CN116970920A - Grid type ion source device for vacuum coating - Google Patents

Abstract

The invention discloses a grid type ion source device for vacuum coating, which relates to the technical field of vacuum coating and comprises a device body, a sealing device and an induction device, wherein a cover door is rotatably arranged on the surface of the device body, the sealing device comprises a fixed plate, a fixed frame, a clamping block, a sealing plate, a fixed rod, a trapezoid block, a fixed block and a limiting rod, when the trapezoid block moves downwards, the inclined surface of the trapezoid block is contacted with the limiting rod, when the trapezoid block moves downwards, the trapezoid block can push the limiting rod to move leftwards, when the limiting rod moves leftwards, the clamping block can be limited to move upwards, the fixed plate and the fixed frame are fixedly arranged at the top of the device body, the clamping block penetrates through the fixed plate in a sliding mode, the sealing plate is slidably arranged inside the fixed frame, and the fixed rod is fixedly arranged at the top of the sealing plate.

Description

Grid type ion source device for vacuum coating

Technical Field

The invention relates to the technical field of vacuum coating, in particular to a grid type ion source device for vacuum coating.

Background

Vacuum coating is a technique of coating a material in the form of a thin film on the surface of an object. It is usually carried out under vacuum to avoid chemical reactions with other substances in the air.

Patent publication number CN219032332U relates to a grid type ion source device for vacuum coating, relates to vacuum coating equipment technical field, including grid type ion source device main part, the front fixed mounting of grid type ion source device main part has control panel, the upper end fixed mounting of grid type ion source device main part has the support frame, and the upper end fixed mounting of support frame has first support diaphragm, the right-hand member fixed mounting of grid type ion source device main part has the ejection of compact valve port, the lower extreme fixed mounting of grid type ion source device main part has the supporting leg. This patent is through setting up of second support diaphragm and sealing rubber element, can clear up the in-process that reciprocates the inner wall to make things convenient for the use of next time, in addition play the effect of supporting the material of coating film at the in-process of coating film, according to telescopic link, spring element and support base's setting, can play the effect of supporting the diaphragm to the second support in the in-process of using, conveniently carry out the coating film to inside article.

In the above-mentioned patent, the in-process of coating film plays the effect of supporting the material of coating film, according to telescopic link, spring element and support base's setting, can play the effect of supporting the diaphragm to the second in-process of using, conveniently carry out the coating film to inside article, because carry out the coating film needs to carry out the vacuum, can be random when carrying out the vacuum coating film open the door plant can be to the effect of vacuum coating film influence, be difficult to be in the vacuum inside the device and make the restriction door plant open, can open the door plant under the vacuum environment simultaneously can also improve the danger of vacuum coating film.

Therefore, it is necessary to design a grid type ion source device for vacuum coating which improves the safety of vacuum coating by preventing the cover door from being opened in a vacuum state.

Disclosure of Invention

The invention aims to provide a grid type ion source device for vacuum coating, which is used for solving the problems in the background technology.

In order to solve the technical problems, the invention provides the following technical scheme: the utility model provides a grid type ion source device for vacuum coating, includes the device body, still includes sealing device and induction system, wherein, the surface rotation of device body installs the lid door, sealing device includes fixed plate, fixed frame, screens piece, closing plate, dead lever, trapezoidal piece, fixed block and restriction pole, and the inclined plane of trapezoidal piece can be contacted with the restriction pole when trapezoidal piece moves down, and the trapezoidal piece can promote restriction pole left side removal when making trapezoidal piece move down, can restrict screens piece and upwards move when restriction pole moves left side, equal fixed mounting of fixed plate and fixed frame is at the top of device body, screens piece slip runs through the fixed plate, closing plate slidable mounting is in the inside of fixed frame, dead lever fixed mounting is at the top of closing plate, trapezoidal piece fixed mounting is at the surface of dead lever, fixed block fixed mounting is in the inside of fixed frame, restriction pole slip runs through the fixed plate, can't open the lid door under the vacuum condition and has improved vacuum coating's security.

According to the technical scheme, one side of the clamping block, which is close to the cover door, is provided with the inclined plane, a first spring is arranged between the clamping block and the fixed plate, a second spring is arranged between the sealing plate and the fixed frame, a third spring is arranged between the limiting rod and the fixed plate, the clamping block can be driven to reset through the first spring, and the sealing plate can be driven to reset through the second spring.

According to the technical scheme, induction system includes support frame, swinging arms, contact bar, elastic telescopic link, rubber wheel, lug, mounting bracket, control switch and drive block, support frame slidable mounting is at the top of fixed frame, the swinging arms rotates the surface of installing at fixed frame, contact bar slidable mounting is at the top of device body, elastic telescopic link one end is articulated with the support frame, the other end and the swinging arms of elastic telescopic link are articulated, the rubber wheel rotates the surface of installing at the support frame, lug fixed mounting is on the surface of rubber wheel, mounting bracket fixed mounting is on the surface of support frame, control switch fixed mounting is on the surface of mounting bracket, drive block fixed mounting can with the drive block contact and promote drive block and control switch's control end when the lug rotates, and vacuum coating still is in operating condition and can influence vacuum coating's effect when avoiding the inside production of device body to leak.

According to the technical scheme, control switch and device body electric connection, be provided with No. four springs between support frame and the device body, be provided with No. one torsion spring between swinging arms and the fixed frame, can drive the support frame through No. four springs and reset, can drive the swinging arms through No. one torsion spring and reset.

According to the technical scheme, still include breather and remove device, the top of device body is provided with breather, breather includes purification frame, purification board, intake pipe, link, cock plate, push plate and hang plate, purification frame fixed mounting is at the top of device body, purification board fixed mounting is in the inside of purification frame, intake pipe fixed mounting is at the top of purification frame, link slidable mounting is at the top of intake pipe, cock plate fixed mounting is at the surface of link, push plate slidable mounting is at the surface of purification frame, hang plate fixed mounting is at the surface of support frame, and the inclined plane of push plate can promote the link and move to the right side when the push plate upwards moves, avoids the device body to need not in time with the sealed effect that can influence the inside device body of intake pipe.

According to the technical scheme, be provided with No. five springs between link and the intake pipe, the top fixed mounting of intake pipe has electric putter, electric putter's output fixed mounting has the elastic plate, the fixed surface of elastic plate installs the arc piece, the fixed surface of link installs the striking piece, can drive the link through No. five springs and reset, can drive the elastic plate through electric putter and remove to the left side, can drive the arc piece and remove to the left side when the elastic plate removes to the left side, can strike the striking piece when the arc piece removes to the left side, can drive link and chock when making the striking piece receive the striking and produce the vibration, avoid the chock card unable break away from in the inside of intake pipe.

According to the technical scheme, remove device includes sealing rubber, sealing frame, piston plate, gangbar and inserted bar, and the inside gas of sealing frame can be discharged through concave groove, makes sealing frame and sealing rubber inside gas can be discharged, and sealing rubber inside gas discharge can produce the shrink, the surface of lid door is provided with the recess, sealing rubber fixed mounting is in the inside of recess, sealing frame fixed mounting is at the top of device body, piston plate slidable mounting is in the inside of sealing frame, gangbar fixed mounting is on the surface of piston plate, inserted bar fixed mounting is on the surface of piston plate, concave groove has been seted up on the surface of inserted bar, the right side of piston plate is through the inside intercommunication of pipeline and sealing rubber, and the intermittent shrink and the inflation through sealing rubber can improve the effect that the foreign matter breaks away from sealing rubber surface, prevents that the foreign matter adhesion can influence the sealed effect between lid door and the device body.

According to the technical scheme, be provided with No. six springs between piston plate and the sealing frame, the inserted bar slides and runs through the sealing frame, the fixed surface of screens piece installs the bending pole, the fixed surface of bending pole installs the elastic block, can drive the elastic block and remove when the bending pole removes, can strike the gangbar and produce the vibration when the elastic block removes, can transmit to the lid when the gangbar produces the vibration, can further improve the effect that the foreign matter breaks away from on the lid.

Compared with the prior art, the invention has the following beneficial effects:

this a grid type ion source device for vacuum coating can lead to closing plate and dead lever downwardly moving through the inside vacuum of device body, drives trapezoidal piece downwardly moving through the dead lever and can promote the restriction pole and remove to the left side, and the restriction pole removes to the left side and can restrict the screens piece and upwards move, and the screens piece can't upwards move and make the lid can't be opened, avoids the device body to be in the vacuum state when will cover the arbitrary sealed effect that can influence the inside of device body of opening of door, still can reduce vacuum coating's effect simultaneously, can't open the security that has improved vacuum coating through vacuum state lower lid.

This a grid type ion source device for vacuum coating, when the inside production of device body leaks, lead to the inside negative pressure effect of device body can reduce gradually, closing plate and dead lever can upwards move gradually, upwards move through the dead lever and can promote rubber wheel and lug and rotate, can close the inside vacuum coating of device body through the lug rotation, vacuum coating still is in the operating condition and can exert an influence to vacuum coating's effect when avoiding the inside production of device body to leak, can in time discover the inside of device body simultaneously and produce the leakage.

(3) This a grid type ion source device for vacuum coating can advance air inlet to the inside of device body through purifying frame and intake pipe, and the impurity that gets into the inside air of device body can be got rid of to the purification board, avoids outside air directly to get into the inside of device body and leads to having impurity entering device body, and the inclined plate can promote the impeller plate when the support frame removes, and the impeller plate can promote link and cock plate and in time seal the intake pipe, avoids the device body to need not in time with the intake pipe sealed can influence the sealed effect of device body inside when working.

(4) This a grid type ion source device for vacuum coating can pass through the sealed effect between lid door and the device body through sealing rubber, can promote the gangbar when the lid door is closed and remove, the inside sealing rubber that can extrude sealing frame inside when gangbar and piston board remove gets into sealing rubber can produce the inflation, the concave groove is in and can lead to sealing rubber to produce the shrink with the inside gaseous exhaust of sealing frame between the inside outer wall of sealing frame, intermittent type nature shrink and the inflation through sealing rubber can improve the effect that the foreign matter breaks away from sealing rubber surface, prevent that the foreign matter adhesion can influence the sealed effect between lid door and the device body at sealing rubber's surface, the lid door promotes the screens piece and upwards moves the elastic block and can strike the gangbar and produce the vibration simultaneously, thereby can further improve the effect that the foreign matter breaks away from on the lid door.

Drawings

The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic illustration of the sealing rubber and door position of the present invention;

FIG. 3 is a schematic view of the inside of a fixed frame of the present invention;

FIG. 4 is a schematic view of the interior of the purge frame of the present invention;

FIG. 5 is a schematic view of the mounting bracket and control switch positions of the present invention;

FIG. 6 is an enlarged schematic view of portion A of FIG. 3 in accordance with the present invention;

fig. 7 is a schematic view of the inside of the seal frame of the present invention.

In the figure: 1. a device body; 2. a cover door; 31. a fixing plate; 32. a fixed frame; 33. a clamping block; 34. a sealing plate; 35. a fixed rod; 36. a trapezoid block; 37. a fixed block; 38. a restraining bar; 41. a support frame; 42. a swinging rod; 43. a contact lever; 44. an elastic telescopic rod; 45. a rubber wheel; 46. a bump; 47. a mounting frame; 48. a control switch; 49. a transmission block; 51. a purification frame; 52. a purification plate; 53. an air inlet pipe; 54. a connecting frame; 55. a plug plate; 56. a pushing plate; 57. an inclined plate; 61. an electric push rod; 62. an elastic plate; 63. an arc-shaped block; 64. an impact block; 71. sealing rubber; 72. a sealing frame; 73. a piston plate; 74. a linkage rod; 75. a rod; 76. bending the rod; 77. an elastic block.

Description of the embodiments

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Embodiment one:

referring to fig. 1-6, the present embodiment provides: the utility model provides a grid type ion source device for vacuum coating, including device body 1, still include sealing device and induction system, wherein, device body 1's surface rotation installs lid 2, sealing device includes fixed plate 31, fixed frame 32, screens piece 33, closing plate 34, dead lever 35, screens piece 36, fixed block 37 and restriction pole 38, screens piece 33 can restrict and open lid 2, when carrying out the vacuum to device body 1 inside, device body 1's inside atmospheric pressure reduces and can inhale closing plate 34 and move downwards, closing plate 34 moves down and can drive dead lever 35 and move downwards, dead lever 35 moves down and can drive the downward movement of trapezoidal piece 36, trapezoidal piece 36's inclined plane can contact with restriction pole 38 when moving down, make trapezoidal piece 36 can promote restriction pole 38 and move left side when moving down, can restrict screens piece 33 and move up when moving down, fixed plate 31 and fixed frame 32 are all fixed at device body 1's top, screens piece 33 slides and runs through fixed plate 31, 34 sliding mounting is at fixed plate 32 inside fixed plate 35, fixed plate 35 is fixed at fixed plate 35's inside, vacuum coating is unable fixed at fixed frame 31, vacuum coating is fixed in the fixed state is improved.

One side of the clamping block 33, which is close to the cover door 2, is provided with a first spring between the clamping block 33 and the fixed plate 31, a second spring is provided between the sealing plate 34 and the fixed frame 32, a third spring is provided between the limiting rod 38 and the fixed plate 31, the clamping block 33 is driven to reset through the first spring, and the sealing plate 34 is driven to reset through the second spring.

The sensing device comprises a supporting frame 41, a swinging rod 42, a contact rod 43, an elastic telescopic rod 44, a rubber wheel 45, a protruding block 46, a mounting frame 47, a control switch 48 and a transmission block 49, wherein the supporting frame 41 is slidably mounted on the top of the fixed frame 32, the swinging rod 42 is rotatably mounted on the surface of the fixed frame 32, the contact rod 43 is slidably mounted on the top of the device body 1, one end of the elastic telescopic rod 44 is hinged with the supporting frame 41, the other end of the elastic telescopic rod 44 is hinged with the swinging rod 42, the rubber wheel 45 is rotatably mounted on the surface of the supporting frame 41, the protruding block 46 is fixedly mounted on the surface of the rubber wheel 45, the mounting frame 47 is fixedly mounted on the surface of the supporting frame 41, the control switch 48 is fixedly mounted on the surface of the mounting frame 47, the transmission block 49 is fixedly mounted on the control end of the control switch 48, the rubber wheel 45 is driven to rotate when the fixed rod 35 moves upwards, the protruding block 46 is driven to rotate when the rubber wheel 45 rotates, the protruding block 49 is contacted with the transmission block 49 and the control end of the control switch 48 is pushed, and the vacuum coating is still in a working state when the device body 1 is prevented from generating leakage.

The control switch 48 is electrically connected with the device body 1, a fourth spring is arranged between the support frame 41 and the device body 1, a first torsion spring is arranged between the swinging rod 42 and the fixed frame 32, the support frame 41 can be driven to reset through the fourth spring, and the swinging rod 42 can be driven to reset through the first torsion spring.

In the first embodiment, when the cover door 2 is closed, when the cover door 2 contacts with the clamping block 33, the cover door 2 pushes the clamping block 33 to move upwards through the inclined plane of the clamping block 33, when the top of the cover door 2 moves to the right side of the clamping block 33, the clamping block 33 is driven to move downwards through a spring, the cover door 2 is limited to be opened through the clamping block 33, when the vacuum is performed in the device body 1, the internal air pressure of the device body 1 is reduced, the sealing plate 34 is pulled downwards, the fixing rod 35 is driven to move downwards by the downwards movement of the sealing plate 34, the trapezoidal block 36 is driven to move downwards by the downwards movement of the fixing rod 35, the inclined plane of the trapezoidal block 36 is contacted with the limiting rod 38 when the trapezoidal block 36 moves downwards, the trapezoidal block 36 pushes the limiting rod 38 to move leftwards when the trapezoidal block 36 moves downwards, the limiting rod 38 limits the clamping block 33 to move upwards, and the trapezoidal block 33 cannot move upwards, so that the cover door 2 cannot be opened;

the cover door 2 can promote the contact lever 43 when closing the device body 1 and remove, can promote the swinging arms 42 and rotate when the contact lever 43 removes, can pull the elastic telescopic rod 44 when the swinging arms 42 rotate and remove to the left side, the elastic telescopic rod 44 removes to the left side and can pull the support frame 41 to the left side, the support frame 41 removes to the left side and can drive the rubber wheel 45 to remove to the left side, the rubber wheel 45 can contact with the dead lever 35 when removing to the left side, when the inside of the device body 1 leaks, gas can slowly get into the inside of the device body 1, can drive closing plate 34 and dead lever 35 through the spring No. two, can drive the rubber wheel 45 to rotate when the dead lever 35 upwards, can drive lug 46 to rotate when the rubber wheel 45 rotates, can contact with the transmission piece 49 and promote the control end of transmission piece 49 and control switch 48 when the lug 46 rotates, make control switch 48 can close the device body 1 and stop vacuum coating.

Embodiment two:

referring to fig. 1-7, in the first embodiment, the ventilation device and the removing device are further included, the top of the device body 1 is provided with the ventilation device, the ventilation device includes a purification frame 51, a purification plate 52, an air inlet pipe 53, a connecting frame 54, a plug plate 55, a pushing plate 56 and an inclined plate 57, the purification frame 51 is fixedly installed at the top of the device body 1, the purification plate 52 is fixedly installed inside the purification frame 51, the air inlet pipe 53 is fixedly installed at the top of the purification frame 51, the connecting frame 54 is slidably installed at the top of the air inlet pipe 53, the plug plate 55 is fixedly installed on the surface of the connecting frame 54, the pushing plate 56 is slidably installed on the surface of the purification frame 51, the inclined plate 57 is fixedly installed on the surface of the supporting frame 41, the inclined plate 57 is driven to move when the supporting frame 41 moves, the inclined surface of the inclined plate 57 pushes the pushing plate 56 to push upwards when the inclined plate 57 moves, the inclined surface of the pushing plate 56 pushes the connecting frame 54 to move to the right, and the sealing effect of the air inlet pipe 53 is not timely required to be sealed in the device body 1 is avoided.

A fifth spring is arranged between the connecting frame 54 and the air inlet pipe 53, an electric push rod 61 is fixedly arranged at the top of the air inlet pipe 53, an elastic plate 62 is fixedly arranged at the output end of the electric push rod 61, an arc block 63 is fixedly arranged on the surface of the elastic plate 62, an impact block 64 is fixedly arranged on the surface of the connecting frame 54, the connecting frame 54 can be driven to reset through the fifth spring, the elastic plate 62 can be driven to move leftwards through the electric push rod 61, the arc block 63 can be driven to move leftwards when the elastic plate 62 moves leftwards, the impact block 64 can be impacted when the arc block 63 moves leftwards, the connecting frame 54 and the plug block 55 can be driven to vibrate when the impact block 64 is impacted, and the situation that the plug block 55 is blocked in the air inlet pipe 53 and cannot be separated is avoided.

The removing device comprises a sealing rubber 71, a sealing frame 72, a piston plate 73, a linkage rod 74 and an inserting rod 75, wherein expansion can be generated when the air pressure in the sealing rubber 71 is increased, the inserting rod 75 is driven to move when the piston plate 73 moves, the inserting rod 75 can penetrate through the sealing frame 72 when moving, a concave groove is formed in the position between the inner wall and the outer wall of the sealing frame 72 when moving, air in the sealing frame 72 can be discharged through the concave groove, the air in the sealing frame 72 and the sealing rubber 71 can be discharged, shrinkage can be generated when the air in the sealing rubber 71 is discharged, a groove is formed in the surface of the cover door 2, the sealing rubber 71 is fixedly arranged in the groove, the sealing frame 72 is fixedly arranged at the top of the device body 1, the piston plate 73 is slidably arranged in the sealing frame 72, the linkage rod 74 is fixedly arranged on the surface of the piston plate 73, the inserting rod 75 is fixedly arranged on the surface of the piston plate 73, the surface of the inserting rod 75 is provided with the concave groove, the right side of the piston plate 73 is communicated with the inner side of the sealing rubber 71 through a pipeline, the intermittent shrinkage and expansion of the sealing rubber 71 can improve the effect of foreign matter separating from the surface of the sealing rubber 71, and the foreign matter adhering effect can be prevented from affecting between the surface of the sealing door 2 and the sealing door 1.

A sixth spring is arranged between the piston plate 73 and the sealing frame 72, the inserting rod 75 penetrates through the sealing frame 72 in a sliding mode, the bending rod 76 is fixedly arranged on the surface of the clamping block 33, the elastic block 77 is fixedly arranged on the surface of the bending rod 76, the elastic block 77 is driven to move when the bending rod 76 moves, the elastic block 77 can impact the linkage rod 74 to generate vibration when moving, the linkage rod 74 can be transmitted to the cover door 2 when vibrating, and the effect that foreign matters are separated from the cover door 2 can be further improved.

When the second embodiment works, when the inside of the device body 1 is recovered to be normal, the electric push rod 61 drives the elastic plate 62 to move leftwards, the elastic plate 62 drives the arc block 63 to move leftwards when moving leftwards, the arc block 63 impacts the impact block 64 when moving leftwards, the impact block 64 drives the connecting frame 54 and the plug block 55 to vibrate when being impacted, the plug block 55 is prevented from being blocked in the air inlet pipe 53, the elastic plate 62 further drives the connecting frame 54 and the plug block 55 to move leftwards to open the air inlet pipe 53, the inside of the device body 1 can be accessed through the air inlet pipe 53 and the purifying frame 51, foreign matters can be prevented from entering the inside of the device body 1 through the purifying plate 52, when the device body 1 is closed by the cover door 2, the inclined plate 57 is driven to move when the supporting frame 41 moves, the inclined plate 57 is driven by the inclined plane of the inclined plate 57 to push the pushing plate 56 upwards, the inclined plane of the pushing plate 56 is driven by the inclined plane of the pushing plate 56 to move rightwards, and the connecting frame 54 is driven by the plug block 55 to seal the air inlet pipe 53 when the pushing the connecting frame 54 moves rightwards;

when the cover door 2 is closed, the cover door 2 contacts with the linkage rod 74, the linkage rod 74 can be pushed to move by the cover door 2, the piston plate 73 can be driven to move when the linkage rod 74 moves, the air in the sealing frame 72 can be extruded when the piston plate 73 moves, the air in the sealing frame 72 can enter the sealing rubber 71 through a pipeline, the air pressure in the sealing rubber 71 can be increased to expand, the piston plate 73 can drive the inserting rod 75 to move when moving, the inserting rod 75 can penetrate the sealing frame 72 when moving, the concave groove is positioned between the inner wall and the outer wall of the sealing frame 72 when the inserting rod 75 moves, the air in the sealing frame 72 can be discharged through the concave groove, the air in the sealing frame 72 and the air in the sealing rubber 71 can be contracted, meanwhile, the clamping block 33 can drive the bending rod 76 to move when moving, the elastic block 77 can drive the elastic block 77 to move, the elastic block 74 can be impacted to vibrate when the connecting rod 74 vibrates, and the inserting rod 75 can be transmitted to the cover door 2, and therefore the effect that foreign matters are separated from the cover door 2 can be improved.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. The utility model provides a grid type ion source device for vacuum coating, includes device body (1), its characterized in that: the device also comprises a sealing device, an induction device and a removing device; wherein, the surface rotation of device body (1) installs lid (2), sealing device includes fixed plate (31), fixed frame (32), screens piece (33), closing plate (34), dead lever (35), trapezoidal piece (36), fixed block (37) and restriction pole (38), fixed plate (31) and fixed frame (32) all fixed mounting are at the top of device body (1), screens piece (33) slip runs through fixed plate (31), closing plate (34) slidable mounting is in the inside of fixed frame (32), dead lever (35) fixed mounting is at the top of closing plate (34), trapezoidal piece (36) fixed mounting is at the surface of dead lever (35), fixed block (37) fixed mounting is in the inside of fixed frame (32), restriction pole (38) slip runs through fixed plate (31).

2. A grid type ion source apparatus for vacuum coating according to claim 1, wherein: one side of the clamping block (33) close to the cover door (2) is provided with an inclined plane, a first spring is arranged between the clamping block (33) and the fixed plate (31), a second spring is arranged between the sealing plate (34) and the fixed frame (32), and a third spring is arranged between the limiting rod (38) and the fixed plate (31).

3. A grid type ion source apparatus for vacuum coating according to claim 2, wherein: the induction device comprises a support frame (41), a swinging rod (42), a contact rod (43), an elastic telescopic rod (44), a rubber wheel (45), a protruding block (46), a mounting frame (47), a control switch (48) and a transmission block (49), wherein the support frame (41) is slidably mounted on the top of a fixed frame (32), the swinging rod (42) is rotatably mounted on the surface of the fixed frame (32), the contact rod (43) is slidably mounted on the top of a device body (1), one end of the elastic telescopic rod (44) is hinged to the support frame (41), the other end of the elastic telescopic rod (44) is hinged to the swinging rod (42), the rubber wheel (45) is rotatably mounted on the surface of the support frame (41), the protruding block (46) is fixedly mounted on the surface of the rubber wheel (45), the mounting frame (47) is fixedly mounted on the surface of the support frame (41), and the control switch (48) is fixedly mounted on the surface of the mounting frame (47), and the transmission block (49) is fixedly mounted on the control end of the control switch (48).

4. A grid type ion source apparatus for vacuum coating according to claim 3, wherein: the control switch (48) is electrically connected with the device body (1), a fourth spring is arranged between the supporting frame (41) and the device body (1), and a first torsion spring is arranged between the swinging rod (42) and the fixed frame (32).

5. A grid type ion source apparatus for vacuum coating according to claim 4, wherein: the top of device body (1) is provided with breather, and breather includes purification frame (51), purification board (52), intake pipe (53), link (54), cock plate (55), push plate (56) and hang plate (57), purification frame (51) fixed mounting is at the top of device body (1), purification board (52) fixed mounting is at the inside of purification frame (51), intake pipe (53) fixed mounting is at the top of purification frame (51), link (54) slidable mounting is at the top of intake pipe (53), cock plate (55) fixed mounting is at the surface of link (54), push plate (56) slidable mounting is at the surface of purification frame (51), hang plate (57) fixed mounting is at the surface of support frame (41).

6. A grid type ion source apparatus for vacuum coating according to claim 5, wherein: a fifth spring is arranged between the connecting frame (54) and the air inlet pipe (53), an electric push rod (61) is fixedly arranged at the top of the air inlet pipe (53), an elastic plate (62) is fixedly arranged at the output end of the electric push rod (61), an arc-shaped block (63) is fixedly arranged on the surface of the elastic plate (62), and an impact block (64) is fixedly arranged on the surface of the connecting frame (54).

7. A grid type ion source apparatus for vacuum coating according to claim 6, wherein: the removing device comprises sealing rubber (71), a sealing frame (72), a piston plate (73), a linkage rod (74) and an inserting rod (75), wherein a groove is formed in the surface of the cover door (2), the sealing rubber (71) is fixedly installed in the groove, the sealing frame (72) is fixedly installed at the top of the device body (1), the piston plate (73) is slidably installed in the sealing frame (72), the linkage rod (74) is fixedly installed on the surface of the piston plate (73), the inserting rod (75) is fixedly installed on the surface of the piston plate (73), a concave groove is formed in the surface of the inserting rod (75), and the right side of the piston plate (73) is communicated with the inside of the sealing rubber (71) through a pipeline.

8. A grid type ion source apparatus for vacuum coating according to claim 7, wherein: a number six spring is arranged between the piston plate (73) and the sealing frame (72), the inserting rod (75) penetrates through the sealing frame (72) in a sliding mode, a bending rod (76) is fixedly arranged on the surface of the clamping block (33), and an elastic block (77) is fixedly arranged on the surface of the bending rod (76).