CN117031625A - On-chip wide-view-field grating coupler - Google Patents

On-chip wide-view-field grating coupler Download PDF

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Publication number
CN117031625A
CN117031625A CN202310578362.8A CN202310578362A CN117031625A CN 117031625 A CN117031625 A CN 117031625A CN 202310578362 A CN202310578362 A CN 202310578362A CN 117031625 A CN117031625 A CN 117031625A
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sub
wavelength
grating
grating coupler
period
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徐科
王希
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Shenzhen Graduate School Harbin Institute of Technology
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Shenzhen Graduate School Harbin Institute of Technology
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention provides an on-chip wide-view-field grating coupler which comprises a grating coupler module and an output waveguide, wherein the grating coupler module comprises a sub-wavelength hole structure, the sub-wavelength hole structure comprises a plurality of sub-wavelength holes, the sub-wavelength holes are arranged in an array mode, the period and the duty ratio of the sub-wavelength hole structure meet a grating diffraction equation shown in (1), and the output waveguide is positioned at the output end of the grating coupler module. The grating coupler adopting the technical scheme of the invention is designed based on the principle of diffraction equation and analytic form thereof, and the field angle of the coupler is improved by optimizing the period and duty ratio of the sub-wavelength array holes; the device has the advantages of compact structure, large field angle, large-scale array integration and the like.

Description

On-chip wide-view-field grating coupler
Technical Field
The invention belongs to the technical field of integrated photons, and particularly relates to an on-chip wide-field-of-view grating coupler.
Background
Compared with the traditional optical system, the integrated photon system has the advantages of small size, low loss, stable performance and the like, and therefore, the integrated photon system has wide application in optical communication, optical detection and imaging systems. Currently, silicon-based integrated photonic systems have been commercially available in optical communications. In silicon-based photonic integrated communication chips, coupling the light transmitted in an optical fiber into a chip waveguide is a key technology. Grating couplers and end-face coupling are commonly used to achieve coupling of light from the fiber to the chip. The grating coupler couples light propagating perpendicular to the chip into a direction along the chip by using diffraction principle of the grating, thereby realizing conversion of light from the optical fiber to the chip. For end face coupling, the focusing function of the lens optical fiber is utilized to regulate and control the mode field of the transmitted light in the optical fiber so as to realize the matching with the optical mode field of the chip waveguide and realize high-efficiency coupling efficiency. However, limited by diffraction mechanisms and mode field matching, the angle of light field is small for both coupling modes. The angle of view is an extremely important performance index in optical detection and imaging, and the traditional coupling mode limits the application of integrated photon technology in wide-field optical detection and imaging, and particularly in near infrared bands, detection and imaging have extremely important application.
Disclosure of Invention
Aiming at the technical problems, the invention discloses an on-chip wide-field-of-view grating coupler, which solves the problems that the existing coupler cannot directly couple a free-space light beam to a planar waveguide device, the field angle of the device is too small, and the like.
In this regard, the invention adopts the following technical scheme:
an on-chip wide-field grating coupler comprising a grating coupler module and an output waveguide, the grating coupler module comprising a sub-wavelength aperture structure comprising a plurality of sub-wavelength apertures arranged in an array, the period and duty cycle of the sub-wavelength aperture structure satisfying a grating diffraction equation as shown in (1),
k 0 ·n eff ＝k 0 ·n c ·sinθ+q·2π/Λ (1)，
wherein k is 0 N is the wave loss of light in vacuum eff For the effective refractive index of the grating, n c The refractive index of the grating cover layer is q, the diffraction order is q, the lambda is the grating period, and the theta is the grating diffraction angle;
the output waveguide is positioned at the output end of the grating coupler module.
According to the technical scheme, the spatial light beam in the vertical direction is changed and transmitted into the on-chip horizontal transmission through the sub-wavelength hole structure, and the light beam is coupled to the on-chip waveguide, so that the coupling of the spatial incident light with a wide field of view to the on-chip waveguide can be realized. The on-chip wide-field-of-view coupler with the sub-wavelength hole structure is designed based on the principle of diffraction equation and analytic form thereof, and has the advantages of compact device structure, large field angle, large-scale array integration and the like.
As a further improvement of the present invention, the period and duty ratio of the sub-wavelength aperture structure also satisfy the wide field formula as shown in (2),
wherein C is 1 For a mismatch coefficient of 1dB of coupling efficiency, delta theta is the grating field angle, lambda 0 For the central wavelength, theta 0 Is the diffraction angle of the grating, n eff And (lambda) is the effective refractive index of the grating at wavelength lambda. When lambda is 0 When=1.55 μm, c1=4.
According to the above formula, it can be seen that the larger the effective refractive index of the grating, the larger the angle of view, the larger the dispersion, and the larger the angle of view. By adopting the technical scheme, the large-view-field grating coupler can be obtained by increasing the effective refractive index of the grating.
As a further improvement of the invention, the sub-wavelength holes are distributed in two dimensions along the transverse direction and the longitudinal direction, the period and the duty ratio of the sub-wavelength hole structure in the transverse direction meet the grating diffraction equation shown in (1), and in the longitudinal direction, the period and the duty ratio of the sub-wavelength hole structure conform to the second-order equivalent medium theory, and the longitudinal period is less than lambda/3.
By adopting the technical scheme, the coupler of the two-dimensional sub-wavelength hole structure is used for converting the transmission direction of the light beam from the vertical direction to the on-chip horizontal transmission, and the two-dimensional sub-wavelength hole structure is used for adjusting the transverse diffraction effect in the longitudinal direction.
As a further improvement of the invention, the sub-wavelength holes are distributed in an annular array along the radial direction and the circumferential direction, the period and the duty ratio of the sub-wavelength hole structure radially meet the grating diffraction equation shown in the (1), and in the circumferential direction, the period and the duty ratio of the sub-wavelength hole structure accord with the second-order equivalent medium theory, and the longitudinal period is smaller than lambda/3. By adopting the technical scheme, the coupler can couple 360-degree space light in the angle direction to the on-chip waveguide.
As a further development of the invention, the longitudinal period is less than 500nm.
As a further improvement of the present invention, the sub-wavelength holes are circular, rectangular or prismatic.
As a further improvement of the present invention, the caliber of the sub-wavelength hole is not less than 180nm.
As a further improvement of the invention, the grating coupler module and the output waveguide are made of silicon-on-insulator (SOI), III-V materials or polymers.
Compared with the prior art, the invention has the beneficial effects that:
the grating coupler adopting the technical scheme of the invention is designed based on the principle of diffraction equation and analytic form thereof, and the field angle of the coupler is improved by optimizing the period and duty ratio of the sub-wavelength array holes; the device has the advantages of compact structure, large field angle, large-scale array integration and the like; and the effective refractive index and dispersion of the grating are increased, so that the angle of view can be effectively improved.
Drawings
Fig. 1 is a schematic top view of the structure of an on-chip wide field grating coupler according to embodiment 1 of the present invention.
Fig. 2 is a schematic structural cross-section of an on-chip wide field-of-view grating coupler according to embodiment 1 of the present invention.
Fig. 3 is a simulated view angle diagram of a conventional grating coupler unit of comparative example 1 of the present invention.
FIG. 4 is a simulated diffraction light field profile of an on-chip wide field-of-view grating coupler of example 1 of the present invention.
Fig. 5 is a simulated view angle diagram of an on-chip wide field grating coupler of embodiment 1 of the present invention.
Fig. 6 is a schematic top view of the annular wide field coupler of embodiment 2 of the present invention.
FIG. 7 is a simulated view angle of the annular wide field coupler of example 2 of the present invention; wherein, the area A is the field angle of the on-chip wide-field grating coupler of the embodiment of the invention, and the area B is the field angle of the common grating coupler.
Detailed Description
Preferred embodiments of the present invention are described in further detail below.
An on-chip wide-field grating coupler specifically comprises a grating coupler module and an output waveguide, wherein the output waveguide is positioned at the output end of the grating coupler module.
The grating coupler module comprises a sub-wavelength hole structure, the sub-wavelength hole structure comprises a plurality of sub-wavelength holes, the sub-wavelength holes are arranged in an array, the period and the duty ratio of the sub-wavelength hole structure meet the grating diffraction equation shown in (1),
k 0 ·neff＝k 0 ·n c ·sinθ+q·2π/Λ (1)，
wherein k is 0 N is the wave loss of light in vacuum eff For the effective refractive index of the grating, n c The refractive index of the grating cover layer is q, the diffraction order is q, the lambda is the grating period, and the theta is the grating diffraction angle; the method comprises the steps of carrying out a first treatment on the surface of the Wherein at a particular wavelength, the period and duty cycle that satisfies the diffraction equation are designed such that diffraction efficiency is maximized.
The period and duty cycle of the sub-wavelength aperture structure also satisfies the wide field formula as shown in (2),
wherein C is 1 For a mismatch coefficient of 1dB of coupling efficiency, delta theta is the grating field angle, lambda 0 For the central wavelength, theta 0 Is the diffraction angle of the grating, n eff And (lambda) is the effective refractive index of the grating at wavelength lambda. When lambda is 0 When=1.55 μm, c1=4. According to the formula, the effective refractive index and dispersion of the grating are increased, and the angle of view can be effectively improved.
The sub-wavelength hole structure may be a two-dimensional sub-wavelength hole structure or a ring-shaped sub-wavelength hole structure. The output end is a TE supporting basic mode waveguide, and the connection output end is a conical waveguide. The shape of the sub-wavelength holes can be round, rectangular, prismatic and the like. The sub-wavelength hole structure can realize the coupling of space light of different wave bands to on-chip waveguide light according to different periods and duty ratio distribution. And apodization is carried out on the whole structural area of the sub-wavelength hole, a diffraction light field is modified, large-angle mode field matching is realized, and a larger field angle is obtained. The materials of the grating coupler module and the output waveguide are silicon-on-insulator (SOI), group III-V materials, or polymers.
Further, the sub-wavelength hole structure is a two-dimensional sub-wavelength hole structure, that is, the sub-wavelength holes are distributed in two dimensions along the transverse direction and the longitudinal direction, that is, the grating coupler module is a two-dimensional grating coupler module. In the transverse direction, the period and the duty ratio of the sub-wavelength hole structure meet the grating diffraction equation shown in (1), and in the longitudinal direction, the period and the duty ratio of the sub-wavelength hole structure accord with the second-order equivalent medium theory, and the longitudinal period is smaller than lambda/3. The sub-wavelength hole structure changes the transmission direction of a space light beam with a certain wavelength based on a first-order diffraction principle: the vertical direction is converted into on-chip horizontal transmission, and the sub-wavelength hole structure is used for adjusting the transverse diffraction effect in the longitudinal direction. Moreover, the period and duty ratio of the sub-wavelength aperture structure also satisfy the wide field formula as shown in (2).
In the longitudinal direction, the longitudinal period and the duty cycle are designed by utilizing the second-order equivalent medium theory, wherein the longitudinal period is smaller than lambda < lambda/3, namely smaller than 500nm.
Further, the plurality of sub-wavelength holes are distributed in an annular array along the radial direction and the circumferential direction, namely, the grating coupler is an annular coupler. The period and the duty ratio of the sub-wavelength hole structure radially meet the grating diffraction equation shown in the (1), and in the circumferential direction, the period and the duty ratio of the sub-wavelength hole structure accord with a second-order equivalent medium theory, and the longitudinal period is smaller than lambda/3. In brief, the radial sub-wavelength hole cycle duty ratio of the annular grating coupler module corresponds to the transverse distribution of the two-dimensional grating coupler module, and the angular sub-wavelength hole cycle duty ratio corresponds to the longitudinal distribution of the two-dimensional grating coupler module. Moreover, the period and duty ratio of the sub-wavelength aperture structure also satisfy the wide field formula as shown in (2). The annular coupler is an on-chip annular wide-field-of-view coupler and can couple space light with an angle of 360 degrees to an on-chip waveguide.
Aiming at the problem of insufficient field angle of the coupler in the prior art, the technical scheme of the invention adopts a two-dimensional apodization sub-wavelength structure. The sub-wavelength aperture structure enables wide field coupling of free-space beams to an integrated photonic integrated system on chip. The sub-wavelength holes are distributed in two dimensions, the specific distribution is designed through a grating diffraction equation, and the diffraction equation is further analyzed to obtain theoretical design basis for improving the angle of view. And finally, apodizing the two-dimensional sub-wavelength holes, optimizing the distribution of diffraction squares, and further improving the angle of view. So far, the wide-field coupling of the space beam to the on-chip waveguide light is not realized on the photon integrated chip, and therefore, the invention is hopeful to realize the wide-field light detection and imaging system based on photon integration.
