CN117067193A - Anti-shake concentric two-shaft vacuum robot transmission structure based on magnetic fluid - Google Patents
Anti-shake concentric two-shaft vacuum robot transmission structure based on magnetic fluid Download PDFInfo
- Publication number
- CN117067193A CN117067193A CN202311206643.7A CN202311206643A CN117067193A CN 117067193 A CN117067193 A CN 117067193A CN 202311206643 A CN202311206643 A CN 202311206643A CN 117067193 A CN117067193 A CN 117067193A
- Authority
- CN
- China
- Prior art keywords
- magnetic fluid
- fixedly connected
- assembly
- arm
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 title claims abstract description 93
- 230000005540 biological transmission Effects 0.000 title claims abstract description 54
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 47
- 230000001360 synchronised effect Effects 0.000 claims abstract description 15
- 230000033001 locomotion Effects 0.000 claims abstract description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 5
- 238000012545 processing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000012636 effector Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/14—Programme-controlled manipulators characterised by positioning means for manipulator elements fluid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
A magnetic fluid-based anti-shake concentric two-axis vacuum robot transmission structure comprises a robot arm component, a magnetic fluid component, a transmission component and a screw nut connecting piece; the transmission assembly is arranged at the bottom of the magnetic fluid assembly, and the bottom end of the transmission assembly is fixedly connected with the screw rod nut connecting piece; the magnetic fluid assembly comprises a magnetic fluid outer shaft and a magnetic fluid inner shaft; the transmission assembly comprises a first servo motor and an inner shaft connecting piece; when the first servo motor drives the magnetic fluid outer shaft to rotate through the second harmonic reducer, the magnetic fluid inner shaft and the magnetic fluid outer shaft simultaneously rotate, and the robot arm assembly rotates. Therefore, the invention controls the rotation of the robot arm through one servo motor, effectively avoids the shake problem caused by synchronous movement of multiple motors, and reduces the falling risk of the wafer in the carrying process.
Description
Technical Field
The invention belongs to the technical field of semiconductor wafer transmission equipment, and particularly relates to an anti-shake concentric two-axis vacuum robot transmission structure based on magnetic fluid.
Background
Robots are products of the combination of electronic technology and mechanics, which relate to multidisciplinary comprehensive high-tech products of mechanochemical optimization design, control technology, sensor systems, remote control and monitoring technology, virtual robot technology, bionic technology, micro and micro robot technology, and the like.
The wafer is a silicon chip used for manufacturing a silicon semiconductor circuit, the original material of the wafer is silicon, and the wafer has different characteristic sizes; meanwhile, as the feature size is continuously reduced, the influence of the particle number in the air on the quality, i.e. the reliability, of the processed wafer is increased during the processing of the wafer.
However, as cleanliness increases, new data features appear for particle counts. Therefore, in the wafer processing process, the environmental requirements are high, and equipment for processing in a vacuum chamber is generally required.
In the process of processing a wafer, a wafer vacuum handling mechanism is indispensable, and is widely used in the field of wafer processing as equipment used in the process of handling a wafer.
In the prior art, a wafer vacuum transfer robot, usually a double motor or even a three motor, controls the whole rotation of a robot arm, and the phenomenon of incomplete synchronization exists between motors, so that the shaking phenomenon of an end effector of the robot arm is easy to occur, and the loss is caused by the falling of a wafer.
Disclosure of Invention
The present invention is directed to solving, at least to some extent, one of the problems in the related art. Therefore, the invention aims to provide an anti-shake type concentric two-axis vacuum robot transmission structure based on magnetic fluid, which is mainly used for solving the problem of shake of a robot arm end effector in rotary motion of semiconductor transmission equipment.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
a magnetic fluid-based anti-shake concentric two-axis vacuum robot transmission structure comprises a robot arm assembly, a magnetic fluid assembly, a transmission assembly and a screw nut connecting piece; the transmission assembly is arranged at the bottom of the magnetic fluid assembly, and the bottom end of the transmission assembly is fixedly connected with the screw rod nut connecting piece;
the magnetic fluid assembly comprises a magnetic fluid outer shaft and a magnetic fluid inner shaft; the transmission assembly comprises a fixed seat, a first harmonic speed reducer, a second harmonic speed reducer and an outer shaft connecting ring; the top of the fixed seat is fixedly connected with a first harmonic speed reducer, the top of the first harmonic speed reducer is fixedly connected with an outer shaft connecting ring, the top end of the outer shaft connecting ring is fixedly connected with the bottom end of the magnetic fluid outer shaft, the bottom end of the magnetic fluid inner shaft penetrates through the harmonic speed reducer and extends to the center of the inner shaft connecting piece, the inner shaft connecting piece is arranged at the center of the fixed seat, the bottom of the fixed seat is fixedly connected with a second harmonic speed reducer through a screw, and the bottom end of the second harmonic speed reducer is fixedly connected with the screw-nut connecting piece;
the transmission assembly comprises a first servo motor and an inner shaft connecting piece;
the second harmonic reducer 33 works to drive the fixed seat 31 to rotate, the outer magnetic fluid shaft 21 and the inner magnetic fluid shaft 22 are both fixed with the fixed seat 31, and when the fixed seat 31 rotates, the outer magnetic fluid shaft 21 and the inner magnetic fluid shaft 22 can simultaneously rotate along with the fixed seat 31.
Further, the robot arm assembly comprises a first arm shell, a first arm big belt pulley, an elbow shaft, a first arm small belt pulley, a transmission steel belt and a second arm shell, the magnetic fluid assembly comprises a magnetic fluid outer shaft and a magnetic fluid inner shaft, the top end of the magnetic fluid outer shaft is fixedly connected with the first arm shell, the top end of the magnetic fluid inner shaft is fixedly connected with the first arm big belt pulley, one end of the first arm shell is fixedly connected with the elbow shaft through a screw, the outer side of the elbow shaft is provided with the first arm small belt pulley, the top of the first arm small belt pulley is fixedly connected with the bottom of the second arm shell, the first arm small belt pulley is connected with the first arm big belt pulley through the transmission steel belt, and when the magnetic fluid inner shaft and the magnetic fluid outer shaft rotate simultaneously, the robot arm assembly rotates.
Further, the transmission assembly further comprises a second servo motor, a driving wheel, a synchronous belt, a driven wheel and a motor fixing plate, wherein the driving wheel is fixedly connected to the output end of the first servo motor, the synchronous belt is arranged on the outer side of the driving wheel, the driven wheel is arranged on the inner side of one end of the synchronous belt, one side of the driven wheel is fixedly connected with the input of the second harmonic reducer through a screw, and the first servo motor is fixedly connected with the fixing seat through the motor fixing plate; when the magnetic fluid outer shaft rotates, the robot arm assembly stretches out and draws back.
Further, the second servo motor and the first servo motor are arranged on two sides of the inner portion of the fixing seat.
Compared with the prior art, the technical scheme provided by the embodiment of the invention has the following advantages:
the invention relates to a magnetic fluid-based anti-shake type concentric two-axis vacuum robot transmission structure, which is characterized in that the output end of a second harmonic speed reducer is connected with a screw-nut connecting piece to fix the screw-nut connecting piece, when the second harmonic speed reducer is driven by a first servo motor, the output end of the second harmonic speed reducer cannot rotate, the input end of the second harmonic speed reducer can rotate, and at the moment, the input end of the second harmonic speed reducer drives a magnetic fluid inner shaft and a magnetic fluid outer shaft to rotate simultaneously through a fixed seat, so that the rotation movement of a robot arm assembly is controlled by a single motor, the shake problem caused by synchronous movement of multiple motors can be avoided, and the falling risk of a wafer in the carrying process is reduced.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, and it will be obvious to a person skilled in the art that other drawings can be obtained from these drawings without inventive effort.
