CN116819668A - Preparation method of multi-channel array filter and multi-channel array filter - Google Patents

Abstract

The application relates to the technical field of optics, and provides a preparation method of a multi-channel array filter and the multi-channel array filter, wherein the preparation method of the multi-channel array filter comprises the following steps: preparing a first substrate and a second substrate, wherein the first substrate comprises a preset number of first through holes, the second substrate comprises a preset number of second through holes, the first through holes are arranged on the first substrate in a preset rule, the second through holes are arranged on the second substrate in a preset rule, and the aperture of the first through holes is smaller than that of the second through holes; gluing the first substrate and the second substrate to obtain a bottom plate of the multi-channel array optical filter, aligning the center position of each first through hole with the center position of the second through hole at the corresponding position, and forming grooves arranged according to a preset rule on the bottom plate; dispensing glue at each groove to glue at least one filter sub-sheet to obtain the multi-channel array filter. The processing cost can be reduced, and the size of the multi-channel array filter is well controlled.

Description

Preparation method of multi-channel array filter and multi-channel array filter

Technical Field

The application relates to the technical field of optics, in particular to a preparation method of a multi-channel array filter and the multi-channel array filter.

Background

The array filter can be widely applied to various different scenes, such as the fields of medical imaging, environment monitoring, machine vision and the like. Thus, the preparation of the array filter is important.

Currently, the preparation method of the array optical filter mainly comprises a nano hot embossing technology, a droplet jetting technology and a wet etching technology. The nano hot embossing technology ensures that the polymer has fluidity by heating, the template is pressed in under a certain pressure when the temperature is higher than the glass transition temperature of the polymer, and the duration of the pressure is kept to be longer than the duration of the highest temperature, so that the polymers at different positions can be ensured to be fully filled into gaps of the template pattern. The template is then released from the polymer as the polymer cools below the glass transition temperature, thereby transferring the pattern of the template to the polymer to complete the imprint. Because the process vector height cannot be made large, the focal length of the lens cannot meet the requirement of a small range. Moreover, the nano-imprinting cannot adopt quartz as a material, so that the nano-imprinting is not applicable to ultraviolet light wave bands, and the problems of high template design difficulty, high processing equipment and high cost exist. The droplet jetting process is to jet the forming raw materials such as solution, colloid, suspension, slurry or melt, which are stored in a cylinder and are composed of polymers, metals or ceramics, selectively to the corresponding parts of the substrate on the workbench through the nozzle with the aperture of micron-sized, and the jetted raw materials are quickly solidified into a slice section layer of the workpiece on the substrate due to solvent volatilization, temperature phase change or reaction phase change, and then are gradually piled up and overlapped into the entity of the workpiece. It is difficult to control the size and surface shape of the micro array lens. The wet etching technology is a technology of immersing the etched material in an etching solution to perform etching, and is an isotropic etching method, wherein a chemical reaction process is utilized to remove the thin film material in the area to be etched, typically, the wet etching technology is adopted for silicon dioxide, and sometimes, the wet etching technology is also adopted for metal aluminum. But at a higher cost and requires the preparation of a mask.

In summary, the existing preparation method of the array optical filter has the technical problems of complex processing process, high cost and difficult control of the size.

Disclosure of Invention

The embodiment of the application provides a preparation method of a multi-channel array optical filter and the multi-channel array optical filter, and aims to solve the technical problems that the processing process of the multi-channel array optical filter is complex, the cost is high and the size is difficult to control.

In a first aspect, an embodiment of the present application provides a method for preparing a multichannel array filter, including: preparing a first substrate and a second substrate, wherein the first substrate comprises a preset number of first through holes, the second substrate comprises a preset number of second through holes, the first through holes are arranged on the first substrate in a preset rule, the second through holes are arranged on the second substrate in a preset rule, and the aperture of the first through holes is smaller than that of the second through holes; gluing the first substrate and the second substrate to obtain a bottom plate of the multi-channel array optical filter, aligning the center position of each first through hole with the center position of the second through hole at the corresponding position, and forming grooves arranged according to a preset rule on the bottom plate; dispensing glue at each groove to glue at least one filter sub-sheet to obtain the multi-channel array filter.

In one embodiment, the first substrate and the second substrate are both made of opaque metal materials.

In an embodiment, the first through hole and the second through hole have the same shape, and the shapes of the first through hole and the second through hole are the same as the shapes of the corresponding optical filter sub-sheets to be glued.

