CN116816637A - Sealing gas discharge recycling system of reciprocating hydrogen compressor - Google Patents
Sealing gas discharge recycling system of reciprocating hydrogen compressor Download PDFInfo
- Publication number
- CN116816637A CN116816637A CN202310949488.1A CN202310949488A CN116816637A CN 116816637 A CN116816637 A CN 116816637A CN 202310949488 A CN202310949488 A CN 202310949488A CN 116816637 A CN116816637 A CN 116816637A
- Authority
- CN
- China
- Prior art keywords
- cooler
- machine
- stage
- gas
- sealing ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 title claims abstract description 134
- 239000001257 hydrogen Substances 0.000 title claims abstract description 65
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 65
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 238000007789 sealing Methods 0.000 title claims abstract description 38
- 238000004064 recycling Methods 0.000 title claims abstract description 22
- 238000012856 packing Methods 0.000 claims abstract description 50
- 239000002912 waste gas Substances 0.000 claims abstract description 16
- 238000011084 recovery Methods 0.000 claims description 77
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 36
- 238000001179 sorption measurement Methods 0.000 claims description 31
- 239000000110 cooling liquid Substances 0.000 claims description 30
- 230000008929 regeneration Effects 0.000 claims description 26
- 238000011069 regeneration method Methods 0.000 claims description 26
- 230000007246 mechanism Effects 0.000 claims description 21
- 239000002808 molecular sieve Substances 0.000 claims description 13
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 13
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000007599 discharging Methods 0.000 abstract description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 3
- 229920005591 polysilicon Polymers 0.000 abstract description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 35
- 229910052757 nitrogen Inorganic materials 0.000 description 17
- 239000002826 coolant Substances 0.000 description 15
- 239000005046 Chlorosilane Substances 0.000 description 14
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 14
- 238000000926 separation method Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 7
- 239000012071 phase Substances 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 239000000945 filler Substances 0.000 description 6
- 150000002431 hydrogen Chemical class 0.000 description 6
- 239000007791 liquid phase Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 230000005465 channeling Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 239000002440 industrial waste Substances 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/57—Seals
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressor (AREA)
Abstract
The invention discloses a system for discharging and recycling seal gas of a reciprocating hydrogen compressor, which relates to the technical field of polysilicon production and mainly aims to reduce the phenomenon of mutual cross flow of seal gas, reduce the treatment capacity of seal waste gas and reduce the production cost. The main technical scheme of the invention is as follows: the utility model provides a reciprocating type hydrogen compressor seals gas emission recycle system, this system includes: a first-segment packing ring and a second-segment packing ring; one end of the section of packing sealing ring is close to the compressor cylinder, and the other end of the section of packing sealing ring is provided with a first-stage air leakage discharge pipe; one end of the two-section packing sealing ring is close to the other end of the one-section packing sealing ring, a second-stage air inlet pipe is arranged in the middle of the two-section packing sealing ring, and a second-stage air leakage discharge pipe is arranged at the other end of the two-section packing sealing ring.
Description
Technical Field
The invention relates to the technical field of polysilicon production, in particular to a gas sealing, discharging and recycling system of a reciprocating hydrogen compressor.
Background
At present, labyrinth packing seals are used for reciprocating hydrogen compressors in the field of polysilicon, and the design is that a multi-layer packing seal ring is used for gradually reducing pressure, and after the pressure is reduced to a certain pressure, the pressure at a packing position is kept constant by using a mechanical seal gas stamping, so that gas phase is prevented from being shifted into a lower mechanical seal packing. The machine seal of this mode needs to use pure hydrogen as first level machine seal gas, and pure nitrogen is second, tertiary machine seal gas, and machine seal gas demand type is many, pressure is higher, and machine seal gas leakage is big, and this part leaks gas and causes the material extravagant, and machine seal waste gas treatment cost is high, finally leads to manufacturing cost high.
The reciprocating hydrogen compressor uses three sections of packing seals, the high pressure side close to the cylinder of the reciprocating hydrogen compressor is a first section of hydrogen seal, the second section of nitrogen seal is arranged next to the first section of hydrogen seal, the pressure is relieved again through a separation cavity, the last section of the pressure is a nitrogen seal, the pressure is relieved through the three sections of seals, and the pressure is relieved through the separation cavity, so that the piston rod of the reciprocating hydrogen compressor is sealed. The machine seal in the mode needs to use pure hydrogen as first-stage machine seal gas, and pure nitrogen is second-stage and third-stage machine seal gas.
The reciprocating hydrogen compressor uses three sections of packing seals, the high pressure side close to the cylinder of the reciprocating hydrogen compressor is a first section of hydrogen seal, the second section of nitrogen seal is arranged next to the first section of hydrogen seal, the pressure is relieved again through a separation cavity, the last section of the pressure is a nitrogen seal, the pressure is relieved through the three sections of seals, and the pressure is relieved through the separation cavity, so that the piston rod of the reciprocating hydrogen compressor is sealed. The machine seal in the mode needs to use pure hydrogen as first-stage machine seal gas, and pure nitrogen is second-stage and third-stage machine seal gas. The first-stage mechanical seal gas pressure and the second-stage mechanical seal gas pressure are required to be higher, the mechanical seal gas pressure and the pressure relief gas pressure are high, the phenomenon that the mechanical seal gas is mutually flee easily occurs, the leakage amount is increased due to the high pressure, the downstream working section treatment amount is larger, and part of available substance components are difficult to recycle.
Disclosure of Invention
In view of the above, the embodiment of the invention provides a system for discharging, recycling and utilizing seal gas of a reciprocating hydrogen compressor, which mainly aims to reduce the phenomenon of mutual cross flow of seal gas, reduce the treatment capacity of seal gas and reduce the production cost.
In order to achieve the above purpose, the present invention mainly provides the following technical solutions:
the embodiment of the invention provides a system for discharging, recycling and reusing seal gas of a reciprocating hydrogen compressor, which comprises the following components: a first-segment packing ring and a second-segment packing ring;
one end of the first section of packing sealing ring is close to the compressor cylinder, and the other end of the first section of packing sealing ring is provided with a first-stage air leakage discharge pipe which is connected with the first-stage waste gas recovery part;
one end of the second-section packing ring is close to the other end of the first-section packing ring, a second-stage air inlet pipe is arranged in the middle of the second-section packing ring, a second-stage air leakage discharge pipe is arranged at the other end of the second-section packing ring, and the second-stage air leakage discharge pipe is connected to the second-stage waste gas recovery part.
The aim and the technical problems of the invention can be further realized by adopting the following technical measures.
Optionally, the first-stage waste gas recovery part comprises a first-stage mechanical seal gas buffer tank, a pre-mechanical condenser, a first-stage mechanical seal gas recovery compressor, a post-mechanical condenser, a PSA molecular sieve pressure swing adsorption mechanism, a low-pressure hydrogen compressor and a high-pressure hydrogen compressor which are sequentially connected, and a first-stage gas leakage discharge pipe is connected to the first-stage mechanical seal gas buffer tank.
Optionally, the after-machine condenser comprises a vertical condenser and a horizontal condenser, and the first-stage mechanical seal gas recovery compressor, the vertical condenser, the horizontal condenser and the PSA molecular sieve pressure swing adsorption mechanism are sequentially connected.
Optionally, the device further comprises a pre-machine condensate recovery tank and a post-machine condensate recovery tank, wherein the first-stage mechanical seal gas buffer tank and the pre-machine condenser are respectively connected to the pre-machine condensate recovery tank through first condensate pipes, and the vertical condenser and the horizontal condenser are respectively connected to the post-machine condensate recovery tank through second condensate pipes.
Optionally, the second-stage waste gas recovery part comprises a second-stage mechanical seal gas buffer tank, a pre-machine cooler, a second-stage mechanical seal gas recovery compressor, a post-machine cooler, an activated carbon adsorption mechanism and a tail gas spray tower which are sequentially connected, and a second-stage air leakage discharge pipe is connected to the second-stage mechanical seal gas buffer tank.
Optionally, the after-cooler comprises a vertical cooler and a horizontal cooler, and the secondary mechanical seal gas recovery compressor, the vertical cooler, the horizontal cooler and the activated carbon adsorption mechanism are sequentially connected.
Optionally, the device further comprises a pre-machine cooling liquid recovery tank and a post-machine cooling liquid recovery tank, wherein the secondary mechanical seal air buffer tank and the pre-machine cooler are respectively connected to the pre-machine cooling liquid recovery tank through a first cooling liquid pipe, and the vertical cooler and the horizontal cooler are respectively connected to the post-machine cooling liquid recovery tank through a second cooling liquid pipe.
Optionally, the active carbon adsorption mechanism includes active carbon adsorption tower, regeneration primary cooler, regeneration secondary cooler and regeneration coolant liquid recovery jar, and active carbon adsorption tower's lower extreme, regeneration primary cooler and regeneration secondary cooler connect gradually, and regeneration primary cooler and regeneration secondary cooler are respectively through third coolant liquid coupling in coolant liquid recovery jar, and regeneration secondary cooler passes through gas phase back flow connection in second grade machine seal gas buffer tank.
By means of the technical scheme, the invention has at least the following advantages:
the system reduces the use types of mechanical seal gas, and only uses nitrogen to seal the two-section packing ring; the first-stage packing sealing ring does not use sealing gas, hydrogen is directly decompressed to the downstream working section for recovery treatment, and after the first-stage packing sealing ring is decompressed, the pressure of the second-stage packing sealing ring is reduced, so that the air inlet pressure of the second-stage air inlet pipe of the second-stage packing sealing ring is reduced, and the integral pressure of the mechanical seal part is reduced.
Because the pressure of the mechanical seal part is reduced, the phenomenon of mutual channeling of mechanical seal gas is reduced, the mechanical seal gas leakage is controlled in a grading manner, and the recycling of part of available leakage materials is facilitated, so that the material recycling rate is improved.
Meanwhile, the primary mechanical seal gas is not used, the pressure of the secondary mechanical seal gas (nitrogen) is reduced, the flux is reduced, the types and the amounts of the mechanical seal gas used by the whole mechanical seal part are reduced, the material types and the material investment are reduced, the treatment capacity of downstream waste gas is reduced, and the production cost is comprehensively reduced.
Meanwhile, the second-level gas leakage discharge pipe is positioned at the far end of the first-level filler sealing ring, the further the second-level gas leakage discharge pipe is away from the first-level gas leakage discharge pipe, the more filler sealing rings need to pass through, and the hydrogen leakage quantity is reduced.
Drawings
FIG. 1 is a schematic axial sectional view of a compressor seal structure of a reciprocating hydrogen compressor according to an embodiment of the present invention;
FIG. 2 is an axial view of a compressor seal structure of a reciprocating hydrogen compressor according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a first-stage exhaust gas recovery unit according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a secondary exhaust gas recovery unit according to an embodiment of the present invention.
Reference numerals in the drawings of the specification include: the device comprises a first-stage filler sealing ring 1, a second-stage filler sealing ring 2, a first-stage air leakage discharge pipe 3, a second-stage air inlet pipe 4, a second-stage air leakage discharge pipe 5, a first-stage mechanical seal air buffer tank 6, a pre-mechanical condenser 7, a first-stage mechanical seal air recovery compressor 8, a post-mechanical seal air recovery tank 22, a PSA molecular sieve pressure swing adsorption mechanism 10, a low-pressure hydrogen compressor 11, a high-pressure hydrogen compressor 12, a vertical condenser 901, a horizontal condenser 902, a pre-mechanical condensate recovery tank 13, a post-mechanical condensate recovery tank 14, a first condensate pipe 15, a second condensate pipe 16, a second mechanical seal air buffer tank 17, a pre-mechanical cooler 18, a second mechanical seal air recovery compressor 19, a post-mechanical cooler 20, a vertical cooler 2001, a horizontal cooler 2002, a pre-mechanical seal coolant recovery tank 21, a post-mechanical coolant recovery tank 22, a first coolant pipe 23, a second coolant pipe 24, an activated carbon adsorption tower 25, a regenerated first-stage cooler 26, a regenerated second-stage cooler 27, a regenerated coolant recovery tank 28, a third coolant pipe 29 and a gas-phase return pipe 30.
Detailed Description
In order to further describe the technical means and effects adopted for achieving the preset aim of the invention, the following detailed description refers to the specific implementation, structure, characteristics and effects according to the application of the invention with reference to the accompanying drawings and preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.
The invention is described in further detail below with reference to the drawings and examples.
As shown in fig. 1 and 2, an embodiment of the present invention provides a system for recycling seal gas emission of a reciprocating hydrogen compressor, which includes: a first section of packing ring 1 and a second section of packing ring 2;
one end of the section of packing sealing ring 1 is close to the compressor cylinder, the other end is provided with a first-stage air leakage discharge pipe 3, and the first-stage air leakage discharge pipe 3 is connected with a first-stage waste gas recovery part;
one end of the second-stage packing ring 2 is close to the other end of the first-stage packing ring 1, the middle part of the second-stage packing ring 2 is provided with a second-stage air inlet pipe 4, the other end of the second-stage packing ring 2 is provided with a second-stage air leakage discharge pipe 5, and the second-stage air leakage discharge pipe 5 is connected to the second-stage waste gas recovery part.
The working process of the reciprocating hydrogen compressor seal gas emission recycling system is as follows:
the system reduces the use types of mechanical seal gas, and only uses nitrogen to seal the two-section packing ring 2; the first-stage packing sealing ring 1 does not use sealing gas, hydrogen is directly decompressed to a downstream working section for recovery treatment, and after the first-stage packing sealing ring 1 is decompressed, the pressure of the second-stage packing sealing ring 2 is reduced, so that the air inlet pressure of the second-stage air inlet pipe 4 of the second-stage packing sealing ring 2 is reduced, and the integral pressure of the mechanical seal part is reduced.
Because the pressure of the mechanical seal part is reduced, the phenomenon of mutual channeling of mechanical seal gas is reduced, the mechanical seal gas leakage is controlled in a grading manner, and the recycling of part of available leakage materials is facilitated, so that the material recycling rate is improved.
Meanwhile, the primary mechanical seal gas is not used, the pressure of the secondary mechanical seal gas (nitrogen) is reduced, the flux is reduced, the types and the amounts of the mechanical seal gas used by the whole mechanical seal part are reduced, the material types and the material investment are reduced, the treatment capacity of downstream waste gas is reduced, and the production cost is comprehensively reduced.
Meanwhile, the second-stage leakage discharge pipe 5 is positioned at the far end of the first-stage filler sealing ring 1, the farther the second-stage leakage discharge pipe 5 is away from the first-stage leakage discharge pipe 3, the more filler sealing rings need to pass through to reduce the leakage amount of hydrogen.
In the technical scheme of the invention, the mechanical seal structure of the system reduces the phenomenon of mutual cross flow of mechanical seal gas, reduces the treatment capacity of mechanical seal waste gas and reduces the production cost.
Specifically, the primary blow-by gas discharge pipe 3 is connected to the primary exhaust gas recovery unit, and the secondary blow-by gas discharge pipe 5 is connected to the secondary exhaust gas recovery unit.
Specifically, the primary blow-by gas discharge pipe 3, the secondary air intake pipe 4, and the secondary blow-by gas discharge pipe 5 are radially disposed in a solid portion of the packing casing.
As shown in fig. 3, in the specific embodiment, the primary exhaust gas recovery section includes a primary mechanical seal gas buffer tank 6, a pre-mechanical condenser 7, a primary mechanical seal gas recovery compressor 8, a post-mechanical condenser 9, a PSAPSA molecular sieve pressure swing adsorption mechanism 10, a low-pressure hydrogen compressor 11 and a high-pressure hydrogen compressor 12, which are sequentially connected, and the primary leakage gas discharge pipe 3 is connected to the primary mechanical seal gas buffer tank 6.
In this embodiment, specifically, high-purity hydrogen in the compressor cylinder is depressurized and leaked to the first-stage leakage discharge pipe 3 through the first-stage packing seal ring 1 (the pressure relief pressure is 50-80KPa, after the pressure relief, the whole compression of the second-stage packing seal ring 2 is lower, and after one-time nitrogen sealing, the effect of sealing and isolating hydrogen can be achieved under the bidirectional effect of the seal ring). During use, the nitrogen may be depressurized into the first-stage leakage discharge pipe 3, resulting in that the hydrogen in the first-stage leakage discharge pipe 3 contains a part of nitrogen.
The primary air leakage discharge pipe 3 is used for entering the primary mechanical seal air buffer tank 6 to recycle hydrogen, the hydrogen is condensed by the pre-mechanical condenser 7 in sequence, the primary mechanical seal air recycling compressor 8 is pressurized, and the post-mechanical condenser 9 is pressurized and then condensed, so that the content of other chlorosilane gases in the mechanical seal recycling hydrogen is reduced, and the PSASA molecular sieve pressure swing adsorption mechanism 10 is protected to run for a long time; the mechanical seal recovered hydrogen is adsorbed by the PSAPSA molecular sieve pressure swing adsorption mechanism 10 to remove nitrogen, pure hydrogen is produced, a part of pure hydrogen is used for back blowing the PSA molecular sieve, so that nitrogen adsorbed in the PSA molecular sieve is blown out of the molecular sieve, the molecular sieve continuously has the nitrogen removal capacity, the part is used as waste gas to enter the next process for treatment, the other part of pure hydrogen continuously passes through the low-pressure hydrogen compressor 11 and the high-pressure hydrogen compressor 12, and the part of hydrogen is recycled.
Wherein, the hydrogen discharged from the first-stage leakage discharge pipe 3 of the low-pressure hydrogen compressor 11 and the high-pressure hydrogen compressor 12 is converged to the inlet of the first-stage mechanical seal gas buffer tank 6.
As shown in fig. 3, in the specific embodiment, the after-machine condenser 9 includes a vertical condenser 901 and a horizontal condenser 902, and the first-stage mechanically-sealed gas recovery compressor 8, the vertical condenser 901, the horizontal condenser 902 and the PSAPSA molecular sieve pressure swing adsorption mechanism 10 are sequentially connected.
In this embodiment, specifically, the mechanical seal recovery hydrogen pressurized by the first-stage mechanical seal gas recovery compressor 8 enters the vertical condenser 901 first, most of chlorosilane in the recovery hydrogen is condensed and liquefied by the vertical condenser 901, and less part of chlorosilane is condensed and liquefied by the horizontal condenser 902, so that liquefaction and separation of most of chlorosilane in the recovery hydrogen are completed.
Specifically, the first-stage mechanical seal leakage gas of the compressor sequentially passes through tube passes of the pre-machine condenser 7, the vertical condenser 901 and the horizontal condenser 902, the shell passes of the pre-machine condenser 7 and the vertical condenser 901 respectively use ethylene glycol as cooling medium, and the shell passes of the horizontal condenser 902 use freon as cooling medium.
As shown in fig. 3, in the specific embodiment, the device further comprises a pre-machine condensate recovery tank 13 and a post-machine condensate recovery tank 14, wherein the first-stage mechanical seal gas buffer tank 6 and the pre-machine condenser 7 are respectively connected to the pre-machine condensate recovery tank 13 through a first condensate pipe 15, and the vertical condenser 901 and the horizontal condenser 902 are respectively connected to the post-machine condensate recovery tank 14 through a second condensate pipe 16.
In the embodiment, the liquid phase components in the first-stage mechanical seal gas buffer tank 6 and the pre-machine condenser 7 enter the pre-machine condensate recovery tank 13 through the first condensate pipe 15; the liquid phase components in the vertical condenser 901 and the horizontal condenser 902 enter the post-machine condensate recovery tank 14 through the second condensate pipe 16, so that gas-liquid separation in the recovered hydrogen is realized.
As shown in fig. 4, in the specific embodiment, the secondary exhaust gas recovery unit includes a secondary mechanical seal gas buffer tank 17, a pre-mechanical cooler 18, a secondary mechanical seal gas recovery compressor 19, an after-mechanical cooler 20, an activated carbon adsorption mechanism, and an exhaust gas spray tower, which are sequentially connected, and the secondary air leakage discharge pipe 5 is connected to the secondary mechanical seal gas buffer tank 17.
In this embodiment, specifically, the main nitrogen gas discharged from the second-stage leakage gas discharge pipe to the second-stage mechanical seal gas buffer tank 17 contains a small amount of chlorosilane gas, the partial gas is subjected to gas-liquid separation by the pre-mechanical seal gas recovery compressor 19, the pressurized gas is cooled by the post-mechanical seal gas recovery compressor 20 to realize the majority of gas-liquid separation, then the gas is adsorbed by the activated carbon adsorption mechanism to obtain chlorosilane gas, the remaining uncooled gas is used as industrial waste gas and enters the tail gas spray tower, the leaching neutralization and the air discharge are performed (the adsorbed gas also contains a small amount of chlorosilane, and in the tail gas spray tower, the chlorosilane is subjected to water washing neutralization reaction and then alkali washing neutralization reaction).
As shown in fig. 4, in the specific embodiment, the after-cooler 20 includes a vertical cooler 2001 and a horizontal cooler 2002, and the two-stage mechanically-sealed gas recovery compressor 19, the vertical cooler 2001, the horizontal cooler 2002, and the activated carbon adsorption mechanism are connected in this order.
In this embodiment, specifically, the gas pressurized by the secondary mechanical seal gas recovery compressor 19 first enters the vertical cooler 2001, most of the chlorosilane in the gas is condensed and liquefied by the vertical cooler 2001, and less part of the chlorosilane is condensed and liquefied by the horizontal cooler 2002, so that the liquefaction and separation of most of the chlorosilane in the gas are completed, and the load of the activated carbon adsorption mechanism is reduced.
Specifically, the second-stage mechanical seal leakage gas of the compressor sequentially passes through tube passes of the pre-cooler 18, the vertical cooler 2001 and the horizontal cooler 2002, the shell passes of the pre-cooler 18 and the vertical cooler 2001 respectively use ethylene glycol as cooling medium, and the shell passes of the horizontal cooler 2002 use freon as cooling medium.
As shown in fig. 4, in the specific embodiment, the air conditioner further comprises a pre-machine cooling liquid recovery tank 21 and a post-machine cooling liquid recovery tank 22, wherein the secondary air seal buffer tank 17 and the pre-machine cooler 18 are respectively connected to the pre-machine cooling liquid recovery tank 21 through a first cooling liquid pipe 23, and the vertical cooler 2001 and the horizontal cooler 2002 are respectively connected to the post-machine cooling liquid recovery tank 22 through a second cooling liquid pipe 24.
In the present embodiment, the liquid phase components in the secondary air seal buffer tank 17 and the pre-machine cooler 18 enter the pre-machine coolant recovery tank 21 through the first coolant pipe 23; the liquid phase components in the vertical cooler 2001 and the horizontal cooler 2002 enter the post-machine cooling liquid recovery tank 22 through the second cooling liquid pipe 24, and the gas phase components enter the activated carbon adsorption mechanism to realize gas-liquid separation.
As shown in fig. 4, in the specific embodiment, the activated carbon adsorption mechanism comprises an activated carbon adsorption tower 25, a primary regeneration cooler 26, a secondary regeneration cooler 27 and a regenerated cooling liquid recovery tank 28, the lower end of the activated carbon adsorption tower 25, the primary regeneration cooler 26 and the secondary regeneration cooler 27 are sequentially connected, the primary regeneration cooler 26 and the secondary regeneration cooler 27 are respectively connected with the regenerated cooling liquid recovery tank 28 through a third cooling liquid pipe 29, and the secondary regeneration cooler 27 is connected with the secondary mechanical seal buffer tank 17 through a gas phase return pipe 30.
