CN117049775A - Quartz furnace pipe and manufacturing method thereof - Google Patents

Quartz furnace pipe and manufacturing method thereof Download PDF

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Publication number
CN117049775A
CN117049775A CN202310824892.6A CN202310824892A CN117049775A CN 117049775 A CN117049775 A CN 117049775A CN 202310824892 A CN202310824892 A CN 202310824892A CN 117049775 A CN117049775 A CN 117049775A
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CN
China
Prior art keywords
quartz
manufacturing
furnace
quartz furnace
tube
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Pending
Application number
CN202310824892.6A
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Chinese (zh)
Inventor
孟亮
陈明光
陈龙
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Taizhou Jinneng New Energy Co ltd
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Taizhou Jinneng New Energy Co ltd
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Priority to CN202310824892.6A priority Critical patent/CN117049775A/en
Publication of CN117049775A publication Critical patent/CN117049775A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/04Re-forming tubes or rods
    • C03B23/09Reshaping the ends, e.g. as grooves, threads or mouths
    • C03B23/099Reshaping the ends, e.g. as grooves, threads or mouths by fusing, e.g. flame sealing

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

The invention discloses a quartz furnace pipe and a manufacturing method thereof, wherein the manufacturing method comprises the following steps: s1: machining a quartz furnace pipe in sections to form at least a furnace mouth and a tail section with preset shapes and sizes; s2: and (5) sequentially carrying out fusion butt joint on the sections to form the integral quartz furnace. The manufacturing method provided by the invention can be used for preparing the large-size quartz furnace, so that the processing difficulty and processing cost of the large-size quartz furnace are reduced, the processing dimensional accuracy of the large-size quartz furnace can be improved, and each section is broken in the preparation process and then can be subjected to fusion welding repair.

