CN116774855A - Display device and method for manufacturing the same - Google Patents

Display device and method for manufacturing the same Download PDF

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Publication number
CN116774855A
CN116774855A CN202310729215.6A CN202310729215A CN116774855A CN 116774855 A CN116774855 A CN 116774855A CN 202310729215 A CN202310729215 A CN 202310729215A CN 116774855 A CN116774855 A CN 116774855A
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CN
China
Prior art keywords
layer
touch
display screen
ultrasonic transducer
electrode layer
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Pending
Application number
CN202310729215.6A
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Chinese (zh)
Inventor
张锋
刘腾飞
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BOE Technology Group Co Ltd
Beijing BOE Technology Development Co Ltd
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BOE Technology Group Co Ltd
Beijing BOE Technology Development Co Ltd
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Application filed by BOE Technology Group Co Ltd, Beijing BOE Technology Development Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN202310729215.6A priority Critical patent/CN116774855A/en
Publication of CN116774855A publication Critical patent/CN116774855A/en
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412—Digitisers structurally integrated in a display
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/016—Input arrangements with force or tactile feedback as computer generated output to the user
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416—Control or interface arrangements specially adapted for digitisers
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/043—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using propagating acoustic waves
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0447—Position sensing using the local deformation of sensor cells
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04102—Flexible digitiser, i.e. constructional details for allowing the whole digitising part of a device to be flexed or rolled like a sheet of paper
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Abstract

The application provides a preparation method of a display device, which comprises the following steps: the touch control display screen is provided with a touch control display surface and a touch feedback surface which are arranged oppositely, and is suitable for acquiring a touch control position; the ultrasonic transducer array is positioned on the tactile feedback surface and comprises a plurality of ultrasonic transducers arranged in an array manner, and each ultrasonic transducer is suitable for working independently; the control module is provided with an input end and an output end, the input end is electrically connected with the touch display screen, the output end is electrically connected with the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer at the touch position to perform vibration feedback. The display device can independently perform touch reproduction on the touch position and simultaneously perform touch reproduction on a plurality of positions, so that the flexibility of touch feedback is improved, and the power consumption is reduced.

Description

Display device and method for manufacturing the same
Technical Field
The application relates to the technical field of display, in particular to a preparation method of a display device.
Background
The touch technology is the most widely used computer input mode after keyboard, mouse and voice input. The user can realize various operations on the host computer by lightly touching the icon or the text on the touch display screen with a finger, so that the man-machine interaction is more straightforward. Along with development of technology, part of touch display screens also have a touch feedback function, and the touch feedback function is beneficial to a user to quickly judge whether the operation of the touch display screens is effective. For example, when a user drives a vehicle, the touch feedback of the touch display screen can enable the user to know that the operation is effective in time, so that the distraction of the user is reduced, and the driving safety is improved. At present, most of touch display screens with a touch feedback function are provided with devices such as an eccentric motor or a linear motor on a vibrating piece so as to drive the vibrating piece to vibrate during touch, thereby realizing touch feedback.
However, after the user touches a certain position of the touch display screen, the whole touch display screen vibrates, so that not only is the power consumption high, but also the touch position cannot be independently subjected to touch reproduction, and a plurality of positions cannot be simultaneously subjected to touch reproduction, so that the application of the touch display screen is limited.
Disclosure of Invention
The present application aims to solve at least one of the technical problems in the related art to some extent.
To this end, in a first aspect, the present application provides a display device including: the touch control display screen is provided with a touch control display surface and a touch control feedback surface which are arranged oppositely, and the touch control display screen is suitable for acquiring a touch control position; the ultrasonic transducer array is positioned on the tactile feedback surface and comprises a plurality of ultrasonic transducers arranged in an array manner, and each ultrasonic transducer is suitable for working independently; the control module is provided with an input end and an output end, the input end is electrically connected with the touch display screen, the output end is electrically connected with the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer at the touch position to perform vibration feedback.
