CN116799616B - Frequency continuously adjustable single-chip flexible structure cat eye external cavity semiconductor laser - Google Patents
Frequency continuously adjustable single-chip flexible structure cat eye external cavity semiconductor laser Download PDFInfo
- Publication number
- CN116799616B CN116799616B CN202310769089.7A CN202310769089A CN116799616B CN 116799616 B CN116799616 B CN 116799616B CN 202310769089 A CN202310769089 A CN 202310769089A CN 116799616 B CN116799616 B CN 116799616B
- Authority
- CN
- China
- Prior art keywords
- laser
- diode
- piezoelectric ceramic
- integrated base
- interference filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 46
- 241000282326 Felis catus Species 0.000 title claims abstract description 25
- 239000000919 ceramic Substances 0.000 claims abstract description 75
- 230000003287 optical effect Effects 0.000 claims description 25
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 230000003595 spectral effect Effects 0.000 claims description 4
- 239000004519 grease Substances 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000013461 design Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010956 nickel silver Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1092—Multi-wavelength lasing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
- H01S5/02315—Support members, e.g. bases or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0239—Combinations of electrical or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02407—Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
- H01S5/02415—Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling by using a thermo-electric cooler [TEC], e.g. Peltier element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/0607—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
The invention discloses a single-chip flexible structure cat eye external cavity semiconductor laser with continuously adjustable frequency, relating to the technical field of semiconductor lasers; the laser comprises a laser shell and a laser fixing seat, wherein an integrated base is connected to the laser fixing seat, and a laser diode, a diode collimating lens, a converging lens, annular piezoelectric ceramics, a partial reflecting mirror and an output laser collimating lens are coaxially arranged on one side of the inside of the integrated base from right to left in sequence; the other side of the inside of the integrated base is coaxially provided with a cylindrical piezoelectric ceramic and a precise hexagonal regulator in sequence from right to left; the inside fretwork of integral type base is equipped with the flexible roof beam, and interference filter is installed to flexible Liang Yice, and the flexible roof beam buckle is installed to the opposite side, and cylindricality piezoceramics is exerted pressure to the flexible roof beam for thereby change the angle of interference filter and change the frequency selection scope. The invention has compact structure, high mechanical stability, high degree of freedom of adjustment and strong portability, and is suitable for various working environments.
Description
Technical Field
The invention belongs to the technical field of semiconductor lasers, and particularly relates to a single-chip flexible-structure cat eye external cavity semiconductor laser with continuously adjustable frequency.
Background
In the application field with higher requirements on the spectral characteristics, the semiconductor laser diode has too wide spectral line for emitting laser because of the self gain curve width and too small diode cavity length, and can not be directly used. By designing the light path, part of laser is reflected from a certain distance to enter the semiconductor laser diode, so that an external cavity can be formed, and under the combined work of the frequency-selecting elements, the semiconductor laser with the external cavity can realize the laser output with single longitudinal mode and narrow line width.
External cavity semiconductor lasers provide a high quality coherent light source and are widely used in many fields such as communication, optical measurement, atomic physics and the like. In many commercial designs, the common external cavity semiconductor lasers are provided with optical feedback and frequency selection by diffraction gratings, which are highly demanding with respect to optical alignment, and are susceptible to mechanical vibrations, air pressure, etc.
In the cat eye structure, the light emitting surface of the semiconductor laser diode and the reflecting surface of the partial reflecting mirror are respectively positioned at the focal planes of the two lenses to form two end surfaces of the outer cavity. If the distance between the two lenses is the sum of the focal lengths of the two lenses, even if the reflector rotates or the diode has axial offset, the light emitted from the two end faces of the outer cavity can return to the original point after being transmitted in the cavity under the geometrical optics approximation. Even if the two lens spacing is not the sum of their focal lengths, the system is still insensitive to mirror rotation. The external cavity semiconductor laser based on the interference filter is highly matched with the cat eye structure, and optical feedback and wavelength selection can be realized through independent optical elements only by inserting the filter between the two lenses.
In atomic physics experiments, laser light is required to act on the transition between atomic specific energy levels, and the laser frequency is required to be continuously tunable. In conventional external cavity semiconductor laser designs, piezoelectric ceramics are used to stretch and retract to adjust the external cavity length, thereby changing the external cavity resonant frequency mode selection. Many designs in the past were mechanically split and, to adjust the frequency selective element angle, some designs used unstable structures such as springs, manual rotation stages, etc., which affected the stability of the laser.
Disclosure of Invention
The invention aims to provide a single-chip type cat eye external cavity semiconductor laser with a continuously adjustable frequency, which solves the problems that in the prior art, the external cavity semiconductor laser is in a split type design on a mechanical structure or unstable structures such as a spring, a manual rotary table and the like are used for adjusting the angle of a frequency selection element, so that the stability of the laser is poor and the like. .
