CN116887499A - Magnetic field position type optimizing system for large-caliber helicon wave ion source - Google Patents
Magnetic field position type optimizing system for large-caliber helicon wave ion source Download PDFInfo
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- CN116887499A CN116887499A CN202310648603.1A CN202310648603A CN116887499A CN 116887499 A CN116887499 A CN 116887499A CN 202310648603 A CN202310648603 A CN 202310648603A CN 116887499 A CN116887499 A CN 116887499A
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- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 238000001816 cooling Methods 0.000 claims abstract description 61
- 230000007704 transition Effects 0.000 claims abstract description 21
- 238000007789 sealing Methods 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000004804 winding Methods 0.000 claims description 4
- 238000001125 extrusion Methods 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 239000004429 Calibre Substances 0.000 claims 1
- 238000005457 optimization Methods 0.000 abstract description 4
- 238000012360 testing method Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 108010066057 cabin-1 Proteins 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
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- 238000009755 vacuum infusion Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
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- Spectroscopy & Molecular Physics (AREA)
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Abstract
The application relates to the technical field of aerospace electric propulsion, in particular to a large-caliber helicon wave ion source magnetic field position optimization system, which comprises a vacuum cabin, a discharge chamber, an air supply device, a moving rack, a water-cooling electromagnetic coil and a guide rail, wherein: the discharge chamber is respectively and hermetically connected with the vacuum cabin and the air supply device through transition flanges; the guide rail is arranged on the moving rack, and a plurality of sliding tables are arranged on the guide rail; the water-cooling electromagnetic coil and the discharge chamber are both fixed on a sliding table of the moving table frame through a supporting frame and can slide along the guide rail; the diameter of the discharge chamber is more than or equal to 15cm, and an antenna is arranged on the outer surface of the discharge chamber; the water-cooled electromagnetic coil comprises a first water-cooled electromagnetic coil and a second water-cooled electromagnetic coil. The application explores the influence rule of the magnetic field position type on the discharge performance of the helicon wave ion source, avoids the limit of the weight volume of the water-cooling electromagnetic coil on the vacuum cabin, and ensures that the position adjustment of the water-cooling electromagnetic coil, the replacement of discharge chambers with different length-diameter ratios and the replacement of different antenna configurations are more convenient and quicker.
Description
Technical Field
The application relates to the technical field of aerospace electric propulsion, in particular to a magnetic field position optimization system of a large-caliber helicon wave ion source.
Background
The helicon wave ion source is electrodeless discharge, has the advantages of high ionization rate, high density, simple structure and the like, and has more application in the material field and the aerospace field, but a plurality of discharge phenomena and physical mechanisms of plasma generated by the helicon wave ion source are not clear at present, for example, the plasma heating mechanism, the low-field peak phenomenon and the blue core phenomenon of the helicon wave ion source are generated, and the discharge rule of the helicon wave ion source is mastered by a mode of combining experimental verification and theoretical analysis.
At present, long and thin type small-size helicon wave ion source test researches are mainly carried out on helicon wave ion sources at home and abroad, but researches related to large-size helicon wave ion sources are relatively few, mainly because a strong magnetic field of thousands of gauss and high radio frequency power are required to be established for carrying out large-size helicon wave ion source researches, a water-cooled electromagnetic coil is generally adopted for generating the strong magnetic field in a ground test system, but the diameter of a discharge chamber of the large-caliber helicon wave ion source is large, and under the condition that the discharge chamber can pass through the water-cooled electromagnetic coil, the large volume and the large weight are required for realizing the strong magnetic field, the difficulty of placing the large-size helicon wave ion source in a vacuum chamber is large, and in addition, the vacuum chamber is required to be opened if the magnetic field type is required to be changed or the discharge chamber with different length-diameter ratio is required to be changed, so that the test progress is seriously affected.
Disclosure of Invention
The application provides a magnetic field position type optimization system of a large-caliber helicon wave ion source, which avoids the limitation of the weight and the volume of a water-cooling electromagnetic coil on a vacuum cabin and solves the special requirements of time consumption, labor consumption and the vacuum cabin of the test of the existing large-caliber helicon wave ion source test system.
In order to achieve the above purpose, the application provides a magnetic field position optimizing system of a large-caliber helicon wave ion source, which comprises a vacuum cabin, a discharge chamber, a gas supply device, a moving rack, a water-cooling electromagnetic coil and a guide rail, wherein: one end of the discharge chamber is connected with the vacuum cabin in a sealing way through a first transition flange, and the other end of the discharge chamber is connected with the air supply device in a sealing way through a second transition flange; the guide rail is arranged on the moving rack, and a plurality of sliding tables are arranged on the guide rail; the water-cooling electromagnetic coil and the discharge chamber are both fixed on a sliding table of the moving table frame through a supporting frame and can slide along the guide rail; the diameter of the discharge chamber is more than or equal to 15cm, and an antenna is arranged on the outer surface of the discharge chamber; the water-cooling electromagnetic coil comprises a first water-cooling electromagnetic coil and a second water-cooling electromagnetic coil, and the first water-cooling electromagnetic coil is sleeved on the discharge chamber in a surrounding manner and is positioned between the vacuum cabin and the antenna; the second water-cooling electromagnetic coil is sleeved on the discharge chamber in a surrounding way and is positioned between the antenna and the air supply device.
Further, the first transition flange and the second transition flange are formed by two small flanges, two sealing rings and a pressing ring in a bolt extrusion mode.
Furthermore, the water-cooling electromagnetic coil is formed by winding a hollow copper pipe, and water cooling can be conducted inside the water-cooling electromagnetic coil.
Further, the material of the discharge chamber is quartz glass.
Further, the periphery of the antenna is covered with a copper net.
Further, the support frame connected and fixed with the discharge chamber is a lifting support frame, so that the free adjustment of the height of the support frame can be realized.
Further, during operation, the first water-cooled electromagnetic coil slides between the vacuum cabin and the antenna along the guide rail through the sliding table; the second water-cooled electromagnetic coil slides between the antenna and the air supply device along the guide rail through the sliding table.
The magnetic field position optimizing system of the large-caliber helicon wave ion source provided by the application has the following beneficial effects:
1. the application realizes the sealing connection of the vacuum cabin and the discharge chamber through the transition flange, realizes the change of the magnetic field position type through the water-cooling electromagnetic coil and the guide rail, explores the influence rule of the magnetic field position type on the discharge performance of the helicoidal wave ion source, realizes the installation and the movement of the discharge chamber with different length-diameter ratios through the lifting support frame and the guide rail, has simple structure, avoids the limitation of the weight and the volume of the water-cooling electromagnetic coil on the vacuum cabin, ensures that the position adjustment of the water-cooling electromagnetic coil, the replacement of the discharge chamber with different length-diameter ratios and the replacement of different antenna configurations are more convenient and faster, and is beneficial to grasping the discharge mechanism related to the helicoidal wave ion source with large caliber.
2. According to the application, the antenna is placed outside the vacuum chamber, the antenna is not interfered by sputtering of plasma plumes, breakdown is not easy to cause, the radio frequency transmission line is shortened compared with the antenna placed in the vacuum chamber, the attenuation of radio frequency power in a transmission path is reduced, so that the radio frequency power loaded at two ends of the antenna is higher, the improvement of the plasma density in the helicon wave ion source is facilitated, the time consumption and the labor consumption of the test of the conventional large-caliber helicon wave ion source test system are solved, and the time required for researching the influence rule of different structural parameters and working condition parameters on the large-caliber helicon wave ion source performance is shortened.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application, are incorporated in and constitute a part of this specification. The drawings and their description are illustrative of the application and are not to be construed as unduly limiting the application. In the drawings:
FIG. 1 is a schematic diagram of a magnetic field profile optimization system of a large-caliber helicon wave ion source according to an embodiment of the application;
FIG. 2 is a schematic diagram of the connection between the magnetic field profile optimizing system of the large-caliber helicon wave ion source and the vacuum cabin, which is provided by the embodiment of the application;
in the figure: the device comprises a 1-vacuum cabin, a 2-discharge chamber, a 3-air supply device, a 4-movement rack, a 5-first water-cooling electromagnetic coil, a 6-second water-cooling electromagnetic coil, a 7-guide rail, an 8-first transition flange, a 9-second transition flange, a 10-antenna, an 11-lifting support frame and a 12-sliding table.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe the embodiments of the application herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are only used to better describe the present application and its embodiments and are not intended to limit the scope of the indicated devices, elements or components to the particular orientations or to configure and operate in the particular orientations.
Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the present application will be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, the term "plurality" shall mean two as well as more than two.
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other. The application will be described in detail below with reference to the drawings in connection with embodiments.
As shown in fig. 1-2, the application provides a magnetic field position optimizing system of a large-caliber helicon wave ion source, which comprises a vacuum cabin 1, a discharge chamber 2, an air supply device 3, a moving rack 4, a water-cooling electromagnetic coil and a guide rail 7, wherein: one end of the discharge chamber 2 is connected with the vacuum chamber 1 in a sealing way through a first transition flange 8, and the other end is connected with the air supply device 3 in a sealing way through a second transition flange 9; the guide rail 7 is arranged on the moving bench 4, and a plurality of sliding tables 12 are arranged on the guide rail 7; the water-cooled electromagnetic coil and the discharge chamber 2 are both fixed on a sliding table 12 of the moving table frame 4 through a supporting frame and can slide along the guide rail 7; the diameter of the discharge chamber 2 is more than or equal to 15cm, and the outer surface is provided with an antenna 10; the water-cooling electromagnetic coil comprises a first water-cooling electromagnetic coil 5 and a second water-cooling electromagnetic coil 6, wherein the first water-cooling electromagnetic coil 5 is sleeved on the discharge chamber 2 in a surrounding manner and is positioned between the vacuum chamber 1 and the antenna 10; the second water-cooled electromagnetic coil 6 is sleeved on the discharge chamber 2 in a surrounding manner and is positioned between the antenna 10 and the air supply device 3.
Specifically, the large-caliber helicon wave ion source mainly means that the diameter of a discharge chamber 2 is more than 15cm, a strong magnetic field and higher radio frequency power are needed for realizing a helicon wave discharge mode, the mode of generating the strong magnetic field comprises a water-cooling electromagnetic coil, a superconducting magnet and a permanent magnet, but the price of the superconducting magnet suitable for the large-caliber helicon wave ion source is high and far higher than that of the water-cooling electromagnetic coil; the magnetic field intensity of the permanent magnet is fixed, so that the influence rule of the magnetic field position type and the magnetic field intensity on the discharge performance of the helicon wave ion source is difficult to explore in the test; therefore, a water-cooled electromagnetic coil is generally selected to generate a strong magnetic field, but most of the test researches are conducted on an elongated small-size helicon wave ion source in the prior art, the water-cooled electromagnetic coil is generally placed in a vacuum chamber 1, in a large-caliber helicon wave ion source test, the inner diameter of the water-cooled electromagnetic coil needs to be changed under the condition that a large-caliber discharge chamber 2 can pass through, the generation of the strong magnetic field and the change of the magnetic field position are realized, so that the volume and the weight of the water-cooled electromagnetic coil are large, the difficulty of placing the water-cooled electromagnetic coil in the vacuum chamber 1 is large, in addition, an epoxy resin material used for vacuum infusion of the water-cooled electromagnetic coil can give off air in the vacuum chamber 1 to influence the air pressure, and in addition, the vacuum chamber 1 needs to be opened when the magnetic field position is changed or the discharge chamber 2 with different length-diameter ratios is changed, so that the test progress is seriously influenced.
More specifically, the magnetic field type optimizing system for the large-caliber helicon wave ion source provided by the embodiment of the application realizes the sealing connection of the vacuum cabin 1 and the discharge chamber 2 through the transition flange, realizes the change of the magnetic field type through the water-cooling electromagnetic coil and the guide rail 7, and realizes the installation and the movement of the discharge chamber 2 with different length-diameter ratios through the lifting support frame 11 and the guide rail 7. The vacuum chamber 1 is internally connected with a mechanical pump and a molecular pump, so that the vacuum degree in the discharge process is ensured to be lower than 1Pa, and in addition, the measurement of the plasma density, the electron temperature and the electric potential of the discharge chamber 2 can be realized in the vacuum chamber; one end of the discharge chamber 2 is in sealing connection with the vacuum cabin 1 through a first transition flange 8, the other end of the discharge chamber 2 is in sealing connection with the air supply device 3 through a second transition flange 9, a support frame is arranged at one end of the discharge chamber 2, which is close to the air supply device 3, the discharge chamber 2 is fixed on a sliding table 12 of the moving table frame 4 through the support frame, the moving table frame 4 mainly plays a role in supporting and fixing, guide rails 7 are arranged on two sides of the moving table frame, the discharge chamber 2 can slide on the guide rails 7 through the sliding table 12, and the position of the discharge chamber 2 can be adjusted according to the actual length of the discharge chamber 2 in the test process; the gas supply device 3 mainly provides working medium gas with a certain flow rate for the discharge chamber 2 so as to generate plasma discharge; the antenna 10 is arranged on the outer surface of the discharge chamber 2, is preferably of a hollow right spiral structure, and is mainly used for coupling and transmitting energy supplied by a radio frequency source to plasma in the discharge chamber, and for a large-caliber helicon wave ion source, higher radio frequency power is required to be loaded on the antenna 10 for realizing a helicon wave discharge mode; in the embodiment of the application, the water-cooling electromagnetic coil is arranged outside the vacuum chamber 1, is annular as a whole, is sleeved on the discharge chamber 2, is fixed on the sliding table 12 of the moving table frame 4 through a support frame, and can slide on the guide rail 7 of the moving table frame 4 through the sliding table 12, and the position of the water-cooling electromagnetic coil can be adjusted according to actual requirements in the test process, so that the magnetic field position type is changed, and the test of the magnetic field position type on the influence rule of the discharge performance of the large-caliber helicoid wave ion source is realized.
Further, the first transition flange 8 and the second transition flange 9 are formed by means of bolt extrusion of two small flanges, two sealing rings and a pressing ring. The transition flange is formed by extruding a small flange, a sealing ring and a compression ring through bolts, and is mainly used for sealing connection between the discharge chamber 2 and the vacuum cabin 1 and the air supply device 3, so that gas leakage is prevented, and the leakage rate meets the test requirement.
Furthermore, the water-cooling electromagnetic coil is formed by winding a hollow copper pipe, and water cooling can be conducted inside the water-cooling electromagnetic coil. The first water-cooling electromagnetic coil 5 and the second water-cooling electromagnetic coil 6 are formed by winding hollow copper tubes, and are mainly used for providing a magnetic field, the central magnetic field strength can reach thousands gauss, the inner diameter of the water-cooling electromagnetic coil is larger than the diameter of the discharge chamber 2, and the discharge chamber 2 can be ensured to pass through, so that the placement of the discharge chamber 2 with different length-diameter ratios is satisfied. Because a large amount of heat can be generated after the electromagnetic coil is electrified, the temperature of the electromagnetic coil is required to be reduced through water cooling, the electromagnetic coil is prevented from burning out, the water cooling electromagnetic coil can be provided with a water inlet and a water outlet according to actual conditions and is connected with an external water supply and drainage device, and the water cooling circulation temperature reduction is realized.
Further, the material of the discharge vessel 2 is quartz glass. The discharge chamber 2 is made of insulating heat-resistant materials, the heat resistance of quartz glass is high, the use temperature is generally 1100-1200 ℃, the short-term use temperature can reach 1400 ℃, the requirement of the discharge chamber temperature is met, the quartz glass is low in cost and easy to process and mold, plasma parameters are tested outside the discharge chamber 2 made of the quartz glass materials, and compared with the vacuum chamber 1, the measurement is more convenient and accurate, and the discharge phenomenon of the discharge chamber 2 is also facilitated to be observed.
Further, the periphery of the antenna 10 is covered with a copper mesh. After the antenna 10 is loaded with radio frequency power, electromagnetic signals are radiated outwards, and a power supply and other test and diagnosis systems are interfered, so that the influence of radio frequency interference can be reduced by wrapping a layer of 200-mesh copper mesh or other metals on the periphery of the antenna 10; in addition, the antenna 10 is arranged outside the vacuum chamber 1, so that the antennas 10 of different types or different length-diameter ratios can be replaced conveniently, and the influence rule of different antenna 10 configurations on the discharge performance of the large-size helicon wave ion source can be explored.
Further, the supporting frame connected and fixed with the discharge chamber 2 is a lifting supporting frame 11, so that the free adjustment of the height of the supporting frame can be realized. The support frame that discharge chamber 2 is close to air feeder 3 one end is lifting type support frame 11, can adjust the height of placing from top to bottom of discharge chamber 2 through lifting type support frame 11, and in the test process, can be according to the diameter of discharge chamber 2, adjust the position of discharge chamber 2, guarantee that discharge chamber 2 of different draw ratio is applicable to this system.
Further, during operation, the first water-cooled electromagnetic coil 5 slides along the guide rail 7 through the sliding table 12 between the vacuum chamber 1 and the antenna 10; the second water-cooled electromagnetic coil 6 slides along the guide rail 7 via the slide table 12 between the antenna 10 and the air supply device 3. In the embodiment of the application, by arranging two water-cooling electromagnetic coils and adjusting the current values of the two water-cooling electromagnetic coils and changing the distance between the two water-cooling electromagnetic coils in a sliding manner, the influence of the position type of a magnetic field on the effect of absorbing radio frequency power by plasma in the discharge chamber 2 and the influence on parameters such as the plasma density, the plasma temperature, the electric potential and the radio frequency power value required by the conversion of the ion source E-H-W mode are conveniently observed mainly for changing the position type of the magnetic field, wherein the minimum distance between the two water-cooling electromagnetic coils is 0 in the sliding process, and the maximum distance is not more than the whole length of the discharge chamber 2, and according to practical experimental conditions, the optimal water-cooling electromagnetic coil distance can be obtained so that the spiral wave discharge mode (W mode) can be realized under lower working condition parameters.
More specifically, in the experimental process, the vacuum chamber 1 is vacuumized firstly, when the vacuum degree is lower than 1Pa, the air supply device 3 supplies air to the inside of the discharge chamber 2, when the vacuum degree is kept unchanged, the radio frequency power supply is used for transmitting radio frequency signals to the antenna 10, under certain power, the inside of the discharge chamber 2 is successfully ignited, at the moment, the radio frequency discharge is carried out, then the two water-cooling electromagnetic coils are loaded with current, and the conversion of the discharge mode of the helicon wave ion source is realized by adjusting the current value and the radio frequency power of the water-cooling electromagnetic coils; therefore, it can be seen that the embodiment of the application is suitable for the large-caliber helicoidal ion source with the diameter of the discharge chamber 2 being larger than or equal to 15cm, the sealing connection of the vacuum chamber 1 and the air supply device 3 with the discharge chamber 2 is realized through the transition flange, the leak rate meets the test requirement, the change of the magnetic field position is realized through the water-cooling electromagnetic coil and the guide rail 7, the influence rule of the magnetic field position on the discharge performance of the helicoidal ion source is explored, the installation and the movement of the discharge chamber 2 with different length-diameter ratios are realized through the lifting support frame 11 and the guide rail 7, the water-cooling electromagnetic coil is arranged outside the vacuum chamber 1, the limit of the weight volume of the water-cooling electromagnetic coil on the vacuum chamber 1 is avoided, the position adjustment of the water-cooling electromagnetic coil, the replacement of the discharge chamber 2 with different length-diameter ratios and the configuration replacement of the antenna 10 are more convenient and rapid, the antenna 10 is placed outside the vacuum chamber 1, the sputtering interference of plasma plume is avoided, breakdown is not easily caused, the radio frequency transmission line is shortened compared with the antenna 10 placed in the vacuum chamber 1, the attenuation of the radio frequency power on the transmission path is reduced, the radio frequency power is higher than the radio frequency transmission line, the radio frequency power is loaded at both ends of the antenna 10, the radio frequency power is high, and the time consumption of the test system of the existing helicoidal ion source is required to be solved, and the special requirement of the test system is met.
The above description is only of the preferred embodiments of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (7)
1. The utility model provides a heavy-calibre helicon wave ion source magnetic field position formula optimizing system which characterized in that includes vacuum chamber, discharge chamber, air feeder, motion rack, water-cooling solenoid and guide rail, wherein:
one end of the discharge chamber is connected with the vacuum cabin in a sealing way through a first transition flange, and the other end of the discharge chamber is connected with the air supply device in a sealing way through a second transition flange;
the guide rail is arranged on the moving rack, and a plurality of sliding tables are arranged on the guide rail;
the water-cooling electromagnetic coil and the discharge chamber are both fixed on a sliding table of the moving rack through a supporting frame and can slide along a guide rail;
the diameter of the discharge chamber is more than or equal to 15cm, and an antenna is arranged on the outer surface of the discharge chamber;
the water-cooling electromagnetic coil comprises a first water-cooling electromagnetic coil and a second water-cooling electromagnetic coil, the first water-cooling electromagnetic coil is sleeved on the discharge chamber in a surrounding manner, and the first water-cooling electromagnetic coil is positioned between the vacuum cabin and the antenna; the second water-cooling electromagnetic coil is sleeved on the discharge chamber in a surrounding mode and is positioned between the antenna and the air supply device.
2. The system of claim 1, wherein the first transition flange and the second transition flange are each formed by two small flanges, two sealing rings and a pressing ring by means of bolt extrusion.
3. The large-caliber helicon wave ion source magnetic field position optimizing system according to claim 1, wherein the water-cooling electromagnetic coil is formed by winding a hollow copper pipe, and water can be introduced into the water-cooling electromagnetic coil.
4. The system of claim 1, wherein the discharge chamber is made of quartz glass.
5. The large-caliber helicon wave ion source magnetic field profile optimizing system of claim 1, wherein the antenna periphery is covered with a copper mesh.
6. The magnetic field profile optimizing system of large diameter helicon wave ion source as claimed in claim 4, wherein the support frame connected and fixed with the discharge chamber is a lifting support frame, which can realize free adjustment of the height of the support frame.
7. The large-caliber helicon wave ion source magnetic field position optimizing system of claim 1, wherein in operation, the first water-cooled electromagnetic coil slides along a guide rail between the vacuum chamber and the antenna through a sliding table; the second water-cooling electromagnetic coil slides between the antenna and the air supply device along the guide rail through the sliding table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310648603.1A CN116887499A (en) | 2023-06-02 | 2023-06-02 | Magnetic field position type optimizing system for large-caliber helicon wave ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310648603.1A CN116887499A (en) | 2023-06-02 | 2023-06-02 | Magnetic field position type optimizing system for large-caliber helicon wave ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116887499A true CN116887499A (en) | 2023-10-13 |
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ID=88259369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310648603.1A Pending CN116887499A (en) | 2023-06-02 | 2023-06-02 | Magnetic field position type optimizing system for large-caliber helicon wave ion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116887499A (en) |
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2023
- 2023-06-02 CN CN202310648603.1A patent/CN116887499A/en active Pending
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