In the display device, each ultrasonic transducer in the ultrasonic transducer array can work independently, so that the display device can perform touch reproduction on touch positions independently and perform touch reproduction on a plurality of positions simultaneously, the flexibility of touch feedback is improved, and the power consumption is reduced. And secondly, the ultrasonic transducer array is positioned at the other side of the touch display screen, which is away from the touch display surface, so that the display image of the touch display screen is not influenced, the space of the display area of the touch display screen is not occupied, and the resolution ratio of the touch display screen is improved. And thirdly, the ultrasonic transducers in the ultrasonic transducer array have higher arrangement density, which is beneficial to improving the effect of the ultrasonic transducers on tactile feedback. In addition, the ultrasonic transducer array is lighter and thinner, which is beneficial to reducing the volume of the display device.
According to an embodiment of the application, the ultrasound transducer array is a piezoelectric micromechanical ultrasound transducer array or a capacitive micromechanical ultrasound transducer array.
According to the embodiment of the application, the piezoelectric micromachined ultrasonic transducer array comprises a substrate, a structural layer, a first electrode layer, a piezoelectric layer and a second electrode layer which are sequentially stacked; the substrate is provided with a plurality of through holes which are arrayed, and part of the surface of the structural layer is exposed in the through holes; the first electrode layer and/or the second electrode layer is/are a patterned electrode layer, the patterned electrode layer comprises a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes; the substrate faces away from a side surface of the structural layer toward the tactile feedback surface.
According to an embodiment of the application, the piezoelectric micromechanical ultrasound transducer further comprises a vibration matching layer, which is located at a side surface of the second electrode layer facing away from the piezoelectric layer. The vibration matching layer has lower acoustic impedance and higher sound velocity, and can effectively reduce the reflection and loss of ultrasonic waves generated by the ultrasonic transducer, thereby improving the transmission efficiency of the ultrasonic waves, further improving the vibration intensity and being beneficial to improving the haptic feedback effect.
According to the embodiment of the application, the first electrode layer comprises first sub-electrode blocks arranged in an array, the second electrode layer comprises second sub-electrode blocks arranged in an array, the first sub-electrode blocks and the second sub-electrode blocks are arranged opposite to the through holes, and the area of the second sub-electrode blocks is smaller than that of the first sub-electrode blocks. Thus, better vibration effects and thus better haptic feedback effects are advantageously obtained.
According to an embodiment of the present application, the ratio of the area of the second sub-electrode block to the area of the first sub-electrode block is 0.5 to 0.8.
According to the embodiment of the application, the piezoelectric micromachined ultrasonic transducer array comprises a sealing layer, a substrate, a structural layer, a first electrode layer, a piezoelectric layer and a second electrode layer which are sequentially stacked; the substrate is provided with a plurality of through holes which are arrayed, and the through holes, the structural layer and the sealing layer form a closed cavity; the first electrode layer and/or the second electrode layer is/are a patterned electrode layer, the patterned electrode layer comprises a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes; the second electrode layer faces the tactile feedback surface from one side surface of the piezoelectric layer.
According to an embodiment of the present application, the sealing layer is a vibration matching layer.
According to an embodiment of the application, the touch display screen comprises a substrate, and the substrate is a flexible substrate. Thereby, it is advantageous to improve the vibration transmission effect, thereby improving the haptic feedback effect.
In a second aspect, the present application provides a method for manufacturing a display device, including: forming a touch display screen, wherein the touch display screen is provided with a touch display surface and a touch feedback surface which are arranged oppositely, and the touch display screen is suitable for acquiring a touch position; forming an ultrasonic transducer array, wherein the ultrasonic transducer array is positioned on the tactile feedback surface and comprises a plurality of ultrasonic transducers arranged in an array manner, and each ultrasonic transducer is suitable for working independently; the method comprises the steps of providing a control module, wherein the control module is provided with an input end and an output end, the input end is electrically connected with the touch display screen, the output end is electrically connected with the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer at the touch position to perform vibration feedback.
According to an embodiment of the present application, the method for manufacturing the display device includes: forming the touch display screen; after the touch display screen is formed, the ultrasonic transducer array is formed on a touch feedback surface of the touch display screen.
According to an embodiment of the present application, the step of forming the ultrasonic transducer array at the haptic feedback surface includes: forming a substrate on the tactile feedback surface, wherein the substrate is provided with a plurality of through holes which are arrayed; forming a structural layer on the surface of one side of the substrate, which is away from the touch display screen, wherein the through holes form a closed cavity; forming a first electrode layer on the surface of one side of the structural layer, which is away from the touch display screen; forming a whole piezoelectric layer on the surface of one side of the first electrode layer, which is away from the touch display screen; forming a second electrode layer on the surface of one side of the piezoelectric layer, which is away from the touch display screen; the first electrode layer and/or the second electrode layer is/are patterned electrode layers, the patterned electrode layers comprise sub-electrode blocks which are arranged in an array manner, and the sub-electrode blocks are arranged opposite to the through holes.
According to an embodiment of the present application, the step of forming the substrate on the haptic feedback surface includes: and forming a photoresist layer on the tactile feedback surface, and etching the photoresist layer to obtain the substrate.
According to an embodiment of the present application, the step of forming a structural layer on a surface of the substrate facing away from the touch display screen includes: prefabricating the structural layer, and adhering the structural layer to the surface of one side of the substrate, which faces away from the touch display screen.
According to an embodiment of the present application, the step of forming the ultrasonic transducer array at the haptic feedback surface further comprises: and after the second electrode layer is formed, forming a vibration matching layer on the surface of one side of the second electrode layer, which is away from the touch display screen.
According to an embodiment of the present application, the method for manufacturing the display device includes: forming the touch display screen; forming the ultrasonic transducer array; after the touch display screen and the ultrasonic transducer array are formed, the ultrasonic transducer array is adhered to the tactile feedback surface.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present application, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a display device according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a display device shown in FIG. 1;
FIG. 3 is a top view of the substrate of FIG. 2;
FIG. 4 is a schematic diagram of another display device shown in FIG. 1;
FIG. 5 is a schematic diagram of a structure of another display device shown in FIG. 1;
FIGS. 6-11 are schematic views illustrating the structure of the display device in FIG. 2 during the manufacturing process;
FIG. 12 is a schematic diagram of the structure of the ultrasound transducer array of FIG. 5;
FIG. 13 is a schematic diagram of the structure of the ultrasound transducer array of FIG. 4;
reference numerals illustrate:
1-a touch display screen; a 2-ultrasonic transducer array; 21-a substrate; 211-through holes; 22-structural layer; 23-a first electrode layer; 24-a piezoelectric layer; 25-a second electrode layer; 26-a vibration matching layer; 3-adhesive layer.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present application and should not be construed as limiting the application.
In a first aspect, referring to fig. 1, the present application provides a display device including:
the touch control display screen 1 is provided with a touch control display surface and a touch feedback surface which are arranged oppositely, and the touch control display screen 1 is suitable for acquiring a touch control position;
an ultrasonic transducer array 2 located on the tactile feedback surface, wherein the ultrasonic transducer array 2 comprises a plurality of ultrasonic transducers arranged in an array manner, and each ultrasonic transducer is suitable for working independently;
the control module is provided with an input end and an output end, the input end is electrically connected with the touch display screen 1, the output end is electrically connected with the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer at the touch position to perform vibration feedback.
In the display device, each ultrasonic transducer in the ultrasonic transducer array 2 can work independently, so that the display device can perform touch reproduction on touch positions independently and can perform touch reproduction on a plurality of positions simultaneously, the flexibility of touch feedback is improved, and the power consumption is reduced. Secondly, the ultrasonic transducer array 2 is positioned on the other side of the touch display screen 1, which is away from the touch display surface, so that the display image of the touch display screen 1 is not influenced, the space of the display area of the touch display screen 1 is not occupied, and the resolution of the touch display screen 1 is improved. And thirdly, the ultrasonic transducers in the ultrasonic transducer array 2 have higher arrangement density, which is beneficial to improving the effect of the ultrasonic transducers on tactile feedback. In addition, the ultrasonic transducer array 2 is thinner and lighter, which is beneficial to reducing the volume of the display device.
Specifically, the steps for implementing haptic feedback by the display device are as follows: when a user touches a touch display surface of the display device, the touch display screen acquires a touch position and transmits the touch position information to the control module; after receiving the touch position information, the control module sends vibration feedback signals to a plurality of ultrasonic transducers positioned at the touch position; and after receiving the vibration feedback signals, a plurality of ultrasonic transducers positioned at the touch position perform vibration feedback.
It should be noted that, the display area of the touch display screen 1 has a plurality of light emitting elements, and the light emitting elements emit light to display images. When the ultrasonic transducer is arranged between the adjacent luminous elements, the ultrasonic transducer is likely to occupy the space of the display area, thereby affecting the resolution of the touch display screen 1, reducing the display effect of the touch display screen 1, and simultaneously reducing the arrangement density of the ultrasonic transducer by the arrangement mode, thereby affecting the effect of the ultrasonic transducer for tactile feedback. When the ultrasonic transducer array 2 is disposed on the touch display surface, the image display of the touch display screen 1 is blocked, and the display effect of the touch display screen 1 is affected.
According to an embodiment of the present application, the ultrasonic transducer array 2 is a piezoelectric micromechanical ultrasonic transducer array or a capacitive micromechanical ultrasonic transducer array.
Preferably, the ultrasonic transducer array 2 is a piezoelectric micro-mechanical ultrasonic transducer array, and when a user touches a touch display surface of the display device, a relatively real physical touch can be experienced. Specifically, the steps for implementing haptic feedback by the display device are as follows: when a user touches the touch display surface of the display device, the piezoelectric layer 24 in the ultrasonic transducer array 2 deforms to generate an electric signal, and the ultrasonic transducer array 2 transmits the electric signal to the control module; the control module calculates the touch pressure when the user performs touch operation according to the electric signal; when a user touches a touch display surface of the display device, the touch display screen 1 can acquire a touch position and transmit the touch position information to the control module; after receiving the touch position information, the control module sends out vibration feedback signals to a plurality of ultrasonic transducers positioned at the touch position, wherein the vibration feedback signals carry touch pressure information; and after receiving the vibration feedback signals, the ultrasonic transducers positioned at the touch position perform vibration feedback, wherein the vibration intensity of the touch position is close to the touch pressure during the touch operation of a user, so that the user experiences a relatively real physical touch.
In the first embodiment, referring to fig. 2, the piezoelectric micromachined ultrasonic transducer array includes a substrate 21, a structural layer 22, a first electrode layer 23, a piezoelectric layer 24, and a second electrode layer 25, which are sequentially stacked; referring to fig. 3, the substrate 21 has a plurality of through holes 211 arranged in an array, and a part of the surface of the structural layer 22 is exposed in the through holes 211; the first electrode layer 23 and/or the second electrode layer 25 are patterned electrode layers, and the patterned electrode layers include a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes 211; the substrate 21 faces the tactile feedback surface from the side surface of the structural layer 22, and the through hole 211, the structural layer 22 and the tactile feedback surface form a closed cavity. The number of the ultrasonic transducers in the ultrasonic transducer array 2 is the same as that of the through holes 211, and the positions of the ultrasonic transducers correspond to the positions of the through holes 211. The first electrode layer 23 and the second electrode layer 25 are electrically connected with the control module, so that each ultrasonic transducer can be independently driven by the touch module.
Specifically, the material of the substrate 21 may be monocrystalline silicon or photoresist, or may be other materials; the structural layer 22 may be a metal film or an organic film; the piezoelectric layer 24 may be an inorganic piezoelectric thin film such as PZT (lead zirconate titanate piezoelectric ceramic), alN, znO, or an organic piezoelectric thin film such as PVDF (polyvinylidene fluoride), PVDF-TrFE (vinylidene fluoride trifluoroethylene copolymer), PDMS (polydimethylsiloxane); the materials of the first electrode layer 23 and the second electrode layer 25 may be metallic materials such as Mo, ti, pt, or transparent conductive materials such as ITO.
Further, the thickness of the substrate 21 may be 10 μm to 50 μm, such as 10 μm, 15 μm, 20 μm, 25 μm, 30 μm, 35 μm, 40 μm, 45 μm or 50 μm; referring to fig. 3, the shape of the orthographic projection of the through holes 211 on the structural layer 22 may be a shape of a circle, a rectangle, a hexagon, an octagon, etc., the shapes and the sizes of the plurality of through holes 211 in the ultrasonic transducer array 2 may be the same or different, and the arrangement of the sub-electrode blocks corresponds to the arrangement mode and the shape of the through holes 211; when the shape of the orthographic projection of the through-hole 211 on the structural layer 22 is a circle, the inner diameter of the through-hole 211 may be 50 μm to 500 μm, such as 50 μm, 100 μm, 150 μm, 200 μm, 250 μm, 300 μm, 350 μm, 400 μm, 450 μm or 100 μm.
In a first embodiment, with continued reference to fig. 2, the piezoelectric micromechanical ultrasound transducer further comprises a vibration matching layer 26, the vibration matching layer 26 being located on a side surface of the second electrode layer 25 facing away from the piezoelectric layer 24. The vibration matching layer 26 has a low acoustic impedance and a high acoustic velocity, and can effectively reduce the reflection and loss of the ultrasonic wave generated by the ultrasonic transducer, thereby improving the transmission efficiency of the ultrasonic wave, further improving the vibration intensity, and being beneficial to improving the haptic feedback effect. The vibration matching layer 26 may be an organic film such as polyurethane or polyethylene, or may be another material.
In the first embodiment, preferably, the first electrode layer 23 and the second electrode layer 25 are patterned electrode layers, which can avoid interference between different ultrasonic transducers and is beneficial to precisely realizing tactile feedback. Specifically, the first electrode layer 23 includes first sub-electrode blocks arranged in an array, the second electrode layer 25 includes second sub-electrode blocks arranged in an array, and the first sub-electrode blocks and the second sub-electrode blocks are disposed opposite to the through holes 211. More preferably, the area of the second sub-electrode block is smaller than the area of the first sub-electrode block, which is advantageous for obtaining a better vibration effect and thus a better haptic feedback effect. Illustratively, the ratio of the area of the second sub-electrode block to the area of the first sub-electrode block is 0.5 to 0.8, such as 0.5, 0.55, 0.6, 0.65, 0.7, 0.75, or 0.8.
In a second embodiment, referring to fig. 4, the piezoelectric micromachined ultrasonic transducer array includes a sealing layer, a substrate 21, a structural layer 22, a first electrode layer 23, a piezoelectric layer 24, and a second electrode layer 25, which are sequentially stacked; the substrate 21 is provided with a plurality of through holes 211 which are arranged in an array manner, and the through holes 211, the structural layer 22 and the sealing layer form a closed cavity; the first electrode layer 23 and/or the second electrode layer 25 are patterned electrode layers, and the patterned electrode layers include a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes 211; the second electrode layer 25 faces the haptic feedback surface away from a side surface of the piezoelectric layer 24. The number of the ultrasonic transducers in the ultrasonic transducer array 2 is the same as that of the through holes 211, and the positions of the ultrasonic transducers correspond to the positions of the through holes 211. The first electrode layer 23 and the second electrode layer 25 are electrically connected with the control module, so that each ultrasonic transducer can be independently driven by the touch module. It should be understood that the materials and structures of the respective functional layers in the piezoelectric micromachined ultrasonic transducer array in the second embodiment may be the same as those of the respective functional layers in the piezoelectric micromachined ultrasonic transducer array in the first embodiment, and will not be described herein.
Preferably, the sealing layer is a vibration matching layer 26. The vibration matching layer 26 has a low acoustic impedance and a high acoustic velocity, and can effectively reduce the reflection and loss of the ultrasonic wave generated by the ultrasonic transducer, thereby improving the transmission efficiency of the ultrasonic wave, further improving the vibration intensity, and being beneficial to improving the haptic feedback effect. The vibration matching layer 26 may be an organic film such as polyurethane or polyethylene, or may be another material.
According to an embodiment of the present application, the display device may further include an adhesive layer between the touch display screen 1 and the ultrasonic transducer array 2 to fix the ultrasonic transducer array 2 to one side surface of the touch display screen 1. Fig. 4 shows the second electrode layer 25 of the piezoelectric micromachined ultrasonic transducer array and the touch display screen 1 being fixed together with the adhesive layer 3, fig. 5 shows the substrate 21 of the piezoelectric micromachined ultrasonic transducer array and the touch display screen 1 being fixed together with the adhesive layer 3,
according to the embodiment of the application, the touch display screen 1 comprises a substrate, the substrate is a flexible substrate, and at this time, the touch display screen 1 is a flexible touch display screen, which is beneficial to improving the vibration transmission effect and thus the haptic feedback effect. Further, when the ultrasonic transducer array 2 is a piezoelectric micro-mechanical ultrasonic transducer array, the substrate is a flexible substrate, and can better transfer the touch pressure to the piezoelectric layer 24, so that the accuracy of the control module to calculate the touch pressure is improved, and a user experiences more real physical touch.
In a second aspect, the present application provides a method for manufacturing a display device, including:
forming a touch display screen 1, wherein the touch display screen 1 is provided with a touch display surface and a touch feedback surface which are arranged oppositely, and the touch display screen 1 is suitable for acquiring a touch position;
forming an ultrasonic transducer array 2, wherein the ultrasonic transducer array 2 is positioned on the tactile feedback surface, the ultrasonic transducer array 2 comprises a plurality of ultrasonic transducers arranged in an array, and each ultrasonic transducer is suitable for working independently;
the control module is provided with an input end and an output end, the input end is electrically connected with the touch display screen 1, the output end is electrically connected with the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer at the touch position to perform vibration feedback.
In a first embodiment, a method of manufacturing a display device includes the steps of: forming a touch display screen 1; after the touch display screen 1 is formed, the ultrasonic transducer array 2 is formed on the tactile feedback surface of the touch display screen 1.
As a specific example of the first embodiment, the step of forming the ultrasonic transducer array 2 at the haptic feedback surface includes:
referring to fig. 6, a substrate 21 is formed on the haptic feedback surface, and the substrate 21 has a plurality of through holes 211 arranged in an array; specifically, the substrate 21 may be obtained by forming a photoresist layer on the tactile feedback surface and etching the photoresist layer, and the substrate 21 may also be manufactured by other manufacturing methods.
Referring to fig. 7, a structural layer 22 is formed on a surface of the substrate 21 facing away from the touch display screen 1, so that the through hole 211 forms a closed cavity; specifically, the structural layer 22 may be prefabricated, and then the structural layer 22 may be adhered to a surface of the substrate 21 facing away from the touch display screen 1, or the structural layer 22 may be formed on a surface of the substrate 21 facing away from the touch display screen 1 in other manners.
Referring to fig. 8, a first electrode layer 23 is formed on a surface of the structural layer 22 facing away from the touch display screen 1.
Referring to fig. 9, a piezoelectric layer 24 is formed on the surface of one side of the first electrode layer 23 facing away from the touch display screen 1; specifically, the piezoelectric layer 24 is formed by spin coating or magnetron sputtering.
Referring to fig. 10, a second electrode layer 25 is formed on a surface of the piezoelectric layer 24 facing away from the touch display screen 1;
it should be noted that, the first electrode layer 23 and/or the second electrode layer 25 are patterned electrode layers, the patterned electrode layers include sub-electrode blocks arranged in an array and spaced apart from each other, the sub-electrode blocks are disposed opposite to the through holes 211, and the first electrode layer 23 in fig. 6 and the second electrode layer 25 in fig. 8 are patterned electrode layers. The preparation method of the patterned electrode layer comprises the following steps: forming a whole electrode layer, wherein the process for forming the whole electrode layer comprises, but is not limited to, a vacuum evaporation method and a magnetron sputtering method; and etching the whole electrode layer to obtain the patterned electrode layer.
Preferably, referring to fig. 11, the step of forming the ultrasonic transducer array 2 on the haptic feedback surface further includes: after the second electrode layer 25 is formed, a vibration matching layer 26 is formed on a surface of a side of the second electrode layer 25 facing away from the touch display screen 1. Specifically, the vibration matching layer 26 may be formed by coating a slurry or the like.
In a second embodiment, the method for manufacturing a display device includes the steps of: forming the touch display screen 1; forming the ultrasonic transducer array 2; after the touch display screen 1 and the ultrasonic transducer array 2 are formed, the ultrasonic transducer array 2 is stuck on the tactile feedback surface. The touch display screen 1 and the ultrasonic transducer array 2 can be prefabricated in advance, which is beneficial to shortening the time required for preparing the display device and improving the production efficiency.
As a specific example of the second embodiment, the method of manufacturing the ultrasonic transducer array 2 shown in fig. 12 includes the steps of:
step S1a, providing an initial substrate, wherein the initial substrate is used for forming the substrate 21 in FIG. 12; in particular, the material of the initial substrate includes, but is not limited to, a monocrystalline silicon wafer.
Step S2a, a structural layer 22 is formed on one side surface of the initial substrate.
Step S3a, forming a first electrode layer 23 on a surface of the structure layer 22 facing away from the initial substrate.
In step S4a, a piezoelectric layer 24 is formed on a surface of the first electrode layer 23 facing away from the initial substrate.
In step S5a, a second electrode layer 25 is formed on a surface of the piezoelectric layer 24 facing away from the initial substrate.
Step S6a, etching the initial substrate to obtain a substrate 21 with a plurality of through holes 211; when the material of the initial substrate is monocrystalline silicon, the method of etching the initial substrate includes, but is not limited to, a deep reactive ion etching method.
After the ultrasonic transducer array 2 shown in fig. 12 is manufactured, a surface of the substrate 21 facing away from the structural layer 22 is adhered to a tactile feedback surface, to obtain the display device shown in fig. 5.
The first electrode layer 23 and/or the second electrode layer 25 are patterned electrode layers; the piezoelectric layer 24 and the patterned electrode layer may be formed according to the method provided in the first embodiment, and will not be described herein again; the structural layer 22 may be formed using spin coating, attachment, or sputtering processes.
Preferably, continuing with fig. 12, the method for preparing the ultrasonic transducer array 2 further includes: after the second electrode layer 25 is formed, before the initial substrate is etched, a vibration matching layer 26 is formed on a side surface of the second electrode layer 25 facing away from the initial substrate. The vibration matching layer 26 may be formed according to the method provided in the first embodiment, and will not be described again.
As another specific example of the second embodiment, the method of manufacturing the ultrasonic transducer array 2 shown in fig. 13 includes the steps of:
step S1b, providing an initial substrate, wherein the initial substrate is used for forming the substrate 21 in FIG. 13; in particular, the material of the initial substrate includes, but is not limited to, a monocrystalline silicon wafer.
Step S2b, forming a structural layer 22 on one side surface of the initial substrate.
Step S3b, forming a first electrode layer 23 on a surface of the structure layer 22 facing away from the initial substrate.
In step S4b, a piezoelectric layer 24 is formed on a surface of the first electrode layer 23 facing away from the initial substrate.
Step S5b, forming a second electrode layer 25 on a surface of the piezoelectric layer 24 facing away from the initial substrate.
Step S6b, etching the initial substrate to obtain a substrate 21 with a plurality of through holes 211; when the material of the initial substrate is monocrystalline silicon, the method of etching the initial substrate includes, but is not limited to, a deep reactive ion etching method.
In step S7b, a sealing layer is adhered to a surface of the substrate 21, which is far away from the structural layer 22, and the through hole 211, the structural layer 22 and the sealing layer form a closed cavity. Preferably, the sealing layer is a vibration matching layer 26.
After the above-mentioned ultrasonic transducer array 2 is manufactured, a side surface of the second electrode layer 25 facing away from the piezoelectric layer 24 is adhered to the tactile feedback surface, to obtain the display device shown in fig. 4.
The first electrode layer 23 and/or the second electrode layer 25 are patterned electrode layers; the piezoelectric layer 24 and the patterned electrode layer may be formed according to the method provided in the first embodiment, and will not be described herein again; the structural layer 22 may be formed using spin coating, attachment, or sputtering processes.
The terms "first," "second," and the like herein are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the application, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the application.

Claims (11)

1. A display device, comprising:
the touch control display screen is provided with a touch control display surface and a touch control feedback surface which are arranged oppositely, and the touch control display screen is suitable for acquiring a touch control position;
the ultrasonic transducer array is positioned on the tactile feedback surface and comprises a plurality of ultrasonic transducers arranged in an array manner, and each ultrasonic transducer is suitable for working independently;
the control module is provided with an input end and an output end, the input end is electrically connected with the touch display screen, the output end is electrically connected with the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer at the touch position to perform vibration feedback.
2. The display device of claim 1, wherein the ultrasound transducer array is a piezoelectric micromachined ultrasound transducer array or a capacitive micromachined ultrasound transducer array.
3. The display device according to claim 2, wherein the piezoelectric micromachined ultrasonic transducer array includes a substrate, a structural layer, a first electrode layer, a piezoelectric layer, and a second electrode layer, which are stacked in this order; the substrate is provided with a plurality of through holes which are arrayed, and part of the surface of the structural layer is exposed in the through holes; the first electrode layer and/or the second electrode layer is/are a patterned electrode layer, the patterned electrode layer comprises a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes; a side surface of the substrate facing away from the structural layer faces the tactile feedback surface;
preferably, the piezoelectric micromachined ultrasonic transducer further includes a vibration matching layer, and the vibration matching layer is located on a surface of one side of the second electrode layer, which is away from the piezoelectric layer.
4. A display device according to claim 3, wherein the first electrode layer comprises first sub-electrode blocks arranged in an array, the second electrode layer comprises second sub-electrode blocks arranged in an array, the first sub-electrode blocks and the second sub-electrode blocks are arranged opposite to the through holes, and the area of the second sub-electrode blocks is smaller than that of the first sub-electrode blocks;
preferably, the ratio of the area of the second sub-electrode block to the area of the first sub-electrode block is 0.5 to 0.8.
5. The display device according to claim 2, wherein the piezoelectric micromachined ultrasonic transducer array includes a sealing layer, a substrate, a structural layer, a first electrode layer, a piezoelectric layer, and a second electrode layer, which are stacked in this order; the substrate is provided with a plurality of through holes which are arrayed, and the through holes, the structural layer and the sealing layer form a closed cavity; the first electrode layer and/or the second electrode layer is/are a patterned electrode layer, the patterned electrode layer comprises a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes; a side surface of the second electrode layer facing away from the piezoelectric layer faces the tactile feedback surface;
preferably, the sealing layer is a vibration matching layer.
6. The display device of claim 1, wherein the touch display screen comprises a substrate, the substrate being a flexible substrate.
7. A method of manufacturing a display device, comprising:
forming a touch display screen, wherein the touch display screen is provided with a touch display surface and a touch feedback surface which are arranged oppositely, and the touch display screen is suitable for acquiring a touch position;
forming an ultrasonic transducer array, wherein the ultrasonic transducer array is positioned on the tactile feedback surface and comprises a plurality of ultrasonic transducers arranged in an array manner, and each ultrasonic transducer is suitable for working independently;
the method comprises the steps of providing a control module, wherein the control module is provided with an input end and an output end, the input end is electrically connected with the touch display screen, the output end is electrically connected with the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer at the touch position to perform vibration feedback.
8. The method for manufacturing a display device according to claim 7, comprising:
forming the touch display screen;
after the touch display screen is formed, the ultrasonic transducer array is formed on a touch feedback surface of the touch display screen.
9. The method of claim 8, wherein the step of forming the ultrasonic transducer array on the haptic feedback surface comprises:
forming a substrate on the tactile feedback surface, wherein the substrate is provided with a plurality of through holes which are arrayed;
forming a structural layer on the surface of one side of the substrate, which is away from the touch display screen, wherein the through holes form a closed cavity;
forming a first electrode layer on the surface of one side of the structural layer, which is away from the touch display screen;
forming a whole piezoelectric layer on the surface of one side of the first electrode layer, which is away from the touch display screen;
forming a second electrode layer on the surface of one side of the piezoelectric layer, which is away from the touch display screen;
the first electrode layer and/or the second electrode layer is/are a patterned electrode layer, the patterned electrode layer comprises sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes;
preferably, the step of forming the substrate on the haptic feedback surface includes: forming a photoresist layer on the tactile feedback surface, and etching the photoresist layer to obtain the substrate;
preferably, the step of forming a structural layer on a surface of the substrate on a side facing away from the touch display screen includes: prefabricating the structural layer, and adhering the structural layer to the surface of one side of the substrate, which faces away from the touch display screen.
10. The method of claim 9, wherein the step of forming the ultrasound transducer array on the tactile feedback surface further comprises: and after the second electrode layer is formed, forming a vibration matching layer on the surface of one side of the second electrode layer, which is away from the touch display screen.
11. The method for manufacturing a display device according to claim 7, comprising:
forming the touch display screen;
forming the ultrasonic transducer array;
after the touch display screen and the ultrasonic transducer array are formed, the ultrasonic transducer array is adhered to the tactile feedback surface.
CN202310729215.6A 2023-06-19 2023-06-19 Display device and method for manufacturing the same Pending CN116774855A (en)

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CN202310729215.6A CN116774855A (en) 2023-06-19 2023-06-19 Display device and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310729215.6A CN116774855A (en) 2023-06-19 2023-06-19 Display device and method for manufacturing the same

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Publication Number Publication Date
CN116774855A true CN116774855A (en) 2023-09-19

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