CN116909051A - Polarization insensitive liquid crystal device - Google Patents

Polarization insensitive liquid crystal device Download PDF

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Publication number
CN116909051A
CN116909051A CN202211493120.0A CN202211493120A CN116909051A CN 116909051 A CN116909051 A CN 116909051A CN 202211493120 A CN202211493120 A CN 202211493120A CN 116909051 A CN116909051 A CN 116909051A
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China
Prior art keywords
polarization
liquid crystal
spatial light
crystal device
reflector
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CN202211493120.0A
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Chinese (zh)
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CN116909051B (en
Inventor
杨海宁
李昆
李雪锋
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Jianxin Photoelectric Suzhou Co ltd
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Jianxin Photoelectric Suzhou Co ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528Polarisers
    • G02F1/13355Polarising beam splitters [PBS]
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553Reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/13363Birefringent elements, e.g. for optical compensation
    • G02F1/133638Waveplates, i.e. plates with a retardation value of lambda/n

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)

Abstract

The application discloses a polarization insensitive liquid crystal device, wherein the main structure of a silicon-based liquid crystal device comprises a glass front plate, a liquid crystal layer and a track backboard, wherein the glass front plate is composed of materials such as a polarization beam splitter, a 1/4 wave plate, a reflector and the like, the working polarization direction of the silicon-based liquid crystal device is s polarization, an incident light beam passes through the polarization beam splitter, and a p polarization state part directly passes through the reflector 2 and is distributed to one area of a liquid crystal spatial light modulator; the s polarization state is partially reflected, passes through the 1/4 wave plate for 2 times and the reflecting mirror 1, is converted into p polarization, and is finally distributed to another area of the liquid crystal spatial light modulator; the design polarization direction of the liquid crystal spatial light modulator is p polarization direction, so that the spatial modulation of two light beams is realized; the modulated light beams are spatially combined again through the structure and respectively have different polarization states, and finally equivalent spatial light modulation of the two polarization states is formed.

Description

Polarization insensitive liquid crystal device
Technical Field
The application relates to the technical field of liquid crystal on silicon equipment, in particular to a polarization insensitive liquid crystal device.
Background
The basic structural main components of the liquid crystal on silicon (liquid crystal on silicon, LCOS) device comprise a glass front plate, a liquid crystal layer and a silicon-based back plate; the silicon-based backboard is a CMOS circuit and is provided with a pixel array; the voltage of each pixel can be independently controlled so as to control the liquid crystal material in the liquid crystal layer in the corresponding area of the pixel; along with the change of the electric field, the equivalent refractive index of the liquid crystal material for a certain specific polarized light beam can be changed, so that the spatial phase modulation of the polarized incident light beam is realized; for the polarized light beams orthogonal to the design direction of the device, the isofocal refractive index of the liquid crystal layer is unchanged regardless of the voltage of the pixel electrode, and no spatial phase modulation is generated on the light.
At present, the technical solutions of polarization insensitive LCOS devices mainly comprise the following steps of; the first scheme is that a 1/4 wave plate is added between the pixel array and the liquid crystal layer, and the polarization state of incident light is turned over by 90 degrees; thus, the light beam modulated by the liquid crystal layer at the time of incidence and not modulated by the liquid crystal layer again at the time of emergence; the light beam which passes through the liquid crystal layer without being modulated when entering and passes through the liquid crystal layer again when exiting can be modulated; the light beams with two polarization states are modulated once by the liquid crystal layer, and the device is insensitive to the polarization state of the incident light beam; the main problem with this approach is that the thickness of the liquid crystal layer needs to be doubled for a phase modulation of >2 pi; this is because the beam is modulated by the liquid crystal only one way in the incident or exit; thicker liquid crystal layers can cause stronger pixel crosstalk, affecting the quality of beam modulation; in addition, the introduction of the 1/4 wave plate can also cause pixel crosstalk, and the light beam modulation quality is affected.
The second scheme is that an incident light beam is divided into an s-polarized light beam and a p-polarized light beam by a polarization beam splitter and respectively enters two silicon-based liquid crystal spatial light modulators; the designed polarization working directions of the two LCOS spatial light modulators respectively correspond to s and p polarization states; therefore, the system can realize insensitive modulation on polarization of incident light; however, in this design, 2 liquid crystal on silicon devices are required, and a high requirement is placed on the assembly of two liquid crystal on silicon devices, the angle must be 90 degrees, otherwise, the transmission directions of the outgoing 2 polarized light beams are inconsistent.
Therefore, in the practical use process, in order to realize the spatial phase modulation of the light beam, the incident light beam needs to be linearly polarized light, and the polarization direction is consistent with the design working direction of the LCOS device; if the incident light is circularly polarized light, elliptically polarized light or the linear polarization state direction is inconsistent with the design working direction of the device, the phenomenon that part of light beams are not modulated by the device exists; there is therefore an urgent need to develop a liquid crystal on silicon device that is insensitive to the polarization state of incident light.
Disclosure of Invention
The present application aims to provide a polarization insensitive liquid crystal device capable of performing spatial light modulation insensitive to the polarization state of incident light without resorting to optical elements.
In order to achieve the above purpose, the present application provides the following technical solutions: the main structure of the silicon-based liquid crystal device comprises a glass front plate, a liquid crystal layer and a track backboard, wherein the glass front plate is composed of materials such as a polarization beam splitter, a 1/4 wave plate, a reflector and the like, the working polarization direction of the silicon-based liquid crystal device is s polarization, an incident light beam passes through the polarization beam splitter, and a p polarization state part directly passes through the reflector 2 and is distributed to one area of a liquid crystal spatial light modulator; the s polarization state is partially reflected, passes through the 1/4 wave plate for 2 times and the reflecting mirror 1, is converted into p polarization, and is finally distributed to another area of the liquid crystal spatial light modulator; the design polarization direction of the liquid crystal spatial light modulator is p polarization direction, so that the spatial modulation of two light beams is realized; the modulated light beams are spatially combined again through the structure and respectively have different polarization states, and finally equivalent spatial light modulation of the two polarization states is formed.
Preferably, the incident light beam passes through the polarization beam splitter, and the s-polarized state part directly passes through the reflector 2 and is distributed to one area of the liquid crystal spatial light modulator; the P polarization state is partially reflected, passes through the 1/4 wave plate for 2 times and the reflecting mirror 1, is converted into s polarization, and is finally distributed to the other area of the liquid crystal spatial light modulator; the design polarization direction of the liquid crystal spatial light modulator is s polarization direction, so that the spatial modulation of two light beams is realized; the modulated light beams are spatially combined again through the structure and respectively have different polarization states, and finally equivalent spatial light modulation of the two polarization states is formed.
Preferably, the material of the polarization beam splitter is properly selected, i.e. the refractive index of the material cannot be lower than 1.4, and the reflecting mirror 2 in the above structure can be removed, so that the polarized light beam is efficiently reflected to the liquid crystal on silicon device based on the principle of total internal reflection, and no loss of energy of the light beam exists.
Preferably, the mirror 1 may be a standard gold or silver or aluminum plated mirror for LCOS device operating wavelength, or may be a dielectric mirror having multiple layers of dielectric material laminated; the multilayer dielectric film with high reflectivity can be directly coated on the upper surface of the 1/4 wave plate, so that high-efficiency light beam reflection is realized.
Compared with the prior art, the application has the beneficial effects that:
(1) The application realizes the spatial light modulation insensitive to the polarization state of the incident light.
(2) The liquid crystal on silicon device is an integrated system and does not require the assistance of separate optical elements.
(3) No pixel crosstalk is introduced, i.e. the thickness of the liquid crystal layer is not increased.
(4) The optical paths of the two polarized light beams in the system are consistent.
Drawings
FIG. 1 is a schematic diagram of the basic structure of a polarization insensitive LCOS device of the present application;
FIG. 2 is a schematic diagram of the basic structure of a LCOS device of the present application;
FIG. 3 is a schematic diagram of a polarization insensitive LCOS modulation structure according to the present application;
FIG. 4 is a schematic diagram of a polarization insensitive LCOS modulator structure 1 of the present application;
FIG. 5 is a schematic diagram of a polarization insensitive LCOS modulator structure 2 of the present application;
FIG. 6 is a schematic diagram of a polarization insensitive LCOS modulator structure 3 of the present application;
fig. 7 is a schematic diagram of a polarization insensitive liquid crystal on silicon modulator structure 4 of the present application.
Detailed Description
In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the application may be practiced without one or more of these details. In other instances, well-known features have not been described in detail in order to avoid obscuring the application. In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
Furthermore, the terms "mounted," "configured," "provided," "connected," "coupled," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other. The application will be described in detail below with reference to the drawings in connection with embodiments.
As shown in fig. 1, the new design of the front glass of the liquid crystal on silicon device of the present application allows polarization insensitive spatial light modulation; the main structure of the silicon-based liquid crystal device comprises a glass front plate, a liquid crystal layer and a track backboard, wherein the glass front plate is formed by materials such as a polarization beam splitter, a 1/4 wave plate, a reflector and the like, the working polarization direction of the silicon-based liquid crystal device is s polarization, an incident light beam passes through the polarization beam splitter, and a p polarization state part directly passes through the reflector 2 and is distributed to one area of the liquid crystal spatial light modulator; the s polarization state is partially reflected, passes through the 1/4 wave plate for 2 times and the reflecting mirror 1, is converted into p polarization, and is finally distributed to another area of the liquid crystal spatial light modulator; the design polarization direction of the liquid crystal spatial light modulator is p polarization direction, so that the spatial modulation of two light beams is realized; the modulated light beams are spatially combined again through the structure and respectively have different polarization states, and finally equivalent spatial light modulation for the two polarization states is formed; fig. 2 is a schematic diagram of the basic structure of a liquid crystal on silicon device, and fig. 3 is a schematic diagram of the second scheme described in the background art.
The incident light beam passes through the polarization beam splitter, the s-polarized part directly passes through the reflecting mirror 2 and is distributed to one area of the liquid crystal spatial light modulator; the P polarization state is partially reflected, passes through the 1/4 wave plate for 2 times and the reflecting mirror 1, is converted into s polarization, and is finally distributed to the other area of the liquid crystal spatial light modulator; the design polarization direction of the liquid crystal spatial light modulator is s polarization direction, so that the spatial modulation of two light beams is realized; the modulated light beams are spatially combined again through the structure and respectively have different polarization states, and finally equivalent spatial light modulation of the two polarization states is formed.
If the material of the polarization beam splitter is properly selected, that is, the refractive index of the material cannot be lower than 1.4, the reflector 2 in fig. 4 can be removed; as shown in fig. 5, the s-polarized light beam is now reflected to the liquid crystal on silicon device with high efficiency based on the principle of total internal reflection; thus, the structure in fig. 5 has the same function as the structure of fig. 4, and there is no loss of beam energy.
Similarly, if the materials of the polarization beam splitter are properly selected, the structure shown in fig. 6 can be simplified into the structure shown in fig. 7, that is, the mirror 2 is removed, and the light beam is efficiently reflected onto the liquid crystal on silicon device by the total internal reflection principle at the interface, so that no light beam energy loss is generated.
In the configuration shown in fig. 4-7, mirror 1 can be a standard gold or silver or aluminum plated mirror for LCOS device operating wavelength, or can be a dielectric mirror with a stack of multiple layers of dielectric materials; the multilayer dielectric film with high reflectivity can be directly coated on the upper surface of the 1/4 wave plate, so that high-efficiency light beam reflection is realized.
The above embodiments are only preferred embodiments of the present application, and are not limiting to the technical solutions of the present application, and any technical solution that can be implemented on the basis of the above embodiments without inventive effort should be considered as falling within the scope of protection of the patent claims of the present application.
Although embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the application, the scope of which is defined in the appended claims and their equivalents.

Claims (4)

1. A polarization insensitive liquid crystal device characterized by: the main structure of the silicon-based liquid crystal device comprises a glass front plate, a liquid crystal layer and a track backboard, wherein the glass front plate is composed of a polarization beam splitter, a 1/4 wave plate, a reflector and other materials, the working polarization direction of the silicon-based liquid crystal device is s polarization, an incident light beam passes through the polarization beam splitter, and a p polarization state part directly passes through the reflector 2 and is distributed to one area of the liquid crystal spatial light modulator; the s polarization state is partially reflected, passes through the 1/4 wave plate for 2 times and the reflecting mirror 1, is converted into p polarization, and is finally distributed to another area of the liquid crystal spatial light modulator; the design polarization direction of the liquid crystal spatial light modulator is p polarization direction, so that the spatial modulation of two light beams is realized; the modulated light beams are spatially combined again through the structure and respectively have different polarization states, and finally equivalent spatial light modulation of the two polarization states is formed.
2. A polarization insensitive liquid crystal device according to claim 1 wherein: the incident light beam passes through the polarization beam splitter, and the s-polarized part directly passes through the reflector 2 and is distributed to one area of the liquid crystal spatial light modulator; the P polarization state is partially reflected, passes through the 1/4 wave plate for 2 times and the reflecting mirror 1, is converted into s polarization, and is finally distributed to the other area of the liquid crystal spatial light modulator; the design polarization direction of the liquid crystal spatial light modulator is s polarization direction, so that the spatial modulation of two light beams is realized; the modulated light beams are spatially combined again through the structure and respectively have different polarization states, and finally equivalent spatial light modulation of the two polarization states is formed.
3. A polarization insensitive liquid crystal device according to claims 1, 2, characterized in that: the material selection of the polarization beam splitter is proper, namely the refractive index of the material cannot be lower than 1.4, the reflecting mirror 2 in the structure can be removed, and the polarized light beam is efficiently reflected to the silicon-based liquid crystal device based on the principle of total internal reflection, and no loss of light beam energy exists.
4. A polarization insensitive liquid crystal device according to claims 1, 2, characterized in that: the reflector 1 can be a standard gold-plated or silver-plated or aluminum-plated reflector for LCOS device working wavelength, or can be a dielectric reflector with a plurality of layers of dielectric materials laminated; the multilayer dielectric film with high reflectivity can be directly coated on the upper surface of the 1/4 wave plate, so that high-efficiency light beam reflection is realized.
CN202211493120.0A 2022-11-25 2022-11-25 Polarization insensitive silicon-based liquid crystal device Active CN116909051B (en)

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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1588162A (en) * 2004-09-17 2005-03-02 华中科技大学 Two path 2X2 light switch and 4X4 free space light switch composed of it
US20100171928A1 (en) * 2009-01-06 2010-07-08 Herb He Huang Single-imager projection engine assembly
CN101930126A (en) * 2009-06-23 2010-12-29 江苏丽恒电子有限公司 Integrated single sided board projection engine
CN102906626A (en) * 2010-05-19 2013-01-30 3M创新有限公司 Polarized projection illuminator
US20130162954A1 (en) * 2011-12-22 2013-06-27 Min Aik Technology Co., Ltd. Lcos projection system
CN104049375A (en) * 2014-06-05 2014-09-17 华中科技大学 Polarization independent space light modulation method and device
CN104216116A (en) * 2013-05-23 2014-12-17 全视技术有限公司 Near-eye display systems, devices and methods
US20160097930A1 (en) * 2014-10-06 2016-04-07 Steven John Robbins Microdisplay optical system having two microlens arrays
CN209356770U (en) * 2019-03-08 2019-09-06 中国电子科技集团公司电子科学研究院 Polarize unrelated phasing device
CN112505835A (en) * 2020-12-09 2021-03-16 华太极光光电技术有限公司 Polarization-independent optical path scanning delay device and method
US20210096358A1 (en) * 2018-04-26 2021-04-01 Cart Zeiss Microscopy GmbH Optical arrangement and method for light beam shaping for a light microscope
CN216118212U (en) * 2020-09-11 2022-03-22 鲁姆斯有限公司 Optical system

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1588162A (en) * 2004-09-17 2005-03-02 华中科技大学 Two path 2X2 light switch and 4X4 free space light switch composed of it
US20100171928A1 (en) * 2009-01-06 2010-07-08 Herb He Huang Single-imager projection engine assembly
CN101930126A (en) * 2009-06-23 2010-12-29 江苏丽恒电子有限公司 Integrated single sided board projection engine
CN102906626A (en) * 2010-05-19 2013-01-30 3M创新有限公司 Polarized projection illuminator
US20130162954A1 (en) * 2011-12-22 2013-06-27 Min Aik Technology Co., Ltd. Lcos projection system
CN104216116A (en) * 2013-05-23 2014-12-17 全视技术有限公司 Near-eye display systems, devices and methods
CN104049375A (en) * 2014-06-05 2014-09-17 华中科技大学 Polarization independent space light modulation method and device
US20160097930A1 (en) * 2014-10-06 2016-04-07 Steven John Robbins Microdisplay optical system having two microlens arrays
US20210096358A1 (en) * 2018-04-26 2021-04-01 Cart Zeiss Microscopy GmbH Optical arrangement and method for light beam shaping for a light microscope
CN209356770U (en) * 2019-03-08 2019-09-06 中国电子科技集团公司电子科学研究院 Polarize unrelated phasing device
CN216118212U (en) * 2020-09-11 2022-03-22 鲁姆斯有限公司 Optical system
CN112505835A (en) * 2020-12-09 2021-03-16 华太极光光电技术有限公司 Polarization-independent optical path scanning delay device and method

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