CN116973081A - Method, system and related equipment for detecting laser spot offset in laser array - Google Patents
Method, system and related equipment for detecting laser spot offset in laser array Download PDFInfo
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Abstract
The embodiment of the application provides a method, a system and related equipment for detecting laser spot offset in a laser array, which are used for detecting laser spot horizontal offset. In the embodiment of the application, lasers in a laser array are grouped into two types of calibration groups with different interval numbers, all the first type calibration groups and all the second type calibration groups are sequentially controlled to perform calibration operation in a region where the lasers in the first type calibration groups and the second type calibration groups are not overlapped in the horizontal direction, so that the offset in the horizontal direction between the two types of lasers with different intervals is obtained, and then the offset in the horizontal direction between the adjacent lasers is obtained through iterative calculation. In the detection method provided by the embodiment of the application, the horizontal direction with the same length is divided into the non-overlapping scanning areas of the plurality of adjacent calibration groups, so that the scanning patterns of the adjacent calibration groups are not overlapped, the identifiable degree of laser scanning marks is improved, the detection precision is increased, the scanning breadth required by calibration is reduced, and photoresist consumables are saved.
Description
Technical Field
The application relates to the technical field of laser direct writing imaging equipment, in particular to a method and a system for detecting laser spot offset in a laser array and related equipment.
Background
The imaging principle of the laser imaging apparatus in the related art (for example, a laser direct plate making apparatus for flat screen printing screen disclosed in application number 201310084860.3) is: and controlling the photosensitive coating on the laser progressive scanning exposure surface to expose the pixel exposure point, developing the photosensitive coating after exposure, and generating a required developed image on the exposure surface.
In the laser imaging assembly process, due to the influence of the installation error factor of the laser, the actual position of the light spot of the laser on the exposure surface in the horizontal direction (parallel to the laser scanning direction) may deviate from the preset position, and the laser imaging process needs to be calibrated based on the deviation value. The exposure breadth of the laser direct imaging device in the related technology can reach 2 meters, the calibration precision often reaches about ten micrometers, the current CCD camera is difficult to reach the precision identification requirement of ten micrometers in a large breadth range, the light spot identification is difficult, and how to accurately measure the offset values among the light spots of a plurality of lasers in a laser array becomes a problem to be solved.
Disclosure of Invention
The embodiment of the application provides a method, a system and related equipment for detecting laser spot offset in a laser array, which are used for realizing.
A first aspect of the present application provides a method for detecting a laser spot offset in a laser array, which may include:
dividing lasers in the laser array into a plurality of first-class calibration groups and second-class calibration groups respectively at intervals of N, (N+1) and the like, wherein each of the first-class calibration groups and the second-class calibration groups comprises two non-adjacent lasers which are respectively used as a calibration laser and a target laser;
sequentially controlling lasers in all the first type calibration groups and all the second type calibration groups to perform calibration operation, wherein projections of the scanned areas of the two adjacent calibration groups in the laser scanning direction are not overlapped; the calibration operation includes: the method comprises the steps of controlling a calibration laser and a target laser to expose pixel points on a photosensitive coating at equal intervals of a space S1 and a space S2 along a laser scanning direction respectively, so that the pixel points exposed by the laser in each calibration group form a main ruler linear array and an auxiliary ruler linear array in adjacent or partially overlapped areas of the photosensitive coating, wherein the main ruler linear array and the auxiliary ruler linear array respectively comprise a plurality of line segments which are perpendicular to the laser scanning direction and have equal intervals, the space is S1 and S2 respectively, and S1 is larger than S2; when the target laser calibrates a plurality of calibration points on a target line segment L1, recording a plurality of points synchronously calibrated by the corresponding calibration laser in the first area to form a line segment L0 in the main scale linear array, determining a line segment L2 which is aligned with any line segment of the main scale linear array first in the auxiliary scale linear array along the laser scanning direction, and recording a distance D1 between the L2 and the L0 and a distance D2 between the L2 and the L1;
according to P i = |d 1-D2| and Q i Respectively calculating offset P of a target laser in a first calibration group and the spot center of the calibration laser in the laser scanning direction by using = |D1-D2| i And the offset Q of the target laser in each second type calibration group and the spot center of the calibration laser in the laser scanning direction i ；
According to formula T i ＝∣Q i -P i Calculating the offset of the spot center of the adjacent laser in the laser scanning direction, wherein T i I is a positive integer greater than n+1.
