CN116793541A - Flexible skin based on electrostatic capacity type pressure sensor and preparation method thereof - Google Patents
Flexible skin based on electrostatic capacity type pressure sensor and preparation method thereof Download PDFInfo
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- CN116793541A CN116793541A CN202310743329.6A CN202310743329A CN116793541A CN 116793541 A CN116793541 A CN 116793541A CN 202310743329 A CN202310743329 A CN 202310743329A CN 116793541 A CN116793541 A CN 116793541A
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- electrode
- substrate
- active layer
- pressure sensor
- ionic liquid
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- 230000009975 flexible effect Effects 0.000 title claims abstract description 41
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 125000006850 spacer group Chemical group 0.000 claims abstract description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 31
- 239000002608 ionic liquid Substances 0.000 claims description 31
- 229910021389 graphene Inorganic materials 0.000 claims description 30
- 239000011159 matrix material Substances 0.000 claims description 15
- 229920002725 thermoplastic elastomer Polymers 0.000 claims description 12
- -1 polytetrafluoroethylene Polymers 0.000 claims description 9
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 6
- 239000004814 polyurethane Substances 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 239000004698 Polyethylene Substances 0.000 claims description 3
- 239000004743 Polypropylene Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229920000728 polyester Polymers 0.000 claims description 3
- 229920000573 polyethylene Polymers 0.000 claims description 3
- 229920001155 polypropylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 229920001169 thermoplastic Polymers 0.000 claims description 3
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 3
- 239000004416 thermosoftening plastic Substances 0.000 claims description 3
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000010146 3D printing Methods 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
Abstract
The application discloses a flexible skin based on an electrostatic capacity type pressure sensor and a preparation method thereof, the flexible skin based on the electrostatic capacity type pressure sensor comprises a first substrate positioned at a bottom layer, a first electrode is arranged on the first substrate, an active layer in a convex shape is arranged on the first electrode, a second electrode separated from the active layer is arranged on the active layer, a spacer is arranged between the second electrode and the active layer, and the second substrate is arranged on the spacer.
Description
Technical Field
The application relates to flexible electronic skin, in particular to flexible skin based on an electrostatic capacity type pressure sensor and a preparation method thereof.
Background
Recently, due to the rapid development of the technology of electronic information devices, the popularity of portable information communication devices and smart devices is increasing, and next generation technologies are not simply portable but attached to or inserted into the human body, and thus, in order to satisfy this, it is expected that many attention is drawn to the human body-friendly property, and research and development of electronic skin having a flexible property is made so that it can be bent and stretched so as to be freely attached to or detached from the human skin.
The most important part in achieving such flexible electronic devices is the electrode having elasticity, because indium tin oxide electrodes, which are currently commercialized in many flexible electronic devices, are the most important part and conductivity due to their high light transmittance. However, since there are problems of poor bending and stretching properties, alternative stretchable electrodes for electronic skin technology must be developed and research is being continuously conducted. Currently, many researchers are researching the development of flexible electrodes, and are developing alternative flexible electrodes using graphene, carbon nanotubes, conductive polymers, and metal nanowires. Based on this alternative flexible electrode, flexible electronic skins made of flexible materials of various structures have also been actively researched and applied in various fields.
In addition, in the conventional capacitive pressure sensor, various structures using a solid as an active layer have been studied in many cases, but the sensor using a solid has problems of a slow reaction speed and a slow recovery speed, and in the sensor study, most of the pressure has a problem that an electrode is not flexible enough to be applied to the electronic skin using an ITO substrate.
Disclosure of Invention
The present application has been made to solve the above-mentioned problems of the background art, and an object of the present application is to provide a sensor that can sense pressure using capacitance change of air at low and high pressures by manufacturing the sensor using a graphene electrode and an ionic liquid. Another object of the present application is to provide a flexible skin based on an electrostatic capacity type pressure sensor, which senses pressure by using a capacitance change of an electric double layer of an ionic liquid, thereby increasing capacitance and improving sensitivity of the flexible skin.
In order to achieve the above purpose, the technical scheme adopted by the application is as follows: the flexible skin based on the electrostatic capacity type pressure sensor comprises a first substrate positioned at a bottom layer, wherein a first electrode is arranged on the first substrate, the first substrate is a flexible elastic matrix, and the first electrode is a first graphene layer with a through hole; the first electrode is provided with an active layer with a convex shape, and the active layer 3 is contacted with the first substrate 1 and comprises an ionic liquid positioned in the through hole; a second electrode is arranged on the active layer and spaced from the active layer, the second electrode is a second graphene layer with a through hole, a spacer is arranged between the second electrode and the active layer and surrounds part or all of the active layer, and a second substrate is arranged on the spacer;
the first substrate and the second substrate are thermoplastic elastomer matrix materials, and the thermoplastic elastomer matrix materials are styrene thermoplastic elastomer or polyurethane thermoplastic elastomer.
The spacer is one of polytetrafluoroethylene, polyester, polyethylene, polypropylene and polyurethane.
The first substrate may have a water contact angle smaller than that of the second electrode.
The surface energy of the first substrate may be higher than the surface energy of the first electrode.
The application also provides a preparation method of the flexible skin based on the electrostatic capacity type pressure sensor, which comprises the following steps:
(a) Etching the thermoplastic elastic matrix material by using plasma equipment to prepare a flexible elastic matrix, wherein the repeating unit of the flexible elastic matrix is 1-100 mu m;
(b) Stacking graphene on a first substrate to form a graphene electrode;
(c) Patterning graphene of the graphene electrode to form a first electrode including first graphene having a through hole, the thickness of which is 30 to 150 μm;
(d) Preparing an active layer including an ionic liquid in the through-hole by coating the through-hole with the ionic liquid;
(e) Preparing a second electrode using the preparation method of step (b);
(f) Preparing a second substrate using the preparation method of step (a);
(g) After step (f), a spacer is disposed between the first substrate and the second substrate, spaced from the active layer and surrounding a portion or all of the active layer.
The application has the beneficial effects that: the flexible skin electrostatic capacity type pressure sensor is manufactured by using the graphene electrode and the ionic liquid, and pressure can be sensed by utilizing the electrostatic capacity change of air and the change of ionic double electric layer capacitance under low pressure. The capacitive pressure sensor has the effects of realizing dual-mode characteristics capable of sensing pressure and high-capacity and high-flexibility electrostatic capacity pressure sensors when used under high pressure. In addition, when pressure is applied to the electrostatic capacity type pressure sensor of the present application, the ionic liquid is pulled up, thereby increasing the capacitance, and having an effect of improving the sensitivity of the sensor.
Drawings
FIG. 1 is a diagram of a flexible skin unit structure based on an electrostatic capacity type pressure sensor in accordance with the present application;
reference numerals: a first substrate-1, a first electrode-2, an active layer-3, a second electrode-4, a second substrate-5, and a spacer-6.
Detailed Description
The application will be further illustrated with reference to specific examples. It should be understood that the examples are only for illustrating the present application and are not intended to limit the scope of the present application. Furthermore, it should be understood that various changes and modifications can be made by one skilled in the art after reading the teachings of the present application, and such equivalents are intended to fall within the scope of the application as defined in the appended claims.
As shown in fig. 1, the flexible skin of the capacitance-based pressure sensor comprises a first substrate 1 positioned at the bottom layer, wherein the first substrate is a flexible elastic substrate;
a first electrode 2 including a first graphene having a through hole, on a first substrate;
an active layer 3 including a convex shape at an entrance of the through hole in a direction opposite to the first substrate, in contact with the first substrate, and including an ionic liquid located within the through hole;
a second electrode 4 comprising a second graphene on and in contact with or spaced apart from the active layer;
a second substrate 5, which is a flexible elastic substrate and is located on the second electrode;
a spacer 6 is located between the first substrate 1 and the second substrate 5 and is spaced apart from the active layer to surround part or all of the active layer.
The first substrate and the second substrate are thermoplastic elastomer matrix materials, and the thermoplastic elastomer matrix materials are styrene thermoplastic elastomer or polyurethane thermoplastic elastomer.
The ionic liquid consists of a compound that is cationic and anionic, but still liquid at room temperature. The ionic liquid is stable at high temperature, has wide liquid temperature range, almost zero vapor pressure, is ionic, low in viscosity, oxidation-resistant and high in reducibility. The ionic liquid can be hydrophilic or hydrophobic, is aliphatic ionic liquid, and is one of polyazole ionic liquid and pyridine ionic liquid.
The spacer is one of polytetrafluoroethylene, polyester, polyethylene, polypropylene and polyurethane, the distance between the first electrode and the second electrode can be adjusted by the spacer, and the pressure required by the second electrode to contact the ionic liquid can be increased along with the increase of the thickness of the spacer.
The water contact angle of the first substrate is smaller than that of the second electrode, and the larger the water contact angle is, the larger the surface energy is.
The surface energy of the first substrate may be higher than the surface energy of the first electrode, the higher the surface energy, the more hydrophilic.
The electrostatic capacity type pressure sensor can sense the electrostatic capacity in the air existing between the first electrode and the second electrode under the pressure of isolating the second electrode from the ionic liquid.
The electrostatic capacity type pressure sensor senses the electrostatic capacity of the ionic liquid at a high pressure at which the second electrode is in contact with the ionic liquid.
The electrostatic capacity type pressure sensor may be a dual mode pressure sensor for detecting an air capacitance or detecting an ionic liquid capacitance.
The application provides a preparation method of flexible skin based on an electrostatic capacity type pressure sensor; (a) Preparing a first substrate, etching a thermoplastic elastic matrix material by using plasma equipment to prepare a flexible elastic matrix, wherein the repeated unit of the flexible elastic matrix is 1-100 mu m, and introducing particles into the surface of the repeated unit by photoetching, micro-fluidic and 3D printing of a nano processing technology to realize nano patterning of the surface of the prefabricated flexible substrate; (b) Stacking graphene on a first substrate to form a graphene electrode; (c) Patterning graphene of the graphene electrode to form a first electrode including first graphene having a through hole, the thickness of which is 30 to 150 μm;
step c operates by three steps: in a first step, a mask is deposited on the graphene electrode and covers the remaining portions except for the portions to be patterned. And secondly, carrying out UV treatment on the result of the first step, removing the graphene of the part to be patterned, and patterning the graphene electrode to prepare the through hole. Finally, the mask is removed and a graphene electrode including a pattern having a via hole is prepared. Since the etched sites generated by etching of graphene are hydrophilic, it can be said that the ionic liquid is patterned at the etched sites.
(d) Preparing an active layer including an ionic liquid in the through-hole by coating the through-hole with the ionic liquid;
(e) Preparing a second electrode using the preparation method of step (b);
(f) Preparing a second substrate using the preparation method of step (a);
(g) After step (f), a spacer is disposed between the first substrate and the second substrate, spaced from the active layer and surrounding a portion or all of the active layer.
The flexible skin electrostatic capacity type pressure sensor is manufactured by using the graphene electrode and the ionic liquid, and pressure can be sensed by utilizing the electrostatic capacity change of air and the change of ionic double electric layer capacitance under low pressure. The capacitive pressure sensor has the effects of realizing dual-mode characteristics capable of sensing pressure and high-capacity and high-flexibility electrostatic capacity pressure sensors when used under high pressure. In addition, when pressure is applied to the electrostatic capacity type pressure sensor of the present application, the ionic liquid is pulled up, thereby increasing the capacitance, and having an effect of improving the sensitivity of the sensor.
Claims (5)
1. The flexible skin based on the electrostatic capacity type pressure sensor comprises a first substrate (1) positioned at a bottom layer, and is characterized in that a first electrode (2) is arranged on the first substrate (1), the first substrate (1) is a flexible elastic matrix, and the first electrode (2) is a first graphene layer with a through hole; the first electrode (2) is provided with an active layer (3) with a convex shape, and the active layer (3) is contacted with the first substrate (1) and comprises an ionic liquid positioned in the through hole; a second electrode (4) spaced from the active layer (3) is arranged on the active layer (3), the second electrode (4) is a second graphene layer with a through hole, the second electrode (4) and the active layer (3) are provided with a spacer (6), the spacer (6) and the active layer are used for surrounding part of the active layer (3) or all of the active layer (3), and a second substrate (5) is arranged on the spacer (6); the preparation method of the flexible skin based on the electrostatic capacity type pressure sensor comprises the following steps:
(a) Etching the thermoplastic elastic matrix material by using plasma equipment to prepare a flexible elastic matrix, wherein the repeating unit of the flexible elastic matrix is 1-100 mu m;
(b) Stacking graphene on a first substrate to form a graphene electrode;
(c) Patterning graphene of the graphene electrode to form a first electrode including first graphene having a through hole, the thickness of which is 30 to 150 μm;
(d) Preparing an active layer including an ionic liquid in the through-hole by coating the through-hole with the ionic liquid;
(e) Preparing a second electrode using the preparation method of step (b);
(f) Preparing a second substrate using the preparation method of step (a);
(g) After step (f), a spacer is disposed between the first substrate and the second substrate, spaced from the active layer and surrounding a portion or all of the active layer.
2. The flexible skin of a capacitive pressure sensor according to claim 1, characterized in that the water contact angle of the first substrate (1) is smaller than the water contact angle electrode of the second electrode (4), the surface energy of the first substrate (1) being higher than the surface energy of the first electrode (2).
3. A capacitive pressure sensor based flexible skin according to claim 1. The first substrate (1) and the second substrate (5) are thermoplastic elastomer base materials, and the thermoplastic elastomer base materials are styrene thermoplastic elastomer or polyurethane thermoplastic elastomer.
4. A capacitive pressure sensor based flexible skin according to claim 1. The spacer (6) is one of polytetrafluoroethylene, polyester, polyethylene, polypropylene and polyurethane.
5. A capacitive pressure sensor based flexible skin according to claim 1. The ionic liquid is characterized in that the ionic liquid is one of a polyazole ionic liquid and a pyridine ionic liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310743329.6A CN116793541A (en) | 2023-06-21 | 2023-06-21 | Flexible skin based on electrostatic capacity type pressure sensor and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310743329.6A CN116793541A (en) | 2023-06-21 | 2023-06-21 | Flexible skin based on electrostatic capacity type pressure sensor and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116793541A true CN116793541A (en) | 2023-09-22 |
Family
ID=88035793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310743329.6A Pending CN116793541A (en) | 2023-06-21 | 2023-06-21 | Flexible skin based on electrostatic capacity type pressure sensor and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116793541A (en) |
-
2023
- 2023-06-21 CN CN202310743329.6A patent/CN116793541A/en active Pending
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