CN116858097A - Non-contact dimension measuring assembly, device and method - Google Patents
Non-contact dimension measuring assembly, device and method Download PDFInfo
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- CN116858097A CN116858097A CN202310965654.7A CN202310965654A CN116858097A CN 116858097 A CN116858097 A CN 116858097A CN 202310965654 A CN202310965654 A CN 202310965654A CN 116858097 A CN116858097 A CN 116858097A
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- 238000000034 method Methods 0.000 title claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims abstract description 53
- 238000005259 measurement Methods 0.000 claims abstract description 37
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000012360 testing method Methods 0.000 claims description 20
- 230000007246 mechanism Effects 0.000 claims description 4
- 230000000712 assembly Effects 0.000 claims description 3
- 238000000429 assembly Methods 0.000 claims description 3
- 238000000691 measurement method Methods 0.000 claims 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 17
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a non-contact dimension measuring component, a non-contact dimension measuring device and a non-contact dimension measuring method, wherein the component comprises the following components: the light source comprises a controller, a light emitter, a first adjusting element, a collimating element and a light receiver which are sequentially arranged along the light transmission direction; the original light spot formed by the collimated parallel light beam is larger than the maximum size of the element to be tested; the surface to be measured of the element to be measured is perpendicular to the transmission direction of the collimated parallel light beam, and the element to be measured is a non-light-transmitting element; the controller is respectively and electrically connected with the light emitter, the light receiver and the first adjusting element, and is used for calculating the size of the surface to be measured of the element to be measured based on the original scanning time corresponding to the original light spot, the current scanning time corresponding to the current light spot of the collimated parallel light beam received by the light receiver and the original light spot size during measurement; or the method is also used for calculating the size of the surface to be measured of the element to be measured based on the current light spot brightness boundary coordinates. Therefore, by carrying out non-contact measurement on the element to be measured, contact damage of the element to be measured can be avoided.
Description
Technical Field
The present invention relates to the field of optical measurement technology, and in particular, to a non-contact dimension measurement assembly, apparatus and method.
Background
With the development of technology, in the field of electronic production, it is required to measure dimensions, such as thickness, height, length or width, etc., of components to assemble or check whether the production is acceptable.
The conventional detection method is generally a contact type measurement, for example, a vernier caliper is used for measuring, which causes problems, for example, the clamping fixture needs to take time, and the clamping end may damage the surface of the part, thereby causing inconvenience to measurement.
Disclosure of Invention
The invention provides a non-contact dimension measuring assembly, which is used for realizing optical measurement of parts, does not need to contact the parts, and can avoid contact damage to the parts.
To achieve the above object, an embodiment of an aspect of the present invention provides a non-contact dimension measuring assembly, including: the optical transmitter, the first adjusting element, the collimating element, the optical receiver and the controller;
the light emitter is used for emitting a first light beam, and the first light beam is a point light source or a linear light source;
the first adjusting element is positioned in the transmission direction of the first light beam, and is used for continuously adjusting the incident angle of the first light beam incident on the first adjusting element and continuously reflecting the first light beam to form a scanning light beam;
the collimating element is positioned in the transmission direction of the scanning light beam and is used for collimating the scanning light beam to form a collimated parallel light beam; the device to be measured is positioned in the transmission direction of the collimated parallel light beam, the light receiver is positioned in the transmission direction of the collimated parallel light beam, and the light receiver is positioned at one side of the device to be measured, which is far away from the collimated element;
the original light spot formed by the collimated parallel light beam is larger than the maximum size of the element to be tested; the surface to be measured of the element to be measured is perpendicular to the transmission direction of the collimated parallel light beam, and the element to be measured is a non-light-transmitting element;
the controller is electrically connected with the light emitter, the light receiver and the first adjusting element respectively, and is used for calculating the size of the surface to be measured of the element to be measured based on the original scanning time corresponding to the original light spot, the current scanning time corresponding to the current light spot of the collimated parallel light beam received by the light receiver and the original light spot size during measurement;
or the method is also used for calculating the size of the surface to be measured of the element to be measured based on the current light spot brightness boundary coordinates.
Optionally, the non-contact dimension measuring assembly further comprises: the second adjusting element is positioned between the first adjusting element and the collimating element and is used for reflecting the scanning light beam so as to adjust the transmission direction of the scanning light beam and transmit the scanning light beam to the collimating element.
Optionally, the non-contact dimension measuring assembly further comprises: the beam expanding element is positioned in the transmission direction of the collimated parallel light beam and is used for expanding the collimated parallel light beam to form an expanded light beam, the element to be detected is positioned in the transmission direction of the expanded light beam, the light receiver is positioned in the transmission direction of the expanded light beam, and the light receiver is positioned at one side, far away from the expanded light beam, of the element to be detected;
wherein, the original light spot formed by the beam expansion beam is larger than the maximum size of the element to be measured; the surface to be measured of the element to be measured is perpendicular to the transmission direction of the beam expanding beam.
Optionally, the light emitter is a laser.
Optionally, the first adjusting element is one of a rotating polygon, a rotating mirror, and a galvanometer.
Optionally, the second adjustment element is a mirror.
Optionally, the collimating element is a cylindrical mirror or a spherical mirror.
Optionally, the non-contact dimension measuring assembly further comprises: and the device under test rotating mechanism is used for rotating the device under test so that the non-contact dimension measuring assembly measures the dimensions of a plurality of sides of the device under test.
Optionally, the size of the surface to be measured of the element to be measured is the ratio of the current scanning time corresponding to the current light spot of the collimated parallel light beam received by the light receiver to the original scanning time corresponding to the original light spot, multiplied by the size of the original light spot.
To achieve the above object, another embodiment of the present invention provides a non-contact dimension measuring device, which includes at least two sets of non-contact dimension measuring assemblies according to any of the embodiments of the present invention;
the collimated parallel beams of each non-contact dimensional measurement assembly correspond to different surfaces of the device under test.
In order to achieve the above object, an embodiment of the present invention provides a non-contact dimension measuring method, which is implemented based on the non-contact dimension measuring assembly according to any one of the embodiments of the present invention, or implemented based on the non-contact dimension measuring device according to the embodiment of the present invention, including the following steps:
acquiring an original scanning time corresponding to the original light spot, the size of the original light spot and a current scanning time corresponding to a current light spot of the collimated parallel light beam received by the light receiver;
calculating the ratio of the current scanning time corresponding to the current light spot to the original scanning time corresponding to the original light spot, multiplying the ratio by the size of the original light spot, and taking the multiplied ratio as the size of the surface to be measured of the element to be measured;
or, acquiring the current light spot brightness boundary coordinates, and calculating the size of the surface to be measured of the element to be measured based on the current light spot brightness boundary coordinates.
According to an embodiment of the present invention, a non-contact dimension measuring assembly includes: the optical transmitter, the first adjusting element, the collimating element, the optical receiver and the controller; the light emitter is used for emitting a first light beam, and the first light beam is a point light source or a linear light source; the first adjusting element is positioned in the transmission direction of the first light beam, and is used for continuously adjusting the incident angle of the first light beam incident on the first adjusting element and continuously reflecting the first light beam to form a scanning light beam; the collimating element is positioned in the transmission direction of the scanning beam and is used for collimating the scanning beam to form a collimated parallel beam; the device to be measured is positioned in the transmission direction of the collimated parallel light beam, the light receiver is positioned in the transmission direction of the collimated parallel light beam, and the light receiver is positioned at one side of the device to be measured, which is far away from the collimating device; the original light spot formed by the collimated parallel light beam is larger than the maximum size of the element to be tested; the surface to be measured of the element to be measured is perpendicular to the transmission direction of the collimated parallel light beam, and the element to be measured is a non-light-transmitting element; the controller is respectively and electrically connected with the light emitter, the light receiver and the first adjusting element, and is used for calculating the size of the surface to be measured of the element to be measured based on the original scanning time corresponding to the original light spot, the current scanning time corresponding to the current light spot of the collimated parallel light beam received by the light receiver and the original light spot size during measurement; or the method is also used for calculating the size of the surface to be measured of the element to be measured based on the current light spot brightness boundary coordinates. Therefore, by carrying out non-contact measurement on the element to be measured, contact damage of the element to be measured can be avoided.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the invention or to delineate the scope of the invention. Other features of the present invention will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a non-contact dimension measuring assembly according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a non-contact dimensional measurement assembly according to one embodiment of the present invention;
FIG. 3 is a schematic view of a non-contact dimensional measurement assembly according to yet another embodiment of the present invention;
fig. 4 is a schematic structural diagram of a non-contact dimension measuring device according to an embodiment of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 is a schematic structural diagram of a non-contact dimension measuring assembly according to an embodiment of the present invention. As shown in fig. 1, the noncontact dimensional measuring assembly 100 includes: an optical transmitter 101, a first adjustment element 102, a collimation element 103, an optical receiver 104 and a controller 105;
the light emitter 101 is configured to emit a first light beam 400, where the first light beam 400 is a point light source or a line light source;
the first adjusting element 102 is located in the transmission direction of the first light beam 400, and is used for continuously adjusting the incident angle of the first light beam 400 incident on the first adjusting element 102, and continuously reflecting the first light beam 400 to form the scanning light beam 200;
the collimating element 103 is located in the transmission direction of the scanning beam 200, and is used for collimating the scanning beam 200 to form a collimated parallel beam 500; the element 300 to be measured is located in the transmission direction of the collimated parallel light beam 500, the light receiver 104 is located in the transmission direction of the collimated parallel light beam 500, and the light receiver 104 is located at a side of the element 300 to be measured away from the collimating element 103;
wherein, the original light spot formed by the collimated parallel light beam 500 is larger than the maximum size of the element 300 to be measured; the surface to be measured of the element 300 to be measured is perpendicular to the transmission direction of the collimated parallel beam 500, and the element 300 to be measured is a non-light-transmitting element;
the controller 105 is electrically connected with the light emitter 101, the light receiver 104 and the first adjusting element 102, and during measurement, the controller 105 is used for calculating the size of the surface to be measured of the element 300 to be measured based on the original scanning time corresponding to the original light spot, the current scanning time corresponding to the current light spot of the collimated parallel light beam 500 received by the light receiver 104 and the original light spot size;
or, the method is also used for calculating the size of the surface to be measured of the element 300 to be measured based on the current light spot brightness boundary coordinates.
It is appreciated that for ease of description, the exemplary device 300 may be a rectangular parallelepiped device. When the width of the x-direction of the element 300 to be measured needs to be measured, the xz plane or the xy plane of the element 300 to be measured may be oriented toward the transmission direction of the collimated parallel light beam 500, and the controller 105 may control the first adjusting element 102 to adjust the reflection direction of the first light beam 400, for example, the reflection direction of the first light beam 400 changes negatively along the x-direction. For example, as shown in fig. 1, initially, the controller 105 may control the first adjusting element 102 to be at the a position, the first light beam 400 to be reflected to form the first reflected light beam 201, then control the first adjusting element 102 to be at the b position, the first light beam 400 to be reflected to form the second reflected light beam 202, and similarly, control the first adjusting element 102 to be at the c position, the first light beam 400 to be reflected to form the third reflected light beam 203, and further, the first reflected light beam 201, the second reflected light beam 202, and the third reflected light beam 203 may be scanned along the x negative direction. The above is merely an example, and there may be many reflected beams between the first reflected beam 201 and the third reflected beam 203, so that the reflected beams may scan in the x-direction of the xz plane or the xy plane of the element 300 to be tested in the x-direction after being collimated by the collimating element 103, forming the scanning beam 200.
Then, the part of the collimated parallel beam 500 irradiated to the surface to be measured of the device 300 to be measured is reflected by the device 300 to be measured, and cannot be received by the light receiver 104, and the rest of the collimated parallel beam 500 is received by the light receiver 104. Further, the length of the surface to be measured of the element 300 to be measured in the x direction can be calculated by:
first, the size of the surface to be measured of the element 300 to be measured is calculated based on the original scanning time corresponding to the original light spot, the current scanning time corresponding to the current light spot of the collimated parallel light beam 500 received by the light receiver 104, and the original light spot size. Optionally, the size of the surface to be measured of the element to be measured is the ratio of the current scanning time corresponding to the current light spot of the collimated parallel light beam received by the light receiver to the original scanning time corresponding to the original light spot, multiplied by the size of the original light spot.
The original light spot is a light spot formed by the first to third reflected light beams 201 to 203 at the light receiver 104 under the same conditions without the element 300 to be measured placed. The original scan time may be obtained by how many spots the optical receiver 104 receives, and controlling the time interval of the first adjustment element 102 to vary in conjunction with the controller 105, e.g., time interval tms, and the original scan time t0 may be t (n-1) ms when the optical receiver 104 receives n spots. Alternatively, the original scan time t0 may also be obtained by controlling an encoder of a rotating motor that rotates the first adjustment member 102, obtaining a rotation angle of the motor from the first reflected light 201 to the third reflected light beam 203, and a rotation speed of the motor.
The front scanning spot is the spot formed by the first 201 to third 203 reflected light beams at the light receiver 104 when the device 300 under test is located in the collimated parallel light beam 500. Since a portion of the light is blocked by the device under test 300, only a portion of the light is received at the light receiver 104. The scanning time of the current scanning spot may be obtained by how many spots are received by the light receiver 104, and controlling the time interval of the first adjustment element 102 to change by combining with the controller 105, for example, the time interval is tms, and the scanning time t1 corresponding to the current spot may be t (m-2) ms when the light receiver 104 receives m spots. In addition, the current scanning time may also be obtained by controlling the encoder of the rotating motor that rotates the first adjustment element 102, obtaining the motor rotation angle from the edge-blocked light beam to the other edge-blocked light beam of the element 300 to be measured, and the rotation speed of the motor to obtain the current scanning time t1.
Finally, the dimension of the surface to be measured of the device 300 to be measured is the ratio of the current scan time t1 to the original scan time t0, and is multiplied by the original spot size. The original light spot size is the product of the motor rotation speed and the original scanning time. Alternatively, the original spot size may be directly calculated from the pixel size of the photoreceiver 104.
Alternatively, the size of the surface to be measured of the device 300 to be measured may be calculated directly from the brightness boundary coordinates (such as the size of the pixel) of the current light spot received by the light receiver 104.
In the above-described embodiment, the light emitter 101 may be a laser. If the first light beam 400 is a point light source, the x-direction dimension of the xz plane of the device 300 to be measured can be obtained, and if the first light beam 400 is a line light source, the x-direction dimension of the xz plane of the device 300 to be measured can be obtained, and the z-direction dimension of the xz plane of the device 300 to be measured can be obtained. The laser emitted by the laser has good collimation, which is beneficial to the sharpness of the final facula, and further is beneficial to the calculation of the size of the surface to be measured.
In other embodiments, the device 300 may be regular or irregular, and the surface to be measured of the device 300 is only required to be perpendicular to the collimated parallel beam 500.
Alternatively, the first adjustment element 102 may be one of a rotating polygon, a rotating mirror, a vibrating mirror. The optical device can change the incident angle of incident light when working, so that the reflection angles of the reflected light corresponding to the incident light are different, and a scanning light beam is formed. The first adjustment element 102 may also be other optical devices in the optical field capable of changing the angle of incidence of the incident light. The present invention is not particularly limited. The collimating element 103 is a cylindrical mirror or a spherical mirror to collimate the incident light. The collimating element 103 may be a reflective or transmissive collimating element.
Alternatively, fig. 2 is a schematic structural view of a non-contact dimension measuring assembly according to an embodiment of the present invention. As shown in fig. 2, the noncontact dimensional measurement assembly 100 further includes: the second adjusting element 106 is located between the first adjusting element 102 and the collimating element 103, and is used for reflecting the scanning beam 200 to adjust the transmission direction of the scanning beam 200 and transmitting the scanning beam 200 to the collimating element 103.
The second adjusting element 106 may be a reflecting mirror, and the collimating element 103 may be a cylindrical mirror or a spherical mirror. In this way, by the arrangement of the second adjustment element 106, the transmission direction of the scanning beam 200 can be changed, thereby changing the design of the optical path so that the optical path is more compact. In other embodiments, the number of mirrors used may be determined according to the actual space requirement, so that the optical path meets the actual space requirement.
Optionally, fig. 3 is a schematic structural diagram of a non-contact dimension measuring assembly according to another embodiment of the present invention. As shown in fig. 3, the noncontact dimensional measurement assembly 100 further includes: a beam expander 107, the beam expander 107 is located in the transmission direction of the collimated parallel beam 500, and is used for expanding the collimated parallel beam 500 to form an expanded beam 600, the element 300 to be measured is located in the transmission direction of the expanded beam 600, the light receiver 104 is located in the transmission direction of the expanded beam 600, and the light receiver 104 is located at a side of the element 300 to be measured away from the beam expander 107;
wherein, the original light spot formed by the beam expansion beam 600 is larger than the maximum size of the element 300 to be tested; the surface to be measured of the device 300 to be measured is perpendicular to the transmission direction of the expanded beam 600.
By the arrangement of the beam expanding element 107 in the above embodiment, the scanning range of the scanning beam 500 can be enlarged, and further, the measurement can be performed on the element 300 to be measured with a larger size.
Optionally, the non-contact dimension measuring assembly further comprises: and the device to be measured rotating mechanism is used for rotating the device to be measured so that the non-contact dimension measuring assembly measures the dimensions of a plurality of sides of the device to be measured.
It will be appreciated that the device under test rotation mechanism may include a base and a rotating motor, and the rotating motor is connected to the base through a rotation shaft, so that the device under test 300 may be rotated such that the measuring assembly 100 may measure each side of the device under test 300. When it is desired to measure the upper and lower bottom surfaces, the position of the device 300 to be measured can be manually adjusted. The size of the base may be smaller than or equal to the size of the device 300 to be tested.
Thereby, measurement of the respective surfaces to be measured of the element 300 to be measured is achieved.
Fig. 4 is a schematic structural diagram of a non-contact dimension measuring device according to an embodiment of the present invention. As shown in fig. 4, the measuring device includes at least two sets of non-contact dimensional measuring assemblies 100 according to any of the embodiments of the present invention;
the collimated parallel beams of each non-contact dimensional measurement assembly 100 correspond to different surfaces of the device 300 under test.
As shown in fig. 4, the noncontact dimensional measuring device includes: comprising the following steps: a first light emitter 1011, a second light emitter 1012, a first adjustment element 1021, a second first adjustment element 1022, a first collimating element 1031, a second collimating element 1032, a first light receiver 1041, and a second light receiver 1042, and a controller 105;
the first light emitter 1011 is configured to emit a first light beam 4001, where the first light beam 4001 is a point light source or a line light source; the first adjusting element 1021 is located in the transmission direction of the first light beam 4001, and is used for continuously adjusting the incident angle of the first light beam 4001 incident on the first adjusting element 1021, and continuously reflecting the first light beam 4001 to form a first scanning light beam 2001; the first collimating element 1031 is located in the transmission direction of the first scanning beam 2001 and is used for collimating the first scanning beam 2001 to form a first collimated parallel beam 5001; the device 300 under test is located in the transmission direction of the first collimated light beam 5001, the first light receiver 1041 is located in the transmission direction of the first collimated light beam 5001, and the first light receiver 1041 is located at a side of the device 300 under test away from the first collimated light beam 1031; wherein, the original light spot formed by the first collimated parallel beam 5001 is larger than the maximum size of the element 300 to be measured itself; the surface to be measured of the element 300 to be measured is perpendicular to the transmission direction of the collimated parallel beam 500, and the element 300 to be measured is a non-light-transmitting element;
the second light emitter 1012 is configured to emit a second first light beam 4002, where the second first light beam 4002 is a point light source or a line light source; the second first adjusting element 1022 is located in the transmission direction of the second first light beam 4002, and is used for continuously adjusting the incident angle of the second first light beam 4002 incident on the second first adjusting element 1022, and continuously reflecting the second first light beam 4002 to form a second scanning light beam 2002; the second collimating element 1032 is positioned in the transmission direction of the second scanning beam 2002 and is configured to collimate the second scanning beam 2002 to form a second collimated parallel beam 5002; the device 300 under test is located in the transmission direction of the second collimated parallel beam 5002, the second light receiver 1042 is located in the transmission direction of the second collimated parallel beam 5002, and the second light receiver 1042 is located at a side of the device 300 under test away from the second collimating element 1032; wherein the original light spot formed by the second collimated parallel beam 5002 is larger than the maximum size of the element 300 to be measured itself;
the controller 105 is electrically connected to the first light emitter 1011, the second light emitter 1012, the first adjusting element 1021, the second first adjusting element 1022, the first light receiver 1041, and the second light receiver 1042, respectively, and during measurement, the controller 105 is configured to calculate a size of a surface to be measured of the element 300 to be measured based on an original scanning time corresponding to an original light spot, a current scanning time corresponding to a current light spot of the collimated parallel light beam 500 received by the light receiver, and an original light spot size;
or, the method is also used for calculating the size of the surface to be measured of the element 300 to be measured based on the current light spot brightness boundary coordinates.
The principle of each component is the same as that of the method for calculating the dimension of the surface to be measured of the element 300 to be measured by using a single component, and reference is made to the above embodiment, and details thereof will not be repeated here.
In other embodiments, the measuring device may also include another non-contact dimensional measurement assembly 100 (not shown) that collimates the parallel light beam along the z-direction, if desired.
The embodiment of the invention also provides a non-contact dimension measuring method, which is realized based on the non-contact dimension measuring assembly according to any one of the embodiments of the invention or based on the non-contact dimension measuring device according to the embodiment of the invention, and comprises the following steps:
acquiring original scanning time corresponding to an original light spot, the size of the original light spot and current scanning time corresponding to a current light spot of a collimated parallel light beam received by a light receiver;
calculating the ratio of the current scanning time corresponding to the current light spot to the original scanning time corresponding to the original light spot, multiplying the ratio by the size of the original light spot, and taking the multiplied ratio as the size of the surface to be measured of the element to be measured;
or acquiring the current light spot brightness boundary coordinates, and calculating the size of the surface to be measured of the element to be measured based on the current light spot brightness boundary coordinates.
It should be noted that, with continued reference to fig. 1, the original light spot is a light spot formed by the first reflected light 201 to the third reflected light beam 203 at the light receiver 104 under the same condition without the device 300 to be tested. The original scan time may be obtained by how many spots the optical receiver 104 receives, and controlling the time interval of the first adjustment element 102 to vary in conjunction with the controller 105, e.g., time interval tms, and the original scan time t0 may be t (n-1) ms when the optical receiver 104 receives n spots. Alternatively, the original scan time t0 may also be obtained by controlling an encoder of a rotating motor that rotates the first adjustment member 102, obtaining a rotation angle of the motor from the first reflected light 201 to the third reflected light beam 203, and a rotation speed of the motor.
The front scanning spot is the spot formed by the first 201 to third 203 reflected light beams at the light receiver 104 when the device 300 under test is located in the collimated parallel light beam 500. Since a portion of the light is blocked by the device under test 300, only a portion of the light is received at the light receiver 104. The scanning time of the current scanning spot may be obtained by how many spots are received by the light receiver 104, and controlling the time interval of the first adjustment element 102 to change by combining with the controller 105, for example, the time interval is tms, and the scanning time t1 corresponding to the current spot may be t (m-2) ms when the light receiver 104 receives m spots. In addition, the current scanning time may also be obtained by controlling the encoder of the rotating motor that rotates the first adjustment element 102, obtaining the motor rotation angle from the edge-blocked light beam to the other edge-blocked light beam of the element 300 to be measured, and the rotation speed of the motor to obtain the current scanning time t1.
Finally, the dimension of the surface to be measured of the device 300 to be measured is the ratio of the current scan time t1 to the original scan time t0, and is multiplied by the original spot size. The original light spot size is the product of the motor rotation speed and the original scanning time. Alternatively, the original spot size may be directly calculated from the pixel size of the photoreceiver 104.
In another mode, the current light spot brightness boundary coordinate can be obtained, and the size of the surface to be measured of the element to be measured is calculated based on the current light spot brightness boundary coordinate.
In summary, according to the non-contact dimension measuring assembly, device and method provided in the embodiments of the present invention, the assembly includes: the optical transmitter, the first adjusting element, the collimating element, the optical receiver and the controller; the light emitter is used for emitting a first light beam, and the first light beam is a point light source or a linear light source; the first adjusting element is positioned in the transmission direction of the first light beam, and is used for continuously adjusting the incident angle of the first light beam incident on the first adjusting element and continuously reflecting the first light beam to form a scanning light beam; the collimating element is positioned in the transmission direction of the scanning beam and is used for collimating the scanning beam to form a collimated parallel beam; the device to be measured is positioned in the transmission direction of the collimated parallel light beam, the light receiver is positioned in the transmission direction of the collimated parallel light beam, and the light receiver is positioned at one side of the device to be measured, which is far away from the collimating device; the original light spot formed by the collimated parallel light beam is larger than the maximum size of the element to be tested; the surface to be measured of the element to be measured is perpendicular to the transmission direction of the collimated parallel light beam, and the element to be measured is a non-light-transmitting element; the controller is respectively and electrically connected with the light emitter, the light receiver and the first adjusting element, and is used for calculating the size of the surface to be measured of the element to be measured based on the original scanning time corresponding to the original light spot, the current scanning time corresponding to the current light spot of the collimated parallel light beam received by the light receiver and the original light spot size during measurement; or the method is also used for calculating the size of the surface to be measured of the element to be measured based on the current light spot brightness boundary coordinates. Therefore, by carrying out non-contact measurement on the element to be measured, contact damage of the element to be measured can be avoided.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (10)
1. A non-contact dimensional measurement assembly, comprising: the optical transmitter, the first adjusting element, the collimating element, the optical receiver and the controller;
the light emitter is used for emitting a first light beam, and the first light beam is a point light source or a linear light source;
the first adjusting element is positioned in the transmission direction of the first light beam, and is used for continuously adjusting the incident angle of the first light beam incident on the first adjusting element and continuously reflecting the first light beam to form a scanning light beam;
the collimating element is positioned in the transmission direction of the scanning light beam and is used for collimating the scanning light beam to form a collimated parallel light beam; the device to be measured is positioned in the transmission direction of the collimated parallel light beam, the light receiver is positioned in the transmission direction of the collimated parallel light beam, and the light receiver is positioned at one side of the device to be measured, which is far away from the collimated element;
the original light spot formed by the collimated parallel light beam is larger than the maximum size of the element to be tested; the surface to be measured of the element to be measured is perpendicular to the transmission direction of the collimated parallel light beam, and the element to be measured is a non-light-transmitting element;
the controller is electrically connected with the light emitter, the light receiver and the first adjusting element respectively, and is used for calculating the size of the surface to be measured of the element to be measured based on the original scanning time corresponding to the original light spot, the current scanning time corresponding to the current light spot of the collimated parallel light beam received by the light receiver and the original light spot size during measurement;
or the method is also used for calculating the size of the surface to be measured of the element to be measured based on the current light spot brightness boundary coordinates.
2. The non-contact dimensional measurement assembly of claim 1, further comprising: the second adjusting element is positioned between the first adjusting element and the collimating element and is used for reflecting the scanning light beam so as to adjust the transmission direction of the scanning light beam and transmit the scanning light beam to the collimating element.
3. The non-contact dimensional measurement assembly of claim 1, further comprising: the beam expanding element is positioned in the transmission direction of the collimated parallel light beam and is used for expanding the collimated parallel light beam to form an expanded light beam, the element to be detected is positioned in the transmission direction of the expanded light beam, the light receiver is positioned in the transmission direction of the expanded light beam, and the light receiver is positioned at one side, far away from the expanded light beam, of the element to be detected;
wherein, the original light spot formed by the beam expansion beam is larger than the maximum size of the element to be measured; the surface to be measured of the element to be measured is perpendicular to the transmission direction of the beam expanding beam.
4. The non-contact dimensional measurement assembly of claim 1, wherein the first adjustment element is one of a rotating polygon, a rotating mirror, and a vibrating mirror.
5. The non-contact dimensional measurement assembly of claim 2, wherein the second adjustment element is a mirror.
6. The non-contact dimensional measurement assembly of claim 1, wherein the collimating element is a cylindrical mirror or a spherical mirror.
7. The non-contact dimensional measurement assembly of claim 1, further comprising: and the device under test rotating mechanism is used for rotating the device under test so that the non-contact dimension measuring assembly measures the dimensions of a plurality of sides of the device under test.
8. The non-contact dimension measurement assembly of claim 1, wherein the dimension of the surface to be measured of the element to be measured is the ratio of the current scan time corresponding to the current spot of the collimated parallel beam received by the light receiver to the original scan time corresponding to the original spot multiplied by the dimension of the original spot.
9. A non-contact dimensional measurement device comprising at least two sets of non-contact dimensional measurement assemblies according to any one of claims 1-8;
the collimated parallel beams of each non-contact dimensional measurement assembly correspond to different surfaces of the device under test.
10. A non-contact dimensional measurement method, realized on the basis of a non-contact dimensional measurement assembly according to any one of claims 1-8 or on the basis of a non-contact dimensional measurement device according to claim 9, comprising the steps of:
acquiring an original scanning time corresponding to the original light spot, the size of the original light spot and a current scanning time corresponding to a current light spot of the collimated parallel light beam received by the light receiver;
calculating the ratio of the current scanning time corresponding to the current light spot to the original scanning time corresponding to the original light spot, multiplying the ratio by the size of the original light spot, and taking the multiplied ratio as the size of the surface to be measured of the element to be measured;
or, acquiring the current light spot brightness boundary coordinates, and calculating the size of the surface to be measured of the element to be measured based on the current light spot brightness boundary coordinates.
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