CN116750388A - Automatic transfer conveying system for wafer boxes - Google Patents

Abstract

The application discloses an automatic transfer and conveying system for wafer boxes, which relates to the technical field of wafer box conveying equipment and comprises the following components: a wafer cassette for handling and storing, comprising: the transfer station is internally provided with a cavity, and a buffer station for stacking the wafer cassettes is arranged in the cavity; the two sides of the transfer station are respectively provided with a feeding station and a discharging station; the two sides of the transfer station are respectively provided with a feed inlet and a discharge outlet corresponding to the feeding station and the discharging station; the mechanical arm is arranged in the cavity, and a clamping jaw for clamping the wafer box is arranged on the mechanical arm; the visual positioning mechanism is used for acquiring visual information of the wafer box, and carrying the wafer box positioned on the feeding station to the caching station through the visual information control clamping jaw, and carrying the wafer box on the caching station to the discharging station. The transfer station has an automatic carrying function, improves carrying efficiency, and avoids colliding with the wafer box caused by errors during manual carrying.

Description

Automatic transfer conveying system for wafer boxes

Technical Field

The application relates to the technical field of wafer box conveying, in particular to an automatic wafer box transferring and conveying system.

Background

At present, the wafer box is generally piled up on the goods shelf in the transfer station through manual work after being loaded with full wafers, and is concentrated to be piled up, when the wafers are needed to be used, the wafer box is manually carried from the goods shelf to the carrier vehicle, and the wafers are sent to a needed place through the carrier vehicle.

For the carrying mode of the existing wafer box, firstly, the wafer box is carried manually by manpower in the prior art, so that the carrying efficiency is low; secondly, the wafer box is easy to be knocked by mistake in the process of carrying the wafer box by manpower, and the wafer loaded in the wafer box is damaged; furthermore, the existing transfer station only has the function of realizing temporary placement, and cannot realize an automatic carrying function.

Disclosure of Invention

The application aims to provide an automatic transfer and conveying system for wafer cassettes, which solves the problems that a transfer station in the prior art only has a single temporary placement function, the wafer cassettes are required to be manually conveyed to a goods shelf in the transfer station, the efficiency is low, and the wafer cassettes are easy to collide.

The aim of the application can be achieved by the following technical scheme:

an automatic transfer handling system for handling and storing wafer cassettes, comprising:

the transfer station is internally provided with a cavity, and a buffer station for stacking the wafer boxes is arranged in the cavity; the two sides of the transfer station are respectively provided with a feeding station and a discharging station; the two sides of the transfer station are respectively provided with a feed inlet and a discharge outlet corresponding to the feeding station and the discharging station;

the mechanical arm is arranged in the cavity, and a clamping jaw for clamping the wafer box is arranged on the mechanical arm;

the visual positioning mechanism is used for acquiring visual information of the wafer box, controlling the clamping jaw to carry the wafer box positioned on the feeding station to the caching station through the visual information, and carrying the wafer box on the caching station to the discharging station.

As a further scheme of the application: the transfer station is provided with a base, at least one groove is formed in the base, the mechanical arm is installed on the base and located on one side of the groove, a tray is arranged in the groove, a placement position formed by the tray forms the buffer storage station, a lifting mechanism used for driving the tray to lift is arranged in the cavity, and the lifting mechanism adjusts the height of the tray according to the stacking height of the wafer box on the tray, so that the mechanical arm can take and place the wafer box on the buffer storage station every time at a set height.

As a further scheme of the application: and a height sensor is arranged above the cache station and is used for detecting the distance between the wafer box on the cache station and the height sensor.

As a further scheme of the application: the tray is provided with a first inclination sensor for detecting whether the wafer boxes are stacked and inclined on the buffer station.

As a further scheme of the application: the tray comprises a horizontal bottom plate and vertical coamings arranged on the periphery of the horizontal bottom plate, the height of each vertical coamings is smaller than that of the wafer box, the area, surrounded by the vertical coamings, on the horizontal bottom plate forms the buffer storage station, and the first inclination sensor is arranged on the vertical coamings.

As a further scheme of the application: the transfer station is wholly rectangular, and has a base, locate the base lateral wall all around and locate the roof of lateral wall top, the base the lateral wall with the roof encloses to close and forms the cavity, the feed inlet with the discharge gate is seted up respectively on the lateral wall of opposite side, the recess is seted up on the base.

As a further scheme of the application: the mechanical arm is arranged in the middle of the base, two grooves are formed in the grooves and are respectively located on two opposite sides of the base, and the feeding port and the discharging port are respectively located on the other two opposite sides of the base.

As a further scheme of the application: and the mechanical arm or the clamping jaw is also provided with an identification reading sensor for acquiring the identification of the grabbed wafer box.

As a further scheme of the application: the automatic feeding device comprises a feeding station, a gate bar, a feeding station and a control unit, wherein the gate bar is arranged on one side of the transfer station, the feeding station is arranged in the gate bar, an opening for entering the feeding station is formed between the gate bar and the transfer station, and a proximity switch is arranged at the opening;

and/or the number of the groups of groups,

the loading station is provided with an in-place sensor for detecting whether the loading station has a wafer box or not and a second inclination sensor for detecting whether the wafer box is stacked and inclined on the loading station or not;

and/or the number of the groups of groups,

fireproof roller shutters are arranged on the feeding hole and the discharging hole.

As a further scheme of the application: still include with the transport vechicle of transfer station adaptation, the transport vechicle includes:

the unloading station is arranged on the vehicle body, the vehicle body is also provided with an environment detection device, and the environment detection mechanism comprises a plurality of groups of radars, a plurality of groups of ultrasonic sensors, a plurality of groups of anti-falling sensors and an alignment camera;

the anti-falling frame comprises a first frame body and a second frame body which are vertically arranged on a discharging station and are oppositely arranged, a stacking cavity for stacking a row of wafer boxes is formed around the first frame body and the second frame body, a pair of clamping gaps which are respectively arranged on two sides of the stacking cavity and are oppositely arranged are formed between the first frame body and the second frame body at intervals, and the width of the clamping gaps is smaller than that of the wafer boxes in the stacking cavity.

The application has the beneficial effects that: according to the application, the visual positioning mechanism is arranged in the transfer station, so that the mechanical arm automatically and automatically conveys the wafer box according to the visual information acquired by the visual positioning mechanism, and the transfer station has an automatic conveying function. Meanwhile, the wafer box is automatically carried through the mechanical arm, so that the carrying efficiency can be improved, and the wafer box is prevented from being knocked due to errors in manual carrying.

Drawings

The application is further described below with reference to the accompanying drawings.

FIG. 1 is a schematic view of the overall structure of the present application;

FIG. 2 is a front view of a transfer station of the present application;

FIG. 3 is a schematic view of the overall structure of the transport vehicle of the present application;

fig. 4 is a top view of the transporter in the present application.

Detailed Description

The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

It should be noted that the terms "first," "second," and the like as used herein do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The description of the present application in terms of "left", "right", "upper", "lower", "top", "bottom", etc. directions are defined based on the relationship of orientation or position shown in the drawings, and are merely for convenience of description and simplification of description, rather than to indicate or imply that the described structure must be constructed and operated in a specific orientation, and therefore, should not be construed as limiting the present application. In the description of the present application, the meaning of "plurality" is two or more unless specifically defined otherwise.

In the description of the present application, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.

As shown in the background art, the transfer station only has the temporary placement function at present, and the wafer box needs to be manually carried to the goods shelf in the transfer station for stacking, and the wafer box needs to be manually carried from the goods shelf during use, so that the carrying efficiency is low, the stacked wafer box is easy to incline, and the wafer box is easy to collide with in the carrying process of the wafer box, so that the wafer loaded in the interior is damaged. Therefore, the application provides an automatic transfer and conveying system for wafer boxes, which not only has a temporary placement function, but also can realize safe and efficient automatic conveying.

Referring to fig. 1-4, the present application is an automatic transfer and conveying system for wafer cassettes, for conveying wafer cassettes 200, comprising: the transfer station 1 is internally provided with a cavity 2, and a buffer station 5 for stacking the wafer cassettes 200 is arranged in the cavity 2; the two sides of the transfer station 1 are respectively provided with a feeding station 6 and a discharging station 7; the two sides of the transfer station 1 are respectively provided with a feed inlet 3 and a discharge outlet 4 corresponding to the feeding station 6 and the discharging station 7. The robot arm 8 is disposed in the cavity 2, and a clamping jaw (not shown) for clamping the wafer cassette 200 is disposed on the robot arm 8. The vision positioning mechanism (not shown) is used for acquiring the vision information of the wafer box, and carrying the wafer box 200 positioned on the loading station 6 to the caching station 5 through the vision information control clamping jaw, and carrying the wafer box 200 positioned on the caching station 5 to the unloading station 7. The visual positioning mechanism may be disposed on the mechanical arm 8 or the transfer station 1 according to practical situations, and is not specifically limited herein.

The wafer box 200 needs to be carried to the feeding station 6 by workers or other equipment, the vision positioning mechanism obtains the accurate position of the wafer box 200 on the feeding station 6, and the mechanical arm 8 is driven to drive the clamping jaw to move, so that the clamping jaw accurately clamps the wafer box 200 and then carries the wafer box 200 from the feed inlet 3 to the cavity 2, and the wafer box is orderly stacked on the buffer storage station 5. When the wafer box 200 needs to be carried out of the transfer station 1, the visual positioning mechanism obtains the position of the wafer box 200 piled on the buffer station 5, controls the mechanical arm 8 to drive the clamping jaw to clamp the wafer box 200, carries the wafer box out of the cavity 2 from the discharge hole 4, and orderly piles on the discharge station 7.

Specifically, the transfer station 1 is rectangular, and has a base 101, side walls 102 disposed around the base 101, and a top wall 103 disposed above the side walls 102, the base 101, the side walls 102, and the top wall 103 enclose to form a cavity 2, the feed inlet 3 and the discharge outlet 4 are respectively disposed on the side walls 102 on two opposite sides, and are rectangular windows, and the feed inlet 3 and the discharge outlet 4 are disposed in the middle of the corresponding sides and are symmetrically disposed. Fireproof rolling curtains are arranged on the feeding hole 3 and the discharging hole 4, and when a fire occurs in the cavity 2, the fireproof rolling curtains are closed to prevent the fire from spreading outside the cavity 2.

The robot arm 8 is a conventional multi-joint axis robot arm 8, and the clamping jaw is a clamping jaw capable of clamping the wafer box 200.

The vision positioning mechanism is also of an existing structure and comprises a binocular industrial camera and a controller, wherein the binocular industrial camera is used for acquiring pictures and video images and sending data to the controller, the controller analyzes the data acquired by the binocular industrial camera, and calculates the running paths of the mechanical arm 8 and the clamping jaw and controls the clamping jaw to clamp and stack the wafer box 200 according to analysis results.

In an embodiment, at least one groove 9 is formed on the base 101, the mechanical arm 8 is mounted on the base 101 and located at one side of the groove 9, a tray 11 is disposed in the groove 9, a buffer station 5 is formed at a placement position formed by the tray 11, and a lifting mechanism 10 for driving the tray 11 to lift is disposed in the cavity 2, wherein the lifting mechanism 10 can be a scissor type lifting frame or an air cylinder to be disposed at the bottom of the tray, or a lifting module is disposed on the side wall 102. The lifting mechanism 10 can adjust the height of the tray 11 according to the stacking height of the wafer cassettes 200 on the tray 11, so that the robot arm 8 can pick and place the wafer cassettes 200 from the buffer mechanism at a set height each time. In the application, the lifting mechanism 10 is arranged to change the height of the tray 11 along with the stacking height of the wafer boxes 200 on the tray 11, so that the mechanical arm 8 can take and put the wafer boxes 200 from the cache station 5 at the set height (the height which is adaptively set according to the specific condition of the mechanical arm 8) each time, the condition that the mechanical arm 8 needs to go down into the groove 9 when taking and putting the wafer boxes 200 each time is avoided, the moving range of the mechanical arm 8 is reduced, the complexity of adjusting the mechanical arm 8 is reduced, the moving track of the mechanical arm 8 is simpler, and the adjusting precision is higher.

Preferably, the mechanical arm 8 is arranged in the middle of the base 101, two grooves 9 are arranged, a tray 11 is arranged in each groove 9, the two grooves 9 are respectively positioned on two opposite sides of the base 101, and the feed inlet and the discharge outlet are respectively positioned on the other two opposite sides of the base 101.

In an embodiment, a height sensor is disposed above the buffer station 5, the height sensor may be specifically mounted on the top wall 103, the height sensor is used to detect a distance between the wafer cassette 200 on the buffer station 5 and the height sensor, and the lifting mechanism 10 adjusts the height of the tray 11 according to the distance detected by the height sensor, so that the mechanical arm 8 is not affected by the number of wafer cassettes 200 stacked on the buffer station 5, and each time the wafer cassettes 200 can be carried to the buffer station 5 at a set height to stack the wafer cassettes 200 or carry the wafer cassettes 200 from the buffer station 5.

In an embodiment, the tray 11 is provided with a first inclination sensor, the first inclination sensor is used for detecting whether the stacking of the wafer box 200 on the buffer station 5 is inclined, when the mechanical arm 8 stacks the wafer box 200 on the buffer station 5, the first inclination sensor detects that the wafer box 200 stacked on the buffer station 5 is inclined, the clamping jaw does not loosen the wafer box 200, the vision positioning mechanism positions the wafer box 200 stacked on the buffer station 5 again, the operation path of the mechanical arm 8 is analyzed again until the wafer box 200 clamped by the clamping jaw is stacked on the buffer station 5, the first inclination sensor does not send an inclination signal, and the clamping jaw loosens the wafer box 200 to stack the wafer box 200 on the buffer station 5.

In one embodiment, the tray 11 includes a horizontal base 111 and vertical enclosures 112 provided around the peripheral edges of the horizontal base 111. The horizontal bottom plate 111 is the rectangular plate, and vertical bounding wall 112 is equipped with four, all is the L template, erects respectively and locates four corners of horizontal bottom plate 111, and the interval sets up between the adjacent vertical bounding wall 112. The area of the horizontal bottom plate 111 surrounded by the vertical coaming 112 is the buffer station 5, and the area of the buffer station 5 is slightly larger than the projection area of the wafer cassette 200 on the buffer station 5. The vertical coaming 112 has a height less than the height of the wafer cassette 200, so that the vertical coaming 112 can limit the bottommost wafer cassette 200 stacked on the horizontal bottom plate 111, and prevent the wafer cassette 200 from sliding off the horizontal bottom plate 111. A first tilt sensor is provided on the vertical enclosure 112 to detect whether the projected area of the wafer cassette 200 exceeds the buffer station 5.

In one embodiment, the robot arm 8 or the clamping jaw is provided with an identification reading sensor, and the identification reading sensor obtains the identification of the wafer box 200 when the clamping jaw clamps the wafer box 200, so as to track the position of the wafer box 200.

In an embodiment, the door rail 12 is further disposed at one side of the transfer station 1, the door rail 12 includes a first baffle 121 disposed opposite to the transfer station 1, and a second baffle 122 vertically disposed between the first baffle 121 and the transfer station 1 and located at one end of the first baffle 121, where the first baffle 121, the second baffle 122, and the transfer station 1 enclose to form the loading station 6, and one or more columns of wafer cassettes 200 are stacked on the loading station 6. An opening is formed between the other end of the first baffle 121 and the transfer station 1 so that the wafer cassette 200 can be fed into the loading station 6 through the opening. The first breast board 121 or transfer station 1 is last to be equipped with the proximity switch that is located the opening part, and arm 8 stop operation when the staff gets into proximity switch's response scope, guarantees staff's safety.

In an embodiment, the loading station 6 is provided with an in-situ sensor (not shown) and a second tilt sensor (not shown), the in-situ sensor is used for detecting whether the loading station 6 has the wafer box 200, and when the in-situ sensor senses that the loading station 6 has the wafer box 200, the vision positioning mechanism positions the wafer box 200 on the loading station 6. The second inclination sensor is used for detecting whether the wafer box 200 piled on the feeding station 6 inclines or not, when the second inclination sensor detects that the wafer box 200 piled on the feeding station 6 is orderly piled, the clamping jaw clamps and carries the wafer box 200, so that the situation that workers randomly place the wafer box 200 on the feeding station 6 to cause interference for clamping of the follow-up clamping jaw is avoided.

In an embodiment, the system further comprises a transport vehicle 13 adapted to the transfer station 1, referring to fig. 3 and 4, the transport vehicle 13 comprises: the vehicle body 131, the vehicle body 131 is provided with a carrying station 132, the vehicle body 131 is also provided with an environment detection device, and the environment detection mechanism comprises a plurality of groups of radars, a plurality of groups of ultrasonic sensors 137, a plurality of groups of anti-falling sensors 138 and an alignment camera 139; the anti-falling frame 133 comprises a first frame 1331 and a second frame 1332 which are vertically arranged on the carrying station 132 and are oppositely arranged, the first frame 1331 and the second frame 1332 are circumferentially arranged around to form a discharging station 7 for stacking a row of wafer boxes 200, clamping jaws are used for clamping and carrying the wafer boxes 200 on the feeding station 6 into the discharging station 7, and a pair of clamping gaps 134 which are respectively arranged on two sides of the discharging station 7 and are oppositely arranged are formed between the first frame 1331 and the second frame 1332 at intervals.

Specifically, the main body 131 includes a traveling base 1311 and a control box 1312 erected on the top surface of the traveling base 1311, and the control box 1312 is located at an end of one end of the top surface of the traveling base 1311. The walking base 1311 is provided with a plurality of groups of parallel universal wheels, a motor for driving the universal wheels to rotate and a battery pack for supplying power to the motor. An electric control component for controlling the operation of the universal wheel and the motor is arranged in the regulating box 1312. The walking base 1311 is further provided with a charging port, and the transfer station 1 is provided with a power transmission port, so that the transfer station 1 can provide charging service for the transport vehicle 13.

In one embodiment, the walking base 1311 is provided with a vertical radar 135 and a horizontal radar 136, where the vertical radar 135 includes two obstacles that can detect the vertical plane of the vehicle 13, and when the obstacles enter the set range, the vehicle 13 can be allowed to reduce the traveling speed or stop. The horizontal radar 136 comprises two barriers which are diagonally arranged and can detect the horizontal plane degree around the front and back of the transport vehicle 13, and when the barriers enter a set range, the transport vehicle 13 can be allowed to reduce the travelling speed or stop; four ultrasonic sensors 137 and four anti-falling sensors 138 are arranged on the periphery of the walking base 1311, the four ultrasonic sensors 137 can detect obstacles around the transport vehicle 13, the obstacles comprise glass materials, and when the obstacles enter a set range, the transport vehicle 13 can reduce the travelling speed; the fall protection sensor 138 can detect whether a cavity (raised floor basket) exists around the transport vehicle 13, so as to prevent the transport vehicle 13 from falling. The front end and the rear end of the walking base 1311 are respectively provided with an alignment camera 139 which can guide the transport vehicle 13 to perform alignment action after arriving at the station, so that the transport vehicle 13 can accurately stop at one side of the transfer station 1 and at a stop point close to the discharge port 4.

The carrying station 132 is located on the top surface of the walking base 1311 and located on one side of the control box 1312, and the bottoms of the first frame 1331 and the second frame 1332 are detachably connected on the top surface of the walking base 1311, so that the first frame 1331 and the second frame 1332 can be relatively close to or far away from each other, the size of the unloading station 7 is changed, and the unloading station 7 can be adapted to wafer boxes 200 with different sizes. Specifically, the first frame 1331 and/or the second frame 1332 are fixedly connected to the top surface of the walking base 1311 through bolts, waist-shaped holes adapted to the bolts are formed in the top surface of the walking base 1311, and the first frame 1331 and/or the second frame 1332 can move along the long axis direction of the waist-shaped holes, so that the first frame 1331 and the second frame 1332 are relatively close to or far away from each other.

The unloading station 7 is a rectangular cavity with an opening at the top end, the opening size of the unloading station 7 is slightly larger than the size of the wafer box 200, the wafer boxes 200 can be stacked in the unloading station 7 one by one from the opening of the unloading station 7, the periphery of the wafer box 200 is limited, and the wafer box 200 is prevented from shaking or falling in the running process of the transport vehicle 13.

The setting of the clamping gap 134 makes the two sides of the unloading station 7 form openings, and during carrying, the clamping jaw can pass through the clamping gap 134 to clamp the wafer box 200 in the unloading station 7, and the width of the clamping gap 134 is smaller than that of the wafer box 200, so that the wafer box 200 is prevented from falling out of the unloading station 7 along the clamping gap 134 in the driving process of the transport vehicle 13.

In an embodiment, the first frame 1331 is disposed near the control box 1312, and the side surface of the first frame 1331 is attached to the control box 1312, the second frame 1332 is disposed far away from the control box 1312, and the second frame 1332 is connected with the waist-shaped hole on the top surface of the walking base 1311 by a bolt, so that the second frame 1332 can be near or far away from the first frame 1331.

In an embodiment, the first frame 1331 and the second frame 1332 are symmetrically disposed U-shaped frames. When the wafer cassette 200 is located in the unloading station 7, two end portions of the wafer cassette 200 are located in the U-shaped notches of the first frame 1331 and the second frame 1332, respectively.

In an embodiment, the surface of the first frame 1331 and/or the second frame 1332 is a hollow structure, so that the contact area between the wafer box 200 and the first frame 1331 and/or the second frame 1332 is reduced, and the abrasion generated when the wafer box 200 collides with the first frame 1331 and/or the second frame 1332 is further reduced.

In an embodiment, the inner side surface (the surface close to the unloading station 7) of the first frame 1331 and/or the inner side surface (the surface close to the unloading station 7) of the second frame 1332 are arc surfaces, so that the contact area between the wafer cassette 200 and the first frame 1331 and/or the second frame 1332 is reduced, and further the abrasion generated when the wafer cassette 200 collides with the first frame 1331 and/or the second frame 1332 is reduced.

In an embodiment, the inner side surface of the first frame 1331 and/or the inner side surface of the second frame 1332 are provided with a flexible layer, so that the wafer box 200 is prevented from being in hard contact with the inner side surface of the first frame 1331 and/or the second frame 1332, and abrasion generated when the wafer box 200 collides with the first frame 1331 and/or the second frame 1332 is reduced.

In an embodiment, the first frame 1331 and the second frame 1332 are formed by detachably splicing a plurality of modules along the height direction, so that the heights of the first frame 1331 and the second frame 1332 can be freely changed to change the number of the wafer cassettes 200 which can be loaded at one time by the unloading station 7.

In addition, a set of anti-collision bumpers 140 are arranged around the bottom of the walking base 1311, and are used for performing final physical protection when an obstacle is on the ground, and when the transport vehicle 13 touches the obstacle, the transport vehicle 13 is started to suddenly stop through the short circuit of the inner coil of the anti-collision strip so as to avoid violent collision.

The control box 1312 is further provided with two emergency stop switches 141 and a front driving recorder, wherein the two emergency stop switches 141 are respectively positioned at the left side and the right side, and the emergency stop switches 141 are used for enabling a person to press the emergency stop switches 141 to enable the transport vehicle 13 to stop emergently so as to avoid serious accidents when sudden conditions exist on site. The driving recorder can record the working environment around the driving of the vehicle, the movement of the personnel and the picking and placing programs through video records for playback and viewing.

The top of the control box 1312 is provided with a tri-colored light 142 for displaying the current status of the transport vehicle 13. These conditions may include normal operation, failure alarms, shut down, standby, etc. Operators can know the running condition of the equipment through clear state display and take corresponding measures in time.

The foregoing describes one embodiment of the present application in detail, but the description is only a preferred embodiment of the present application and should not be construed as limiting the scope of the application. All equivalent changes and modifications within the scope of the present application are intended to be covered by the present application.

Claims (10)

1. An automatic transfer handling system of wafer cassette for handling and storing wafer cassette, characterized in that it includes:

the transfer station is internally provided with a cavity, and a buffer station for stacking the wafer boxes is arranged in the cavity; the two sides of the transfer station are respectively provided with a feeding station and a discharging station; the two sides of the transfer station are respectively provided with a feed inlet and a discharge outlet corresponding to the feeding station and the discharging station;

the mechanical arm is arranged in the cavity, and a clamping jaw for clamping the wafer box is arranged on the mechanical arm;

the visual positioning mechanism is used for acquiring visual information of the wafer box, controlling the clamping jaw to carry the wafer box positioned on the feeding station to the caching station through the visual information, and carrying the wafer box on the caching station to the discharging station.

2. The automatic transfer and conveying system for wafer cassettes as claimed in claim 1, wherein the transfer station is provided with a base, at least one groove is formed in the base, the mechanical arm is installed on the base and located on one side of the groove, a tray is arranged in the groove, a placement position formed by the tray forms the buffer station, a lifting mechanism for driving the tray to lift is arranged in the cavity, and the lifting mechanism adjusts the height of the tray according to the stacking height of the wafer cassettes on the tray, so that the mechanical arm can take and place the wafer cassettes from the buffer station at a set height each time.

3. The automatic wafer cassette transfer and handling system of claim 2, wherein a height sensor is disposed above the buffer station, the height sensor being configured to detect a distance between the wafer cassette on the buffer station and the height sensor.

4. The automatic wafer cassette transfer and handling system of claim 2, wherein the tray is provided with a first tilt sensor for detecting whether a wafer cassette is stacked and tilted at the buffer station.

5. The automated wafer cassette transfer handling system of claim 4, wherein the tray comprises a horizontal floor and vertical enclosures disposed on peripheral edges of the horizontal floor, wherein the vertical enclosures have a height less than a height of the wafer cassette, wherein the area of the horizontal floor surrounded by the vertical enclosures forms the buffer station, and wherein the first tilt sensor is disposed on the vertical enclosures.

6. The automatic transfer and conveying system for wafer cassettes as claimed in claim 2, wherein the transfer station is rectangular in shape, and has a base, side walls disposed around the base, and a top wall disposed above the side walls, the base, the side walls, and the top wall enclose to form the cavity, the feed inlet and the discharge outlet are respectively disposed on the side walls on opposite sides, and the recess is disposed on the base.

7. The automatic wafer cassette transfer and handling system according to claim 6, wherein the mechanical arm is disposed in the middle of the base, the grooves are disposed in two opposite sides of the base, and the inlet and the outlet are disposed in two opposite sides of the base.

8. The automatic wafer cassette transfer and handling system according to claim 1, wherein an identification reading sensor for acquiring an identification of the gripped wafer cassette is provided on the robot arm or the gripper.

9. The automatic transfer and conveying system for wafer cassettes as claimed in claim 1, further comprising a door rail arranged at one side of the transfer station, wherein the feeding station is arranged in the door rail, an opening for entering the feeding station is formed between the door rail and the transfer station, and a proximity switch is arranged at the opening;

and/or the number of the groups of groups,

the loading station is provided with an in-place sensor for detecting whether the loading station has a wafer box or not and a second inclination sensor for detecting whether the wafer box is stacked and inclined on the loading station or not;

and/or the number of the groups of groups,

fireproof roller shutters are arranged on the feeding hole and the discharging hole.

10. The automated wafer cassette transfer handling system of any one of claims 1-9, further comprising a transport cart adapted to the transfer station, the transport cart comprising:

the vehicle body is provided with a carrying station and an environment detection device, and the environment detection mechanism comprises a plurality of groups of radars, a plurality of groups of ultrasonic sensors, a plurality of groups of anti-falling sensors and an alignment camera;

the anti-falling frame comprises a first frame body and a second frame body which are vertically arranged on the carrying station and are oppositely arranged, the first frame body and the second frame body are circumferentially arranged to form a discharging station for stacking a row of wafer boxes, a pair of clamping gaps which are respectively arranged on two sides of the discharging station and are oppositely arranged are formed between the first frame body and the second frame body at intervals, and the width of the clamping gaps is smaller than that of the wafer boxes in the discharging station.