CN116930115B - Quartz glass hydroxyl detection method and detection device - Google Patents
Quartz glass hydroxyl detection method and detection device Download PDFInfo
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- CN116930115B CN116930115B CN202311189276.4A CN202311189276A CN116930115B CN 116930115 B CN116930115 B CN 116930115B CN 202311189276 A CN202311189276 A CN 202311189276A CN 116930115 B CN116930115 B CN 116930115B
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- 238000001514 detection method Methods 0.000 title claims abstract description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 155
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 73
- 230000000694 effects Effects 0.000 claims abstract description 18
- 238000000862 absorption spectrum Methods 0.000 claims abstract description 10
- 238000005498 polishing Methods 0.000 claims abstract description 8
- 239000010453 quartz Substances 0.000 claims abstract description 5
- 238000012360 testing method Methods 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 23
- 239000011521 glass Substances 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000004215 Carbon black (E152) Substances 0.000 claims description 3
- 239000010627 cedar oil Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 3
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 239000003921 oil Substances 0.000 claims description 3
- TUJKJAMUKRIRHC-UHFFFAOYSA-N hydroxyl Chemical compound [OH] TUJKJAMUKRIRHC-UHFFFAOYSA-N 0.000 claims 1
- 238000005520 cutting process Methods 0.000 abstract description 8
- 238000002360 preparation method Methods 0.000 abstract description 8
- 238000002834 transmittance Methods 0.000 abstract description 7
- 238000000227 grinding Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 description 5
- 239000004677 Nylon Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229920001778 nylon Polymers 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The application provides a quartz glass hydroxyl detection method and a detection device, which relate to the technical field of quartz material detection, wherein the detection method comprises the steps of attaching a first solution on a first surface and a second surface of quartz glass to form a mirror surface effect; after the quartz glass is placed in the infrared spectrometer, incident light of the infrared spectrometer penetrates into the quartz glass from the first surface and is emitted from the second surface; analyzing the hydroxyl content in the quartz glass according to an infrared absorption spectrum of an infrared spectrometer to obtain a measured hydroxyl content; because the quartz glass with rough surface has poor light transmittance, the first solution is coated on the first surface and the second surface of the quartz glass to form a mirror surface effect before the hydroxyl content of the quartz glass is detected, and compared with the prior art, the quartz glass has the advantages that the surface of the quartz glass can form the mirror surface effect only by cutting, rough grinding, fine grinding and polishing, the sample preparation efficiency is improved, the hydroxyl content of the quartz glass can be detected more quickly, and the detection efficiency is also improved.
Description
Technical Field
The application relates to the technical field of quartz material detection, in particular to a quartz glass hydroxyl detection method and a quartz glass hydroxyl detection device.
Background
The quartz glass is glass composed of single components of silicon dioxide molecules, the silicon dioxide content reaches more than 99.9%, and the quartz glass has a series of excellent physical and chemical properties such as high light transmittance, high temperature resistance, corrosion resistance and the like; however, the hydroxyl groups in the quartz glass seriously affect the properties thereof, and even if the hydroxyl group content is as low as several tens ppm, it significantly affects the properties such as viscosity of the glass. Meanwhile, due to the existence of hydroxyl in the glass, the glass can quantitatively absorb certain infrared wavelength, which has great influence on optical fiber infrared light signal transmission; in the electric light source industry, high hydroxyl content in glass can shorten the service life of a gas discharge lamp; therefore, it is necessary to strictly monitor the hydroxyl group content in the glass; in the prior art, GB/T12442-90 is adopted to test the hydroxyl content in quartz glass, and the hydroxyl functional groups in the quartz glass are utilized to quantitatively analyze the strong absorption characteristic of 2.73 microns of infrared light waveform, which has the defects that the quartz glass to be tested needs to be cut, ground and polished into a mirror surface, and the sample preparation technical requirement of the sample to be tested is high and time-consuming; however, in the production process, it is generally necessary to rapidly measure the hydroxyl content in order to solve the problems in time; therefore, the application provides a quartz glass hydroxyl group detection method and a detection device.
Disclosure of Invention
In view of the above-mentioned drawbacks or shortcomings of the prior art, the present application is directed to a method and apparatus for detecting hydroxyl groups in quartz glass.
In a first aspect, the present application provides a method for detecting hydroxyl groups of quartz glass, comprising the steps of:
attaching a first solution to a first surface and a second surface of the quartz glass to form the first surface and the second surface with mirror effects;
placing the quartz glass into an infrared spectrometer, wherein incident light of the infrared spectrometer penetrates the quartz glass from the first surface and is emitted from the second surface;
and analyzing the hydroxyl content in the quartz glass according to an infrared absorption spectrum of the infrared spectrometer to obtain the measured hydroxyl content.
According to the technical scheme provided by the application, the first solution is attached to the first surface and the second surface in a brush coating manner.
According to the technical scheme provided by the application, the first solution is attached to the first surface and the second surface in the following way:
immersing the quartz glass in a first container, wherein the first container contains the first solution.
According to the technical scheme provided by the application, the first solution is a solution without hydroxyl functional groups.
According to the technical scheme provided by the application, the first solution is hydrocarbon transformer oil or artificial cedar oil.
According to the technical scheme provided by the application, the method further comprises the following steps:
measurement of hydroxyl content by calibration function pair of equation (one)Performing calibration to obtain the content of calibrated hydroxyl group->；
Formula 1
Wherein the method comprises the steps ofAnd->To set the calibration coefficient, +.>To measure the hydroxyl content.
According to the technical scheme provided by the application, the set calibration coefficient is determined by the following method:
acquisition ofQuartz glass test samples of different group thickness, each group of quartz glass test samples having +.>Quartz glass having the same sheet thickness;
for the firstThe group quartz glass test samples passed the S701-S703 test, wherein +.>；
S701: for a pair ofThe respective test of the platelet quartz glass gives a first set of measured hydroxyl groups +.>;
S702: for a pair ofAfter cleaning and polishing the quartz glass, testing by an infrared spectrometer to obtain a second measurement hydroxyl group content set +.>;
S703: fitting the first and second measured hydroxyl content sets to obtain a firstCalibration functionWherein, the->For the first calibration factor, +.>Is the second calibration coefficient;
extracting the first calibration function to the first calibration functionThe calibration coefficients of the calibration function obtain a first calibration coefficient setAnd a second set of calibration coefficients->；
Extraction ofThe thickness of the test sample of group quartz glass, the thickness set +.>；
Fitting a linear fitting function to obtain a first calibration coefficient function according to the first calibration coefficient set and the thickness setWherein->And->Is a linear coefficient>The thickness of the quartz glass test sample;
from the second calibration coefficient set and the thickness set, using a linear fitting functionFitting to obtain a second calibration coefficient functionWherein->And->Is a linear coefficient>The thickness of the sample was measured for quartz glass.
In a second aspect, the present application provides a silica glass hydroxyl group detection device for implementing the above silica glass hydroxyl group detection method, including:
the base body is provided with a first mounting surface, and a first station and a second station are sequentially arranged on the first mounting surface along a first direction;
the first station is provided with a first workbench, the first workbench is provided with a first table top, the first table top is provided with a first container, a first cavity is formed in the first container, a first opening is formed in the side, away from the first table top, of the first container, and the first solution is filled in the first cavity; an infrared spectroscope is arranged on the second station and is used for detecting the hydroxyl content of the quartz glass;
the carrying assembly is arranged at one end of the first mounting surface, and a grabbing and placing assembly is arranged at one end of the carrying assembly, which is far away from the first mounting surface, and is used for grabbing and placing the quartz glass;
the first driving assembly can drive the carrying assembly to drive the grabbing and placing assembly to carry the quartz glass to the first station, the first surface and the second surface are coated with the first solution, and the quartz glass coated with the first solution on the first surface and the second surface is carried to the second station for detection.
According to the technical scheme provided by the application, a third station is arranged on one side, away from the second station, of the first station, and is used for cutting the quartz glass to obtain the first surface and the second surface; a fourth station is further arranged between the first station and the second station, a fourth workbench is arranged on the fourth station, a fourth table top is arranged on the fourth workbench, a clamping assembly is arranged on the fourth table top, the clamping assembly comprises first clamping pieces and second clamping pieces distributed and arranged on the fourth table top along the first direction, the extending directions of the first clamping pieces and the second clamping pieces are second directions, and the second directions are perpendicular to the first directions; a first space is formed between the first clamping piece and the second clamping piece, and the first space is used for placing the quartz glass with the first solution coated on the first surface and the second surface.
According to the technical scheme provided by the application, the fourth station further comprises a sliding assembly, the sliding assembly comprises two sliding rails arranged on the fourth table top in a distributed manner along a third direction, a sliding block arranged at the end, close to the fourth table top, of the second clamping piece and matched with the sliding rails, and a second driving assembly for driving the second clamping piece to move along the first direction, the extending direction of the sliding rails is the first direction, and the third direction is perpendicular to the first direction and perpendicular to the second direction.
In summary, the present application provides a method and a device for detecting hydroxyl groups on quartz glass, wherein the method comprises attaching a first solution to a first surface and a second surface of quartz glass, so that the first surface and the second surface form a mirror effect; after the quartz glass is placed in the infrared spectrometer, incident light of the infrared spectrometer penetrates into the quartz glass from the first surface and is emitted from the second surface; analyzing the hydroxyl content in the quartz glass according to an infrared absorption spectrum of an infrared spectrometer to obtain a measured hydroxyl content; because the quartz glass with rough surface has poor light transmittance, the first solution is coated on the first surface and the second surface of the quartz glass to form a mirror surface effect before the hydroxyl content of the quartz glass is detected, and compared with the prior art, the quartz glass has the advantages that the surface of the quartz glass can form the mirror surface effect only by cutting, rough grinding, fine grinding and polishing, the sample preparation efficiency is improved, the hydroxyl content of the quartz glass can be detected more quickly, and the detection efficiency is also improved.
Drawings
FIG. 1 is a flow chart of a method for detecting hydroxyl groups of quartz glass according to embodiment 1 of the present application;
fig. 2 is a schematic structural diagram of a detection device for implementing the hydroxyl group detection method of quartz glass according to embodiment 2 of the present application.
The text labels in the figures are expressed as:
1. a base body; 101. a first mounting surface; 2. a first work table; 201. a first mesa; 3. a first container; 301. a first opening; 302. a first cavity; 4. an infrared spectrometer; 5. a handling assembly; 501. a pick-and-place assembly; 6. a third station; 7. a fourth table; 701. a fourth mesa; 8. a clamping assembly; 801. a first clamping member; 802. a second clamping member; 803. a second drive assembly; 9. a first tray; 10. a sliding assembly; 1001. a slide rail; 1002. a sliding block.
Detailed Description
The application is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting of the application. It should be noted that, for convenience of description, only the portions related to the application are shown in the drawings.
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other. The application will be described in detail below with reference to the drawings in connection with embodiments.
Example 1
As mentioned in the background art, the application provides a method for detecting hydroxyl groups of quartz glass, which comprises the following steps:
s101: attaching a first solution to a first surface and a second surface of the quartz glass to form the first surface and the second surface with mirror effects;
s102: placing the quartz glass into an infrared spectrometer 4, wherein incident light of the infrared spectrometer 4 penetrates the quartz glass from the first surface and is emitted from the second surface;
s103: analyzing the hydroxyl content in the quartz glass according to an infrared absorption spectrum of the infrared spectrometer 4 to obtain a measured hydroxyl content;
specifically, as the quartz glass with rough surface has poor light transmittance, after the first solution is attached to the first surface and the second surface of the quartz glass, the first surface and the second surface form a mirror effect, so that the quartz glass with the first solution coated on the first surface and the second surface can be put into the infrared spectrometer 4, and the infrared spectrometer 4 is an infrared spectrometer for carrying out light splitting by using a prism or a grating, and the instrument realizes man-machine conversation, has simple operation and perfect functions, can be widely applied to multiple fields of petroleum, chemical industry, medicine, environmental protection, teaching and material science, and is an analysis and test instrument with the inevitable quantity of scientific research, production and teaching; the light emitted by the light source is divided into two beams with equal and symmetrical energy, wherein one beam is incident light which passes through the sample, and the other beam is reference light which is taken as a reference; the two beams of light enter a spectrometer through a sample chamber, are modulated by a sector mirror at a certain frequency to form an alternating signal, are combined into one beam, alternately enter a monochromator through an incident slit, are projected on a grating in parallel through an off-axis parabolic mirror, are dispersed and pass through an emergent slit, are filtered by an optical filter to remove a higher order spectrum, and are focused on a receiving surface of a detector through an ellipsoidal mirror; the detector converts the alternating signals into corresponding electric signals, the electric signals are amplified by an amplifier and then transferred into an A/D conversion unit, and an infrared absorption spectrum from high wave number to low wave number is obtained after computer processing; according to the obtained infrared absorption spectrum diagram, the hydroxyl content in the quartz glass can be obtained through analysis; specifically, after the infrared absorption spectrum was obtained, a baseline was drawn on the infrared absorption spectrum, and 2.73. Mu.m, respectively, was measuredMeasuring the thickness of the quartz glass, transmitting the measured value into a MainFTOS spectrum processing system, and obtaining the measured hydroxyl content in the quartz glass according to a formula (II)；
Formula II
In formula (II)Representative is the measurement of hydroxyl content; 96.5 represents an experimental coefficient; />Representative is the thickness of the quartz glass test sample; />Representative is the baseline to zero line distance at 2.73 microns; />Representative is the absorption peak to zero line distance at 2.73 microns;
according to the application, the first solution is coated on the first surface and the second surface of the quartz glass to form a mirror surface effect, and compared with the prior art that the surface of the quartz glass is required to be cut, roughly ground, finely ground and polished to form the mirror surface effect, the sample preparation efficiency is improved, so that the hydroxyl content of the quartz glass can be detected more quickly, and the detection efficiency is also improved.
Further, the first solution is attached to the first surface and the second surface by being coated with a brush;
further, the first solution is attached to the first surface and the second surface by:
immersing the quartz glass in a first container 3, wherein the first container 3 contains the first solution;
specifically, the first solution may be manually coated on the first surface and the second surface of the quartz glass by a nylon brush, or the quartz glass may be directly soaked in the first container 3, so that the first solution coats the first surface and the second surface of the quartz glass, and the first surface and the second surface of the quartz glass form a mirror effect.
Further, the first solution is a solution containing no hydroxyl functional groups; the first solution is hydrocarbon transformer oil or artificial cedar oil, has small volatility and refractive index close to 1.4-1.5, and is a numerical value for testing the quartz glass in an optimal matching way; as shown by experimental data, before the quartz glass surface is coated with the first solution, the wavelength transmittance of 2.73 micrometers infrared light wave is less than 20 percent, and the hydroxyl content cannot be detected; after the surface of the quartz glass is coated with the first solution, the wavelength transmittance of infrared light waves with the wavelength of 2.73 micrometers can reach more than 60%, and obvious hydroxyl absorption peaks appear, so that the hydroxyl content of the quartz glass can be detected.
Further, the method also comprises the following steps:
measurement of hydroxyl content by calibration function pair of equation (one)Performing calibration to obtain the content of calibrated hydroxyl group->；
Formula 1
Wherein the method comprises the steps ofAnd->To set the calibration coefficient, +.>To measure hydroxyl content;
specifically, the set calibration coefficient is determined by the following method:
acquisition ofQuartz glass test samples of different group thickness, each group of quartz glass test samples having +.>Quartz glass having the same sheet thickness;
for the firstThe group quartz glass test samples passed the S701-S703 test, wherein +.>；
S701: for a pair ofThe respective test of the platelet quartz glass gives a first set of measured hydroxyl groups +.>;
S702: for a pair ofAfter cleaning and polishing the quartz glass, testing the quartz glass by using an infrared spectrometer 4 to obtain a second measurement hydroxyl group content set +.>;
S703: fitting the first and second measured hydroxyl content sets to obtain a firstCalibration functionThe method comprises the steps of carrying out a first treatment on the surface of the Wherein (1)>For the first calibration factor, +.>Is the second calibration coefficient;
extracting the first calibration function to the first calibration functionThe calibration coefficients of the calibration function obtain a first calibration coefficient setAnd a second set of calibration coefficients->；
Extraction ofThe thickness of the test sample of group quartz glass, the thickness set +.>；
Fitting a linear fitting function to obtain a first calibration coefficient function according to the first calibration coefficient set and the thickness setWherein->And->Is a linear coefficient>The thickness of the quartz glass test sample;
fitting a linear fitting function to obtain a second calibration coefficient function according to the second calibration coefficient set and the thickness setWherein->And->Is a linear coefficient>The thickness of the quartz glass test sample;
before the quartz glass is put into the infrared spectrometer for detection, the measured hydroxyl content obtained after polishing is error due to factors such as absorption caused by oiling, and therefore, the calibrated hydroxyl content is usually obtained by the formula (I)For measuring hydroxyl group content->And (3) performing calibration, so as to further correct the detection error of oiling, and enable the obtained infrared absorption spectrum to be more accurate.
Example 2
On the basis of embodiment 1, the present application further proposes a detection device for implementing the above-mentioned method for detecting hydroxyl groups of quartz glass, as shown in fig. 2, comprising:
the base comprises a base body 1, wherein the base body 1 is provided with a first mounting surface 101, and a first station and a second station are sequentially arranged on the first mounting surface 101 along a first direction; the shape of the base body 1 is cuboid, the first mounting surface 101 is the top surface of the base body 1, and the first direction is the horizontal direction and is parallel to the long-side extension line of the base body 1; optionally, the first station is located on the left side of the second station;
the first station is provided with a first workbench 2, the first workbench 2 is provided with a first table top 201, the first table top 201 is provided with a first container 3, a first cavity 302 is formed in the first container 3, a first opening 301 is formed in the side, away from the first table top 201, of the first container 3, and the first solution is filled in the first cavity 302; an infrared spectroscope 4 is arranged on the second station, and the infrared spectroscope 4 is used for detecting the hydroxyl content of the quartz glass; wherein the first workbench 2 is in a cuboid shape, and the first table top 201 is the top surface of the first workbench 2;
the carrying assembly 5, one end of the carrying assembly 5 is arranged on the first mounting surface 101, and a grabbing and placing assembly 501 is arranged at one end far away from the first mounting surface 101, and the grabbing and placing assembly 501 is used for grabbing and placing the quartz glass; optionally, the handling component 5 is a mechanical arm, and the picking and placing component 501 is a mechanical gripper;
the first driving assembly can drive the carrying assembly 5 to drive the pick-and-place assembly 501 to carry the quartz glass to the first station, coat the first surface and the second surface with the first solution, and carry the quartz glass coated with the first solution on the first surface and the second surface to the second station for detection; optionally, the first driving component is a first driving motor, and the first driving component drives the carrying component 5 to drive the grabbing and placing component 501 to grab and place the quartz glass into the first container 3 on the first station, so that the first surface and the second surface of the quartz glass are covered with the first solution, thereby forming a smooth mirror effect; in addition, the first solution can be manually coated on the first surface and the second surface by a nylon brush, so that the surfaces of the first solution form a mirror effect.
Specifically, when the infrared spectrometer 4 detects the hydroxyl group content of the quartz glass, an infrared light wave is emitted to the first surface of the quartz glass, and the infrared light wave penetrates into the quartz glass from the first surface and is emitted from the second surface; quantitatively analyzing the strong absorption characteristic of the infrared light waveform of 2.73 microns by utilizing the hydroxyl functional groups in the quartz glass; the diffuse reflection of the quartz glass coated by the first solution on the first surface and the second surface can be reduced by more than 60%, most of light can be transmitted, so that the infrared wavelength transmittance is improved to more than 60%, and the effect of the quartz glass after polishing is similar to the existing effect; in the prior art, the quartz glass is required to be cut, ground and polished to form a mirror surface effect on the surface, and then the hydroxyl content is detected.
Further, a third station 6 is arranged on one side of the first station away from the second station, and the third station 6 is used for cutting the quartz glass to obtain the first surface and the second surface; a fourth station is further arranged between the first station and the second station, a fourth workbench 7 is arranged on the fourth station, a fourth table board 701 is arranged on the fourth workbench 7, a clamping assembly 8 is arranged on the fourth table board 701, the clamping assembly 8 comprises a first clamping piece 801 and a second clamping piece 802 distributed and arranged on the fourth table board 701 along the first direction, the extending direction of the first clamping piece 801 and the second clamping piece 802 is a second direction, and the second direction is perpendicular to the first direction; a first space is formed between the first clamping member 801 and the second clamping member 802, and the first space is used for placing the quartz glass with the first solution coated on the first surface and the second surface; wherein the fourth table 7 is a cuboid, and the fourth table 701 is a top surface of the fourth table 7; specifically, the first surface and the second surface may be obtained by cutting the quartz glass with a diamond or silicon carbide saw blade of 100 mesh or more; optionally, the second direction is a vertical direction, specifically, the quartz glass needs to be kept stand for a period of time after being coated with the first solution, so that the first solution is prevented from dripping to pollute a detection instrument in the detection process; the first space is also provided with a first tray 9, and the first tray 9 is arranged under the quartz glass of which the first surface and the second surface are coated with the first solution; wherein, the arrangement of the first tray 9 can avoid the first solution from dripping to pollute the fourth table 701 when the quartz glass coated with the first solution is arranged in the first space.
Further, the fourth station further includes a sliding assembly 10, where the sliding assembly 10 includes two sliding rails 1001 disposed on the fourth table 701 and distributed and arranged along a third direction, a sliding block 1002 disposed at an end of the second clamping member 802 near the fourth table 701 and matched with the sliding rail 1001, and a second driving assembly 803 for driving the second clamping member 802 to move along the first direction, and an extending direction of the sliding rail 1001 is the first direction, and the third direction is perpendicular to the first direction and perpendicular to the second direction; specifically, the third direction is a horizontal direction and is parallel to the short-side extension line of the base body 1; the second driving component 803 is a push rod motor, and the spindle of the push rod motor is connected to one end of the second clamping member 802 away from the first clamping member 801 along the first direction, so as to drive the second clamping member 802 to move along the sliding rail 1001, so as to clamp the quartz glass with different thickness.
In addition, after the detection is completed, the first solution on the first surface and the second surface needs to be wiped by clean cloth in time; and if the quartz glass is required to be reproduced after detection, degreasing and degreasing the quartz glass with the first solution coated on the first surface and the second surface.
Specifically, before the hydroxyl content of the quartz glass is detected, the quartz glass needs to be cut to obtain the first surface and the second surface, the first driving component drives the handling component 5 to drive the gripping and placing component 501 and the cut quartz glass to a first station, the gripping and placing component 501 and the cut quartz glass are soaked in the first solution, the first surface and the second surface are coated with the first solution, or the first solution is manually coated on the first surface and the second surface by a nylon brush coating mode, then the first driving component drives the handling component 5 to drive the gripping and placing component 501 and the quartz glass coated with the first solution to move between the first clamping piece 801 and the second clamping piece 802 of the fourth station, and at this time, the first surface of the silica glass is tightly attached to the first clamping member 801 near to the side of the second clamping member 802, and then the second clamping member 802 is driven by the second driving member 803 to move along the sliding rail 1001 toward the side near to the first clamping member 801 until the silica glass coated with the first solution is clamped, and the silica glass is left to stand for about 5 minutes, when the first solutions on the first surface and the second surface of the silica glass are not dropped, the first driving member drives the carrying member 5 to drive the gripping member 501 and the silica glass coated with the first solution to move to the second station, and the infrared spectrometer 4 on the second station detects the hydroxyl content of the silica glass coated with the first solution on the first surface and the second surface.
In addition, the application also aims at a comparison test of detecting the hydroxyl content of a plurality of quartz glass samples by using a preparation mode of preparing the quartz glass sample by cutting, grinding and polishing and a preparation mode of preparing the quartz glass sample by cutting and coating the first solution, as shown in the table 1, the hydroxyl content of the quartz glass with the numbers of 1-3 is lower, the absolute error of the two preparation modes is less than 1PPM, and the relative error maximum value is less than 5%; the hydroxyl content of the quartz glass with the number of 4-6 is high, the maximum absolute error of the two preparation modes is less than 5PPM, and the maximum relative error is less than 5%; therefore, compared with the result of detecting the hydroxyl content of the quartz glass sample prepared by cutting, coating the first solution, which has smaller error, the detection method provided by the application is more efficient in the stage of preparing the quartz glass sample, and can meet most of production and product test requirements.
TABLE 1
The principles and embodiments of the present application have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the method of the present application and its core ideas. The foregoing is merely illustrative of the preferred embodiments of this application, and it is noted that there is objectively no limit to the specific structure disclosed herein, since numerous modifications, adaptations and variations can be made by those skilled in the art without departing from the principles of the application, and the above-described features can be combined in any suitable manner; such modifications, variations and combinations, or the direct application of the inventive concepts and technical applications to other applications without modification, are contemplated as falling within the scope of the present application.
Claims (8)
1. The quartz glass hydroxyl group detection method is characterized by comprising the following steps of:
attaching a first solution to a first surface and a second surface of the quartz glass to form the first surface and the second surface with mirror effects;
placing the quartz glass into an infrared spectrometer (4), wherein incident light of the infrared spectrometer (4) penetrates the quartz glass from the first surface and is emitted from the second surface;
analyzing the hydroxyl content in the quartz glass according to an infrared absorption spectrum of the infrared spectrometer (4) to obtain a measured hydroxyl content;
measurement of hydroxyl content by calibration function pair of equation (one)Performing calibration to obtain the content of calibrated hydroxyl group->；
Formula 1
Wherein the method comprises the steps ofAnd->To set the calibration coefficient, +.>To measure hydroxyl content;
the set calibration coefficients are determined by the following method:
acquisition ofQuartz glass test samples of different group thickness, each group of quartz glass test samples having +.>Quartz glass having the same sheet thickness;
for the firstThe group quartz glass test samples passed the S701-S703 test, wherein +.>；
S701: for a pair ofThe quartz glass pieces were tested according to the quartz glass hydroxyl group detection method described above to obtain a first set of measured hydroxyl groups +.>;
S702: for a pair ofAfter cleaning and polishing the quartz glass, testing by an infrared spectrometer (4) to obtain a second measurement hydroxyl group content set +.>;
S703: fitting the first and second measured hydroxyl content sets to obtain a firstCalibration functionThe method comprises the steps of carrying out a first treatment on the surface of the Wherein (1)>For the first calibration factor, +.>Is the second calibration coefficient;
extracting the first calibration function to the first calibration functionThe calibration coefficients of the calibration function, resulting in a first set of calibration coefficients +.>And a second set of calibration coefficients->；
Extraction ofThe thickness of the test sample of group quartz glass, the thickness set +.>；
Fitting a linear fitting function to obtain a first calibration coefficient function according to the first calibration coefficient set and the thickness setWherein->And->Is a linear coefficient>The thickness of the quartz glass test sample;
fitting a linear fitting function to obtain a second calibration coefficient function according to the second calibration coefficient set and the thickness setWherein->And->Is a linear coefficient>The thickness of the sample was measured for quartz glass.
2. The method according to claim 1, wherein the first solution is attached to the first surface and the second surface by coating with a brush.
3. The method for detecting hydroxyl groups of silica glass according to claim 1, wherein the first solution is attached to the first surface and the second surface by:
the quartz glass is immersed in a first container (3), and the first container (3) contains the first solution.
4. A quartz glass hydroxyl group detection method according to any of claims 1-3, wherein the first solution is a solution free of hydroxyl functional groups.
5. The method according to claim 4, wherein the first solution is a hydrocarbon transformer oil or an artificial cedar oil.
6. A silica glass hydroxyl group detecting apparatus for carrying out the silica glass hydroxyl group detecting method according to claim 1, comprising:
the base comprises a base body (1), wherein the base body (1) is provided with a first mounting surface (101), and a first station and a second station are sequentially arranged on the first mounting surface (101) along a first direction;
the first station is provided with a first workbench (2), the first workbench (2) is provided with a first table top (201), the first table top (201) is provided with a first container (3), a first cavity (302) is formed in the first container (3), a first opening (301) is formed in the side, away from the first table top (201), of the first container (3), and the first solution is filled in the first cavity (302); an infrared spectroscope (4) is arranged on the second station, and the infrared spectroscope (4) is used for detecting the hydroxyl content of the quartz glass;
the carrying assembly (5), one end of the carrying assembly (5) is arranged on the first mounting surface (101), one end far away from the first mounting surface (101) is provided with a grabbing and placing assembly (501), and the grabbing and placing assembly (501) is used for grabbing and placing the quartz glass;
the first driving assembly can drive the carrying assembly (5) to drive the grabbing and placing assembly (501) to carry the quartz glass to the first station, cover the first surface and the second surface with the first solution, and carry the quartz glass with the first surface and the second surface covered with the first solution to the second station for detection.
7. The quartz glass hydroxyl radical detection device according to claim 6, wherein a third station (6) is provided on a side of the first station remote from the second station, the third station (6) being adapted to cut the quartz glass to obtain the first surface and the second surface; a fourth station is further arranged between the first station and the second station, a fourth workbench (7) is arranged on the fourth station, a fourth table top (701) is arranged on the fourth workbench (7), a clamping assembly (8) is arranged on the fourth table top (701), the clamping assembly (8) comprises first clamping pieces (801) and second clamping pieces (802) distributed and arranged on the fourth table top (701) along the first direction, and the extending directions of the first clamping pieces (801) and the second clamping pieces (802) are second directions which are perpendicular to the first direction; a first space is formed between the first clamping piece (801) and the second clamping piece (802), and the first space is used for placing the quartz glass of which the first surface and the second surface are coated with the first solution.
8. The quartz glass hydroxyl detection device according to claim 7, wherein the fourth station further comprises a sliding assembly (10), the sliding assembly (10) comprises two sliding rails (1001) arranged on the fourth table top (701) in a distributed manner along a third direction, a sliding block (1002) arranged at the end of the second clamping piece (802) close to the fourth table top (701) and matched with the sliding rails (1001), and a second driving assembly (803) for driving the second clamping piece (802) to move along the first direction, and the extending direction of the sliding rails (1001) is the first direction, and the third direction is perpendicular to the first direction and the second direction.
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