Description

Quartz furnace pipe and manufacturing method thereof
Technical Field
The invention relates to the field of quartz processing, in particular to a quartz furnace and a manufacturing method thereof.
Background
Quartz is a very excellent base material with a series of excellent physical and chemical properties, the softening point temperature of quartz is about 1730 ℃, the quartz can be used for a long time at 1100 ℃, the short time use temperature can reach 1450 ℃, besides hydrofluoric acid, the quartz hardly has chemical reaction with other acid substances, the acid resistance is 30 times that of ceramics, the chemical stability of stainless steel is 150 times that of stainless steel, and the quartz is incomparable with any other engineering material. Therefore, the quartz furnace is widely applied in the industries of semiconductors, photovoltaics or thin film power electronics, and the like, but the existing quartz furnace manufacturing method mainly adopts an electric arc method and a glass lathe integral processing method, and the manufacturing technology limitation leads to high processing cost, high difficulty, easy breakage and irreparable repair of the large-size quartz furnace produced by the existing furnace manufacturing technology.
(1) Arc method: adding quartz sand into the mould, introducing the mould into a melting furnace, striking an electrode, melting the quartz sand to 1700 ℃ to obtain the furnace, and carrying out one-step molding to produce the furnace with different sizes by changing the mould. The defects are that the size control precision is poor, the wall thickness is uneven, the thickness of the furnace tail wall is thicker than the wall thickness of the furnace mouth, in particular to a large-size furnace pipe, the wall thickness of the furnace tail is larger than the wall thickness of the furnace mouth, the furnace tail is easy to crack in the manufacturing process, the yield is low, and the furnace pipe manufactured by an arc method is formed at one time and cannot be repaired by fusion welding after being damaged.
(2) Glass lathe: placing the blank quartz tube on a lamper lathe to rotate at a high speed, arranging an oxyhydrogen flame blast lamp outside the quartz tube, heating the quartz tube to a semi-molten state, and gradually expanding the diameter of the quartz tube under the action of centrifugal force to prepare a furnace liner. The defects are that for the integral processing of the furnace pipe, for the large-size quartz furnace pipe, the oxyhydrogen flame blast lamp cannot melt the furnace pipe due to the thicker wall thickness, the manufactured furnace pipe has uneven wall thickness, poor dimensional accuracy and uneven and smooth surface of the furnace pipe, the processing time of the large-size furnace pipe is long, the heat is high, the personnel cannot operate, the machine tool is easy to damage, and the whole furnace pipe is heated unevenly and is easy to damage, so that the glass lathe cannot produce the large-size quartz furnace pipe.
Therefore, it is necessary to provide a new quartz furnace and a manufacturing method thereof, which can manufacture a large-sized quartz furnace, reduce the processing difficulty and the processing cost, and facilitate repair if the quartz furnace is damaged during the manufacturing process.
Disclosure of Invention
The invention aims to provide a quartz furnace pipe and a manufacturing method thereof, which can prepare a large-size quartz furnace pipe, reduce processing difficulty and processing cost and facilitate repair if the quartz furnace pipe is damaged in the preparation process.
In order to achieve the above purpose, the technical scheme adopted by the invention is to provide a manufacturing method of a quartz furnace, which comprises the following steps: s1: machining a quartz furnace pipe in sections to form at least a furnace mouth and a tail section with preset shapes and sizes; s2: and (5) sequentially carrying out fusion butt joint on the sections to form the integral quartz furnace.
Further, the step S1 further includes forming at least one middle section.
Further, each segment in the step S1 is formed by a glass lathe through separate processing, and includes the following steps: placing a blank quartz tube on a glass lathe for high-speed rotation, arranging an oxyhydrogen flame blast lamp outside the quartz tube, heating the quartz tube to a semi-molten state, gradually expanding the diameter of the quartz tube to a preset size under the action of centrifugal force, and respectively manufacturing each section.
Further, each segment in the step S1 is processed into a tubular shape with equal diameter and open ends, and the step S2 is as follows: and sequentially carrying out fusion butt joint on each section to form a quartz furnace tube, then carrying out sealing processing on the tail end of the quartz furnace tube through a glass lathe, forming a preset shape, and then forming the quartz furnace tube.
Further, in the step S1, the tail end of the tail section is processed into a closed shape, and a predetermined shape is formed, and other sections are processed into a tubular shape with both ends open and equal diameters.
Further, the step S1 further includes: at least two blank quartz tubes are spliced into a longer quartz tube, then an oxyhydrogen flame burner is adopted to heat and raise the temperature to the semi-melting temperature of quartz, the quartz tube is rotated to perform diameter expansion operation, and simultaneously, the two ends of a glass lathe apply preset pressure operation to the quartz tube, so that the thickness of the tube wall is increased while the diameter of the quartz tube is expanded, and each section with preset wall thickness is obtained.
Further, the step S1 further includes: after each segment is processed, the segment is inspected, if breakage is found, and fusion welding repair is performed.
Further, the axial length of each segment is 700mm-1500mm with the maximum diameter and 10mm-40mm with the wall thickness.
Furthermore, the invention also provides a quartz furnace prepared by the manufacturing method.
Further, the axial length of the quartz furnace is 1200mm-4000mm, the maximum diameter is 700mm-1500mm, and the wall thickness is 10mm-40mm.
Furthermore, if the quartz furnace is damaged, the fusion welding repair can be carried out in sections.
Compared with the prior art, the invention has the following beneficial effects: according to the quartz furnace pipe and the manufacturing method thereof, the quartz furnace pipe with larger size can be manufactured by sectionally processing the quartz furnace pipe. Because the size of each section is small after the sectional processing, the oxyhydrogen flame blast lamp of the glass lathe can easily burn the quartz tube to semi-melt molding, control the dimensional accuracy such as diameter, wall thickness and the like, the heating and cooling processes are uniform, the crushing risk is avoided, and the fusion welding repair can be carried out after the breakage of each section is found in the preparation process. The sectional machining process has the advantages that the size of each section is small, the heat generated in the machining process is low, the requirements on the systems and the fixture of the machine tool are low, the machine tool is not easy to damage, the equipment cost is low, the furnace for glass lathe machining has no furnace material loss, the sectional machining size is small and is easier to burn through, less hydrogen and oxygen gas are needed than that needed by the glass lathe for directly machining the quartz furnace, and the machining yield is high compared with an electric arc method, so the production cost is lower; the sectional processing technology is used for producing quartz tubes with different calibers without manufacturing special dies, and the split cost of small-batch production is lower. Therefore, the manufacturing method provided by the invention can reduce the processing difficulty and processing cost of the large-size quartz furnace, can also improve the processing dimensional accuracy of the large-size quartz furnace, and can be used for fusion welding repair after each section is broken in the preparation process.
Drawings
FIG. 1 is a flow chart of a preparation process of a quartz furnace according to an embodiment of the invention;
FIG. 2 is a schematic diagram of the overall structure of a quartz furnace according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of various segments of a quartz furnace according to an embodiment of the present invention;
FIG. 4 is a schematic view of a closed end tail section according to an embodiment of the present invention;
FIG. 5 is a schematic view of a tail section with two open ends according to another embodiment of the present invention;
FIG. 6 is a schematic diagram of a quartz furnace tube prepared during a manufacturing process according to another embodiment of the present invention.
In the figure:
1-quartz furnace pipe, 2-furnace mouth, 3-middle section, 4, 5-tail section and 6-quartz furnace pipe.
Detailed Description
The invention is further described below with reference to the drawings and examples.
FIG. 1 is a flow chart of a process for preparing a quartz furnace according to an embodiment of the invention.
Referring to fig. 1, the embodiment provides a method for manufacturing a quartz furnace, which includes the following steps:
s1: the quartz furnace is machined in sections to form at least a mouth 2 and a tail section 4 of predetermined shape and size. Further, at least one middle section 3 is formed, the number of the middle sections 3 can be multiple, the number of the sections can be determined by a person skilled in the art according to the size of the target quartz furnace, the length of each section in the axial direction is preferably 400mm-2000mm, the maximum diameter is preferably 700mm-1500mm, and the wall thickness is preferably 10mm-40mm. The furnace mouth 2, the middle section 3 and the tail section 4 are formed by independent machining through a glass lathe, and specifically comprise the following steps: placing the quartz tube blank on a glass lathe for high-speed rotation, arranging an oxyhydrogen flame blast lamp outside the quartz tube, heating the quartz tube to a semi-molten state, gradually expanding the diameter of the quartz tube to a preset size under the action of centrifugal force, and respectively manufacturing each section. Because the length of each subsection quartz tube is shorter, the weight is lighter, the oxyhydrogen flame blast lamp of the glass lathe can easily burn the quartz tube to be semi-molten, the diameter, the wall thickness and other dimensional accuracy are controlled, a furnace tube with larger diameter can be formed in the rotating process, the furnace tube cannot be formed like a quartz furnace tube in one-step forming or integral processing, if the furnace tube is large and long, the glass lathe can clamp the furnace tube although being heated in the processing process, and the strength of the furnace tube cannot be deformed or even distorted and scrapped. And after segmentation, each segment has small size, and each segment is heated uniformly in the heating and cooling processes without breaking risk.
