CN116858105A - Optical element thickness detection method and device - Google Patents
Optical element thickness detection method and device Download PDFInfo
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- CN116858105A CN116858105A CN202310858224.5A CN202310858224A CN116858105A CN 116858105 A CN116858105 A CN 116858105A CN 202310858224 A CN202310858224 A CN 202310858224A CN 116858105 A CN116858105 A CN 116858105A
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- optical element
- light source
- receiving plate
- detection
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- 238000001514 detection method Methods 0.000 title claims abstract description 96
- 230000003287 optical effect Effects 0.000 title claims abstract description 96
- 238000000034 method Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000011540 sensing material Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
A method and a device for detecting thickness of an optical element relate to the technical field of optical thickness detection, and comprise the following steps: s1, fixing an optical element; s2, arranging a laser detection light source above the optical element; s3, a light receiving plate is placed below the optical element, and the distance between the laser detection light source and the light receiving plate is L; s4, arranging a light receiver under the laser detection light source, wherein the distance between the light receiver and the laser detection light source is L; s5, aligning the light irradiation direction of the laser detection light source with the light receiver, and recording the time for detecting the light to reach the light receiver as T ₁; s6, rotating the laser detection light source, the light-sensitive receiving plate and the light receiver together by a certain angle alpha, and measuring to obtain the time for the detection light to reach the light-sensitive receiving plate as T ₂; s7, setting the thickness value of the optical element detection part as h; the speed of the detection light in the optical element is V ₁, the speed of the detection light in the air is c, and h can be obtained according to a formula.
Description
Technical Field
The invention relates to the technical field of optical thickness detection, in particular to a method and a device for detecting the thickness of an optical element.
Background
The thickness is one of important parameters of the optical element, which affects the precision and performance of equipment or instruments on which the optical element is mounted, the small thickness generally causes loose assembly to affect the stability of an optical path, and the large thickness can cause extrusion deformation of the element to change the optical performance; therefore, it is critical to the detection of thickness parameters during the production of optical elements.
The current tools for measuring the thickness of the optical element have various types, but all the tools have certain disadvantages; when the thickness of an optical element is measured by a traditional vernier caliper, a screw micrometer and other tools, in order to measure accurately, the contact surface of the tool and the element is usually a hard metal surface, so that the surface of the optical element is very easy to scratch, and particularly for the element with extremely high surface quality requirement, the surface of the element is basically not used for shipment after being contacted by the hard material; the more advanced three-coordinate detector and optical thickness gauge are required to put the element on a hard plane for measurement, and the surface of the element is damaged; the laser range finder is a non-contact measurement method, but cannot be used because the polished optical element transmits light. At present, the thickness of a batch of products is roughly estimated to reach the standard through spot check in the element production process, and an accurate and safe optical element thickness measuring method is lacked.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides the following technical scheme:
an optical element thickness detection method comprising the steps of:
s1, fixing a planar optical element;
s2, arranging a laser detection light source above the optical element, wherein the light irradiation direction of the laser detection light source can rotate in a plane perpendicular to the optical element;
s3, a light-sensitive receiving plate made of light-sensitive materials is placed below the optical element, the light-sensitive receiving surface of the light-sensitive receiving plate is a horizontal plane, the light irradiation direction of the laser detection light source is always perpendicular to the light-sensitive receiving surface of the light-sensitive receiving plate, and the relative position of the laser detection light source and the light-sensitive receiving plate is fixed and the distance is L;
s4, arranging a light receiver under the laser detection light source, wherein the relative position of the light receiver and the laser detection light source is fixed, and the distance is L;
s5, will be excitedThe light irradiation direction of the light detection light source is aligned with the light receiver, and the time for the detection light to reach the light receiver after passing through the light sensing element is recorded as T 1 ；
S6, rotating the laser detection light source, the light receiving plate and the light receiver together in a plane perpendicular to the optical element by a certain angle alpha to enable the detection light to pass through the optical element and irradiate the light receiving plate, and measuring to obtain the time T for the detection light to reach the light receiving plate 2 ；
S7, setting the thickness of the detection part of the optical element to be uniform and the value of h; detecting the velocity of light in the optical element as V 1 The speed of the light in air is detected as c, according to the following equation:
can be solved, V 1 And h, thereby yielding the thickness of the optical element.
Further, the light receiving plate is made of a semiconductor material.
Further, the laser detection light source is a pulse laser or a femtosecond laser, and the receiving area of the light receiver is smaller than or equal to the sectional area of the laser beam.
Further, the light receiver is made of a photodiode.
The utility model provides an used optical element thickness detection device of optical element thickness detection method, includes the elastic fixture that fixed optical element used, perpendicular fixedly connected with steering spindle on the elastic fixture, the other end of steering spindle is equipped with the steering motor, the lateral wall fixedly connected with concave detection mouth of steering motor, the detection mouth includes jaw face and jaw face, the middle part of jaw face is equipped with laser detection light source, the jaw face is equipped with the light sense receiving plate, the below of laser detection light source is equipped with the optical receiver to the department, the optical receiver is equal with the distance of laser detection light source to the light sense receiving plate.
Further, a motor shaft of the steering motor is fixedly connected with the steering shaft, the opening direction of the detection opening is the same as the clamping opening direction of the elastic clamp, the optical element is positioned between the upper jaw surface and the lower jaw surface, the light receiving surface of the light receiving plate is a horizontal plane, the irradiation direction of the laser detection light source is perpendicular to the light receiving plate, and the light receiving plate is made of a light sensing material.
Further, an angle sensor is installed at the other end of the motor shaft of the steering motor.
Further, the upper jaw surface and the lower jaw surface are parallel to each other.
Further, the elastic clamp is a clamp type clamp.
Further, the contact surface of the elastic clamp and the optical element is provided with a soft clean diaphragm.
The beneficial effects of the invention are as follows:
the invention provides a method and a device for detecting the thickness of an optical element, which realize non-contact thickness measurement of the surface of the optical element by an optical principle, are convenient and quick, can not generate any damage to the surface of the element, and well solve the problem of difficult thickness measurement of the optical element after polishing.
Drawings
FIG. 1 is a schematic diagram of a detection method according to the present invention;
FIG. 2 is a schematic view of an apparatus for clamping optical elements according to the present invention;
FIG. 3 is a schematic front view of the apparatus of the present invention;
FIG. 4 is a schematic side view of the apparatus of the present invention;
FIG. 5 is a schematic diagram of an implementation step S5 of the apparatus of the present invention;
FIG. 6 is a schematic diagram of an implementation step S6 of the apparatus of the present invention;
in the figure: 1. the device comprises an optical element, a laser detection light source, a light sensing receiving plate, a light receiver, an angle sensor, an elastic clamp, a steering shaft, a steering motor, a detection port, an upper jaw surface and a lower jaw surface.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
As shown in figures 1-6 of the drawings,
an optical element thickness detection method comprising the steps of:
s1, fixing a planar optical element 1;
s2, arranging a laser detection light source 2 above the optical element 1, wherein the light irradiation direction of the laser detection light source 2 can rotate in a plane perpendicular to the optical element 1;
s3, a light-sensitive receiving plate 3 made of light-sensitive materials is placed below the optical element 1, the light-sensitive receiving surface of the light-sensitive receiving plate 3 is a horizontal plane, the light irradiation direction of the laser detection light source 2 is always perpendicular to the light-sensitive receiving surface of the light-sensitive receiving plate 3, and the relative position of the laser detection light source 2 and the light-sensitive receiving plate 3 is fixed and the distance is L;
s4, arranging a light receiver 4 under the laser detection light source 2, wherein the relative position of the light receiver 4 and the laser detection light source 2 is fixed, and the distance is L;
s5, aligning the irradiation direction of the laser detection light source 2 with the light receiver 4, recording the time for the detection light to reach the light receiver 4 through the light sensing element as T 1 ；
S6, rotating the laser detection light source 2, the light receiving plate 3 and the light receiver 4 together in a plane perpendicular to the optical element 1 by a certain angle alpha to enable the detection light to pass through the optical element 1 and irradiate the light receiving plate 3, and measuring to obtain the time T for the detection light to reach the light receiving plate 3 2 ；
S7, setting the thickness of the detection part of the optical element 1 to be uniform and the value of h; the speed of the detection light in the optical element 1 is V 1 The speed of the light in air is detected as c, according to the following equation:
can be solved, V 1 And h, thereby giving the thickness of the optical element 1.
In step S1, the side surface of the optical element is fixed, so as to avoid contact damage to the surface of the element; in step S6, the laser detection light source 2, the light receiving plate 3 and the light receiver 4 are mounted on the same device, and the middle of the light receiving plate 3 is perforated, and the light receiver 4 is mounted in the hole, so that the vertical distances from the laser detection light source 2 to the light receiving plate 3 and the light receiver 4 are equal.
Preferably, the light receiving plate 3 is made of a semiconductor material, which has high sensitivity and can ensure measurement accuracy.
Preferably, the laser detection light source 2 is a pulse laser or a femtosecond laser, the receiving area of the light receiver 4 is smaller than or equal to the sectional area of the laser beam, and the smaller the area is, the more accurate the value measurement of the angle alpha is.
Preferably, the light receiver 4 is made of a photodiode to reduce measurement errors.
As shown in fig. 2-4, an optical element thickness detecting device for use in an optical element thickness detecting method includes an elastic clamp 11 for fixing an optical element 1, a steering shaft 12 is fixedly connected to the elastic clamp 11 vertically, a steering motor 13 is disposed at the other end of the steering shaft 12, a concave detecting port 14 is fixedly connected to a side wall of the steering motor 13, the detecting port 14 includes an upper jaw 141 and a lower jaw 142, a laser detecting light source 2 is disposed in the middle of the upper jaw 141, a light receiving plate 3 is disposed on the lower jaw 142, a light receiver 4 is disposed right below the laser detecting light source 2, and a distance from the light receiver 4 to the laser detecting light source 2 is equal to a distance from the light receiving plate 3 to the laser detecting light source 2.
Further, a motor shaft of the steering motor 13 is fixedly connected with the steering shaft 12, an opening direction of the detection port 14 is the same as a clamping port direction of the elastic clamp 11, the optical element 1 is positioned between the upper jaw surface 141 and the lower jaw surface 142, a light receiving surface of the light receiving plate 3 is a horizontal plane, an irradiation direction of the laser detection light source 2 is perpendicular to the light receiving plate 3, and the light receiving plate 3 is made of a light sensing material.
When the scheme is implemented, the elastic clamp 11 is used for clamping the edge of the optical element 1, then the laser detection light source 2 is started, the steering motor 13 is started, the light ray for starting the laser detection light source 2 is vertical to the optical element 1, and then the time for the detection light ray to be emitted from the laser detection light source 2 and received by the light receiver 4 is recorded as T 1 Then the detection port 14 is turned by a certain angle alpha through the turning motor 13, and the detection light emitted from the laser detection light source 2 to the feltThe time taken for receiving the plate 3 is T 2 Finally, the thickness of the optical element 1 can be calculated according to the formula.
As shown in fig. 2 to 3, it is preferable that the other end of the motor shaft of the steering motor 13 is mounted with an angle sensor 5, so that the steering angle is conveniently measured.
Preferably, the upper jaw face 141 and the lower jaw face 142 are parallel to each other, which facilitates the processing and installation of the components.
Preferably, the elastic clamp 11 is a clamp type clamp to simplify the clamping operation.
Preferably, the contact surface of the elastic clamp 11 and the optical element 1 is provided with a soft and clean diaphragm, so that abrasion of the elastic clamp 11 on the surface of the optical element 1 can be avoided.
The invention is suitable for measuring the thickness of the polished optical element, the surface quality requirement of the polished optical element is extremely high, and the surface of the element is contacted by the hard material when the traditional scale measuring tools such as vernier calipers, screw micrometers, three-coordinate detectors and the like are used for measuring, so that the optical element is damaged; the thickness gauge for the optical element utilizes the influence of the thickness of the element on the refraction of measuring light, combines the feedback results of one-time calibration light and one-time measuring light, calculates the thickness of the element, has accurate measurement results for transparent optical elements with any refractive index and any material, and simultaneously does not have any influence on the surface of the element by a non-contact measurement method, thereby solving the problem of thickness measurement of the optical element in the past.
In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "front", "rear", "inner", "outer", "top", "bottom", "transverse", "vertical", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (10)
1. An optical element thickness detection method is characterized in that: the method comprises the following steps:
s1, fixing a planar optical element (1);
s2, arranging a laser detection light source (2) above the optical element (1), wherein the light irradiation direction of the laser detection light source (2) can rotate in a plane perpendicular to the optical element (1);
s3, placing a light-sensitive receiving plate (3) made of light-sensitive materials below the optical element (1), wherein the light-sensitive receiving surface of the light-sensitive receiving plate (3) is a horizontal plane, and ensuring that the light irradiation direction of the laser detection light source (2) is always perpendicular to the light-sensitive receiving surface of the light-sensitive receiving plate (3), and the relative position of the laser detection light source (2) and the light-sensitive receiving plate (3) is fixed and the distance is L;
s4, arranging a light receiver (4) under the laser detection light source (2), wherein the relative position of the light receiver (4) and the laser detection light source (2) is fixed, and the distance is L;
s5, aligning the light irradiation direction of the laser detection light source (2) with the light receiver (4), and recording the time for the detection light to pass through the light sensing element and reach the light receiver (4) as T 1 ；
S6, rotating the laser detection light source (2), the light sensing receiving plate (3) and the light receiver (4) together in a plane perpendicular to the optical element (1) by a certain angle alpha to enable the detection light to pass through the optical element (1) and irradiate the light sensing receiving plate (3), and measuring to obtain the time for the detection light to reach the light sensing receiving plate (3) to be T 2 ；
S7, setting the thickness of the detection part of the optical element (1) to be uniform and the value of h; detecting the velocity of light in the optical element (1) as V 1 The speed of the light in air is detected as c, according to the following equation:
can be solved, V 1 And h, thereby yielding the thickness of the optical element (1).
2. The method for detecting the thickness of an optical element according to claim 1, wherein: the light receiving plate (3) is made of a semiconductor material.
3. The method for detecting the thickness of an optical element according to claim 1, wherein: the laser detection light source (2) is a pulse laser or a femtosecond laser, and the receiving area of the light receiver (4) is smaller than or equal to the sectional area of the laser beam.
4. The method for detecting the thickness of an optical element according to claim 1, wherein: the light receiver (4) is made of a photodiode.
5. An optical element thickness detection apparatus for use in an optical element thickness detection method according to any one of claims 1 to 4, wherein: including elastic fixture (11) that fixed optical element (1) was used, perpendicular fixedly connected with steering spindle (12) on elastic fixture (11), the other end of steering spindle (12) is equipped with steering motor (13), the lateral wall fixedly connected with concave detection mouth (14) of steering motor (13), detection mouth (14) are including jaw face (141) and jaw face (142), the middle part of jaw face (141) is equipped with laser detection light source (2), jaw face (142) are equipped with light sense receiving plate (3), the below of laser detection light source (2) is equipped with optical receiver (4) to the department just, the distance of optical receiver (4) to laser detection light source (2) equals with the distance of light sense receiving plate (3) to laser detection light source (2).
6. An optical element thickness detection apparatus according to claim 5, wherein: the motor shaft of the steering motor (13) is fixedly connected with the steering shaft (12), the opening direction of the detection port (14) is the same as the clamping port direction of the elastic clamp (11), the optical element (1) is positioned between the upper jaw surface (141) and the lower jaw surface (142), the light receiving surface of the light receiving plate (3) is a horizontal plane, the irradiation direction of the laser detection light source (2) is perpendicular to the light receiving plate (3), and the light receiving plate (3) is made of a light sensing material.
7. An optical element thickness detection apparatus according to claim 5, wherein: the other end of the motor shaft of the steering motor (13) is provided with an angle sensor (5).
8. An optical element thickness detection apparatus according to claim 5, wherein: the upper jaw surface (141) and the lower jaw surface (142) are parallel to each other.
9. An optical element thickness detection apparatus according to claim 5, wherein: the elastic clamp (11) is a clamp type clamp.
10. An optical element thickness detection apparatus according to claim 5, wherein: a soft clean diaphragm is arranged on the contact surface of the elastic clamp (11) and the optical element (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310858224.5A CN116858105A (en) | 2023-07-13 | 2023-07-13 | Optical element thickness detection method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310858224.5A CN116858105A (en) | 2023-07-13 | 2023-07-13 | Optical element thickness detection method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116858105A true CN116858105A (en) | 2023-10-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310858224.5A Pending CN116858105A (en) | 2023-07-13 | 2023-07-13 | Optical element thickness detection method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116858105A (en) |
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2023
- 2023-07-13 CN CN202310858224.5A patent/CN116858105A/en active Pending
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