CN116818153B - Integrated multi-axis capacitance pressure sensor - Google Patents
Integrated multi-axis capacitance pressure sensor Download PDFInfo
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- CN116818153B CN116818153B CN202311099022.3A CN202311099022A CN116818153B CN 116818153 B CN116818153 B CN 116818153B CN 202311099022 A CN202311099022 A CN 202311099022A CN 116818153 B CN116818153 B CN 116818153B
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- mounting seat
- movable groove
- pressure sensor
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- 238000009434 installation Methods 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
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- 238000009530 blood pressure measurement Methods 0.000 description 2
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses an integrated multi-axis capacitance pressure sensor, which comprises a mounting seat, wherein a first movable groove is formed in the mounting seat along a first direction, and a second movable groove is formed in the side wall of the first movable groove along a second direction; the bottom wall of the first movable groove is provided with a pole piece mounting seat, the pole piece mounting seat is provided with a first pole piece and a second pole piece, the first pole piece is arranged on the pole piece mounting seat, and the second pole piece is sleeved in the edge of the notch of the first movable groove; an elastic part is arranged between the first pole piece and the second pole piece, one end of the elastic part is fixedly connected with the edge of the first pole piece, and the other end of the elastic part is fixedly connected with the edge of the second pole piece; an extension rod is arranged in the second movable groove; the slot wall in second movable slot has been seted up and has been dodged the hole, and the one end of extension rod is connected with the pole piece mount pad along the second direction, and the other end of extension rod passes and dodges the hole setting in the mount pad outside. Through above-mentioned setting, make this scheme avoid multiunit electric capacity mutual interference's problem, possess compact structure's advantage.
Description
Technical Field
The invention relates to the technical field of capacitive sensor structures, in particular to an integrated multi-axis capacitive pressure sensor.
Background
A capacitive sensor is one type of pressure sensor, and has a function of measuring pressure; unlike resistive pressure sensors, piezoelectric pressure sensors, and other sensors, capacitive sensors have the advantages of small structure, high sensitivity, and the like. The current capacitive sensor mainly forms a capacitor through two electrodes, when pressure is applied, one electrode is displaced relative to the other electrode, the distance between the two electrodes is changed, the capacitance of the capacitor is changed, and the pressure can be measured through the change of the capacitance.
Because the capacitive sensor is limited by the form of the opposite arrangement of the pole pieces, the capacitive sensor is generally used for uniaxial measurement, namely, only pressure in a single direction can be measured; however, in an actual detection environment, the capacitive sensor is required to sequentially detect pressures in different directions, that is, the capacitive sensor is required to have multi-axis measurement capability; if the capacitive sensor needs to perform multi-axis measurement, at least an independent group of capacitors needs to be arranged corresponding to each axis, and a certain interval is reserved for the groups of capacitors in consideration of the problem that cross interference is easy to occur among the groups of capacitors, so that the capacitive sensor with the multi-axis measurement function has more redundant space and low structural compactness.
Therefore, in order to meet the requirement of sequentially detecting pressures in different directions, the conventional capacitive sensor is difficult to further improve the compactness of the structure, namely, the current multi-axis capacitive sensor has the technical problem of incompact structural space.
Disclosure of Invention
The invention aims to provide an integrated multi-axis capacitive pressure sensor, which solves the problem that the current multi-axis capacitive sensor has an incompact structural space.
To achieve the purpose, the invention adopts the following technical scheme:
an integrated multi-axis capacitance pressure sensor comprises a mounting seat, wherein a first movable groove is formed in the mounting seat along a first direction, a second movable groove is formed in the side wall of the first movable groove outwards along a second direction, and the second direction is perpendicular to the first direction;
the bottom wall of the first movable groove is provided with a pole piece mounting seat, the pole piece mounting seat is provided with a first pole piece and a second pole piece which are oppositely arranged and parallel to each other, the first pole piece is arranged on the pole piece mounting seat, and the second pole piece is sleeved in the edge of the notch of the first movable groove;
an elastic part is arranged between the first pole piece and the second pole piece, a connecting hole is formed in the elastic part along the first direction, the edge of one end hole of the connecting hole is fixedly connected with the edge of the first pole piece, and the edge of the other end hole of the connecting hole is fixedly connected with the edge of the second pole piece;
an extension rod extending along the second direction is arranged in the second movable groove; the slot wall of the second movable slot corresponds to the position of the extension rod, the avoidance hole is formed in the position, corresponding to the slot wall, of the second movable slot, one end of the extension rod is connected with the pole piece mounting seat along the second direction, and the other end of the extension rod penetrates through the avoidance hole and is arranged on the outer side of the mounting seat.
Optionally, a sliding sleeve is arranged between the edges of the notch of the second pole piece and the notch of the first movable groove;
the sliding sleeve is sleeved in the edge of the notch of the first movable groove and can slide relative to the first movable groove along the first direction; the sliding sleeve is provided with a first mounting groove, and the second pole piece is sleeved in the first mounting groove.
Optionally, the sliding sleeve is made of glass fiber or ceramic.
Optionally, the device further comprises a shell part, wherein the shell part is sleeved on the outer side of the mounting seat;
a second mounting groove is formed in one end, facing the mounting seat, of the shell part, the second mounting groove is sleeved on the outer side of the mounting seat, and the groove side wall of the second mounting groove is abutted with the other end of the extension rod; a third mounting groove is formed in the groove bottom wall of the second mounting groove; the sliding sleeve is embedded in the third mounting groove.
Optionally, a positioning part is arranged at the other end of the extension rod, which is positioned outside the mounting seat, outwards in a protruding way, and a pressure spring is arranged between the positioning part and the mounting seat; the pressure spring is sleeved on the extension rod, one end of the pressure spring is abutted with the positioning part, and the other end of the pressure spring is abutted with the mounting seat.
Optionally, a sliding groove extending along the first direction is formed in the position, corresponding to the positioning part, of the shell part, a guide sleeve is sleeved outside the positioning part, and the guide sleeve is sleeved in the sliding groove and is in sliding connection with the sliding groove along the first direction.
Optionally, a ring-shaped guiding part is convexly arranged at the position of the groove wall of the second movable groove corresponding to the avoidance hole, and the extension rod penetrates through the guiding part.
Optionally, the number of the extension rods is multiple, and each extension rod is arranged around the pole piece mounting seat and extends outwards along a direction away from the pole piece mounting seat.
Optionally, the second direction includes a third direction and a fourth direction, and the third direction and the fourth direction are perpendicular to each other; the number of the extension rods is four, the extension rods are arranged at equal intervals around the pole piece mounting seat, two extension rods extend along the third direction, and the other two extension rods extend along the fourth direction.
Optionally, a third movable groove is formed in the bottom of the first movable groove; at least four third pole pieces are arranged on the bottom of the third movable groove, the third pole pieces are arranged opposite to the first pole pieces, and the third pole pieces are arranged at intervals along the edges of the first pole pieces;
wherein, one side of each extension rod extending inwards is provided with at least one third pole piece.
Compared with the prior art, the invention has the following beneficial effects:
the integrated multi-axis capacitance pressure sensor provided by the invention can at least measure the pressure in the first direction and the second direction, has the function of multi-axis measurement, and can meet the requirement of sequentially detecting the pressures in different directions; specifically, when the pressure in the first direction is detected, the test object acts on the second pole piece along the first direction, and the first pole piece is borne on the bottom wall of the first movable groove, so that the elastic part is compressed under pressure, the second pole piece moves into the first movable groove, the capacitance is changed, and the pressure in the first direction is measured; when the pressure in the second direction is detected, the test object acts on the extension rod along the second direction, so that the first pole piece is pushed along the second direction, and the second pole piece is sleeved in the edge of the notch of the first movable groove, so that the elastic part is pressed to incline relative to the first direction, the first pole piece is arranged in a dislocation mode relative to the second pole piece, the relative area of the pole piece is changed at the moment, and the pressure in the second direction is detected; in conclusion, the integrated multi-axis capacitance pressure sensor meets the requirement of sequentially detecting pressures in different directions, has the function of multi-axis testing, only inputs one group of pole pieces, avoids the problem of easy mutual cross interference between multiple groups of capacitors, does not need to reserve more redundant space, and is more compact in structure. Therefore, the integrated multi-axis capacitance pressure sensor has the advantage of compact structural space.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained from these drawings without inventive faculty for a person skilled in the art.
The structures, proportions, sizes, etc. shown in the drawings are shown only in connection with the present disclosure, and are not intended to limit the scope of the invention, since any modification, variation in proportions, or adjustment of the size, etc. of the structures, proportions, etc. should be considered as falling within the spirit and scope of the invention, without affecting the effect or achievement of the objective.
Fig. 1 is a schematic diagram of the overall structure of an integrated multi-axis capacitive pressure sensor according to the present embodiment;
fig. 2 is an exploded schematic view of the integrated multi-axis capacitive pressure sensor according to the present embodiment;
fig. 3 is a schematic top view of an integrated multi-axis capacitive pressure sensor according to the present embodiment;
FIG. 4 is a schematic cross-sectional view of FIG. 3 taken along line C-C;
FIG. 5 is a schematic view of the structure of FIG. 4 at A in a partially enlarged manner;
FIG. 6 is a schematic view of the structure of FIG. 4 at B in a partially enlarged manner;
FIG. 7 is a schematic view of a first state structure between a first pole piece and a third pole piece;
fig. 8 is a schematic diagram of a second state structure between the first pole piece and the third pole piece.
Illustration of: 10. a mounting base; 11. a first connection base; 12. a second connecting seat; 13. a third connecting seat; 101. a first movable groove; 102. a second movable groove; 103. avoidance holes; 104. a third movable groove; 105. a guide part;
20. a pole piece mounting seat; 31. a first pole piece; 32. a second pole piece; 33. an elastic part; 34. a third pole piece; 40. an extension rod; 41. a positioning part; 42. a pressure spring; 50. a sliding sleeve; 51. a first mounting groove;
60. a housing portion; 61. a second mounting groove; 62. a third mounting groove; 63. a sliding groove.
Detailed Description
In order to make the objects, features and advantages of the present invention more comprehensible, the technical solutions in the embodiments of the present invention are described in detail below with reference to the accompanying drawings, and it is apparent that the embodiments described below are only some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "top", "bottom", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. It is noted that when one component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present.
The technical scheme of the invention is further described below by the specific embodiments with reference to the accompanying drawings.
Referring to fig. 1 to 8, fig. 1 is a schematic overall structure of an integrated multi-axis capacitive pressure sensor according to the present embodiment, fig. 2 is a schematic explosion structure of the integrated multi-axis capacitive pressure sensor according to the present embodiment, fig. 3 is a schematic top view of the integrated multi-axis capacitive pressure sensor according to the present embodiment, fig. 4 is a schematic cross-sectional structure of fig. 3 along C-C, fig. 5 is a schematic partial enlarged structure of fig. 4 at a, fig. 6 is a schematic partial enlarged structure of fig. 4 at B, fig. 7 is a schematic first state structure between a first pole piece and a third pole piece, and fig. 8 is a schematic second state structure between the first pole piece and the third pole piece.
The embodiment of the invention provides an integrated multi-axis capacitance pressure sensor, which is applied to a pressure measurement scene, can be suitable for detecting pressure scenes in different directions in sequence, for example, is suitable for simulating a pressure scene of a rocker when the rocker is pressed, and is more compact in structure by improving the structure of the integrated multi-axis capacitance pressure sensor.
As shown in fig. 1 to 4, the integrated multi-axis capacitive pressure sensor provided in this embodiment includes a mounting base 10, a first movable slot 101 is provided on the mounting base 10 along a first direction, a second movable slot 102 is provided on a side wall of the first movable slot 101 along a second direction, the second direction is perpendicular to the first direction, the second direction is located on a plane perpendicular to the first direction, and specific number and angle are not limited; the pole piece mounting seat 20 is carried on the bottom wall of the first movable groove 101, that is, the pole piece mounting seat 20 can move on the bottom wall of the first movable groove 101, in order to reduce friction force between the first movable groove 101 and the pole piece mounting seat 20, the bottom wall of the first movable groove 101 is perforated or grooved, so that friction force between the bottom wall of the first movable groove 101 and the pole piece mounting seat 20 is reduced.
The pole piece mounting seat 20 is provided with a first pole piece 31 and a second pole piece 32 which are oppositely arranged and parallel to each other, the first pole piece 31 is arranged on the pole piece mounting seat 20, the second pole piece 32 is sleeved in the edge of the notch of the first movable groove 101, it can be understood that the second movable groove 102 is formed in the groove side wall of the first movable groove 101, at the moment, the whole outline of the first movable groove 101 and the second movable groove 102 is in a convex shape, and the second pole piece 32 is positioned in the notch of the first movable groove 101; an elastic part 33 is arranged between the first pole piece 31 and the second pole piece 32, a connecting hole is formed in the elastic part 33 along the first direction, one end hole edge of the connecting hole is fixedly connected with the edge of the first pole piece 31, and the other end hole edge of the connecting hole is fixedly connected with the edge of the second pole piece 32; the second movable groove 102 is provided with an extension rod 40 extending along the second direction; the position of the groove wall of the second movable groove 102 corresponding to the extension rod 40 is provided with an avoidance hole 103, one end of the extension rod 40 is connected with the pole piece mounting seat 20 along the second direction, specifically, the fixation of the extension rod 40 and the pole piece mounting seat 20 can be realized in the modes of gluing, welding and the like, and the other end of the extension rod 40 passes through the avoidance hole 103 and is arranged outside the mounting seat 10.
Specifically, the integrated multi-axis capacitive pressure sensor in this embodiment can measure pressures in at least a first direction and a second direction, has a multi-axis measurement function, and can meet the requirement of sequentially detecting pressures in different directions; for example, when the pressure in the first direction is detected, the test object acts on the second pole piece 32 along the first direction, and the first pole piece 31 is supported on the bottom wall of the first movable slot 101 through the pole piece mounting seat 20, so that the elastic portion 33 is compressed under pressure, and the second pole piece 32 moves towards the bottom wall of the first movable slot 101, so that the capacitance is changed, and the pressure in the first direction is measured; when the pressure in the second direction is detected, the test object acts on the extension rod 40 along the second direction, so that the first pole piece 31 is pushed along the second direction, and the second pole piece 32 is sleeved in the notch edge of the first movable groove 101, so that the elastic part 33 is pressed to incline relative to the first direction, the first pole piece 31 is arranged in a dislocation way relative to the second pole piece 32, the relative area of the pole pieces is changed at the moment, and the pressure in the second direction is detected; in conclusion, the integrated multi-axis capacitance pressure sensor meets the requirement of sequentially detecting pressures in different directions, has the function of multi-axis testing, only inputs one group of pole pieces, avoids the problem of easy mutual cross interference between multiple groups of capacitors, does not need to reserve more redundant space, and is more compact in structure. Therefore, the integrated multi-axis capacitance pressure sensor has the advantage of compact structural space.
In this embodiment, the elastic portion 33 includes a supporting portion formed by thermoplastic polyurethane elastomer (TPU), polystyrene (EPS), polyvinyl alcohol (PVA) and other materials, and the supporting portion is hollow, i.e. forms a surrounding structure, and serves to connect the first pole piece 31 and the second pole piece 32, and the edge of the supporting portion is correspondingly connected with the edge of the pole piece, so as to meet the requirement of compression in the first direction after being pressed or inclination relative to the first direction after being pressed; the lower side of the support portion is connected to the first pole piece 31 through a lower flexible film, and the upper side of the support portion is connected to the second pole piece 32 through an upper flexible film, wherein the flexible film may be a polyester film (PET) or a polyimide film (PI). Additionally, a sealed cavity may be formed among the elastic portion 33, the first pole piece 31 and the second pole piece 32, and the sealed cavity is filled with a capacitance medium, which may be a liquid or a gas, and is not limited in particular.
Further, as shown in fig. 4 and 5, a sliding sleeve 50 is disposed between the second pole piece 32 and the notch edge of the first movable slot 101; the sliding sleeve 50 is sleeved in the notch edge of the first movable groove 101 and can slide relative to the first movable groove 101 along the first direction; the sliding sleeve 50 is provided with a first mounting groove 51, and the second pole piece 32 is sleeved in the first mounting groove 51. It can be appreciated that the sliding sleeve 50 is sleeved outside the second pole piece 32, so that sliding friction between the second pole piece 32 and the mounting seat 10 can be avoided, the second pole piece 32 is protected, and meanwhile, the second pole piece 32 is not influenced to move along the first direction. In this embodiment, the sliding sleeve 50 is made of glass fiber or ceramic, at this time, the sliding sleeve 50 has insulation property and electromagnetic signal isolation property, on one hand, the sliding sleeve 50 can ensure that the second pole piece 32 is short-circuited due to the fact that the second pole piece is in contact with other parts by mistake, and on the other hand, the sliding sleeve 50 can isolate clutters, so that the accuracy and stability of pressure measurement are ensured.
Further, as shown in fig. 4 to 5, the integrated multi-axis capacitive pressure sensor in the present embodiment further includes a housing portion 60, where the housing portion 60 is sleeved outside the mounting seat 10; a second mounting groove 61 is formed in one end of the shell part 60 facing the mounting seat 10, the second mounting groove 61 is sleeved on the outer side of the mounting seat 10, and the groove side wall of the second mounting groove 61 is abutted with the other end of the extension rod 40; a third mounting groove 62 is formed in the bottom wall of the second mounting groove 61; the sliding sleeve 50 is embedded in the third mounting groove 62. The housing portion 60 is used as a component for connecting the integrated multi-axis capacitive pressure sensor with the test object, the housing portion 60 can apply the force applied to the test object along the first direction to the second pole piece 32 through the third mounting groove 62, and also can apply the force applied to the test object along the second direction to the first pole piece 31 through the second mounting groove 61 and the extension rod 40, so that the integrated multi-axis capacitive pressure sensor has higher integrity, and the integrated multi-axis capacitive pressure sensor has more compact structure.
In this embodiment, as shown in fig. 4 to 6, the other end of the extension rod 40 located outside the mounting seat 10 is provided with a positioning portion 41 protruding outwards, and a compression spring 42 is provided between the positioning portion 41 and the mounting seat 10; the compression spring 42 is sleeved on the extension rod 40, one end of the compression spring 42 is abutted against the positioning part 41, and the other end of the compression spring 42 is abutted against the mounting seat 10. It can be appreciated that by the arrangement of the compression spring 42, after the external force is removed from the integrated multi-axis capacitive pressure sensor, the extension rod 40, the pole piece mounting seat 20 and the first pole piece 31 are reset to prepare for the next test.
As an alternative embodiment, as shown in fig. 4 and 6, a sliding groove 63 extending along the first direction is formed at a position of the housing portion 60 corresponding to the positioning portion 41, and a guide sleeve (not shown) is sleeved on the positioning portion 41, and is sleeved in the sliding groove 63 and slidingly connected with the sliding groove 63 along the first direction. It can be appreciated that, through the arrangement of the guide sleeve and the sliding groove 63, the housing portion 60 can be more conveniently sleeved on the outer sides of the mounting seat 10 and the extension rod 40 in the mounting process, so that the assembly of the integrated multi-axis capacitive pressure sensor is simpler.
As an alternative embodiment, as shown in fig. 4 and 6, a guide portion 105 having a ring shape is protruded from the groove wall of the second movable groove 102 corresponding to the position of the escape hole 103, and the extension rod 40 passes through the guide portion 105. By the provision of the guide portion 105, the deflection of the extension rod 40 can be further prevented, so that the movement of the extension rod 40 in the second direction is more stable.
In the present embodiment, the number of the extension rods 40 is plural, and each extension rod 40 is disposed around the pole piece mounting base 20 and extends outwards along a direction away from the pole piece mounting base 20. Specifically, the number of the extension rods 40 in the embodiment is four, and the angle between two adjacent extension rods 40 is 90 degrees, that is, the integrated multi-axis capacitive pressure sensor can detect the thrust in at least four directions of up, down, left and right, so as to meet the requirement of rocker simulation detection; it will be appreciated that the number of extension bars 40 may be eight, and the angle between two adjacent extension bars 40 is 45 °, i.e. the integrated multi-axis capacitive pressure sensor is capable of detecting thrust forces in eight directions in total, up, down, left, right, up-left, down-right and up-right.
On the basis of the above-described embodiment in which the number of the extension bars 40 is four, as shown in fig. 7, specifically, the second direction includes a third direction and a fourth direction, which are disposed perpendicular to each other; the number of the extension rods 40 is four, and the extension rods are arranged at equal intervals around the pole piece mounting seat 20, wherein two extension rods 40 extend along the third direction, and the other two extension rods 40 extend along the fourth direction.
Further, as shown in fig. 2, 4, 7 and 8, a third movable groove 104 is formed at the bottom of the first movable groove 101; at least four third pole pieces 34 are arranged on the bottom of the third movable groove 104, the third pole pieces 34 are arranged opposite to the first pole piece 31, and the third pole pieces 34 are arranged at intervals along the edge of the first pole piece 31; wherein, at least one third pole piece 34 is arranged on one side of each extension rod 40 extending inwards. As shown in fig. 7 and 8, the number of the third pole pieces 34 may be four, at this time, the number of the third pole pieces 34 is matched with the number of the extension rods 40, when the first pole piece 31 is pushed in the rightward direction, only the relative area between the third pole piece 34 on the right side and the first pole piece 31 remains unchanged, the relative areas between the rest of the third pole pieces 34 and the first pole piece 31 are reduced, then the capacitance value between each third pole piece 34 and the first pole piece 31 is sequentially detected, and the final moving direction of the test object is determined by determining which third pole piece 34 and the flat plate capacitance formed by the first pole piece 31 are unchanged, so as to determine whether the test object moves as the preset condition, thereby meeting the test requirement of the test object. In other alternative embodiments, for example, when the number of the third pole pieces 34 is eight, it is still possible to determine whether the moving direction of the test object is qualified by determining the capacitance change corresponding to each third pole piece 34.
It should be noted that, in this embodiment, the first pole piece 31, the second pole piece 32 and the third pole piece 34 are all connected to the same circuit, and the circuit is used for detecting the capacitance value of the formed capacitor, so as to be convenient for judging the pressure suffered by the test object; wherein, only the first pole piece 31 is continuously connected with a circuit, the second pole piece 32 and the third pole piece 34 select one of the connected circuits through a composite selection circuit switch, and the connected circuits and the first pole piece 31 form a plate capacitor; the selection circuit can realize the selection of one access circuit of the second pole piece 32 and the third pole pieces 34 by respectively connecting the second pole piece 32 and the third pole pieces 34 in series with a disconnection switch, thereby meeting the detection requirement of the integrated multi-axis capacitive pressure sensor for sequentially detecting acting forces in all directions.
In this embodiment, as shown in fig. 2, the mounting base 10 is composed of a first connecting base 11, a second connecting base 12 and a third connecting base 13, the first connecting base 11, the second connecting base 12 and the third connecting base 13 are sequentially arranged from bottom to top, the first connecting base 11, the second connecting base 12 and the third connecting base 13 are fixedly connected through screws, meanwhile, the first connecting base 11, the second connecting base 12 and the third connecting base 13 are all annular, a third movable slot 104 is formed on the first connecting base 11, namely, a third pole piece 34 is mounted on the first connecting base 11; the second connecting seat 12 is provided with a second movable groove 102, namely, the structures of the first pole piece 31, the second pole piece 32, the elastic part 33, the pole piece mounting seat 20, the extension rod 40 and the like can be preassembled on the second connecting seat 12; after the second connecting seat 12 is assembled with the first connecting seat 11, the third connecting seat 13 provided with a through hole (namely, the notch part of the first movable groove 101) can be connected to the second connecting seat 12, and the aperture of the through hole is smaller than the notch of the second movable groove 102, so that a space with a convex shape is formed, and the installation of the installation seat 10 is completed, so that the installation seat has the advantages of simplicity and convenience in installation.
In summary, the integrated multi-axis capacitive pressure sensor provided in this embodiment has the capability of multi-directional pressure detection, and has the advantages of compact structure, strong noise immunity, high stability, and the like.
The above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. The integrated multi-axis capacitance pressure sensor is characterized by comprising a mounting seat (10), wherein a first movable groove (101) is formed in the mounting seat (10) along a first direction, a second movable groove (102) is formed in the side wall of the first movable groove (101) outwards along a second direction, and the second direction is perpendicular to the first direction;
the bottom wall of the first movable groove (101) is provided with a pole piece mounting seat (20), the pole piece mounting seat (20) is provided with a first pole piece (31) and a second pole piece (32) which are oppositely arranged and parallel to each other, the first pole piece (31) is arranged on the pole piece mounting seat (20), and the second pole piece (32) is sleeved in the edge of the notch of the first movable groove (101);
an elastic part (33) is arranged between the first pole piece (31) and the second pole piece (32), a connecting hole is formed in the elastic part (33) along the first direction, one end hole edge of the connecting hole is fixedly connected with the edge of the first pole piece (31), and the other end hole edge of the connecting hole is fixedly connected with the edge of the second pole piece (32);
an extension rod (40) extending along the second direction is arranged in the second movable groove (102); the groove wall of the second movable groove (102) corresponds to the position of the extension rod (40) and is provided with an avoidance hole (103), one end of the extension rod (40) is connected with the pole piece mounting seat (20) along the second direction, and the other end of the extension rod (40) penetrates through the avoidance hole (103) and is arranged on the outer side of the mounting seat (10).
2. An integrated multi-axis capacitive pressure sensor according to claim 1, characterized in that a sliding sleeve (50) is arranged between the second pole piece (32) and the notch edge of the first movable groove (101);
the sliding sleeve (50) is sleeved in the notch edge of the first movable groove (101) and can slide relative to the first movable groove (101) along the first direction; the sliding sleeve (50) is provided with a first mounting groove (51), and the second pole piece (32) is sleeved in the first mounting groove (51).
3. An integrated multi-axis capacitive pressure sensor according to claim 2, characterized in that the material of the sliding sleeve (50) is glass fiber or ceramic.
4. The integrated multi-axis capacitive pressure sensor of claim 2 further comprising a housing portion (60), the housing portion (60) being sleeved outside the mounting base (10);
a second mounting groove (61) is formed in one end, facing the mounting seat (10), of the shell part (60), the second mounting groove (61) is sleeved on the outer side of the mounting seat (10), and the groove side wall of the second mounting groove (61) is abutted with the other end of the extension rod (40); a third mounting groove (62) is formed in the groove bottom wall of the second mounting groove (61); the sliding sleeve (50) is embedded in the third mounting groove (62).
5. The integrated multi-axis capacitive pressure sensor according to claim 4, wherein a positioning part (41) is arranged at the other end of the extension rod (40) positioned outside the mounting seat (10) in an outward protruding way, and a compression spring (42) is arranged between the positioning part (41) and the mounting seat (10); the pressure spring (42) is sleeved on the extension rod (40), one end of the pressure spring (42) is abutted to the positioning part (41), and the other end of the pressure spring (42) is abutted to the mounting seat (10).
6. The integrated multi-axis capacitive pressure sensor of claim 5, wherein a sliding groove (63) extending along the first direction is formed in the housing portion (60) at a position corresponding to the positioning portion (41), and a guide sleeve is sleeved outside the positioning portion (41), is sleeved in the sliding groove (63), and is slidably connected with the sliding groove (63) along the first direction.
7. The integrated multi-axis capacitive pressure sensor according to claim 5, wherein a guide portion (105) having a ring shape is protruded at a position of a groove wall of the second movable groove (102) corresponding to the avoiding hole (103), and the extension rod (40) passes through the guide portion (105).
8. The integrated multi-axis capacitive pressure sensor of claim 4 wherein the number of extension rods (40) is plural, and each extension rod (40) is disposed around the pole piece mount (20) and extends outwardly in a direction away from the pole piece mount (20), respectively.
9. The integrated multi-axis capacitive pressure sensor of claim 8 wherein the second direction comprises a third direction and a fourth direction, the third direction and the fourth direction being disposed perpendicular to each other; the number of the extension rods (40) is four, the extension rods are arranged at equal intervals around the pole piece mounting seat (20), two extension rods (40) extend along the third direction, and the other two extension rods (40) extend along the fourth direction.
10. The integrated multi-axis capacitive pressure sensor of claim 9 wherein a third active slot (104) is formed in the bottom of the first active slot (101); at least four third pole pieces (34) are arranged at the bottom of the third movable groove (104), the third pole pieces (34) are arranged opposite to the first pole pieces (31), and the third pole pieces (34) are arranged at intervals along the edges of the first pole pieces (31);
wherein, at least one third pole piece (34) is arranged on one side of each extension rod (40) extending inwards.
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