FIG. 1 is a schematic axial side view of a magnetic fluid-based anti-shake concentric two-axis vacuum robot transmission structure in an embodiment of the invention
FIG. 2 is a schematic side view of an anti-shake concentric two-axis vacuum robot transmission structure based on magnetic fluid in an embodiment of the invention
FIG. 3 is an enlarged partial schematic view of a transmission assembly according to an embodiment of the invention
FIG. 4 is an isometric view of a drive assembly in an embodiment of the invention
FIG. 5 is a top view of a drive assembly according to an embodiment of the present invention
In the figure:
1 a robot arm assembly; 11 a first arm housing; 12 first arm big belt wheel; 13 elbow axis; 14 a first arm pulley; 15, a transmission steel belt; 16 a second arm housing; 2 a magnetic fluid component; a magnetic fluid outer shaft; 22 magnetic fluid inner shaft; 3, a transmission assembly; 31 fixing seats; 32 harmonic speed reducer I; 33 harmonic speed reducer II; an outer shaft connection ring 34; a second servo motor 35; 36 driving wheels; 37 synchronous belt; 38 driven wheels; 39 motor fixing plates; 310 servo motor one; 311 inner shaft connection; 4 screw-nut connector
Detailed Description
For a clearer understanding of technical features, objects and effects of the present invention, a detailed description of embodiments of the present invention will be made with reference to the accompanying drawings. In the following description, it should be understood that the directions or positional relationships indicated by "front", "rear", "upper", "lower", "left", "right", "longitudinal", "transverse", "vertical", "horizontal", "top", "bottom", "inner", "outer", "head", "tail", etc. are configured and operated in specific directions based on the directions or positional relationships shown in the drawings, and are merely for convenience of describing the present invention, not to indicate that the mechanism or element referred to must have specific directions, and thus should not be construed as limiting the present invention.
It should also be noted that the terms "mounted," "connected," "secured," "disposed," and the like are to be construed broadly and merely as a convenience for describing the present invention and are not to be construed as indicating or implying any particular importance or number of features in an indicated manner, such that the features defining "first," "second," "third," etc. may explicitly or implicitly include one or more such features, unless otherwise explicitly or implicitly specified and limited. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
Referring to fig. 1, fig. 1 is a side view of an anti-shake concentric two-axis vacuum robot transmission structure based on magnetic fluid according to an embodiment of the invention. As shown in fig. 1, the magnetic fluid-based anti-shake type concentric two-axis vacuum robot transmission structure is characterized by comprising a robot arm assembly 1, a magnetic fluid assembly 2, a transmission assembly 3 and a screw-nut connecting piece 4; the transmission assembly 3 is arranged at the bottom of the magnetic fluid assembly 2, and the bottom end of the transmission assembly 3 is fixedly connected with the screw-nut connecting piece 4.
Referring to fig. 3-5 in conjunction with fig. 2, fig. 2 is an axial side view of a magnetic fluid-based anti-shake concentric two-axis vacuum robot transmission structure in an embodiment of the invention; FIG. 3 is an enlarged partial schematic view of a transmission assembly according to an embodiment of the present invention; fig. 4 is an isometric view of a transmission assembly in an embodiment of the invention. Fig. 5 is a top view of a transmission assembly according to an embodiment of the present invention.
As shown in fig. 2, the magnetic fluid assembly 2 includes an outer magnetic fluid shaft 21 and an inner magnetic fluid shaft 22.
As shown in fig. 3-5, the transmission assembly 3 may include a fixed seat 31, a first harmonic reducer 32, a second harmonic reducer 33, and an outer shaft connection ring 34; the top of the fixed seat 31 is fixedly connected with a first harmonic reducer 32, the top (input end) of the first harmonic reducer 32 is fixedly connected with an outer shaft connecting ring 34, the top end of the outer shaft connecting ring 34 is fixedly connected with the bottom end (output end) of the magnetic fluid outer shaft 21, the bottom end of the magnetic fluid inner shaft 22 penetrates through the first harmonic reducer 32 and extends to the center of an inner shaft connecting piece 311, the inner shaft connecting piece 311 is arranged in the center of the fixed seat 31, the bottom of the fixed seat 31 is fixedly connected with a second harmonic reducer 33 through a screw, and the bottom end (output end) of the second harmonic reducer 33 is fixedly connected with a screw-nut connecting piece 4; the transmission assembly 3 includes a first servomotor 310 and an inner shaft connection 311.
The second harmonic reducer 33 works to drive the fixed seat 31 to rotate, the outer magnetic fluid shaft 21 and the inner magnetic fluid shaft 22 are both fixed with the fixed seat 31, and when the fixed seat 31 rotates, the outer magnetic fluid shaft 21 and the inner magnetic fluid shaft 22 can simultaneously rotate along with the fixed seat 31.
In the embodiment of the present invention, the transmission assembly 3 may further include a second servo motor 35, a driving wheel 36, a synchronous belt 37, a driven wheel 38, and a motor fixing plate 39, where the output end of the first servo motor 310 is fixedly connected with the driving wheel 36, the synchronous belt 37 is disposed on the outer side of the driving wheel 36, a driven wheel 38 is disposed on the inner side of one end of the synchronous belt 37, one side of the driven wheel 38 is fixedly connected with the input of the second harmonic reducer 33 through a screw, and the first servo motor 310 is fixedly connected with the fixing seat 31 through the motor fixing plate 39; when the magnetic fluid outer shaft 21 rotates, the robot arm assembly 1 performs telescopic motion.
Specifically, the top of the magnetic fluid outer shaft 21 is fixedly connected with the first arm casing 11, the top of the magnetic fluid inner shaft 22 is fixedly connected with the first arm big belt pulley 12, one end of the first arm casing 11 is fixedly connected with the elbow shaft 13 through a screw, the outer side of the elbow shaft 13 is provided with the first arm small belt pulley 14, the top of the first arm small belt pulley 14 is fixedly connected with the bottom of the second arm casing 16, the first arm small belt pulley 14 and the first arm big belt pulley 12 are connected through the transmission steel belt 15, when the magnetic fluid outer shaft 21 rotates, the robot arm assembly 1 stretches out and draws back, and when the magnetic fluid inner shaft 22 and the magnetic fluid outer shaft 21 rotate simultaneously, the robot arm assembly 1 rotates.
The transmission assembly 3 is arranged at the bottom of the magnetic fluid assembly 2, the first harmonic speed reducer 32 is fixedly connected to the top of the fixing seat 31, the outer shaft connecting ring 34 is fixedly connected to the top of the first harmonic speed reducer 32, the top of the outer shaft connecting ring 34 is fixedly connected with the bottom end of the magnetic fluid outer shaft 21, the bottom end of the magnetic fluid inner shaft 22 penetrates through the first harmonic speed reducer 32 and extends to the center of the inner shaft connecting piece 311, the inner shaft connecting piece 311 is arranged at the center of the fixing seat 31, the second harmonic speed reducer 33 is fixedly connected to the bottom of the fixing seat 31 through a screw, the bottom end of the second harmonic speed reducer 33 is fixedly connected with the screw nut connecting piece 4, the second servo motor 35 and the first servo motor 310 are arranged on two sides of the inside of the fixing seat 31, the driving wheel 36 is fixedly connected with the output end of the first servo motor 310, the outer side of the driving wheel 36 is provided with a synchronous belt 37, one end inner side of the synchronous belt 37 is provided with a driven wheel 38, one side of the driven wheel 38 is fixedly connected with the second harmonic speed reducer 33 through a screw, and the first servo motor 310 is fixedly connected with the fixing seat 31 through a motor fixing plate 39.
When the first servo motor 310 outputs, the second harmonic speed reducer 32 is driven to move through the driving wheel 36, the synchronous belt 37 and the driven wheel 38, at this time, the input end and the output end of the second harmonic speed reducer 32 can rotate relatively, at this time, the output end of the second harmonic speed reducer 32 is fixed, so that the input end of the second harmonic speed reducer 32 can rotate, the input end of the second harmonic speed reducer 32 is fixedly connected with the fixed seat 31, so that the fixed seat 31 and the second harmonic speed reducer 32 can simultaneously rotate, at this time, the second servo motor 35 is electrified and does not work, so that the magnetic fluid outer shaft 21 and the fixed seat 31 are relatively static, and the magnetic fluid inner shafts 22 of the magnetic fluid outer shaft 21 can simultaneously rotate, thereby realizing single motor driving.
In summary, the anti-shake vacuum robot transmission structure based on the magnetic fluid provided by the invention can also be used in an anti-shake environment in atmospheric pressure. The anti-shake vacuum robot transmission structure based on the magnetic fluid is not limited to the integrated circuit industry, and can be applied to other industries of general semiconductors, such as flat panel display, LED, solar cells and the like.
It is to be understood that the above examples only represent preferred embodiments of the present invention, which are described in more detail and are not to be construed as limiting the scope of the invention; it should be noted that, for a person skilled in the art, the above technical features can be freely combined, and several variations and modifications can be made without departing from the scope of the invention; therefore, all changes and modifications that come within the meaning and range of equivalency of the claims are to be embraced within their scope.
Claims (4)
1. The anti-shake concentric two-axis vacuum robot transmission structure based on the magnetic fluid is characterized by comprising a robot arm assembly (1), a magnetic fluid assembly (2), a transmission assembly (3) and a screw-nut connecting piece (4); the transmission assembly (3) is arranged at the bottom of the magnetic fluid assembly (2), and the bottom end of the transmission assembly (3) is fixedly connected with the screw rod nut connecting piece (4);
the magnetic fluid assembly (2) comprises a magnetic fluid outer shaft (21) and a magnetic fluid inner shaft (22); the transmission assembly (3) comprises a fixed seat (31), a first harmonic speed reducer (32), a second harmonic speed reducer (33) and an outer shaft connecting ring (34); the top of the fixed seat (31) is fixedly connected with a first harmonic reducer (32), the top of the first harmonic reducer (32) is fixedly connected with an outer shaft connecting ring (34), the top end of the outer shaft connecting ring (34) is fixedly connected with the bottom end of the magnetic fluid outer shaft (21), the bottom end of the magnetic fluid inner shaft (22) penetrates through the first harmonic reducer (32) and extends to the center of an inner shaft connecting piece (311), the inner shaft connecting piece (311) is arranged at the center of the fixed seat (31), the bottom of the fixed seat (31) is fixedly connected with a second harmonic reducer (33) through a screw, and the bottom end of the second harmonic reducer (33) is fixedly connected with a screw-nut connecting piece 4;
the transmission assembly (3) comprises a first servo motor (310) and an inner shaft connecting piece (311);
the second harmonic speed reducer (33) works to drive the fixed seat (31) to rotate, the magnetic fluid outer shaft (21) and the magnetic fluid inner shaft (22) are fixed with the fixed seat (31), and when the fixed seat (31) rotates, the magnetic fluid outer shaft (21) and the magnetic fluid inner shaft (22) can rotate along with the fixed seat (31) simultaneously.
2. The magnetic fluid-based anti-shake type concentric two-axis vacuum robot transmission structure according to claim 1, wherein the robot arm assembly (1) comprises a first arm shell (11), a first arm big belt wheel (12), an elbow shaft (13), a first arm small belt wheel (14), a transmission steel belt (15) and a second arm shell (16), the magnetic fluid assembly (2) comprises a magnetic fluid outer shaft (21) and a magnetic fluid inner shaft (22), the top end of the magnetic fluid outer shaft (21) is fixedly connected with the first arm shell (11), the top end of the magnetic fluid inner shaft (22) is fixedly connected with the first arm big belt wheel (12), one end of the first arm shell (11) is fixedly connected with the elbow shaft (13) through a screw, the outer side of the elbow shaft (13) is provided with a first arm small belt wheel (14), the top of the first arm small belt wheel (14) is fixedly connected with the bottom of the second arm shell (16), and the first arm small belt wheel (14) is connected with the first arm big belt wheel (12) through the transmission steel belt (15), and when the magnetic fluid outer shaft (21) and the magnetic fluid outer shaft (12) rotate, the magnetic fluid assembly (21) rotates simultaneously.
3. The magnetic fluid-based anti-shake type concentric two-axis vacuum robot transmission structure according to claim 2, wherein the transmission assembly (3) further comprises a second servo motor (35), a driving wheel (36), a synchronous belt (37), a driven wheel (38) and a motor fixing plate (39), the driving wheel (36) is fixedly connected to the output end of the first servo motor (310), the synchronous belt (37) is arranged on the outer side of the driving wheel (36), a driven wheel (38) is arranged on the inner side of one end of the synchronous belt (37), one side of the driven wheel (38) is fixedly connected with the input of the second harmonic reducer (33) through a screw, and the first servo motor (310) is fixedly connected with the fixed seat (31) through the motor fixing plate (39); when the magnetic fluid outer shaft (21) rotates, the robot arm assembly (1) performs telescopic movement.
4. The magnetic fluid-based anti-shake type concentric two-axis vacuum robot transmission structure according to claim 3, wherein the second servo motor (35) and the first servo motor (310) are disposed on two sides of the inside of the fixed seat (31).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311206643.7A CN117067193A (en) | 2023-09-19 | 2023-09-19 | Anti-shake concentric two-shaft vacuum robot transmission structure based on magnetic fluid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311206643.7A CN117067193A (en) | 2023-09-19 | 2023-09-19 | Anti-shake concentric two-shaft vacuum robot transmission structure based on magnetic fluid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117067193A true CN117067193A (en) | 2023-11-17 |
Family
ID=88702470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311206643.7A Pending CN117067193A (en) | 2023-09-19 | 2023-09-19 | Anti-shake concentric two-shaft vacuum robot transmission structure based on magnetic fluid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117067193A (en) |
-
2023
- 2023-09-19 CN CN202311206643.7A patent/CN117067193A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9334127B2 (en) | Systems, apparatus and methods for transporting substrates in electronic device manufacturing | |
| JP2015036186A (en) | Horizontally articulated robot | |
| WO2022001296A1 (en) | Driving joint and robot | |
| CN109760029B (en) | Flat single-arm robot based on synchronous pulley transmission | |
| CN105479482A (en) | Wrist of six-axis robot arm | |
| CN201881384U (en) | Arm mechanism of planar multi-joint robot | |
| US8528438B2 (en) | Robotic arm for transporting substrate in ultrahigh vacuum | |
| CN210910088U (en) | Mechanical arm and robot | |
| CN106863347B (en) | Modularized two-degree-of-freedom robot joint | |
| CN105364910B (en) | It is a kind of to rotate the secondary parallel sorting machine people of four-degree-of-freedom for driving | |
| CN208592849U (en) | A kind of seven axis joint robots based on hollow driver | |
| CN117067193A (en) | Anti-shake concentric two-shaft vacuum robot transmission structure based on magnetic fluid | |
| CN104786211A (en) | Six-freedom-degree industrial robot with ball screw pairs | |
| CN109278031A (en) | A kind of hollow six joint industrial robot | |
| WO2015020089A1 (en) | Horizontal multi-joint robot and production method for horizontal multi-joint robot | |
| CN105479456A (en) | Movable four-axis robot | |
| CN116985159A (en) | Manipulator with liftable arm | |
| JP5098562B2 (en) | Workpiece transfer robot and transfer method | |
| JP2014233817A (en) | Concentric biaxial robot | |
| CN110861120A (en) | Driving joint based on double-stator frameless torque motor and application thereof | |
| CN106369112B (en) | Drive device | |
| CN113305876B (en) | High-redundancy flexible robot joint, robot and joint structure | |
| CN210189773U (en) | Mechanical carrying device based on 3-degree-of-freedom parallel industrial manipulator | |
| CN207326982U (en) | A kind of selective compliance assembly robot arm of connecting rod synchronous belt joint transmission | |
| JP4884611B2 (en) | Conveying device using an eccentric oscillating speed reducer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |