CN117020956A - Single crystal silicon crystal bar rolling mill capable of self-trimming and trimming method - Google Patents

Single crystal silicon crystal bar rolling mill capable of self-trimming and trimming method Download PDF

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Publication number
CN117020956A
CN117020956A CN202311065440.0A CN202311065440A CN117020956A CN 117020956 A CN117020956 A CN 117020956A CN 202311065440 A CN202311065440 A CN 202311065440A CN 117020956 A CN117020956 A CN 117020956A
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CN
China
Prior art keywords
trimming
crystal bar
self
repairing
grinding wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311065440.0A
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Chinese (zh)
Inventor
陈元寿
马玉怀
赵娜
徐慶晧
王黎光
曹启刚
芮阳
王忠保
张昆
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Ningxia Zhongxin Wafer Semiconductor Technology Co ltd
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Ningxia Zhongxin Wafer Semiconductor Technology Co ltd
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Filing date
Publication date
Application filed by Ningxia Zhongxin Wafer Semiconductor Technology Co ltd filed Critical Ningxia Zhongxin Wafer Semiconductor Technology Co ltd
Priority to CN202311065440.0A priority Critical patent/CN117020956A/en
Publication of CN117020956A publication Critical patent/CN117020956A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12Dressing tools; Holders therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/35Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/50Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground, e.g. strings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention provides a monocrystalline silicon crystal bar barreling machine capable of self-repairing a knife and a knife repairing method, which relate to the technical field of crystal bar barreling machines, when the surface of a grinding wheel or a grinding head is rough or uneven, a crystal bar is taken out, a knife repairing piece is clamped at the original crystal bar position through a crystal bar chuck, the monocrystalline silicon crystal bar barreling machine capable of self-repairing the knife is started, the grinding wheel or the grinding head rotates to be in contact with the knife repairing piece, and the knife repairing is carried out, on one hand, the monocrystalline silicon crystal bar barreling machine capable of self-repairing the knife can carry out barreling processing on the crystal bar through the grinding wheel and the grinding head, and can also carry out automatic repairing on the surface defect of the grinding wheel or the grinding head through the knife repairing piece without frequent replacement of the grinding wheel or the grinding head, so that the cost is reduced; on the other hand, the wear-resistant spheroidal graphite cast iron is selected as the material of the cutter repairing piece, so that the cutter repairing piece is high in hardness and wear resistance; in still another aspect, the trimming blade has strong applicability and can be installed on different crystal bar barreling machines for sharpening.

Description

Single crystal silicon crystal bar rolling mill capable of self-trimming and trimming method
Technical Field
The invention belongs to the technical field of crystal bar barreling machines, and particularly relates to a monocrystalline silicon crystal bar barreling machine capable of self-trimming a cutter and a cutter trimming method.
Background
At present, a resin grinding wheel or an alloy steel grinding head is used for a monocrystalline silicon barreling machine produced at home or abroad, and the resin grinding wheel or the alloy steel grinding head is commonly called a knife. No matter which grinding wheel or grinding head is used, after a period of use, the surface of the grinding wheel or grinding head is rough or uneven, and uneven or uneven lines on the surface of a processed product can be caused when the product is processed, so that shallow pits or hidden cracks are generated after the product is processed, and the edge of the product is damaged and scrapped if serious; in the prior art, the grinding head or the grinding wheel is generally directly replaced aiming at rough or uneven surfaces, so that waste is caused.
Disclosure of Invention
In view of the above, the present invention provides a self-trimming monocrystalline silicon ingot rolling mill with reduced cost.
It is also necessary to provide a self-sharpening method for the monocrystalline silicon crystal bar roller mill.
There is also a need to provide a method for reducing oxides in single crystal furnaces.
The technical scheme adopted for solving the technical problems is as follows:
the utility model provides a monocrystalline silicon crystal bar barreling machine of sword is repaiied by oneself, includes repair cutter piece, crystal bar chuck, emery wheel, bistrique, repair cutter piece and be the cylinder, repair cutter piece is wear-resisting nodular cast iron material, repair cutter piece and be located in the middle of the crystal bar chuck, repair cutter piece by crystal bar chuck centre gripping to carry out self-repair sword to emery wheel or bistrique.
Preferably, grooves are formed in two ends of the trimming part, and the crystal bar clamping heads are clamped in the grooves in two ends of the trimming part.
Preferably, the antiwear spheroidal graphite cast iron is KmQT or KmQTMn6.
Preferably, the trimming member is manufactured by the steps of:
s1: rough machining is carried out on blank materials made of wear-resistant spheroidal graphite cast iron materials to obtain a cylindrical blank body, wherein the diameter and the height of the cylindrical blank body are larger than the preset size of the cutter repairing piece;
s2: heating the cylindrical blank to a first preset temperature, slowly cooling to room temperature, tempering and heating to a second preset temperature after cooling to the room temperature to obtain a pearlite matrix;
s3: and (3) carrying out finish machining on the pearlite matrix, repairing and flattening the outer surface of the pearlite, and grooving the round end surface of the pearlite matrix to obtain the trimming part.
Preferably, in the step S1, the diameter and the height of the cylindrical blank are both greater than the predetermined size of the trimming member by 2mm-5mm.
Preferably, in the step S2, the first predetermined temperature is 880 ℃ to 930 ℃.
Preferably, in the step S3, the second predetermined temperature is 500 ℃ to 600 ℃.
According to the method for trimming the monocrystalline silicon crystal bar barreling machine with the self-trimming cutter, the trimming cutter piece is clamped by the crystal bar clamping head, the monocrystalline silicon crystal bar barreling machine with the self-trimming cutter is started, and the grinding wheel or the grinding head carries out rotary self-sharpening.
Preferably, the rotation speed of the grinding wheel or the grinding head is 8% -12% lower than that of the grinding wheel or the grinding head when the crystal bar is processed by barreling.
Compared with the prior art, the invention has the beneficial effects that:
according to the monocrystalline silicon crystal bar barreling machine capable of automatically trimming the knife, when the surface of the grinding wheel or the grinding head is rough or uneven, the crystal bar is taken out, the trimming knife piece is clamped at the original crystal bar position through the crystal bar clamping head, the monocrystalline silicon crystal bar barreling machine capable of automatically trimming the knife is started, the grinding wheel or the grinding head rotates to be in contact with the trimming knife piece, and trimming is carried out, on one hand, the monocrystalline silicon crystal bar barreling machine capable of automatically trimming the knife can carry out barreling processing on the crystal bar through the grinding wheel and the grinding head, and also can automatically repair the surface defect of the grinding wheel or the grinding head through the trimming knife piece, frequent replacement of the grinding wheel or the grinding head is not needed, and cost is reduced; on the other hand, the wear-resistant spheroidal graphite cast iron is selected as the material of the cutter repairing piece, so that the cutter repairing piece is high in hardness and wear resistance; in still another aspect, the trimming blade has strong applicability and can be installed on different crystal bar barreling machines for sharpening.
Drawings
Fig. 1 is a top view of a self-trimming monocrystalline silicon ingot tumbling mill 10.
Fig. 2 is a schematic structural view of the trimming member.
Fig. 3 is a cross-sectional view of the trimming member.
In the figure: a single crystal silicon crystal bar rolling mill 10 with self-sharpening, a sharpening piece 100, a groove 110, a crystal bar clamping head 200, a grinding wheel 300 and a grinding head 400.
Detailed Description
The technical scheme and technical effects of the embodiments of the present invention are further described in detail below with reference to the accompanying drawings.
Referring to fig. 1 to 3, a single crystal silicon ingot rolling mill 10 capable of self-sharpening comprises a sharpening piece 100, an ingot chuck 200, a grinding wheel 300 and a grinding head 400, wherein the sharpening piece 100 is a cylinder, the sharpening piece 100 is made of wear-resistant ductile iron, the sharpening piece 100 is positioned in the middle of the ingot chuck 200, and the sharpening piece 100 is clamped by the ingot chuck 200 so as to self-sharpen the grinding wheel 300 or the grinding head 400.
Specifically, after the ingot is taken out by the ingot chuck 200, the tool holder 100 is held, and the grinding wheel 300 and the grinding head 400 move back and forth in the X-axis direction on the same axis, move forward in the Y-axis direction in the same horizontal direction, and contact and friction with the tool holder 100 are performed.
Compared with the prior art, the invention has the beneficial effects that:
according to the monocrystalline silicon crystal bar barreling machine 10 with the self-repairing knife, when the surface of the grinding wheel 300 or the grinding head 400 is rough or uneven, the crystal bar is taken out, the knife repairing piece 100 is clamped at the original crystal bar position through the crystal bar clamping head 200, the monocrystalline silicon crystal bar barreling machine 10 with the self-repairing knife is started, the grinding wheel 300 or the grinding head 400 rotates to be in contact with the knife repairing piece 100, and the knife repairing is carried out, on one hand, the monocrystalline silicon crystal bar barreling machine 10 with the self-repairing knife can carry out barreling processing on the crystal bar through the grinding wheel 300 and the grinding head 400, and also can carry out automatic repairing on the surface defect of the grinding wheel 300 or the grinding head 400 through the knife repairing piece 100 without frequently replacing the grinding wheel 300 or the grinding head 400, so that the cost is reduced; on the other hand, the wear-resistant spheroidal graphite cast iron is selected as the material of the cutter repairing piece 100, so that the cutter repairing piece 100 has high hardness and high wear resistance; in yet another aspect, the trimming blade 100 is adaptable and can be mounted on different ingot tumbling mills 10 for sharpening.
Further, the two ends of the trimming member 100 are provided with grooves 110, and the ingot clamping head 200 is clamped in the grooves 110 at the two ends of the trimming member 100, so as to facilitate clamping.
Furthermore, the wear-resistant spheroidal graphite cast iron is KmQT or KmQTMn6, and has high hardness and high wear resistance.
Further, the trimming member 100 is manufactured by the steps of:
s1: rough machining is carried out on blank materials made of wear-resistant spheroidal graphite cast iron materials to obtain a cylindrical blank body, wherein the diameter and the height of the cylindrical blank body are larger than the preset size of the cutter repairing piece 100, and the preset size of the cutter repairing piece 100 is larger than the size of the crystal bar by 1mm-5mm;
s2: heating the cylindrical blank to a first preset temperature, slowly cooling to room temperature, reducing stress, tempering and heating to a second preset temperature after cooling to room temperature, and obtaining a pearlite matrix; the internal structure of the cylindrical blank body formed by the wear-resistant spheroidal graphite cast iron material is that austenite exists, the crystal directions of the wear-resistant spheroidal graphite cast iron are combined by heating at a first preset temperature, then the cylindrical blank body is cooled, the stress in the cylindrical blank body is eliminated, and then the crystal directions of the wear-resistant spheroidal graphite cast iron are recombined to form pearlite by heating at a second preset temperature, so that the density of the obtained pearlite matrix is denser, the hardness is higher, and the wear resistance is better.
If the first heating is carried out, the stress cannot be reduced, the crystal orientation of the wear-resistant spheroidal graphite cast iron cannot be recombined, and the density and the wear resistance cannot be changed.
S3: and (3) carrying out finish machining on the pearlite matrix, repairing and flattening the outer surface of the pearlite, and grooving the round end surface of the pearlite matrix to obtain the repair tool 100.
Further, in the step S1, the diameter and the height of the cylindrical blank are both larger than the predetermined size of the trimming member 100 by 2mm-5mm, and if the diameter and the height of the cylindrical blank are too large, the machining is slow and difficult in the subsequent finishing process.
Further, in the step S2, the first predetermined temperature is 880 ℃ to 930 ℃, and if the temperature is too high or too low, the crystal orientation combination is inconsistent with the expected combination, and the stress cannot be reduced.
Further, in the step S3, the second predetermined temperature is 500 ℃ to 600 ℃, and if the temperature is too high or too low, the pearlite crystal orientation cannot be obtained.
In the method for trimming the monocrystalline silicon ingot rolling mill 10 with self-trimming as described above, the trimming member 100 is held by the ingot chuck 200, the monocrystalline silicon ingot rolling mill 10 with self-trimming is started, and the grinding wheel 300 or the grinding head 400 rotates to self-grind.
Further, the rotation speed of the grinding wheel 300 or the grinding head 400 is 8% -12% lower than that of the grinding wheel 300 or the grinding head 400 when the crystal bar is barreled, so that the grinding wheel 300 or the grinding head 400 is repaired to be flat and does not waste excessive time.
The technical scheme of the invention is described by the following examples:
example 1
Rough machining is carried out on blank materials made of wear-resistant spheroidal graphite cast iron materials to obtain a cylindrical blank body, wherein the diameter and the height of the cylindrical blank body are both larger than the preset size of the cutter repairing piece 100 with the diameter of 3mm, and the preset ruler of the cutter repairing piece 100 is specifically as follows: the diameter is more than 170mm, and the length is 179-181mm; heating the cylindrical blank to 880-930 ℃, slowly cooling to room temperature, reducing stress, tempering and heating to 500-600 ℃ after cooling to room temperature, and obtaining a pearlite matrix; the method comprises the steps of carrying out finish machining on a pearlitic matrix, repairing and flattening the outer surface of the pearlitic matrix, grooving the round end surface of the pearlitic matrix to obtain a trimming cutter 100, clamping the trimming cutter 100 on the original position of a crystal bar through a crystal bar clamping head 200, starting a monocrystalline silicon crystal bar barreling machine 10 for self trimming, rotating a grinding wheel 300 or a grinding head 400 to be in contact with the trimming cutter 100, wherein the rotating speed of the grinding wheel 300 or the grinding head 400 is lower than the rotating speed of 10% when the grinding wheel 300 or the grinding head 400 barrels and processes the crystal bar, and trimming.
Comparative example one
Rough machining is carried out on blank materials made of wear-resistant spheroidal graphite cast iron materials to obtain a cylindrical blank body, wherein the diameter and the height of the cylindrical blank body are both larger than the preset size of the cutter repairing piece 100 with the diameter of 3mm, and the preset ruler of the cutter repairing piece 100 is specifically as follows: the diameter is more than 170mm, and the length is 179-181mm; heating the cylindrical blank to 880-930 ℃, slowly cooling to room temperature, carrying out finish machining on the cylindrical blank, repairing the outer surface of the cylindrical blank to be smooth, grooving the round end surface of the cylindrical blank to obtain a trimming piece 100, clamping the trimming piece 100 on the original crystal bar position through a crystal bar chuck 200, starting a monocrystalline silicon crystal bar barreling machine 10 for self trimming, rotating a grinding wheel 300 or a grinding head 400 to be in contact with the trimming piece 100, wherein the rotating speed of the grinding wheel 300 or the grinding head 400 is lower than the rotating speed of the grinding wheel 300 or the grinding head 400 by 10% when the crystal bar is barreled and machined, and trimming.
Comparative example two
Rough machining is carried out on blank materials made of wear-resistant spheroidal graphite cast iron materials to obtain a cylindrical blank body, wherein the diameter and the height of the cylindrical blank body are both larger than the preset size of the cutter repairing piece 100 with the diameter of 3mm, and the preset ruler of the cutter repairing piece 100 is specifically as follows: the diameter is more than 170mm, and the length is 179-181mm; the method comprises the steps of carrying out finish machining on a cylindrical blank, repairing and flattening the outer surface of the cylindrical blank, grooving the round end surface of the cylindrical blank to obtain a trimming piece 100, clamping the trimming piece 100 on the original position of a crystal bar through a crystal bar chuck 200, starting a single crystal silicon crystal bar barreling machine 10 for self trimming, rotating a grinding wheel 300 or a grinding head 400 to be in contact with the trimming piece 100, wherein the rotating speed of the grinding wheel 300 or the grinding head 400 is lower than the rotating speed of the grinding wheel 300 or the grinding head 400 by 10% when the crystal bar is barreled and machined, and trimming.
The following are the use tests for the 3 kinds of the trimming inserts 100 obtained in the first example, the first comparative example, and the second comparative example:
the method comprises the following steps: for the grinding wheel 300 of the same kind, the feeding amount was 0.3mm, the standard diameter was (170±0.1 mm), and 3 different dressing pieces 100 obtained in example one, comparative example two were used for grinding for 10 minutes, and the results of the experiment 3 times are shown in table 1:
TABLE 1
Through the above experiments, it was found that the surface of the dressing insert 100 prepared by the first embodiment was least worn after grinding the grinding wheel 300, and the roughness was the lowest, thereby proving that the dressing insert 100 of the first embodiment had the best wear resistance.
The foregoing disclosure is illustrative of the preferred embodiments of the present invention, and is not to be construed as limiting the scope of the invention, as it is understood by those skilled in the art that all or part of the above-described embodiments may be practiced with equivalents thereof, which fall within the scope of the invention as defined by the appended claims.

Claims (9)

1. A monocrystalline silicon crystal bar rolling mill capable of self-trimming a knife is characterized in that: the grinding wheel or grinding head self-repairing tool comprises a repairing tool piece, a crystal bar chuck, a grinding wheel and a grinding head, wherein the repairing tool piece is a cylinder, the repairing tool piece is made of wear-resistant nodular cast iron, and is positioned in the middle of the crystal bar chuck and clamped by the crystal bar chuck so as to self-repair the grinding wheel or the grinding head.
2. A self-trimming monocrystalline silicon ingot tumbling mill in accordance with claim 1, wherein: grooves are formed in the two ends of the trimming part, and the crystal bar clamping heads are clamped in the grooves in the two ends of the trimming part.
3. A self-trimming monocrystalline silicon ingot tumbling mill in accordance with claim 1, wherein: the wear-resistant spheroidal graphite cast iron is KmQT or KmQTMn6.
4. A self-trimming monocrystalline silicon ingot tumbling mill in accordance with claim 1, wherein: the trimming part is manufactured by the following steps:
s1: rough machining is carried out on blank materials made of wear-resistant spheroidal graphite cast iron materials to obtain a cylindrical blank body, wherein the diameter and the height of the cylindrical blank body are larger than the preset size of the cutter repairing piece;
s2: heating the cylindrical blank to a first preset temperature, slowly cooling to room temperature, tempering and heating to a second preset temperature after cooling to the room temperature to obtain a pearlite matrix;
s3: and (3) carrying out finish machining on the pearlite matrix, repairing and flattening the outer surface of the pearlite, and grooving the round end surface of the pearlite matrix to obtain the trimming part.
5. A self-trimming monocrystalline silicon ingot tumbling mill in accordance with claim 4, wherein: in the step S1, the diameter and the height of the cylindrical blank body are both larger than the preset size of the cutter repairing piece by 2mm-5mm.
6. A self-trimming monocrystalline silicon ingot tumbling mill in accordance with claim 4, wherein: in the step S2, the first preset temperature is 880-930 ℃.
7. A self-trimming monocrystalline silicon ingot tumbling mill in accordance with claim 4, wherein: in the step S3, the second preset temperature is 500-600 ℃.
8. A method of trimming a single crystal silicon ingot rolling mill with a self-trimming blade as set forth in any one of claims 1 to 7, wherein: the trimming part is clamped by the crystal bar clamping head, the monocrystalline silicon crystal bar barreling machine capable of automatically trimming is started, and the grinding wheel or the grinding head rotates to automatically sharpen.
9. The method for trimming a single crystal silicon ingot rolling mill with self-trimming cutter according to claim 8, wherein: the rotation speed of the grinding wheel or the grinding head is 8% -12% lower than that of the grinding wheel or the grinding head when the crystal bar is processed by barreling.
CN202311065440.0A 2023-08-22 2023-08-22 Single crystal silicon crystal bar rolling mill capable of self-trimming and trimming method Pending CN117020956A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311065440.0A CN117020956A (en) 2023-08-22 2023-08-22 Single crystal silicon crystal bar rolling mill capable of self-trimming and trimming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311065440.0A CN117020956A (en) 2023-08-22 2023-08-22 Single crystal silicon crystal bar rolling mill capable of self-trimming and trimming method

Publications (1)

Publication Number Publication Date
CN117020956A true CN117020956A (en) 2023-11-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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