CN116753373A

CN116753373A - Pipe end connector, pipe butt joint device and semiconductor equipment

Info

Publication number: CN116753373A
Application number: CN202310693786.9A
Authority: CN
Inventors: 唐仁鹏; 董文惠; 路希龙; 何吉超
Original assignee: Tuojing Technology Shanghai Co ltd
Current assignee: Tuojing Technology Shanghai Co ltd
Priority date: 2023-06-12
Filing date: 2023-06-12
Publication date: 2023-09-15

Abstract

The embodiment of the application provides a pipe end connector, a pipeline butt joint device and semiconductor equipment, and relates to the technical field of semiconductors. The pipe end connector comprises a connecting pipe body, an outer sleeve, a butt joint pipe and a valve core. The valve core is arranged at one end of the connecting pipe body and partially protrudes out of the connecting pipe body, and a flow channel is formed between the valve core and the connecting pipe body so as to allow gas to pass through. A valve seat is formed at one end of the butt joint pipe. The outer sleeve is sleeved on the butt joint pipe and the connecting pipe body, and the connecting pipe body can move relative to the butt joint pipe by rotating the outer sleeve so as to enable the valve core to be combined with or separated from the valve seat. It can block the end of the pipe, thereby avoiding leakage of gas or liquid.

Description

Pipe end connector, pipe butt joint device and semiconductor equipment

Technical Field

The application relates to the field of semiconductors, in particular to a pipe end connector, a pipeline butt joint device and semiconductor equipment.

Background

In the semiconductor industry, films have a very important role, and the formation of films is a result of the interaction of various gases and liquids, so that a large number of pipelines are arranged in the film equipment for connecting the substances, and the risk of leakage is increased along with the increase of the pipelines.

Because the reaction can be carried out between the gas and the gas or between the liquid and the liquid, in order to ensure the safe work of maintenance personnel, the internal gas or the liquid must be completely removed during the leakage maintenance work generally, and the mode is more troublesome and can have the problem of uncleanness.

Disclosure of Invention

The object of the present application includes, for example, providing a pipe end fitting, a pipe joint device and a semiconductor device, which are capable of blocking an end portion of a pipe so that leakage of gas or liquid can be avoided.

Embodiments of the application may be implemented as follows:

in a first aspect, the present application provides a pipe end connector comprising a connecting pipe body, an outer sleeve, a butt joint pipe and a valve core;

the valve core is arranged at one end of the connecting pipe body and partially protrudes out of the connecting pipe body, and a flow passage is formed between the valve core and the connecting pipe body so as to allow gas to pass through;

a valve seat is formed at one end of the butt joint pipe;

the outer sleeve is sleeved on the butt joint pipe and the connecting pipe body, and the outer sleeve can be rotated to enable the connecting pipe body to move relative to the butt joint pipe so as to enable the valve core to be combined with or separated from the valve seat.

In an alternative embodiment, the outer periphery of the butt joint pipe is convexly provided with a limiting table, the inner periphery of the outer sleeve is provided with a clamping table, the outer sleeve is rotatably sleeved outside the butt joint pipe, and the limiting table is in butt joint with the clamping table.

In an alternative embodiment, the outer periphery of the connecting pipe body is provided with threads, the inner periphery of the outer sleeve is provided with threads, and one end of the connecting pipe body provided with the valve core is rotatably mounted on the outer sleeve through the threaded fit.

In an alternative embodiment, the pipe end connector further comprises a telescopic pipe, one end of the telescopic pipe is connected with the connecting pipe body, the other end of the telescopic pipe is connected with the butt joint pipe, and the telescopic pipe can be stretched by rotating the outer sleeve.

In an alternative embodiment, the telescopic tube is a bellows, one end of the bellows is fixedly connected with the end part of the connecting tube body, and the other end of the bellows is fixedly connected with the butt joint tube.

In an alternative embodiment, the valve seat is disposed at the inner periphery of the butt joint pipe, an abutment inclined plane is disposed at one side of the valve seat, which is close to the connecting pipe body, and a sealing ring is disposed on the valve seat and can abut against the abutment inclined plane.

In an alternative embodiment, the outer periphery of the side of the butt joint pipe far away from the connecting pipe body is provided with a connecting flange.

In an alternative embodiment, a switch indication strip is arranged on the outer periphery of the connecting pipe body and used for indicating the relative position of the valve core and the valve seat.

In a second aspect, the present application provides a pipe-line interface for interfacing between two pipes, comprising a clamp and two pipe-end fittings as described in any of the previous embodiments;

the two connecting pipe bodies of the two pipe end connectors are respectively used for being connected with two pipelines;

the two butt pipes of the two pipe end joints are connected through the clamp.

In an alternative embodiment, the pipe interfacing device further comprises a gasket disposed between the two pipe ends for sealing.

In a third aspect, the present application provides a semiconductor device comprising the pipe end fitting of any of the preceding embodiments; or, the pipeline butt joint device comprises the pipeline butt joint device in the previous embodiment.

The pipe end connector, the pipe butt joint device and the semiconductor device provided by the embodiment of the application have the beneficial effects that:

according to the application, the pipe end connector is arranged, the connecting pipe body of the pipe end connector is connected with the end part of the pipeline, and before the pipeline is disassembled, the outer sleeve is rotated to enable the valve core to be combined with the valve seat, so that the pipeline can be sealed, and gas or liquid leakage in the maintenance process can be avoided. After maintenance, the outer sleeve is rotated again to separate the valve core from the valve seat, so that gas or liquid can be communicated.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a pipe butt joint device according to an embodiment of the present application;

FIG. 2 is an exploded view of a piping interfacing apparatus according to an embodiment of the present application;

FIG. 3 is a schematic view of a pipe end fitting according to an embodiment of the present application;

FIG. 4 is a schematic cross-sectional view of a tube end fitting according to an embodiment of the present application;

fig. 5 is a schematic structural view of a connecting pipe body and a valve core of a pipe end connector according to an embodiment of the present application.

Icon: 100-pipe end joint; 110-connecting the pipe body; 111-flow channels; 113-a switch indicator bar; 130-outer sleeve; 131-clamping a table; 150-interfacing tube; 151-valve seat; 153-limiting table; 155-abutting the inclined surface; 157-a connection flange; 170-valve core; 171-a seal ring groove; 173-sealing ring; 180-telescoping tube; 300-a pipeline butt joint device; 310-clamping hoop; 330-gasket.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments of the present application. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present application, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present application and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present application.

Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.

It should be noted that the features of the embodiments of the present application may be combined with each other without conflict.

Examples

The inventors have found that there are a large number of lines within the membrane device for connecting these substances, and that the risk of leakage increases with the number of lines. Because the reaction can be carried out between the gas and the gas or between the liquid and the liquid, in order to ensure the safe work of maintenance personnel, the internal gas or the liquid must be completely removed during the leakage maintenance work generally, and the mode is more troublesome and can have the problem of uncleanness.

In order to solve the above-mentioned technical problems, referring to fig. 1 and 2, the present embodiment provides a semiconductor device, which may be a tad atomic layer deposition device. Which can avoid leakage of gas or liquid during maintenance of the pipeline.

In this embodiment, the semiconductor device includes a plurality of gas or liquid supply lines to supply gas or liquid to the chamber. The two pipelines are connected through a pipeline butt joint device 300.

In this embodiment, the pipe interfacing device 300 includes a clamp 310 and two pipe end fittings 100. The two pipe ends 100 are connected to two pipes, respectively, and the clamp 310 clamps the two pipe ends 100 together.

Referring to fig. 3, 4 and 5, in the present embodiment, the pipe end connector 100 includes a connecting pipe body 110, an outer sleeve 130, a butt joint pipe 150 and a valve core 170. The valve core 170 is disposed at one end of the connecting pipe body 110 and partially protrudes out of the connecting pipe body 110, and a flow channel 111 is formed between the valve core 170 and the connecting pipe body 110 for allowing the gas to pass through. The end of the connection pipe body 110 is fixedly connected with the end of the pipe. A valve seat 151 is formed at one end of the docking tube 150. The outer sleeve is sleeved outside the butt joint pipe 150 and the connecting pipe body 110, and the rotating outer sleeve can enable the connecting pipe body 110 to move relative to the butt joint pipe 150 so as to enable the valve core 170 to be combined with or separated from the valve seat 151.

The pipe end connector 100 provided in this embodiment connects the connecting pipe body 110 of the pipe end connector 100 with the end of the pipe, and before the pipe is disassembled, the outer sleeve 130 is rotated to combine the valve core 170 with the valve seat 151, so that the pipe can be sealed, and gas or liquid leakage in the maintenance process can be avoided. After maintenance, the outer sleeve 130 is rotated to separate the valve element 170 from the valve seat 151, thereby allowing gas or liquid communication.

Referring to fig. 3, 4 and 5, in the present embodiment, the connecting pipe body 110 and the valve core 170 are integrally formed, and a flow channel 111 is formed between the valve core 170 and the connecting pipe body 110.

In the present embodiment, the end of the valve core 170 is provided with a connection block, which is connected to the inner wall of the connection pipe body 110, and a gap between the connection blocks forms the flow passage 111.

Normally, the valve core 170 is separated from the valve seat 151, and the liquid or gas sequentially passes through the connection pipe body 110, the outer sleeve 130 and the butt joint pipe 150 through the pipeline, flows into the pipe end connector 100 at the rear end, and flows into another connected pipeline. When the pipeline is required to be maintained, the outer sleeves 130 of the two pipe end connectors 100 of the same joint are rotated, so that the valve core 170 is combined with the valve seat 151, the ends of the two connected pipelines can be plugged, and then the clamp 310 is detached, so that gas or liquid leakage can be avoided.

In the present embodiment, the outer periphery of the butt joint tube 150 is convexly provided with a limiting table 153, the inner periphery of the outer sleeve 130 is provided with a clamping table 131, the outer sleeve 130 is rotatably sleeved outside the butt joint tube 150, and the limiting table 153 is abutted with the clamping table 131.

Referring to fig. 3, 4 and 5, the limiting table 153 and the clamping table 131 are provided in the present embodiment to facilitate the assembly between the docking tube 150 and the outer sleeve 130.

In this embodiment, the outer periphery of the connecting pipe body 110 is provided with threads, the inner periphery of the outer sleeve 130 is provided with threads, and one end of the connecting pipe body 110 provided with the valve core 170 is rotatably mounted on the outer sleeve 130 through threaded engagement.

In this embodiment, the connecting pipe body 110 and the outer sleeve 130 are connected through threads, and the outer sleeve 130 is rotated, so that the connecting pipe body 110 can be conveniently moved towards the direction approaching the butt joint pipe 150 or moved away from the butt joint pipe 150, so that the valve core 170 is combined with or separated from the valve seat 151.

Of course, in other embodiments of the present application, the outer sleeve 130 may be movably connected to the docking tube 150 and the connection tube body 110 by other mechanical connection methods.

In this embodiment, the pipe end connector 100 further includes a telescopic pipe 180, one end of the telescopic pipe 180 is connected to the connecting pipe body 110, the other end is connected to the butt joint pipe 150, and the telescopic pipe 180 can be extended and contracted by rotating the outer sleeve 130.

A bellows 180 is provided between the tube end fitting 100 and the connection tube body 110, so that leakage of gas or liquid from the connection tube body 110 and the position where the docking tube 150 is mated with the outer tube 130 can be prevented.

Referring to fig. 3, 4 and 5, in the present embodiment, the telescopic tube 180 is a bellows, one end of the bellows is fixedly connected to the end of the connecting tube body 110, and the other end of the bellows is fixedly connected to the butt joint tube 150.

The bellows may lengthen after being pulled and shorten after being pressurized, thereby better enabling movement of the connection tube body 110 relative to the docking tube 150 while achieving a seal.

In the present embodiment, the bellows, the connection pipe body 110, and the docking pipe 150 are all made of metal. One end of the bellows is welded to the connection pipe body 110, and the other end is welded to the butt pipe 150.

Of course, in other embodiments of the present application, the bellows may also be mounted to the connection tube body 110 and the docking tube 150 by a snap fit or interference fit.

In other embodiments of the present application, the telescoping tube 180 may be configured as other tubes that are telescoping, such as a flexible tube.

Referring to fig. 3, 4 and 5, in the present embodiment, a valve seat 151 is disposed at an inner periphery of the butt joint pipe 150, an abutment inclined surface 155 is disposed at a side of the valve seat 151 near the butt joint pipe body 110, a valve core 170 is provided with a sealing ring 173, and the sealing ring 173 can abut against the abutment inclined surface 155.

In this embodiment, the abutment inclined surface 155 is provided on the valve seat 151, and the sealing ring 173 is provided on the valve core 170, so that the sealing between the valve core 170 and the valve seat 151 can be better achieved.

In the present embodiment, the valve body 170 is provided with a seal groove 171, and a seal 173 is fitted in the seal groove 171.

Referring to fig. 3, 4 and 5, in the present embodiment, a connection flange 157 is disposed at an outer periphery of the side of the connection pipe 150 away from the connection pipe body 110. The clamp 310 is a KF clamp 310, the clamp 310 being clamped onto the connection flanges 157 of two pipe end fittings 100.

In this embodiment, the clamp includes two semicircle annular joint portions and fixing bolt that the shell rotates to be connected, and the joint of two semicircle rings is not inside to be provided with the draw-in groove, and the draw-in groove card is on the flange, and rethread bolt-up lets two butt in some to realize the butt joint.

Generally, the cross section of the clamping groove is in a trapezoid structure, and the larger the pre-tightening example of the bolt is, the more fastening and sealing are realized.

In some embodiments of the present application, in order to facilitate the assembly between the nipple 150 and the outer sleeve 130, the nipple 150 may be provided as two parts of the housing that are disassembled so as to be integrally connected by a screw connection or the like.

In the present embodiment, the outer circumference of the connection pipe body 110 is provided with a switch indication bar 113 for indicating the relative position of the valve core 170 and the valve seat 151.

The switch indicator strip 113 has two different turns of color, such as red and green, that can indicate that the pipe end fitting 100 is in the closed and open states.

Referring to fig. 2, in the present embodiment, the pipe butt joint apparatus 300 further includes a sealing gasket 330, and the sealing gasket 330 is disposed between the two pipe end connectors 100 for sealing.

In summary, the working principles and beneficial effects of the pipe end connector 100, the pipe butt joint device 300 and the semiconductor device provided in the embodiments of the present application include:

in this embodiment, the pipe end connector 100 is provided to connect the connecting pipe body 110 of the pipe end connector 100 with the end of the pipe, and before the pipe is disassembled, the outer sleeve 130 is rotated to combine the valve core 170 with the valve seat 151, so that the pipe can be sealed, and gas or liquid leakage in the maintenance process can be avoided. After maintenance, the outer sleeve 130 is rotated to separate the valve element 170 from the valve seat 151, thereby allowing gas or liquid communication.

The present application is not limited to the above embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present application are intended to be included in the scope of the present application. Therefore, the protection scope of the application is subject to the protection scope of the claims.

Claims

1. The pipe end connector is characterized by comprising a connecting pipe body, an outer sleeve, a butt joint pipe and a valve core;

a valve seat is formed at one end of the butt joint pipe;

2. The pipe end connector of claim 1, wherein the outer periphery of the butt joint pipe is convexly provided with a limiting table, the inner periphery of the outer sleeve is provided with a clamping table, the outer sleeve is rotatably sleeved outside the butt joint pipe, and the limiting table is abutted with the clamping table.

3. The pipe end fitting according to claim 2, wherein the outer circumference of the connecting pipe body is provided with threads, the inner circumference of the outer sleeve is provided with threads, and the end of the connecting pipe body provided with the valve core is rotatably mounted to the outer sleeve by screw-fitting.

4. A pipe end fitting according to any one of claims 1-3, further comprising a telescopic pipe, one end of which is connected to the connecting pipe body and the other end is connected to the docking pipe, the telescopic pipe being telescopic by rotating the outer sleeve.

5. The pipe end connector of claim 4 wherein said telescoping tube is a bellows, one end of which is fixedly connected to an end of said connecting pipe body, and the other end of which is fixedly connected to said mating pipe.

6. A pipe end joint according to any one of claims 1 to 3, wherein the valve seat is provided at the inner periphery of the butt pipe, an abutment inclined surface is provided on a side of the valve seat adjacent to the connecting pipe body, and the valve core is provided with a sealing ring which is abuttable against the abutment inclined surface.

7. A pipe end fitting according to any one of claims 1 to 3, wherein the outer periphery of the side of the mating pipe remote from the connecting pipe body is provided with a connecting flange.

8. A pipe end fitting according to any one of claims 1 to 3, wherein the outer periphery of the connecting pipe body is provided with a switch indicator strip for indicating the relative position of the valve core and the valve seat.

9. A pipe butt joint device for butt joint between two pipes, comprising a clamp and two pipe end joints according to any one of claims 1 to 8;

the two butt pipes of the two pipe end joints are connected through the clamp.

10. The pipe docking apparatus of claim 9 further comprising a gasket disposed between the two pipe ends for sealing.

11. A semiconductor device comprising the pipe end connection of any one of claims 1-8; or, comprising the pipe interfacing device of claim 9 or 10.