In order to achieve the above purpose, the invention adopts the following technical scheme:
the single-chip flexible structure cat eye external cavity semiconductor laser with the frequency continuously adjustable comprises a laser shell and a laser fixing seat, wherein the laser fixing seat is arranged in the laser shell, an integrated base is connected to the laser fixing seat, a plurality of mounting holes are formed in one side of the inside of the integrated base along the axis of laser, and a laser diode, a diode collimating lens, a converging lens, annular piezoelectric ceramics, a partial reflector and an output laser collimating lens are coaxially arranged in the mounting holes in sequence from right to left;
the other side of the inside of the integrated base is coaxially provided with a cylindrical piezoelectric ceramic and a precise hexagonal regulator in sequence from right to left; the axis of the columnar piezoelectric ceramic is parallel to the axis of the annular piezoelectric ceramic;
the integrated base is internally hollowed with a flexible beam, the flexible Liang Yice is provided with an interference filter, the other side of the flexible beam is provided with threads and is provided with a flexible beam buckle, the interference filter is positioned between the diode collimating lens and the converging lens, and the flexible beam buckle is in contact with the columnar piezoelectric ceramic;
the interference filter only allows laser light near the target wavelength to pass through and is used for playing a role in frequency selection;
the columnar piezoelectric ceramic applies pressure to the flexible beam and is used for changing the angle of the interference filter so as to change the frequency selection range.
The integrated base is formed by processing a single metal block and is used for fixing each optical element of the laser.
The single-chip flexible structure cat eye external cavity semiconductor laser with the continuously adjustable frequency also comprises a temperature control module and a diode current control module;
a semiconductor refrigerating sheet is arranged between the integrated base and the laser fixing seat, and the upper surface and the lower surface of the semiconductor refrigerating sheet are coated with heat-conducting silicone grease;
the temperature control module controls the semiconductor refrigerating sheet according to the temperature sensor signal installed on the diode adapter, so as to control the temperature of the laser;
the diode current control module supplies power to the laser diode.
Preferably, the laser housing comprises an integral pentahedron and cap. The integrated pentahedral shell comprises a side face, front and rear surfaces and a bottom face of the laser shell, wherein interfaces are designed on the side face and used for connecting a diode current control module, a temperature control module, two piezoelectric ceramic wiring and installing a laser energizing indicator lamp; a low-reflectivity window sheet is arranged on the big round hole on the front surface, and laser is output from the window sheet; the small round hole is used for extending into the hexagonal wrench to screw the precise hexagonal regulator, so that the position of the cylindrical piezoelectric ceramic is changed, and the angle of the optical filter is changed; the small round hole on the rear surface is used for extending into a screwdriver to screw the diode snap ring. The laser housing is processed by a commercial cast aluminum waterproof box, and a sealing effect is achieved between the top cover and the integrated five-face shell through dispensing and sealing. The laser shell provides working environment which is well isolated from the outside for the laser, and has good dustproof and dampproof effects.
Preferably, a groove plane is processed between the converging lens and the output laser collimating lens, and a rectangular groove is formed on one side of the groove plane, which is close to the output laser collimating lens, and is communicated with the outside;
one surface of the annular piezoelectric ceramic is stuck on the plane of the groove, and the other surface of the annular piezoelectric ceramic is stuck with a reflecting surface of a partial reflecting mirror which is positioned in the rectangular groove; the reflecting surface of the partial reflecting mirror is plated with a partial reflecting film, and the transmitting surface is plated with an antireflection film.
The outer diameter of the annular piezoelectric ceramic is smaller than the outer diameter of the plane of the groove, and the inner diameter is light-transmitting;
the annular piezoelectric ceramic is used for stretching along the axis direction of the self circular ring, so that the length of the outer cavity of the laser is adjusted;
the mounting hole of the converging lens in the integrated base is in threaded connection with the converging lens; the converging lens is fastened by screwing screws into screw holes in the vertical direction on the integrated base.
The laser is converged on the reflecting surface of the partial reflecting mirror by adjusting the screw thread precession amount of the converging lens, and the reflected laser returns to the laser diode along the original path, so that external cavity feedback is realized.
Preferably, the mounting hole of the diode collimating lens in the integrated base is in threaded connection with the diode collimating lens;
the distance between the laser diode and the diode collimating lens can be adjusted by screwing in or screwing out the diode collimating lens, so that the laser beam is adjusted to be collimated;
the diode collimating lens is fastened by screwing screws into screw holes in the vertical direction on the integrated base.
Preferably, the mounting hole of the output laser collimating lens in the integrated base is in threaded connection with the output laser collimating lens;
the laser output by the laser can be collimated by screwing in or screwing out the output laser collimating lens;
the output laser collimating lens is fastened by screwing screws into screw holes in the vertical direction on the integrated base.
