimization target. The invention uses MOEA/D algorithm to optimize, and searches a group of optimal solutions. The MOEA/D algorithm will optimize on each single target problem and eventually yield a set of non-dominant solutions, representing the best balance between standard deviation and range of variation of the optical axis.
After the optimal balance point of the microscope rotary drum of the same type is obtained, the performance of the rotary drum to be detected is evaluated.
Specifically, according to the operation mode, determining the standard deviation of the optical axis of the rotary drum to be detected and the numerical value of the range of the distance variation, substituting the two parameters into the fitness function constructed in the S1 to obtain the numerical value of a new fitness function; and comparing the value of the new fitness function with the minimum value of the fitness function to obtain the distance between the new fitness function and the optimal balance point.
And performing performance evaluation on the rotary drum to be detected according to the distance. For example, if the fitness function value of the drum to be inspectedAnd->The optical axis consistency and definition of the rotary drum are very close to the optimal balance point, and the performance of the rotary drum is estimated to be good; otherwise, if the distance between the fitness function value of the drum to be detected and the minimum value is greater thanx, the consistency and definition of the optical axis of the rotary drum are far from the optimal balance point, and further adjustment and optimization are needed. Here, x is a preset value, preferably 0.01 to 0.03.
The invention provides a detection device for a microscope rotary drum, which is based on the detection method for the microscope rotary drum, and comprises the following steps:
the microscope rotary drum is used for placing the microscope rotary drum to be detected and the rotary drums of the same type so as to measure and compare the optical axes;
the optical measurement device comprises a laser interferometer, a laser distance meter and an optical sensor and is used for measuring the standard deviation and the distance variation range of an optical axis;
the data acquisition system is used for recording and processing the data acquired from the optical measurement equipment and calculating standard deviation and distance variation range;
the rotating device is used for rotating the microscope rotary drum to obtain the distances from different points in the corresponding rotary drum to the optical axis;
a mathematical model describing the movement of the microscope drum and the variation of the optical axis;
and the computer is used for carrying out data processing, constructing a fitness function and running a multi-objective optimization algorithm.
The mathematical model refers to a mathematical formula or equation describing the motion and optical properties of the microscope drum to be inspected. In this algorithm, the mathematical model functions to calculate the distance from any point inside the drum to the optical axis, so as to obtain the standard deviation of the optical axis and the range of the distance variation.
The connection between the microscope drum and the rotating device in the invention is as follows: the microscope drum needs to be mounted on a rotating device so that the rotating device can control the rotational movement of the drum. Connection between the optical measuring device and the microscope drum: the optical measuring device needs to be mounted on the microscope drum so that the distances from the optical axis to the different points inside the drum can be measured, which can be achieved by fixing the probe or sensor of the measuring device on the drum.
Connection between data acquisition system and optical measurement device: the data acquisition system needs to be able to receive the data output by the optical measurement device and to record and process it. By means of an interface or sensor connecting the data acquisition system and the measuring device, for example by means of a communication interface such as USB, RS232, etc.
Connection between computer and data acquisition system: the computer needs to be able to receive the data output by the data acquisition system and to perform further processing and analysis. Through interfaces or data lines connecting the computer and the data acquisition system, for example through communication interfaces such as USB, ethernet, etc.
The above-described preferred embodiments according to the present invention are intended to suggest that, from the above description, various changes and modifications can be made by the person skilled in the art without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the description, but must be determined according to the scope of claims.
Claims (7)
1. A method for detecting a microscope drum, comprising the steps of:
s1, acquiring standard deviation of optical axes of rotating drums of the same type of microscopeAnd distance variation range>Taking the standard deviation of the optical axis and the range of the distance variation as two objective functions, constructing a fitness function, and adopting a multi-objective optimization algorithm to obtain the minimum value of the fitness function->，/>The best balance point expressed as the consistency and definition of the optical axis of the drum of the current type;
s11, establishing a microscope rotary drum mathematical model, rotating the rotary drum, and calculating the positions from n arbitrary points in the rotary drum toThe distance between the optical axis and n arbitrary points of the rotary drum are obtained, and standard deviation and distance variation ranges between the n arbitrary points of the rotary drum and the optical axis are obtained; the distances from n arbitrary points in the rotary drum to the optical axis are respectively as followsCalculate->Wherein->D is the diameter of the drum, < > and>the included angle between the corresponding measuring point and the optical axis;
s12, repeating the operation of S11 to obtain standard deviation and distance variation ranges of optical axes of a plurality of groups of rotary drums with the same type; carrying out data preprocessing on a plurality of groups of standard deviation and distance variation ranges;
s13, according to the preprocessed data, taking the standard deviation and the distance variation range of the optical axis as two objective functions, and constructing an adaptability function; searching a group of optimal solutions through a multi-objective optimization algorithm, wherein the optimal solutions represent optimal balance points of optical axis consistency and definition; the fitness function is as follows:the method comprises the steps of carrying out a first treatment on the surface of the Wherein (1)>An objective function representing the standard deviation of the optical axis, +.>An objective function representing the range of optical axis distance variation, +.>And->Is the weight of the corresponding standard deviation of the optical axis and the range of the distance variation;
s2, calculating standard deviation of optical axis of microscope drum to be detectedAnd distance variation range>Is substituted into the fitness function constructed by S1 to obtain the value of the microscope drum to be detected>，/>The fitness function value of the ith microscope drum to be detected is obtained;
s3, calculatingAnd the optimal balance point>A distance therebetween;
s4, repeating the steps S2 and S3, and evaluating the performance of consistency and definition of the optical axis of the microscope drum to be detected.
2. A detection method for a microscope drum according to claim 1, characterized in that:
angle between arbitrary point and optical axisObtained by interferometry, specifically comprising:
placing the rotary drum in an interference light path to generate an interference pattern; calculating the included angle between the test point and the optical axis according to the change of the interference patternThe formula is/>Where λ is the wavelength of the light source, d is the distance between the two mirrors in the interference light path, and N is the number of movements of the interference fringes.
3. A detection method for a microscope drum according to claim 1, characterized in that: the standard deviation from the drum n arbitrary points to the optical axis is:
。
4. a detection method for a microscope drum according to claim 1, characterized in that: range of distance variation:wherein->Maximum distance>Is the minimum value of the distance.
5. A detection method for a microscope drum according to claim 1, characterized in that: the multi-objective optimization algorithm includes a non-dominant ordering genetic algorithm, a multi-objective particle swarm optimization algorithm, or a MOEA/D algorithm.
6. A detection method for a microscope drum according to claim 1, characterized in that: if the fitness function value of the rotary drum to be detectedAnd->The optical axis consistency and definition of the rotary drum are very close to the optimal balance point, and the performance of the rotary drum is estimated to be good; on the contrary, if the distance between the fitness function value of the rotating drum to be detected and the minimum value is larger than x, the consistency and definition of the optical axis of the rotating drum are far away from the optimal balance point, and further adjustment and optimization are needed.
7. A detection apparatus for a microscope drum, based on the detection method for a microscope drum as claimed in claim 1, characterized by comprising:
the microscope rotary drum is used for placing the microscope rotary drum to be detected and the rotary drums of the same type so as to measure and compare the optical axes;
the optical measurement device comprises a laser interferometer, a laser distance meter and an optical sensor and is used for measuring the standard deviation and the distance variation range of an optical axis;
the data acquisition system is used for recording and processing the data acquired from the optical measurement equipment and calculating standard deviation and distance variation range;
the rotating device is used for rotating the microscope rotary drum to obtain the distances from different points in the corresponding rotary drum to the optical axis;
a mathematical model describing the movement of the microscope drum and the variation of the optical axis;
and the computer is used for carrying out data processing, constructing a fitness function and running a multi-objective optimization algorithm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311339866.0A CN117073991B (en) | 2023-10-17 | 2023-10-17 | Detection device and detection method for microscope rotary drum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311339866.0A CN117073991B (en) | 2023-10-17 | 2023-10-17 | Detection device and detection method for microscope rotary drum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117073991A CN117073991A (en) | 2023-11-17 |
| CN117073991B true CN117073991B (en) | 2024-01-26 |
Family
ID=88715662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311339866.0A Active CN117073991B (en) | 2023-10-17 | 2023-10-17 | Detection device and detection method for microscope rotary drum |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117073991B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183221A (en) * | 2011-03-25 | 2011-09-14 | 天津大学 | Measurement method for verticality of optical axis of microscope system |
| CN109141823A (en) * | 2018-08-16 | 2019-01-04 | 南京理工大学 | A kind of microscopic system depth of field measuring device and method based on clarity evaluation |
| CN111609995A (en) * | 2019-02-26 | 2020-09-01 | 弗提图德萨沃有限公司 | Optical module assembly and debugging test method and device |
| CN114994895A (en) * | 2021-03-01 | 2022-09-02 | 卡尔蔡司显微镜有限责任公司 | Method and device for the light-sheet microscopic examination of a sample |
-
2023
- 2023-10-17 CN CN202311339866.0A patent/CN117073991B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183221A (en) * | 2011-03-25 | 2011-09-14 | 天津大学 | Measurement method for verticality of optical axis of microscope system |
| CN109141823A (en) * | 2018-08-16 | 2019-01-04 | 南京理工大学 | A kind of microscopic system depth of field measuring device and method based on clarity evaluation |
| CN111609995A (en) * | 2019-02-26 | 2020-09-01 | 弗提图德萨沃有限公司 | Optical module assembly and debugging test method and device |
| CN114994895A (en) * | 2021-03-01 | 2022-09-02 | 卡尔蔡司显微镜有限责任公司 | Method and device for the light-sheet microscopic examination of a sample |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117073991A (en) | 2023-11-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4246326B2 (en) | Surface shape measuring method and apparatus | |
| JP2012507008A (en) | Method and apparatus for obtaining information on suspended particles | |
| WO2006027568A1 (en) | Method and apparatus for thin film metrology | |
| US9995648B2 (en) | Optical measurement system and method for measuring critical dimension of nanostructure | |
| JP2019519781A (en) | Method and system for measuring beam quality of laser beam | |
| EP1896792B1 (en) | Method and system for measuring the curvature of an optical surface | |
| KR102026742B1 (en) | Optical measuring system and method of measuring a critical size | |
| CN111208633A (en) | Optimization method of characteristic parameters of dispersion confocal microscope | |
| JP4340625B2 (en) | Optical inspection method and apparatus | |
| CN117073991B (en) | Detection device and detection method for microscope rotary drum | |
| CN111220088A (en) | Measurement system and method | |
| CN109990732B (en) | Transverse subtraction differential confocal curvature radius measuring method | |
| CN114174791A (en) | Optical imaging performance testing system and method | |
| JP4768904B2 (en) | Method for measuring physical quantity of optical element or optical system | |
| JP7191632B2 (en) | Eccentricity measurement method | |
| CN110068290B (en) | Bilateral dislocation differential confocal measuring method for super-large curvature radius | |
| JP2014020881A (en) | Lens inspection device and lens inspection method | |
| JP2011220903A (en) | Refractive-index measurement method and device | |
| JP2016200461A (en) | Refractive index measuring method, refractive index measuring device, and optical element manufacturing method | |
| Mínguez Martínez | Traceability of 3D optical measuring instruments in industrial environments using customized material standards | |
| CN215893972U (en) | Novel multi-wavelength astigmatic probe | |
| JP6320093B2 (en) | Refractive index distribution measuring method, refractive index distribution measuring apparatus, optical element manufacturing method, program, and storage medium | |
| CN114353929B (en) | Low-frequency vibration measuring device and method based on point diffraction interference | |
| CN110260783B (en) | Automatic focusing device and method for interference microscope | |
| CN109373905B (en) | Redundant light path-based device and method for measuring out-of-focus distance of micro-scale transparent body |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |