CN116885036A - Laser grooving method and device for battery piece, solar battery and photovoltaic module - Google Patents

Laser grooving method and device for battery piece, solar battery and photovoltaic module Download PDF

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Publication number
CN116885036A
CN116885036A CN202310840464.2A CN202310840464A CN116885036A CN 116885036 A CN116885036 A CN 116885036A CN 202310840464 A CN202310840464 A CN 202310840464A CN 116885036 A CN116885036 A CN 116885036A
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laser
grooving
slotting
region
regions
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夏雪松
陈红
左景武
左晓昆
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Trina Solar Co Ltd
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Trina Solar Co Ltd
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Priority to CN202310840464.2A priority Critical patent/CN116885036A/en
Publication of CN116885036A publication Critical patent/CN116885036A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022433—Particular geometry of the grid contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
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  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The application relates to a laser grooving method and device for a battery piece, a solar battery and a photovoltaic module, wherein the laser grooving method comprises the following steps of: forming a plurality of first laser grooving areas which are parallel to each other and are arranged at intervals along a first direction on the surface of the passivation structure, which is away from the substrate; and forming a plurality of second laser grooving areas parallel to each other on the surface, so that a first laser grooving area is formed between any two adjacent second laser grooving areas. The first laser slotting region and the second laser slotting region are used for drawing the two layers in sequence, so that the first laser slotting region and the second laser slotting region respectively correspond to the slotting regions of the odd grid lines and the even grid lines, and therefore the slotting regions corresponding to the odd grid lines and the slotting regions corresponding to the even grid lines of the same battery piece are separately and independently adjusted, damage to a passivation structure caused by back slotting can be reduced, and the transmission and collection capacity of photo-generated carriers can be improved to enhance the photoelectric conversion efficiency of the battery.

Description

Laser grooving method and device for battery piece, solar battery and photovoltaic module
Technical Field
The application relates to the technical field of batteries, in particular to a laser grooving method and device for a battery piece, a solar battery and a photovoltaic module.
Background
The emitter and backside passivation cell (Passivated Emitter and Rear Cell, PERC) is backside passivated on the back surface to increase the backside light reflectivity and the backside passivation film is opened to form a localized metal contact using laser grooving techniques to conduct away the photogenerated carriers inside the cell. However, as the number of gate lines on the back of the battery increases, the number of laser slots on the back increases when the high-density gate technology is applied to the back of the PERC battery, which results in greater damage to the passivation film layer on the back of the slot area, thereby affecting the passivation effect on the back of the battery.
Disclosure of Invention
Based on the above, it is necessary to provide a laser slotting method, a device, a solar cell and a photovoltaic module for a battery piece, which are capable of solving the problem that damage to a passivation film layer on the back surface caused by slotting cannot be effectively reduced while facing a high-density grid printing technology on the back surface of the battery in the prior art.
In order to achieve the above object, the present application provides a laser grooving method for a battery piece, the battery piece including a substrate and a passivation structure located on a back surface of the substrate, the method comprising:
forming a plurality of first laser grooving areas which are parallel to each other and are arranged at intervals along a first direction on the surface of the passivation structure, which is away from the substrate, wherein each first laser grooving area comprises a plurality of first grooving areas which are arranged at intervals along a second direction and a first interval area between every two adjacent first grooving areas;
forming a plurality of second laser grooving areas parallel to each other on the surface, so that a first laser grooving area is formed between any two adjacent second laser grooving areas, each second laser grooving area comprises a plurality of second grooving areas which are arranged at intervals along a second direction and a second interval area between every two adjacent second grooving areas;
the first ratio of any first laser grooving area is different from the second ratio of the second laser grooving area, the first ratio is the proportion of the size of the first grooving areas to the size of the first laser grooving area in the second direction, the second ratio is the proportion of the size of the second grooving areas to the size of the second laser grooving area in the second direction, and the first direction is perpendicular to the second direction.
In one embodiment, the start point of any first laser grooving region is staggered from the start point of the adjacent second laser grooving region, so that the first grooving region and the second grooving region are staggered in the first direction.
In one embodiment, the first grooved region and the second grooved region each extend along the second direction, and the method further includes:
the size of each first slotting region in the same first laser slotting region is adjusted so as to change the proportion of the first slotting region to the first laser slotting region;
and adjusting the size of each second slotting region in the same second laser slotting region so as to change the proportion of the second slotting region to the second laser slotting region.
In one embodiment, the method further comprises:
the size of each first interval area in the same first laser grooving area is adjusted so as to change the proportion of the first grooving area to the first laser grooving area;
and adjusting the size of each second interval region in the same second laser grooving region so as to change the proportion of the second grooving region to the second laser grooving region.
In one embodiment, the first grooved regions of at least two of the first laser grooved regions are different in size ratio; and/or
The second slotted regions of at least two of the second laser slotted regions have different size ratios.
In one embodiment, the method further comprises:
and forming a back electrode structure on the surfaces of the first grooving areas and the surfaces of the second grooving areas so that the back electrode structure forms ohmic contact with the substrate through the first grooving areas and the second grooving areas.
In one embodiment, in the same first laser grooving region, a plurality of first grooving regions are sequentially arranged at equal intervals along the second direction; and/or
And in the same second laser grooving region, a plurality of second grooving regions are sequentially and equidistantly arranged along the second direction.
In one embodiment, each of the first grooved regions and each of the second grooved regions are formed on the surface by using one or more laser spots corresponding to one or more patterns.
The application provides a laser grooving device for a battery piece, which is used for executing the laser grooving method for the battery piece.
The application provides a solar cell which is manufactured by adopting the laser grooving method of a cell piece.
The application provides a photovoltaic module comprising a solar cell as described above.
According to the laser slotting method, the device, the solar cell and the photovoltaic module of the battery piece, the first laser slotting areas which are arranged in parallel at intervals are formed on the surface of the passivation structure, and the second laser slotting areas which are arranged in parallel are formed on the surface of the passivation structure, so that each first laser slotting area is inserted into two adjacent second laser slotting areas, the first proportion of any first laser slotting area is different from the second proportion of the second laser slotting area, the first laser slotting area and the second laser slotting area are used for carrying out sequential drawing, each first laser slotting area corresponds to one of the back odd grid lines and the even grid lines, each second laser slotting area corresponds to the other of the back odd grid lines and the even grid lines, and therefore separation and independent adjustment are carried out on slotting areas corresponding to the odd grid lines and slotting areas corresponding to the even grid lines of the same battery piece, the whole battery piece can be adapted to the requirements of high-density grid slotting, damage to the structure can be reduced, and the photoelectric conversion efficiency of the battery piece can be improved, and the photoelectric conversion capacity of a photon-generated carrier can be enhanced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments or the conventional techniques of the present application, the drawings required for the descriptions of the embodiments or the conventional techniques will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic flow chart of a method for laser grooving a battery piece according to an embodiment;
fig. 2 is a schematic view of a partially enlarged structure of a laser grooving structure of a battery sheet according to an embodiment.
Reference numerals illustrate:
passivation structure: 100; first laser grooving region: 200; a first slotting region: 210; a first spacer: 220; second laser grooving region: 300; a second slotting region: 310; a second spacer: 320.
Detailed Description
In order that the application may be readily understood, a more complete description of the application will be rendered by reference to the appended drawings. Embodiments of the application are illustrated in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," and/or the like, specify the presence of stated features, integers, steps, operations, elements, components, or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or groups thereof. Also, in this specification, the term "and/or" includes any and all combinations of the associated listed items.
In one embodiment, a laser grooving method for a battery piece is provided, the battery piece comprising a substrate and a passivation structure located on the back side of the substrate.
The battery piece of the embodiment may be a PERC battery, where the substrate of the battery piece is used as a region that absorbs incident photons and generates photo-generated carriers, and may include one or more of monocrystalline silicon, polycrystalline silicon, and microcrystalline silicon, and the front surface of the substrate is a surface of the battery piece that receives light, and the back surface of the substrate is a surface of the battery piece that faces away from the light. It can be understood that in the conventional crystalline silicon solar cell, the metal electrode on the back surface of the cell is in direct contact with the semiconductor substrate, so that there is serious recombination in the contact area of the metal and the semiconductor, so that the PERC cell reduces the recombination rate of the carriers on the back surface by adding the passivation structure with full coverage on the back surface of the substrate to improve the open circuit voltage of the cell, thereby not only improving the working efficiency of the cell, but also enhancing the light reflection effect on the back surface of the cell.
Alternatively, the passivation structure on the back surface of the substrate may be a stacked structure, for example, including an aluminum oxide layer and a silicon nitride layer sequentially stacked in a direction away from the substrate, or including any one or at least two of a silicon-containing layer, aluminum oxide, silicon nitride, and silicon oxynitride.
Further, the passivation structure of the contact area is opened by a laser grooving technology to realize local metal contact, but as the PERC battery technology is mature, the conversion efficiency of the PERC battery is increased, and the multi-main-grid and high-density-grid printing of the battery piece becomes a new breakthrough point of the conversion efficiency of the PERC battery. Therefore, as the number of laser slotting on the back of the battery piece increases with the increase of the dense grid on the back, however, the conventional laser slotting technology has smaller adjustment windows for slotting patterns, and cannot independently adjust the virtual-to-real ratio for slotting areas of the same battery piece, so that when each slotting area is too small, the photo-generated carrier leading-out resistance of the substrate is easy to become large, and when each slotting area is too large, the damage to the passivation structure on the back is too large, and the passivation effect is further affected.
Therefore, based on the fact that the slotting area occupation ratio cannot be flexibly adjusted when the slotting area is designed at present, the embodiment provides a laser slotting method for a battery piece to solve the defects, so that when the high-density grid printing technology is applied, carriers can be effectively collected, and passivation damage caused by the increase of the slotting quantity on the back surface can be reduced. Referring to fig. 1 specifically, the method includes steps S102 to S104, and a laser grooving structure of the battery piece formed after step S104 is shown in fig. 2.
Step S102: a plurality of first laser grooving areas which are parallel to each other and are arranged at intervals along the first direction are formed on the surface of the passivation structure, which is away from the substrate, and each first laser grooving area comprises a plurality of first grooving areas which are arranged at intervals along the second direction and a first interval area between every two adjacent first grooving areas.
The first direction X may be understood as a column direction shown in fig. 2, and the second direction Y may be understood as a row direction shown in fig. 2, by performing laser ablation treatment on a surface of a side of the passivation structure 100 facing away from the substrate to form a plurality of first laser grooving regions 200 arranged in parallel and at intervals along the first direction X, and each row of first laser grooving regions 200 forms a first grooving region 210 arranged in a line segment type, that is, in the same first laser grooving region 200, a plurality of light spots formed by a laser ablation technology (also referred to as a laser grooving technology) sequentially tangent to or partially overlap to remove a part of the passivation structure 100 to expose a part of the substrate, so as to form a first grooving region 210, and a first spacing region 220 between two adjacent first grooving regions 210 is not ablated to form an ungrooved first spacing region 220.
Step S104: and forming a plurality of second laser grooving areas parallel to each other on the surface, so that a first laser grooving area is formed between any two adjacent second laser grooving areas, wherein each second laser grooving area comprises a plurality of second grooving areas which are arranged at intervals along a second direction and a second interval area between every two adjacent second grooving areas.
With continued reference to fig. 2, the first ratio of the first laser grooving regions 200 to the second ratio of the second laser grooving regions 300 is different from the first ratio of the dimensions of the first grooving regions 210 to the dimensions of the first laser grooving regions 200 in the second direction, and the second ratio of the dimensions of the second grooving regions 310 to the dimensions of the second laser grooving regions 300 in the second direction, and the first direction is perpendicular to the second direction.
Wherein, each row of second laser grooved regions is also partially removed by a laser ablation technique to expose a portion of the substrate, thereby forming second grooved regions 310 arranged in line segments, and two adjacent second grooved regions 310 are not ablated to form ungrooved second spacer regions 320.
Further, the first duty ratio of the first laser grooving region 200 may be understood as a ratio of the size of the plurality of first grooving regions 210 to the space between the first laser grooving region 200 from the start point of the left grooving to the end point of the right grooving in the same row of the first laser grooving region 200, and the first duty ratio may be understood as a ratio between the size of the first grooving region 210 and the size of the first spacing region 220 in the same row of the first laser grooving region 200, i.e. referred to as a first virtual-to-real ratio. Similarly, the second duty ratio of the second laser grooving region 300 may be understood as a ratio of the size of the plurality of second grooving regions 310 to the pitch between the second laser grooving region 300 from the start point of the left grooving to the end point of the right grooving in the same row of the second laser grooving region 300, and the second duty ratio may be understood as a ratio between the size of the second grooving region 310 and the size of the second spacing region 320 in the same row of the second laser grooving region 300, i.e. referred to as a second virtual-to-real ratio. And the above dimensions can be understood as the length of the slotted zone in the second direction Y.
It can be appreciated that, in order to meet the requirement of the size adjustment of the backside slotting region, after the first laser slotting region 200 is formed, a laser ablation treatment is performed on the surface of the passivation structure 100 on the side facing away from the substrate to form a plurality of parallel spaced second laser slotting regions 300, and a first laser slotting region 200 is formed between two adjacent second laser slotting regions 300, that is, when the plurality of second laser slotting regions 300 are moved upwards by a preset distance along the first direction Y compared with the plurality of first laser slotting regions 200, the plurality of second laser slotting regions 300 correspond to the odd grid lines on the backside of the battery piece, and the plurality of first laser slotting regions 200 correspond to the even grid lines on the backside of the battery piece; when the plurality of second laser slotting regions 300 move downwards along the first direction Y by a preset distance compared with the plurality of first laser slotting regions 200, the plurality of first laser slotting regions 200 correspond to the odd grid lines on the back surface of the battery piece, and the plurality of second laser slotting regions 300 correspond to the even grid lines on the back surface of the battery piece, so that the two layers of the first laser slotting regions 200 and the second laser slotting regions 300 are sequentially drawn by dividing the laser slotting pattern on the back surface of the battery piece, each first laser slotting region 200 corresponds to one of the back surface odd grid lines and the even grid lines, each second laser slotting region 300 corresponds to the other of the back surface odd grid lines and the even grid lines, and the first occupation ratio of the first laser slotting region 200 is different from the second occupation ratio of the second laser slotting region 300, so that the slotting regions corresponding to the odd grid lines and the slotting regions corresponding to the even grid lines of the same battery piece are separately and independently adjusted. That is, the first virtual-to-real ratio of the first laser slotting region 200 and the second virtual-to-real ratio of the second laser slotting region 300 are modified, so as to achieve the purpose of respectively controlling and adjusting the slotting regions corresponding to the odd-even grid lines.
As illustrated in fig. 2, the plurality of second laser grooved regions 300 are moved upward by a preset distance along the first direction Y compared to the plurality of first laser grooved regions 200, so that each second laser grooved region 300 corresponds to a back odd gate line, each first laser grooved region 200 corresponds to a back even gate line, that is, an odd gate line is printed on each second laser grooved region 300, and even gate lines are printed on each first laser grooved region 200. Further, the second slotting region 310 of the second laser slotting region 300 is smaller than the first slotting region 210 of the first laser slotting region 200, that is, the second duty ratio of the second laser slotting region 300 is smaller than the first duty ratio of the first laser slotting region 200, so that passivation damage caused by back slotting can be reduced due to the small size of the second slotting region 310 of the second laser slotting region 300, negative influence on passivation effect of the passivation structure 100 is reduced, and the transmission and collection capacity of photo-generated carriers can be improved due to the larger size of the first slotting region 210 of the first laser slotting region 200, so that balance between passivation characteristics and photo-generated carrier derivation is comprehensively considered, effective collection of carriers can be ensured, passivation damage caused by increase of the number of back slotting can be reduced, and optimal photoelectric conversion efficiency of the battery piece can be achieved.
In the above example, a plurality of first laser slotting regions arranged in parallel at intervals are formed on the surface of the passivation structure, and then a plurality of second laser slotting regions arranged in parallel are formed on the surface of the passivation structure, so that each first laser slotting region is inserted into two adjacent second laser slotting regions, and the first duty ratio of any first laser slotting region is different from the second duty ratio of the second laser slotting region, and two layers of the first laser slotting region and the second laser slotting region are used for orderly drawing, so that each first laser slotting region corresponds to one of a back odd grid line and an even grid line, and each second laser slotting region corresponds to the other of the back odd grid line and the even grid line, thereby realizing separate and independent adjustment of slotting regions corresponding to the odd grid line and slotting regions corresponding to the even grid line of the same battery piece, reducing damage to the passivation structure caused by the back slotting, and improving the transmission and collection capacity of photo-generated carriers to enhance the photoelectric conversion efficiency of the battery while adapting to the high-density grid slotting requirement.
In one embodiment, the laser grooving method for the battery piece further comprises the following steps: and forming a back electrode structure on the surfaces of the first slotting regions and the surfaces of the second slotting regions, so that the back electrode structure forms ohmic contact with the substrate through the first slotting regions and the second slotting regions.
The back electrode structure may include an aluminum gate line and a back main gate. It will be appreciated that after forming the plurality of first laser grooved regions and the plurality of second laser grooved regions by sequential ablation of the laser, it is necessary to print aluminum paste on the surface of each first grooved region of the first laser grooved regions to form either the odd or even aluminum gate lines, and also to print aluminum paste on the surface of each second grooved region of the second laser grooved regions to form the other of the odd and even aluminum gate lines. It should be noted that when the aluminum paste is also printed on the surface of the spacer region, the printed aluminum gate lines form an all-aluminum back electric field, and when the aluminum paste is not printed on the first spacer region, the printed aluminum gate lines do not cover the back surface of the substrate entirely, but are printed only on each grooved region to form parallel and densely distributed aluminum gate lines, thereby reducing the consumption of the aluminum paste and saving the cost.
Further, the aluminum paste fills each grooved region so that the formed aluminum grid line is in partial contact with the substrate, so that the substrate transmits electrons to the aluminum grid line, and the aluminum grid line further transmits collected current to the back main grid intersected with the aluminum grid line. Therefore, aluminum paste is printed in the first laser grooving region and the second laser grooving region to form an aluminum grid line structure which is densely distributed in parallel, so that the recombination rate of minority carriers can be reduced, and the open-circuit voltage and the short-circuit current of the battery piece can be improved.
In one embodiment, each first grooved region and each second grooved region are formed on the surface by using one or more laser spots corresponding to the patterns.
It will be appreciated that in forming each first grooved region or each second grooved region, the laser-formed spots are arranged in succession to engrave one grooved region, wherein the laser spot may be in the shape of any one or more combinations of circles, triangles, trapezoids or other polygons, and the grooved region formed by the spot openings may be in the shape of a grooved pattern that approximates a straight line segment or other shape.
Further, the size of the first slotting region and the size of the second slotting region can be modified by adjusting laser parameters, such as pulse frequency, width and the like, so as to adjust the size of the slotting region, or by importing slotting processing diagrams into software so as to realize slotting region patterns with different shapes and styles, so that the first duty ratio of the first laser slotting region is different from the second duty ratio of the second laser slotting region.
In one embodiment, as shown in fig. 2, the start of the slotting of any one first laser slotting region 200 is offset from the start of the slotting of an adjacent second laser slotting region 300 such that the first slotting region 210 and the second slotting region 310 are staggered in a first direction.
It can be understood that the starting point of slotting (e.g., the starting point at the left end) of any one first laser slotting region 200 is staggered from the starting point of slotting of the adjacent second laser slotting region 300, so that the first slotting region 210 and the second slotting region 310 are staggered in the first direction X, that is, the second slotting region 310 is correspondingly covered above and below the first spacing region between any two adjacent first slotting regions 210, so that carriers flowing on the first spacing region can be collected by the grid lines filled on the upper and lower second slotting regions 310, thereby realizing multidimensional collection of photo-generated carriers, shortening the transmission path of carriers from the substrate body to the grid line electrode, enhancing the collection capability of carriers, and further improving the working efficiency of the battery piece.
In one embodiment, the first slotting region and the second slotting region extend along the second direction respectively, and the laser slotting method of the battery piece further comprises the following steps: the size of each first slotting region in the same first laser slotting region is adjusted so as to change the proportion of the first slotting region to the first laser slotting region; the size of each second slotting region in the same second laser slotting region is adjusted to change the proportion of the second slotting region to the second laser slotting region.
For example, each first laser slotting region corresponds to a slotting region of an even gate line, and by modifying the size (i.e., the length along the second direction) of each first slotting region in the same first laser slotting region, the first virtual-real ratio between the first slotting region and the first spacing region can be changed, so that the even gate line can be independently adjusted, the slotting region of the even gate line can reduce damage to a passivation structure or the slotting region of the even gate line can improve the collection and transmission capability of photo-generated carriers.
Further, when each first laser slotting region corresponds to the slotting region of the even gate line, each second laser slotting region corresponds to the slotting region of the odd gate line, and further, by modifying the size (i.e., the length along the second direction) of each second slotting region in the same second laser slotting region, the second virtual-to-real ratio between the second slotting region and the second spacing region can be changed, thereby realizing the independent adjustment of the odd gate line. And if the size of the first slotting region of the first laser slotting region is smaller, so that the damage to the passivation structure can be reduced by the even grid line slotting region, the size of the second slotting region of the second laser slotting region is increased, the collection and transmission capacity of photo-generated carriers can be improved by the odd grid line slotting region, the first laser slotting region and the second laser slotting region are formed in sequence, and the odd grid lines of the same battery piece are separately and independently adjusted by adjusting the size of the slotting region, so that the passivation damage caused by back slotting can be reduced while the effective collection of the carriers is ensured.
In one embodiment, the laser grooving method for the battery piece further comprises the following steps: the size of each first interval area in the same first laser grooving area is adjusted so as to change the proportion of the first grooving area to the first laser grooving area; the size of each second interval region in the same second laser grooving region is adjusted so as to change the proportion of the second grooving region to the second laser grooving region.
For example, each first laser slotting region corresponds to a slotting region of an even gate line, and by modifying the size of each first spacing region (i.e., the distance between two adjacent first slotting regions) in the same first laser slotting region, the first virtual-to-real ratio between the first slotting region and the first spacing region can be changed, so that the even gate line is independently adjusted, the even gate line slotting region can reduce damage to a passivation structure or the even gate line slotting region can improve the collection and transmission capability of photo-generated carriers.
Further, when each first laser slotting region corresponds to the slotting region of the even grating line, each second laser slotting region corresponds to the slotting region of the odd grating line, and further, by modifying the size of each second spacing region (i.e., the distance between two adjacent second slotting regions) in the same second laser slotting region, the second virtual-to-real ratio between the second slotting region and the second spacing region can be changed, thereby realizing the independent adjustment of the odd grating line. And if the size of the first interval area of the first laser slotting area is larger, the size of the first slotting area is smaller, so that the damage to the passivation structure can be reduced by the even grid line slotting area, the size of the second slotting area of the second laser slotting area is reduced, the size of the second slotting area is enlarged, the collection and transmission capacity of photo-generated carriers can be improved by the odd grid line slotting area, the first laser slotting area and the second laser slotting area are formed in sequence, and the odd grid line and the even grid line of the same battery piece are separately and independently adjusted by adjusting the size of the interval area, so that the passivation damage caused by back slotting can be reduced while the effective collection of the carriers is ensured.
In one embodiment, the first grooved regions of the at least two first laser grooved regions are different in size ratio. That is, in the process of forming the first laser grooving region, the passivation structure can be divided into a plurality of laser ablation parts, and each laser ablation forms a first grooving region arranged at intervals along the second direction, so that the laser parameters of each time can be adjusted to adjust the size ratio of the first grooving region of the first laser grooving region of each formed row, and further control adjustment of each first laser grooving region is realized, so that more grid line adjustment requirements are met.
In one embodiment, the second grooved regions of the at least two second laser grooved regions are different in size ratio. That is, in the process of forming the second laser grooving region, the passivation structure can be divided into a plurality of laser ablation parts, and each laser ablation forms a second grooving region arranged at intervals along the second direction, so that the laser parameters of each time can be adjusted to adjust the size ratio of the second grooving region of the second laser grooving region of each formed row, and further, each second laser grooving region is controlled and adjusted, so that more grid line adjustment requirements are met. In addition, in other embodiments, the size ratio of the first slotting regions of the at least two first laser slotting regions is different, and the size ratio of the second slotting regions of the at least two second laser slotting regions is different, that is, the size ratio of the first slotting regions of each row of first laser slotting regions can be independently adjusted, and the size ratio of the second slotting regions of each row of second laser slotting regions can also be independently adjusted, so as to meet the adjustment requirement of the grid line, thereby solving the problem of dealing with the damage of the battery back slotting passivation structure caused by the high-density grid printing technology to a greater extent.
In one embodiment, in the same first laser grooving region, the plurality of first grooving regions are sequentially arranged at equal intervals along the second direction. The first laser grooving areas are parallel to each other in the first direction, and the first grooving areas are arranged at equal intervals in a straight line along the second direction, so that currents collected by grid lines formed on the first grooving areas are more uniform, and the current output circuit is beneficial to current lifting and carrier transmission path optimization.
In one embodiment, the plurality of second slotted regions are sequentially equally spaced along the second direction in the same second laser slotted region. The second laser grooving areas are parallel to each other in the first direction, and the second grooving areas are arranged at equal intervals in a straight line along the second direction, so that currents collected by grid lines formed on the second grooving areas are more uniform, and the current output circuit is beneficial to current lifting and carrier transmission path optimization. In other embodiments, the plurality of first slotted regions are sequentially equally spaced along the second direction in the same first laser slotted region, and the plurality of second slotted regions are sequentially equally spaced along the second direction in the same second laser slotted region.
In one embodiment, a laser grooving process schematic of a battery piece is provided, the battery piece is illustrated by taking a dimension of 210mm or 210mm as an example, firstly, a distance between two adjacent rows of grid lines on the back is determined to be 1.12mm, a plurality of first laser grooving areas in the middle are formed on the surface of a passivation structure, which faces away from a substrate, and then a plurality of second laser grooving areas in the middle are formed at positions, where the whole first laser grooving areas move upwards by 1.12mm along a first direction X, so that the distance between the two adjacent second laser grooving areas is 2.24mm, and then aluminum paste is filled into the first grooving area of each first laser grooving area, and aluminum paste is filled into the second grooving area of each second laser grooving area, so that the first laser grooving areas and the second laser grooving areas which are drawn in sequence can respectively correspond to parity lines of grid lines, virtual-real ratios and other laser parameters in different laser grooving areas are modified, and control and adjustment of parity grid lines are respectively achieved.
In one embodiment, a solar cell is provided that is fabricated using the laser grooving method for the cell as described in the previous embodiments. After the solar cell is optimally processed by the laser grooving method of the cell, passivation loss caused by grooving of the back surface of the cell is reduced, so that the solar cell can enhance the collection capacity of carriers, and further, the electrical performance and the yield of the solar cell are improved.
In one embodiment, based on the same inventive concept, a laser grooving apparatus for a battery sheet is provided for performing the laser grooving method for a battery sheet as described in the above embodiments.
In one embodiment, a photovoltaic module is provided comprising a solar cell as described in the above embodiments.
The photovoltaic module comprises a battery string, the battery string is formed by connecting a plurality of solar cells, the photovoltaic module further comprises an encapsulation layer and a cover plate, the encapsulation layer is used for covering the surface of the battery string, and the cover plate is used for covering the surface, far away from the battery string, of the encapsulation layer. The solar cells are electrically connected in whole or multiple pieces to form multiple cell strings, and the multiple cell strings are electrically connected in series and/or parallel. Specifically, in some embodiments, multiple battery strings may be electrically connected by conductive charges. The encapsulation layer covers the surface of the solar cell. The encapsulation layer may be, for example, an organic encapsulation film such as an ethylene-vinyl acetate copolymer film, a polyethylene octene co-elastomer film, or a polyethylene terephthalate film. The cover plate can be a glass cover plate, a plastic cover plate and the like with a light transmission function.
It should be understood that, although the steps in the flowchart of fig. 1 are shown in sequence as indicated by the arrows, the steps are not necessarily performed in sequence as indicated by the arrows. The steps are not strictly limited to the order of execution unless explicitly recited herein, and the steps may be executed in other orders. Moreover, at least a portion of the steps in fig. 1 may include a plurality of steps or stages, which are not necessarily performed at the same time, but may be performed at different times, and the order of the steps or stages is not necessarily sequential, but may be performed in rotation or alternatively with at least a portion of the steps or stages in other steps or other steps.
In the description of the present specification, reference to the terms "some embodiments," "other embodiments," "desired embodiments," and the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.
The technical features of the above embodiments may be arbitrarily combined, and for brevity, all of the possible combinations of the technical features of the above embodiments are not described, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (11)

1. A method of laser grooving a battery piece, wherein the battery piece comprises a substrate and a passivation structure on the back of the substrate, the method comprising:
forming a plurality of first laser grooving areas which are parallel to each other and are arranged at intervals along a first direction on the surface of the passivation structure, which is away from the substrate, wherein each first laser grooving area comprises a plurality of first grooving areas which are arranged at intervals along a second direction and a first interval area between every two adjacent first grooving areas;
forming a plurality of second laser grooving areas parallel to each other on the surface, so that a first laser grooving area is formed between any two adjacent second laser grooving areas, each second laser grooving area comprises a plurality of second grooving areas which are arranged at intervals along a second direction and a second interval area between every two adjacent second grooving areas;
the first ratio of any first laser grooving area is different from the second ratio of the second laser grooving area, the first ratio is the proportion of the size of the first grooving areas to the size of the first laser grooving area in the second direction, the second ratio is the proportion of the size of the second grooving areas to the size of the second laser grooving area in the second direction, and the first direction is perpendicular to the second direction.
2. The method of claim 1, wherein the start of any one of the first laser slotting regions is offset from the start of an adjacent second laser slotting region such that the first slotting regions and the second slotting regions are staggered in the first direction.
3. The method of claim 1, wherein the first and second slotted regions each extend in the second direction, the method further comprising:
the size of each first slotting region in the same first laser slotting region is adjusted so as to change the proportion of the first slotting region to the first laser slotting region;
and adjusting the size of each second slotting region in the same second laser slotting region so as to change the proportion of the second slotting region to the second laser slotting region.
4. The method of laser grooving a battery plate according to claim 1, further comprising:
the size of each first interval area in the same first laser grooving area is adjusted so as to change the proportion of the first grooving area to the first laser grooving area;
and adjusting the size of each second interval region in the same second laser grooving region so as to change the proportion of the second grooving region to the second laser grooving region.
5. The method of laser grooving for a battery piece according to any one of claims 3 to 4, wherein the first grooving regions of at least two of the first laser grooving regions are different in size ratio; and/or
The second slotted regions of at least two of the second laser slotted regions have different size ratios.
6. The laser grooving method for a battery plate according to any one of claims 1 to 4, further comprising:
and forming a back electrode structure on the surfaces of the first grooving areas and the surfaces of the second grooving areas so that the back electrode structure forms ohmic contact with the substrate through the first grooving areas and the second grooving areas.
7. The laser grooving method according to any one of claims 1 to 4, wherein in the same first laser grooving region, a plurality of the first grooving regions are sequentially arranged at equal intervals in the second direction; and/or
And in the same second laser grooving region, a plurality of second grooving regions are sequentially and equidistantly arranged along the second direction.
8. The method of claim 1, wherein each of the first grooved regions and each of the second grooved regions are formed on the surface by using one or more laser spots corresponding to one or more patterns.
9. A laser grooving apparatus for a battery sheet, characterized in that the apparatus is used to perform the laser grooving method for a battery sheet according to any one of claims 1 to 8.
10. A solar cell manufactured by a laser grooving method of the battery sheet according to any one of claims 1 to 8.
11. A photovoltaic module comprising the solar cell of claim 10.
CN202310840464.2A 2023-07-10 2023-07-10 Laser grooving method and device for battery piece, solar battery and photovoltaic module Pending CN116885036A (en)

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CN202310840464.2A CN116885036A (en) 2023-07-10 2023-07-10 Laser grooving method and device for battery piece, solar battery and photovoltaic module

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