CN117040229A - MEMS miniature voice coil motor - Google Patents
MEMS miniature voice coil motor Download PDFInfo
- Publication number
- CN117040229A CN117040229A CN202311014607.0A CN202311014607A CN117040229A CN 117040229 A CN117040229 A CN 117040229A CN 202311014607 A CN202311014607 A CN 202311014607A CN 117040229 A CN117040229 A CN 117040229A
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- Prior art keywords
- magnetic yoke
- wall surface
- miniature
- mems
- voice coil
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- 238000004806 packaging method and process Methods 0.000 claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 9
- 230000000712 assembly Effects 0.000 claims abstract description 4
- 238000000429 assembly Methods 0.000 claims abstract description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229910000976 Electrical steel Inorganic materials 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 238000005457 optimization Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/17—Stator cores with permanent magnets
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
The utility model discloses a MEMS miniature voice coil motor, comprising: the magnetic yoke is of a Chinese character 'ri' shaped structure, and a permanent magnet is arranged on the magnetic yoke; the miniature three-dimensional MEMS coil is of a rectangular structure, a rectangular groove is formed in the middle of the miniature three-dimensional MEMS coil, and a central beam of the magnetic yoke penetrates through the rectangular groove; the packaging assembly comprises four wall surfaces which are arranged in a rectangular structure, two opposite wall surfaces are fixedly connected through a fixing assembly, a magnetic yoke is arranged in the middle of the four wall surfaces, elastic assemblies are respectively arranged between the magnetic yoke and the wall surfaces which are arranged in a left-right opposite mode, an output shaft is arranged on the magnetic yoke, and two ends of the output shaft respectively penetrate through the wall surfaces to extend out of the packaging assembly; wherein, the terminal surface of miniature three-dimensional MEMS coil covers and has conductive coating. The utility model adopts the Y-shaped magnetic yoke, thereby effectively improving the air gap magnetic field intensity; the power supply mode is simplified, and the mortise and tenon structure is designed, so that the assembly difficulty under the micro-size is reduced.
Description
Technical Field
The utility model relates to the field of Micro Electro Mechanical Systems (MEMS), in particular to an MEMS micro voice coil motor.
Background
The voice coil motor is a linear motor with simple structure, and the driving principle is that an electrified wire is acted by electromagnetic force in a magnetic field to generate motion. The voice coil motor has the advantages of small size, correspondingly high speed and simple control, is widely applied to the fields of camera lens focal length adjustment, micro platform positioning and the like, and has great application potential in micropump, micro robot and micro aircraft as a driving device.
The current miniature voice coil motor mostly adopts mechanical wound coils, for example, a Chinese patent application with the application number of 202011069860.2 discloses an ultra-small volume voice coil motor, the maximum size of which is 3mm, solves the problem of radial magnetization of a permanent magnet, and still has some defects: because the coil is formed by winding 0.04mm enameled wires and the coil and the magnetic yoke are assembled by adopting an adhesive, the repeatability of the motor can be influenced, and the heating problem of the enameled wires with 200 turns or more when current is introduced is very serious, so that the performance of the motor can be reduced.
In addition, a chinese patent application No. 202020069335.X also discloses a voice coil motor configuration, which has potential for miniaturization by making rectangular coils all work in air gaps to improve the power utilization of the coil windings, but the solution also has problems similar to the voice coil motor proposed above.
For the above reasons, the present utility model provides a MEMS micro voice coil motor.
Disclosure of Invention
The utility model aims to provide an MEMS miniature voice coil motor so as to solve the problems existing in the prior art.
In order to achieve the above object, the present utility model provides the following solutions: the utility model provides a MEMS miniature voice coil motor, comprising:
the magnetic yoke is of a Chinese character 'ri' shaped structure, and a permanent magnet is arranged on the magnetic yoke;
the miniature three-dimensional MEMS coil is of a rectangular structure, a rectangular groove is formed in the middle of the miniature three-dimensional MEMS coil, and a center beam of the magnetic yoke penetrates through the rectangular groove;
the packaging assembly comprises four wall surfaces which are arranged in a rectangular structure, two opposite wall surfaces are fixedly connected through a fixing assembly, the magnetic yoke is arranged in the middle of the four wall surfaces, and elastic assemblies are respectively arranged between the magnetic yoke and the wall surfaces which are arranged in a left-right opposite mode;
the output shaft is arranged on the magnetic yoke, and two ends of the output shaft respectively penetrate through the wall surface and extend out of the packaging assembly;
the end face of the miniature three-dimensional MEMS coil is covered with a conductive coating.
According to the MEMS miniature voice coil motor provided by the utility model, the permanent magnet comprises the magnets which are respectively magnetically attracted on the upper beam and the lower beam of the magnetic yoke, the magnetic poles of the two magnets are oppositely arranged, and the two magnets are correspondingly arranged with the miniature three-dimensional MEMS coil.
According to the MEMS miniature voice coil motor provided by the utility model, the wall surface comprises an inner layer wall surface and an outer layer wall surface, the outer layer wall surface is fixed on the outer side of the inner layer wall surface and is fixedly connected with the inner layer wall surface through the fixing component, and the elastic component is arranged between the magnetic yoke and the inner layer wall surface; the inner layer wall surface is made of ultraviolet light curing resin material, and the outer layer wall surface is made of copper.
According to the MEMS miniature voice coil motor provided by the utility model, the fixing component comprises a plurality of positioning rods, the inner layer wall surfaces which are oppositely arranged are fixedly connected through the positioning rods, and the space between the positioning rods on the adjacent inner layer wall surfaces is vertically arranged.
According to the MEMS miniature voice coil motor provided by the utility model, the elastic component comprises the springs, four groups of springs are arranged, the four groups of springs are symmetrically arranged between the inner layer wall surface and the magnetic yoke, and the effective compression distance of the springs is larger than the stroke of the magnetic yoke.
According to the MEMS miniature voice coil motor provided by the utility model, the center of the inner wall surface is provided with the through hole, and the miniature three-dimensional MEMS coil is contacted with the outer wall surface through the through hole.
According to the MEMS miniature voice coil motor provided by the utility model, the conductive coating is silver paste or copper with the thickness of 1 mu m.
According to the MEMS miniature voice coil motor provided by the utility model, the length of the inner layer wall surface is larger than the sum of the length of the magnetic yoke and the displacement distance of the magnetic yoke.
According to the MEMS miniature voice coil motor provided by the utility model, the material of the magnetic yoke is DW470 silicon steel sheet.
The utility model discloses the following technical effects:
when the MEMS miniature voice coil motor is packaged, the side surface of the miniature three-dimensional MEMS coil is covered with the conductive coating, the magnet yoke and the coil are arranged between the left wall surface and the right wall surface, the elastic component is arranged between the coil and the wall surfaces, the front wall surface and the rear wall surface are arranged, and the four wall surfaces are fixed through the fixing component, so that the motor is packaged.
The utility model adopts the Y-shaped magnetic yoke, thereby effectively improving the air gap magnetic field intensity; the power supply mode is simplified, the mortise and tenon structure is designed, the assembly difficulty under the micro-size is reduced, the length of the packaged motor is 4.7mm, the width of the packaged motor is 2.7mm, and the height of the packaged motor is 5.0mm, so that the thrust and displacement can be output outwards from two sides.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a cross-sectional view of a front view of a MEMS micro-voice coil motor of the present utility model;
FIG. 2 is an isometric view of a MEMS micro voice coil motor of the present utility model;
FIG. 3 is a schematic diagram of a package assembly according to the present utility model;
FIG. 4 is an isometric view of example 2 of the present utility model;
fig. 5 is a schematic diagram of the matching relationship between a yoke and a micro three-dimensional MEMS coil according to embodiment 2 of the present utility model.
Wherein, 1, a magnetic yoke; 2. a miniature three-dimensional MEMS coil; 3. an output shaft; 4. an inner layer wall surface; 5. an outer layer wall surface; 6. a positioning rod; 7. a spring; 8. and (3) a magnet.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.
Example 1:
referring to fig. 1-3, the present utility model provides a MEMS micro voice coil motor comprising:
the magnetic yoke 1 is of a Chinese character 'ri' shaped structure, and a permanent magnet is arranged on the magnetic yoke 1;
the miniature three-dimensional MEMS coil 2 is of a rectangular structure, a rectangular groove is formed in the middle of the miniature three-dimensional MEMS coil 2, and a central beam of the magnetic yoke 1 penetrates through the rectangular groove;
the packaging assembly comprises four wall surfaces which are arranged in a rectangular structure, the two opposite wall surfaces are fixedly connected through a fixing assembly, the magnetic yoke 1 is arranged in the middle of the four wall surfaces, and elastic assemblies are respectively arranged between the magnetic yoke 1 and the wall surfaces which are arranged in a left-right opposite mode;
the output shaft 3 is arranged on the magnetic yoke 1, and two ends of the output shaft 3 respectively penetrate through the wall surface and extend out of the packaging assembly;
wherein the end face of the micro three-dimensional MEMS coil 2 is covered with a conductive coating.
When the MEMS miniature voice coil motor is packaged, the side surface of the miniature three-dimensional MEMS coil 2 is covered with the conductive coating, the magnet yoke 1 and the coil are arranged between the left wall surface and the right wall surface, the elastic component is arranged between the coil and the wall surfaces, the front wall surface and the rear wall surface are arranged, and the four wall surfaces are fixed through the fixing component, so that the motor is packaged.
The Chinese character 'ri' shaped magnetic yoke 1 is different from the prior E-shaped magnetic yoke 1, has four closed magnetic circuits, and can realize better magnetic flux effect by adopting the structure. The magnetic induction wire generated by one pole of the permanent magnet passes through the yoke 1, generates magnetic flux perpendicular to the coil surface at the air gap, and returns to the other pole of the permanent magnet along the yoke 1 to form a closed magnetic circuit. When the motor works, the coil is electrified, and is subjected to ampere force in a magnetic field to move.
In a further optimization scheme, the permanent magnet comprises magnets 8 which are respectively magnetically attracted on the upper beam and the lower beam of the magnetic yoke 1, the magnetic poles of the two magnets 8 are oppositely arranged, and the two magnets 8 are correspondingly arranged with the miniature three-dimensional MEMS coil 2. The motor is compact in structure, an additional guide rail is not needed, the permanent magnet is embedded in the magnetic yoke 1 through magnetic force, a magnetic yoke groove is reserved in the middle of the rectangular three-dimensional MEMS coil, and the middle beam of the magnetic yoke 1 is inserted into the groove when the motor works, so that the relative movement between the coil and the magnetic yoke 1 is realized.
In a further optimization scheme, the wall surface comprises an inner layer wall surface 4 and an outer layer wall surface 5, the outer layer wall surface 5 is fixed on the outer side of the inner layer wall surface 4, the opposite inner layer wall surface 4 is fixedly connected through a fixing component, and an elastic component is arranged between the magnetic yoke 1 and the inner layer wall surface 4; the inner wall surface 4 is made of ultraviolet light curing resin material, and the outer wall surface 5 is made of copper.
The front wall surface and the rear wall surface of the inner layer are grooved at the central position, and the grooves just have the size that the side surfaces of the inductance coil extend out from the grooves and stably contact with the copper conductive wall surfaces of the outer layer, so that the fixation of the coil electricity conduction and the positions of the coil electricity conduction is realized. The inner wall surface 4 is also required to be respectively grooved on the upper side and the lower side according to the size of the motor magnetic yoke 1, for example, 3 cylindrical holes are respectively designed at the symmetrical positions of the upper side and the lower side, cylindrical pins with corresponding sizes are processed, and the upper side and the lower side of the multiple motors can be fixed between the pins during assembly. The length of the front and rear wall surfaces of the inner layer is larger than the sum of the length of the magnetic yoke 1 and the designed displacement distance so as to ensure that the magnetic yoke 1 can execute a complete stroke. Meanwhile, the miniature spring 7 with one end led out is selected to be used for positioning the magnetic yoke 1 to ensure that the miniature spring is positioned at the central position in the initial state, the effective compression distance of the spring 7 is required to be larger than the stroke of the motor, the elastic force is moderate, the static state position of the magnetic yoke 1 can be ensured, and meanwhile, the maximum elastic force is smaller than the output thrust of the motor to ensure the normal operation of the motor. Micropores are designed at corresponding positions of the left wall surface and the right wall surface, so that the leading-out end of the spring 7 passes through the micropores, and the spring 7 is stably installed. In addition, the cylinder structure is arranged at the middle positions of the left and right surfaces of the two ends of the magnetic yoke 1 and used for outputting thrust and displacement, the width of the cylinder is required to be not more than the width of the magnetic yoke 1, the length of the cylinder is longer than the designed effective stroke, the position of the cylinder can be marked in advance during processing of the magnetic yoke 1, the cylinder is convenient to install, holes are formed in the corresponding positions of the left and right wall surfaces to enable the cylinder to extend, and the length of the cylinder extending out of the outer side of the wall surface is required to be longer than the designed motor stroke. And fixing the contact positions of the upper surface and the lower surface with other wall surfaces through an adhesive to finish motor encapsulation.
Further optimizing scheme, fixed subassembly includes a plurality of locating lever 6, through locating lever 6 fixed connection between the inlayer wall 4 of relative setting, locating lever 6 space vertical setting on the adjacent inlayer wall 4.
Further optimizing scheme, the elastic component includes spring 7, and spring 7 is provided with four groups, and four groups of spring 7 two by two symmetry set up between inlayer wall 4 and yoke 1, and the effective compression distance of spring 7 is greater than the stroke of yoke 1.
To ensure that the yoke 1 is located at the center of the wall surface in the initial state, a micro spring 7 with stiffness coefficient and length matched with the thrust and stroke of the motor can be arranged between the yoke 1 and the wall surfaces on the left side and the right side. In addition, a section of cylinder needle roller is respectively arranged in the center of the outer side surface of the magnetic yoke 1 in the left-right direction, the length of the cylinder needle roller is required to be longer than the stroke of the motor, and the thrust and displacement can be output to the two sides of the motor.
In a further optimization scheme, a through hole is formed in the center of the inner wall surface 4, and the miniature three-dimensional MEMS coil 2 is contacted with the outer wall surface 5 through the through hole.
Further optimized scheme, the conductive coating is silver paste or copper with thickness of 1 μm.
Further optimizing scheme, the length of the inner layer wall surface 4 is larger than the sum of the length of the magnetic yoke 1 and the displacement distance of the magnetic yoke.
In a further optimization scheme, DW470 silicon steel sheets are selected as materials of the magnetic yoke 1. The yoke 1 is made of DW470 silicon steel sheet, the permanent magnet material is N48 NdFeB, and when the effective stroke of the miniature voice coil motor is 500 mu m, the length of the Y-shaped yoke 1 is 2.6mm, the width is 1mm, the height is 2.75mm, the upper beam and the lower beam are 450 mu m, the thickness of the middle beam and the side beam is 400 mu m, and the length of the permanent magnet is 1.7mm. The coil is formed by bonding double layers of 500 mu m silicon wafers, and the outer dimension is as follows: 1.2mm long, 2.2mm wide and 1mm thick. The dimensions of the inner magnetic yoke groove are as follows: 1mm wide and 550 μm high. Thus, the bare motor is obtained by processing.
Example 2:
referring to fig. 4-5, the embodiment provides a packaging mode of a MEMS micro voice coil motor with a moving coil, which includes the following steps:
firstly, manufacturing a packaging assembly, covering conductive materials on the side surface of a miniature three-dimensional MEMS coil 2, and powering on an inner wall surface 4 to supply power to the coil;
step two, slotting in the center of the front and rear surfaces of the inner wall surface 4, wherein the slotting is arranged in the horizontal direction, and the slotting width ensures that the miniature three-dimensional MEMS coil 2 stretches out and slides in;
step three, slotting the inner side of the outer layer wall surface 5, fixing the outer layer wall surface 5 on the inner layer wall surface 4, enabling the interval between the side surface of the miniature three-dimensional MEMS coil 2 and the outer layer wall surface 5 to be more than or equal to 1 mu m, filling graphite powder in the gap to realize conductive lubrication,
and fourthly, symmetrically arranging horizontal mounting holes on the miniature three-dimensional MEMS coil 2, mounting an output shaft 3 in the mounting holes, and mounting front and rear wall surfaces on the packaging assembly to complete motor packaging.
In the description of the present utility model, it should be understood that the terms "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present utility model, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.
The above embodiments are only illustrative of the preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model, and various modifications and improvements made by those skilled in the art to the technical solutions of the present utility model should fall within the protection scope defined by the claims of the present utility model without departing from the design spirit of the present utility model.
Claims (9)
1. A MEMS micro voice coil motor, comprising:
the magnetic yoke (1), wherein the magnetic yoke (1) is of a Chinese character 'ri' shaped structure, and a permanent magnet is arranged on the magnetic yoke (1);
the miniature three-dimensional MEMS coil (2), the miniature three-dimensional MEMS coil (2) is of a rectangular structure, a rectangular groove is formed in the middle of the miniature three-dimensional MEMS coil (2), and a center beam of the magnetic yoke (1) penetrates through the rectangular groove;
the packaging assembly comprises four wall surfaces which are arranged in a rectangular structure, two opposite wall surfaces are fixedly connected through a fixing assembly, the magnetic yoke (1) is arranged in the middle of the four wall surfaces, and elastic assemblies are respectively arranged between the magnetic yoke (1) and the wall surfaces which are arranged in a left-right opposite mode;
the output shaft (3) is arranged on the magnetic yoke (1), and two ends of the output shaft (3) respectively penetrate through the wall surface and extend out of the packaging assembly;
the end face of the miniature three-dimensional MEMS coil (2) is covered with a conductive coating.
2. The MEMS micro-voice coil motor of claim 1, wherein: the permanent magnet comprises magnets (8) which are respectively magnetically attracted on the upper beam and the lower beam of the magnet yoke (1), the magnetic poles of the two magnets (8) are oppositely arranged, and the two magnets (8) are correspondingly arranged with the miniature three-dimensional MEMS coil (2).
3. The MEMS micro-voice coil motor of claim 1, wherein: the wall surface comprises an inner wall surface (4) and an outer wall surface (5), the outer wall surface (5) is fixed on the outer side of the inner wall surface (4), the inner wall surface (4) is fixedly connected through the fixing component, and the elastic component is arranged between the magnetic yoke (1) and the inner wall surface (4); the inner layer wall surface (4) is made of ultraviolet light curing resin material, and the outer layer wall surface (5) is made of copper.
4. A MEMS micro-voice coil motor as claimed in claim 3, wherein: the fixing assembly comprises a plurality of positioning rods (6), wherein the inner layer wall surfaces (4) which are oppositely arranged are fixedly connected through the positioning rods (6), and the positioning rods (6) on the adjacent inner layer wall surfaces (4) are vertically arranged in space.
5. A MEMS micro-voice coil motor as claimed in claim 3, wherein: the elastic component includes spring (7), spring (7) are provided with four groups, four groups spring (7) pairwise symmetry set up inner wall (4) with between yoke (1), the effective compression distance of spring (7) is greater than the stroke of yoke (1).
6. A MEMS micro-voice coil motor as claimed in claim 3, wherein: a through hole is formed in the center of the inner layer wall surface (4), and the miniature three-dimensional MEMS coil (2) is in contact with the outer layer wall surface (5) through the through hole.
7. The MEMS micro-voice coil motor of claim 1, wherein: the conductive coating is silver paste or copper with the thickness of 1 mu m.
8. A MEMS micro-voice coil motor as claimed in claim 3, wherein: the length of the inner layer wall surface (4) is larger than the sum of the length of the magnetic yoke (1) and the displacement distance of the magnetic yoke (1).
9. The MEMS micro-voice coil motor of claim 1, wherein: the material of the magnetic yoke (1) is DW470 silicon steel sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311014607.0A CN117040229A (en) | 2023-08-11 | 2023-08-11 | MEMS miniature voice coil motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311014607.0A CN117040229A (en) | 2023-08-11 | 2023-08-11 | MEMS miniature voice coil motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117040229A true CN117040229A (en) | 2023-11-10 |
Family
ID=88601858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311014607.0A Pending CN117040229A (en) | 2023-08-11 | 2023-08-11 | MEMS miniature voice coil motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117040229A (en) |
-
2023
- 2023-08-11 CN CN202311014607.0A patent/CN117040229A/en active Pending
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