Specifically, the diameters of the sections can be controlled by arranging graphite wheels on a glass machine tool, the graphite wheels are positioned below the quartz tube, the graphite wheels are circulated downwards in the machining process, the diameters of the quartz tube are larger and larger, when the quartz tube in a semi-molten state contacts the graphite wheels in the rotating process, the diameters cannot be enlarged, namely, the diameters are determined, simultaneously, the oxyhydrogen flame blast lamp and the graphite wheels move along the axial direction of the quartz tube, the diameters of the positions where the oxyhydrogen flame blast lamp and the graphite wheels move are enlarged to contact the graphite wheels, and the distance between the rotating shaft of the quartz tube and the top surface of the graphite wheels is the maximum radius of each section. For each sectional wall thickness, the pressure can be applied to the quartz tube through the two ends of the glass lathe, when the raw material of one blank quartz tube is insufficient, at least two blank quartz tubes can be spliced into a longer quartz tube, then an oxyhydrogen flame burner is adopted to heat and raise the temperature to the semi-melting temperature of quartz, the quartz tube after the splicing is rotated to perform the diameter expanding operation, and the two ends of the glass lathe apply the preset pressure operation to the quartz tube, so that the thickness of the tube wall is increased while the diameter of the quartz tube is expanded, each section with the preset wall thickness is obtained, the thickening of the quartz tube wall is realized without manual filling, and the wall thickness is uniform and controllable.
There are a plurality of ways to process each segment, in the first embodiment, the furnace mouth 2, the middle section 3 and the tail section 5 are all processed into tubular shapes with equal diameters and open at both ends, namely, both ends of the tail section 5 are open, as shown in fig. 5; in the second embodiment, the tail end of the tail section 4 is processed into a closed shape, that is, one end of the tail section 4 is closed and one end is open, and as shown in fig. 4, the other sectional furnace mouth 2 and the middle section 3 are processed into a tubular shape with equal diameters and both ends open.
For the quartz furnace with the maximum diameter less than or equal to 800mm, the diameter tolerance between each two adjacent sections is less than or equal to +/-0.5 mm, and for the quartz furnace with the maximum diameter more than 800mm, the diameter tolerance is less than or equal to +/-1 mm.
Further, each section can be checked at any time, and because the size of each section is smaller, the section can be subjected to fusion welding repair if breakage is found in the section processing process, and the integral scrapping caused by the fact that the size of the furnace pipe is too large to repair during integral processing is avoided.
S2: the segments are fused and butted in sequence to form the integral quartz furnace 1, as shown in figure 1. The axial length of the quartz furnace is preferably 1200mm-4000mm, the maximum diameter is preferably 700mm-1500mm, and the wall thickness is preferably 10mm-40mm.
For the first embodiment, please refer to fig. 6, the sections are sequentially fused and butt-jointed to form the quartz furnace tube 6, then the tail end of the quartz furnace tube 6 is sealed by a glass lathe to form a predetermined arc shape, and then the quartz furnace tube 1 as shown in fig. 1 is formed. With the second embodiment, since the tail end of the tail section 4 has been processed into a closed shape and formed into a predetermined arc shape when the tail section 4 is processed alone, the quartz furnace 1 shown in fig. 1 can be formed by sequentially fusion butt-jointing the respective sections. Those skilled in the art may choose the two embodiments according to the specific circumstances and needs, and the present invention is not limited thereto.
The steps are adopted to separately process each section and then melt and butt-joint the sections to form the quartz furnace 1, so that the problem that the large-size quartz furnace 1 cannot be processed by an arc method and a glass lathe integral processing method in the prior art can be solved, and the advantages of the section-separated processing are that 1, from the technical point of view, a glass lathe oxyhydrogen flame blast lamp can easily burn a quartz tube to be semi-melt-formed, control the dimensional precision such as diameter, wall thickness and the like, and each section is heated uniformly without breaking risk in the heating and cooling processes; 2. from the viewpoint of cost, the sectional machining process has low requirements on all systems and tool fixtures of a machine tool and is not easy to damage because of small size of each section and low heat generated in the machining process, and less hydrogen and oxygen gas are needed than that needed by directly and integrally machining a quartz furnace liner by a glass lathe, so that the machining yield is high and the production cost is reduced compared with that of an arc method; the sectional processing technology is used for producing quartz tubes with different calibers without manufacturing special dies, and the split cost of small-batch production is lower. 3. From the maintenance perspective, after the processing of the earlier stage segment is completed, the segment can be inspected, and if the breakage is found, the segment can be subjected to fusion welding repair.
In summary, the invention provides the quartz furnace and the manufacturing method thereof, which can reduce the processing difficulty and the processing cost of the large-size quartz furnace, can improve the processing dimensional accuracy of the quartz furnace, and is convenient to repair by carrying out sectional treatment when breakage is found in the processing process of the quartz furnace.
While the invention has been described with reference to the preferred embodiments, it is not intended to limit the invention thereto, and it is to be understood that other modifications and improvements may be made by those skilled in the art without departing from the spirit and scope of the invention, which is therefore defined by the appended claims.