The following description is made with reference to specific examples.
Example 1
As shown in fig. 1, an on-chip wide field-of-view grating coupler, comprising: grating coupler modules, tapered waveguides, and output optical waveguides supporting TE fundamental modes. The grating coupler module is formed from a two-dimensional array of sub-wavelength holes in a top layer of Silicon On Insulator (SOI) platform. In the lateral direction, the period and the duty ratio of the grating satisfy the diffraction equation shown in (1), thereby achieving the optimal coupling efficiency. Wherein the longitudinal pore period is limited by the theory of second-order equivalent medium and should be less than 500nm, and the pore size is also limited by the preparation process. The period and duty cycle of the two-dimensional array of sub-wavelength holes satisfy the wide field of view formula shown in (2).
As shown in FIG. 2, in the implementation of the above embodiment, the chip platform adopts a silicon-on-insulator (SOI) platform which has a three-layer structure, namely top silicon with a thickness of 220nm and SiO with a thickness of 2 μm from top to bottom 2 Buried oxide layer and Si backing substrate. Wherein the optical waveguide is located in the top silicon layer.
In order to verify the effectiveness of this structure, the conventional grating coupler and the grating coupler described in this embodiment are each simulated as follows.
Comparative example 1: the parameters for setting the traditional grating coupler are respectively as follows: the period is 0.63 μm, the duty cycle is 0.5, the etching depth is 0.7 μm, the simulation result is shown in fig. 3, and the 1dB field angle of the grating coupler is 6 degrees.
Example 1: the parameters of the designed grating are set as follows: the period of the x direction is 0.68 mu m, the duty ratio is 0.52, the period of the y direction is 0.42 mu m, the duty ratio is 0.32, the etching depth is 0.85 mu m, the apodization design is carried out on the grating of the x direction, the period is 0.55-0.7 mu m, and the duty ratio is nonlinearly changed from 0.6-0.48.
Fig. 4 is a diffraction light field diagram of a wide-field grating coupler with TE mode in this embodiment, and it can be seen that the waveform of the diffracted light field is arc-shaped, because the grating is apodized in the design process, and grating periods with different diffraction angles are combined, so that the sensitivity to the incident angle is reduced, and a larger field angle is obtained. It can also be seen that there is a significant portion of light leaking into the substrate, depending on the parameters of the material platform employed. The enhancement can be achieved by the directionality of the grating, the immediate etch depth, or by changing the buried layer thickness of the material mesa.
Fig. 5 shows simulation results of the present embodiment, and it can be seen that the 1dB field angle that can be achieved by the present embodiment is 15 °, whereas the conventional grating of comparative example 1, as shown in fig. 3, has a 1dB field angle of only 6 °. Simulation results show that the field angle is influenced by the effective refractive index of the grating and the diffraction light field waveform, and the larger the effective refractive index is, the larger the field angle is, but the effective refractive index is limited by the diffraction equation of the grating.
Example 2
Based on embodiment 1, the embodiment is a ring grating coupler, the plurality of sub-wavelength holes are distributed in a ring array along the radial direction and the circumferential direction, the period and the duty ratio of the sub-wavelength hole structure radially meet a grating diffraction equation shown in (1), and in the circumferential direction, the period and the duty ratio of the sub-wavelength hole structure accord with a second-order equivalent medium theory, and the longitudinal period is smaller than lambda/3. The period and duty cycle of the sub-wavelength aperture structure also satisfies the wide field of view formula as shown in (2). The ring grating coupler includes: a grating and an output optical waveguide supporting the TE fundamental mode. The grating region is formed in the top silicon layer of a silicon-on-insulator (SOI) platform by a two-dimensional array of sub-wavelength holes, and is an input port, and the output port is a waveguide outside the annular grating.
The grating coupler of example 1 achieves a wide field of view in the yz plane. The embodiment further expands the angle of view on the xz plane, as shown in fig. 6, and implements a wide-field coupler with an angle of 360 ° on the basis of embodiment 1, and performs a grating array on the basis of a wide-field grating unit. The simulation result of the annular grating coupler in this embodiment is shown in fig. 7, where the area a is the field angle of the annular grating coupler, and the area B is the field angle of the conventional grating coupler, and it is obvious by comparison that the field angle of the grating coupler in this embodiment 2 is improved obviously.
Therefore, compared with the prior art, the technical scheme of the invention realizes the grating coupler with large field angle, and the device has simple structure and easy manufacture. Meanwhile, the device is small in size and beneficial to dense photon integration.
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the invention, and these should be considered to be within the scope of the invention.

Claims (8)

1. An on-chip wide field-of-view grating coupler, characterized by: which comprises a grating coupler module and an output waveguide, wherein the grating coupler module comprises a sub-wavelength hole structure, the sub-wavelength hole structure comprises a plurality of sub-wavelength holes, the sub-wavelength holes are arranged in an array, the period and the duty ratio of the sub-wavelength hole structure meet a grating diffraction equation shown in (1),
k 0 ·n eff ＝k 0 ·n c ·sinθ+q·2π/Λ (1)，
wherein k is 0 N is the wave loss of light in vacuum eff For the effective refractive index of the grating, n c The refractive index of the grating cover layer is q, the diffraction order is q, the lambda is the grating period, and the theta is the grating diffraction angle;
the output waveguide is positioned at the output end of the grating coupler module.
2. The on-chip wide field-of-view grating coupler of claim 1, wherein: the period and duty cycle of the sub-wavelength aperture structure satisfy the wide field formula as shown in (2),
wherein C is 1 For a mismatch coefficient of 1dB of coupling efficiency, delta theta is the grating field angle, lambda 0 For the central wavelength, theta 0 Is the diffraction angle of the grating, n eff And (lambda) is the effective refractive index of the grating at wavelength lambda.
3. The on-chip wide field-of-view grating coupler of claim 2, wherein: the sub-wavelength holes are distributed in two dimensions along the transverse direction and the longitudinal direction, the period and the duty ratio of the sub-wavelength hole structure in the transverse direction meet the grating diffraction equation shown in the step (1), and in the longitudinal direction, the period and the duty ratio of the sub-wavelength hole structure conform to the second-order equivalent medium theory, and the longitudinal period is smaller than lambda/3;
the sub-wavelength hole structure is used for converting the transmission direction of the light beam from the vertical direction to on-chip horizontal transmission, and in the longitudinal direction, the sub-wavelength hole structure is used for adjusting the transverse diffraction effect.
4. The on-chip wide field-of-view grating coupler of claim 2, wherein: the sub-wavelength holes are distributed in an annular array along the radial direction and the circumferential direction, the period and the duty ratio of the sub-wavelength hole structure meet the grating diffraction equation shown in the step (1) in the radial direction, and in the circumferential direction, the period and the duty ratio of the sub-wavelength hole structure meet the second-order equivalent medium theory, and the longitudinal period is smaller than lambda/3.
5. The on-chip wide field-of-view grating coupler of claim 3 or 4, wherein: the longitudinal period is less than 500nm.
6. The on-chip wide field-of-view grating coupler of claim 5, wherein: the sub-wavelength holes are round, rectangular or prismatic.
7. The on-chip wide field-of-view grating coupler of claim 6, wherein: the caliber of the sub-wavelength hole is not less than 180nm.
8. The on-chip wide field-of-view grating coupler of claim 7, wherein: the grating coupler module and the output waveguide are made of Silicon On Insulator (SOI), III-V materials or polymers.
CN202310578362.8A 2023-05-22 2023-05-22 On-chip wide-view-field grating coupler Pending CN117031625A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117250690A (en) * 2023-11-17 2023-12-19 之江实验室 Optical field focusing method and device for on-chip waveguide integration

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117250690A (en) * 2023-11-17 2023-12-19 之江实验室 Optical field focusing method and device for on-chip waveguide integration
CN117250690B (en) * 2023-11-17 2024-03-19 之江实验室 Optical field focusing method and device for on-chip waveguide integration

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