CN116980304A - Automatic scene simulation system based on SECS/GEM communication method - Google Patents
Automatic scene simulation system based on SECS/GEM communication method Download PDFInfo
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- CN116980304A CN116980304A CN202310955856.3A CN202310955856A CN116980304A CN 116980304 A CN116980304 A CN 116980304A CN 202310955856 A CN202310955856 A CN 202310955856A CN 116980304 A CN116980304 A CN 116980304A
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- 230000006854 communication Effects 0.000 title claims abstract description 68
- 238000004891 communication Methods 0.000 title claims abstract description 63
- 238000004088 simulation Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 33
- 230000003993 interaction Effects 0.000 claims abstract description 26
- 238000013500 data storage Methods 0.000 claims abstract description 14
- 230000002159 abnormal effect Effects 0.000 claims description 6
- 230000005856 abnormality Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 abstract description 12
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 description 17
- 230000008569 process Effects 0.000 description 13
- 238000012545 processing Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
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- 238000012544 monitoring process Methods 0.000 description 1
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L41/00—Arrangements for maintenance, administration or management of data switching networks, e.g. of packet switching networks
- H04L41/14—Network analysis or design
- H04L41/145—Network analysis or design involving simulating, designing, planning or modelling of a network
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L41/00—Arrangements for maintenance, administration or management of data switching networks, e.g. of packet switching networks
- H04L41/08—Configuration management of networks or network elements
- H04L41/0894—Policy-based network configuration management
Abstract
The application discloses an automatic scene simulation system based on an SECS/GEM communication method, and relates to the technical field of automatic control. Comprising the following steps: the control module is used for sending a control instruction to the controlled module and acquiring state information and an operation report of the controlled module; the at least one controlled module is used for receiving the control instruction of the control module, finishing instruction operation according to the control instruction and storing the operation result in the data storage module; the user interaction module comprises a user-defined message format unit for providing a user with the user-defined message format unit so as to facilitate the user to carry out autonomous configuration on the controlled module; the data storage module is used for storing basic data of the controlled equipment; and the communication module is used for realizing data interaction between the control module and the controlled module. The method aims to realize communication simulation between a plurality of semiconductor devices and an upper computer at the same time and reduce energy consumption.
Description
Technical Field
The application relates to the technical field of automatic control, in particular to an automatic scene simulation system based on an SECS/GEM communication method.
Background
The SECS/GEM communication simulator is a software tool for simulating GEM (generic device model) protocol communication defined by SEMI (semiconductor Equipment and Material International Association) standards in semiconductor manufacturing equipment. In the semiconductor manufacturing process, the GEM protocol is a standard protocol for communication between a device and an upper computer, and defines a format, content, flow, etc. of information exchanged between the device and the upper computer. The SECS/GEM communication simulator has the function of simulating the communication process between the equipment and the upper computer so as to perform relevant operations such as equipment control, data acquisition, exception handling and the like.
Existing SECS/GEM communication simulators have some drawbacks in operation. Firstly, the interfaces of the devices are complex, and complex configuration and setting are needed to be used normally. Second, they are relatively complex to operate and require a certain level of skill to operate. Finally, stability and reliability of some SECS/GEM communication simulators are also problematic, and conditions such as breakdown, data loss and the like are easy to occur, so that smooth operation of equipment control, data acquisition and the like is affected.
Therefore, how to realize the communication simulation between a plurality of semiconductor devices and an upper computer at the same time, and reduce the energy consumption becomes a technical problem to be solved urgently.
Disclosure of Invention
The application mainly aims to provide an automatic scene simulation system based on an SECS/GEM communication method, which aims to realize communication simulation between a plurality of semiconductor devices and an upper computer at the same time and reduce energy consumption.
In order to achieve the above object, the present application provides an automated scene simulation system based on SECS/GEM communication method, comprising:
the control module is used for sending a control instruction to the controlled module and acquiring state information and an operation report of the controlled module;
the at least one controlled module is used for receiving the control instruction of the control module, finishing instruction operation according to the control instruction and storing the operation result in the data storage module;
the user interaction module comprises a user-defined message format unit for providing a user with the user-defined message format unit so as to facilitate the user to carry out autonomous configuration on the controlled module;
the data storage module is used for storing basic data of the controlled equipment; and
and the communication module is used for realizing data interaction between the control module and the controlled module.
In one embodiment of the present application, the keywords of the custom message format template include: message type, message stream ID, system endian, transaction ID, message length, and data content.
In an embodiment of the present application, the user interaction module further includes:
the scene module is used for providing different use scenes for the user and facilitating the scene configuration of the controlled module by the user.
In one embodiment of the present application, the scene module includes: the communication system comprises at least one of a command simulation unit for simulating a command sent by a control module to a controlled module, a data simulation unit for simulating the data sent by the control module to the controlled module, an event simulation unit for simulating an event report sent by the controlled module to the control module, an abnormality simulation unit for simulating an abnormal situation of the controlled module, and a time sequence simulation unit for simulating a time sequence relation in a communication process.
In an embodiment of the present application, the user interaction module further includes:
and the device module is used for displaying the real-time information of the device and exporting the device information.
In an embodiment of the present application, the real-time information includes: an unconnected state, a connection established state, a connection disconnected state, an idle state, a wait for host request state, a wait for device reply state, a communication timeout state, a communication error state, and all outstanding transport commands.
In one embodiment of the present application, the controlled module includes at least one of an OHT system, an STK system, an AGV system, and an LFT system.
By adopting the technical scheme, the SECS/GEM communication method is adopted in the system, so that the system has the characteristics of high efficiency and reliability, and can rapidly complete the transmission of control instructions and the response of a controlled module. The method realizes the data interaction between one control module and one or more controlled modules, has stronger flexibility and expandability, and can flexibly configure and expand the controlled modules through autonomous configuration by a user. The processing process of the controlled module is simulated through the equipment engine unit, so that the equipment processing process in an actual scene can be accurately simulated, and the simulation accuracy and reliability are improved. The system is prevented from being opened, the resource consumption is reduced, and the manpower consumption is reduced.
Drawings
The application will now be described in detail with reference to specific embodiments and accompanying drawings, in which:
fig. 1 is a schematic structural view of a first embodiment of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be described in detail with reference to the accompanying drawings and examples. It should be understood that the following specific examples are given by way of illustration only and are not intended to be limiting.
As shown in fig. 1, to achieve the above object, the present application provides an automated scene simulation system based on SECS/GEM communication method, comprising:
the control module is used for sending a control instruction to the controlled module and acquiring state information and an operation report of the controlled module;
the at least one controlled module is used for receiving the control instruction of the control module, finishing instruction operation according to the control instruction and storing the operation result in the data storage module;
the user interaction module comprises a user-defined message format unit for providing a user with the user-defined message format unit so as to facilitate the user to carry out autonomous configuration on the controlled module;
the data storage module is used for storing basic data of the controlled equipment; and
and the communication module is used for realizing data interaction between the control module and the controlled module.
Specifically, an automated scene simulation system based on SECS/GEM communication method includes: the device comprises a control module, a controlled module, a user interaction module, a data storage module and a communication module.
SECS/GEM is a communication protocol for semiconductor device manufacturing automation. SECS stands for "semiconductor device communication standard" (SEMI Equipment Communications Standard), which is a communication protocol standard for communication between various components in a semiconductor device. GEM stands for "generic equipment model" (Generic Equipment Model), which is a standard model used to describe semiconductor manufacturing equipment.
The SECS/GEM communication protocol defines a communication standard between the semiconductor device and the control module, so that devices and control modules of different manufacturers can be interconnected, and automatic control and data collection of the devices are realized. The protocol adopts a communication mode based on messages, and realizes control and data transmission of equipment by sending and receiving the messages. Meanwhile, the SECS/GEM also provides a standard equipment model for describing the state and the behavior of the equipment, and is convenient for the control and the monitoring of the equipment.
The control module is used for sending a control instruction to the controlled module and acquiring state information and an operation report of the controlled module;
the control module is responsible for sending SECS/GEM messages to the controlled module part to control the behavior of the controlled module, and can also receive the status information and the operation report of the controlled module. The state information of the controlled module comprises information such as whether the equipment is in an operating state, whether the equipment is idle or not and the like; whether unprocessed information exists, the length of a message queue and the like; whether unprocessed events exist, the length of an event queue and the like; whether in the information such as the remote control state, local control state, etc.; whether an error occurs or not, error codes and other information; and information such as a data transmission state, a data transmission speed, and the like of the device.
The at least one controlled module is used for receiving the control instruction of the control module, finishing instruction operation according to the control instruction and storing the operation result in the data storage module;
the controlled module is in charge of receiving control instructions of the control module based on communication connection between SEMI E5, E30 and E37 standards and the control module, can receive SECS/GEM information from the control module and analyze the information structure to acquire instruction information in the information structure to finish instruction operation, and can integrate own parameters into a complete SECS/GEM information body to be reported to the control module to realize message interaction between the controlled module and the control module. Since the SECS/GEM protocol is a connection-oriented protocol, each controlled module needs to establish a separate connection with the control module, this connection is often referred to as an SECS channel. Each SECS channel has its own independent message queue for handling message transmissions between the control module and the controlled module. So that the existing simulation cannot complete the data interaction between a plurality of controlled modules and the control module,
according to the application, through a multithreading mode, different tasks can be independently executed by utilizing each thread, the resources and the memory space of the process are shared, the data interaction between a plurality of controlled modules and the control module is simulated by one process, the simulation efficiency is greatly improved, the utilization rate of equipment is improved, and the system is more flexible to increase. The controlled module analyzes and executes the instruction of the control module according to the scene of the controlled module, and when the systems receive the conveying instruction, the system can carry out a series of command states and equipment states such as conveying body distribution, path planning, conveying waiting, conveying starting to execute, conveying the carrier to a destination, conveying the carrier to completion and the like. And the processing result is stored in the data storage module so as to facilitate data inquiry and reading.
The user interaction module comprises a user-defined message format unit for providing a user with the user-defined message format unit so as to facilitate the user to carry out autonomous configuration on the controlled module;
and the message format unit is used for configuring the controlled module by a user, the SECS/GEM message is packaged between the controlled module and the control module through a TCP/IP protocol, the controlled module is acquired from the controlled module library when the controlled module is created, and the acquired controlled module is autonomously configured by the message format unit on the controlled module, so that the data interaction between the controlled module and the control module is realized, and the configuration difficulty of the controlled module is greatly simplified.
The data storage module is used for storing basic data of the controlled equipment;
the data storage module stores basic data of the controlled module, wherein the basic data comprises a system ID, a belonging type, a corresponding communication IP/Port, a current communication connection state, a control state, sub-equipment information (crown block, stacker, storage position and the like) in the system, and position information, state information, loading rate information, conveying instruction information, stored carrier information and the like of each sub-equipment.
And the communication module is used for realizing data interaction between the control module and the controlled module.
And the data interaction between the control module and the controlled module is completed through the communication module, and when the control module and the controlled module carry out data interaction, data transmission is carried out through a TCP/IP protocol, and the transmitted content is SECS/GEM information.
By adopting the technical scheme, the SECS/GEM communication method is adopted in the system, so that the system has the characteristics of high efficiency and reliability, and can rapidly complete the transmission of control instructions and the response of a controlled module. The method realizes the data interaction between one control module and one or more controlled modules, has stronger flexibility and expandability, and can flexibly configure and expand the controlled modules through autonomous configuration by a user. The processing process of the controlled module is simulated through the equipment engine unit, so that the equipment processing process in an actual scene can be accurately simulated, and the simulation accuracy and reliability are improved. The system is prevented from being opened, the resource consumption is reduced, and the manpower consumption is reduced.
In one embodiment of the present application, the keywords of the custom message format template include: message type, message stream ID, system endian, transaction ID, message length, and data content.
Specifically, the message types can classify and process the messages according to different message types, so that the user can conveniently manage and analyze the data. The message stream ID may identify the uniqueness of each message, avoiding the generation of duplicate messages. The system byte order can ensure the correctness and compatibility of message transmission between different platforms. The transaction ID may identify the transactivance of each message, ensuring proper processing and response of the message. The message length can ensure the correct transmission and reception of the message, and avoid the message from being truncated or lost. The data content can be customized according to different application scenes, so that different data requirements are met. Through the custom message format template, flexible data transmission and management can be realized, and a user can conveniently process and analyze data according to different application scenes. Meanwhile, the correctness and the reliability of the message can be ensured through the standard message format, errors and anomalies in the message transmission process are avoided, and the stability and the reliability of the system are improved. The operation of the user is convenient.
In an embodiment of the present application, the user interaction module further includes:
the scene module is used for providing different use scenes for the user and facilitating the scene configuration of the controlled module by the user.
Specifically, the scene module can provide different use scenes for the user, so that the user can select the most suitable scene according to the own requirements, and the use convenience and experience of the user are improved. And expanding according to the user demands, adding new scenes and functions, and improving the expandability and flexibility of the system.
In one embodiment of the present application, the scene module includes: the communication system comprises at least one of a command simulation unit for simulating a command sent by a control module to a controlled module, a data simulation unit for simulating the data sent by the control module to the controlled module, an event simulation unit for simulating an event report sent by the controlled module to the control module, an abnormality simulation unit for simulating an abnormal situation of the controlled module, and a time sequence simulation unit for simulating a time sequence relation in a communication process.
Specifically, the command simulation unit can simulate the process of sending the command to the controlled module by the control module, thereby facilitating the user to verify the correctness and effectiveness of the command sending and avoiding the system error caused by incorrect command sending. The data simulation unit can simulate the process that the control module sends data to the controlled module, thereby facilitating the verification of the correctness and the effectiveness of data transmission by a user and avoiding the system error caused by incorrect data transmission. The event simulation unit can simulate the process that the controlled module sends the event report to the control module, thereby facilitating the user to verify the correctness and the validity of the event report and avoiding the system error caused by incorrect event report. The abnormality simulation unit can simulate the abnormal condition occurrence process of the controlled module, is convenient for a user to verify the processing capacity and stability of the system under the abnormal condition, and avoids system errors caused by incorrect processing of the abnormal condition. The time sequence simulation unit can simulate the time sequence relation in the communication process, is convenient for a user to verify the time sequence correctness and effectiveness of message transmission, and avoids system errors caused by incorrect message transmission time sequence.
In an embodiment of the present application, the user interaction module further includes:
and the device module is used for displaying the real-time information of the device and exporting the device information.
Specifically, the device module can display real-time information of the device, provide an intuitive list page, provide a function of creating device information in batches and deriving the device information, and enable a user to set communication related information of a plurality of devices of different types, scene data suitable for configuring the device, message transmission interval time and other basic data in the module. Displaying real-time information of all states of all equipment and all unfinished conveying commands, and simulating a scene of manually generating instructions by a controlled module.
In an embodiment of the present application, the real-time information includes: an unconnected state, a connection established state, a connection disconnected state, an idle state, a wait for host request state, a wait for device reply state, a communication timeout state, a communication error state, and all outstanding transport commands.
In one embodiment of the present application, the controlled module includes at least one of an OHT system, an STK system, an AGV system, and an LFT system.
Specifically, OHT is generally called Overhead Hoist Transport, which is a suspended conveying system, and is a common automatic logistics conveying system, and materials can be transported and carried through a rail suspended at a high place. STKs (stacker cranes) are a type of equipment used in automated warehouse and logistics systems. The AGV is generally called Automated Guided Vehicle, is an automatic guided vehicle, and is a logistics system for transporting and carrying materials through an automatic vehicle. LFT is known collectively as a Lifter vertical handling system, which is a mechanical device for vertically handling items. It generally consists of an electric lifting mechanism and a platform that can transport items from one level to another. The controlled module adopts at least one of the above systems, can simulate the existing conveying system, and is convenient for testing each conveying system.
The workflow of the system is as follows:
initializing a system: loading a user interaction module; initializing a data storage module; the communication module is initialized.
Reading database information and carrying out corresponding analysis: reading SECS information configured by a user, wherein the SECS information comprises SECS connection information of each device, acquisition event identification/report identification/virtual identification event information reported by S6F11 (S6F 11 is one of the common communication protocol standards in the semiconductor manufacturing process) and the like; reading scene information, message transmission interval time and other information configured by a user; reading equipment information, such as whether the equipment is available or not, and whether the equipment has alarm and alarm information or not currently; and analyzing the information into a corresponding data format and sending the data format to a corresponding module.
And (3) connecting a waiting control module: the control module is used as a client of HSMS communication, and the controlled module is used as a server of communication; opening SECS communication ports configured by each controlled module, and waiting for connection of the control module;
judging whether the control module is connected with the control module or not: each communication instance is a thread, and whether the communication instance is connected with the control module is always judged; if the judgment result is that connection is established with the control module, the next step is carried out, communication simulation is executed, and the control module instruction is waited; if the judging result is that the connection is not established with the control module, continuing to wait for the connection of the control module.
When the controlled module establishes connection with the control module, executing communication simulation waiting control module instructions: and the connection is established with the control module, and instruction information sent by the control module is waited in the process.
Judging whether the control module sends an instruction or not: if an instruction of the control module is received, analyzing the instruction; if the instruction of the control module is not received, continuing to wait for the control module to send the instruction.
After receiving the instruction of the control module, analyzing the instruction and sending the instruction to an engine unit of the controlled module: the instructions sent by the control module are mainly divided into two types (S2F 41 Host Command Send (HCS) and S2F49Enhanced Remote Command), wherein S2F41 is a state change instruction and S2F49 is a conveying instruction; after the instruction is analyzed, the instruction information is sent to an engine unit of the controlled module for judgment.
Whether the instruction satisfies an execution condition: the engine unit of the controlled module judges whether the instruction meets the execution condition; if the command is a state change command, the engine unit of the controlled module simulates an actual controlled module, and judges whether the state change can be executed according to whether a carrier exists on the current controlled module, whether alarm information exists, whether an on-going conveying command exists and the like; if the instruction is a conveying instruction, the engine unit of the controlled module simulates an actual controlled module, and judges whether the conveying instruction issued by the control module can be executed according to the information such as whether the state of the starting point and the ending point of the conveying instruction is normal, whether the carrier is being conveyed, whether the carrier position information is correct and the like.
Executing the instruction and changing the state according to the scene information: and judging that the instruction can be executed according to the scene information set by the user. If the instruction is judged to be unable to be executed, the instruction is replied according to HCACK (Host Command Parameter Acknowledge Code) defined in the SEMI standard, and the scene simulation is completed.
The foregoing description is only of the preferred embodiments of the present application and is not intended to limit the scope of the application, and all equivalent structural changes made by the description of the present application and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the application.
Claims (7)
1. An automated scene simulation system based on an SECS/GEM communication method, comprising:
the control module is used for sending a control instruction to the controlled module and acquiring state information and an operation report of the controlled module;
the at least one controlled module is used for receiving the control instruction of the control module, finishing instruction operation according to the control instruction and storing the operation result in the data storage module;
the user interaction module comprises a user-defined message format unit for providing a user with the user-defined message format unit so as to facilitate the user to carry out autonomous configuration on the controlled module;
the data storage module is used for storing basic data of the controlled equipment; and
and the communication module is used for realizing data interaction between the control module and the controlled module.
2. The automated scene simulation system based on SECS/GEM communication method according to claim 1, wherein the keywords of the custom message format template comprise: message type, message stream ID, system endian, transaction ID, message length, and data content.
3. The automated scene simulation system based on SECS/GEM communication method according to claim 1, wherein the user interaction module further comprises:
the scene module is used for providing different use scenes for the user and facilitating the scene configuration of the controlled module by the user.
4. The automated scene simulation system based on SECS/GEM communication method according to claim 3, wherein the scene module comprises: the communication system comprises at least one of a command simulation unit for simulating a command sent by a control module to a controlled module, a data simulation unit for simulating the data sent by the control module to the controlled module, an event simulation unit for simulating an event report sent by the controlled module to the control module, an abnormality simulation unit for simulating an abnormal situation of the controlled module, and a time sequence simulation unit for simulating a time sequence relation in a communication process.
5. The automated scene simulation system based on SECS/GEM communication method according to claim 1, wherein the user interaction module further comprises:
and the device module is used for displaying the real-time information of the device and exporting the device information.
6. The automated scene simulation system based on SECS/GEM communication method according to claim 5, wherein the real-time information comprises: an unconnected state, a connection established state, a connection disconnected state, an idle state, a wait for host request state, a wait for device reply state, a communication timeout state, a communication error state, and all outstanding transport commands.
7. The automated scene simulation system based on SECS/GEM communication method according to claim 1, wherein the controlled module comprises at least one of an OHT system, an STK system, an AGV system, and an LFT system.
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