CN117000727A - LGV machine focusing lens dust removing device - Google Patents
LGV machine focusing lens dust removing device Download PDFInfo
- Publication number
- CN117000727A CN117000727A CN202211734296.0A CN202211734296A CN117000727A CN 117000727 A CN117000727 A CN 117000727A CN 202211734296 A CN202211734296 A CN 202211734296A CN 117000727 A CN117000727 A CN 117000727A
- Authority
- CN
- China
- Prior art keywords
- focusing lens
- lgv
- focusing
- dust removing
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 title claims abstract description 18
- 238000007664 blowing Methods 0.000 claims abstract description 31
- 230000000149 penetrating effect Effects 0.000 claims abstract description 4
- 238000012360 testing method Methods 0.000 abstract description 2
- 239000002184 metal Substances 0.000 description 4
- 238000003698 laser cutting Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B17/00—Methods preventing fouling
- B08B17/02—Preventing deposition of fouling or of dust
Abstract
The invention relates to the technical field of chip testing, in particular to a dust removing device for a focusing lens of an LGV machine. The utility model provides a LGV board focusing mirror dust remove device, includes the focusing mirror, its characterized in that: one side of the upper end of the focusing lens is provided with a circle of protruding blocks, the protruding blocks are provided with blowing holes penetrating in the vertical direction, the blowing holes are arranged in a semi-circumference shape, and the lower end of the focusing lens is provided with an exhaust device. Compared with the prior art, the blowing direction of the air blowing hole of the focusing lens is changed into the same direction, the air knife is formed, and the dust can be effectively prevented from polluting the focusing lens by matching with the air exhausting device.
Description
Technical Field
The invention relates to the technical field of chip testing, in particular to a dust removing device for a focusing lens of an LGV machine.
Background
Currently, the LGV of the semiconductor laser grooving machine is widely applied to the dicing process of the wafer. Compared with the traditional knife cutting, the LGV laser cutting of the metal layer of the wafer effectively reduces the damage quantity of chips. However, for the product with the metal layer thickness, the laser cutting generates more metal dust, so that dust pollution of a focusing lens is caused, and the quality of the product is abnormal.
At present, the machine station uses the mode of blowing to slow down the pollution of metal dust to the focusing mirror, and as shown in fig. 4 to 5, the focusing mirror outer fringe sets up the round gas blowing hole, and the gas blowing direction of gas blowing hole all blows to the focusing mirror in, and the leak appears in the center, leads to the dust to glue on the focusing lens by center leak department, and the effect is relatively poor, needs frequent going to clean the focusing mirror, just can maintain production.
Disclosure of Invention
The invention provides a dust removing device for a focusing lens of an LGV machine table, which aims to overcome the defects of the prior art.
In order to achieve the above purpose, design a LGV board focusing mirror dust remove device, including the focusing mirror, its characterized in that: one side of the upper end of the focusing lens is provided with a circle of protruding blocks, the protruding blocks are provided with blowing holes penetrating in the vertical direction, the blowing holes are arranged in a semi-circumference shape, and the lower end of the focusing lens is provided with an exhaust device.
The shape of the air blowing hole is square.
The plurality of air blowing holes are all positioned at the outer edge of the upper part of the focusing lens.
The blowing direction of the blowing hole is parallel to the mirror surface of the focusing mirror.
Compared with the prior art, the invention changes the blowing direction of the air blowing hole of the focusing lens into the same direction to form the air knife, and can effectively prevent dust from polluting the focusing lens by matching with the air exhausting device.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a side view of the present invention.
Fig. 3 is a schematic view of the structure of the focusing lens of the present invention.
Fig. 4 is a schematic structural diagram of the present invention before modification.
Fig. 5 is a side view of the invention prior to modification.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Embodiment one:
as shown in fig. 1 to 3, a circle of protruding blocks 2 is arranged on one side of the upper end of the focusing lens 1, air blowing holes 3 penetrating in the vertical direction are arranged on the protruding blocks 2, a plurality of air blowing holes 3 are arranged in a semi-circumference shape, and an air exhaust device 4 is arranged at the lower end of the focusing lens 1.
The shape of the air blowing hole 3 is square, and the processing is convenient.
The plurality of air blowing holes 3 are all positioned at the outer edge of the upper part of the focusing lens 1.
The blowing direction of the blowing hole 3 is parallel to the mirror surface of the focusing mirror 1.
In the invention, the air blowing holes 3 are arranged on one side of the focusing mirror 1, the air blowing directions 5 of all the air blowing holes 3 are in the same direction and are parallel to the mirror surface of the focusing mirror 1, so that an air knife is formed, and the air knife is matched with an air exhaust device, thereby effectively preventing dust from polluting the focusing mirror.
As shown in fig. 4, the underside of the focusing lens 1 before improvement is provided with a semicircular arc step 6. In the invention, the semicircular step 6 is removed, so that the flow direction of the air knife is prevented from being blocked.
Claims (4)
1. The utility model provides a LGV board focusing mirror dust remove device, includes the focusing mirror, its characterized in that: one side of the upper end of the focusing mirror (1) is provided with a circle of protruding blocks (2), the protruding blocks (2) are provided with air blowing holes (3) penetrating in the vertical direction, the plurality of air blowing holes (3) are arranged in a semi-circular shape, and an exhaust device (4) is arranged at the lower end of the focusing mirror (1).
2. The LGV apparatus focusing lens dust removing apparatus according to claim 1, wherein: the shape of the air blowing hole (3) is square.
3. The LGV apparatus focusing lens dust removing apparatus according to claim 1, wherein: the plurality of air blowing holes (3) are all positioned at the outer edge of the upper part of the focusing mirror (1).
4. The LGV apparatus focusing lens dust removing apparatus according to claim 1, wherein: the blowing direction (5) of the blowing hole (3) is parallel to the mirror surface of the focusing mirror (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211734296.0A CN117000727A (en) | 2022-12-31 | 2022-12-31 | LGV machine focusing lens dust removing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211734296.0A CN117000727A (en) | 2022-12-31 | 2022-12-31 | LGV machine focusing lens dust removing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117000727A true CN117000727A (en) | 2023-11-07 |
Family
ID=88566136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211734296.0A Pending CN117000727A (en) | 2022-12-31 | 2022-12-31 | LGV machine focusing lens dust removing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117000727A (en) |
-
2022
- 2022-12-31 CN CN202211734296.0A patent/CN117000727A/en active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |