CN117049730A - Recovery method of low-concentration fluorine-containing wastewater - Google Patents

Recovery method of low-concentration fluorine-containing wastewater Download PDF

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Publication number
CN117049730A
CN117049730A CN202311061630.5A CN202311061630A CN117049730A CN 117049730 A CN117049730 A CN 117049730A CN 202311061630 A CN202311061630 A CN 202311061630A CN 117049730 A CN117049730 A CN 117049730A
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CN
China
Prior art keywords
low
containing wastewater
concentration fluorine
aluminum alloy
fluorine
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Pending
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CN202311061630.5A
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Chinese (zh)
Inventor
杜永勋
谢海
张家晖
魏渤惠
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High Frequency Beijing Technology Co ltd
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High Frequency Beijing Technology Co ltd
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Priority to CN202311061630.5A priority Critical patent/CN117049730A/en
Publication of CN117049730A publication Critical patent/CN117049730A/en
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    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00Multistage treatment of water, waste water or sewage
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/001Processes for the treatment of water whereby the filtration technique is of importance
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/46Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104Devices therefor; Their operating or servicing
    • C02F1/46109Electrodes
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/46Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/463Treatment of water, waste water, or sewage by electrochemical methods by electrolysis by electrocoagulation
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/66Treatment of water, waste water, or sewage by neutralisation; pH adjustment
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/46Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104Devices therefor; Their operating or servicing
    • C02F1/46109Electrodes
    • C02F2001/46133Electrodes characterised by the material
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00Nature of the contaminant
    • C02F2101/10Inorganic compounds
    • C02F2101/12Halogens or halogen-containing compounds
    • C02F2101/14Fluorine or fluorine-containing compounds
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/34Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
    • C02F2103/346Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers

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  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)

Abstract

The invention relates to the technical field of fluorine-containing wastewater recovery, and particularly discloses a recovery method of low-concentration fluorine-containing wastewater, which comprises the following steps: maintaining the alkaline environment of the low-concentration fluorine-containing wastewater, performing electric flocculation reaction, and performing filtering separation operation. The aluminum alloy electrolysis equipment is adopted in the method, so that low-concentration fluorine in the wastewater can be removed, the problem that the existing semiconductor industry cannot treat low-concentration fluorine-containing wastewater is solved, the low-concentration fluorine-containing wastewater can be subjected to deep filtration in the flowing process, complex filtering equipment is not required to be added, and the equipment cost is reduced. The recycling method can realize deep purification, can be directly utilized after the deep purification, fully utilizes water resources, saves resources and protects the environment.