Claims (10)

1. A manufacturing method of a quartz furnace is characterized in that: the method comprises the following steps:
s1: machining a quartz furnace pipe in sections to form at least a furnace mouth and a tail section with preset shapes and sizes;
s2: and (5) sequentially carrying out fusion butt joint on the sections to form the integral quartz furnace.
2. The method for manufacturing a quartz furnace according to claim 1, wherein: the step S1 further includes forming at least one middle section.
3. The method for manufacturing a quartz furnace according to claim 1, wherein: the segments in the step S1 are formed by independent machining of a glass lathe, and the method comprises the following steps: placing a blank quartz tube on a glass lathe for high-speed rotation, arranging an oxyhydrogen flame blast lamp outside the quartz tube, heating the quartz tube to a semi-molten state, gradually expanding the diameter of the quartz tube to a preset size under the action of centrifugal force, and respectively manufacturing each section.
4. The method for manufacturing a quartz furnace according to claim 1, wherein: each segment in the step S1 is processed into a tubular shape with equal diameter and open ends, and the step S2 is as follows: and sequentially carrying out fusion butt joint on each section to form a quartz furnace tube, then carrying out sealing processing on the tail end of the quartz furnace tube through a glass lathe, forming a preset shape, and then forming the quartz furnace tube.
5. The method for manufacturing a quartz furnace according to claim 1, wherein: in the step S1, the tail end of the tail section is processed into a closed shape, a predetermined shape is formed, and other sections are processed into tubular shapes with equal diameters and both ends open.
6. The method for manufacturing a quartz furnace according to claim 1, wherein: the step S1 further includes: at least two blank quartz tubes are spliced into a longer quartz tube, then an oxyhydrogen flame burner is adopted to heat and raise the temperature to the semi-melting temperature of quartz, the quartz tube is rotated to perform diameter expansion operation, and simultaneously, the two ends of a glass lathe apply preset pressure operation to the quartz tube, so that the thickness of the tube wall is increased while the diameter of the quartz tube is expanded, and each section with preset wall thickness is obtained.
7. The method for manufacturing a quartz furnace according to claim 1, wherein: the step S1 further includes: after each segment is processed, the segment is inspected, if breakage is found, and fusion welding repair is performed.
8. The method for manufacturing a quartz furnace according to claim 1, wherein: the axial length of each segment is 400mm-2000mm, the maximum diameter is 700mm-1500mm, and the wall thickness is 10mm-40mm.
9. A quartz furnace, characterized in that: is produced by the production method according to any one of claims 1 to 8.
10. The quartz furnace according to claim 9, wherein: the axial length of the quartz furnace is 1200mm-4000mm, the maximum diameter is 700mm-1500mm, and the wall thickness is 10mm-40mm.
CN202310824892.6A 2023-07-06 2023-07-06 Quartz furnace pipe and manufacturing method thereof Pending CN117049775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310824892.6A CN117049775A (en) 2023-07-06 2023-07-06 Quartz furnace pipe and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310824892.6A CN117049775A (en) 2023-07-06 2023-07-06 Quartz furnace pipe and manufacturing method thereof

Publications (1)

Publication Number Publication Date
CN117049775A true CN117049775A (en) 2023-11-14

Family

ID=88659725

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310824892.6A Pending CN117049775A (en) 2023-07-06 2023-07-06 Quartz furnace pipe and manufacturing method thereof

Country Status (1)

Country Link
CN (1) CN117049775A (en)

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