In this embodiment, specifically, the activated carbon adsorption tower 25 includes three towers in parallel, namely, a tower a, a tower B and a tower C, the tower a adsorbs, the tower B regenerates, the tower C cools for standby, the three towers are replaced in turn, when any one of the three towers is in the regeneration process, the regenerated gas after back blowing the adsorption tower carries chlorosilane to enter the regeneration primary cooler 26 and the regeneration secondary cooler 27 in turn, the condensed liquefied chlorosilane therein is converged to the cooling liquid recovery tank through the third cooling liquid pipe 29, and the gas phase component which is not cooled enters the secondary mechanical seal gas buffer tank 17 again through the gas phase return pipe 30 and reenters the activated carbon adsorption tower 25, so that hydrogen chloride and chlorosilane in the regenerated gas can be further removed.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. The utility model provides a reciprocating type hydrogen compressor machine seals gas emission recycle system which characterized in that includes:
one section of packing sealing ring, one end of the section of packing sealing ring is close to the compressor cylinder, the other end of the section of packing sealing ring is provided with a first-stage air leakage discharge pipe, and the first-stage air leakage discharge pipe is connected with a first-stage waste gas recovery part;
the two-stage packing sealing ring is characterized in that one end of the two-stage packing sealing ring is close to the other end of the one-stage packing sealing ring, a second-stage air inlet pipe is arranged in the middle of the two-stage packing sealing ring, a second-stage air leakage discharge pipe is arranged at the other end of the two-stage packing sealing ring, and the second-stage air leakage discharge pipe is connected to the second-stage waste gas recovery part.
2. The system for recycling seal gas emission of a reciprocating hydrogen compressor according to claim 1, wherein,
the primary waste gas recovery part comprises a primary mechanical seal gas buffer tank, a pre-mechanical condenser, a primary mechanical seal gas recovery compressor, a post-mechanical condenser, a PSA molecular sieve pressure swing adsorption mechanism, a low-pressure hydrogen compressor and a high-pressure hydrogen compressor which are sequentially connected, and the primary air leakage discharge pipe is connected to the primary mechanical seal gas buffer tank.
3. The system for recycling seal gas emission of a reciprocating hydrogen compressor according to claim 2, wherein,
the machine-mounted condenser comprises a vertical condenser and a horizontal condenser, and the primary machine-sealed gas recovery compressor, the vertical condenser, the horizontal condenser and the PSA molecular sieve pressure swing adsorption mechanism are sequentially connected.
4. The system for recycling seal gas emission of a reciprocating hydrogen compressor according to claim 3,
the machine-sealed gas buffer tank is connected with the machine-sealed gas buffer tank through a first condensate pipe, the horizontal condenser is connected with the machine-sealed gas buffer tank through a second condensate pipe, and the vertical condenser is connected with the machine-sealed gas buffer tank through a second condensate pipe.
5. The system for recycling seal gas emission of a reciprocating hydrogen compressor according to claim 1, wherein,
the secondary waste gas recovery part comprises a secondary mechanical seal gas buffer tank, a pre-machine cooler, a secondary mechanical seal gas recovery compressor, a post-machine cooler, an activated carbon adsorption mechanism and a tail gas spray tower which are sequentially connected, and a secondary air leakage discharge pipe is connected to the secondary mechanical seal gas buffer tank.
6. The system for recycling seal gas emission of a reciprocating hydrogen compressor according to claim 5, wherein,
the after-cooler comprises a vertical cooler and a horizontal cooler, and the secondary mechanical seal gas recycling compressor, the vertical cooler, the horizontal cooler and the activated carbon adsorption mechanism are sequentially connected.
7. The system for recycling seal gas emission of a reciprocating hydrogen compressor according to claim 6, wherein,
the cooling system comprises a machine front cooling liquid recovery tank, a machine rear cooling liquid recovery tank, a secondary machine seal air buffer tank, a machine front cooler, a vertical cooler, a horizontal cooler and a horizontal cooler, wherein the machine front cooling liquid recovery tank and the machine rear cooling liquid recovery tank are respectively connected with the machine front cooling liquid recovery tank through a first cooling liquid pipe, and the vertical cooler and the horizontal cooler are respectively connected with the machine rear cooling liquid recovery tank through a second cooling liquid pipe.
8. The system for recycling seal gas emission of a reciprocating hydrogen compressor according to claim 6 or 7,
the active carbon adsorption mechanism comprises an active carbon adsorption tower, a regeneration primary cooler, a regeneration secondary cooler and a regeneration cooling liquid recovery tank, wherein the lower end of the active carbon adsorption tower is sequentially connected with the regeneration primary cooler and the regeneration secondary cooler, the regeneration primary cooler and the regeneration secondary cooler are respectively connected with the cooling liquid recovery tank through a third cooling liquid pipe, and the regeneration secondary cooler is connected with the secondary mechanical seal gas buffer tank through a gas phase backflow pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310949488.1A CN116816637A (en) | 2023-07-31 | 2023-07-31 | Sealing gas discharge recycling system of reciprocating hydrogen compressor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310949488.1A CN116816637A (en) | 2023-07-31 | 2023-07-31 | Sealing gas discharge recycling system of reciprocating hydrogen compressor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116816637A true CN116816637A (en) | 2023-09-29 |
Family
ID=88127565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310949488.1A Pending CN116816637A (en) | 2023-07-31 | 2023-07-31 | Sealing gas discharge recycling system of reciprocating hydrogen compressor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116816637A (en) |
-
2023
- 2023-07-31 CN CN202310949488.1A patent/CN116816637A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9844751B2 (en) | Method and apparatus for removing absorbable gases from pressurized industrial gases contaminated with absorbable gases, without supplying cooling energy | |
| CN103003316A (en) | Ethylene expansion for low temperature refrigeration in polyethylene vent recovery | |
| CN109437234A (en) | A kind of compound semiconductor epitaxial tail gas recycling device and method | |
| CN105289032A (en) | Cold absorption method recycling process for highly volatile organic matters | |
| CN220434962U (en) | Sealing gas discharge recycling system of reciprocating hydrogen compressor | |
| CN112374960A (en) | System and process for recovering ethylene from industrial tail gas | |
| CN216347343U (en) | Carbon dioxide liquefying device for carbon capture system | |
| CN112374988B (en) | Vinyl acetate recovery treatment process | |
| CN105371103B (en) | A kind of combined type natural gas recovery system and method | |
| CN116816637A (en) | Sealing gas discharge recycling system of reciprocating hydrogen compressor | |
| CN104163404B (en) | Recoverying and utilizing method and the device of dirty oxide gas is regenerated in nitrogen purification process | |
| CN210814519U (en) | Device for recovering organic solvent based on compression low-temperature condensation mode | |
| CN211619945U (en) | Helium recovery and purification complete equipment | |
| CN211384418U (en) | Device for recovering special gas adsorbed by molecular sieve | |
| CN112628600A (en) | C5-PFK mixed gas separation and purification system | |
| CN104457138A (en) | Method for recovering carbon sulfide and hydrogen in separation mode | |
| CN113685723B (en) | Compression filling production process for byproduct hydrogen gas | |
| CN104843705A (en) | Device for hydrate method recovery and reutilization of carbon dioxide | |
| CN116081571A (en) | Method and system for recovering hydrogen in chlor-alkali tail gas | |
| CN206676210U (en) | A kind of collecting carbonic anhydride liquefying plant | |
| CN215372041U (en) | Adsorption type natural gas filling device | |
| CN214780781U (en) | System for utilize alcohol tail gas to retrieve alcohol and high-purity carbon dioxide as raw materials | |
| CN209306960U (en) | A kind of compound semiconductor epitaxial tail gas recycling device | |
| CN113772673A (en) | Process system and method for recovering and purifying carbon dioxide from lime kiln tail gas | |
| CN109595878B (en) | Method for co-producing liquid carbon dioxide by synthetic ammonia and urea |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |