CN116869566A - Ultrasonic probe with flexible ultrasonic matching layer - Google Patents
Ultrasonic probe with flexible ultrasonic matching layer Download PDFInfo
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- 239000000523 sample Substances 0.000 title claims abstract description 62
- 239000003822 epoxy resin Substances 0.000 claims abstract description 27
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 20
- 239000002105 nanoparticle Substances 0.000 claims abstract description 18
- 239000007822 coupling agent Substances 0.000 claims abstract description 14
- 239000002131 composite material Substances 0.000 claims abstract description 9
- 239000011259 mixed solution Substances 0.000 claims description 37
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 30
- 238000003756 stirring Methods 0.000 claims description 14
- 238000002604 ultrasonography Methods 0.000 claims description 7
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- -1 glycidyl ester Chemical class 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- 239000000178 monomer Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004528 spin coating Methods 0.000 claims description 3
- 239000004844 aliphatic epoxy resin Substances 0.000 claims description 2
- 150000004982 aromatic amines Chemical class 0.000 claims description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 claims description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000004593 Epoxy Substances 0.000 claims 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 7
- 230000005284 excitation Effects 0.000 abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 238000003745 diagnosis Methods 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 238000002360 preparation method Methods 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 239000000306 component Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 210000000056 organ Anatomy 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 201000010099 disease Diseases 0.000 description 2
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- MTEZSDOQASFMDI-UHFFFAOYSA-N 1-trimethoxysilylpropan-1-ol Chemical compound CCC(O)[Si](OC)(OC)OC MTEZSDOQASFMDI-UHFFFAOYSA-N 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000012412 chemical coupling Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000005543 nano-size silicon particle Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000008807 pathological lesion Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 210000001835 viscera Anatomy 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Abstract
The invention belongs to the technical field of ultrasonic detection, and particularly relates to an ultrasonic probe with a flexible ultrasonic matching layer. The matching layer of the ultrasonic probe has excellent flexibility, so that the ultrasonic probe can be bent and twisted at will and can be well attached to the skin of a human body; the flexible ultrasonic matching layer of the ultrasonic probe is a composite material composed of epoxy resin, a coupling agent and oxide nano particles; the piezoelectric material emits ultrasonic waves after voltage excitation, the ultrasonic waves enter a tested object through the flexible ultrasonic matching layer, the tested object can be human tissues or water, the flexible ultrasonic matching layer can effectively reduce reflection and loss of the ultrasonic waves transmitted from the piezoelectric material into the tested object, and effective transmission of the ultrasonic waves is realized; when the ultrasonic waves are reflected inside the measured object and are transmitted into the piezoelectric material, the flexible ultrasonic matching layer can also play the same role, namely, good acoustic matching is realized, the transmission efficiency of the ultrasonic waves is improved, and the diagnosis effect is improved.
Description
Technical Field
The invention belongs to the technical field of ultrasonic detection, and particularly relates to an ultrasonic probe with a flexible ultrasonic matching layer.
Background
Ultrasonic detection is an important medical imaging diagnosis technology and has the advantages of no invasiveness, high resolution, strong penetrating power and the like. The ultrasonic imaging technology can detect the morphology and physical characteristics of the internal organs of the human body and visualize pathological lesions, thereby effectively diagnosing diseases. The ultrasonic probe is a core component for medical ultrasonic examination, and emits ultrasonic waves under voltage excitation, and the ultrasonic waves can be reflected at the interfaces of tissues and organs due to different acoustic impedances in various tissue devices of a human body, the reflected waves are collected by the ultrasonic probe, and an ultrasonic image is obtained through signal processing, so that the outline and the state of the tissues and the organs are clearly displayed. The emerging technologies such as the Internet of things, great health and the like promote the rapid development of wearable medical equipment, and have wide market prospect. However, at present, the conventional hard and block-shaped ultrasonic probe is difficult to meet the special wearable application requirements of being clung to the surface of a human body, being light, and the like, so that development of a flexible, light and comfortable portable ultrasonic probe is needed.
In the ultrasonic probe, the ultrasonic matching layer can improve the transmission efficiency of ultrasonic waves, can directly influence the final diagnosis effect, and has great significance in the flexibility process of the ultrasonic probe.
Therefore, there is a need to develop an ultrasound matching layer with good flexibility and appropriate acoustic impedance, which can achieve efficient transmission of ultrasound while being able to fit the skin, and improve ultrasound image quality while achieving long-term monitoring.
According to the invention, oxide nano particles are introduced into the epoxy resin through a chemical coupling method, so that the acoustic impedance of the epoxy resin-based composite material can be improved, the acoustic matching between an ultrasonic probe and a human body can be met, the flexibility of the composite material is ensured, and the ultrasonic probe and skin can be well attached. The ultrasonic probe using the flexible epoxy resin as the matching layer has no related documents and patent reports at present.
Disclosure of Invention
The invention aims to provide an ultrasonic probe with an ultrasonic matching layer which has proper acoustic impedance and excellent flexibility.
The invention provides an ultrasonic probe with a flexible ultrasonic matching layer, wherein the flexible ultrasonic matching layer is a composite material prepared from epoxy resin, a coupling agent and oxide nano particles serving as raw materials; between the piezoelectric material and the object to be measured of the ultrasonic probe, the acoustic impedance thereof is between the piezoelectric material and the object to be measured, and the acoustic impedance thereof is between the piezoelectric material and the object to be measured, wherein:
the mass fraction of the oxide nano particles in the flexible ultrasonic matching layer is 1.0% -70.0%, and the amount of the coupling agent is 5.0% -30.0% of the mass of the oxide nano particles.
The flexible ultrasonic matching layer has a specific thickness which depends on the wavelength d of ultrasonic waves emitted by the piezoelectric material, and the thickness of the flexible ultrasonic matching layer is between 0.2d and 0.3 d. The density of the flexible ultrasonic matching layer is 1.0 g/cm 3 - 2.5g/cm 3 The sound velocity of the ultrasonic wave is 2400 m/s-3000 m/s, and the acoustic impedance of the flexible ultrasonic matching layer is 2.6 MRayl-7.5 MRayl.
Further:
the epoxy resin is the main body part of the composite material, and most of mechanical properties of the composite material are derived from the epoxy resin. The epoxy resin consists of AB two components, wherein the A component is a monomer or an oligomer of the epoxy resin, and the B component is a curing agent. The component A is a monomer or an oligomer of one of glycidyl ether epoxy resin, glycidyl ester epoxy resin and aliphatic epoxy resin, and the component B is one of aliphatic amine and aromatic amine curing agent.
The coupling agent plays a role in coupling the epoxy resin matrix and the oxide nano particles, one end of the alkoxy of the coupling agent can react with the hydroxyl on the surface of the oxide nano particles after being hydrolyzed in ethanol to modify and graft the surface of the oxide nano particles, and the other end of the coupling agent can react with the epoxy resin matrix to couple the epoxy resin matrix and the oxide nano particles. The coupling agent contains a hetero atom chain segment with excellent flexibility, so that the composite material has excellent flexibility and can be well attached to human skin. The coupling agent is one of gamma-aminopropyl triethoxysilane, gamma-glycidol ether oxypropyl trimethoxysilane, gamma- (methacryloyloxy) propyl trimethoxysilane, N-aminoethyl-gamma-aminopropyl trimethoxysilane and isopropyl dioleoyl (dioctyl phosphoryloxy) titanate.
The oxide nano particles play a role of crosslinking points and provide excellent toughness for the composite material. The oxide nano particles are selected from one or a mixture of several of nano aluminum oxide, nano titanium oxide, nano silicon oxide, nano zirconium oxide and nano cerium oxide.
The flexible ultrasonic matching layer comprises the following specific preparation steps:
(1) Preparation of mixed solution C: the mixed solution C consists of an epoxy resin component A, a coupling agent, oxide nano particles and ethanol; firstly, weighing a certain amount of ethanol, dispersing a certain amount of oxide nano particles in ethanol according to the dosage ratio, stirring for 10-30 minutes, adding a certain amount of coupling agent according to the dosage ratio after fully mixing, continuously stirring for 10-30 minutes, adding a certain amount of epoxy resin A according to the dosage ratio, and stirring for 10-30 minutes to obtain a mixed solution C;
(2) Preparation of a mixed solution D: standing the mixed solution C for 24 hours, then placing the mixed solution C in an oven at 80 ℃ for a plurality of hours to bake off ethanol, cooling, adding a certain amount (according to the proportion of the dosage) of epoxy resin B component into the mixed solution C, stirring uniformly, and vacuumizing to remove bubbles to obtain a mixed solution D;
(3) The flexible ultrasonic matching layer is formed by two methods:
uniformly coating the mixed solution D on a substrate by adopting a spin coating or blade coating mode, and heating at 60 ℃ for a plurality of hours (for example, 3-5 hours) to obtain a cured flexible ultrasonic matching layer, wherein the thickness of the cured flexible ultrasonic matching layer is generally smaller;
and (3) injecting the mixed solution D into a mold with designed thickness, and heating at 60 ℃ for several hours (for example, 3-5 hours) to obtain the cured flexible ultrasonic matching layer, wherein the thickness of the cured flexible ultrasonic matching layer can be larger.
The ultrasonic matching layer designed by the invention has the thickness related to the frequency of ultrasonic waves emitted by the piezoelectric material and excellent flexibility, so that the ultrasonic probe can be bent and twisted at will and can be well attached to the skin of a human body. The piezoelectric material emits ultrasonic waves after voltage excitation, the ultrasonic waves enter a tested object through the flexible ultrasonic matching layer, the tested object can be human tissues or water, the flexible ultrasonic matching layer can effectively reduce reflection and loss of the ultrasonic waves transmitted from the piezoelectric material into the tested object, and effective transmission of the ultrasonic waves is realized; similarly, when the ultrasonic waves are reflected inside the measured object and are transmitted into the piezoelectric material, the flexible ultrasonic matching layer can play the same role, namely, good acoustic matching is realized, the transmission efficiency of the ultrasonic waves is improved, and the diagnosis effect is improved.
The flexible ultrasonic matching layer can be used as a matching layer of piezoelectric materials with different acoustic impedances, and the transmission efficiency of ultrasonic waves is improved. The ultrasonic probe can be further expanded to be used as a matching layer of the array type ultrasonic probe, so that the array type ultrasonic probe has flexibility and can be attached to skin, the image quality of ultrasonic imaging is improved, the ultrasonic probe is used for long-term monitoring of the condition of human tissues and organs, and the ultrasonic probe has important significance for prevention and diagnosis of diseases.
Drawings
Fig. 1 is a schematic diagram of the location of a flexible ultrasound matching layer in an ultrasound probe of the present invention.
Fig. 2 is experimental data of ultrasonic pulse excitation, respectively immersing an ultrasonic probe with and without a flexible ultrasonic matching layer in water, wherein a reflecting block is copper, ultrasonic waves are emitted from the probe into the water, reflected on the surface of the copper, and reflected signals are received by the ultrasonic probe. The ultrasonic probe with the flexible ultrasonic matching layer is seen by comparing ultrasonic signals received by the flexible ultrasonic matching layer and ultrasonic signals received by the flexible ultrasonic matching layer, the signal amplitude of the ultrasonic probe is obviously larger than that of the ultrasonic probe without the flexible ultrasonic matching layer, the tailing of the signals is less, the sensitivity of the ultrasonic probe is improved by the surface flexible ultrasonic matching layer, the bandwidth of the ultrasonic probe is improved, and the ultrasonic probe is favorable for improving the quality of ultrasonic imaging.
Description of the embodiments
Examples
(1) Preparation of mixed solution C: the mixed solution C consists of epoxy resin E51, gamma-aminopropyl triethoxysilane, alumina particles with the particle size of 250 nm and ethanol. Firstly, 3.0 g g of ethanol is weighed, alumina particles with the particle size of 2.0 g and the particle size of 250 nm are dispersed in the ethanol, stirred for 10-30 minutes, then 0.3g of gamma-aminopropyl triethoxysilane is added after full mixing, stirring is continued for 10-30 minutes, then 1.8g of epoxy resin E51 is added, and stirring is carried out for 10-30 minutes, thus obtaining a mixed solution C.
(2) Preparation of a mixed solution D: standing the mixed solution C for 24 hours, then placing the mixed solution C in an oven at 80 ℃ for a plurality of hours to bake off ethanol, adding 0.6g of amine curing agent into the mixed solution C after cooling, stirring uniformly, and vacuumizing to remove bubbles to obtain the mixed solution D.
(3) Shaping a flexible ultrasonic matching layer: and (3) dropwise adding the mixed solution D on a spin coater, and uniformly coating the mixed solution D on a substrate in a spin coating mode, wherein the rotating speed is 2000rpm, and the duration is 30s. And heating the spin-coated sample at 60 ℃ for several hours, and curing and forming to obtain the flexible ultrasonic matching layer with the thickness of about 60 mu m.
(4) Preparation of an ultrasonic probe: and (3) magnetically sputtering a layer of copper with the thickness of 1 mu m on the flexible ultrasonic matching layer, using the copper as a bottom lead-out circuit of the ultrasonic probe and grounding, and using a conductive adhesive E-holder to bond a bottom electrode of the piezoelectric material with the bottom lead-out circuit, and bonding a top electrode of the piezoelectric material with a pre-customized top lead-out circuit to obtain the unpackaged ultrasonic probe. The preparation of the ultrasonic probe is completed by filling the gap with a polymer having excellent flexibility such as PDMS as a package.
(5) Ultrasonic pulse excitation test: the top electrode lead-out circuit and the bottom electrode lead-out circuit of the ultrasonic probe are respectively connected with a pulse transmitting receiver 5900PR, and the pulse transmitting receiver 5900PR transmits the received signals to a computer through an oscilloscope Picoscillope. Immersing an ultrasonic probe in a water tank, placing a copper plate at a certain distance in front of the ultrasonic probe, exciting the ultrasonic probe by a pulse transmitting receiver to transmit ultrasonic waves, receiving echo reflected by the surface of the copper plate by the ultrasonic probe, transmitting signals to a computer, and analyzing parameters such as sensitivity, bandwidth and the like of the ultrasonic signals by using computer software.
Examples
(1) Preparation of mixed solution C: the mixed solution C consists of epoxy resin E51, gamma-aminopropyl triethoxysilane, alumina particles with the particle size of 250 nm and ethanol. Firstly, 3.0 g g of ethanol is weighed, alumina particles with the particle size of 2.0 g and the particle size of 250 nm are dispersed in the ethanol, stirred for 10-30 minutes, then 0.3g of gamma-aminopropyl triethoxysilane is added after full mixing, stirring is continued for 10-30 minutes, then 1.8g of epoxy resin E51 is added, and stirring is carried out for 10-30 minutes, thus obtaining a mixed solution C.
(2) Preparation of a mixed solution D: standing the mixed solution C for 24 hours, then placing the mixed solution C in an oven at 80 ℃ for a plurality of hours to bake off ethanol, adding 0.6g of amine curing agent into the mixed solution C after cooling, stirring uniformly, and vacuumizing to remove bubbles to obtain the mixed solution D.
(3) Shaping a flexible ultrasonic matching layer: and (3) dropwise adding the mixed solution D on a substrate, adjusting a scraper control gap of a film scraper until the thickness of a coating film is 100 mu m, and carrying out scraping. The sample after the knife coating is heated for a plurality of hours at 60 ℃ to be cured and molded, and the flexible ultrasonic matching layer with the thickness of about 100 mu m is obtained.
(4) Preparation of an ultrasonic probe: and (3) magnetically sputtering a layer of copper with the thickness of 1 mu m on the flexible ultrasonic matching layer, using the copper as a bottom lead-out circuit of the ultrasonic probe and grounding, and using a conductive adhesive E-holder to bond a bottom electrode of the piezoelectric material with the bottom lead-out circuit, and bonding a top electrode of the piezoelectric material with a pre-customized top lead-out circuit to obtain the unpackaged ultrasonic probe. The preparation of the ultrasonic probe is completed by filling the gap with a polymer having excellent flexibility such as PDMS as a package.
(5) Ultrasonic pulse excitation test: the top electrode lead-out circuit and the bottom electrode lead-out circuit of the ultrasonic probe are respectively connected with a pulse transmitting receiver 5900PR, and the pulse transmitting receiver 5900PR transmits the received signals to a computer through an oscilloscope Picoscillope. Immersing an ultrasonic probe in a water tank, placing a copper plate at a certain distance in front of the ultrasonic probe, exciting the ultrasonic probe by a pulse transmitting receiver to transmit ultrasonic waves, receiving echo reflected by the surface of the copper plate by the ultrasonic probe, transmitting signals to a computer, and analyzing parameters such as sensitivity, bandwidth and the like of the ultrasonic signals by using computer software.
Claims (6)
1. An ultrasonic probe with a flexible ultrasonic matching layer is characterized in that the flexible ultrasonic matching layer is a composite material prepared from epoxy resin, a coupling agent and oxide nano particles serving as raw materials; between the piezoelectric material and the object to be measured of the ultrasonic probe, the acoustic impedance thereof is between the piezoelectric material and the object to be measured, and the acoustic impedance thereof is between the piezoelectric material and the object to be measured, wherein:
the mass fraction of the oxide nano particles in the flexible ultrasonic matching layer is 1.0% -70.0%, and the amount of the coupling agent is 5.0% -30.0% of the mass of the oxide nano particles.
2. The ultrasonic probe having a flexible ultrasonic matching layer according to claim 1, wherein the ultrasonic matching layer has a thickness of 0.2d to 0.3d, d being the wavelength of ultrasonic waves emitted by the piezoelectric material; its density is 1.0 g/cm 3 - 2.5g/cm 3 The sound velocity of ultrasonic wave is 2400 m/s-3000 m/s; the acoustic impedance is 2.6 MRayl-7.5 MRayl.
3. The ultrasonic probe having a flexible ultrasonic matching layer according to claim 1, wherein the epoxy is composed of AB two components; wherein the component A is a monomer or an oligomer of epoxy resin, and the component B is a curing agent; the component A is a monomer or an oligomer of one of glycidyl ether epoxy resin, glycidyl ester epoxy resin and aliphatic epoxy resin, and the component B is one of aliphatic amine and aromatic amine curing agent.
4. The ultrasound probe with flexible ultrasound matching layer according to claim 1, wherein the coupling agent is one of gamma-aminopropyl triethoxysilane, gamma-glycidoxypropyl trimethoxysilane, gamma- (methacryloyloxy) propyl trimethoxysilane, N-aminoethyl-gamma-aminopropyl trimethoxysilane, isopropyl dioleoyloxy (dioctyl phosphoryloxy) titanate.
5. The ultrasonic probe with a flexible ultrasonic matching layer according to claim 1, wherein the oxide nanoparticles are selected from one or a mixture of several of nano-alumina, nano-titania, nano-silica, nano-zirconia, nano-ceria.
6. The ultrasonic probe having a flexible ultrasonic matching layer according to claim 1, wherein the flexible ultrasonic matching layer is prepared by:
(1) Dispersing oxide nano particles in ethanol, stirring for 10-30 minutes, adding a coupling agent after fully mixing, continuously stirring for 10-30 minutes, adding an epoxy resin component A, stirring for 10-30 minutes to obtain a mixed solution, and marking as C;
(2) Standing the mixed solution C for 24 hours, then placing the mixed solution C in an oven at 80 ℃ to bake off ethanol, adding the epoxy resin component B into the mixed solution C after cooling, stirring uniformly, vacuumizing and removing bubbles to obtain a mixed solution, and marking the mixed solution as D;
(3) The flexible ultrasonic matching layer is formed by two methods:
uniformly coating the mixed solution D on a substrate by adopting a spin coating or blade coating mode, and heating at 60 ℃ for 3-5 hours to obtain a cured flexible ultrasonic matching layer;
and (3) injecting the mixed solution D into a mold with designed thickness, and heating at 60 ℃ for 3-5 hours to obtain the cured flexible ultrasonic matching layer.
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