CN116954170A - Material handling control method, device, equipment, system and storage medium - Google Patents
Material handling control method, device, equipment, system and storage medium Download PDFInfo
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- CN116954170A CN116954170A CN202310944121.0A CN202310944121A CN116954170A CN 116954170 A CN116954170 A CN 116954170A CN 202310944121 A CN202310944121 A CN 202310944121A CN 116954170 A CN116954170 A CN 116954170A
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- 239000000463 material Substances 0.000 title claims abstract description 344
- 238000000034 method Methods 0.000 title claims abstract description 283
- 238000003860 storage Methods 0.000 title claims abstract description 112
- 238000004519 manufacturing process Methods 0.000 claims abstract description 32
- 238000002360 preparation method Methods 0.000 claims abstract description 15
- 239000000872 buffer Substances 0.000 claims description 39
- 238000012546 transfer Methods 0.000 claims description 23
- 230000033001 locomotion Effects 0.000 claims description 15
- 238000005007 materials handling Methods 0.000 claims description 10
- 238000012544 monitoring process Methods 0.000 claims description 6
- 238000012827 research and development Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 description 17
- 230000006870 function Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 3
- 238000004590 computer program Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 239000012160 loading buffer Substances 0.000 description 3
- 238000013473 artificial intelligence Methods 0.000 description 2
- 238000013528 artificial neural network Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000287196 Asthenes Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32252—Scheduling production, machining, job shop
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The embodiment of the invention discloses a material handling control method, a device, equipment, a system and a storage medium; the method may include: when receiving a feeding preparation instruction sent by process equipment, acquiring a feeding port of the process equipment and material storage state information of a temporary material storage position corresponding to the feeding port; acquiring a conveying time length required by the conveying equipment to execute a conveying task once; corresponding to a single-time manufacture Cheng Shichang of which the conveying time length is longer than that of the process equipment, determining description information of a first conveying command issued in batches according to a material loading port of the process equipment and material storage state information of a material temporary storage position corresponding to the material loading port; and transmitting the description information to the RTD through the MES, so that the RTD generates a corresponding number of first conveying commands in batches and sets the triggering interval duration between the first conveying commands, and then executing material conveying according to the generated first conveying commands and the triggering interval duration through the MES indication MCS.
Description
Technical Field
The embodiment of the invention relates to the technical field of semiconductor manufacturing, in particular to a material handling control method, a device, equipment, a system and a storage medium.
Background
In the field of semiconductor production and manufacturing, such as silicon wafer manufacturing, integrated circuit manufacturing, etc., the process time of many process equipment is relatively short. In order to improve the utilization rate of the equipment, a plurality of temporary storage positions (also called buffer positions) for materials are usually arranged at a feeding port and a discharging port of the equipment, and the required materials are put into the buffer positions in advance to wait for the process equipment to carry out corresponding process processing treatment, so that the time for the process equipment to wait for the materials is shortened.
At present, automatic conveying, feeding and discharging of materials are realized by an automatic production system. In general, taking loading as an example, after a Load Port (Load Port) of a process tool issues a Ready To Load (RTL) instruction, a manufacturing execution system (Manufacturing Execution System, MES) issues a first material handling command To a material control system (Material Control System, MCS). Handling equipment in the MCS, such as automated guided vehicles (Automated Guided Vehicle, AGV) and/or overhead hoist trolleys (Overhead Hoist Transport, OHT), execute a first material handling command to handle material required by the process equipment to the feed opening of the process equipment. After the materials conveyed to the material inlet are conveyed to the temporary storage position, the material inlet of the process equipment sends out an RTL instruction again, and the next material conveying is carried out.
With respect to the above-mentioned currently adopted material handling scheme, if the time period for the handling device to handle the material is longer than the process duration of the process device, after the process device finishes the process processing on the current material, a period of time is required to wait for receiving the next material and performing the process processing. During the waiting time, the process equipment state is in an Idle state. The presence of more Idle states reduces the utilization of process equipment.
Disclosure of Invention
Accordingly, embodiments of the present invention desirably provide a method, apparatus, device, system, and storage medium for material handling control; the number of times that the process equipment is in an idle state can be reduced, and the utilization rate of the process equipment is improved.
The technical scheme of the embodiment of the invention is realized as follows:
in a first aspect, embodiments of the present invention provide a method of material handling control, the method comprising:
when receiving a feeding preparation instruction sent by process equipment, acquiring a feeding port of the process equipment and material storage state information of a temporary material storage position corresponding to the feeding port;
acquiring a conveying time length required by the conveying equipment to execute a conveying task once;
corresponding to a single-time manufacture Cheng Shichang of which the conveying time length is longer than that of the process equipment, determining description information of a first conveying command issued in batches according to a material loading port of the process equipment and material storage state information of a temporary material storage position corresponding to the material loading port; the description information comprises the number of first carrying commands to be issued in batches and the triggering interval duration between the first carrying commands;
And transmitting the description information to a real-time dispatching system RTD through a manufacturing execution system MES, so that the RTD generates a corresponding number of first conveying commands in batches, sets the triggering interval duration between the first conveying commands, and then instructs a material control system MCS to execute material conveying according to the generated first conveying commands and the triggering interval duration through the MES.
In some examples, the conveyance time period required for the conveyance apparatus to perform a conveyance task once includes: the material storage system STK transfers the material to the first time period T1 of the inner side outlet, transfers the material to the second time period T2 of the outer side outlet, moves the carrying equipment to the outer side outlet and loads the material, moves the carrying equipment to the fourth time period T4 of the material loading port of the process equipment EQP from the outer side outlet, transfers the material loaded by the carrying equipment to the fifth time period T5 of the material loading port of the EQP and places the material in the material loading port, and transfers the material placed in the material loading port to the sixth time period T6 of the temporary material storage position.