Optionally, as a possible implementation manner, in an embodiment of the present application, recording the distance D1 between the L2 and the L0 may include:
sequentially establishing a mapping relation between a group of numerical values in an arithmetic sequence with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in a main scale linear array;
determining a line segment L3 nearest to the L1 in the main scale linear array along the direction opposite to the laser scanning direction;
obtaining mapping values X0 and X3 of the L0 and the L3 according to the mapping relation;
and determining the number N of S2 of the interval between the L2 and the L1, wherein d1=x3-x0+N is equal to S1.
Optionally, as a possible implementation manner, in an embodiment of the present application, recording the distance D1 between the L2 and the L0 may include:
sequentially establishing a mapping relation between a group of numerical values in an arithmetic sequence with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in a main scale linear array;
and obtaining mapping values X0 and X2 of the L0 and the L2 according to the mapping relation, and then D1=X2-X0.
Optionally, as a possible implementation manner, in an embodiment of the present application, recording the distance D2 between the L2 and the L1 may include:
and determining the number N of S2 of the interval between the L2 and the L1, wherein d2=n×s2.
A second aspect of the present application provides a laser spot offset detection system in a laser array, which may include:
the combination module is used for dividing lasers in the laser array into a plurality of first-class calibration groups and second-class calibration groups respectively at intervals of N, (N+1) and the like, wherein each of the first-class calibration groups and the second-class calibration groups comprises two non-adjacent lasers which are respectively used as a calibration laser and a target laser;
the control module is used for sequentially controlling all the lasers in the first type calibration group and all the lasers in the second type calibration group to perform calibration operation, and the projections of the scanned areas of the two adjacent calibration groups in the laser scanning direction are not overlapped; the calibration operation includes: the method comprises the steps of controlling a calibration laser and a target laser to expose pixel points on a photosensitive coating at equal intervals of a space S1 and a space S2 along a laser scanning direction respectively, so that the pixel points exposed by the laser in each calibration group form a main ruler linear array and an auxiliary ruler linear array in adjacent or partially overlapped areas of the photosensitive coating, wherein the main ruler linear array and the auxiliary ruler linear array respectively comprise a plurality of line segments which are perpendicular to the laser scanning direction and have equal intervals, the space is S1 and S2 respectively, and S1 is larger than S2; when the target laser calibrates a plurality of calibration points on a target line segment L1, recording a plurality of points synchronously calibrated by the corresponding calibration laser in the first area to form a line segment L0 in the main scale linear array, determining a line segment L2 which is aligned with any line segment of the main scale linear array first in the auxiliary scale linear array along the laser scanning direction, and recording a distance D1 between the L2 and the L0 and a distance D2 between the L2 and the L1;
a first calculation module according to P i = |d 1-D2| and Q i Respectively calculating offset P of a target laser in a first calibration group and the spot center of the calibration laser in the laser scanning direction by using = |D1-D2| i And the offset Q of the target laser in each second type calibration group and the spot center of the calibration laser in the laser scanning direction i ；
The second calculation module is used for calculating the second calculation module according to the formula T i ＝∣Q i -P i Calculating the offset of the spot center of the adjacent laser in the laser scanning direction, wherein T i I is a positive integer greater than n+1.
Alternatively, as a possible implementation manner, the control module may include:
the first processing unit establishes a mapping relation between a group of numerical values in an arithmetic series with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in the main ruler linear array in sequence;
a second processing unit for determining a line segment L3 nearest to the L1 in the main scale linear array along the direction opposite to the laser scanning direction;
the third processing unit acquires mapping values X0 and X3 of the L0 and the L3 according to the mapping relation;
and a fourth processing unit configured to determine the number N of S2 spaced between the L2 and the L1, and d1=x3—x0+n×s1.
Alternatively, as a possible implementation manner, the control module may include:
the fifth processing unit establishes a mapping relation between a group of numerical values in an arithmetic series with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in the main ruler linear array in sequence;
and a sixth processing unit, configured to obtain mapping values X0 and X2 of the L0 and the L2 according to the mapping relationship, where d1=x2—x0.
Optionally, as a possible implementation manner, the control module may further include:
and a determining unit configured to determine d2=n×s2 when the number N of S2 in the interval between L2 and L1 is determined.
A third aspect of the embodiments of the present application provides a computer apparatus comprising a processor for implementing the steps as in any one of the possible implementations of the first aspect and the first aspect when executing a computer program stored in a memory.
A fourth aspect of the embodiments of the present application provides a computer readable storage medium having stored thereon a computer program which when executed by a processor performs steps as in any one of the possible implementations of the first aspect and the first aspect.
From the above technical solutions, the embodiment of the present application has the following advantages:
in the embodiment of the application, lasers in a laser array are grouped into two types of calibration groups with different interval numbers, all the first type calibration groups and all the second type calibration groups are sequentially controlled to perform calibration operation in a region where the lasers in the first type calibration groups and the second type calibration groups are not overlapped in the horizontal direction, so that the offset in the horizontal direction between the two types of lasers with different intervals is obtained, and then the offset in the horizontal direction between the adjacent lasers is obtained through iterative calculation. In the detection method provided by the embodiment of the application, the detection precision of the offset is the difference value of the interval distance of the scanning calibration of the two lasers, and the precision of the difference value of the interval distance can reach the pixel level, so that the detection precision is greatly improved. In addition, the distance between the calibration laser and the target laser is increased, the horizontal direction of the same length is divided into a plurality of scattered non-overlapping scanning areas, so that the scanning patterns of adjacent calibration groups of the same type are not overlapped, the identifiable degree of laser scanning marks is improved, the detection precision is increased, the scanning breadth required by calibration is reduced, and photoresist consumables are saved.
Drawings
FIG. 1 is a schematic diagram of an embodiment of a method for detecting a laser spot offset in a laser array according to an embodiment of the present application;
FIG. 2 is a schematic distribution diagram of a main ruler linear array and an auxiliary ruler linear array formed by a first type of calibration set in an embodiment of the application;
fig. 3 is a schematic diagram of an embodiment of a computer device according to an embodiment of the application.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
The terms first, second, third, fourth and the like in the description and in the claims and in the above drawings are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments described herein may be implemented in other sequences than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In the description of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more. Unless specifically stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements.
For easy understanding, a laser array in an application scenario of the embodiment of the present application is described first, where the laser array includes at least 3 lasers with fixed relative positions. The laser devices of the laser array are arranged in a non-overlapping manner along the vertical projection point of the vertical direction (namely, the projection point of the laser spot in the vertical direction is required to ensure that the scanning traces of the laser spot in the vertical direction are not overlapped), and the labels are sequentially ordered. In the embodiment of the present application, the horizontal direction refers to a direction parallel to the pixel row of the image to be formed on the exposure surface or a plane parallel to the exposure surface, and the vertical direction refers to a direction perpendicular to the selected horizontal direction on the exposure surface or a plane parallel to the exposure surface. The laser scanning direction is a direction parallel to the horizontal direction.
It should be noted that, in the present application, the spot center of the laser is defined for convenience of description, which may be the position of the spot of the laser that can be uniquely calibrated, for example, the center of a circle of a circular spot, the center of gravity of an irregular pattern spot, or the midpoint of an overlapping portion of a spot image and a preset straight line, etc., and only needs to ensure that the standards for determining the center of each spot remain consistent, which is not limited in this specific embodiment.
Referring to fig. 1, an embodiment of a method for detecting a laser spot offset in a laser array according to an embodiment of the present application may include:
s101: the lasers in the laser array are divided into a plurality of first-class calibration groups and second-class calibration groups by N, (N+1) equal interval pairwise combinations, and each of the first-class calibration groups and the second-class calibration groups comprises two non-adjacent lasers which are respectively used for calibrating the lasers and the target lasers.
The applicant has noted that to increase the efficiency of laser imaging, the spacing between adjacent lasers in a laser array is often designed to be very small, on the order of about 1 mm, and the scan marks of adjacent lasers are not easily discernable and identifiable. In order to improve the identification degree of laser scanning traces, the applicant proposes to measure the offset of a laser spot in the horizontal direction by adopting two lasers which are mutually spaced to scan and expose to form a specific multi-line segment array, so that the distance between a calibration laser and a target laser is increased. When the laser array comprises more than 3 lasers with fixed relative positions, the lasers can be divided into a plurality of first-type calibration groups and second-type calibration groups at intervals of N, (N+1) and the like, and each calibration group comprises a calibration laser and a target laser. When N is a positive integer, for example, when N is 1, the lasers 1 and 3, 2 and 4, and 3 and 5 may be grouped, and all lasers are grouped by analogy to form each first class calibration group, and meanwhile, the lasers 1 and 4, 2 and 5, and 3 and 6 are grouped, and all lasers are grouped by analogy to form each second class calibration group.
S102: and sequentially controlling all the lasers in the first type calibration group and all the lasers in the second type calibration group to perform calibration operation, wherein projections of the scanned areas of the two adjacent calibration groups in the laser scanning direction are not overlapped.
After grouping, all the lasers in the first type calibration group and all the lasers in the second type calibration group can be controlled in sequence to perform calibration operation. In order to avoid confusion of scanning traces of two adjacent calibration groups, the projections of the scanned areas of the two adjacent calibration groups in the laser scanning direction can be controlled to be non-overlapping. As shown in fig. 2, adjacent calibration groups 1 (No. 1, no. 3) and 2 (No. 2, no. 4) of the first calibration group do not overlap in the horizontal direction, while the interval calibration groups 1 (No. 1 and 3) and 3 (No. 3 and 5) can be projected to overlap in the horizontal direction and do not overlap in the vertical direction. It should be noted that, in the above example, only the scanning traces of the calibration groups 1 and 2 are distributed in the non-overlapping area with the same length, in practical application, more scanning traces of the calibration groups may be distributed in the horizontal direction with the same length, for example, the scanning traces of adjacent 3, 4 or more calibration groups may be distributed in the horizontal direction with the same length, which is not limited in this embodiment.
The specific calibration operation of each calibration group (first-type calibration group and second-type calibration group) can comprise: controlling the calibration lasers and the target lasers to expose pixel points on the photosensitive coating at equal intervals of a spacing S1 and a spacing S2 along the laser scanning direction (X direction shown in figure 2) respectively, so that the pixel points exposed by the lasers in each calibration group (a first calibration group and a second calibration group) form a main scale linear array and an auxiliary scale linear array in adjacent or partially overlapped areas of the photosensitive coating, wherein the main scale linear array and the auxiliary scale linear array respectively comprise a plurality of line segments perpendicular to the laser scanning direction and at equal intervals, the spacing is S1 and S2 respectively, and S1 is larger than S2; when the target laser calibrates a plurality of calibration points on the target line segment L1, a plurality of points synchronously calibrated in a first area by the corresponding calibration laser are recorded to form a line segment L0 in the main scale linear array, a line segment L2 which is aligned with any line segment of the main scale linear array first in the auxiliary scale linear array is determined along the laser scanning direction, and a distance D1 between the L2 and the L0 and a distance D2 between the L2 and the L1 are recorded. The first type calibration group and the second type calibration group respectively form an image containing a main ruler linear array and an auxiliary ruler linear array.
Illustratively, as a possible implementation, recording the distance D1 between L2 and L0 includes: sequentially establishing a mapping relation between a group of numerical values in an arithmetic sequence with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in the main ruler linear array; determining a line segment L3 nearest to L1 in the main scale linear array along the direction opposite to the laser scanning direction; obtaining mapping values X0 and X3 of L0 and L3 according to the mapping relation; when the number N of S2 at the interval between L2 and L1 is determined, d1=x3—x0+n×s1, d2=n×s2, and t= |d1-d2|= |x3—x0+ (S1-S2) ×n|. Referring to fig. 2, taking an image formed by the first calibration set as an example, in the left side of fig. 2 (the linear array formed by the lasers No. 1 and No. 3), s1=6, s2=5, x3=x0=18, d1=x3-x0+n×s1=18-18+4×6=24, d2=n×s2= 4*5 =20, t=4, and the spot center of the target laser advances by 4 pixel distances along the laser scanning direction; on the right side of fig. 2 (the linear array formed by lasers No. 2 and No. 4), s1=6, s2=5, x3=12, x0=18, d1=12-18+2×6=6, d2=n×s2= 2*5 =10, t= |6-10|=4, and the spot center of the target laser is 4 pixel distances after the laser scanning direction.
Illustratively, as a possible implementation, recording the distance D1 between L2 and L0 includes: and sequentially establishing a mapping relation between a group of numerical values in an arithmetic series with the initial value of zero and the tolerance of S1 and each line segment arranged along the laser scanning direction in the main scale linear array, acquiring mapping values X0 and X2 of L0 and L2 according to the mapping relation, determining the number N of S2 at intervals between L2 and L1, and determining the offset T= D1-D2 of the spot center of the target laser relative to the spot center of the calibration laser in the laser scanning direction, wherein D1 = X2-X0-N = S2. Taking the image formed by the first calibration group as an example, in the left side of fig. 2 (the linear array formed by the lasers No. 1 and No. 3), s1=6, s2=5, d1=x2-x0=42-18=24, d2=n×s2= 4*5 =20, p=24-20=4, and the spot center of the target laser is advanced by 4 pixel distances along the laser scanning direction; on the right side of fig. 2 (the formed linear array of lasers No. 2 and No. 4), s1=6, s2=5, d1=24-18=6, d2= 2*5 =10, t= |6-10|=4, and the spot center of the target laser is 4 pixels distance after the laser scanning direction.
S103: according to P i = |d 1-D2| and Q i Calculating offset P of spot centers of target lasers and calibration lasers in the first calibration group in the laser scanning direction respectively by using = |D 1-D2| i And the offset Q of the target laser and the spot center of the calibration laser in the laser scanning direction in each second type calibration group i 。
After the D1 and D2 values in each class calibration group are obtained, the method is carried out according to P i = |d 1-D2| and Q i = |d 1-D2| calculate the offset P of each calibration set of the first type respectively i And the offset Q of each second class of calibration groups i . Where i in the formula herein is a positive integer.
S104: and calculating the offset of the spot centers of the adjacent lasers in the laser scanning direction according to the formula Ti= -Qi-Pi.
After the offset Pi of the first calibration group and the offset Qi of the respective second calibration group are obtained, the method is performed according to the formula T i The offset of the spot centers of adjacent lasers in the laser scanning direction is calculated by = |qi-pi|. Wherein, here, formula T i I is a positive integer greater than n+1, identifying the offset between adjacent lasers in the horizontal direction.
Exemplary, known P i (X3-X1), (X4-X2),(X5-X3), (X6-X4), (X7-X5), (X8-X6); known Q i (X4-X1), (X5-X2), (X6-X3), (X7-X4), (X8-X5), (X9-X6), then the following can be obtained:
T 3 ＝Q 3 -P 3 ＝(X4-X1)-(X3-X1)；
T 4 ＝Q 4 -P 4 ＝(X5-X2)-(X4-X2)；
T 5 ＝Q 5 -P 5 ＝(X6-X3)-(X5-X3)；
T 6 ＝Q 6 -P 6 ＝(X7-X4)-(X6-X4)；
T 7 ＝Q 7 -P 7 ＝(X8-X5)-(X7-X5)；
T 8 ＝Q 8 -P 8 = (X9-X6) - (X8-X6); and so on to get more offsets T i 。
Wherein, formula T i Where i is not greater than n+1, the corresponding value may be calculated according to finite polynomial addition and subtraction, e.g., T 1 ＝(X2-X1)＝(X3-X1)-(X3-X2)；T 2 ＝(X3-X2)＝(X3-X1)-(X4-X1)+(X4-X2)。
As can be seen from the above disclosure, in the embodiment of the present application, the lasers in the laser array are grouped into two types of calibration groups with different interval numbers, and all the first type of calibration groups and all the second type of calibration groups are sequentially controlled to perform calibration operations in the areas where the lasers in the first type of calibration groups and the second type of calibration groups do not overlap in the horizontal direction, so as to obtain the offset in the horizontal direction between the two types of lasers with different intervals, and further obtain the offset in the horizontal direction between the adjacent lasers through iterative calculation. In the detection method provided by the embodiment of the application, the detection precision of the offset is the difference value of the interval distance of the scanning calibration of the two lasers, and the precision of the difference value of the interval distance can reach the pixel level, so that the detection precision is greatly improved. In addition, the non-overlapping scanning areas of a plurality of adjacent calibration groups are divided in the horizontal direction of the same length, so that the scanning patterns of the adjacent calibration groups are projected in the horizontal direction and are not overlapped, the identifiable degree of laser scanning marks is improved, the detection precision is increased, the scanning breadth required by calibration is reduced, and photoresist consumables are saved.
It should be understood that, in various embodiments of the present application, the sequence number of each step is not meant to indicate the order of execution, and the order of execution of each step should be determined by its functions and internal logic, and should not be construed as limiting the implementation process of the embodiments of the present application.
The embodiment of the application also provides a laser spot offset detection system in the laser array, which can comprise:
the combination module is used for dividing lasers in the laser array into a plurality of first-class calibration groups and second-class calibration groups respectively at intervals of N, (N+1) and the like, wherein each first-class calibration group and each second-class calibration group comprises two non-adjacent lasers which are respectively used as a calibration laser and a target laser;
the control module is used for sequentially controlling all the lasers in the first type calibration group and all the lasers in the second type calibration group to perform calibration operation, and the projections of the scanned areas of the two adjacent calibration groups in the laser scanning direction are not overlapped; the calibration operation comprises the following steps: the method comprises the steps of controlling a calibration laser and a target laser to expose pixel points on a photosensitive coating at equal intervals of an interval S1 and an interval S2 along a laser scanning direction respectively, so that a main ruler linear array and an auxiliary ruler linear array are formed in adjacent or partially overlapped areas of the photosensitive coating by the pixel points exposed by the lasers in each calibration group, wherein the main ruler linear array and the auxiliary ruler linear array respectively comprise a plurality of line segments which are perpendicular to the laser scanning direction and have equal intervals S1 and S2, and the interval S1 is larger than S2; when a target laser calibrates a plurality of calibration points on a target line segment L1, recording a plurality of points synchronously calibrated by the corresponding calibration laser in a first area to form a line segment L0 in a main scale linear array, determining a line segment L2 aligned with any line segment of the main scale linear array first in an auxiliary scale linear array along a laser scanning direction, and recording a distance D1 between L2 and L0 and a distance D2 between L2 and L1;
a first calculation module according to P i = |d 1-D2| and Q i Calculating offset P of spot centers of target lasers and calibration lasers in the first calibration group in the laser scanning direction respectively by using = |D 1-D2| i And target lasers and targets in each second class of calibration setDetermining the offset Q of the spot center of the laser in the laser scanning direction i ；
The second calculation module is used for calculating the second calculation module according to the formula T i ＝∣Q i -P i Calculating the offset of the spot center of the adjacent laser in the laser scanning direction, wherein T i I is a positive integer greater than n+1.
Alternatively, as a possible implementation, the control module may include:
the first processing unit establishes a mapping relation between a group of numerical values in an arithmetic series with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in the main ruler linear array in sequence;
the second processing unit is used for determining a line segment L3 closest to the L1 in the main scale linear array along the direction opposite to the laser scanning direction;
the third processing unit acquires mapping values X0 and X3 of L0 and L3 according to the mapping relation;
and a fourth processing unit for determining the number N of S2 of the interval between L2 and L1, d1=x3—x0+n×s1.
Alternatively, as a possible implementation, the control module may include:
the fifth processing unit establishes a mapping relation between a group of numerical values in an arithmetic series with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in the main ruler linear array in sequence;
and a sixth processing unit for obtaining mapping values X0 and X2 of L0 and L2 according to the mapping relationship, wherein d1=x2-X0.
Optionally, as a possible implementation manner, the control module may further include:
and a determining unit configured to determine the number N of S2 of the interval between L2 and L1, where d2=n×s2.
It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the above-described systems, apparatuses and units may refer to corresponding procedures in the foregoing method embodiments, which are not repeated herein.
The laser spot offset detection system in the laser array according to the embodiment of the present application is described above from the point of view of the modularized functional entity, please refer to fig. 3, and the following describes the computer device according to the embodiment of the present application from the point of view of hardware processing:
the computer device 1 may include a memory 11, a processor 12, and an input-output bus 13. The steps in the method embodiment shown in fig. 1 described above, such as steps 101 to 104 shown in fig. 1, are implemented when the processor 11 executes a computer program. In the alternative, the processor may implement the functions of the modules or units in the above-described embodiments of the apparatus when executing the computer program.
The memory 11 includes at least one type of readable storage medium including flash memory, a hard disk, a multimedia card, a card type memory (e.g., SD or DX memory, etc.), a magnetic memory, a magnetic disk, an optical disk, etc. The memory 11 may in some embodiments be an internal storage unit of the computer device 1, such as a hard disk of the computer device 1. The memory 11 may also be an external storage device of the computer apparatus 1 in other embodiments, such as a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) Card, a Flash memory Card (Flash Card) or the like, which are provided on the computer apparatus 1. Further, the memory 11 may also include both an internal storage unit and an external storage device of the computer apparatus 1. The memory 11 may be used not only for storing application software installed in the computer apparatus 1 and various types of data, such as code of a computer program, but also for temporarily storing data that has been output or is to be output.
The processor 12 may in some embodiments be a central processing unit (Central Processing Unit, CPU), controller, microcontroller, microprocessor or other data processing chip for running program code or processing data stored in the memory 11, e.g. executing computer programs or the like.
The input/output bus 13 may be a peripheral component interconnect standard (peripheral component interconnect, PCI) bus, or an extended industry standard architecture (extended industry standard architecture, EISA) bus, among others. The bus may be classified as an address bus, a data bus, a control bus, etc.
Further, the computer apparatus may also comprise a wired or wireless network interface 14, and the network interface 14 may optionally comprise a wired interface and/or a wireless interface (e.g. WI-FI interface, bluetooth interface, etc.), typically used to establish a communication connection between the computer apparatus 1 and other electronic devices.
Optionally, the computer device 1 may further comprise a user interface, which may comprise a Display (Display), an input unit such as a Keyboard (Keyboard), and optionally a standard wired interface, a wireless interface. Alternatively, in some embodiments, the display may be an LED display, a liquid crystal display, a touch-sensitive liquid crystal display, an OLED (Organic Light-Emitting Diode) touch, or the like. The display may also be referred to as a display screen or display unit, as appropriate, for displaying information processed in the computer device 1 and for displaying a visual user interface.
Fig. 3 shows only a computer device 1 with components 11-14 and a computer program, it being understood by a person skilled in the art that the structure shown in fig. 3 does not constitute a limitation of the computer device 1, and may comprise fewer or more components than shown, or may combine certain components, or a different arrangement of components.
The present application also provides a computer readable storage medium having a computer program stored thereon, which, when executed by a processor, can implement steps in an embodiment of a method as shown in fig. 1, such as steps 101 to 104 shown in fig. 1. In the alternative, the processor may implement the functions of the modules or units in the above-described embodiments of the apparatus when executing the computer program.
In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. For example, the apparatus embodiments described above are merely illustrative, e.g., the division of the units is merely a logical function division, and there may be additional divisions when actually implemented, e.g., multiple units or components may be combined or integrated into another system, or some features may be omitted or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be an indirect coupling or communication connection via some interfaces, devices or units, which may be in electrical, mechanical or other form.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units.
The integrated units, if implemented in the form of software functional units and sold or used as stand-alone products, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present application may be embodied essentially or in part or all of the technical solution or in part in the form of a software product stored in a storage medium, including instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
The above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims (10)
1. The method for detecting the laser spot offset in the laser array is characterized in that the laser array comprises at least three lasers with fixed relative positions, and the method comprises the following steps:
dividing lasers in the laser array into a plurality of first-class calibration groups and second-class calibration groups respectively at intervals of N, (N+1) and the like, wherein each of the first-class calibration groups and the second-class calibration groups comprises two non-adjacent lasers which are respectively used as a calibration laser and a target laser;
sequentially controlling lasers in all the first type calibration groups and all the second type calibration groups to perform calibration operation, wherein projections of the scanned areas of the two adjacent calibration groups in the laser scanning direction are not overlapped; the calibration operation includes: the method comprises the steps of controlling a calibration laser and a target laser to expose pixel points on a photosensitive coating at equal intervals of a space S1 and a space S2 along a laser scanning direction respectively, so that the pixel points exposed by the laser in each calibration group form a main ruler linear array and an auxiliary ruler linear array in adjacent or partially overlapped areas of the photosensitive coating, wherein the main ruler linear array and the auxiliary ruler linear array respectively comprise a plurality of line segments which are perpendicular to the laser scanning direction and have equal intervals, the space is S1 and S2 respectively, and S1 is larger than S2; when the target laser calibrates a plurality of calibration points on a target line segment L1, recording a plurality of points synchronously calibrated by the corresponding calibration laser in the first area to form a line segment L0 in the main scale linear array, determining a line segment L2 which is aligned with any line segment of the main scale linear array first in the auxiliary scale linear array along the laser scanning direction, and recording a distance D1 between the L2 and the L0 and a distance D2 between the L2 and the L1;
according to P i = |d 1-D2| and Q i = |d 1-D2| calculate the target lasers and the target lasers in the first calibration set respectivelyOffset P of the spot center of the calibration laser in the laser scanning direction i And the offset Q of the target laser in each second type calibration group and the spot center of the calibration laser in the laser scanning direction i ；
According to formula T i ＝∣Q i -P i Calculating the offset of the spot center of the adjacent laser in the laser scanning direction, wherein T i I is a positive integer greater than n+1.
2. The method of claim 1, wherein recording the distance D1 between the L2 and the L0 comprises:
sequentially establishing a mapping relation between a group of numerical values in an arithmetic sequence with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in a main scale linear array;
determining a line segment L3 nearest to the L1 in the main scale linear array along the direction opposite to the laser scanning direction;
obtaining mapping values X0 and X3 of the L0 and the L3 according to the mapping relation;
and determining the number N of S2 of the interval between the L2 and the L1, wherein d1=x3-x0+N is equal to S1.
3. The method of claim 2, wherein recording the distance D1 between the L2 and the L0 comprises:
sequentially establishing a mapping relation between a group of numerical values in an arithmetic sequence with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in a main scale linear array;
and obtaining mapping values X0 and X2 of the L0 and the L2 according to the mapping relation, and then D1=X2-X0.
4. A method according to claim 2 or 3, wherein recording the distance D2 between the L2 and the L1 comprises:
and determining the number N of S2 of the interval between the L2 and the L1, wherein d2=n×s2.
5. A laser spot offset detection system in a laser array, comprising:
the combination module is used for dividing lasers in the laser array into a plurality of first-class calibration groups and second-class calibration groups respectively at intervals of N, (N+1) and the like, wherein each of the first-class calibration groups and the second-class calibration groups comprises two non-adjacent lasers which are respectively used as a calibration laser and a target laser;
the control module is used for sequentially controlling all the lasers in the first type calibration group and all the lasers in the second type calibration group to perform calibration operation, and the projections of the scanned areas of the two adjacent calibration groups in the laser scanning direction are not overlapped; the calibration operation includes: the method comprises the steps of controlling a calibration laser and a target laser to expose pixel points on a photosensitive coating at equal intervals of a space S1 and a space S2 along a laser scanning direction respectively, so that the pixel points exposed by the laser in each calibration group form a main ruler linear array and an auxiliary ruler linear array in adjacent or partially overlapped areas of the photosensitive coating, wherein the main ruler linear array and the auxiliary ruler linear array respectively comprise a plurality of line segments which are perpendicular to the laser scanning direction and have equal intervals, the space is S1 and S2 respectively, and S1 is larger than S2; when the target laser calibrates a plurality of calibration points on a target line segment L1, recording a plurality of points synchronously calibrated by the corresponding calibration laser in the first area to form a line segment L0 in the main scale linear array, determining a line segment L2 which is aligned with any line segment of the main scale linear array first in the auxiliary scale linear array along the laser scanning direction, and recording a distance D1 between the L2 and the L0 and a distance D2 between the L2 and the L1;
a first calculation module according to P i = |d 1-D2| and Q i Respectively calculating offset P of a target laser in a first calibration group and the spot center of the calibration laser in the laser scanning direction by using = |D1-D2| i And the offset Q of the target laser in each second type calibration group and the spot center of the calibration laser in the laser scanning direction i ；
The second calculation module is used for calculating the second calculation module according to the formula T i ＝∣Q i -P i Calculating the offset of the spot center of the adjacent laser in the laser scanning direction, wherein T i I is a positive integer greater than n+1.
6. The system of claim 5, wherein the control module comprises:
the first processing unit establishes a mapping relation between a group of numerical values in an arithmetic series with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in the main ruler linear array in sequence;
a second processing unit for determining a line segment L3 nearest to the L1 in the main scale linear array along the direction opposite to the laser scanning direction;
the third processing unit acquires mapping values X0 and X3 of the L0 and the L3 according to the mapping relation;
and a fourth processing unit configured to determine the number N of S2 spaced between the L2 and the L1, and d1=x3—x0+n×s1.
7. The system of claim 6, wherein the control module comprises:
the fifth processing unit establishes a mapping relation between a group of numerical values in an arithmetic series with an initial value of zero and a tolerance of S1 and each line segment arranged along the laser scanning direction in the main ruler linear array in sequence;
and a sixth processing unit, configured to obtain mapping values X0 and X2 of the L0 and the L2 according to the mapping relationship, where d1=x2—x0.
8. The system of claim 6 or 7, wherein the control module further comprises:
and a determining unit configured to determine d2=n×s2 when the number N of S2 in the interval between L2 and L1 is determined.
9. A computer device, characterized in that it comprises a processor for implementing the method according to any one of claims 1 to 4 when executing a computer program stored in a memory.
10. A computer-readable storage medium having stored thereon a computer program, characterized by: the computer program implementing the method according to any of claims 1 to 4 when executed by a processor.
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| CN202310945455.XA CN116973081A (en) | 2023-07-28 | 2023-07-28 | Method, system and related equipment for detecting laser spot offset in laser array |
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