CN116907574A - Bimodal flexible sensor array imitating scorpion comb device and preparation method thereof - Google Patents
Bimodal flexible sensor array imitating scorpion comb device and preparation method thereof Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention relates to a bimodal flexible sensor array imitating a scorpion comb and a preparation method thereof, wherein the bimodal sensor array imitating the scorpion comb comprises the following components from top to bottom: the air-permeable plate of the imitation comb device is made of flexible materials and comprises an air-permeable array with through holes and convex hulls; the gas sensitive layer comprises a plurality of areas which are arranged corresponding to each gas permeable array area and are used for contacting target gas and generating corresponding electric signals; a comb-like porous dielectric layer made of a flexible material, comprising a first microstructure and a first signal transmission channel for sensing and responding to a gas signal, wherein the comb-like porous dielectric layer has a random porous structure; a substrate made of a flexible material including a second microstructure for sensing and responding to pressure signals and a second signal transmission channel. Compared with the existing bimodal sensor, the bimodal flexible sensor array of the scorpion-imitating comb device provided by the invention has the characteristics of high sensitivity, linearity, weak signal crosstalk, high selectivity and the like.
Description
Technical Field
The invention relates to the technical field of flexible sensors, in particular to a bimodal flexible sensor array imitating scorpion hackles and a preparation method thereof.
Background
In recent years, multimode sensors have attracted considerable attention, particularly for sensing both pressure and gas. Although multi-modal electronic skin platforms have been reported, in addition to complex manufacturing procedures, multi-stimulus measurements suffer from relatively low sensitivity, low selectivity, and cross-talk.
In general, when a dual-mode sensing system detects external stimulus at the same time, unexpected signal interference or fluctuation may occur, sensor accuracy is reduced due to distortion of an output signal, errors and noise are increased, even erroneous data are generated, resulting in degradation of system performance, and potential safety hazards exist, so in order to achieve reliable signal acquisition in an actual operating environment, development of interference-free, dual-mode electronic skin with high sensitivity, selectivity and stability is urgently required.
Disclosure of Invention
First, the technical problem to be solved
In view of the above-mentioned shortcomings and disadvantages of the prior art, the present invention provides a bimodal flexible sensor array simulating a scorpion comb and a preparation method thereof, which solves the technical problems of relatively low sensitivity, low selectivity and crosstalk of the existing multimodal sensor.
(II) technical scheme
In order to achieve the above purpose, the main technical scheme adopted by the invention comprises the following steps:
in a first aspect, embodiments of the present invention provide a bimodal flexible sensor array for a scorpion-like comb device, comprising, from top to bottom:
the air-permeable plate of the imitation comb device is made of flexible materials and comprises an air-permeable array with through holes and convex hulls;
the gas sensitive layer comprises a plurality of areas which are arranged corresponding to each gas permeable array area and are used for contacting target gas and generating corresponding electric signals;
a comb-like porous dielectric layer made of a flexible material, comprising a first microstructure and a first signal transmission channel for sensing and responding to a gas signal, wherein the comb-like porous dielectric layer has a random porous structure; the method comprises the steps of,
a substrate made of a flexible material including a second microstructure for sensing and responding to pressure signals and a second signal transmission channel;
the first microstructure and the first signal transmission channel are located on a first plane, the second microstructure and the second signal transmission channel are located on a second plane, and the interval distance between the first plane and the second plane is not smaller than the thickness of the comb-like porous dielectric layer.
Alternatively, the process may be carried out in a single-stage,
the upper surface of the imitation comb ventilation plate is alternately provided with arc-shaped concave surfaces and plane surfaces, and the ventilation arrays with through holes and convex hulls are arranged on the arc-shaped concave surfaces at fixed intervals;
the lower surface of the imitation comb breathable plate is a plane;
the upper surface of the imitation comb breathable plate is a side surface deviating from the gas sensitive layer; the lower surface of the imitation comb breathable plate is a side surface close to the gas sensitive layer.
Optionally, the size of each of the tiles corresponds to the area size of the air-permeable array at the corresponding location, and the tiles overlie the first microstructure.
Optionally, the projected areas of the first microstructure and the second microstructure on the comb-like porous dielectric layer correspond.
Alternatively, the process may be carried out in a single-stage,
the first microstructure comprises interdigital electrodes, and the first signal transmission channel comprises conductive paths arranged in a grid;
the second microstructure comprises square electrodes, and the second signal transmission channel comprises conductive paths arranged in a grid.
In a second aspect, an embodiment of the present invention provides a method for preparing a bimodal flexible sensor array of a scorpion-like comb device, for preparing a bimodal flexible sensor array as described above, comprising:
performing primary reverse molding on a preset substrate with a convex hull to obtain a template with a convex hull reverse structure, performing secondary reverse molding on the template to obtain a substrate with a convex hull structural layer, and finally punching the substrate to obtain a ventilation array with through holes and convex hulls;
respectively adding [ EMIM ] + [ TFSI ] -with a certain concentration into polyurethane acrylate resin to form a mixed solution, and preparing a gas sensitive layer by a photoetching method;
filling a 3D template in the elastomer, and then etching away the 3D template to prepare a random porous tissue, thereby obtaining the simulated comb porous dielectric layer;
and respectively carrying out metal deposition on the imitation comb porous dielectric layer and a preset substrate made of a flexible material, obtaining a first microstructure and a first signal transmission channel on the imitation comb porous dielectric layer, and obtaining a second microstructure and a second signal transmission channel on the substrate made of the flexible material.
Optionally, a template with a convex hull reverse structure is prepared by performing primary reverse molding on a preset substrate with a convex hull, a substrate with a structural layer with a convex hull is prepared by performing secondary reverse molding on the template, and finally, a breathable array with through holes and convex hulls is obtained by punching the substrate, wherein the method comprises the following steps:
processing a substrate with a convex hull and an arc-shaped concave surface by ultra-precision processing equipment or a die cutting technology;
preparing a template with an arc-shaped and convex hull reverse structure by carrying out one-time reverse molding on a substrate with a convex hull and an arc-shaped concave surface;
mixing PDMS solution and curing agent in a weight ratio of 10:1, and degassing for 15-25 minutes to obtain an elastomer;
pouring the elastomer on the template with the arc-shaped and convex hull reverse structures, and preparing a substrate with a convex hull and arc-shaped concave structural layer through secondary reverse molding;
the biopsy puncher is adopted to punch a substrate with a convex hull and a structural layer of an arc concave surface, so that a breathable array with through holes and the convex hull is obtained, the arc concave surfaces and planes are alternately distributed on the upper surface, and the breathable array with the through holes and the convex hull is arranged on the arc concave surface at fixed intervals.
Optionally, adding [ EMIM ] + [ TFSI ] -with a certain concentration into the polyurethane acrylate resin to form a mixed solution, and preparing the gas sensitive layer by a photoetching method comprises the following steps:
adding 20, 40, 60 and 80 percent of [ EMIM ] + [ TFSI ] -, according to the weight of the PUA resin, so as to obtain a mixed solution;
stirring the mixed solution at 70-90 ℃ for 12-15 hours, and forming a patterned ionic PUA film on the pretreated substrate by adopting a instillation method and an ultraviolet irradiation method to obtain the gas sensitive layer.
Optionally, filling a 3D template in the elastomer, and then etching away the 3D template to prepare a random porous tissue, wherein the preparation of the simulated comb porous dielectric layer comprises the following steps:
mixing PDMS solution and curing agent in a weight ratio of 10:1, and degassing for 15-25 minutes to obtain an elastomer;
pouring the elastomer on a 3D template, and curing at 70-90 ℃ for 1.5-2.5 hours to obtain a PDMS-sugar mixture;
the PDMS-sugar mixture was heat treated so that the sugar portion of the PDMS-sugar mixture was dissolved in water, and then a random porous tissue was formed.
Alternatively, the process may be carried out in a single-stage,
the first microstructure, the first signal transmission channel, the second microstructure and the second signal transmission channel are all made of inert metal materials;
the air-permeable plate of the imitation comb and the porous dielectric layer of the imitation comb are any one of polydimethylsiloxane, perfluoroethylene propylene copolymer, polyethylene terephthalate, polyimide, polyurethane acrylic ester, polyethylene naphthalate and polyether sulfone.
(III) beneficial effects
The beneficial effects of the invention are as follows:
the invention refers to the microstructure of the scorpion comb device sensing gas in the gas sensing structure part, wherein the through holes and the convex hulls on the upper surface of the ventilation plate of the imitation comb device increase the contact area between the bimodal sensor and the volatile gas, the through holes and the convex hulls can change the direction of the gas flow, so that the gas flow speed is reduced, and the gas flow vortex is formed between the through holes and the convex hulls, thereby the gas carrying chemical molecules is fully contacted with the possible contact surface of the comb device, and the specificity of the ionic liquid and the volatile gas is added, so that the gas sensing can also show high selectivity and high sensitivity even if the bimodal flexible sensor array generates deformation within a certain range.
The invention refers to the cavity structure of the scorpion comb receptor in the pressure sensing structure part, and the inner porous structure of the imitated comb porous dielectric layer designed by the inspiration enhances the deformation uniformity, thereby improving the detection threshold, the working range and the linearity of the sensor and enhancing the pressure sensing performance.
Meanwhile, the invention also provides an original multi-layer perception structure design, the function of the scorpion comb double-peak receptor is introduced into the design, namely, two types of cells in the scorpion comb receptor respectively sense two types of signals of gas and pressure, the two types of signals cannot interfere with each other before being transmitted into the same nerve structure, the two types of signals can sense and respond to the signals of two types (gas and pressure) with different peak values, and meanwhile, the types of the signals are distinguished, so that the scorpion can make more accurate sensing and decision through the comb, and therefore, the invention benefits from the optimized layered structure to realize the effect of respectively sensing the gas and pressure signals, simultaneously detecting external stimulus, transmitting independent electric signals and realizing weak signal crosstalk.
Drawings
FIG. 1 is a first schematic structural view of a bimodal flexible sensor array of a simulated scorpion comb provided by the present invention;
FIG. 2 is a second schematic structural view of the bimodal flexible sensor array of the imitation scorpion comb provided by the invention;
FIG. 3 is a schematic view of the structure of the comb-like ventilation plate of the bimodal flexible sensor array of the scorpion-like comb provided by the invention;
FIG. 4 is a gas sensing structural portion of the bimodal flexible sensor array of the imitation scorpion comb provided by the present invention;
FIG. 5 is a pressure sensing structural portion of the bimodal flexible sensor array of the imitation scorpion comb provided by the present invention;
FIG. 6 is a first microstructure and a first signal transmission channel of the bimodal flexible sensor array of the imitation scorpion comb provided by the invention;
FIG. 7 is a second microstructure and a first signal transmission path of the bimodal flexible sensor array of the imitation scorpion comb provided by the invention;
FIG. 8 is a schematic diagram of a first construction of a comb-like porous dielectric layer of a bimodal flexible sensor array of a scorpion-like comb provided by the present invention;
FIG. 9 is a schematic diagram of a second construction of a comb-like porous dielectric layer of a bimodal flexible sensor array of a scorpion-like comb provided by the present invention;
FIG. 10 is a schematic view of a third construction of a comb-like porous dielectric layer of a bimodal flexible sensor array of a scorpion-like comb provided by the present invention.
[ reference numerals description ]
100: a comb imitation ventilation plate; 101: a through hole; 102: convex hulls; 103: an arc-shaped concave surface;
200: a gas sensitive layer;
300: a comb-like porous dielectric layer; 301: a first signal transmission channel; 302: a first microstructure; 303: a porous tissue;
400: a non-woven fabric tape layer; 401: a second signal transmission channel; 402: a second microstructure.
Detailed Description
The invention will be better explained for understanding by referring to the following detailed description of the embodiments in conjunction with the accompanying drawings.
Organisms form a plurality of excellent biological systems in a long evolution process, such as structures, functions, signal processing modes and the like of the organisms, and provide excellent blue books for bionic research. The scorpion comb surface array is distributed with a plurality of convex hulls 102 and concave pit structures, so that the speed of gas flow and the residence time on the comb surface are increased, and the gas sensing sensitivity of the comb is further improved. Two types of cells in the scorpion comb receptor respectively sense weak gas and pressure signals in a living environment, the two signals govern the same nerve structure, and the receptor is also called a bimodal receptor, so that the mutual interference of the two types of signal sensing processes is avoided.
The invention discloses a bimodal flexible sensor array imitating scorpions, which is manufactured by simulating a scorpion comb with excellent sensing capability in the biological world, is used as a bimodal sensor, and can sense pressure stimulus and chemical stimulus at the same time, sensing nerves of the scorpion comb are distributed in a cavity of the PEG sensor, the PEG sensor is distributed on a large number of arrays on the cambered surface of the comb, when volatile chemical substances or chemical signals pass through convex hulls 102, pits and cambered surfaces on the surface of the comb, after the gas flow rate is reduced and the retention time is prolonged, the volatile chemical substances or chemical signals enter the interior of the comb sensor through openings on the pits, and meanwhile, when the comb PEG sensor receives the pressure signals, the cavity is deformed, and synapses on nerves convert the chemical signals and the pressure signals into electric signals to be conducted on nerves respectively.
As shown in fig. 1 and 2, the bimodal flexible sensor array imitating scorpion comb according to the embodiment of the invention includes from top to bottom: the imitation comb breather plate 100 is made of a flexible material, specifically referred to herein as polydimethylsiloxane, perfluoroethylene propylene copolymer, polyethylene terephthalate, polyimide, polyurethane acrylate, polyethylene naphthalate, and polyethersulfone, and comprises a breather array having through holes 101 and a convex hull 102; a gas sensitive layer 200 comprising a plurality of patches disposed for each gas permeable array region for contacting a target gas and generating a corresponding electrical signal, wherein the target gas comprises acetone, hexane, and propanol; the simulated comb porous dielectric layer 300 is made of a flexible material, wherein the flexible material refers to polydimethylsiloxane, perfluoroethylene propylene copolymer, polyethylene terephthalate, polyimide, polyurethane acrylate, polyethylene naphthalate and polyethersulfone, the flexible material comprises a first microstructure 302 and a first signal transmission channel 301 which are used for sensing and responding to gas signals, and the interior of the simulated comb porous dielectric layer 300 is provided with a random porous tissue 303; and, a substrate made of a flexible material including a second microstructure 402 and a second signal transmission channel 401 for sensing and responding to a pressure signal; wherein the first microstructure 302 and the first signal transmission channel 301 are in a first plane, the second microstructure 402 and the second signal transmission channel 401 are in a second plane, and at least the thickness of the comb-like porous dielectric layer 300 is spaced between the first plane and the second plane.
The invention refers to the microstructure of the scorpion comb device sensing gas in the gas sensing structure part, wherein the through holes 101 and the convex hulls 102 on the upper surface of the imitated comb device ventilation plate 100 increase the contact area between the bimodal sensor and the volatile gas, the through holes 101 and the bulges can change the direction of the gas flow, so that the gas flow speed is reduced, and the gas flow vortex is formed between the through holes 101 and the convex hulls 102, so that the gas carrying chemical molecules is fully contacted with the possible contact surface of the comb device, and the specificity of the ionic liquid and the volatile gas is selected, therefore, the gas sensing can show high selectivity and high sensitivity even if the bimodal flexible sensor array generates deformation within a certain range.
The invention refers to the cavity structure of the scorpion comb receptor in the pressure sensing structure part, and the inner porous structure of the imitated comb porous dielectric layer 300 designed by inspiring the cavity structure enhances the deformation uniformity, thereby improving the detection threshold value, the working range and the linearity of the sensor and enhancing the pressure sensing performance.
Meanwhile, the invention also provides an original multi-layer perception structure design, the function of the scorpion comb double-peak receptor is introduced into the design, namely, two types of cells in the scorpion comb receptor respectively sense two types of signals of gas and pressure, the two types of signals cannot interfere with each other before being transmitted into the same nerve structure, the two types of signals can sense and respond to the signals of two types (gas and pressure) with different peak values, and meanwhile, the types of the signals are distinguished, so that the scorpion can make more accurate sensing and decision through the comb, and therefore, the invention benefits from the optimized layered structure to realize the effect of respectively sensing the gas and pressure signals, simultaneously detecting external stimulus, transmitting independent electric signals and realizing weak signal crosstalk.
In order to better understand the above technical solution, exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
As shown in fig. 3, the upper surface of the air-permeable plate 100 of the imitation comb device is alternately provided with arc-shaped concave surfaces 103 and planes, and an air-permeable array provided with through holes 101 and convex hulls 102 is arranged on the arc-shaped concave surfaces 103 at fixed intervals; the lower surface of the imitation comb ventilation plate 100 is a plane; the convex hulls 102 and the through holes 101 are alternately distributed and correspond to the gas sensitive layer 200 below, so that the flow rate of volatile gas is reduced, the surface residence time is prolonged, and higher sensitivity is obtained. Wherein the upper surface of the imitation comb ventilation plate 100 is the side facing away from the gas sensitive layer 200; the lower surface of the hackle-like ventilation plate 100 is the side surface close to the gas sensitive layer 200. Preferably, the diameter of the through holes 101 is 300-400 μm, and the distance between two adjacent through holes 101 is 400-5000 μm; the diameter of the convex hull 102 is 100-300 μm, and the distance between two adjacent convex hulls 102 is 300-4000 μm.
Next, the gas sensitive layer 200, i.e., the ion PUA film, is mounted under the comb-like gas permeable plate 100, opposite to the positions of the through holes 101 and the convex hulls 102, and the ionic liquid exists in the PUA matrix in the form of cation-anion pairs, forming an ion PUA film having a high viscosity. When the film is exposed to chemical gases such as acetone, n-hexane, propanol, etc., the film is peeled off. The conductivity equation of the electrolyte of the gas sensing section 210 is therefore:
wherein sigma is the conductivity of the electrolyte, N A Is the Avgalileo number, c i ，q i ，D i The concentration, charge and diffusion coefficient of i ions, respectively.
The ionic PUA membrane is formed by using an ionic liquid as a cation-anion pair in a PUA matrix, and when the film is exposed to chemical gases such as acetone, hexane, propanol, etc., ion interactions of the ion pair are suppressed as molecules of the chemical gases penetrating the ionic PUA membrane are adsorbed by the ionic liquid. Thus, the viscosity of the ionic liquid decreases and the number of free ions increases. According to the Nernst Einstein equation, the enhanced ion diffusivity of the chemical gas increases the conductivity, thereby measuring the concentration of the volatile chemical gas.
Further, referring to fig. 4, it can be seen that the size of each patch is consistent with the area of the ventilation array at the corresponding location, and the patch is covered on the first microstructure 302. I.e. the gas sensitive layer 200 covers the interdigital electrodes and contacts the through holes 101 of the lower layer of the comb-like air-permeable plate 100. Preferably, the thickness of the gas sensitive layer 200 is 20 to 100 μm.
Further, as shown in FIG. 5, the projected areas of the first microstructure 302 and the second microstructure 402 on the hackle-simulating porous dielectric layer 300 correspond. The square electrode in the pressure sensing electrode layer corresponds to the interdigital electrode, and when the capacitive touch sensor is pressed, the capacitance between the square electrode and the interdigital electrode changes.
Further, as shown in fig. 6, the first microstructure 302 includes interdigital electrodes, and the first signal transmission channel 301 includes conductive paths arranged in a grid, where each interdigital electrode corresponds to a gas sensor under one gas permeable array; the second microstructure 402 includes square electrodes, and the second signal transmission channel 401 includes conductive paths arranged in a grid. Preferably, the thickness of the first microstructure 302 and the first signal transmission channel 301 is 30-50 nm; the thickness of the second microstructure 402 and the second signal transmission channel 401 is 30 to 50nm.
The contact surface between the interdigital electrode and the square electrode is a comb-like porous dielectric layer 300, the contact surface between the first signal transmission channel 301 and the second signal transmission channel 401 is also a comb-like porous dielectric layer 300, and the non-woven fabric tape layer 400 is arranged below the square electrode and the second signal transmission channel 401. The expression equation for the capacitance of the pressure sensing portion 310 is therefore:
wherein ε is 0 Dielectric constant, ε, of vacuum r Is the relative permittivity of the dielectric layer, a is the overlap area between the two electrodes, and d is the distance between the electrodes.
Capacitive is one of the most common mechanisms in touch sensing, where a capacitive touch sensor converts a mechanical input into a change in capacitance, and a pressure sensing portion is fabricated by sandwiching a comb-like porous dielectric layer 300 between two parallel electrodes, an interdigital electrode and a square electrode, respectively. The opposite charge on the electrode creates a capacitance that can be mechanically altered by the variation of the simulated comb porous dielectric layer 300 upon application of a voltage. In three variables (ε) responsive to mechanical changes r In a, a and d), d and a are typically used to measure normal and shear forces, respectively.
As shown in fig. 8, 9 and 10, the random porous structure 303 is a honeycomb-like random porous structure in which small pores are interposed between large pores, wherein the average diameter of the small pores is 3.4 to 3.6 μm and the average diameter of the large pores is 16.0 to 16.2 μm.
It should be noted that the substrate made of flexible material is a non-woven fabric tape, and the non-woven fabric tape is directly contacted with the working surface.
In another aspect, the present invention provides a method for preparing a bimodal flexible sensor array of a scorpion-like comb, for preparing a bimodal flexible sensor array as above, comprising:
s1, performing primary reverse molding on a preset substrate with a convex hull 102 to obtain a template with a convex hull 102 reverse structure, performing secondary reverse molding on the template to obtain a substrate with a structural layer of the convex hull 102, and finally punching the substrate to obtain a ventilation array with through holes 101 and the convex hull 102.
Further, step S1 includes:
s11, processing a substrate with a convex hull 102 and an arc concave surface 103 by ultra-precise processing equipment or a die cutting technology.
S12, preparing a template with an arc shape and a convex hull 102 reverse structure by performing one-time reverse molding on a substrate with the convex hull 102 and the arc-shaped concave surface 103.
S13, mixing the PDMS solution and the curing agent in a weight ratio of 10:1, and degassing for 15-25 minutes to obtain the elastomer.
S14, pouring the elastomer on a template with an arc-shaped and convex hull 102 reverse structure, and preparing the substrate with the convex hull 102 and the arc-shaped concave 103 structural layer through secondary reverse molding.
S15, punching a substrate with a structural layer of convex hulls 102 and arc concave surfaces 103 by adopting a biopsy puncher to obtain an air-permeable array with through holes 101 and convex hulls 102, and further obtaining an imitation comb air-permeable plate 100 with the arc concave surfaces 103 and planes alternately distributed on the upper surface, wherein the air-permeable array with the through holes 101 and the convex hulls 102 is arranged on the arc concave surfaces 103 at fixed intervals.
In a specific implementation, step S1 includes: the breathable plate 100 of the imitation comb is manufactured by processing a substrate of a convex hull 102 and a concave arc surface 103 through ultra-precise processing equipment or die cutting technology, preparing a template with an arc shape and a convex hull 102 reverse structure through one-time reverse molding, mixing PDMS solution and curing agent in a weight ratio of 10:1, degassing for 20 minutes, pouring PDMS on the template, and finally preparing the through hole 101 by using a disposable biopsy punch (a disposable biopsy punch).
S2, respectively adding [ EMIM ] + [ TFSI ] -with a certain concentration into polyurethane acrylate resin to form a mixed solution, and preparing the gas sensitive layer 200 by a photoetching method.
Further, step S2 includes:
s21, adding 20, 40, 60 and 80 percent of [ EMIM ] + [ TFSI ] - (namely 1-ethyl-3-methylimidazoline bis (trifluoromethyl sulfonyl) imine) according to the weight of the PUA resin to obtain a mixed solution.
S22, stirring the mixed solution at 70-90 ℃ for 12-15 hours, and forming a patterned ionic PUA film on the pretreated substrate by adopting a instillation method and an ultraviolet irradiation method to obtain the gas sensitive layer 200.
In a specific embodiment, step 2 includes: preparation of gas sensitive layer 200: preparation of gas sensitive layer 200 ion PUA film first, 20, 40, 60 and 80% [ EMIM ] + [ TFSI ] -, based on the weight of PUA resin, were added and the mixed ion PUA solution was stirred at 80 ℃ for 14 hours. And forming a patterned ionic PUA film on the pretreated substrate by adopting a instillation method and an ultraviolet irradiation method. All manufacturing processes are performed under ambient conditions.
And S3, filling the elastomer with a 3D template, and then etching away the 3D template to prepare the irregular porous tissue 303, thereby obtaining the simulated comb porous dielectric layer 300. The 3D templates include, but are not limited to, sugar, nickel foam, and the like.
Further, step S3 includes:
s31, mixing the PDMS solution and the curing agent in a weight ratio of 10:1, and degassing for 15-25 minutes to obtain the elastomer.
S32, pouring the elastomer on a 3D template, and curing at 70-90 ℃ for 1.5-2.5 hours to obtain the PDMS-sugar mixture.
S33, performing heat treatment on the PDMS-sugar mixture to enable sugar part of the PDMS-sugar mixture to be dissolved in water, and then forming the irregular porous tissue 303.
In a specific embodiment, step S3 includes: step three, preparing a comb-like porous dielectric layer 300: the PDMS solution and curing agent were mixed in a weight ratio of 10:1 and degassed for 20 minutes. PDMS was poured onto a cube sugar and cured at 80 ℃ for 2 hours. After heat treatment, the PDMS-sugar mixture was dissolved in water at 80 ℃ and then a random porous structure 303 was formed.
S4, respectively carrying out metal deposition on the imitation comb porous dielectric layer 300 and a preset substrate made of flexible materials, obtaining a first microstructure 302 and a first signal transmission channel 301 on the imitation comb porous dielectric layer 300, and obtaining a second microstructure 402 and a second signal transmission channel 401 on the substrate made of flexible materials.
In a specific embodiment, step S4 includes:
preparing a substrate: a square substrate with a regular shape is cut on the surface of the non-woven fabric adhesive tape by a laser marking machine, and a square electrode and a grid second signal transmission channel 401 are positioned on the adhesive surface of the non-woven fabric adhesive tape layer 400. And (3) selecting and cutting a substrate which is made of a flexible material and is regular square on the surface of the non-woven fabric adhesive tape by adopting a laser marking machine.
Preparing an electrode: metal deposition is sequentially carried out on the comb-like porous dielectric layer 300 and the nonwoven adhesive tape 400, the deposition time is 150-200 s, and the deposition thickness is 30-50 nm. Methods of metal deposition on the comb-like porous dielectric layer 300 to obtain interdigitated electrodes and the first conductive path 301, and on the nonwoven tape 400 to obtain square electrodes and the second signal transmission path 401 include, but are not limited to, magnetron sputtering, thermal evaporation plating, and electron beam evaporation plating, preferably magnetron sputtering.
The prepared comb-like porous dielectric layer 300 was cut to a thickness of 4 to 8 mm. The copper tape is used as an electrode wire and is adhered to the first signal transmission channel 301 of the gas sensing part, thereby measuring the change of the concentration of the volatile gas in the environment.
When a machine is applied to the bimodal flexible sensor array of the imitation scorpion comb using the copper strips as electrode wires and being adhered to the second signal transmission channel 401 of the pressure sensing part, the imitation comb ventilation plate 100 transmits force to the imitation comb porous dielectric layer 300, and the capacitance between the upper electrode and the lower electrode of the pressure sensing part is changed, so that the size of the machine is measured.
Further, the first microstructure 302, the first signal transmission channel 301, the second microstructure 402, and the second signal transmission channel 401 are made of inert metal materials including, but not limited to, gold, silver, copper, and platinum, and specifically, one or more of carbon nanoparticles, gold nanoparticles, platinum nanoparticles, silver nanoparticles, and copper nanoparticles.
Further, the hackle-like ventilation plate 100 and the hackle-like porous dielectric layer 300 are each any one of polydimethylsiloxane, perfluoroethylene propylene copolymer, polyethylene terephthalate, polyimide, urethane acrylate, polyethylene naphthalate, and polyethersulfone.
And, after step S4, further includes:
s5, integrated packaging: the dual-mode flexible sensor array imitating the scorpion comb is obtained by sequentially packaging the air-permeable plate 100 imitating the comb, the gas sensitive layer 200, the gas sensing electrode layer, the porous dielectric layer 300 imitating the comb, the pressure sensing electrode layer and the non-woven fabric adhesive tape layer 400 from bottom to top.
In summary, the present invention provides a bimodal flexible sensor array imitating a scorpion comb and a method for manufacturing the same, the bimodal flexible sensor array imitating a scorpion comb includes: the gas sensing electrode layer comprises interdigital electrodes and a first signal transmission channel 301, each interdigital electrode corresponds to one gas sensor, the interdigital electrodes are covered with a gas sensing layer 200 for sensing volatile chemical gas, the gas sensing layer 200 is provided with a comb-like ventilation plate 100, through holes 101 and convex hulls 102 are distributed in an array on an arc-shaped surface in the upper surface of the comb-like ventilation plate 100 in an intersecting manner, and the arc-shaped surface and a frontal plane are distributed on the comb-like ventilation plate 100 in an alternating manner. The non-woven fabric tape layer 400 is arranged below the comb-like porous dielectric layer 300, and the pressure sensing electrode is arranged between the comb-like porous dielectric layer 300 and the non-woven fabric tape layer 400 and comprises a square electrode and a second signal transmission channel 401.
Therefore, the invention increases the residence time of the gas on the surface of the sensor by means of the through hole 101, the convex hull 102 and the cambered surface structure on the upper surface of the imitation comb ventilation plate 100; meanwhile, under the action of external force, the comb-like porous dielectric layer 300 deforms so as to change the capacitance of the sensor, so that the bimodal sensor array has the characteristics of high sensitivity, linearity, weak signal crosstalk, high selectivity and the like.
The present invention integrates all two types of sensors into one bimodal flexible sensor array that emulates a scorpion comb, which adopts a layered structure such that each type of sensor provides an output response to a particular stimulus without exhibiting sensitivity to other stimuli.
Since the system/device described in the foregoing embodiments of the present invention is a system/device used for implementing the method of the foregoing embodiments of the present invention, those skilled in the art will be able to understand the specific structure and modification of the system/device based on the method of the foregoing embodiments of the present invention, and thus will not be described in detail herein. All systems/devices used in the methods of the above embodiments of the present invention are within the scope of the present invention.
It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as a method, system, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions.
It should be noted that in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The invention may be implemented by means of hardware comprising several distinct elements, and by means of a suitably programmed computer. In the claims enumerating several means, several of these means may be embodied by one and the same item of hardware. The use of the terms first, second, third, etc. are for convenience of description only and do not denote any order. These terms may be understood as part of the component name.
Furthermore, it should be noted that in the description of the present specification, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with the embodiment or example being included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art upon learning the basic inventive concepts. Therefore, the appended claims should be construed to include preferred embodiments and all such variations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, the present invention should also include such modifications and variations provided that they come within the scope of the following claims and their equivalents.
Claims (10)
1. A bimodal flexible sensor array of a scorpion-like comb device, comprising from top to bottom:
the air-permeable plate of the imitation comb device is made of flexible materials and comprises an air-permeable array with through holes and convex hulls;
the gas sensitive layer comprises a plurality of areas which are arranged corresponding to each gas permeable array area and are used for contacting target gas and generating corresponding electric signals;
a comb-like porous dielectric layer made of a flexible material, comprising a first microstructure and a first signal transmission channel for sensing and responding to a gas signal, wherein the comb-like porous dielectric layer has a random porous structure; the method comprises the steps of,
a substrate made of a flexible material including a second microstructure for sensing and responding to pressure signals and a second signal transmission channel;
the first microstructure and the first signal transmission channel are located on a first plane, the second microstructure and the second signal transmission channel are located on a second plane, and the interval distance between the first plane and the second plane is not smaller than the thickness of the comb-like porous dielectric layer.
2. A bimodal flexible sensor array for a scorpion-like comb as claimed in claim 1, wherein,
the upper surface of the imitation comb ventilation plate is alternately provided with arc-shaped concave surfaces and plane surfaces, and the ventilation arrays with through holes and convex hulls are arranged on the arc-shaped concave surfaces at fixed intervals;
the lower surface of the imitation comb breathable plate is a plane;
the upper surface of the imitation comb breathable plate is a side surface deviating from the gas sensitive layer; the lower surface of the imitation comb breathable plate is a side surface close to the gas sensitive layer.
3. The bimodal flexible sensor array of a scorpion-like comb as claimed in claim 1, wherein each of said tiles is of a size consistent with the area of said air permeable array in a corresponding location and overlies said first microstructure.
4. The bimodal flexible sensor array of a shotgun-like structure as defined in claim 1, wherein said first microstructure and said second microstructure correspond in projected area onto said shotgun-like porous dielectric layer.
5. A bimodal flexible sensor array as claimed in any one of claims 1 to 4, wherein,
the first microstructure comprises interdigital electrodes, and the first signal transmission channel comprises conductive paths arranged in a grid;
the second microstructure comprises square electrodes, and the second signal transmission channel comprises conductive paths arranged in a grid.
6. A method of manufacturing a bimodal flexible sensor array for a scorpion-like comb device for manufacturing a bimodal flexible sensor array as claimed in any one of claims 1 to 5, comprising:
performing primary reverse molding on a preset substrate with a convex hull to obtain a template with a convex hull reverse structure, performing secondary reverse molding on the template to obtain a substrate with a convex hull structural layer, and finally punching the substrate to obtain a ventilation array with through holes and convex hulls;
respectively adding [ EMIM ] + [ TFSI ] -with a certain concentration into polyurethane acrylate resin to form a mixed solution, and preparing a gas sensitive layer by a photoetching method;
filling a 3D template in the elastomer, and then etching away the 3D template to prepare a random porous tissue, thereby obtaining the simulated comb porous dielectric layer;
and respectively carrying out metal deposition on the imitation comb porous dielectric layer and a preset substrate made of a flexible material, obtaining a first microstructure and a first signal transmission channel on the imitation comb porous dielectric layer, and obtaining a second microstructure and a second signal transmission channel on the substrate made of the flexible material.
7. The method for manufacturing a bimodal flexible sensor array for a scorpion-like comb as claimed in claim 6, wherein the steps of preparing a template with a convex hull inverse structure by performing a first inverse molding on a preset substrate with convex hulls, preparing a substrate with a convex hull structural layer by performing a second inverse molding on the template, and finally punching the substrate to obtain a breathable array with through holes and convex hulls comprise:
processing a substrate with a convex hull and an arc-shaped concave surface by ultra-precision processing equipment or a die cutting technology;
preparing a template with an arc-shaped and convex hull reverse structure by carrying out one-time reverse molding on a substrate with a convex hull and an arc-shaped concave surface;
mixing PDMS solution and curing agent in a weight ratio of 10:1, and degassing for 15-25 minutes to obtain an elastomer;
pouring the elastomer on the template with the arc-shaped and convex hull reverse structures, and preparing a substrate with a convex hull and arc-shaped concave structural layer through secondary reverse molding;
the biopsy puncher is adopted to punch a substrate with a convex hull and a structural layer of an arc concave surface, so that a breathable array with through holes and the convex hull is obtained, the arc concave surfaces and planes are alternately distributed on the upper surface, and the breathable array with the through holes and the convex hull is arranged on the arc concave surface at fixed intervals.
8. The method for preparing a bimodal flexible sensor array for a scorpion-like device as claimed in claim 6, wherein the steps of adding a certain concentration of [ EMIM ] + [ TFSI ] -to polyurethane acrylate resin to form a mixed solution, and preparing a gas sensitive layer by a photo-etching method comprise:
adding 20, 40, 60 and 80 percent of [ EMIM ] + [ TFSI ] -, according to the weight of the PUA resin, so as to obtain a mixed solution;
stirring the mixed solution at 70-90 ℃ for 12-15 hours, and forming a patterned ionic PUA film on the pretreated substrate by adopting a instillation method and an ultraviolet irradiation method to obtain the gas sensitive layer.
9. The method for manufacturing a bimodal flexible sensor array for a scorpion-like device as claimed in claim 6, wherein said step of filling a 3D template in an elastomer and subsequently etching away said 3D template to produce a random porous structure, said step of obtaining a porous dielectric layer for a scorpion-like device comprises:
mixing PDMS solution and curing agent in a weight ratio of 10:1, and degassing for 15-25 minutes to obtain an elastomer;
pouring the elastomer on a 3D template, and curing at 70-90 ℃ for 1.5-2.5 hours to obtain a PDMS-sugar mixture;
the PDMS-sugar mixture was heat treated so that the sugar portion of the PDMS-sugar mixture was dissolved in water, and then a random porous tissue was formed.
10. A method for producing a bimodal flexible sensor array for a scorpion-like comb as claimed in any one of claims 6 to 9, wherein,
the first microstructure, the first signal transmission channel, the second microstructure and the second signal transmission channel are all made of inert metal materials;
the air-permeable plate of the imitation comb and the porous dielectric layer of the imitation comb are any one of polydimethylsiloxane, perfluoroethylene propylene copolymer, polyethylene terephthalate, polyimide, polyurethane acrylic ester, polyethylene naphthalate and polyether sulfone.
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