CN116828367A8 - Electrical control method for acoustic transducer, acoustic transducer and manufacturing method - Google Patents
Electrical control method for acoustic transducer, acoustic transducer and manufacturing method Download PDFInfo
- Publication number
- CN116828367A8 CN116828367A8 CN202310754113.XA CN202310754113A CN116828367A8 CN 116828367 A8 CN116828367 A8 CN 116828367A8 CN 202310754113 A CN202310754113 A CN 202310754113A CN 116828367 A8 CN116828367 A8 CN 116828367A8
- Authority
- CN
- China
- Prior art keywords
- acoustic transducer
- electrode
- applying
- manufacturing
- acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000012528 membrane Substances 0.000 abstract 2
- 230000003750 conditioning effect Effects 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Micromachines (AREA)
Abstract
An electrical modulation method for an acoustic transducer, and a method of manufacturing the same are provided. The acoustic transducer includes a membrane structure including a bottom electrode, a first piezoelectric layer disposed on the bottom electrode, and a first electrode layer disposed on the first piezoelectric layer, the method comprising: collecting, by a first one of the first center electrode and the first edge electrode, a first sensing electrical signal generated by means of a piezoelectric effect of the first piezoelectric layer when the acoustic transducer operates as an acoustic sensor, or applying a first control electrical signal to the first one when the acoustic transducer operates as an acoustic actuator, applying a first force to the membrane structure; and applying a first conditioning electrical signal to a second one of the first center electrode and the first edge electrode, applying a second force to the thin film structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310754113.XA CN116828367A (en) | 2023-06-25 | 2023-06-25 | Electrical control method for acoustic transducer, acoustic transducer and manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310754113.XA CN116828367A (en) | 2023-06-25 | 2023-06-25 | Electrical control method for acoustic transducer, acoustic transducer and manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116828367A CN116828367A (en) | 2023-09-29 |
| CN116828367A8 true CN116828367A8 (en) | 2023-12-22 |
Family
ID=88119691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310754113.XA Pending CN116828367A (en) | 2023-06-25 | 2023-06-25 | Electrical control method for acoustic transducer, acoustic transducer and manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116828367A (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019099013A1 (en) * | 2017-11-16 | 2019-05-23 | Chirp Microsystems, Inc. | Piezoelectric micromachined ultrasonic transducer with a patterned membrane structure |
| CN115914959A (en) * | 2021-09-30 | 2023-04-04 | 上海新微技术研发中心有限公司 | Acoustic piezoelectric thin film device structure |
| CN114466282B (en) * | 2022-01-24 | 2022-11-25 | 武汉大学 | Acoustic transducer and acoustic device |
-
2023
- 2023-06-25 CN CN202310754113.XA patent/CN116828367A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN116828367A (en) | 2023-09-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CI02 | Correction of invention patent application |
Correction item: Classification number Correct: H04R 17/00(2006.01)|H04R 3/00(2006.01)|H04R 31/00(2006.01) False: H04R 9/06(2006.01)|H04R 9/02(2006.01)|H04R 31/00(2006.01) Number: 39-02 Page: The title page Volume: 39 Correction item: Classification number Correct: H04R 17/00(2006.01)|H04R 3/00(2006.01)|H04R 31/00(2006.01) False: H04R 9/06(2006.01)|H04R 9/02(2006.01)|H04R 31/00(2006.01) Number: 39-02 Volume: 39 |
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| CI02 | Correction of invention patent application |