Preferably, a mounting hole of the laser diode in the integrated base is in threaded connection with a diode adapter, and the diode adapter mounts the laser diode through a diode clamping ring;
by replacing diode adapters of different sizes, laser diodes of different packaging modes can be mounted.
The diode adapter is provided with two small round holes for installing a temperature sensor, and a temperature sensor lead is connected to the temperature control module.
The diode adapter is fastened by screwing screws into screw holes in the vertical direction on the integrated base.
Preferably, a stepped hole is formed in the flexible beam, and an optical filter angle ring and an interference filter are sequentially arranged in the stepped hole from right to left;
the optical filter angle ring is used for providing an initial inclination angle for the interference filter;
the center of the optical filter angle ring can be communicated with light, the peripheral dimension of the optical filter angle ring is matched with a corresponding hole on the flexible beam of the integrated base, and the optical filter angle ring is fastened by screwing a screw into a through hole in the vertical direction on the integrated base.
Preferably, the hinge at one side of the flexible beam connected with the integrated base is arc-shaped, and the hinge at the other side of the flexible beam connected with the integrated base is S-shaped and is used for supporting the deformation of the flexible beam at a large angle.
Preferably, one end of the columnar piezoelectric ceramic is abutted against the flexible beam buckle, and the other end of the columnar piezoelectric ceramic passes through the axial long hole and is abutted against the precise hexagonal regulator;
the flexible beam buckle is used for providing an acting point for the columnar piezoelectric ceramic;
the external thread of one end, far away from the columnar piezoelectric ceramic, of the precise hexagonal adjuster is matched with the internal thread of the adjusting nut, and the external thread of the adjusting nut is matched with the thread processed at the corresponding position on the integrated base and is locked on the integrated base; the inner hexagonal groove of the precise hexagonal regulator can be compatible with an inner hexagonal wrench;
the cylindrical piezoelectric ceramic generates axial displacement by rotating the precise hexagonal regulator or is electrified to expand and contract, so that the angle of the flexible beam is regulated.
Preferably, the four corners of the integrated base in the vertical direction are provided with through stepped holes for fixing the integrated base on the laser fixing seat.
The control method of the single-chip flexible structure cat eye external cavity semiconductor laser with continuously adjustable frequency comprises the following steps:
s1, adjusting the temperature and the current of a laser, wherein laser output by a laser diode passes through a diode collimating lens and a converging lens after traveling for a certain distance, is focused on a reflecting surface of a partial reflecting mirror, partial laser is reflected and enters the laser diode along an original path, and an outer cavity is formed by the reflecting surface of the partial reflecting mirror and a light-emitting surface of the laser diode;
s2, manually adjusting the angle of the interference filter, and performing coarse adjustment on the laser frequency;
and S3, after the laser near the target wavelength is obtained, adjusting the annular piezoelectric ceramic voltage and the cylindrical piezoelectric ceramic voltage for fine adjustment of the laser frequency to obtain the laser meeting the requirements.
The displacement or the expansion of the columnar piezoelectric ceramic controls the angle of the interference filter, and the relation between the central wavelength and the angle of the interference filter is as follows:
wherein lambda is 0 Is the central wavelength of the laser when the laser is incident on the interference filter, theta is the normal angle between the laser and the interference filter, n eff Is the effective refractive index of the interference filter;
the interference filter is used for selecting the interference filter with the transmission peak width smaller than that of the interference filter so as to be matched with laser diodes with different spectral characteristics.
The beneficial effects of the invention are as follows:
(1) The integrated base is compact in design, the cavity length of the outer cavity is compressed to the greatest extent, and the non-mode jump range of the laser is improved. The angle of the interference filter is further adjusted by adding the columnar piezoelectric ceramic, so that the degree of freedom of adjustment is higher compared with the design of the traditional cat eye external cavity semiconductor laser; and the electronically controlled adjustment has higher repeatability and flexibility than manual adjustment. The flexible beam in the integrated base deforms under the pressure exerted by the columnar piezoelectric ceramic, and the mechanical restoring force of the flexible beam enables the angle of the optical filter to have high stability.
(2) The annular piezoelectric ceramic is used for changing the length of the outer cavity; the annular piezoelectric ceramic and the columnar piezoelectric ceramic work together, so that the laser has a larger adjustable frequency range and higher adjustment sensitivity.
(3) The invention can obtain laser with different wave bands by installing different laser diodes and optical filters, has high portability and has good application prospect in the fields of atomic physical experiments, optical measurement and the like.
(4) The cat eye structure is used for the laser light path, so that the tolerance to alignment deviation in the light path is high, and the feedback effect of the external cavity is easier to realize.
(5) The semiconductor refrigerating sheet below the base is used for controlling the temperature of the whole laser, and the temperature stability of the laser is high.
(6) According to the invention, all optical elements of the laser are fixed on the integrated base, so that the influence caused by mechanical vibration can be effectively reduced, and unstable structures such as springs, manual rotating tables and the like are not used. The laser has high anti-seismic performance, stable frequency and compact structure.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a continuously frequency-adjustable monolithic flexible structure cat eye external cavity semiconductor laser according to the present invention;
FIG. 2 is an exploded view of a continuously tunable frequency monolithic flexible structure cat eye external cavity semiconductor laser according to the present invention;
FIG. 3 is a schematic diagram of the structure of a laser diode, a diode collimating lens, an interference filter, a converging lens, a ring-shaped piezoelectric ceramic, a partial reflector, and an output laser collimating lens in the integrated base of the present invention;
FIG. 4 is a schematic diagram II of the structure of the laser diode, diode collimating lens, interference filter, converging lens, annular piezoelectric ceramic, partial reflector, and output laser collimating lens in the integrated base of the present invention;
FIG. 5 is a schematic diagram of the structure of the flexible beam buckle, the columnar piezoelectric ceramic and the precise hexagonal regulator inside the integrated base;
FIG. 6 is a top view of an integrated chassis of the present invention;
fig. 7 is a schematic view of the angle adjustment of the flexible beam in the present invention.
In the figure: 1. a laser housing; 2. a low reflectivity window; 3. a laser holder; 4. a semiconductor refrigeration sheet; 5. an integral base; 6. a laser diode; 7. a diode adaptor; 8. a diode snap ring; 9. a diode collimation lens; 10. an interference filter; 11. an optical filter angle ring; 12. a flexible beam buckle; 13. columnar piezoelectric ceramics; 14. a precision hexagonal regulator; 15. an adjusting nut; 16. a converging lens; 17. annular piezoelectric ceramics; 18. a partial mirror; 19. an output laser collimator lens; 20. a flexible beam.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1:
referring to fig. 1-6, the frequency continuously adjustable single-chip flexible structure cat eye external cavity semiconductor laser comprises a laser shell 1, a low-reflectivity window sheet 2, a laser fixing seat 3, a semiconductor refrigerating sheet 4, an integrated base 5, a laser diode 6, a diode adapter 7, a diode clamping ring 8, a diode collimating lens 9, an interference filter 10, a filter angle ring 11, a flexible beam buckle 12, a cylindrical piezoelectric ceramic 13, a precise hexagonal regulator 14, a regulating nut 15, a converging lens 16, an annular piezoelectric ceramic 17, a partial reflecting mirror 18, an output laser collimating lens 19 and a flexible beam 20.
In this embodiment, referring to fig. 3 and 5, each optical element of the laser is fixed on an integral base 5, and the integral base 5 is integrally formed by processing, and the selected material is a metal with high elongation and high fatigue strength, such as nickel brass. The integrated base 5 is coaxially processed with screw holes, stepped holes and grooves for installing various optical elements along the axis of the laser. The laser diode 6, the diode collimating lens 9, the interference filter 10, the converging lens 16, the annular piezoelectric ceramic 17 and the output laser collimating lens 19 are sequentially arranged from right to left along the axis. And screw holes in the vertical direction are machined in corresponding positions on the integrated base 5, and the screws are screwed into the screw holes to fasten the screws in the vertical direction, so that the coaxiality of the optical elements can be ensured through high-precision machining.
Further, the peripheral dimension of the laser diode 6 is tightly matched with the dimension of the central hole of the diode adapter 7, so that the radial deflection of the laser diode 6 is avoided; the laser diode 6 and the diode adapter 7 are fixed together by means of a diode snap ring 8. By modifying the dimensions of the diode adapter 7, a laser diode 6 of a different packaging type can be mounted without having to rework the integrated mount 5. When stability is required to be further improved, the mounting hole of the tightly matched laser diode 6 can be directly machined on the integrated base 5.
Further, by screwing in or screwing out the external screw thread of the diode collimator lens 9, the distance between the laser diode 6 and the diode collimator lens 9 can be changed, and the laser beam can be adjusted to be collimated.
Further, the screw-in amount of the converging lens 16 can be adjusted to converge the laser light on the reflecting surface of the partially reflecting mirror 18. The reflected laser light returns to the laser diode 6 along the original path, so that external cavity feedback is realized.
Further, the annular piezoelectric ceramic 17 is adhered to a groove plane processed on the integrated base 5, and the other surface is adhered to a reflecting surface of a part of the reflecting mirror 18, and the length of the outer cavity of the laser can be changed along the axis of the circular ring in the stretching direction. The outer diameter of the annular piezoelectric ceramic 17 is smaller than the outer diameter of the groove plane, so that the axial expansion and contraction cannot be interfered by the groove wall.
Further, the output laser collimator lens 19 is screwed in or out to collimate the laser light output from the laser.
Furthermore, the laser is very compact in design, and for convenient installation and adjustment of the optical element, the integrated base 5 is further provided with two non-penetrating rectangular holes in the vertical direction, which are respectively positioned near the installation screw hole of the converging lens 16 and the installation groove of the annular piezoelectric ceramic 17. Wherein a rectangular hole near the mounting screw hole of the converging lens 16 is used to provide more room for the converging lens 16 adjustment tool used to screw the converging lens 16 in and out. The bottom of the rectangular hole does not exceed the center of the mounting screw hole of the converging lens 16 so as not to destroy the screw function. Rectangular holes near the grooves of the annular piezoelectric ceramics 17 can provide space for leads of the annular piezoelectric ceramics 17 and facilitate installation of the annular piezoelectric ceramics 17.
In this embodiment, referring to fig. 2-6, a flexible beam 20 structure is hollowed out of the integrated base 5 between the diode collimating lens 9 and the converging lens 16, the interference filter 10 is installed in a hole of the flexible beam 20, and the interference filter 10 only allows light near the target wavelength to pass through for frequency selection.
Further, before installing the interference filter 10, the filter angle ring 11 is installed to provide the initial inclination angle for the interference filter 10. Threaded holes and through holes are respectively formed in the upper and lower surfaces of the flexible beam 20. The screw passes through the through hole below and is screwed into the threaded hole on the optical filter angle ring 11, so that the optical filter angle ring 11 is accurately positioned. Screw holes on the upper surface of the flexible beam 20, which are positioned on the same vertical plane with the laser shaft, penetrate into screws to fix the interference filter 10. The other screw hole on the upper surface of the flexible beam 20 is a standby screw hole so as to prevent the dislocation of the thread position on the optical filter angle ring 11 and the through hole on the lower surface of the flexible beam 20 caused by processing errors.
Further, in order to realize the adjustment of the angle of the flexible beam 20, the integrated base 5 is coaxially provided with a through hole and a screw hole on the other axis. The screw hole on the flexible beam 20 is used for fixing the flexible beam buckle 12, the flexible beam buckle 12 provides an acting point for the cylindrical piezoelectric ceramic 13, the cylindrical piezoelectric ceramic 13 penetrates through the axial long hole, the other surface of the cylindrical piezoelectric ceramic 13 is in contact with the precise hexagonal adjuster 14, the inner hexagonal groove of the precise hexagonal adjuster 14 is compatible with an inner hexagonal wrench, the external thread is matched with the internal thread of the adjusting nut 15, and the external thread of the adjusting nut 15 is matched with the thread machined at the corresponding position on the integrated base 5 and is locked on the integrated base 5.
The precise hexagonal regulator 14 applies pressure to the flexible beam 20 through the columnar piezoelectric ceramic 13 to change the angle of the interference filter 10, thereby changing the frequency selection range. The angle of the interference filter 10 can be adjusted along the axial direction of the telescopic direction of the columnar piezoelectric ceramics 13.
Further, the hinge on one side of the flexible beam 20 is arc-shaped, and the hinge on the other side is S-shaped, so as to support large-angle deformation. The two surfaces of the flexible beam 20 in the vertical direction are recessed to a certain depth relative to the upper and lower surfaces of the integrated base 5, so as to ensure that the rotation of the flexible beam is not hindered. The stepped hole on the flexible beam 20 is designed as a slotted hole, so that the radial required accommodating space is enlarged when the cylindrical interference filter 10 has an included angle with the flexible beam 20.
In this embodiment, in the vertical direction, four corners of the integral base 5 have through stepped holes for fixing the integral base 5 on the laser fixing base 3. A semiconductor refrigerating sheet 4 is arranged between the integrated base 5 and the laser fixing seat 3, and the upper surface and the lower surface of the semiconductor refrigerating sheet 4 are coated with heat-conducting silicone grease. The temperature control module controls the semiconductor refrigerating sheet 4 according to the temperature sensor signal installed on the diode adapter 7, thereby precisely controlling the temperature of the laser.
In the present embodiment, the laser housing 1 includes an integrated pentahedron and top cover. The integrated pentahedral shell covers the side face, the front surface, the rear surface and the bottom surface of the laser shell 1, and interfaces are designed on the side face and are used for connecting a diode current control module, a temperature control module, two piezoelectric ceramic wiring and installing a laser energizing indicator lamp; a low-reflectivity window sheet 2 is arranged on a large round hole on the front surface, and laser is output from the window sheet; the small round hole is used for extending into a hexagonal wrench to screw a precise hexagonal regulator 14, so that the position of the cylindrical piezoelectric ceramic 13 is changed, and the angle of the interference filter 10 is changed; the small round hole on the rear surface is used for extending into a screwdriver to screw the diode snap ring 8. The laser housing 1 is formed by processing a commercial cast aluminum waterproof box, and a sealing effect is achieved between the top cover and the integrated five-face shell through dispensing and sealing. The laser housing 1 provides a working environment which is well isolated from the outside for the laser, and has good dustproof and dampproof effects.
Based on the single-chip flexible structure cat eye external cavity semiconductor laser with the continuously adjustable medium frequency, the control method is as follows:
the single-chip flexible structure cat eye external cavity semiconductor laser with the continuously adjustable frequency is set as:
the length of the outer cavity is 30mm, and the space between cavity modes is 5GHz.
A 40mm by 40mm semiconductor cooling plate 4 is arranged under the integrated base 5, and the temperature fluctuation of the laser is controlled to be +/-0.001 ℃.
The relationship between the central wavelength and the angle of the interference filter 10 is that
Wherein lambda is 0 Is the center wavelength of the laser when the laser is incident on the interference filter 10, θ is the angle between the laser and the normal line of the interference filter 10, n eff Is the effective refractive index of the interference filter 10;
referring to fig. 7, the rectangle represents the interference filter 10, and the columnar piezoelectric ceramic 13 applies pressure to the flexible beam 20 through the point P, so that the interference filter 10 rotates around the point O, changing θ. The distance between the point P and the point O is 24mm, and when the length of the columnar piezoelectric ceramic 13 is changed by 2 mu m, the angle change delta theta=1/12000 rad of the interference filter 10 is changed. For lambda 0 ＝671.4nm，n eff =2.13. The frequency change δv caused by the angle change was calculated to be about 1GHz.
As a comparison: for the partial mirror 18, the frequency change caused by the same amount of expansion and contraction of the columnar piezoelectric ceramic 13 is about 30GHz; for a grating of 1200 scale per mm, the frequency change caused by the same angle change is about 85GHz. It can be seen that adjusting the angle of the interference filter 10 using the columnar piezoelectric ceramic 13 allows finer frequency adjustment.
After each element of the laser is installed, the temperature is controlled by a temperature control module, and the laser diode 6 is powered by a diode current control module. The output power and frequency of the laser can be monitored in real time by using a power meter and a wavelength meter. The laser temperature and current are adjusted, and the angle of the interference filter 10 is manually adjusted, so that coarse adjustment can be performed on the laser frequency. After the laser near the target wavelength is obtained, the voltage of the annular piezoelectric ceramic 17 and the voltage of the columnar piezoelectric ceramic 13 are regulated, so that the frequency can be finely regulated, and the laser meeting the requirement can be obtained.
The foregoing is only for aiding in understanding the method and the core of the invention, but the scope of the invention is not limited thereto, and it should be understood that the technical scheme and the inventive concept according to the invention are equivalent or changed within the scope of the invention by those skilled in the art. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (8)
1. The single-chip flexible structure cat eye external cavity semiconductor laser with the continuously adjustable frequency comprises a laser shell (1) and a laser fixing seat (3), wherein the laser fixing seat (3) is arranged in the laser shell (1),
the laser device comprises a laser device fixing seat (3), wherein an integrated base (5) is connected to the laser device fixing seat (3), a plurality of mounting holes are formed in one side of the inside of the integrated base (5) along the axis of laser light, and a laser diode (6), a diode collimating lens (9), a converging lens (16), annular piezoelectric ceramics (17), a partial reflecting mirror (18) and an output laser collimating lens (19) are coaxially arranged in the mounting holes in sequence from right to left;
the other side of the inside of the integrated base (5) is coaxially provided with a cylindrical piezoelectric ceramic (13) and a precise hexagonal regulator (14) in sequence from right to left; the columnar piezoelectric ceramic (13) is parallel to the axis of the annular piezoelectric ceramic (17);
the integrated base (5) is internally hollowed with a flexible beam (20), one side of the flexible beam (20) is provided with an interference filter (10), and the other side of the flexible beam (20) is provided with threads and is provided with a flexible beam buckle (12); the interference filter (10) is positioned between the diode collimating lens (9) and the converging lens (16); the flexible beam buckle (12) is contacted with the columnar piezoelectric ceramic (13);
the interference filter (10) only allows laser light near the target wavelength to pass through and plays a role in frequency selection;
the columnar piezoelectric ceramic (13) applies pressure to the flexible beam (20) and is used for changing the angle of the interference filter (10) so as to change the frequency selection range;
one end of the columnar piezoelectric ceramic (13) is abutted against the flexible beam buckle (12), and the other end of the columnar piezoelectric ceramic passes through the axial long hole and is abutted against the precise hexagonal regulator (14);
the flexible beam buckle (12) is used for providing an acting point for the columnar piezoelectric ceramic (13);
the external thread of one end, far away from the cylindrical piezoelectric ceramic (13), of the precise hexagonal adjuster (14) is matched with the internal thread of the adjusting nut (15), and the external thread of the adjusting nut (15) is matched with the thread processed at the corresponding position on the integrated base (5) and is locked on the integrated base (5); the inner hexagonal groove of the precise hexagonal regulator (14) can be compatible with an inner hexagonal wrench;
the cylindrical piezoelectric ceramic (13) generates axial displacement or the cylindrical piezoelectric ceramic (13) is electrified to expand and contract by rotating the precise hexagonal regulator (14), so that the angle of the flexible beam (20) is regulated;
the integrated base (5) is provided with a groove plane between the converging lens (16) and the output laser collimating lens (19), and a rectangular groove is formed on one side of the groove plane, which is close to the output laser collimating lens (19), and is communicated with the outside;
one surface of the annular piezoelectric ceramic (17) is stuck on the plane of the groove, and the other surface of the annular piezoelectric ceramic is stuck with a reflecting surface of a partial reflecting mirror (18), and the partial reflecting mirror (18) is positioned in the rectangular groove;
the outer diameter of the annular piezoelectric ceramic (17) is smaller than the outer diameter of the groove plane, and the inner diameter is light-transmitting;
the annular piezoelectric ceramic (17) is used for stretching along the axis direction of the annular piezoelectric ceramic, so that the length of the laser outer cavity is adjusted.
2. The continuously frequency adjustable single-chip flexible structure cat eye external cavity semiconductor laser according to claim 1, wherein the mounting hole of the diode collimating lens (9) in the integrated base (5) is in threaded connection with the diode collimating lens (9);
the distance between the laser diode (6) and the diode collimating lens (9) can be adjusted by screwing in or screwing out the diode collimating lens (9), so that the laser beam is adjusted to be collimated;
the mounting hole of the converging lens (16) in the integrated base (5) is in threaded connection with the converging lens (16);
the laser is converged on the reflecting surface of the partial reflector (18) through the screw thread precession amount adjustment of the converging lens (16), and the reflected laser returns to the laser diode (6) along the original path, so that external cavity feedback is realized;
the mounting hole of the output laser collimating lens (19) in the integrated base (5) is in threaded connection with the output laser collimating lens (19);
the laser beam output from the laser can be collimated by screwing in or screwing out an output laser collimating lens (19).
3. The continuously-frequency-adjustable single-chip flexible-structure cat eye external cavity semiconductor laser according to claim 1, wherein a diode adapter (7) is connected with a mounting hole of a laser diode (6) in the integrated base (5) in a threaded manner, and the diode adapter (7) mounts the laser diode (6) through a diode snap ring (8);
the laser diodes (6) with different packaging modes are installed by replacing diode adapters (7) with different sizes.
4. The continuously-frequency-adjustable single-chip flexible-structure cat eye outer cavity semiconductor laser device according to claim 1, wherein a stepped hole is formed in the flexible beam (20), and an optical filter angle ring (11) and an interference filter (10) are sequentially arranged in the stepped hole from right to left;
the filter angle ring (11) is used for providing an initial tilt angle for the interference filter (10).
5. The continuously frequency adjustable single-chip flexible structure cat eye external cavity semiconductor laser according to claim 1, wherein one side hinge of the flexible beam (20) connected with the integrated base (5) is arc-shaped, and the other side hinge connected with the integrated base (5) is S-shaped for supporting large-angle deformation of the flexible beam (20).
6. The continuously frequency adjustable monolithic flexible structured cat eye external cavity semiconductor laser as defined in claim 1, further comprising a temperature control module, a diode current control module;
a semiconductor refrigerating piece (4) is arranged between the integrated base (5) and the laser fixing seat (3), and heat-conducting silicone grease is smeared on the upper surface and the lower surface of the semiconductor refrigerating piece (4);
the temperature control module controls the semiconductor refrigerating sheet (4) according to a temperature sensor signal installed on the diode adapter (7), so as to control the temperature of the laser;
the diode current control module supplies power to the laser diode (6);
four corners of the integrated base (5) in the vertical direction are provided with through stepped holes for fixing the integrated base (5) on the laser fixing seat (3).
7. The continuously frequency adjustable monolithic flexible structure cat eye external cavity semiconductor laser as set forth in any one of claims 1-6, wherein the control method comprises the following steps:
s1, adjusting the temperature and the current of a laser, wherein laser output by a laser diode (6) passes through a diode collimating lens (9) and propagates for a certain distance and then passes through a converging lens (16), and is focused on the reflecting surface of a partial reflecting mirror (18), part of the laser is reflected and enters the laser diode (6) along the original path, and an outer cavity is formed by the reflecting surface of the partial reflecting mirror (18) and the light-emitting surface of the laser diode (6);
s2, manually adjusting the angle of the interference filter (10) to perform rough adjustment on the laser frequency;
and S3, after the laser with the wavelength near the target wavelength is obtained, adjusting the voltage of the annular piezoelectric ceramic (17) and the voltage of the cylindrical piezoelectric ceramic (13) for fine adjustment of the laser frequency to obtain the laser meeting the requirement.
8. The continuously tunable frequency monolithic flexible structure cat eye external cavity semiconductor laser of claim 7, wherein,
the displacement or the expansion of the cylindrical piezoelectric ceramic (13) controls the angle of the interference filter (10), and the relation between the central wavelength and the angle of the interference filter (10) is as follows:
wherein lambda is 0 Is the central wavelength when the laser is incident on the interference filter (10), theta is the angle between the laser and the normal line of the interference filter (10), n eff Is the effective refractive index of the interference filter (10);
the interference filter (10) selects the interference filter (10) with the transmission peak width smaller than 3nm to be matched with the laser diodes (6) with different spectral characteristics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310769089.7A CN116799616B (en) | 2023-06-27 | 2023-06-27 | Frequency continuously adjustable single-chip flexible structure cat eye external cavity semiconductor laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310769089.7A CN116799616B (en) | 2023-06-27 | 2023-06-27 | Frequency continuously adjustable single-chip flexible structure cat eye external cavity semiconductor laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116799616A CN116799616A (en) | 2023-09-22 |
| CN116799616B true CN116799616B (en) | 2024-01-09 |
Family
ID=88034165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310769089.7A Active CN116799616B (en) | 2023-06-27 | 2023-06-27 | Frequency continuously adjustable single-chip flexible structure cat eye external cavity semiconductor laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116799616B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101982801A (en) * | 2010-10-12 | 2011-03-02 | 华中科技大学 | Piezoelectric-driven F-P cavity tunable filter |
| CN112751259A (en) * | 2021-01-05 | 2021-05-04 | 中国人民解放军国防科技大学 | Class-synchronous tuning external cavity semiconductor laser based on flexible mechanical structure |
| CN113471809A (en) * | 2021-05-31 | 2021-10-01 | 北京优立光太科技有限公司 | Tunable cat eye laser and adjusting method |
| CN114759430A (en) * | 2022-04-02 | 2022-07-15 | 中国科学院国家授时中心 | Cat eye external cavity semiconductor laser |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7653094B2 (en) * | 2005-03-24 | 2010-01-26 | Mitutoyo Corporation | External cavity laser with flexure tuning element |
-
2023
- 2023-06-27 CN CN202310769089.7A patent/CN116799616B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101982801A (en) * | 2010-10-12 | 2011-03-02 | 华中科技大学 | Piezoelectric-driven F-P cavity tunable filter |
| CN112751259A (en) * | 2021-01-05 | 2021-05-04 | 中国人民解放军国防科技大学 | Class-synchronous tuning external cavity semiconductor laser based on flexible mechanical structure |
| CN113471809A (en) * | 2021-05-31 | 2021-10-01 | 北京优立光太科技有限公司 | Tunable cat eye laser and adjusting method |
| CN114759430A (en) * | 2022-04-02 | 2022-07-15 | 中国科学院国家授时中心 | Cat eye external cavity semiconductor laser |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116799616A (en) | 2023-09-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5257279A (en) | Adjustable focus technique and apparatus using a moveable weak lens | |
| US4498737A (en) | Adjusting mechanism for use with diode lasers | |
| US7679844B2 (en) | Lens holder | |
| US5381438A (en) | Laser diode unit including an adjusting member provided with a through hole | |
| US7653094B2 (en) | External cavity laser with flexure tuning element | |
| JP4294806B2 (en) | Optical element angle adjustment device for optical equipment | |
| US7992835B2 (en) | Kinematic mirror mount adjustable from two directions | |
| JP2004006641A (en) | Laser diode collimator system | |
| EP3841643B1 (en) | Grating stabilized diode laser | |
| CN112751259B (en) | Class-synchronous tuning external cavity semiconductor laser based on flexible mechanical structure | |
| JPH0839282A (en) | Deformable mirror of laser beam processing device | |
| CN116799616B (en) | Frequency continuously adjustable single-chip flexible structure cat eye external cavity semiconductor laser | |
| CN211425346U (en) | Light source module based on Bawell prism | |
| US20070280625A1 (en) | Optical member support mechanism, optical device, and gap adjusting member | |
| US5878073A (en) | Focal distance adjustable laser module | |
| US4571028A (en) | Mount for an optical component | |
| CN112751260B (en) | Piezoelectric synchronous tuning ECDL laser based on fan-shaped ring structure | |
| US5798879A (en) | Stress-free, adjustable optical support | |
| US20220131334A1 (en) | An external-cavity laser device, corresponding system and method | |
| US20090034563A1 (en) | Tunable diode laser system with external resonator | |
| CN114759430A (en) | Cat eye external cavity semiconductor laser | |
| US9599786B2 (en) | Low wavefront distortion optical mount | |
| US6836490B2 (en) | Optical module | |
| US20050243875A1 (en) | Piezoelectric-tuned external cavity laser | |
| CN116125740A (en) | Adjusting mechanism of reflecting mirror and laser projection equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |