CN116840993A - Device for assembling deformable mirror and deformable mirror assembling method - Google Patents

Abstract

The present disclosure provides an apparatus for assembling a deformable mirror for high precision assembly of a deformable mirror driver large array with a deformable mirror face, comprising: a base; the air bearing is arranged on the base and used for supporting the deformable mirror surface and providing a reference plane for the deformable mirror surface; wherein, a plurality of glue points are arranged on the mirror surface of the deformable mirror, and each glue point is provided with elastic glue; the positioning ring is sleeved on the outer side of the air bearing; the displacement table is positioned on the positioning ring and is detachably connected with the positioning ring; the driver supporting seat is arranged in the displacement table and used for supporting the driver array; the driver array is vertically downwards or upwards moved by adjusting the displacement table, so that the bonding ends of the driver array are in one-to-one butt joint with the plurality of glue points, and the assembly of the driver supporting seat, the driver array and the deformable mirror surface is completed. The present disclosure also provides a method of assembling a deformable mirror.

Description

Device for assembling deformable mirror and deformable mirror assembling method

Technical Field

The disclosure relates to the technical field of deformable mirror assembly, in particular to a device for assembling a deformable mirror and a deformable mirror assembly method.

Background

In order to overcome dynamic effects such as atmospheric disturbance and the like and obtain resolution close to the diffraction limit of the system, a self-adaptive optical system architecture is first proposed by astronomists in the United states in the 50 th century (H.W. Babkock). The adaptive optics system has three basic components: the state of the art of wavefront sensors, wavefront controllers, and wavefront correctors represents in a sense the state of the art of adaptive optics, the essence of which is to change the wavefront shape of an incident beam, mainly by deformable mirrors.

The deformable mirror consists of a thin film mirror surface, a driver and a base. When the incident light passes through the deformable mirror, the two common light waves are mutually overlapped, so that the distorted phase error is compensated, the light wave front similar to the plane wave is output, and a clear image is obtained. The deformable mirror can be divided into a continuous mirror surface deformable mirror and a separated mirror surface deformable mirror, the separated mirror surface deformable mirror mirrors are mutually independent, the continuous surface shape cannot be obtained, the wavefront fitting error is large, high precision cannot be realized, and the deformable mirror is rarely applied to self-adaptive optics. The continuous mirror surface deformable mirror is divided into an integral driving type and a discrete driving type, and the integral driving characteristic is that when a control signal acts on a certain driver, the whole mirror surface is deformed, the number of the drivers is limited, and the continuous mirror surface deformable mirror is only suitable for correcting low-order aberration. The discrete driving feature is that when a control signal is applied to one driver, only the adjacent area of the driver is locally deformed, and the number of the drivers is large, so that the driver can be used for correcting various-order aberration, and therefore the wavefront corrector is the most widely applied wavefront corrector in a self-adaptive optical system.

For continuously surface separately driven deformable mirror mounting, the prior art assembly method is mostly to dip the bonding end of the driver into glue and then bond the driver to the mirror surface. The process can lead to uneven glue distribution on the driver due to human factors, or can not stay on the bonding surface of the driver due to glue fluidity, the glue quantity can not be controlled, and the mirror surface is not horizontal after the glue is solidified, so that the driver is offset relative to the position of the assembly point.

Disclosure of Invention

In order to solve the above-mentioned problems in the prior art, the present disclosure provides a device for assembling a deformable mirror and a method for assembling the deformable mirror, which aims to solve the technical problems that glue on a driver is unevenly distributed and cannot stay on a bonding surface of the driver due to fluidity of the glue.

A first aspect of the present disclosure provides an apparatus for assembling a deformable mirror for high precision assembly of a large array of deformable mirror drivers with deformable mirror surfaces, comprising: a base; the air bearing is arranged on the base and used for supporting the deformable mirror surface and providing a reference plane for the deformable mirror surface; wherein, a plurality of glue points are arranged on the mirror surface of the deformable mirror, and each glue point is provided with elastic glue; the positioning ring is sleeved on the outer side of the air bearing; the displacement table is positioned on the positioning ring and is detachably connected with the positioning ring; the driver supporting seat is arranged in the displacement table and used for supporting the driver array; the driver array is vertically downwards or upwards moved by adjusting the displacement table, so that the bonding ends of the driver array are in one-to-one butt joint with the plurality of glue points, and the assembly of the driver supporting seat, the driver array and the deformable mirror surface is completed.

Further, the displacement table is a manual displacement table or an electric displacement table.

Further, the displacement stage includes: the lower base is positioned on the positioning ring and is detachably connected with the positioning ring; the transmission device is positioned on the lower base and is detachably connected with the lower base; the upper base is positioned on the transmission device and is detachably connected with the transmission device; wherein, the upper surface and the lower surface of the upper base and the lower base have high flatness.

Further, the transmission device includes: the flange plates are detachably connected with the lower base; the plurality of screw rods are in one-to-one correspondence with the plurality of flange plates and are integrally formed and used for supporting the upper base; and the knurled nuts are connected with the screws in a one-to-one correspondence manner and are used for adjusting the upper base to move vertically downwards or upwards.

Further, the transmission includes a plurality of electrically driven columns, wherein a height of each electrically driven column is adjustable.

Further, a dispensing reference point is arranged on the upper surface of the positioning ring, and the dispensing reference point is an initial reference position for arranging a plurality of dispensing points in an array mode.

Further, a plurality of bosses are arranged on the upper surface of the positioning ring, and the height deviation of each boss is smaller than 0.01mm; the upper aperture and the lower aperture of the middle opening of the positioning ring are different in size, the upper aperture size of the middle opening is consistent with the size of the mirror surface of the deformable mirror, and the lower aperture size is consistent with the size of the air bearing.

Further, the height difference between the highest point and the lowest point of the upper surface of the air bearing is smaller than 1 mu m.

Further, the displacement table, the driver supporting seat, the positioning ring and the base are made of high-strength materials.

A second aspect provided by the present disclosure provides a deformable mirror assembly method of an apparatus for assembling a deformable mirror provided according to the first aspect of the embodiments of the present disclosure, including: suspending the deformed mirror surface prepared by the thinning and polishing process on a reference plane of the air bearing, and sleeving a positioning ring on the outer side of the air bearing; setting a plurality of glue points on the upper surface of the mirror surface of the deformable mirror by using glue dispensing equipment, and setting elastic glue on the glue points one by one; mounting the driver array on a driver supporting seat, and arranging the driver supporting seat on an upper base of the displacement table; the displacement table with the driver array is arranged on the positioning ring, and the displacement table is adjusted to enable the driver array to vertically move downwards or upwards, so that the bonding ends of the driver array are in one-to-one butt joint with a plurality of glue points, and the assembly of the driver support seat, the driver array and the deformable mirror surface is completed.

The device comprises a base, an air bearing, a positioning ring, a driver displacement table and a deformable mirror base, wherein the device is used for ensuring high flatness of a mirror surface through an assembly device optimized by precision machining, realizing high-precision attachment of the driver and the mirror surface, improving shape fitting performance of the deformable mirror surface, and providing a deformable mirror with high-end continuous surface discrete driving for a zooming and image stabilizing system, a laser nuclear fusion system, a space optical communication system, an extremely self-adaptive optical system and the like.

Drawings

For a more complete understanding of the present disclosure and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:

FIG. 1 schematically illustrates a structural schematic of an apparatus for assembling deformable mirrors according to an embodiment of the present disclosure;

FIG. 2 schematically illustrates a schematic diagram of a drive support and a drive array according to an embodiment of the present disclosure;

fig. 3 schematically illustrates a flow diagram of a deformable mirror assembly method according to an embodiment of the disclosure.

Detailed Description

Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present disclosure.

In the description of the present disclosure, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present disclosure and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present disclosure.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present disclosure, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present disclosure, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this disclosure will be understood by those of ordinary skill in the art as the case may be.

In this disclosure, unless expressly stated or limited otherwise, a first feature being "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other by way of additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

The embodiment of the disclosure provides a device for assembling deformable mirror, the device can guarantee to glue through the point gum machine on the deformable mirror face, guarantees that the viscose size that every glues the point department and sets up is unanimous, then with driver and gluey point accurate alignment, realizes the high accuracy assembly of deformable mirror, uses the elastic viscose that has after the solidification to realize the protection of mirror face. Meanwhile, the assembling device can simultaneously shape and assemble a plurality of drivers, and improves the assembling efficiency.

An apparatus for assembling a deformable mirror according to an embodiment of the present disclosure is described in detail below with reference to the accompanying drawings.

Fig. 1 schematically illustrates a structural schematic of an apparatus for assembling deformable mirrors according to an embodiment of the present disclosure. Fig. 2 schematically illustrates a schematic structure of a driver support and a driver array according to an embodiment of the present disclosure.

As shown in fig. 1, the apparatus 100 for assembling a deformable mirror includes: base 10, air bearing 20, deformable mirror face 30, holding ring 40, displacement table 50, driver support 60 and driver array 70. The device 100 is suitable for high-precision assembly of a large array of deformable mirror drivers and deformable mirror surfaces.

In the embodiment of the present disclosure, the base 10 is provided on a horizontal mounting table to ensure the horizontality of the surface of the base 10. The air bearing 20 is fixedly arranged on the base 10 and is used for supporting the deformable mirror surface 30 and providing a reference plane for the deformable mirror surface 30; wherein, a plurality of glue points are arranged on the deformable mirror surface 30, and each glue point is provided with elastic glue. The positioning ring 40 is sleeved on the outer side of the air bearing 20 and is tightly matched with the base 10. A displacement stage 50, which is located on the positioning ring 40 and is detachably connected to the positioning ring 40, is used to ensure high precision alignment of the mounting points of the actuator array 70 and the deformable mirror surface 30. The driver support base 60 is disposed in the displacement table 50, and is used for supporting the driver array 70, so as to ensure the position arrangement of the driver array. The driver array 70 is moved vertically downward or upward by adjusting the displacement table 50, so that the bonding end 710 of the driver array 70 is in one-to-one butt joint with a plurality of glue points on the deformable mirror surface 30, and the assembly of the driver support 60, the driver array 70 and the deformable mirror surface 30 is completed.

Specifically, a first hole site 210 is disposed on the annular surface of the air bearing 20, a second hole site 420 corresponding to the first hole site 210 is disposed on the positioning ring 40, the first hole site 210 and the second hole site 420 are used for accessing an air pipe into the air bearing 20 so as to facilitate inputting air into the air bearing 20, so that the deformable mirror surface 30 is suspended on the air bearing 20, friction is avoided between the deformable mirror surface 30 and a reference plane of the air bearing 20, and a reflective film below the deformable mirror surface 30 is protected.

Specifically, the sizes of the plurality of glue points on the deformed mirror surface 30 are the same, and the glue corresponding to each glue point is a thin glue layer with the thickness smaller than 0.1mm, so that the influence on the mirror surface after the glue is solidified is reduced, and the static flatness of the deformed mirror surface 30 is ensured. In addition, the arrangement of the positions of the plurality of glue sites is the same as that of the drivers in the driver array 70, and the position error of the two is less than 0.01mm. Elastic adhesive is arranged at each adhesive point to bond the driver and the mirror surface, so that the deformed mirror surface 30 is protected from being damaged by large impact force of the driver array 70, the flexibility of dynamic deformation is ensured, and the reliability of the deformed mirror is improved.

Specifically, a plurality of bosses 410 are disposed around the upper surface of the positioning ring 40, and the height deviation of each boss 410 is less than 0.01mm, so as to ensure that the driver array 70 moves vertically to the deformable mirror surface 30. In addition, the upper and lower apertures of the middle opening of the positioning ring 40 are different, the upper aperture size of the middle opening is consistent with the size of the deformable mirror surface 30, and the lower aperture size is consistent with the size of the air bearing 20, so as to ensure that the deformable mirror surface 30 is fixed.

According to embodiments of the present disclosure, the displacement stage 50 may be a manual displacement stage or an electric displacement stage for adjusting the vertical downward or upward movement of the actuator array 70 to effect assembly of the actuator array 70 with the deformable mirror surface 30.

As shown in fig. 1, when the displacement table 50 is a manual displacement table, the displacement table 50 specifically includes: a lower base 510, a transmission 520 and an upper base 530. Wherein, the upper and lower surfaces of the lower base 510 and the upper base 530 have high flatness.

The lower base 510 is located on the positioning ring 40 and detachably connected to the positioning ring 40, and the lower base 510 has an annular structure, and the opening in the middle of the lower base corresponds to the opening in the middle of the positioning ring 40. Specifically, each boss 410 on the positioning ring 40 is provided with a screw hole, and the screw holes are in one-to-one correspondence with the screw holes provided on the lower base 510, so that the positioning ring 40 is fixedly connected with the lower base 510 by arranging screws in the screw holes. In the embodiment of the present disclosure, due to the provision of the plurality of bosses 410 on the positioning ring 40, the docking process of the driver array 70 with the plurality of glue sites on the deformable mirror surface 30 is facilitated to be observed.

The transmission 520 is located on the lower base 510 and is detachably connected with the lower base 510. Specifically, the transmission 520 includes: a plurality of flanges 521, a plurality of screws 522, and a plurality of knurled nuts 523. Specifically, the plurality of flanges 521 are detachably coupled to the lower base 510 by screws. The screws 522 are integrally formed with the flanges 521 in a one-to-one correspondence manner, and are used for supporting the upper base 530, wherein external threads are disposed on the outer side of each screw 522. The plurality of knurled nuts 523 are connected to the plurality of screws 522 in a one-to-one correspondence, and specifically, an internal thread configured with an external thread on the screw 522 is provided inside each knurled nut 523, which is used to adjust the downward or upward vertical movement of the displacement table 50. Wherein, the upper base 530 is moved vertically downward or upward by adjusting the transmission 520 to achieve the vertical movement of the driver support 60 and the driver array 70 toward the deformable mirror surface 30. It should be noted that the height of the transmission 520 is greater than the height of the driver array 70 to achieve vertical movement of the driver array 70 toward the deformable mirror surface 30 by adjusting the knurled nut 523.

The upper base 530 is located on the transmission device 520 and detachably connected to the transmission device 520, and the upper base 530 is a solid disc structure for fixing the driver support 60. Specifically, the upper base 530 is provided with a plurality of hole sites, and the plurality of hole sites are corresponding to the screw 522 one by one, so that the screw 522 can penetrate through the plurality of hole sites on the upper base 530, and the positions of the driver support 60 and the driver array 70 can be adjusted conveniently.

As shown in fig. 2, the driver array 70 is mounted on the driver support 60, specifically on the lower surface of the driver support 60. After the driver array 70 is mounted on the lower surface of the driver support base 60, the driver support base 60 is then mounted on the upper base 530 by screws so that the driver support base 60 is tightly fitted with the upper base 530.

In the embodiment of the disclosure, when the displacement table 50 is an electric displacement table, the difference between the electric displacement table and the manual displacement table is that the transmission device 520 includes a plurality of electric driving columns, that is, a plurality of electric driving columns are disposed between the lower base 510 and the upper base 530, wherein the height of each electric driving column is adjustable.

Specifically, the controller can realize the electric control on the plurality of electric driving columns, and the electric adjustment of the heights of the plurality of electric driving columns is completed, so as to realize the vertical movement of the driver support base 60 and the driver array 70 to the deformable mirror surface 30. The control process can realize accurate and controllable moving distance of the driver array 70 to the deformable mirror surface 30, so as to complete high-precision assembly of the driver array 70 and the deformable mirror surface 30.

In the embodiments of the present disclosure, the reference plane of the air bearing 20 is frictionless to protect the deformable mirror surface 30 reflective film. Meanwhile, the height difference (PV value) between the highest point and the lowest point of the plane of the upper surface of the air bearing 20 is smaller than 1 μm, so as to ensure the high flatness of the deformed mirror surface 30.

In the embodiment of the disclosure, in order to ensure that the glue points on the deformed mirror surface 30 are arranged in an array, the upper surface of the positioning ring 40 is provided with a glue dispensing reference point, and the glue dispensing reference point is an initial reference position for arranging a plurality of glue points in an array on the deformed mirror surface 30, so that the calculation of the array arrangement positions of the plurality of glue points is convenient.

Further, the displacement table 50, the driver support base 60, the positioning ring 40 and the base 10 are made of high-strength materials, and are precisely machined, and the machining dimension error of each component is less than 0.02mm, so that high-precision assembly is ensured. Wherein the high strength material may be stainless steel, aluminum, etc.

It should be noted that, the specific dimensions of each component in the device provided in the embodiments of the present disclosure may be set according to the dimensions of the deformable mirror surface, and the specific dimensions of each component are not limited in the embodiments of the present disclosure. In addition, the detachable connection shown in the embodiments of the present disclosure includes, but is not limited to, detachable connection by screws, detachable connection by adhesive or other conventional detachable connection means, and the like.

Another aspect of the present disclosure provides a method of assembling a deformable mirror, the method being implemented based on an assembly device 100 as shown in fig. 1. As shown in fig. 3, the method specifically includes: steps S301 to S304.

S301, placing the deformable mirror surface 30 prepared through the thinning and polishing process on the upper surface of the air bearing 20, and sleeving the positioning ring 40 on the outer side of the air bearing 20.

In the embodiment of the present disclosure, the deformable mirror surface 30 is prepared by thinning and polishing, and a coating surface is arranged below the deformable mirror surface 30, and the mirror surface is suspended and placed on the reference plane of the air bearing 20. And then installing the positioning ring 40, specifically sleeving the positioning ring 40 on the outer side of the air bearing 20, and connecting a screw hole at the bottom of the positioning ring 40 with a screw hole on the base 10 through a screw to ensure that the deformable mirror surface 30 is fixed on a reference plane and keep the deformable mirror surface 30 motionless so as to ensure high-precision assembly.

S302, a plurality of glue points are arranged on the upper surface of the deformed mirror surface 30 by using glue dispensing equipment, and elastic glue is arranged on the glue points one by one.

In the embodiment of the disclosure, a plurality of glue points are arranged on the upper surface of the mirror surface 30 of the deformable mirror through glue dispensing equipment, the glue size of each glue point is guaranteed to be the same, and meanwhile, the glue is a thin glue layer with the thickness smaller than 0.1mm, so that the influence on the mirror surface after the glue is solidified is reduced, and the static flatness of the mirror surface 30 of the deformable mirror is guaranteed. The arrangement of the positions of the plurality of glue sites is the same as that of the drivers in the driver array, and the position error is less than 0.01mm. And then, the cured adhesive with elasticity is used for realizing the adhesion between the driver and the mirror surface, so as to protect the deformed mirror surface from being damaged by the large impulsive force of the driver array, ensure the flexibility of dynamic deformation and improve the reliability of the deformed mirror.

S303, the driver array 70 is mounted to the driver support 60, and the driver support 60 is disposed on the upper base 530 of the displacement table 50.

In the embodiment of the present disclosure, the driver array 70 is mounted to the driver support base 60, and the driver support base 60 is disposed on the upper base 530 of the displacement table 50 such that the driver support base 60 is closely fitted with the upper base 530.

S304, mounting the displacement table 50 with the driver array 70 on the positioning ring 40, and adjusting the displacement table 50 to enable the driver array 70 to vertically move downwards or upwards, so that the bonding ends 710 of the driver array 70 are in one-to-one butt joint with a plurality of glue points, and the assembly of the driver support 60, the driver array 70 and the deformable mirror surface 30 is completed.

In the embodiment of the disclosure, the displacement table 50 with the driver array 70 is mounted on the positioning ring 40, the driver array 70 is moved vertically downwards by adjusting the transmission device 520 in the displacement table 50, the bonding end 710 of the driver array is abutted with the glue point, and meanwhile, the knurled nut in the transmission device 520 plays a supporting role to protect the mirror surface from being pressed by the driver array 70 and the driver supporting seat 60 and avoid the deformed mirror surface 30 from being damaged. In addition, the screw in the actuator 520 acts as a sliding track to ensure high precision alignment of the adhesive end 710 in the actuator array with the adhesive dots.

It should be noted that, the method is implemented by using the assembly device shown in fig. 1-2, and the specific structure of the device 100 is not described in detail herein.

The device for assembling the deformable mirror and the assembling method thereof ensure the high flatness of the mirror surface through the precisely machined and optimized assembling device, realize the high-precision attachment of the driver and the mirror surface, improve the shape fitting performance of the deformable mirror surface, and provide the deformable mirror with high-end continuous surface discrete driving for a zooming and image stabilizing system, a laser nuclear fusion system, a space optical communication system, an extremely self-adaptive optical system and the like.

While the disclosure has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive.

Those skilled in the art will appreciate that the features recited in the various embodiments of the disclosure and/or the claims can be combined in a wide variety of combinations and/or combinations even if such combinations or combinations are not explicitly recited in the disclosure. In particular, the features recited in the various embodiments of the present disclosure and/or the claims may be variously combined and/or combined without departing from the spirit and teachings of the present disclosure. All such combinations and/or combinations fall within the scope of the present disclosure.

While the present disclosure has been shown and described with reference to certain exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present disclosure as defined by the appended claims and their equivalents. The scope of the disclosure should, therefore, not be limited to the above-described embodiments, but should be determined not only by the following claims, but also by the equivalents of the following claims.

Claims (10)

1. An apparatus for assembling a deformable mirror, the apparatus for high precision assembly of a large array of deformable mirror drives with deformable mirror surfaces, comprising:

a base (10);

the air bearing (20) is arranged on the base (10) and is used for supporting the deformable mirror surface (30) and providing a reference plane for the deformable mirror surface (30); wherein, a plurality of glue points are arranged on the deformable mirror surface (30), and each glue point is provided with elastic glue;

the positioning ring (40) is sleeved on the outer side of the air bearing (20);

the displacement table (50) is positioned on the positioning ring (40) and is detachably connected with the positioning ring (40);

a driver support (60) disposed within the displacement table (50) for supporting a driver array (70);

the driver array (70) is vertically moved downwards or upwards by adjusting the displacement table (50), so that the bonding ends of the driver array (70) are in one-to-one butt joint with the plurality of glue points, and the assembly of the driver support base (60), the driver array (70) and the deformable mirror surface (30) is completed.

2. Device for assembling a deformable mirror according to claim 1, characterized in that the displacement stage (50) is a manual displacement stage or an electric displacement stage.

3. The device for assembling deformable mirrors according to claim 2, characterized in that said displacement stage (50) comprises:

the lower base (510) is positioned on the positioning ring (40) and is detachably connected with the positioning ring (40);

the transmission device (520) is positioned on the lower base (510) and is detachably connected with the lower base (510);

an upper base (530) positioned on the transmission device (520) and detachably connected with the transmission device (520); wherein the upper and lower surfaces of the upper base (530) and the lower base (510) have high flatness.

4. A device for assembling a deformable mirror according to claim 3, characterized in that the transmission means (520) comprise:

a plurality of flanges (521) detachably connected to the lower base (510);

a plurality of screws (522) which are integrally formed in one-to-one correspondence with the plurality of flanges (521) and are used for supporting the upper base (530);

and a plurality of knurled nuts (523) which are connected with the plurality of screws (522) in a one-to-one correspondence manner and are used for adjusting the upper base (530) to vertically move downwards or upwards.

5. A device for assembling a deformable mirror according to claim 3, characterized in that the transmission means (520) comprise a plurality of electrically driven posts, wherein the height of each electrically driven post is adjustable.

6. The device for assembling a deformable mirror according to claim 1, wherein the upper surface of the positioning ring (40) is provided with dispensing reference points, which are initial reference positions for arranging the plurality of dispensing points in an array.

7. The device for assembling a deformable mirror according to claim 1, characterized in that the upper surface of the positioning ring (40) is provided with a plurality of bosses (410), each boss (410) having a height deviation of less than 0.01mm; the upper and lower aperture sizes of the middle opening of the positioning ring (40) are different, the upper aperture size of the middle opening is consistent with the size of the deformable mirror surface (30), and the lower aperture size is consistent with the size of the air bearing (20).

8. Device for assembling a deformable mirror according to claim 1, characterized in that the height difference between the highest point and the lowest point of the upper surface of the air bearing (20) is less than 1 μm.

9. Device for assembling a deformable mirror according to claim 1, characterized in that the displacement table (50), the driver support seat (60), the positioning ring (40) and the base (10) are made of a high-strength material.

10. A deformable mirror assembly method based on the apparatus for assembling a deformable mirror as claimed in any one of claims 1 to 9, comprising:

suspending a deformable mirror surface (30) prepared by a thinning and polishing process on a reference plane of an air bearing (20), and sleeving a positioning ring (40) on the outer side of the air bearing (20);

a plurality of glue points are arranged on the upper surface of the deformable mirror surface (30) by using glue dispensing equipment, and elastic viscose is arranged on the glue points one by one;

mounting a driver array (70) to a driver support (60) and positioning the driver support (60) on an upper base (530) of a displacement table (50);

and installing a displacement table (50) provided with a driver array (70) on the positioning ring (40), and adjusting the displacement table (50) to enable the driver array (70) to vertically move downwards or upwards, so that the bonding ends of the driver array (70) are in one-to-one butt joint with the plurality of glue points, and the assembly of the driver support base (60), the driver array (70) and the deformable mirror surface (30) is completed.