CN117007183A - Imaging spectrometer based on double-arm compensation - Google Patents
Imaging spectrometer based on double-arm compensation Download PDFInfo
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- CN117007183A CN117007183A CN202310897460.8A CN202310897460A CN117007183A CN 117007183 A CN117007183 A CN 117007183A CN 202310897460 A CN202310897460 A CN 202310897460A CN 117007183 A CN117007183 A CN 117007183A
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- lens
- imaging
- collimating
- arm compensation
- compensation
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- 238000003384 imaging method Methods 0.000 title claims abstract description 56
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 230000005499 meniscus Effects 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 15
- 210000000245 forearm Anatomy 0.000 claims description 11
- 238000001228 spectrum Methods 0.000 abstract description 20
- 238000005452 bending Methods 0.000 abstract description 14
- 238000013461 design Methods 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 201000009310 astigmatism Diseases 0.000 abstract description 2
- 230000003595 spectral effect Effects 0.000 description 9
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 6
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 6
- 238000000701 chemical imaging Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/1804—Plane gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
Abstract
The invention belongs to the technical field of high-resolution fine spectrum imaging spectrometer design, and particularly relates to an imaging spectrometer based on double-arm compensation. The imaging spectrometer comprises a slit, a front arm compensation lens, a collimation imaging lens, a plane grating, a folding axis mirror and a rear arm compensation lens which are sequentially arranged along an optical axis, wherein the front arm compensation lens and the rear arm compensation lens are meniscus positive lenses; the collimating imaging lens consists of a first collimating imaging lens and a second collimating imaging lens, wherein the first collimating imaging lens is a meniscus negative lens, and the second collimating imaging lens is a biconvex positive lens. The invention effectively suppresses the spectrum bending generated by the plane grating, and enhances the spectrum recognition capability of the system from the hardware perspective; the residual spectrum bending and residual astigmatism of the system are effectively compensated, and the manufacturing cost is lower. The invention designs an imaging spectrometer with a numerical aperture of 0.167, and the spectrum bending is less than 2.2 mu m.
Description
Technical Field
The invention belongs to the technical field of high-resolution fine spectrum imaging spectrometer design, and particularly relates to an imaging spectrometer based on double-arm compensation.
Background
The high-resolution fine imaging spectrometer usually adopts the aberration of an aspheric correction system, and the slit and the image surface are placed in different planes by turning the position of the image surface, but the structure causes a complex light path, and has high processing and debugging difficulty and high manufacturing cost. In order to overcome this technical problem. The 'a spectral imaging system based on forearm compensation and plane grating' provided in 202011309962.7 comprises a slit, a forearm compensation lens group, a folding mirror, an optical path multiplexing lens group and a plane grating which are sequentially arranged along the direction of the optical axis of the system; the front arm compensation lens group, the light path multiplexing lens group and the plane grating are all arranged on the same optical axis, the slit is arranged on one side of the optical axis of the deflection system, the folding reflector is arranged on the other side of the optical axis of the deflection system, and the detector is further arranged on one side of the folding reflector far away from the optical axis of the system. In 202211530335.5, a "rear arm compensation based Littrow short wave imaging spectroscopy system" is provided, which includes a slit, littrow optics module, planar grating, rear arm compensation lens set, and detector module, arranged in order along the optical path.
In practical use of the above system, the following problems are found:
1. because the slit direction of the planar grating light-splitting module is mutually perpendicular to the meridian plane of the system, light rays emitted by different object points of the same spectral line on the slit can also generate serious spectral line bending after passing through the planar grating, and the serious spectral line bending can cause the system to generate spectrum aliasing and seriously affect the imaging quality of the system.
2. The optical structure is not compact enough, the system volume still cannot meet the use of some narrow spaces, meanwhile, the number of lenses is large, and the cost is reduced undesirably.
3. Because the slit is too close to the detector, there may be some interference between the installation of the detector and the installation of the slit.
4. The system design principle is feasible because the off-axis amount of the slit relative to the optical axis of the lens group is too small, but engineering is difficult to realize.
5. Due to the limitation of system design wavelength and material types, the optical path is difficult to be matched with multiple gratings at the same time, so that different spectral resolutions are realized.
6. The assembly process is complex, and has high precision requirements on the spacing and the relative position between the optical elements.
7. Due to the limited variety of materials used and the limited grating diffraction efficiency of the system, the system still cannot achieve high signal-to-noise ratio and high dynamic range spectral imaging.
In summary, the continuous optimization of the performance of the dual-arm compensated imaging spectrometer is an important research direction for the scientific researchers in the field.
Disclosure of Invention
The invention provides an imaging spectrometer based on double-arm compensation, which aims to solve the problems that the imaging quality of a system is not ideal, the cost is high, engineering is difficult to realize, the assembly precision requirement is high, and meanwhile, the high signal-to-noise ratio and high dynamic range spectral imaging cannot be realized in the prior art.
In order to achieve the purpose of the invention, the technical scheme provided by the invention is as follows: an imaging spectrometer based on double-arm compensation comprises a slit, a front arm compensation lens, a collimation imaging lens, a plane grating, a folding axis mirror and a rear arm compensation lens which are sequentially arranged along an optical axis; the forearm compensation lens and the rear arm compensation lens are meniscus positive lenses; the collimating imaging lens consists of a first collimating imaging lens and a second collimating imaging lens, wherein the first collimating imaging lens is a meniscus negative lens, and the second collimating imaging lens is a biconvex positive lens.
Further, the forearm compensating lens is made of a material having a refractive index nd=1.5168 and an abbe number vd= 64.167;
further, the first collimating imaging mirror is made of a material having a refractive index nd= 1.7995 and an abbe number vd= 42.368; the second collimating imaging mirror is made of a material with refractive index nd= 1.4586 and abbe number vd= 90.172;
further, the rear arm compensation lens is made of a material having a refractive index nd=1.74 and an abbe number vd=28.29.
Further, the rear arm compensation lens has an off-axis lens amount of 4.8mm and 4.2mm.
Compared with the prior art, the invention has the advantages that:
1. the invention provides a system for correcting the spectrum bending by adding the eccentric lens at the front arm position and the rear arm position for the first time, the spectrum bending of the whole system is effectively corrected by combining the front arm compensation eccentric lens and the rear arm compensation eccentric lens, the spectrum bending caused by the plane grating is more easily compensated by two times of compensation, the spectrum bending caused by the plane grating is effectively restrained, and the spectrum recognition capability of the system is enhanced from the hardware angle.
2. Due to the adoption of the double-arm compensation technology, the residual spectrum bending and residual astigmatism of the system are effectively compensated, so that the system designed in the process is smaller in size, more compact in structure, less in lens number and lower in manufacturing cost. The space volume of the system is 115mm multiplied by 45mm multiplied by 61mm.
3. Because of the reason of double-arm compensation technology, a folding axicon is added in the middle light path of the system to separate the image plane from the slit in space position, and the rear arm compensation lens group adopts an off-axis lens, so that the back focal distance of the system is longer, and the installation and adjustment of the detector are more facilitated.
4. On the optical model, the optical structure is more compact, and engineering and simple modularization of products are easier to realize through adjustment of off-axis quantity.
5. Because the transmittance range of the used materials is wide, the aperture angle of the system is large, and the planar gratings with different diffraction angles and different reticle densities can be received, so that the requirements of different spectral resolutions can be met.
6. The invention has simple assembly process, and no special requirements on the spacing and the relative position between the optical elements, so long as the assembly process is satisfied.
7. Due to the adoption of the double-arm compensation light path model and the design idea of sharing the collimating imaging lens, the design of large relative aperture, high resolution, high signal-to-noise ratio, light weight and miniaturization of the system is realized.
8. The related range is wide: the spectrum range related by the instrument is the region where the characteristic absorption spectrum and the reflection spectrum of various ground object targets are located, and is widely applied to atmospheric environment component analysis, remote sensing, medical detection and diagnosis, mineral resource detection, environment monitoring, military reconnaissance and camouflage identification.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
fig. 2 is a graph of spectral bending.
Reference numerals illustrate: 1-slit, 2-forearm compensating lens, 3-collimation imaging lens, 3-1-first collimation imaging lens, 3-2-second collimation imaging lens, 4-plane grating, 5-folding axis lens, 6-rear arm compensating lens and 7-image plane position.
Detailed Description
The present invention will be described in detail below with reference to the drawings and examples.
Referring to fig. 1, an imaging spectrometer based on double-arm compensation comprises a slit 1, a forearm compensation lens 2, a collimation imaging lens 3, a plane grating 4, a folding axis lens 5 and a rear arm compensation lens 6 which are sequentially arranged along an optical axis, wherein the collimation imaging lens 3 consists of a first collimation imaging lens 3-1 and a second collimation imaging lens 3-2.
The slit 1 receives spectrum information obtained by the objective lens, different widths of the slit 1 can meet different spectrum resolutions, and the different widths of the slit 1 can influence the signal-to-noise ratio of the system.
The forearm compensating lens 2 is a meniscus positive lens, and is made of a material with refractive index nd=1.5168 and abbe number vd= 64.167. The lens is used as a field lens, so that the incident light at the position of the slit 1 is an approximate object space telecentric light path, the pupil aberration and the pupil drift of the system are reduced, and the lens is used as an off-axis lens to generate spectrum bending opposite to a plane grating, so that the compensation effect on the spectrum bending of the whole system is achieved.
The collimating imaging lens 3 and the plane grating 4 are core parts of the invention, the first collimating imaging lens 3-1 is a meniscus negative lens, and is made of materials with refractive index nd= 1.7995 and Abbe number vd= 42.368; the second collimating imaging lens 3-2 is a biconvex positive lens made of a material having a refractive index nd= 1.4586 and an abbe number vd= 90.172. The system mainly comprises a beam splitting module for splitting the light beam. The collimator imaging mirror 3 collimates the light beam passing through the slit 1 and the forearm compensation lens 2 so that the collimated light beam is incident on the planar grating 4. The plane grating 4 diffracts the incident collimated light beam, and diffracts the condensed complex-color light into single-wavelength monochromatic light. The diffracted light is converged by the collimating and imaging lens 3, reflected by the folding axis lens 5, and incident into the rear arm compensation lens 6.
The rear arm compensation lens 6 is a meniscus positive lens, is made of a material with refractive index nd=1.74 and abbe number vd=28.29, and has an off-axis amount of 4.8mm and 4.2mm, and is used for compensating the residual spectrum bending of the system.
The forearm compensation lens 2 and the rear arm compensation lens 6 take over correcting the spectral curvature of the entire system.
The numerical aperture of the imaging spectrometer optical system based on double-arm compensation is 0.167, and the working environment temperature is-40-60 ℃; the detector with the pixel size of 11 μm is arranged at the image plane position 7, and the spectral resolution of the spectrometer is better than 5nm, the spectral curvature is less than 2.2 μm in the wavelength range of 0.45-0.9 μm through test, thereby meeting the international high resolution requirement.
The present invention is not limited to the preferred embodiments, but can be modified in any way according to the technical principles of the present invention, and all such modifications, equivalent variations and modifications are included in the scope of the present invention.
Claims (5)
1. An imaging spectrometer based on double-arm compensation, characterized in that: the device comprises a slit (1), a forearm compensating lens (2), a collimation imaging lens (3), a plane grating (4), a folding axicon (5) and a rear arm compensating lens (6) which are sequentially arranged along an optical axis; the forearm compensation lens (2) and the rear arm compensation lens (6) are positive meniscus lenses; the collimating imaging lens (3) consists of a first collimating imaging lens (3-1) and a second collimating imaging lens (3-2), wherein the first collimating imaging lens (3-1) is a meniscus negative lens, and the second collimating imaging lens (3-2) is a biconvex positive lens.
2. The dual-arm compensation-based imaging spectrometer of claim 1, wherein: the forearm compensation lens (2) is made of a material with refractive index nd=1.5168 and abbe number vd= 64.167.
3. A dual-arm compensation-based imaging spectrometer according to claim 1 or 2, characterized in that: the first collimating imaging mirror (3-1) is made of a material with refractive index nd= 1.7995 and abbe number vd= 42.368; the second collimating imaging mirror (3-2) is made of a material with refractive index nd= 1.4586 and abbe number vd= 90.172.
4. A dual-arm compensation-based imaging spectrometer of claim 3, wherein: the rear arm compensation lens (6) is made of a material with a refractive index nd=1.74 and an abbe number vd=28.29.
5. The dual-arm compensation-based imaging spectrometer of claim 4, wherein: the rear arm compensation lens (6) has a lens off-axis amount of 4.8mm and 4.2mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310897460.8A CN117007183A (en) | 2023-07-21 | 2023-07-21 | Imaging spectrometer based on double-arm compensation |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310897460.8A CN117007183A (en) | 2023-07-21 | 2023-07-21 | Imaging spectrometer based on double-arm compensation |
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| CN117007183A true CN117007183A (en) | 2023-11-07 |
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| CN202310897460.8A Pending CN117007183A (en) | 2023-07-21 | 2023-07-21 | Imaging spectrometer based on double-arm compensation |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101672694A (en) * | 2009-10-16 | 2010-03-17 | 中国科学院上海技术物理研究所 | Optical system of spectroscopic imaging spectrometer of prism |
| CN208270077U (en) * | 2018-05-16 | 2018-12-21 | 中国科学院西安光学精密机械研究所 | The high-throughput high-resolution relevant dispersion spectrum imaging device of wide spectrum |
| CN112539836A (en) * | 2020-11-20 | 2021-03-23 | 中国科学院西安光学精密机械研究所 | Spectrum imaging system based on forearm compensation and planar grating |
| CN113532646A (en) * | 2021-06-17 | 2021-10-22 | 北京空间机电研究所 | Full-spectrum-segment hyperspectral imaging system with high sensitivity and low distortion of static track |
| CN115931128A (en) * | 2022-11-30 | 2023-04-07 | 中国科学院西安光学精密机械研究所 | Littrow short wave imaging spectrum system based on rear arm compensation |
-
2023
- 2023-07-21 CN CN202310897460.8A patent/CN117007183A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101672694A (en) * | 2009-10-16 | 2010-03-17 | 中国科学院上海技术物理研究所 | Optical system of spectroscopic imaging spectrometer of prism |
| CN208270077U (en) * | 2018-05-16 | 2018-12-21 | 中国科学院西安光学精密机械研究所 | The high-throughput high-resolution relevant dispersion spectrum imaging device of wide spectrum |
| CN112539836A (en) * | 2020-11-20 | 2021-03-23 | 中国科学院西安光学精密机械研究所 | Spectrum imaging system based on forearm compensation and planar grating |
| CN113532646A (en) * | 2021-06-17 | 2021-10-22 | 北京空间机电研究所 | Full-spectrum-segment hyperspectral imaging system with high sensitivity and low distortion of static track |
| CN115931128A (en) * | 2022-11-30 | 2023-04-07 | 中国科学院西安光学精密机械研究所 | Littrow short wave imaging spectrum system based on rear arm compensation |
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