Description

Recovery method of low-concentration fluorine-containing wastewater
Technical Field
The disclosure relates to the technical field of fluorine-containing wastewater recovery, in particular to a recovery method of low-concentration fluorine-containing wastewater.
Background
A large amount of wastewater containing high-concentration fluorine is generated in the semiconductor production process, and the wastewater containing high-concentration fluorine is not treated, so that the living environment and human health can be affected when the wastewater containing high-concentration fluorine is used. And the treated fluorine-containing wastewater can be reused, so that the problem of water resource shortage is solved. In order to avoid such damage and fully utilize water resources, the semiconductor production industry adopts various modes to treat fluorine-containing wastewater, but the treated wastewater still contains fluorine with low concentration, i.e. the fluorine removal operation cannot be performed deeply. Generally, the long-term ingestion of fluorine at low concentrations from the external environment by the human body still causes many chronic diseases and even causes damage to nerves. Therefore, it is also important to perform a deep purification treatment on the low-concentration fluorine-containing wastewater.
Disclosure of Invention
In order to solve the above problems, the present disclosure proposes a recovery method of low-concentration fluorine-containing wastewater.
According to the present disclosure, there is provided a recovery method of low-concentration fluorine-containing wastewater, comprising the steps of:
s110, maintaining an alkaline environment of low-concentration fluorine-containing wastewater, and setting the PH value of the low-concentration fluorine-containing wastewater in the recovery process to be more than 7;
s120, performing electric flocculation reaction, namely enabling the low-concentration fluorine-containing wastewater to pass through aluminum alloy electrolysis equipment, electrifying the aluminum alloy electrolysis equipment, and electrolyzing the low-concentration fluorine-containing wastewater to generate flocculate and purified liquid;
and S130, performing filtering separation operation, and performing separation operation on the flocculate generated in the step S120 to completely separate the flocculate from the purified liquid and output the purified liquid.
Preferably, the aluminum alloy electrolysis equipment comprises an electrode structure and an aluminum alloy contact plate, wherein the electrode structure is electrically connected to the aluminum alloy contact plate, the aluminum alloy contact plate is made of porous aluminum alloy, and the aluminum alloy contact plate is arranged in a recovery path of the low-concentration fluorine-containing wastewater in a net-shaped structure.
Preferably, the low-concentration fluorine-containing wastewater is fully contacted with the aluminum alloy electrolysis equipment.
Preferably, in the step S120, the aluminum alloy electrolysis apparatus is powered on to electrolyze to generate aluminum ions, and the aluminum ions react with the low-concentration fluorine-containing wastewater to generate aluminum hydroxide.
Preferably, in the step S120, the aluminum hydroxide is the flocculate, and the flocculate electrostatically adsorbs fluoride ions in the low concentration fluorine-containing wastewater.
Preferably, in the step S130, the flocculate is precipitated with fluoride ions in the low concentration fluorine-containing wastewater, and the flocculate is separated from the purified liquid.
In the embodiment of the disclosure, the recovery method of the low-concentration fluorine-containing wastewater solves the problem that the existing semiconductor industry cannot treat the low-concentration fluorine-containing wastewater, can finish depth filtration of the low-concentration fluorine-containing wastewater in the flowing process, does not need to increase complex filtration equipment, and reduces equipment cost. The deeply purified water can be directly utilized, so that water resources are fully utilized, resources are saved, and the environment is protected.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that: 1. the method can directly carry out deep purification operation on the recovery path of the low-concentration fluorine-containing wastewater, namely, the wastewater can be subjected to deep purification, so that the equipment cost is reduced; 2. because the materials adopted by the method are low in price and environment-friendly, complex equipment is not required to be added, other influences cannot be caused, water resources are fully utilized, and the ecological environment is protected.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Other features and aspects of the present disclosure will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the technical aspects of the disclosure.
FIG. 1 illustrates a flow chart of a method of recovering low concentration fluorine-containing wastewater in accordance with the present disclosure;
fig. 2 shows a schematic cross-sectional structure of an aluminum alloy contact plate of an aluminum alloy electrolysis apparatus in accordance with an embodiment of the present disclosure.
Detailed Description
Various exemplary embodiments, features and aspects of the disclosure will be described in detail below with reference to the drawings. In the drawings, like reference numbers indicate identical or functionally similar elements. Although various aspects of the embodiments are illustrated in the accompanying drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
The word "exemplary" is used herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.
The term "and/or" is herein merely an association relationship describing an associated object, meaning that there may be three relationships, e.g., a and/or B, may represent: a exists alone, A and B exist together, and B exists alone. In addition, the term "at least one" herein means any one of a plurality or any combination of at least two of a plurality, for example, including at least one of A, B, C, and may mean including any one or more elements selected from the group consisting of A, B and C.
Furthermore, numerous specific details are set forth in the following detailed description in order to provide a better understanding of the present disclosure. It will be understood by those skilled in the art that the present disclosure may be practiced without some of these specific details. In some instances, methods, means, elements, and circuits well known to those skilled in the art have not been described in detail in order not to obscure the present disclosure.
It will be appreciated that the above-mentioned method embodiments of the present disclosure may be combined with each other to form a combined embodiment without departing from the principle logic, and are limited to the description of the present disclosure.
In the semiconductor production process, a large amount of hydrofluoric acid is utilized, and the hydrofluoric acid has a strong killing effect on films, upper respiratory tracts, eyes and skin tissues adhered to a human body. Therefore, the existing fluorine removal technology is a precipitation method, specifically, firstly, fluorine-containing wastewater is uniformly collected into a wastewater tank, then calcium substances, such as lime, calcium chloride and the like, are put into the wastewater tank, can react with the fluorine-containing wastewater, and the reaction product is allowed to stand for precipitation, so that the wastewater is subjected to fluorine removal treatment. However, in this method, the requirement of the ratio of the addition of the substances is very strict, and if the addition is excessive, the suspended substances in water are excessive, and other influences are caused, thereby increasing the burden of wastewater treatment. And the required equipment cost is more, and the finally output filtered water still contains low-concentration fluorine, so that the harm caused by the use of the water containing the low-concentration fluorine cannot be avoided. To this end, in an embodiment of the present disclosure, there is provided a method for recovering low-concentration fluorine-containing wastewater, including the steps of:
s110, maintaining an alkaline environment of low-concentration fluorine-containing wastewater, and setting the PH value of the low-concentration fluorine-containing wastewater in the recovery process to be more than 7;
s120, performing electric flocculation reaction, namely enabling the low-concentration fluorine-containing wastewater to pass through aluminum alloy electrolysis equipment, electrifying the aluminum alloy electrolysis equipment, and electrolyzing the low-concentration fluorine-containing wastewater to generate flocculate and purified liquid;
s130, performing filtering separation operation, and performing separation operation on the flocculate generated in the step S120 to completely separate the flocculate from the purified liquid and output the purified liquid.
Specifically, as shown in fig. 1, in the method, the low-concentration fluorine-containing wastewater can be subjected to deep filtration treatment in the recovery path, complicated equipment is not required to be added, and other influences are not caused in the deep treatment process. First, the pH value of the low-concentration fluorine-containing wastewater is maintained, the pH value of the low-concentration fluorine-containing wastewater is always maintained at a value greater than 7, even if the pH value of the low-concentration fluorine-containing wastewater is maintained at an alkaline condition, and then the subsequent reaction operation is performed. Then, the low-concentration fluorine-containing wastewater passes through an aluminum alloy electrolysis device, the low-concentration fluorine-containing wastewater is fully contacted with the aluminum alloy electrolysis device, the aluminum alloy electrolysis device is electrified, the aluminum alloy electrolysis device reacts with the low-concentration fluorine-containing wastewater, and aluminum hydroxide flocculates are produced, and the flocculates carry electrostatic adsorption fluorine ions. Finally, the flocculate carries fluoride ions to be settled, so that the fluoride ions can be removed efficiently. In the whole deep purification process, complex equipment is not required to be additionally arranged, the equipment cost is reduced, water resources are saved, and the environmental balance and the human health are maintained.
In the embodiment of the present disclosure, as shown in fig. 1 and 2, in step S120, an aluminum alloy electrolysis apparatus is provided including an electrode structure and an aluminum alloy contact plate, the electrode structure is electrically connected to the aluminum alloy contact plate, the aluminum alloy contact plate is made of a porous aluminum alloy material, and the aluminum alloy contact plate is disposed in a recovery path of low-concentration fluorine-containing wastewater in a mesh structure. The aluminum alloy electrolysis equipment is arranged in the embodiment, so that the aluminum alloy electrolysis equipment can fully contact with low-concentration fluorine-containing wastewater, normal backflow of the low-concentration fluorine-containing wastewater is not blocked, impurities possibly carried in the low-concentration fluorine-containing wastewater can be removed while the aluminum alloy electrolysis equipment fully contacts with an aluminum alloy filter, and normal treatment operation is not influenced by the impurities when the follow-up deep filtration treatment operation is performed. Specifically, the aluminum alloy electrolysis device comprises an aluminum alloy contact plate and an electrode structure, wherein the aluminum alloy contact plate is placed in a recovery path of low-concentration fluorine-containing wastewater, and the aluminum alloy contact plate is electrically connected with the electrode structure. The aluminum alloy contact plate can be electrified through the electrode structure, so that the aluminum alloy contact plate reacts in the low-concentration fluorine-containing wastewater to generate flocculates, and fluorine ions are adsorbed through static electricity carried by the flocculates, so that the precipitation operation of the low-concentration fluorine ions is realized.
In the embodiment of the disclosure, the low-concentration fluorine-containing wastewater is fully contacted with the aluminum alloy electrolysis equipment, the aluminum alloy electrolysis equipment is set to be of a net structure, and the aluminum alloy electrolysis equipment can be set to be of other structures according to actual needs in the embodiment, so that the purpose is to fully contact the aluminum alloy electrolysis equipment with the low-concentration fluorine-containing wastewater, namely, fluorine ions can be separated out more when electrolysis is performed. In the present embodiment, the specific structure of the aluminum alloy electrolysis apparatus is not particularly limited herein in order to maximize the contact area between the low-concentration fluorine-containing wastewater and the aluminum alloy electrolysis apparatus.
In the embodiments of the present disclosure, as shown in fig. 1 and 2, the low concentration fluorine-containing wastewater is always in an alkaline state due to the condition that the PH of the low concentration fluorine-containing wastewater is maintained to be greater than 7. Thus, in step S120, aluminum ions are generated by electrolysis of the aluminum alloy electrolysis apparatus after power-on, and the aluminum ions react with the low-concentration fluorine-containing wastewater to generate aluminum hydroxide. And aluminum hydroxide is a flocculate, and the flocculate electrostatically adsorbs fluoride ions in the low-concentration fluoride-containing wastewater. Namely, aluminum ions are separated out after electrodes are applied to the aluminum alloy electrolysis equipment, active aluminum ions react with low-concentration fluorine-containing wastewater to generate aluminum hydroxide, and the aluminum hydroxide is flocculate. The aluminum hydroxide has good adsorption effect on fluoride and has no influence on water quality.
In an embodiment of the present disclosure, as shown in fig. 1 and 2, in step S130, the flocculate is settled with fluoride ions in the low concentration fluorine-containing wastewater, separating the flocculate from the purified liquid. Since the flocs are insoluble in water and have a mass greater than water, they can automatically settle. And further separated from the water without adding additional operations. The method reduces the equipment cost, has simple process, directly carries out deep purification on the low-concentration fluorine-containing wastewater with low cost and high return, and fully utilizes water resources. The quality of the purified liquid is ensured.
The foregoing description of the embodiments of the present disclosure has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described. The terminology used herein was chosen in order to best explain the principles of the embodiments, the practical application, or the technical improvement of the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.

Claims (6)

1. The recovery method of the low-concentration fluorine-containing wastewater is characterized by comprising the following steps of:
s110, maintaining an alkaline environment of low-concentration fluorine-containing wastewater, and setting the PH value of the low-concentration fluorine-containing wastewater in the recovery process to be more than 7;
s120, performing electric flocculation reaction, namely enabling the low-concentration fluorine-containing wastewater to pass through aluminum alloy electrolysis equipment, electrifying the aluminum alloy electrolysis equipment, and electrolyzing the low-concentration fluorine-containing wastewater to generate flocculate and purified liquid;
and S130, performing filtering separation operation, and performing separation operation on the flocculate generated in the step S120 to completely separate the flocculate from the purified liquid and output the purified liquid.
2. The method according to claim 1, wherein in the step S120, the aluminum alloy electrolysis apparatus includes an electrode structure and an aluminum alloy contact plate, the electrode structure is electrically connected to the aluminum alloy contact plate, the aluminum alloy contact plate is made of porous aluminum alloy, and the aluminum alloy contact plate is disposed in a net structure in the recovery path of the low-concentration fluorine-containing wastewater.
3. The method for recovering a low-concentration fluorine-containing wastewater according to claim 2, wherein the low-concentration fluorine-containing wastewater is sufficiently contacted with the aluminum alloy electrolysis apparatus.
4. The method according to claim 3, wherein in step S120, the aluminum alloy electrolysis apparatus is energized to generate aluminum ions, and the aluminum ions react with the low-concentration fluorine-containing wastewater to generate aluminum hydroxide.
5. The method according to claim 4, wherein in the step S120, the aluminum hydroxide is the flocculate, and the flocculate electrostatically adsorbs fluoride ions in the low-concentration fluorine-containing wastewater.
6. The method according to claim 5, wherein in step S130, the flocculate is separated from the purified liquid by settling the flocculate with fluoride ions in the low concentration fluorine wastewater.
CN202311061630.5A 2023-08-22 2023-08-22 Recovery method of low-concentration fluorine-containing wastewater Pending CN117049730A (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1986435A (en) * 2006-12-22 2007-06-27 清华大学 Process of treating fluoride and organic matter in drinking water and its electrical flocculator
CN101781001A (en) * 2010-03-10 2010-07-21 合肥工业大学 Method for processing effluent by two-stage electrolysis and device thereof
CN102329029A (en) * 2011-09-02 2012-01-25 中国科学院生态环境研究中心 Method for removing fluorin ions in water through electrocoagulation-adsorption
CN109607868A (en) * 2018-12-29 2019-04-12 河南龙宇煤化工有限公司 A kind of advanced treatment system and its deep treatment method of low concentration fluoride waste
CN216191641U (en) * 2021-07-19 2022-04-05 杭州齐创环境工程有限公司 Fluorine-containing wastewater treatment device
CN115259301A (en) * 2022-07-14 2022-11-01 清华大学深圳国际研究生院 Electric flocculation device and method for removing fluorine ions in perfluorinated compound degradation wastewater and application of electric flocculation device
CN116040755A (en) * 2022-12-28 2023-05-02 上海洗霸科技股份有限公司 Standard treatment process for fluoride ions in sewage

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1986435A (en) * 2006-12-22 2007-06-27 清华大学 Process of treating fluoride and organic matter in drinking water and its electrical flocculator
CN101781001A (en) * 2010-03-10 2010-07-21 合肥工业大学 Method for processing effluent by two-stage electrolysis and device thereof
CN102329029A (en) * 2011-09-02 2012-01-25 中国科学院生态环境研究中心 Method for removing fluorin ions in water through electrocoagulation-adsorption
CN109607868A (en) * 2018-12-29 2019-04-12 河南龙宇煤化工有限公司 A kind of advanced treatment system and its deep treatment method of low concentration fluoride waste
CN216191641U (en) * 2021-07-19 2022-04-05 杭州齐创环境工程有限公司 Fluorine-containing wastewater treatment device
CN115259301A (en) * 2022-07-14 2022-11-01 清华大学深圳国际研究生院 Electric flocculation device and method for removing fluorine ions in perfluorinated compound degradation wastewater and application of electric flocculation device
CN116040755A (en) * 2022-12-28 2023-05-02 上海洗霸科技股份有限公司 Standard treatment process for fluoride ions in sewage

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