In one embodiment, the shape of the filter sub-sheet is a predetermined geometric shape.

In an embodiment, the shapes of the first through hole and the second through hole are square through holes, and the shape of the filter sub-sheet is a square through hole.

In an embodiment, the groove is a light-transmitting groove, and the light-transmitting channel of the groove is a corresponding first through hole.

In an embodiment, dispensing is performed at each groove to glue the filter sub-sheets with different wavelengths, including: dispensing at preset positions around each groove respectively; for any groove, the control mechanical arm adsorbs at least one photon filtering piece respectively and is placed at the position of the groove; and controlling the ultraviolet curing lamp to irradiate the positions of the grooves until the glue is cured.

In an embodiment, a plurality of filter sub-sheets of different wavelengths may be glued at each groove.

The embodiment of the application provides a preparation method of a multi-channel array filter and the multi-channel array filter, wherein the preparation method of the multi-channel array filter comprises the following steps: preparing a first substrate and a second substrate, wherein the first substrate comprises a preset number of first through holes, the second substrate comprises a preset number of second through holes, the first through holes are arranged on the first substrate in a preset rule, the second through holes are arranged on the second substrate in a preset rule, and the aperture of the first through holes is smaller than that of the second through holes; gluing the first substrate and the second substrate to obtain a bottom plate of the multi-channel array optical filter, aligning the center position of each first through hole with the center position of the second through hole at the corresponding position, and forming grooves arranged according to a preset rule on the bottom plate; dispensing glue at each groove to glue at least one filter sub-sheet to obtain the multi-channel array filter. The first through holes with the preset number are arranged on the first substrate through the preset rules, the second through holes with the preset number are arranged on the second substrate, the first substrate containing the first through holes and the second substrate containing the second through holes are aligned based on the central positions of the first through holes and the second through holes with the corresponding positions to be glued to obtain the bottom plate, the grooves formed on the bottom plate can be ensured to accurately correspond to the positions of the optical filter sub-sheets, the influence caused by alignment errors is avoided, in addition, the grooves arranged according to the preset rules are formed on the bottom plate, and the optical filter sub-sheets are glued and glued at the positions of each groove, so that the optical filter with the multichannel structure can be directly obtained, the processing process is complicated, the processing cost is reduced, and the size of the multichannel array optical filter is well controlled.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic flow chart of a method for manufacturing a multi-channel array filter according to an embodiment of the present application;

fig. 2 is a schematic structural diagram of a first substrate according to an embodiment of the present application;

fig. 3 is a schematic structural diagram of a second substrate according to an embodiment of the present application;

fig. 4 is a schematic flowchart of a specific implementation of step S103 according to an embodiment of the present application;

fig. 5 is a schematic structural diagram of a multi-channel array filter according to an embodiment of the present application.

Detailed Description

The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

The flow diagrams depicted in the figures are merely illustrative and not necessarily all of the elements and operations/steps are included or performed in the order described. For example, some operations/steps may be further divided, combined, or partially combined, so that the order of actual execution may be changed according to actual situations.

It is also to be understood that the terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

It should be further understood that the term "and/or" as used in the present specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes such combinations.

According to the preparation method of the multi-channel array optical filter and the multi-channel array optical filter, the preset number of the first through holes are arranged on the first substrate and the preset number of the second through holes are arranged on the second substrate through the preset rules, the first substrate containing the first through holes and the second substrate containing the second through holes are glued to obtain the bottom plate based on the alignment of the central positions of the first through holes and the second through holes at the corresponding positions, the grooves formed in the bottom plate can be ensured to accurately correspond to the positions of the optical filter sub-sheets, the influence caused by alignment errors is avoided, in addition, the optical filter with the multi-channel structure can be directly obtained through forming the grooves arranged according to the preset rules on the bottom plate, dispensing and gluing the optical filter sub-sheets at each groove, the processing cost is reduced and the size of the multi-channel array optical filter is better controlled while the processing process of the multi-channel array optical filter is simplified.

Referring to fig. 1, fig. 1 is a flow chart of a method for manufacturing a multi-channel array filter according to an embodiment of the application. As shown in fig. 1, the method for preparing the multi-channel array filter includes steps S101 to S103. The details are as follows:

s101: preparing a preset number of first through holes on a preset first substrate based on a preset method, and preparing a preset number of second through holes on a preset second substrate based on the preset method, wherein the first through holes and the second through holes are arranged in a preset rule, and the aperture of the first through holes is smaller than that of the second through holes.

The first substrate and the second substrate are respectively metal sheets with different thicknesses, and the size and the thickness of the metal sheets determine the performance and the adaptability of the optical filter. It should be noted that, according to the requirements of the actual assembly scenario, appropriate metal materials and thicknesses may be selected as the first base and the second substrate to satisfy the required factors such as optical performance, mechanical strength, and manufacturing cost. Different metallic materials have different optical properties and durability, such as aluminum, stainless steel, titanium, etc. In the embodiment of the application, the first substrate and the second substrate are required to be subjected to material selection according to actual requirements, and the thickness of the metal sheet is considered in design so as to realize the required optical filtering effect and optical performance.

The preset method can be a laser cutting method, a punching method, a drilling method, a laser etching method and the like. Specifically, the laser cutting method can precisely cut the through-holes in the metal sheet using a laser cutting technique. The laser cutting method refers to a cutting operation in which a metal material is heated to melt or evaporate by a high-energy laser beam. The laser cutting has the characteristics of high precision, no contact and no contact heat influence, and is suitable for preparing small holes and through holes with complex shapes. The punching method is to punch holes with a required shape in a metal sheet by using a punch or a punching machine. The punch presses the die and the metal sheet together by impact force, thereby forming the hole. The punching method has high efficiency and low cost, and is suitable for mass production and mass through hole preparation. Drilling refers to drilling holes in sheet metal using a drill press or drill. Drilling holes by rotating and pushing the rotary cutter to cut metal at the tip of the cutter. The drilling method is suitable for preparing the through holes in small batches, and can realize higher processing precision and aperture control. The laser etching method is to partially etch a metal sheet using a laser beam to form a through hole. The laser etching method generates local chemical reaction and etching action on the metal surface by controlling the energy and focal position of laser, thereby forming holes. The laser etching method can realize high-precision through hole preparation and is suitable for metal sheets with micro apertures and complex structures. These methods may be selected and applied depending on the material, thickness, via size requirements of the foil and production requirements. Depending on the specific case, it is also possible to use different methods in combination to achieve automatic preparation of the through-holes in the metal sheet.

Specifically, in the embodiment of the present application, the first through hole and the second through hole have the same shape, and the shapes of the first through hole and the second through hole are preset geometric shapes, for example, including but not limited to one of circles, triangles, trapezoids, squares, and the like. Preferably, the first through hole and the second through hole are square through holes. The size of the square through hole should be determined according to the actual beam characteristics. Factors such as the diameter of the beam, the intensity distribution and the wavefront shape affect the size of the selected square via. Depending on the beam requirements in practical applications, optical simulations or experiments can be performed to determine the appropriate square via size to ensure the desired optical effect and beam control.

The preset rule of the arrangement of the first through holes and the second through holes directly affects the optical performance of the array filter, such as the transmission spectrum characteristic and the wavelength selectivity. In practical applications, different rules need to be selected for alignment, such as periodic alignment, regular matrix alignment, or irregular alignment, according to the required optical characteristics. In addition, the predetermined rules for the arrangement of the first and second through holes may also be limited by the available space. According to the application scene and the equipment size, factors such as the size, the distance and the relative position of the optical filters need to be considered. The reasonable spatial layout can improve the efficiency and performance of the array filter to the greatest extent. Different applications may have specific requirements for the arrangement rules of the array filters. For example, in an optical communication system, the array filter arrangement rules may need to be matched to the fiber array or laser array to achieve efficient optical coupling.

In summary, the preset rule of the first via hole and the second via hole is determined according to the design requirement, the application requirement, the manufacturing process, the space layout and other factors. By selecting the proper arrangement rules, the array filter meeting the specific requirements can be realized, and the expected optical performance and application effect can be achieved.

As shown in fig. 2, fig. 2 is a schematic structural diagram of a first substrate according to an embodiment of the present application. In the present embodiment, the first substrate 20 has dimensions of 5mm×5mm, and square through holes of 0.5mm×0.5mm are formed in the first substrate 20. It should be understood that the sizes of the first substrate and the square through holes located thereon need to be determined according to the actual application scenario, and are not limited in any way herein.

Fig. 3 is a schematic structural diagram of a second substrate according to an embodiment of the present application, as shown in fig. 3. In the present embodiment, the second substrate 30 has dimensions of 5mm×5mm, and a square through hole of 1mm×1mm is formed in the second substrate 30. It should be understood that the dimensions of the second substrate and the square through holes located thereon need to be determined according to the actual application scenario, and are not limited in any way herein.

It should be noted that, according to the actual application scenario, the size of each through hole on the first substrate 20 may be different, or even the shape of each through hole may be different. Similarly, the size of each through hole on the second substrate 30 may be different, and the shape of each through hole may be different. Fig. 2 and 3 show the shapes of the first and second substrates 20 and 30 by way of example only, and do not constitute a limitation of the first and second substrates 20 and 30.

S102: and gluing the first substrate and the second substrate to obtain a bottom plate of the multi-channel array optical filter, aligning the central position of each first through hole with the central position of the second through hole at the corresponding position, and forming grooves which are arranged according to a preset rule on the bottom plate.

The first substrate and the second substrate are manufactured, and the first substrate and the second substrate are glued, so that the manufacturing cost of the array optical filter can be reduced, and the first substrate is made of a thinner and relatively cheaper material relative to the second substrate and is used for providing a structure for supporting and fixing the array optical filter. Its primary function is to act as a base plate, to hold the array filter and other components, and to provide stable planar support. That is, the first substrate is aimed at maintaining stability and reliability of the structure while reducing manufacturing costs. The second substrate may be a thicker material than the second substrate and functions to provide additional support and to enhance structural rigidity. It can increase the stability of the whole array filter assembly and play an important role in the scene requiring higher mechanical strength. The choice of the second substrate depends on the application requirements of the particular assembly scenario. The embodiments of the present application can balance cost and performance requirements by using two different substrates.

Specifically, the process of gluing the first substrate and the second substrate to obtain the bottom plate of the multi-channel array filter includes: dispensing is carried out on the first substrate and the second substrate respectively, the first through holes and the second through holes which are arranged on the first substrate and the second substrate respectively according to a preset rule are aligned in the center, the first substrate and the second substrate are glued, ultraviolet curing is adopted, and the bottom plate of the multichannel array filter is obtained. Specifically, dispensing may be performed on the first substrate and the second substrate by using a mechanical arm, and the corresponding glue may be epoxy resin glue, acrylic glue, polyurethane glue, or the like.

Through carrying out central point alignment to the first through-hole and the second through-hole that will arrange according to predetermineeing the rule respectively on first base plate and second base plate, veneer first base plate and second base plate can realize highly accurate counterpoint, ensures that the recess that forms on the bottom plate corresponds with the position accuracy of optical filter sub-piece, has avoided the influence that counterpoint error brought.

S103: dispensing glue at each groove to glue at least one filter sub-sheet to obtain the multi-channel array filter.

In the embodiment of the present application, the filter sub-sheet is preferably square. It should be noted that square filter sub-sheets have several benefits in optical applications, first of all, flexibility and tailorability. In practical application, the square filter sub-sheet can be designed and manufactured according to specific requirements, so that the square filter sub-sheet has great flexibility in the aspects of size, thickness, materials, filter characteristics and the like. This allows them to be tailored to different application requirements and to be tailored to the actual situation. Second, square filter sub-sheets can accommodate multiple filter channels in a smaller area. Each square filter sub-sheet may have different spectral characteristics, such as different center wavelengths or bandpass ranges, allowing light of a particular wavelength to be selectively transmitted or blocked. Such a multi-channel filter effect is very useful in applications such as spectroscopic analysis, imaging and sensing. Moreover, square filter sub-sheets are typically of modular design for ease of integration into an optical system. They can be conveniently used in combination with other optical elements (e.g., lenses, optical fibers, etc.), thereby constructing complex optical systems. In addition, the modular design of square filter sub-sheets also makes them easy to replace and adjust to accommodate different experimental conditions and application requirements. The square filter sub-sheet is designed and manufactured to ensure good optical properties such as high transmittance, low scattering, high contrast, etc. This enables them to accurately control the propagation and distribution of light, meeting precise optical requirements.

The square filter sub-sheet is generally made of a high-quality material and has excellent heat resistance, corrosion resistance and mechanical strength. This enables them to maintain stable performance under various environmental conditions and to have a long service life.

In summary, the square filter sub-sheet has the advantages of flexibility, multi-channel filter effect, easy integration and exchange, good optical performance, durability, stability and the like. These features have led to the wide application of square-shaped photon-filtering sheets in spectroscopic analysis, imaging, sensing and other applications in the optical field.

Specifically, as shown in fig. 4, fig. 4 is a schematic flowchart of a specific implementation of step S103 according to an embodiment of the present application. As can be seen from fig. 4, step S103 includes steps S1031 to S1033. The details are as follows:

s1031: dispensing at preset positions around each groove.

Accurate glue dispensing equipment or an industrial robot is generally used for accurately positioning and controlling glue, and uniform distribution and proper amount of the glue are required to be ensured in the glue dispensing process so as to avoid the influence on the performance of the optical filter caused by excessive or insufficient glue.

According to the embodiment of the application, glue is dispensed on the periphery of the groove of the optical filter, so that glue sealing is formed around the groove, and the optical filter is fixed and protected.

S1032: for any groove, the control mechanical arm adsorbs at least one photon filtering piece respectively and is placed at the position of the groove.

At least one filter sub-sheet is sucked into the filter recess using a robot arm which needs to have accurate positioning and gripping capabilities to ensure that the filter is placed accurately in the centre of the recess. Note that, the process of adsorbing the optical filter needs to be careful to avoid scratch or pollution during the contact process of the optical filter and the mechanical arm.

In addition, the grooves can be glued with a plurality of filter sub-sheets with different wavelengths, so that the positions and the directions of the filter sub-sheets are ensured to be consistent, and optical deviation caused by small position or direction difference among a plurality of independent filters is eliminated, thereby improving the consistency and the stability of an optical path. In addition, the plurality of the photon filtering sheets are integrated in one groove, so that the number of optical elements can be reduced, the structure of the optical system can be simplified, the coupling and scattering phenomena among the optical elements in the optical system can be reduced, and the optical performance can be improved.

S1033: and controlling the ultraviolet curing lamp to irradiate the positions of the grooves until the glue is cured.

And after all the photon filtering sheets are placed, irradiating the photon filtering sheets by using an ultraviolet curing lamp. The ultraviolet curing lamp can emit ultraviolet light with specific wavelength to activate the curing agent in the glue so as to promote the glue to be cured and hardened rapidly. The irradiation time is typically 3-5 minutes, ensuring complete curing of the glue. The ultraviolet curing has the advantages of high curing speed and high production efficiency.

Through the dispensing and curing process steps, the filter sub-sheet can be firmly fixed in the groove and form stable combination with the substrate. Thus, the position accuracy and performance stability of the optical filter can be ensured, and the process controllability and efficiency for preparing the array optical filter are improved.

As can be seen from the above analysis, the method for preparing the multi-channel array filter according to the embodiment of the application includes: preparing a preset number of first through holes on a preset first substrate based on a preset method, and preparing a preset number of second through holes on a preset second substrate based on a preset method, wherein the first through holes and the second through holes are arranged according to a preset rule, and the aperture of the first through holes is smaller than that of the second through holes; gluing the first substrate and the second substrate to obtain a bottom plate of the multi-channel array optical filter, aligning the center position of each first through hole with the center position of the second through hole at the corresponding position, and forming grooves arranged according to a preset rule on the bottom plate; dispensing glue at each groove to glue at least one filter sub-sheet to obtain the multi-channel array filter. The first through holes with the preset number are arranged on the first substrate through the preset rules, the second through holes with the preset number are arranged on the second substrate, the first substrate containing the first through holes and the second substrate containing the second through holes are aligned based on the central positions of the first through holes and the second through holes with the corresponding positions to be glued to obtain the bottom plate, the grooves formed on the bottom plate can be ensured to accurately correspond to the positions of the optical filter sub-sheets, the influence caused by alignment errors is avoided, in addition, the grooves arranged according to the preset rules are formed on the bottom plate, and the optical filter sub-sheets are glued and glued at the positions of each groove, so that the optical filter with the multichannel structure can be directly obtained, the processing process is complicated, the processing cost is reduced, and the size of the multichannel array optical filter is well controlled.

In addition, an embodiment of the present application further provides a multi-channel array filter, as shown in fig. 5, and fig. 5 is a schematic structural diagram of the multi-channel array filter according to the embodiment of the present application. As can be seen from fig. 5, the multi-channel array filter 50 according to the embodiment of the present application includes: a base plate 501, the base plate 501 being formed by gluing a first substrate 20 and a second substrate 30; the first substrate 20 includes a preset number of first through holes 201, the second substrate 30 includes a preset number of second through holes 301, the first through holes 201 are arranged on the first substrate 20 in a preset rule, the second through holes 301 are arranged on the second substrate 30 in a preset rule, and the aperture of the first through holes 201 is smaller than that of the second through holes 301; the center position of each first through hole 201 is aligned with the center position of the second through hole 301 at the corresponding position, and grooves 502 arranged according to a preset rule are formed on the bottom plate 501; at least one filter sub-sheet (not shown in the filter sub-sheet diagram) is glued to each groove 502 by dispensing.

In an embodiment, the first through hole 201 and the second through hole 301 have the same preset geometry, and the shapes of the first through hole 201 and the second through hole 301 are the same as the shapes of the corresponding filter sub-sheets to be glued. For example, the first through hole 201, the second through hole 301, and the filter sub-sheet are all square.

The multi-channel array filter provided by the embodiment of the application can use a plurality of different wavelength channels during optical signal transmission, so as to realize multi-channel signal processing and analysis and improve the signal processing efficiency and the multiplexing speed. Unnecessary light sources can be filtered out, so that the accuracy and the reliability of measurement and control are improved. In addition, the multi-channel array filter can be applied to the technical field of medicine, for example, the multi-channel array filter can be used for measuring the hemoglobin content of a human body in medical imaging and diagnosis. The multi-channel array filter can be applied to the technical field of image processing, for example, the multi-channel array filter can be used for face recognition, automatic driving, target tracking and the like in image processing and analysis, and the quality and the accuracy of images can be improved. Further, the multi-channel filter can be used in environmental pollution and toxicity studies, for example, to measure spectral intervals at different wavelengths in the environment for identification and analysis of pollutants and toxins.

While the application has been described with reference to certain preferred embodiments, it will be understood by those skilled in the art that various changes and substitutions of equivalents may be made and equivalents will be apparent to those skilled in the art without departing from the scope of the application. Therefore, the protection scope of the application is subject to the protection scope of the claims.

Claims (10)

1. A method of making a multi-channel array filter, comprising:

preparing a preset number of first through holes on a preset first substrate based on a preset method, and preparing the preset number of second through holes on a preset second substrate based on the preset method, wherein the first through holes and the second through holes are arranged according to a preset rule, and the aperture of the first through holes is smaller than that of the second through holes;

gluing the first substrate and the second substrate to obtain a bottom plate of the multi-channel array optical filter, aligning the central position of each first through hole with the central position of the second through hole at the corresponding position, and forming grooves arranged according to the preset rule on the bottom plate;

dispensing glue at each groove respectively to glue at least one filter sub-sheet respectively, so as to obtain the multi-channel array filter.

2. The method of claim 1, wherein the first substrate and the second substrate are both made of opaque metal materials.

3. The method for manufacturing a multi-channel array optical filter according to claim 1 or 2, wherein the first through hole and the second through hole have the same shape, and the shapes of the first through hole and the second through hole are the same as the shapes of the corresponding optical filters to be glued.

4. The method of claim 3, wherein the filter sub-sheet has a shape of a predetermined geometry.

5. The method of claim 4, wherein the first and second through holes are square in shape and the filter sub-plate is square in shape.

6. The method of claim 1, wherein the grooves are light-transmitting grooves, and the light-transmitting channels of the grooves are corresponding first through holes.

7. The method of claim 1 or 6, wherein dispensing glue at each of the grooves to glue at least one filter sub-sheet, respectively, comprises:

dispensing at preset positions around each groove respectively;

for any groove, the mechanical arm is controlled to adsorb at least one photon filtering piece respectively and is placed at the position of the groove;

and controlling the ultraviolet curing lamp to irradiate the positions of the grooves until the glue is cured.

8. The method of claim 7, wherein a plurality of filters of different wavelengths are glued to each of the grooves.

9. A multi-channel array filter, comprising: the bottom plate is formed by gluing a first substrate and a second substrate; the first substrate comprises a preset number of first through holes, the second substrate comprises a preset number of second through holes, the first through holes are arranged on the first substrate in a preset rule, the second through holes are arranged on the second substrate in the preset rule, and the aperture of the first through holes is smaller than that of the second through holes; the center position of each first through hole is aligned with the center position of the second through hole at the corresponding position, and grooves which are arranged according to the preset rule are formed on the bottom plate;

at least one optical filter sub-sheet is glued at each groove through a dispensing mode.

10. The multi-channel array filter of claim 9, wherein the first and second through holes have the same predetermined geometry, and wherein the first and second through holes are each the same shape as the corresponding filter sub-sheets to be glued.