CN116906293B

CN116906293B - Automatic pressurizing system for preparing electronic grade chlorine trifluoride

Info

Publication number: CN116906293B
Application number: CN202311021572.3A
Authority: CN
Inventors: 李嘉磊; 吴强; 陈碧灵; 郑丽莎
Original assignee: Fujian Deer Technology Corp
Current assignee: Fujian Deer Technology Corp
Priority date: 2023-08-14
Filing date: 2023-08-14
Publication date: 2024-02-09
Anticipated expiration: 2043-08-14
Also published as: CN116906293A

Abstract

The invention belongs to the technical field of gas pressurization, and discloses an automatic pressurization system for preparing electronic grade chlorine trifluoride, which comprises a gasification pressurization module and a multi-stage pressurization module which are sequentially connected; the gasification pressurizing module comprises a shell and a feeding pipeline communicated with the shell, and a heating device is arranged in the shell; the multistage supercharging module comprises a driving device and an annular supercharging pipeline arranged around the driving device, at least two supercharging devices are connected to the supercharging pipeline, and the driving device is in transmission connection with the supercharging devices. The multistage pressurizing module is used for pressurizing the chlorine trifluoride gas by the multistage piston, the overall occupied area of the pressurizing system is reduced through the structural design of the annular pressurizing pipeline, the stable output of the chlorine trifluoride high-pressure gas can be ensured through multistage pressurizing, and the pressurizing efficiency of the pressurizing system is improved.

Description

Automatic pressurizing system for preparing electronic grade chlorine trifluoride

Technical Field

The invention belongs to the technical field of gas pressurization, and relates to an automatic pressurization system for preparing electronic-grade chlorine trifluoride.

Background

The high-purity chlorine trifluoride is mainly applied to the cleaning of chemical vapor deposition process chambers and pipelines in the fields of semiconductors, liquid crystals, solar energy, LEDs and the like. At present, although an industrial grade chlorine trifluoride process synthesis method exists, electronic grade chlorine trifluoride cannot be prepared, and research and development of the electronic grade chlorine trifluoride is a serious issue. In the process of preparing the electronic grade chlorine trifluoride, a plurality of flow units need positive pressure, and rectification is an indispensable link. The rectification system needs to provide a certain power, and because of the oxidizing property of the chlorine trifluoride, no pressurizing equipment for the chlorine trifluoride exists in the market, a safe pressurizing system is needed to solve the power problem of the chlorine trifluoride gas.

Disclosure of Invention

Aiming at the defects of the prior art, the invention aims to provide an automatic pressurizing system for preparing electronic grade chlorine trifluoride, which is particularly suitable for pressurizing operation of the electronic grade chlorine trifluoride, firstly, by means of a gasification pressurizing module, chlorine trifluoride liquid is converted into gas, and the chlorine trifluoride gas is continuously accumulated in a shell to raise the pressure, so that the purpose of gasification pressurizing is realized. The stable output of the high-pressure gas of the chlorine trifluoride can be ensured through multistage supercharging, and the supercharging efficiency of a supercharging system is improved.

To achieve the purpose, the invention adopts the following technical scheme:

the invention provides an automatic pressurizing system for preparing electronic grade chlorine trifluoride, which comprises a gasification pressurizing module and a multi-stage pressurizing module which are sequentially connected;

the gasification pressurizing module comprises a shell and a feeding pipeline communicated with the shell, chlorine trifluoride liquid is input into the shell through the feeding pipeline, and a heating device is further arranged in the shell and used for heating the shell so as to gasify the chlorine trifluoride liquid to form chlorine trifluoride gas;

the multistage supercharging module comprises a driving device and an annular supercharging pipeline surrounding the driving device, at least two supercharging devices are arranged on the supercharging pipeline in a space dislocation mode, the driving device is in transmission connection with the supercharging devices, and the supercharging devices are used for supercharging chlorine trifluoride gas entering the supercharging pipeline.

Further, a solenoid valve is arranged on a connecting pipeline between the gasification pressurizing module and the multistage pressurizing module, a pressure sensor is arranged in the shell, the pressure sensor and the heating device are electrically connected with a controller, the controller is used for controlling the solenoid valve in a feedback manner, and the controller is used for automatically controlling the heating device and the solenoid valve according to the air pressure in the shell;

a partition plate is arranged in the pressurizing pipeline along the circumferential direction, the partition plate divides the pressurizing pipeline into an air inlet channel and a pressurizing channel which are relatively independent, one end of the air inlet channel is open, the other end of the air inlet channel is sealed, and the open end of the air inlet channel is communicated with the gasification pressurizing module through the connecting pipeline; one end of the pressurizing channel is open, the other end of the pressurizing channel is sealed, and the open end of the pressurizing channel is externally connected with an exhaust pipeline; the air suction port of the supercharging device is communicated with the air inlet channel, and the air exhaust port of the supercharging device is communicated with the supercharging channel; the chlorine trifluoride gas discharged by the gasification pressurizing module enters the air inlet channel, is pressurized after being sucked by the pressurizing device, is discharged into the pressurizing channel by the pressurizing device, and is discharged from the open end of the pressurizing channel through the exhaust pipeline;

The supercharging device comprises a cylinder and a piston assembly positioned in the cylinder, the driving device comprises a motor and at least two connecting rods, the connecting rods are arranged in a space dislocation mode along the axial direction of an output shaft of the motor, the connecting rods are matched with the supercharging device in the space dislocation mode, one ends of the connecting rods are fixed on the peripheral surface of the output shaft of the motor, and the other ends of the connecting rods are hinged to one ends of the piston assembly; the motor reciprocally rotates within a certain central angle range to drive each connecting rod at the periphery of the motor to swing around a hinge point, so that the piston assembly is pushed to reciprocally move in the cylinder, and chlorine trifluoride gas in the air inlet channel is pumped into the cylinder and pressurized.

Further, a jacket is wrapped on the periphery of the shell, a medium pipeline is externally connected with the jacket, a liquid inlet valve is arranged on the medium pipeline, a liquid heat exchange medium is introduced into the jacket through the medium pipeline, and the heat exchange medium is used for refrigerating chlorine trifluoride liquid in the shell, so that at least part of chlorine trifluoride is kept in a liquid state;

the medium pipeline extends into the jacket, and the outlet end of the medium pipeline is positioned at the lower part of the inner cavity of the jacket; an air outlet is formed in the top of the jacket, and the liquid heat exchange medium is gasified to form a gaseous heat exchange medium after heat exchange with chlorine trifluoride and is discharged through the air outlet; the bottom of the jacket is provided with a liquid outlet, the liquid heat exchange medium in the jacket is discharged from the liquid outlet, and the liquid outlet is provided with a liquid outlet valve;

A first liquid level sensor is arranged in the shell and used for monitoring the liquid level height of chlorine trifluoride liquid in the shell, the first liquid level sensor is electrically connected with the controller, and the controller is used for controlling the liquid inlet valve, the liquid outlet valve, the heating device and the electromagnetic valve through connection;

when the chlorine trifluoride liquid in the shell reaches a monitoring set value of the first liquid level sensor, triggering the controller to send a control instruction to control the liquid inlet valve to be closed, opening the liquid discharge valve, the heating device and the electromagnetic valve, stopping introducing liquid cooling medium into the jacket, and discharging the residual liquid cooling medium in the jacket through the liquid discharge valve; the heating device heats and gasifies the chlorine trifluoride liquid in the shell, and the formed chlorine trifluoride gas escapes from the top of the shell and enters the multistage pressurizing module through the connecting pipeline;

when the chlorine trifluoride liquid in the shell does not reach the monitoring set value of the first liquid level sensor, the liquid inlet valve is normally opened, the liquid discharge valve, the heating device and the electromagnetic valve are normally closed, and a liquid heat exchange medium is introduced into the jacket through the medium pipeline to refrigerate the chlorine trifluoride liquid in the shell, so that at least part of the chlorine trifluoride is kept in a liquid state;

The jacket is internally provided with a second liquid level sensor, the liquid level sensor is used for monitoring the liquid level height of the liquid heat exchange medium in the jacket, the second liquid level sensor is provided with a monitoring upper limit and a monitoring lower limit, the second liquid level sensor is electrically connected with the controller, the controller is used for controlling the liquid inlet valve in a feedback mode, and the controller is used for controlling the opening of the liquid inlet valve according to the liquid level height of the heat exchange medium in the jacket.

Further, the air cylinder comprises a first air cylinder and a second air cylinder which are in butt joint along a first direction and are coaxially arranged, a sealing plate is arranged at the butt joint of the first air cylinder and the second air cylinder and is used for separating the first air cylinder from the second air cylinder, the inner diameter of the first air cylinder is smaller than the inner diameter of the second air cylinder, and the cavity volume of the first air cylinder is smaller than the cavity volume of the second air cylinder; the first direction is along the radial direction of the pressurizing pipeline and faces the driving device, and the second opposite direction is along the radial direction of the pressurizing pipeline and faces away from the driving device;

the piston assembly comprises a first piston assembly and a second piston assembly which are sequentially connected along a first direction, the first piston assembly is axially arranged in the first cylinder, and the second piston assembly is axially arranged in the second cylinder;

The second piston assembly comprises a second piston rod and a second piston head, one end of the second piston rod is hinged with the second piston head, and the other end of the second piston rod is hinged with the connecting rod;

the first piston assembly comprises a first piston rod and a first piston head, a slot hole penetrating through the sealing plate is formed in the sealing plate, the first piston head is fixed at one end of the first piston rod, the other end of the first piston rod penetrates through the slot hole and then is fixed on the end face of the second piston head, and the first piston rod is driven by the second piston assembly to reciprocate in the slot hole;

the axial space between the end surface of the first piston head, which is far away from the second piston assembly, and the inner end surface of the first cylinder is a first compression cavity with variable cavity volume, the axial space between the end surface of the first piston head, which is near to the second piston assembly, and the sealing plate is a second compression cavity with variable cavity volume, and the axial space between the end surface of the second piston head, which is near to the first piston assembly, and the sealing plate is a third compression cavity with variable cavity volume;

with the reciprocating movement of the first piston assembly and the second piston assembly, the cavity volumes of the first compression cavity and the third compression cavity synchronously change in the same direction, and the cavity volumes of the first compression cavity and the second compression cavity synchronously change in the opposite direction.

Further, at least two air suction channels are formed in the end face of the second air cylinder along the axial direction, two ends of each air suction channel are respectively communicated with the air suction channel and the third compression cavity, a unidirectional air suction structure is arranged in the middle of each air suction channel, and the unidirectional air suction structure is in a blocking state and a communicating state;

when the second piston assembly drives the first piston assembly to translate towards the first direction, the cavity volume of the third compression cavity is increased, the one-way air suction structure enters a communication state, and chlorine trifluoride gas in the air inlet channel flows into the third compression cavity in a one-way through the one-way air suction structure;

when the second piston assembly drives the first piston assembly to translate towards the second direction, the cavity volume of the third compression cavity is reduced, the unidirectional air suction structure enters a blocking state, communication between the air inlet channel and the third compression cavity is cut off, and chlorine trifluoride gas in the third compression cavity is compressed.

Further, the air suction channel comprises a first air suction section, a second air suction section and a third air suction section which are sequentially communicated along the air suction direction, the diameter of the second air suction section is larger than that of the first air suction section, the diameter of the third air suction section is larger than that of the first air suction section, and the unidirectional air suction structure is positioned in the second air suction section;

The unidirectional air suction structure comprises a first spring column and a first sealing cover, one end of the first spring column is abutted against the end face, close to the third air suction section, of the second air suction section, and the other end of the first spring column is inserted into the first sealing cover; one end face, far away from the first spring column, of the first sealing cover is arranged opposite to one end face of the first air suction section, the end face size of the first sealing cover is larger than the end face size of the first air suction section, and when the first spring column is in an initial state, the first sealing cover seals the first air suction section; an air suction gap is reserved between the outer peripheral surface of the first sealing cover and the inner peripheral surface of the second air suction section;

when the second piston assembly drives the first piston assembly to translate in a first direction, the first sealing cover moves in the first direction under the action of pressure difference, the first spring column is compressed, the end face of the first sealing cover is separated from the port of the first air suction section, the first air suction section is communicated with the second air suction section, and unpressurized chlorine trifluoride gas in the air inlet channel sequentially enters the third compression cavity through the first air suction section, the air suction gap and the third air suction section;

When the second piston assembly drives the first piston assembly to translate towards the second direction, the first sealing cover moves towards the second direction under the action of pressure difference, the first spring column is restored to an initial state, the end face of the first sealing cover seals the port of the first air suction section, and the unidirectional air suction structure enters a blocking state.

Further, a first unidirectional blocking structure is arranged at the slot hole of the sealing plate along the circumferential direction, and the first piston rod penetrates through the first unidirectional blocking structure and moves back and forth in the first unidirectional blocking structure under the drive of the second piston assembly; the first unidirectional blocking structure has a blocking state and a communicating state;

when the second piston assembly drives the first piston assembly to translate towards the first direction, the cavity volume of the third compression cavity is increased while the cavity volume of the second compression cavity is reduced, the first unidirectional blocking structure enters a blocking state, communication between the second compression cavity and the third compression cavity is cut off, and chlorine trifluoride gas in the second compression cavity is compressed;

when the second piston assembly drives the first piston assembly to translate towards the second direction, the cavity volume of the third compression cavity is reduced, the cavity volume of the second compression cavity is increased, the first unidirectional blocking structure enters a communication state, and compressed chlorine trifluoride gas in the third compression cavity flows into the second compression cavity through the first unidirectional blocking structure.

Still further, the first unidirectional blocking structure comprises a pressing plate, a sealing assembly and a first base which are sequentially connected along a first direction, and the first piston rod sequentially passes through the pressing plate, the sealing assembly and the first base; a gap is reserved between the inner peripheral surface of the pressing plate and the outer peripheral surface of the first piston rod, the inner peripheral wall of the sealing assembly is in contact with the outer periphery of the first piston rod, a gap is reserved between the inner peripheral surface of the first base and the outer peripheral surface of the first piston rod, and the first unidirectional blocking structure is fixed on the first piston rod and synchronously moves along with the first piston rod;

the first base is divided into a first cylindrical section and a first conical section along a first direction, and the first cylindrical section and the first conical section are of an integrated hollow structure which is coaxially arranged;

the first cylindrical section is provided with a first through hole and a second through hole which are communicated with each other along a first direction, the first conical section is provided with a third through hole which is communicated with each other along the first direction, the first through hole, the second through hole and the third through hole are coaxially arranged, the aperture of the first through hole is larger than the aperture of the second through hole and larger than the aperture of the third through hole, and the first through hole, the second through hole and the third through hole form a three-level stepped hole;

An inner peripheral surface of the first through hole is provided with an inner thread, an outer peripheral surface of the pressing plate is provided with an outer thread matched with the inner thread, and the pressing plate is screwed into the first through hole; the sealing component is embedded into the second through hole; the first piston rod sequentially passes through the first base, the sealing assembly and the third through hole;

the outer peripheral surface of the first conical section is a conical surface tapered along the first direction, a first groove is formed in the outer peripheral surface of the first conical section along the circumferential direction, a first sealing ring is embedded in the first groove, and at least part of the first sealing ring is higher than the opening of the first groove;

the slotted hole formed in the sealing plate is divided into a first conical hole and a first cylindrical hole along a first direction, and the aperture of the first conical hole is gradually reduced along the first direction; the first cylindrical section is positioned in the first cylindrical hole and is coaxial with the first cylindrical hole, and an airflow channel is reserved between the outer periphery of the first cylindrical section and the inner peripheral surface of the first cylindrical hole; the first conical section is positioned in the first conical hole and is coaxial with the first conical hole, and along with the reciprocating movement of the first piston assembly, the first sealing ring is abutted against or separated from the inner peripheral surface of the first conical hole, so that the air flow channel is closed or opened;

When the first piston assembly translates to the first direction, the first unidirectional blocking structure translates to the first direction, the first sealing ring abuts against the inner circumferential surface of the first conical hole to close the airflow channel, and the first unidirectional blocking structure enters a blocking state;

when the first piston assembly translates to the second direction, the first unidirectional blocking structure translates to the second direction, the first sealing ring is separated from the inner circumferential surface of the first conical hole to open the airflow channel, and the first unidirectional blocking structure enters a communication state.

Further, a second unidirectional blocking structure is arranged in the first cylinder, and the second unidirectional blocking structure has a blocking state and a communicating state;

when the second piston assembly drives the first piston assembly to translate towards a first direction, the cavity volume of the second compression cavity is reduced, the cavity volume of the first compression cavity is increased, the second unidirectional blocking structure is in a communication state, and the compressed chlorine trifluoride gas in the second compression cavity flows into the first compression cavity in a unidirectional way through the second unidirectional blocking structure;

when the second piston assembly drives the first piston assembly to translate towards the second direction, the cavity volume of the second compression cavity is increased, the cavity volume of the first compression cavity is reduced, the second unidirectional blocking structure enters a blocking state, communication between the first compression cavity and the second compression cavity is cut off, and chlorine trifluoride gas in the first compression cavity is compressed.

Still further, the second unidirectional blocking structure includes a second base of an annular structure, the second base having a second conical bore therethrough along a first direction, the bore diameter of the second conical bore gradually increasing along the first direction;

the outer peripheral surface of the first piston head is a conical surface gradually expanding along a first direction, the conical surface of the first piston head is matched with the shape of the second conical hole, and an air outlet channel is reserved between the conical surface of the first piston head and the second conical hole;

the outer peripheral surface of the first piston head is provided with a second groove along the circumferential direction, a second sealing ring is embedded in the second groove, at least part of the second sealing ring is higher than the opening of the second groove, and along with the reciprocating movement of the first piston assembly, the second sealing ring abuts against or is separated from the inner peripheral surface of the second conical hole, so that the air outlet channel is closed or opened;

when the first piston assembly translates in a first direction, the second sealing ring is separated from the inner peripheral surface of the second conical hole, the air outlet channel is opened, the second unidirectional blocking structure enters a communication state, and chlorine trifluoride gas in the second compression cavity flows into the first compression cavity through the air outlet channel

When the first piston assembly translates to the second direction, the second sealing ring abuts against the inner peripheral surface of the second conical hole to seal the air outlet channel, and the second unidirectional blocking structure enters a blocking state.

Compared with the prior art, the invention has the beneficial effects that:

the automatic pressurizing system provided by the invention is especially suitable for pressurizing operation of electronic-grade chlorine trifluoride, firstly, by means of the gasification pressurizing module, chlorine trifluoride liquid is converted into gas, and the chlorine trifluoride gas is continuously accumulated in the shell to raise the pressure, so that the purpose of gasification pressurizing is realized. And then, the multistage pressurizing module is used for carrying out multistage piston pressurizing on the chlorine trifluoride gas, the overall occupied area of the pressurizing system is reduced through the structural design of the annular pressurizing pipeline, the stable output of the high-pressure chlorine trifluoride gas can be ensured through multistage pressurizing, and the pressurizing efficiency of the pressurizing system is improved.

Drawings

FIG. 1 is a schematic diagram of an automatic pressurization system according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a multi-stage supercharging module according to an embodiment of the present invention;

FIG. 3 is a schematic structural view of a supercharging device according to an embodiment of the present invention;

FIG. 4 is a schematic structural view of a unidirectional air intake structure according to an embodiment of the present invention;

FIG. 5 is a schematic view of a first unidirectional blocking structure according to an embodiment of the present invention when moving in a first direction;

FIG. 6 is a schematic view of a structure of a first unidirectional blocking structure according to an embodiment of the present invention moving in a second direction;

FIG. 7 is a schematic view of a structure of a second unidirectional blocking structure according to an embodiment of the present invention when moving in a first direction;

FIG. 8 is a schematic view of a structure of a second unidirectional blocking structure according to an embodiment of the present invention when moving in a second direction;

FIG. 9 is a schematic structural view of a unidirectional exhaust structure according to an embodiment of the present invention;

FIG. 10 is a schematic top view of a multi-stage supercharging module according to an embodiment of the present invention;

FIG. 11 is a schematic top view of a multi-stage supercharging module according to an embodiment of the present invention;

wherein: 100-a gasification pressurization module; 110-a housing; 111-a first level sensor; 112-heating means; 120-jacket; 121-a liquid outlet; 122-air outlet; 123-a drain valve; 124-a second level sensor; 130-medium line; 131-a liquid inlet valve; 140-a controller; 200-multistage supercharging modules; 210-an electric motor; 211-connecting rods; 220-pressurizing pipeline; 221-separator; 222-boost passage; 223-intake passage; 230-supercharging device; 231-a second cylinder; 232-a first cylinder; 233-a first compression chamber; 234-a second compression chamber; 235-a third compression chamber; 240-a second piston assembly; 241-a second piston rod; 242-a second piston head; 250-a first piston assembly; 251-a first piston rod; 252-a first piston head; 260-unidirectional getter structure; 261-a first suction section; 262-a second suction section; 263-third suction section; 264-a first cover; 265-a first spring post; 270-a first unidirectional blocking structure; 271-closing plates; 272-gas flow passage; 273-first conical section; 274-a first cylindrical section; 275-pressing plate; 276-seal assembly; 277-a first sealing ring; 280-a second unidirectional blocking structure; 281-a second base; 282-second seal ring; 283-outlet channels; 290-one-way exhaust structure; 291-a third exhaust section; 292-a second exhaust section; 293-a first exhaust section; 294-a second cover; 295-a second spring post; 300-connecting pipelines; 310-solenoid valve.

Detailed Description

The technical scheme of the invention is described in detail below with reference to specific embodiments and attached drawings.

In one embodiment, the present invention provides an automatic pressurization system for electronic grade chlorine trifluoride production, as shown in fig. 1, comprising a gasification pressurization module 100 and a multi-stage pressurization module 200 connected in sequence.

As shown in fig. 1, the gasification pressurizing module 100 includes a housing 110 and a feed pipeline communicated with the housing 110, wherein a chlorine trifluoride liquid is fed into the housing 110 through the feed pipeline, and a heating device 112 is further disposed inside the housing 110, and the heating device 112 is used for heating the housing 110 to gasify the chlorine trifluoride liquid into chlorine trifluoride gas.

As shown in fig. 2, 10 and 11, the multi-stage supercharging module 200 includes a driving device and an annular supercharging pipeline 220 disposed around the driving device, at least two supercharging devices 230 are connected to the supercharging pipeline 220, the driving device is in transmission connection with the supercharging devices 230, and the supercharging devices 230 are used for supercharging chlorine trifluoride gas entering the supercharging pipeline 220.

In the embodiment shown in fig. 1, a solenoid valve 310 is disposed on a connecting pipeline 300 between the gasification and pressurization module 100 and the multi-stage pressurization module 200, a pressure sensor is disposed inside the housing 110, the pressure sensor and the heating device 112 are electrically connected to the controller 140, the controller 140 feedback-controls the solenoid valve 310, and the controller 140 automatically controls the heating device 112 and the solenoid valve 310 according to the air pressure in the housing 110.

A partition plate 221 is arranged in the pressurizing pipeline 220 along the circumferential direction, the partition plate 221 divides the pressurizing pipeline 220 into an air inlet channel 223 and a pressurizing channel 222 which are relatively independent, one end of the air inlet channel 223 is open, the other end of the air inlet channel 223 is sealed, and the open end of the air inlet channel 223 is communicated with the gasification pressurizing module 100 through a connecting pipeline 300; one end of the pressurizing channel 222 is open, the other end is sealed, and the open end of the pressurizing channel 222 is externally connected with an exhaust pipeline; the air suction port of the supercharging device 230 is communicated with the air inlet channel 223, and the air discharge port of the supercharging device 230 is communicated with the supercharging channel 222; the chlorine trifluoride gas discharged from the gasification and pressurization module 100 enters the air inlet channel 223, is pressurized after being sucked by the pressurization device 230, is discharged into the pressurization channel 222 by the pressurization device 230, and is discharged from the open end of the pressurization channel 222 through the exhaust pipeline.

As shown in fig. 2, the pressurizing device 230 includes a cylinder and a piston assembly disposed in the cylinder, the driving device includes a motor 210 and at least two connecting rods 211, the connecting rods 211 are spatially offset along the axial direction of the output shaft of the motor 210,

one end of the connecting rod 211 is fixed on the outer circumferential surface of the output shaft of the motor 210, and the other end is hinged with one end of the piston assembly; the motor 210 reciprocally rotates within a range of a certain central angle to drive each of the links 211 at the outer periphery thereof to oscillate about the hinge point, thereby pushing the piston assembly reciprocally moving in the cylinder to draw the chlorine trifluoride gas in the intake passage 223 into the cylinder and to pressurize the same.

The purity of the chlorine trifluoride gas produced by the traditional industrial preparation method of the chlorine trifluoride gas is lower, the content of impurities such as HF, CF and the like in the chlorine trifluoride gas is higher, and the chlorine trifluoride gas can be used in the fine chemical industry and the high-end electronic industry only by further purification. In the process of preparing electronic grade chlorine trifluoride, a plurality of flow units need positive pressure, rectification is an indispensable link, a certain power is needed before a rectification system, and because the oxidizing property of the chlorine trifluoride is adopted, a pressurizing system for the chlorine trifluoride is not available in the market, so that the power problem of the chlorine trifluoride gas is solved by the safe and effective pressurizing system. The automatic pressurizing system provided by the invention is particularly suitable for pressurizing operation of electronic-grade chlorine trifluoride, firstly, by means of the gasification pressurizing module 100, chlorine trifluoride liquid is converted into gas, and the chlorine trifluoride gas is continuously accumulated in the shell 110 to raise the pressure, so that the purpose of gasification pressurizing is realized. And then the multistage pressurizing module 200 is used for carrying out multistage piston pressurizing on the chlorine trifluoride gas, the overall occupied area of the pressurizing system is reduced through the structural design of the annular pressurizing pipeline 220, the stable output of the high-pressure gas of the chlorine trifluoride can be ensured through multistage pressurizing, and the pressurizing efficiency of the pressurizing system is improved. The pressurizing system provided by the invention can pressurize the chlorine trifluoride gas to 0.5-0.6MPa, so that the chlorine trifluoride gas can reach positive pressure required by purification procedures such as subsequent rectification and the like.

In the embodiment shown in fig. 1, a jacket 120 is wrapped around the outer periphery of the shell 110, the jacket 120 is externally connected with a medium pipeline 130, a liquid inlet valve 131 is arranged on the medium pipeline 130, a liquid heat exchange medium is introduced into the jacket 120 through the medium pipeline 130, and the heat exchange medium is used for refrigerating chlorine trifluoride liquid in the shell 110, so that at least part of chlorine trifluoride is kept in a liquid state.

As shown in fig. 1, the medium pipe 130 extends into the jacket 120, and the outlet end of the medium pipe 130 is positioned at the lower part of the inner cavity of the jacket 120; the top of the jacket 120 is provided with an air outlet 122, and the liquid heat exchange medium is gasified to form a gaseous heat exchange medium after heat exchange with the chlorine trifluoride and is discharged through the air outlet 122; a liquid outlet 121 is arranged at the bottom of the jacket 120, liquid heat exchange medium in the jacket 120 is discharged from the liquid outlet 121, and a liquid outlet valve 123 is arranged at the liquid outlet 121.

As shown in fig. 1, a first liquid level sensor 111 is disposed in the housing 110, the first liquid level sensor 111 is used for monitoring the liquid level of chlorine trifluoride liquid in the housing 110, the first liquid level sensor 111 is electrically connected to a controller 140, and the controller 140 controls the liquid inlet valve 131, the liquid outlet valve 123, the heating device 112 and the electromagnetic valve 310 through electrical connection.

When the chlorine trifluoride liquid in the shell 110 reaches the monitoring set value of the first liquid level sensor 111, the trigger controller 140 sends a control instruction to control the liquid inlet valve 131 to be closed, the liquid discharge valve 123, the heating device 112 and the electromagnetic valve 310 to be opened, the liquid cooling medium is stopped from being introduced into the jacket 120, and the liquid cooling medium remained in the jacket 120 is discharged through the liquid discharge valve 123; the heating device 112 heats and gasifies the chlorine trifluoride liquid in the shell 110, and the formed chlorine trifluoride gas escapes from the top of the shell 110 and enters the multi-stage pressurizing module 200 through the connecting pipeline 300.

When the chlorine trifluoride liquid in the shell 110 does not reach the monitoring set value of the first liquid level sensor 111, the liquid inlet valve 131 is normally opened, the liquid outlet valve 123, the heating device 112 and the electromagnetic valve 310 are normally closed, and a liquid heat exchange medium is introduced into the jacket 120 through the medium pipeline 130 to refrigerate the chlorine trifluoride liquid in the shell 110, so that at least part of the chlorine trifluoride is kept in a liquid state.

As shown in fig. 1, a second liquid level sensor 124 is disposed in the jacket 120, the liquid level sensor is used for monitoring the liquid level of the liquid heat exchange medium in the jacket 120, the second liquid level sensor 124 is set with a monitoring upper limit and a monitoring lower limit, the second liquid level sensor 124 is electrically connected with a controller 140, the controller 140 feedback controls the liquid inlet valve 131, and the controller 140 controls the opening of the liquid inlet valve 131 according to the liquid level of the heat exchange medium in the jacket 120.

In the embodiment shown in fig. 3, the air cylinder includes a first air cylinder 232 and a second air cylinder 231 which are sequentially butted and coaxially arranged along a first direction, a sealing plate 271 is arranged at the butted position of the first air cylinder 232 and the second air cylinder 231, the sealing plate 271 is used for separating the first air cylinder 232 and the second air cylinder 231, the inner diameter of the first air cylinder 232 is smaller than the inner diameter of the second air cylinder 231, and the cavity volume of the first air cylinder 232 is smaller than the cavity volume of the second air cylinder 231; wherein the first direction is along the radial direction of the pressurization pipeline 220 and faces the driving device, and the opposite second direction is along the radial direction of the pressurization pipeline 220 and faces away from the driving device.

As shown in fig. 3, the piston assembly includes a first piston assembly 250 and a second piston assembly 240 sequentially connected in a first direction, the first piston assembly 250 is axially disposed inside the first cylinder 232, and the second piston assembly 240 is axially disposed inside the second cylinder 231. The second piston assembly 240 includes a second piston rod 241 and a second piston head 242, one end of the second piston rod 241 is hinged to the second piston head 242, and the other end of the second piston rod 241 is hinged to the connecting rod 211.

As shown in fig. 3, the first piston assembly 250 includes a first piston rod 251 and a first piston head 252, the closing plate 271 is provided with a slot hole penetrating through the closing plate 271, one end of the first piston rod 251 is fixed with the first piston head 252, the other end of the first piston rod 251 passes through the slot hole and is fixed on the end face of the second piston head 242, and the first piston rod 251 is driven by the second piston assembly 240 to reciprocate in the slot hole.

As shown in fig. 3, the axial space between the end surface of the first piston head 252, which is far from the second piston assembly 240, and the inner end surface of the first cylinder 232 is the first compression chamber 233 with a variable chamber volume, the axial space between the end surface of the first piston head 252, which is near to the second piston assembly 240, and the closing plate 271 is the second compression chamber 234 with a variable chamber volume, and the axial space between the end surface of the second piston head 242, which is near to the first piston assembly 250, and the closing plate 271 is the third compression chamber 235 with a variable chamber volume.

As the first and second piston assemblies 250 and 240 reciprocate, the cavity volumes of the first and third compression chambers 233 and 235 change in the same direction in synchronization, and the cavity volumes of the first and second compression chambers 233 and 234 change in the opposite direction in synchronization.

Specifically, as shown in fig. 10 and 11, four pressurizing devices 230 are disposed on the pressurizing pipeline 220 in a space dislocation manner, the connecting rods 211 are matched with the connecting rods 211 in the space dislocation manner, four connecting rods 211 are disposed on the periphery of the output shaft of the motor 210 along the axial direction, one end of each connecting rod 211 is vertically connected with the output shaft of the motor 210, the other end of each connecting rod 211 is hinged with one end of a second piston rod 241 of the pressurizing device 230, and the space dislocation manner ensures that motion interference between the connecting rods is avoided.

In an initial state, as shown in fig. 10, the connecting rod 211 and the second piston rod 241 are coaxially arranged, the second piston rod 241 is in a neutral position, when pressurization is required, the motor 210 is started, the motor 210 drives the connecting rod 211 to rotate to the left side of the neutral position by a certain angle (as shown in fig. 11), the connecting rod 211 and the second piston rod 241 are hinged through the connecting rod 211 and the second piston rod 241 so as to enable the connecting rod 211 and the second piston rod 241 to relatively rotate and drive the second piston rod 241 to draw out the second cylinder 231, and at the moment, the second piston assembly 240 moves towards the first direction; subsequently, the motor 210 drives the connecting rod 211 to reset, the connecting rod 211 drives the second piston rod 241 to be inserted into the second cylinder 231, and the second piston assembly 240 moves towards the second direction; then, the motor 210 drives the connecting rod 211 to rotate to the right side of the neutral position by a certain angle, the connecting rod 211 and the second piston rod 241 are hinged by the connecting rod 211 and the second piston rod 241 to generate relative rotation again, and the second piston rod 241 is driven to draw out the second cylinder 231 again, at this time, the second piston assembly 240 moves to the first direction again. The reciprocating movement of the second piston assembly 240 within the second cylinder 231 is achieved as the motor 210 reciprocates within a range of central angles.

The piston assemblies in the four supercharging devices 230 move in the same way, and the swinging areas of the corresponding connecting rods 211 of each supercharging device 230 are not overlapped, so that the adjacent connecting rods are prevented from generating structural interference in the swinging process. The four pressurizing devices 230 can simultaneously pressurize the chlorine trifluoride gas in the air inlet channel 223, thereby realizing four-stage pressurization of the chlorine trifluoride gas.

By adopting the multiple groups of pressurizing devices 230 to pressurize simultaneously, on one hand, the volume of the single pressurizing device 230 is reduced, the occupied area of the whole pressurizing system is further reduced, the pressurizing time of chlorine trifluoride gas is shortened, and the pressurizing efficiency is improved. On the other hand, the supercharging device 230 can be supplemented according to the supercharging requirement, so that the applicability of the supercharging system is improved.

In the embodiment shown in fig. 3, at least two air suction channels are axially formed on the end surface of the second cylinder 231, two ends of each air suction channel are respectively communicated with the air suction channel 223 and the third compression chamber 235, a unidirectional air suction structure 260 is arranged in the middle of each air suction channel, and the unidirectional air suction structure 260 has a blocking state and a communicating state.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the first direction, the volume of the third compression chamber 235 increases, the unidirectional air suction structure 260 enters a communication state, and the chlorine trifluoride gas in the air inlet channel 223 flows into the third compression chamber 235 in one direction through the unidirectional air suction structure 260.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the second direction, the volume of the third compression chamber 235 is reduced, the unidirectional air suction structure 260 enters a blocking state, the communication between the air inlet channel 223 and the third compression chamber 235 is cut off, and the chlorine trifluoride gas in the third compression chamber 235 is compressed.

In the embodiment shown in fig. 4, the air suction channel includes a first air suction section 261, a second air suction section 262 and a third air suction section 263 which are sequentially communicated in an air suction direction, the diameter of the second air suction section 262 > the diameter of the first air suction section 261 > the diameter of the third air suction section 263, and the unidirectional air suction structure 260 is located in the second air suction section 262.

As shown in fig. 4, the unidirectional air suction structure 260 includes a first spring post 265 and a first cover 264, one end of the first spring post 265 abuts against the end face of the second air suction section 262 near the third air suction section 263, and the other end of the first spring post 265 is inserted into the first cover 264; an end surface of the first cover 264 far away from the first spring column 265 is opposite to a port of the first air suction section 261, the end surface of the first cover 264 is larger than the port of the first air suction section 261, and when the first spring column 265 is in an initial state, the first cover 264 seals the first air suction section 261; an air suction gap is left between the outer peripheral surface of the first cover 264 and the inner peripheral surface of the second air suction section 262.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the first direction, the first cover 264 moves in the first direction under the action of the pressure difference, the first spring column 265 is compressed, the end surface of the first cover 264 is separated from the port of the first air suction section 261, the first air suction section 261 is communicated with the second air suction section 262, and the non-pressurized chlorine trifluoride gas in the air inlet channel 223 sequentially passes through the first air suction section 261, the air suction gap and the third air suction section 263 to enter the third compression cavity 235.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the second direction, the first cover 264 moves in the second direction under the action of the pressure difference, the first spring column 265 returns to the initial state, the end surface of the first cover 264 seals the port of the first air suction section 261, and the unidirectional air suction structure 260 enters the blocking state.

In the embodiment shown in fig. 3, a first unidirectional blocking structure 270 is circumferentially arranged at the slot of the sealing plate 271, and the first piston rod 251 passes through the first unidirectional blocking structure 270 and moves reciprocally in the first unidirectional blocking structure 270 under the driving of the second piston assembly 240; the first unidirectional blocking structure 270 has a blocking state and a communicating state.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the first direction, the volume of the third compression chamber 235 increases while the volume of the second compression chamber 234 decreases, the first unidirectional blocking structure 270 enters a blocking state, communication between the second compression chamber 234 and the third compression chamber 235 is cut off, and chlorine trifluoride gas in the second compression chamber 234 is compressed.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the second direction, the volume of the third compression chamber 235 is reduced while the volume of the second compression chamber 234 is increased, the first unidirectional blocking structure 270 is in a communication state, and the compressed chlorine trifluoride gas in the third compression chamber 235 flows into the second compression chamber 234 through the first unidirectional blocking structure 270.

In the embodiment shown in fig. 5 and 6, the first unidirectional blocking structure 270 includes a pressing plate 275, a sealing assembly 276, and a first base sequentially connected in a first direction, and the first piston rod 251 sequentially passes through the pressing plate 275, the sealing assembly 276, and the first base; the inner circumferential surface of the pressing plate 275 and the outer circumferential surface of the first piston rod 251 leave a gap, the inner circumferential wall of the sealing assembly 276 abuts against the outer circumference of the first piston rod 251, a gap is left between the inner circumferential surface of the first base and the outer circumferential surface of the first piston rod 251, and the first unidirectional blocking structure 270 is fixed on the first piston rod 251 and moves synchronously with the first piston rod 251.

The first base is divided into a first cylindrical section 274 and a first conical section 273 along the first direction, and the first cylindrical section 274 and the first conical section 273 are of an integral hollow structure coaxially arranged. The first cylindrical section 274 is provided with a first through hole and a second through hole which are communicated with each other along a first direction, the first conical section 273 is provided with a third through hole which is communicated with each other along the first direction, the first through hole, the second through hole and the third through hole are coaxially arranged, the aperture of the first through hole is larger than the aperture of the second through hole, the aperture of the third through hole is larger than the aperture of the third through hole, and the first through hole, the second through hole and the third through hole form a three-stage stepped hole.

The inner peripheral surface of the first through hole is provided with an internal thread, the outer peripheral surface of the pressing plate 275 is provided with an external thread matched with the internal thread, and the pressing plate 275 is screwed into the first through hole; the seal assembly 276 is embedded within the second through bore; the first piston rod 251 sequentially passes through the first base, the sealing assembly 276, and the third through hole.

The outer peripheral surface of the first conical section 273 is a conical surface tapering along the first direction, a first groove is formed in the outer peripheral surface of the first conical section 273 along the circumferential direction, a first sealing ring 277 is embedded into the first groove, and at least part of the first sealing ring 277 is higher than the opening of the first groove.

The slot hole formed in the closing plate 271 is divided into a first conical hole and a first cylindrical hole along a first direction, and the aperture of the first conical hole is gradually reduced along the first direction; the first cylindrical section 274 is positioned in the first cylindrical hole and is coaxial with the first cylindrical hole, and an airflow channel 272 is reserved between the outer periphery of the first cylindrical section 274 and the inner peripheral surface of the first cylindrical hole; the first conical section 273 is located in the first conical hole and coaxial with the first conical hole, and along with the reciprocating movement of the first piston assembly 250, the first sealing ring 277 abuts against or is separated from the inner peripheral surface of the first conical hole, so that the airflow channel 272 is closed or opened.

As shown in fig. 5, when the first piston assembly 250 translates in the first direction, the first unidirectional blocking structure 270 translates in the first direction, and the first seal ring 277 abuts against the inner circumferential surface of the first conical hole to close the air flow channel 272, and the first unidirectional blocking structure 270 enters the blocking state.

As shown in fig. 6, when the first piston assembly 250 translates in the second direction, the first unidirectional blocking structure 270 translates in the second direction, the first seal ring 277 is separated from the inner circumferential surface of the first conical hole to open the air flow channel 272, and the first unidirectional blocking structure 270 enters the communicating state.

In the embodiment shown in fig. 3, a second one-way blocking structure 280 is disposed within the first cylinder 232, the second one-way blocking structure 280 having a blocking state and a communicating state.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the first direction, the cavity volume of the second compression cavity 234 is reduced, and at the same time, the cavity volume of the first compression cavity 233 is increased, the second unidirectional blocking structure 280 enters a communication state, and the compressed chlorine trifluoride gas in the second compression cavity 234 flows into the first compression cavity 233 in one direction through the second unidirectional blocking structure 280.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the second direction, the cavity volume of the second compression cavity 234 is increased while the cavity volume of the first compression cavity 233 is reduced, the second unidirectional blocking structure 280 enters a blocking state, the communication between the first compression cavity 233 and the second compression cavity 234 is cut off, and the chlorine trifluoride gas in the first compression cavity 233 is compressed.

In the embodiment shown in fig. 7 and 8, the second unidirectional blocking structure 280 includes a second base 281 of an annular structure, and the second base 281 has a second conical hole penetrating in a first direction, and the aperture of the second conical hole gradually increases in the first direction.

The outer circumferential surface of the first piston head 252 is a tapered surface gradually expanding along the first direction, the tapered surface of the first piston head 252 is matched with the shape of the second conical hole, and an air outlet channel 283 is reserved between the tapered surface of the first piston head 252 and the second conical hole. The outer peripheral surface of the first piston head 252 is provided with a second groove along the circumferential direction, a second sealing ring 282 is embedded in the second groove, at least part of the second sealing ring 282 is higher than the opening of the second groove, and along with the reciprocating movement of the first piston assembly 250, the second sealing ring 282 abuts against or is separated from the inner peripheral surface of the second conical hole, so that the air outlet channel 283 is closed or opened.

As shown in fig. 7, when the first piston assembly 250 translates in the first direction, the second seal ring 282 is separated from the inner circumferential surface of the second conical hole, the air outlet channel 283 is opened, the second unidirectional blocking structure 280 is put into a communicating state, and the chlorine trifluoride gas in the second compression chamber 234 flows into the first compression chamber 233 through the air outlet channel 283. As shown in fig. 8, when the first piston assembly 250 translates in the second direction, the second seal ring 282 abuts against the inner peripheral surface of the second conical hole to close the air outlet channel 283, and the second unidirectional blocking structure 280 enters the blocking state.

In the embodiment shown in fig. 3, an exhaust passage is provided on an end surface of the first cylinder 232, two ends of the exhaust passage are respectively communicated with the supercharging passage 222 and the first compression chamber 233, and a unidirectional exhaust structure 290 is provided in the middle of the exhaust passage, and the unidirectional exhaust structure 290 has a blocking state and a communicating state.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the first direction, the volume of the first compression chamber 233 increases, the unidirectional exhaust structure 290 enters a blocking state, and the communication between the pressurization channel 222 and the first compression chamber 233 is cut off.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the second direction, the volume of the first compression chamber 233 is reduced, the unidirectional exhaust structure 290 enters a communication state, and the high-pressure chlorine trifluoride gas in the first compression chamber 233 flows into the pressurizing channel 222 through the unidirectional exhaust structure 290.

In the embodiment shown in fig. 9, the exhaust passage includes a first exhaust section 293, a second exhaust section 292, and a third exhaust section 291 that are sequentially communicated in the exhaust direction, the diameter of the second exhaust section 292 > the diameter of the first exhaust section 293 > the diameter of the third exhaust section 291, and the one-way exhaust structure 290 is located within the second exhaust section 292.

As shown in fig. 9, the unidirectional exhaust structure 290 includes a second spring post 295 and a second cover 294, one end of the second spring post 295 abuts against an end surface of the second exhaust section 292 near the third exhaust section 291, and the other end of the second spring post 295 is inserted into the second cover 294; an end surface of the second cover 294 away from the second spring post 295 is disposed opposite to a port of the first exhaust section 293, the end surface of the second cover 294 being larger than the port of the first exhaust section 293, the second cover 294 being disengaged from the port of the first exhaust section 293 when the second spring post 295 is in the initial state; an exhaust gap is left between the outer peripheral surface of the second cover 294 and the inner peripheral surface of the second exhaust section 292.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the first direction, the second cover 294 moves in the first direction under the pressure difference, and the second spring post 295 is stretched, so that the end surface of the second cover 294 seals the port of the first exhaust section 293, and the unidirectional exhaust structure 290 enters a blocking state.

When the second piston assembly 240 drives the first piston assembly 250 to translate in the second direction, the second cover 294 moves in the second direction under the action of the pressure difference, the second spring post 295 returns to the initial state, the end face of the second cover 294 is separated from the port of the first exhaust section 293, the first exhaust section 293 is communicated with the second exhaust section 292, and the chlorine trifluoride gas in the first compression chamber 233 sequentially enters the pressurizing channel 222 through the first exhaust section 293, the exhaust gap and the third exhaust section 291.

The pressurizing device 230 provided by the invention realizes a single-reciprocating two-stage pressurizing mode, namely, two-stage gas compression operation can be completed simultaneously during a single reciprocating stroke of the piston assembly, firstly, the chlorine trifluoride gas in the third compression cavity 235 is subjected to one-stage compression, the chlorine trifluoride gas after the one-stage compression is stored in the second compression cavity 234, meanwhile, the chlorine trifluoride gas after the one-stage compression in the second compression cavity 234 is subjected to two-stage compression, and the chlorine trifluoride gas after the two-stage compression is discharged into the pressurizing channel 223, so that the pressurizing device 230 provided by the invention greatly improves the gas compression efficiency.

Specifically, the pressurizing process of the pressurizing device 230 will be described by taking a single reciprocating stroke of the piston assembly as an example, wherein the single reciprocating stroke includes a first direction movement and a second direction movement, and the first direction refers to a movement of the piston assembly in a direction of approaching the driving device along a radial direction of the pressurizing pipe 220, and the second direction refers to a movement of the piston assembly in a direction of approaching the driving device along a radial direction of the pressurizing pipe 220. The supercharging process of the supercharging device 230 is as follows:

(1) When the second piston assembly 240 drives the first piston assembly 250 to translate in the first direction, the cavity volume of the first compression chamber 233 increases, the cavity volume of the second compression chamber 234 decreases, and the cavity volume of the third compression chamber 235 increases;

The first cover 264 moves in a first direction under the action of pressure difference, the first spring column 265 is compressed, the end face of the first cover 264 is separated from the port of the first air suction section 261, the first air suction section 261 is communicated with the second air suction section 262, the unidirectional air suction structure 260 enters a communication state, and chlorine trifluoride gas in the air inlet channel 222 sequentially enters the third compression cavity 235 through the first air suction section 261, the air suction gap and the third air suction section 263;

meanwhile, as shown in fig. 5, the first unidirectional blocking structure 270 translates in the first direction, the first seal ring 277 abuts against the inner circumferential surface of the first conical hole to close the air inlet passage 223, the first unidirectional blocking structure 270 enters a blocking state, the communication between the second compression chamber 234 and the third compression chamber 235 is cut off, and the chlorine trifluoride gas in the second compression chamber 234 is compressed;

meanwhile, as shown in fig. 7, the second sealing ring 282 is separated from the inner peripheral surface of the second conical hole, the exhaust channel is opened, the second annular end surface is tightly attached to the end surface of the cover body, the second unidirectional blocking structure 280 is in a communicating state, and the chlorine trifluoride gas in the second compression chamber 234 flows into the first compression chamber 233 through the exhaust channel 283;

at the same time, the second cover 294 moves in the first direction under the pressure difference, and the second spring post 295 is stretched, so that the end surface of the second cover 294 blocks the port of the first exhaust section, the one-way exhaust structure 290 enters a blocking state, and the communication between the pressurizing channel 223 and the first compression chamber 233 is cut off;

(2) When the second piston assembly 240 drives the first piston assembly 250 to translate in the second direction, the cavity volume of the first compression chamber 233 decreases, the cavity volume of the second compression chamber 234 increases, and the cavity volume of the third compression chamber 235 decreases;

the first cover 264 moves in the second direction under the action of the pressure difference, the first spring column 265 returns to the initial state, the end face of the first cover 264 plugs the port of the first air suction section 261, the unidirectional air suction structure 260 enters the blocking state, the communication between the air inlet channel 222 and the third compression cavity 235 is cut off, and the chlorine trifluoride gas in the third compression cavity 235 is compressed;

meanwhile, as shown in fig. 6, the first unidirectional blocking structure 270 translates in the second direction, the first seal ring 277 is separated from the inner circumferential surface of the first conical hole to open the air inlet channel 223, the first unidirectional blocking structure 270 enters a communication state, and the compressed chlorine trifluoride gas in the third compression chamber 235 flows into the second compression chamber 234 through the first unidirectional blocking structure 270;

meanwhile, as shown in fig. 8, the second sealing ring 282 abuts against the inner circumferential surface of the second conical hole to close the exhaust passage, the second unidirectional blocking structure 280 enters a blocking state, the communication between the first compression chamber 233 and the second compression chamber 234 is cut off, and the chlorine trifluoride gas in the first compression chamber 233 is compressed;

At the same time, the second cover 294 moves in the second direction under the pressure difference, the second spring post 295 is compressed, so that the end face of the second cover 294 is separated from the port of the first exhaust section, the first exhaust section communicates with the second exhaust section, and the chlorine trifluoride gas in the first compression chamber 233 sequentially enters the pressurizing passage 222 via the first exhaust section, the exhaust gap, and the third exhaust section.

The pressurizing device 230 provided by the invention can realize twice pressurizing of the gas in a single reciprocating stroke of the piston assembly, thereby ensuring stable output of the high-pressure gas of chlorine trifluoride and improving the pressurizing efficiency of the pressurizing system.

Illustratively, the working principle of the automatic supercharging system provided by the invention is as follows:

the chlorine trifluoride liquid prepared by the front end production process is sent into the shell 110 of the gasification pressurizing module 100, and in the liquid feeding process, the liquid inlet valve 131 is normally open, and the liquid discharge valve 123, the heating device 112 and the electromagnetic valve 310 are normally closed; the liquid heat exchange medium is introduced into the jacket 120 through the medium pipeline 130 to refrigerate the chlorine trifluoride liquid in the shell 110, so that at least part of the chlorine trifluoride is kept in a liquid state;

the liquid heat exchange medium is gasified to form gaseous heat exchange medium after heat exchange with chlorine trifluoride and is discharged through the air outlet 121, and the second liquid level sensor 124 monitors the liquid level of the heat exchange medium in the jacket 120 in real time and feeds back the liquid level to the controller 140 in the process that the heat exchange medium is introduced into the jacket 120, and the controller 140 controls the opening of the liquid inlet valve 131 according to the liquid level height of the heat exchange medium in the jacket 120;

When the chlorine trifluoride liquid in the shell 110 reaches the monitoring set value of the first liquid level sensor 111, the trigger controller 140 sends a control instruction to control the liquid inlet valve 131 to be closed, the liquid discharge valve 123, the heating device 112 and the electromagnetic valve 310 to be opened, the liquid cooling medium is stopped from being introduced into the jacket 120, and the liquid cooling medium remained in the jacket 120 is discharged through the liquid discharge valve 123; the heating device 112 heats and gasifies the chlorine trifluoride liquid in the shell 110, and the formed chlorine trifluoride gas enters the pressurizing pipeline 220 through the electromagnetic valve 310;

the motor 210 is started, the motor 210 drives the connecting rod 211 to rotate, and as the connecting rod 211 rotates to push each second piston assembly 240 to reciprocate in the second cylinder 231, the second piston assembly 240 drives the first piston assembly 250 to reciprocate in the first cylinder 232, so that the chlorine trifluoride gas flowing through the pressurizing pipeline 220 is pressurized.

As the chlorine trifluoride gas is continuously injected into the intake passage 223, the plurality of pressurizing devices 230 may simultaneously pressurize the chlorine trifluoride gas in the intake passage 223 to shorten the pressurizing time.

The applicant declares that the above is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be apparent to those skilled in the art that any changes or substitutions that are easily conceivable within the technical scope of the present invention disclosed by the present invention fall within the scope of the present invention and the disclosure.

Claims

1. An automatic pressurizing system for preparing electronic grade chlorine trifluoride is characterized by comprising a gasification pressurizing module and a multi-stage pressurizing module which are sequentially connected;

the multistage pressurizing module comprises a driving device and an annular pressurizing pipeline which is arranged around the driving device, at least two pressurizing devices are arranged on the pressurizing pipeline in a space dislocation mode, the driving device is in transmission connection with the pressurizing devices, and the pressurizing devices are used for pressurizing chlorine trifluoride gas entering the pressurizing pipeline;

the gasification pressurizing module is connected with the multistage pressurizing module through a connecting pipeline, a pressure sensor is arranged in the shell, the pressure sensor is electrically connected with the heating device, the controller is used for controlling the electromagnetic valve in a feedback mode, and the controller is used for automatically controlling the heating device and the electromagnetic valve according to the air pressure in the shell;

the supercharging device comprises a cylinder and a piston assembly positioned in the cylinder, the driving device comprises a motor and at least two connecting rods, the connecting rods are arranged in a space dislocation mode along the axial direction of an output shaft of the motor, the connecting rods are matched with the supercharging device in the space dislocation mode, one ends of the connecting rods are fixed on the peripheral surface of the output shaft of the motor, and the other ends of the connecting rods are hinged to one ends of the piston assembly; the motor reciprocally rotates within a certain central angle range to drive each connecting rod at the periphery to swing around a hinging point, so as to push the piston assembly to reciprocally move in the cylinder, so as to suck chlorine trifluoride gas in an air inlet channel into the cylinder and boost pressure;

the device comprises a jacket, a first liquid level sensor, a second liquid level sensor, a controller and a sealing plate, wherein the liquid level sensor is used for monitoring the liquid level of a liquid heat exchange medium in the jacket, the second liquid level sensor is provided with a monitoring upper limit and a monitoring lower limit, the second liquid level sensor is electrically connected with the controller, the controller is used for controlling the liquid inlet valve in a feedback manner, the controller is used for controlling the opening of the liquid inlet valve according to the liquid level of the heat exchange medium in the jacket, the cylinder comprises a first cylinder and a second cylinder which are in butt joint in sequence along a first direction and are coaxially arranged, the butt joint part of the first cylinder and the second cylinder is provided with the sealing plate, the sealing plate is used for separating the first cylinder and the second cylinder, the inner diameter of the first cylinder is smaller than the inner diameter of the second cylinder, and the cavity volume of the first cylinder is smaller than the cavity volume of the second cylinder; the first direction is along the radial direction of the pressurizing pipeline and faces the driving device, and the second opposite direction is along the radial direction of the pressurizing pipeline and faces away from the driving device;

2. The automatic pressurizing system for preparing electronic grade chlorine trifluoride according to claim 1, wherein the end face of the second cylinder is provided with at least two air suction channels along the axial direction, two ends of the air suction channels are respectively communicated with the air suction channels and the third compression cavity, a unidirectional air suction structure is arranged in the middle of the air suction channels, and the unidirectional air suction structure has a blocking state and a communicating state;

3. The automatic pressurization system for the preparation of electronic grade chlorine trifluoride according to claim 2, wherein said air intake channel comprises, in the air intake direction, a first air intake section, a second air intake section and a third air intake section in communication in sequence, the diameter of said second air intake section > the diameter of said first air intake section > the diameter of said third air intake section, said unidirectional air intake structure being located within said second air intake section;

4. The automatic pressurizing system for preparing electronic grade chlorine trifluoride as claimed in claim 1, wherein a first unidirectional blocking structure is circumferentially arranged at the slot hole of the sealing plate, and the first piston rod passes through the first unidirectional blocking structure and moves reciprocally in the first unidirectional blocking structure under the drive of the second piston assembly; the first unidirectional blocking structure has a blocking state and a communicating state;

5. The automatic pressurization system for electronic grade chlorine trifluoride production of claim 4 wherein said first unidirectional blocking structure comprises a platen, a seal assembly, and a first base connected in sequence along a first direction, said first piston rod passing through said platen, said seal assembly, and said first base in sequence; a gap is reserved between the inner peripheral surface of the pressing plate and the outer peripheral surface of the first piston rod, the inner peripheral wall of the sealing assembly is in contact with the outer periphery of the first piston rod, a gap is reserved between the inner peripheral surface of the first base and the outer peripheral surface of the first piston rod, and the first unidirectional blocking structure is fixed on the first piston rod and synchronously moves along with the first piston rod;

6. The automatic pressurization system for the preparation of electronic grade chlorine trifluoride as claimed in claim 1, wherein a second unidirectional blocking structure is arranged in the first cylinder, and the second unidirectional blocking structure has a blocking state and a communicating state;

7. The automatic pressurization system for the preparation of electronic grade chlorine trifluoride as claimed in claim 6, wherein said second unidirectional blocking structure comprises a second base of annular configuration, said second base having a second conical bore therethrough along a first direction, said second conical bore having a bore diameter that increases progressively along the first direction;