In some examples, the obtaining the material storage status information of the material inlet of the process equipment and the material temporary storage position corresponding to the material inlet includes:
And determining the material loading port and the material temporary storage position of the process equipment, and the material loading port and the material temporary storage position of the process equipment, which are not loaded with materials, by monitoring the load-bearing sensing signals of the material loading port and the material temporary storage position of the process equipment.
In some examples, determining, according to the material storage status information of the material inlet of the process equipment and the material temporary storage position corresponding to the material inlet, description information of the first handling command to be issued in batches includes:
determining the number of first conveying commands to be issued in batches according to the material storage state information of the temporary material storage positions corresponding to the material inlet of the process equipment;
and acquiring the triggering interval duration between the first conveying commands according to the duration difference between the conveying duration and the single process duration of the process equipment.
In some examples, determining, according to the material storage status information of the material inlet of the process equipment and the material temporary storage position corresponding to the material inlet, description information of the first handling command to be issued in batches includes:
determining the number of first conveying commands to be issued in batches according to the number of material inlets which do not bear materials and the number of temporary material storage positions in the material storage state information;
And acquiring the triggering interval duration between the first conveying commands according to the duration difference between the conveying duration and the single process duration of the process equipment.
In some examples, the acquiring the trigger interval duration between the first handling commands according to the duration difference between the handling duration and the single process duration of the process equipment includes:
the trigger interval is set to 0 corresponding to the conveyance duration being much longer than the single pass Cheng Shichang of the process equipment;
corresponding to the total movement time length of the conveying equipment in the conveying time length being longer than the single-time manufacture Cheng Shichang of the process equipment, determining that the triggering interval is the sum of the time length for transferring the materials loaded by the conveying equipment to the corresponding loading port at the loading port of the process equipment EQP and the time length for transferring the materials placed in the loading port to the buffer position;
determining that the triggering interval is the sum of the time for transferring the material loaded by the carrying equipment to the corresponding feeding port at the feeding port of the process equipment EQP, the time for transferring the material placed in the feeding port to the buffer position and the set time compensation value, corresponding to that the total motion time of the carrying equipment in the carrying time is smaller than the single-time production Cheng Shichang of the process equipment;
The total movement time of the carrying device is the sum of the time when the carrying device moves to the outer outlet and loads materials and the time when the carrying device for carrying the materials moves from the outer outlet to the EQP feeding port.
In some examples, the method further comprises:
when the material at the buffer position of the process equipment is transferred to the process chamber main body of the process equipment, receiving a ready-to-discharge RTU instruction sent by a feed port of the process equipment;
and issuing the RTU instruction to the RTD through the MES, so that the RTD generates a second carrying command according to the RTU instruction, and carrying out material package removal on a material inlet of the process equipment according to the second carrying command through the MES indication MCS.
In a second aspect, embodiments of the present invention provide a materials handling control device, the device comprising: the device comprises a receiving part, a first acquisition part, a second acquisition part, a determination part and a reporting part; wherein,,
the receiving part is configured to receive a feeding preparation instruction sent by the process equipment;
the first obtaining part is configured to obtain material storage state information of a material inlet of the process equipment and a material temporary storage position corresponding to the material inlet when receiving a material preparation instruction sent by the process equipment;
The second acquisition part is configured to acquire the conveying time length required by the conveying equipment to execute the conveying task once;
the determining part is configured to determine, according to the material storage state information of the material temporary storage position corresponding to the material inlet and the material inlet of the process equipment, description information of a first conveying command issued in batches corresponding to the single-time system Cheng Shichang of which the conveying time length is longer than that of the process equipment; the description information comprises the number of first carrying commands to be issued in batches and the triggering interval duration between the first carrying commands;
the reporting part is configured to report the description information to a Manufacturing Execution System (MES), and transmit the description information to a real-time dispatching system (RTD) through the MES, so that the RTD generates a corresponding number of first conveying commands in batches, sets a triggering interval duration between the first conveying commands, and then instructs a Material Control System (MCS) through the MES to execute material conveying according to the generated first conveying commands and the triggering interval duration.
In a third aspect, embodiments of the present invention provide a computing device comprising a processor and a memory; the processor is configured to execute instructions stored in the memory to cause the computing device to perform the materials handling control method of any of the first aspect and the first example.
In a fourth aspect, embodiments of the present invention provide a materials handling control system, the system comprising: manufacturing execution system MES, equipment automation control system EAP, process equipment, real-time dispatching system RTD and material control system MCS; wherein,,
the EAP is used for receiving a loading preparation instruction sent by the process equipment;
when receiving a feeding preparation instruction sent by process equipment, acquiring a feeding port of the process equipment and material storage state information of a temporary material storage position corresponding to the feeding port;
and acquiring the conveying time length required by the conveying equipment to execute the conveying task once;
and determining description information of a first carrying command to be issued in batches according to the material storage state information of the material temporary storage position corresponding to the material inlet and the material inlet of the process equipment corresponding to the single-time system Cheng Shichang of the process equipment with the carrying time longer than the carrying time; the description information comprises the number of first carrying commands to be issued in batches and the triggering interval duration between the first carrying commands;
and reporting the description information to the MES;
the MES is used for transmitting the description information to the RTD;
The RTD is used for generating a corresponding number of first carrying commands in batches according to the description information, setting the triggering interval duration between the first carrying commands and reporting the triggering interval duration to the MES;
the MES is also used for issuing a first carrying command generated by the RTDs in batches and the triggering interval duration to the MCS;
and the MCS is used for executing the first conveying command generated in batches according to the triggering interval duration so as to execute material conveying.
In a fifth aspect, an embodiment of the present invention provides a computer storage medium, where the storage medium stores at least one instruction for execution by a processor to implement a method of material handling control as described in the first aspect and any one of the examples of the first aspect.
In a sixth aspect, embodiments of the present invention provide a computer program product comprising computer instructions stored in a computer readable storage medium; the processor of the electronic device reads the computer instructions from the computer-readable storage medium and executes the computer instructions to cause the electronic device to execute to implement the materials handling control method as described in the first aspect and any one of the examples of the first aspect.
The embodiment of the invention provides a material handling control method, a device, equipment, a system and a storage medium; after receiving a carrying instruction of the process equipment, generating a plurality of first carrying commands in batches according to single process time length of the process equipment and state information of a loading Port (Load Port) and a corresponding loading buffer bit of the process equipment, so that the plurality of carrying equipment execute the first carrying commands respectively. Therefore, the process equipment keeps the state of processing the materials during the period of waiting for the next RTL instruction to be sent, the condition that the process equipment is in an Idle state is avoided, and the utilization rate of the process equipment is improved.
Drawings
FIG. 1 is a schematic view of an implementation environment provided by an embodiment of the present invention;
FIG. 2 is a schematic flow chart of a method for controlling material handling according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the process equipment according to an embodiment of the present invention;
fig. 4 is a schematic diagram of a composition of a material warehouse system according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a material handling control apparatus according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a computing device according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
The terms "first", "second" in embodiments of the invention are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature.
Referring to fig. 1, a schematic diagram of an implementation environment in which a technical solution according to an embodiment of the present invention can be implemented is shown. In fig. 1, an Equipment automation control system (Equipment Automation Program, EAP) is capable of interacting with process Equipment (EQP), monitoring the status of the process Equipment and obtaining a handling request for the process Equipment, and reporting the handling request to the MES. The MES can interact with a real-time dispatch system (Real Time Dispatch System, RTD) to cause the RTD to generate a first transfer command from the transfer request forwarded by the MES and return to the MES. The MES issues a first carry command to the MCS. The MCS executes a first transport command to cause an AGV and/or an OHT as a transport device to transport materials required by the process device from a material storage bin (STK) system to the process device. It is understood that the process equipment EQP may be any process node in the landscape manufacturing process, such as a crystal pulling furnace, a multi-wire saw, a grinding device, a polishing device, a cleaning device, etc., which is not limited in this embodiment of the present invention.
Specifically, taking an example in which the transfer request is a ready-to-load (RTL) instruction, after the process equipment issues a ready-to-load (RTL) instruction to the EAP, it is necessary to wait for the AGV and/or OHT to complete the material transfer required by the RTL instruction before issuing the next RTL instruction. During the waiting period for the next RTL instruction to be sent, the processing speed Cheng Shichang of the process equipment is less than the waiting period, so that a part of the process equipment is in an Idle state during the waiting period, and the utilization rate of the process equipment is reduced.
In view of this, it is desirable to provide a material handling control scheme, which is capable of generating a plurality of first handling commands in batch according to a single process duration of the process equipment and status information of a loading Port (Load Port), a unloading Port (unloading Port) and corresponding loading buffer bit and unloading buffer bit after receiving a handling command of the process equipment, so that the plurality of handling equipment execute the first handling commands respectively. Therefore, the process equipment keeps the state of processing the materials during the period of waiting for the next RTL instruction to be sent, the condition that the process equipment is in an Idle state is avoided, and the utilization rate of the process equipment is improved.
Based on this, referring to FIG. 2, it is shown that an embodiment of the present invention contemplates a method of material handling control that may be implemented by an EAP as shown in FIG. 1, the method comprising:
s201: when receiving a ready-to-feed (RTL) instruction sent by process equipment, acquiring a feed port of the process equipment and material storage state information of a temporary material storage position corresponding to the feed port;
in an embodiment of the present invention, in conjunction with the implementation environment shown in fig. 1, EAP interacts with the process equipment EQP to control the production process of the EQP according to a predefined flow, and to remotely control and monitor the state of the EQP. In some examples, the EAP can send instructions to the EQP, which may be generated by the MES or EAP, to instruct the EQP to perform various aspects of the process. In addition, the EAP is also able to receive the request instruction for the EQP. The EAP processes the request instruction and replies or feeds back the processing result to the EQP. If the EAP cannot process the request instruction, the EAP can report to the MES, and the MES processes or distributes the request instruction to a destination capable of processing the request instruction.
In some examples, EAP is at least capable of monitoring the current operating state of the EQP, such as Process (Process) state, idle standby (Idel) state, rest (Rest) state, sleep (Sleep) state, and the like. In addition, the EAP can monitor the material storage states of the material inlet and the material outlet of the EQP and the corresponding buffer positions, for example, whether the material is currently stored in the material inlet and the material outlet, whether the material is stored in the buffer positions corresponding to the material inlet and the material outlet, and the like. In addition, EAP can monitor other types of status of EQP based on the requirements of manufacturing, which is not described in detail in the embodiments of the present invention.
In some examples, a schematic composition of an exemplary process tool 30 is shown in fig. 3. In general, the process equipment may include a loading section (Loader) 31, a process chamber body 32, and a unloading section (UnLoader) 33. Taking Loader 31 as an example, a loading port and a buffer position may be included, and as shown in the example of fig. 3, loading ports L11 and L12 are respectively docked with the AGV and the OHT. After the AGV and the OHT transport the material to be processed, which is to be fed, to the process equipment, the material to be processed may be transferred by the AGV and/or the OHT and placed at the respective feed gates by means of an automatic transport or transfer device, such as a robot arm, a conveyor belt, etc. Taking the example shown in fig. 3, the number of buffer bits is two. The material to be processed transferred to the feed port L11 or L12 is transferred from the feed port to the buffer. After the process chamber body 32 of the process equipment completes the process, the material to be processed on the buffer is transferred to the process chamber body 32 to perform the process. In fig. 3, the material on the buffer BU 11 can be directly transferred to the process chamber body 32, and as indicated by the arrow in fig. 3, the material on the buffer BU 12 can be transferred to the buffer BU 11 before being transferred to the process chamber body 32. For the above example, EAP may monitor the state of the EQP to learn the material storage status information of the material inlet of the process device and the temporary material storage location corresponding to the material inlet.
S202: acquiring a conveying time length required by the conveying equipment to execute a conveying task once;
in the embodiment of the present invention, ignoring the duration of communication transmission of various information, electrical signals and instructions between systems, and referring to the STK structure shown in fig. 4, the conveying duration required for the conveying device to execute a conveying task generally includes: the STK transfers material to the first time period T1 of the inner outlet Port-1, transfers material from the inner outlet Port-1 to the outer outlet Port-2, moves AGVs and/or OHTs to the outer outlet Port-2 and loads the third time period T3 of the material, moves AGVs and/or OHTs carrying the material from the outer outlet Port-2 to the fourth time period T4 at the feed Port of the process equipment EQP, transfers and places the material loaded by the AGVs and/or OHTs at the feed Port of the process equipment EQP to the fifth time period T5 of the corresponding feed Port L11 and/or L12, and transfers the material placed at the feed Port to the sixth time period T6 of the buffer position. The EAP can be counted and analyzed according to the historical processing data of the process equipment, so that the various durations are obtained. Conveying time length T required by conveying equipment for executing one conveying task trans =t1+t2+t3+t4+t5+t6. Since STKs are typically not located near the EQP, and may be in different buildings or warehouses, the STKs are typically physically remote from the EQP. Based on this, at T trans In which both T3 and T4 are significantly longer than the other durations.
S203: corresponding to a single-time manufacture Cheng Shichang of which the conveying time length is longer than that of the process equipment, determining description information of a first conveying command issued in batches according to a material loading port of the process equipment and material storage state information of a temporary material storage position corresponding to the material loading port; the description information comprises the number of first carrying commands to be issued in batches and the triggering interval duration between the first carrying commands;
in the embodiment of the invention, the single-shot Cheng Shichang of the process equipment is set as T op If T trans Less than T op It is stated that there is sufficient time to transfer material from the STK to the feed port of the process tool and to the buffer station during the process run of the process tool, in which case the process tool will most likely not be in the Idle state. However, for process equipment with shorter process duration, T will occur trans Greater than T op When the process equipment completes the process, the material is in the process of carrying in a high probability and cannot be sent into the feeding port in time, and in this case, the process equipment is in an Idle state in a high probability.
In order to reduce the frequency of the Idle state of the process equipment and even avoid the Idle state of the process equipment, when T trans Greater than T op When the method is used, a plurality of first conveying commands can be issued in batches and executed by the MCS, and the triggering interval duration is set for each first conveying command, so that the material placing state of the material loading port of the process equipment is always kept, and the Idle state of the process equipment is avoided.
S204: and transmitting the description information to a real-time dispatching system RTD through a manufacturing execution system MES, so that the RTD generates a corresponding number of first conveying commands in batches, sets the triggering interval duration between the first conveying commands, and then instructs a material control system MCS to execute material conveying according to the generated first conveying commands and the triggering interval duration through the MES.
In the embodiment of the present invention, since the first transport command is generated by the RTD and issued by the MES to the MCS for execution, the EAP may report the description information obtained in S203 to the MES and transmit the description information from the MES to the RTD. The RTD triggers based on the description information, generates first carrying commands in batches according to the description information, sets the triggering interval duration before each first carrying command and transmits the triggering interval duration to the MES. The MES issues the first transport commands generated in batches by the RTDs and the trigger interval duration to the MCS, so that the MCS executes the first transport commands generated in batches according to the trigger interval duration to avoid the Idle state of the process equipment.
Through the technical scheme shown in fig. 2, after receiving the handling instruction of the process equipment, a plurality of first handling commands are generated in batches according to the single process duration of the process equipment and the state information of the process equipment loading Port (Load Port) and the corresponding loading buffer bit, so that the plurality of handling equipment execute the first handling commands respectively. Therefore, the process equipment keeps the state of processing the materials during the period of waiting for the next RTL instruction to be sent, the condition that the process equipment is in an Idle state is avoided, and the utilization rate of the process equipment is improved.
For the technical solution shown in fig. 2, in some possible implementations, the obtaining the material storage status information of the material temporary storage position corresponding to the material inlet and the material inlet of the process equipment includes:
and determining the material loading port and the material temporary storage position of the process equipment, and the material loading port and the material temporary storage position of the process equipment, which are not loaded with materials, by monitoring the load-bearing sensing signals of the material loading port and the material temporary storage position of the process equipment.
For the above implementation, specifically, an induction sensor may be disposed at a loading port and a buffer position of the process equipment. The sensor generates a bearing induction signal in a pressure signal or image signal mode, and the bearing induction signal is used for representing whether a material loading port and a buffer position bear materials or not. In detail, when the material at the loading port is transferred to the buffer, the process equipment sends an RTL instruction to the EAP through the loading port. After receiving the RTL instruction, the EAP receives the sensing signals carried by the material inlet and the material buffer to acquire the material inlet and the buffer carrying the material and the material inlet and the buffer not carrying the material. Based on the RTL instruction, a first conveying command is issued through the MES so that the conveying equipment conveys the required materials to a feed port of the process equipment.
For the technical solution shown in fig. 2, in some possible implementations, determining, according to the material storage status information of the material temporary storage locations corresponding to the material inlet and the material outlet of the process equipment, description information of the batch issuing of the first conveying command includes:
determining the number of first conveying commands to be issued in batches according to the number of material inlets which do not bear materials and the number of temporary material storage positions in the material storage state information;
and acquiring the triggering interval duration between the first conveying commands according to the duration difference between the conveying duration and the single process duration of the process equipment.
For the above implementation, specifically, after the EAP receives the RTL instruction, a first transport command needs to be sent to the MCS through the MES, so that the transport apparatus of the MCS executes the first transport command to transport the required material to the loading port of the process apparatus. For the process equipment, the material storage status information includes that the material loading port and the temporary material storage position which do not bear the material need to be carried, and the quantity of the materials which can be borne by a single material loading port or buffer position is set by one carrying equipment, so that the carrying equipment which is the same as the quantity of the material loading port and buffer position which do not bear the material needs to be arranged for carrying the materials, that is, each first carrying command is set to be executed by one carrying equipment, and the quantity of the first carrying commands which need to be issued in batches is the same as the quantity of the material loading port and buffer position which do not bear the material.
In addition, the transportation time length is longer than the single process time length of the process equipment, so that the process equipment is in an Idle state. In order to avoid the above situation, a plurality of conveying devices are required to be arranged for conveying in a short period of time, so that materials can be conveyed to the feeding port in time in the process duration of the process equipment. That is, a trigger interval needs to be set for the first conveyance command issued in batch.
Based on this, in some examples, the acquiring the trigger interval duration between the first handling commands according to the duration difference between the handling duration and the single process duration of the process equipment includes:
the trigger interval is set to 0 corresponding to the conveyance duration being much longer than the single pass Cheng Shichang of the process equipment;
determining that the triggering interval is the sum of the time for transferring the material loaded by the conveying equipment (AGV and/or OHT) at the feeding port of the process equipment EQP and placing the material in the corresponding feeding port and the time for transferring the material placed in the feeding port to the buffer position, corresponding to the total movement time length of the conveying equipment in the conveying time length being longer than the single-time production Cheng Shichang of the process equipment;
determining that the triggering interval is the sum of the time for transferring and placing the materials loaded by the conveying equipment (AGV and/or OHT) at the feeding port of the process equipment EQP, the time for transferring the materials placed at the feeding port to the buffer position and the set time compensation value, corresponding to the total movement time of the conveying equipment in the conveying time is smaller than the single-time production Cheng Shichang of the process equipment; the total movement time of the carrying device is the sum of the time when the carrying device moves to the outer outlet and loads materials and the time when the carrying device for carrying the materials moves from the outer outlet to the EQP feeding port.
For the above example, in detail, the conveyance period T trans Is far larger than the single-time preparation Cheng Shichang T of process equipment op Case (case one), such asThen the conveying speed of the conveying equipment is very low, and a plurality of conveying equipment are required to simultaneously carry the materials so as to be capable of timely conveying the materials to the feeding port in the process duration of the process equipment. In this case, the trigger interval is 0. In the first case, even if a plurality of transport commands are triggered simultaneously, the AGVs/OHT are sequentially queued for shipment at the time of shipment of the STK, for example, from the STK to port-1 and then to port-2, and therefore, the AGVs/OHT are sequentially queued for shipment from port-2. In a period of time, a plurality of conveying devices sequentially move in the conveying way to reach the feeding materialAfter the port L11, the material is continuously conveyed to the feeding port in sequence, so that the intermediate waiting time is reduced, and the equipment utilization rate is improved.
In the case where the total movement time of the handling equipment in the handling time period is longer than the single process time period of the process equipment (case two), it means that the handling speed of the handling equipment is slower but faster than that indicated in case one. Therefore, the set trigger interval is smaller, and the sum of the time period for transferring and placing the material loaded by the handling equipment (AGV and/or OHT) at the loading port of the process equipment EQP and the time period for transferring the material placed at the loading port to the buffer position is taken as the trigger interval in the present case.
In the case where the total movement duration of the handling device in the handling duration is smaller than the single process duration of the process device (case three), it means that the handling speed of the handling device is faster than that indicated in case two, and the trigger interval can be prolonged appropriately as compared with case two. The set time length compensation value can be increased, for example, on the basis of the triggering interval described in case two. In the embodiment of the invention, the set time length compensation value can be selected as the difference between the single-time system Cheng Shichang of the process equipment and the total movement time length of the carrying equipment. Of course, the time length compensation value may be adjusted according to the actual conveyance speed.
Through the technical scheme, the implementation mode and the example thereof, under the condition that the material handling is required, if the handling time is longer than the single process time of the process equipment, the first handling commands are issued in batches according to the material storage state information of the material inlet of the process equipment and the material temporary storage position corresponding to the material inlet, and the triggering interval between the first handling commands is set, so that the material inlet of the process equipment always keeps the state of material placement, and the Idle state of the process equipment is avoided.
With respect to the foregoing technical solutions, in some possible implementations, the method further includes:
when the material at the buffer position of the process equipment is transferred to the process chamber main body of the process equipment, receiving a preparation blanking (RTU) instruction sent by a material inlet of the process equipment;
and issuing the RTU instruction to the RTD through the MES, so that the RTD generates a second carrying command according to the RTU instruction, and carrying out material package removal on a material inlet of the process equipment according to the second carrying command through the MES indication MCS.
Specifically, after the buffer level of material is transferred to the process chamber body of the process tool, a material package, such as an empty Open Cassette (OC), will be placed at the feed port. The loading port of the process equipment triggers an RTU instruction based on the loaded material package to remove the material package. In the dispatching process of the carrying equipment, if the material at the buffer position is quickly transferred to the main body of the process chamber of the process equipment and the material package of the feeding port is not processed yet, the buffer position of the process equipment can trigger the RTU. Thus, the time for waiting for the vehicle in the middle is shortened by the carrying equipment in the process of dispatch.
Based on the same inventive concept as the previous technical solution, referring to fig. 5, there is shown a material handling control device 50 according to an embodiment of the present invention, where the device includes: a receiving section 501, a first acquiring section 502, a second acquiring section 503, a determining section 504, and a reporting section 505; wherein,,
the receiving part 501 is configured to receive a loading preparation instruction sent by a process device;
the first obtaining portion 502 is configured to obtain, when receiving a loading preparation instruction sent by a process device, material storage state information of a loading port of the process device and a temporary material storage position corresponding to the loading port;
the second obtaining part 503 is configured to obtain a conveying time length required for the conveying equipment to execute a conveying task once;
the determining part 504 is configured to determine, according to the material storage status information of the material temporary storage position corresponding to the material inlet and the material inlet of the process equipment, description information of batch issuing of the first conveying command, corresponding to the single-time system Cheng Shichang that the conveying time period is longer than that of the process equipment; the description information comprises the number of first carrying commands to be issued in batches and the triggering interval duration between the first carrying commands;
The reporting portion 505 is configured to report the description information to the manufacturing execution system MES, and transmit the description information to the real-time dispatch system RTD through the manufacturing execution system MES, so that after the RTD generates a corresponding number of first conveyance commands in batches and sets a trigger interval duration between the first conveyance commands, the material control system MCS is instructed by the MES to execute material conveyance according to the generated first conveyance commands and the trigger interval duration.
In some examples, the conveyance time period required for the conveyance apparatus to perform a conveyance task once includes: the material storage system STK transfers the material to the first time period T1 of the inner side outlet, transfers the material to the second time period T2 of the outer side outlet, moves the carrying equipment to the outer side outlet and loads the material, moves the carrying equipment to the fourth time period T4 of the material loading port of the process equipment EQP from the outer side outlet, transfers the material loaded by the carrying equipment to the fifth time period T5 of the material loading port of the EQP and places the material in the material loading port, and transfers the material placed in the material loading port to the sixth time period T6 of the temporary material storage position.
In some examples, the first acquisition portion 502 is configured to:
And determining the material loading port and the material temporary storage position of the process equipment, and the material loading port and the material temporary storage position of the process equipment, which are not loaded with materials, by monitoring the load-bearing sensing signals of the material loading port and the material temporary storage position of the process equipment.
In some examples, the second acquisition portion 503 is configured to:
determining the number of first conveying commands to be issued in batches according to the material storage state information of the temporary material storage positions corresponding to the material inlet of the process equipment;
and acquiring the triggering interval duration between the first conveying commands according to the duration difference between the conveying duration and the single process duration of the process equipment.
In some examples, the second acquisition portion 503 is configured to:
determining the number of first conveying commands to be issued in batches according to the number of material inlets which do not bear materials and the number of temporary material storage positions in the material storage state information;
and acquiring the triggering interval duration between the first conveying commands according to the duration difference between the conveying duration and the single process duration of the process equipment.
In some examples, the second acquisition portion 503 is configured to:
The trigger interval is set to 0 corresponding to the conveyance duration being much longer than the single pass Cheng Shichang of the process equipment;
corresponding to the total movement time length of the conveying equipment in the conveying time length being longer than the single-time manufacture Cheng Shichang of the process equipment, determining that the triggering interval is the sum of the time length for transferring the materials loaded by the conveying equipment to the corresponding loading port at the loading port of the process equipment EQP and the time length for transferring the materials placed in the loading port to the buffer position;
determining that the triggering interval is the sum of the time for transferring the material loaded by the carrying equipment to the corresponding feeding port at the feeding port of the process equipment EQP, the time for transferring the material placed in the feeding port to the buffer position and the set time compensation value, corresponding to that the total motion time of the carrying equipment in the carrying time is smaller than the single-time production Cheng Shichang of the process equipment;
the total movement time of the carrying device is the sum of the time when the carrying device moves to the outer outlet and loads materials and the time when the carrying device for carrying the materials moves from the outer outlet to the EQP feeding port.
In some examples, the receiving portion 501 is further configured to receive a ready-to-feed RTU instruction sent by a feed port of a process device when a material in a buffer location of the process device is transferred to a process chamber body of the process device;
The reporting portion 505 is further configured to report the RTU instruction to an MES, and issue the RTU instruction to an RTD through the MES, so that the RTD generates a second handling command according to the RTU instruction, and instruct MCS to remove the material package of the feed port of the process equipment according to the second handling command through the MES.
Referring to FIG. 6, a block diagram of a computing device is shown, according to one exemplary embodiment of the present application. The computing device of the present application may include one or more of the following components: a processor 610 and a memory 620.
In the alternative, processor 610 connects various portions of the overall computing device using various interfaces and lines, and performs various functions of the computing device and processes data by executing or executing instructions, programs, code sets, or instruction sets stored in memory 620, and invoking data stored in memory 620. Alternatively, the processor 610 may be implemented in at least one hardware form of digital signal processing (Digital Signal Processing, DSP), field-Programmable gate array (FPGA), programmable logic array (Programmable Logic Array, PLA). The processor 610 may integrate one or a combination of several of a central processing unit (Central Processing Unit, CPU), an image processor (Graphics Processing Unit, GPU), a Neural network processor (Neural-network Processing Unit, NPU), and baseband chips, etc. The CPU mainly processes an operating system, a user interface, an application program and the like; the GPU is used for rendering and drawing the content required to be displayed by the touch display screen; the NPU is used to implement artificial intelligence (Artificial Intelligence, AI) functionality; the baseband chip is used for processing wireless communication. It will be appreciated that the baseband chip may not be integrated into the processor 610 and may be implemented by a single chip.
The Memory 620 may include a random access Memory (Random Access Memory, RAM) or a Read-Only Memory (ROM). Optionally, the memory 620 includes a non-transitory computer readable medium (non-transitory computer-readable storage medium). Memory 620 may be used to store instructions, programs, code sets, or instruction sets. The memory 620 may include a stored program area and a stored data area, wherein the stored program area may store instructions for implementing an operating system, instructions for at least one function (e.g., touch function, sound play function, image play function, etc.), instructions for implementing a materials handling control method as described in various embodiments above, etc.; the storage data area may store data created from the use of the computing device, and the like.
In addition, those skilled in the art will appreciate that the structure of the computing device shown in the above-described figures is not limiting of the computing device, and that the computing device may include more or fewer components than shown, or may combine certain components, or a different arrangement of components. For example, the computing device further includes a display screen, a camera component, a microphone, a speaker, a radio frequency circuit, an input unit, a sensor (such as an acceleration sensor, an angular velocity sensor, a light sensor, etc.), an audio circuit, a WiFi module, a power supply, a bluetooth module, etc., which are not described herein.
Embodiments of the present application also provide a computer readable storage medium storing at least one instruction for execution by a processor to implement the method of material handling control of the various embodiments described above.
Embodiments of the present application also provide a computer program product comprising computer instructions stored in a computer-readable storage medium; the processor of the computing device reads the computer instructions from the computer-readable storage medium and executes the computer instructions to cause the computing device to execute to implement the materials handling control method provided in various alternative implementations of the above aspects.
Those skilled in the art will appreciate that in one or more of the examples described above, the functions described in the embodiments of the present application may be implemented in hardware, software, firmware, or any combination thereof. When implemented in software, these functions may be stored on or transmitted over as one or more instructions or code on a computer-readable medium. Computer-readable media includes both computer storage media and communication media including any medium that facilitates transfer of a computer program from one place to another. A storage media may be any available media that can be accessed by a general purpose or special purpose computer.
It should be noted that: the technical schemes described in the embodiments of the present invention may be arbitrarily combined without any collision.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (11)
1. A method of material handling control, the method comprising:
when receiving a feeding preparation instruction sent by process equipment, acquiring a feeding port of the process equipment and material storage state information of a temporary material storage position corresponding to the feeding port;
acquiring a conveying time length required by the conveying equipment to execute a conveying task once;
corresponding to a single-time manufacture Cheng Shichang of which the conveying time length is longer than that of the process equipment, determining description information of a first conveying command issued in batches according to a material loading port of the process equipment and material storage state information of a temporary material storage position corresponding to the material loading port; the description information comprises the number of first carrying commands to be issued in batches and the triggering interval duration between the first carrying commands;
And transmitting the description information to a real-time dispatching system RTD through a manufacturing execution system MES, so that the RTD generates a corresponding number of first conveying commands in batches, sets the triggering interval duration between the first conveying commands, and then instructs a material control system MCS to execute material conveying according to the generated first conveying commands and the triggering interval duration through the MES.
2. The method according to claim 1, wherein the conveyance time period required for the conveyance apparatus to perform a conveyance task once includes: the material storage system STK transfers the material to the first time period T1 of the inner side outlet, transfers the material to the second time period T2 of the outer side outlet, moves the carrying equipment to the outer side outlet and loads the material, moves the carrying equipment to the fourth time period T4 of the material loading port of the process equipment EQP from the outer side outlet, transfers the material loaded by the carrying equipment to the fifth time period T5 of the material loading port of the EQP and places the material in the material loading port, and transfers the material placed in the material loading port to the sixth time period T6 of the temporary material storage position.
3. The method according to claim 1, wherein the obtaining the material storage status information of the material temporary storage locations corresponding to the material inlet and the material outlet of the process equipment includes:
And determining the material loading port and the material temporary storage position of the process equipment, and the material loading port and the material temporary storage position of the process equipment, which are not loaded with materials, by monitoring the load-bearing sensing signals of the material loading port and the material temporary storage position of the process equipment.
4. The method according to claim 1, wherein determining the description information of the batch issuing of the first handling command according to the material storage status information of the material temporary storage locations corresponding to the material inlet and the material outlet of the process equipment includes:
determining the number of first conveying commands to be issued in batches according to the material storage state information of the temporary material storage positions corresponding to the material inlet of the process equipment;
and acquiring the triggering interval duration between the first conveying commands according to the duration difference between the conveying duration and the single process duration of the process equipment.
5. The method of claim 4, wherein determining the description information of the batch-issued first handling command according to the material storage status information of the material temporary storage locations corresponding to the material inlet and the material outlet of the process equipment comprises:
determining the number of first conveying commands to be issued in batches according to the number of material inlets which do not bear materials and the number of temporary material storage positions in the material storage state information;
And acquiring the triggering interval duration between the first conveying commands according to the duration difference between the conveying duration and the single process duration of the process equipment.
6. The method of claim 5, wherein the obtaining the trigger interval duration between the first transport commands based on the duration difference between the transport duration and the single process duration of the process tool comprises:
the trigger interval is set to 0 corresponding to the conveyance duration being much longer than the single pass Cheng Shichang of the process equipment;
corresponding to the total movement time length of the conveying equipment in the conveying time length being longer than the single-time manufacture Cheng Shichang of the process equipment, determining that the triggering interval is the sum of the time length for transferring the materials loaded by the conveying equipment to the corresponding loading port at the loading port of the process equipment EQP and the time length for transferring the materials placed in the loading port to the buffer position;
determining that the triggering interval is the sum of the time for transferring the material loaded by the carrying equipment to the corresponding feeding port at the feeding port of the process equipment EQP, the time for transferring the material placed in the feeding port to the buffer position and the set time compensation value, corresponding to that the total motion time of the carrying equipment in the carrying time is smaller than the single-time production Cheng Shichang of the process equipment;
The total movement time of the carrying device is the sum of the time when the carrying device moves to the outer outlet and loads materials and the time when the carrying device for carrying the materials moves from the outer outlet to the EQP feeding port.
7. The method according to claim 1, wherein the method further comprises:
when the material at the buffer position of the process equipment is transferred to the process chamber main body of the process equipment, receiving a ready-to-discharge RTU instruction sent by a feed port of the process equipment;
and issuing the RTU instruction to the RTD through the MES, so that the RTD generates a second carrying command according to the RTU instruction, and carrying out material package removal on a material inlet of the process equipment according to the second carrying command through the MES indication MCS.
8. A materials handling control device, said device comprising: the device comprises a receiving part, a first acquisition part, a second acquisition part, a determination part and a reporting part; wherein,,
the receiving part is configured to receive a feeding preparation instruction sent by the process equipment;
the first obtaining part is configured to obtain material storage state information of a material inlet of the process equipment and a material temporary storage position corresponding to the material inlet when receiving a material preparation instruction sent by the process equipment;
The second acquisition part is configured to acquire the conveying time length required by the conveying equipment to execute the conveying task once;
the determining part is configured to determine, according to the material storage state information of the material temporary storage position corresponding to the material inlet and the material inlet of the process equipment, description information of a first conveying command issued in batches corresponding to the single-time system Cheng Shichang of which the conveying time length is longer than that of the process equipment; the description information comprises the number of first carrying commands to be issued in batches and the triggering interval duration between the first carrying commands;
the reporting part is configured to report the description information to a Manufacturing Execution System (MES), and transmit the description information to a real-time dispatching system (RTD) through the MES, so that the RTD generates a corresponding number of first conveying commands in batches, sets a triggering interval duration between the first conveying commands, and then instructs a Material Control System (MCS) through the MES to execute material conveying according to the generated first conveying commands and the triggering interval duration.
9. A computing device, the computing device comprising a processor and a memory; the processor is configured to execute instructions stored in the memory to cause the computing device to perform the materials handling control method of any of claims 1 to 7.
10. A materials handling control system, said system comprising: manufacturing execution system MES, equipment automation control system EAP, process equipment, real-time dispatching system RTD and material control system MCS; wherein,,
the EAP is used for receiving a loading preparation instruction sent by the process equipment;
when receiving a feeding preparation instruction sent by process equipment, acquiring a feeding port of the process equipment and material storage state information of a temporary material storage position corresponding to the feeding port;
and acquiring the conveying time length required by the conveying equipment to execute the conveying task once;
and determining description information of a first carrying command to be issued in batches according to the material storage state information of the material temporary storage position corresponding to the material inlet and the material inlet of the process equipment corresponding to the single-time system Cheng Shichang of the process equipment with the carrying time longer than the carrying time; the description information comprises the number of first carrying commands to be issued in batches and the triggering interval duration between the first carrying commands;
and reporting the description information to the MES;
the MES is used for transmitting the description information to the RTD;
The RTD is used for generating a corresponding number of first carrying commands in batches according to the description information, setting the triggering interval duration between the first carrying commands and reporting the triggering interval duration to the MES;
the MES is also used for issuing a first carrying command generated by the RTDs in batches and the triggering interval duration to the MCS;
and the MCS is used for executing the first conveying command generated in batches according to the triggering interval duration so as to execute material conveying.
11. A computer storage medium having stored thereon at least one instruction for execution by a processor to implement the materials handling control method of any of claims 1 to 7.
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| CN202310944121.0A CN116954170A (en) | 2023-07-28 | 2023-07-28 | Material handling control method, device, equipment, system and storage medium |
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