CN116735976A - High-sensitivity coaxial resonance testing device for small-area microwave testing - Google Patents
High-sensitivity coaxial resonance testing device for small-area microwave testing Download PDFInfo
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- CN116735976A CN116735976A CN202310502656.2A CN202310502656A CN116735976A CN 116735976 A CN116735976 A CN 116735976A CN 202310502656 A CN202310502656 A CN 202310502656A CN 116735976 A CN116735976 A CN 116735976A
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- 238000012360 testing method Methods 0.000 title claims abstract description 86
- 239000004020 conductor Substances 0.000 claims abstract description 75
- 239000000523 sample Substances 0.000 claims abstract description 44
- 230000035945 sensitivity Effects 0.000 claims abstract description 15
- 230000008878 coupling Effects 0.000 claims description 31
- 238000010168 coupling process Methods 0.000 claims description 31
- 238000005859 coupling reaction Methods 0.000 claims description 31
- 230000005284 excitation Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 19
- 238000001514 detection method Methods 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 239000004698 Polyethylene Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- -1 polyethylene Polymers 0.000 description 5
- 229920000573 polyethylene Polymers 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003012 network analysis Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2617—Measuring dielectric properties, e.g. constants
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
The invention discloses a high-sensitivity coaxial resonance testing device for a small-area microwave test, and belongs to the technical field of electromagnetic parameter testing of microwave and millimeter wave materials. The device is based on the traditional coaxial resonant cavity, and a probe structure is introduced, so that a quarter-wavelength coaxial resonator with one open end and one short circuit end is constructed. The coaxial resonant cavity is large in size and is not filled with medium, so that the device has a high quality factor and high test sensitivity; in the structure, the probe is connected with the inner conductor of the coaxial resonant cavity in an inserting mode, so that the probe can be replaced according to requirements. The length of the device is adjusted by changing probes with different lengths, so that the device is suitable for broadband test, and the problem of broadband test is solved; compared with the traditional half-wavelength or quarter-wavelength resonator, the invention fully considers the test requirements of high sensitivity and small area detection.
Description
Technical Field
The invention belongs to the technical field of electromagnetic parameter testing of microwave and millimeter wave materials, and particularly relates to a high-sensitivity coaxial resonance testing device for small-area microwave testing.
Background
With the continuous development of microwave technology, the performance requirements on microwave devices are increasing. Microwave devices and circuit components are all developing toward miniaturization and integration. In response to the demands of miniaturization and integration of electronic components, thin film materials have been developed. For example, dielectric thin film materials have ferroelectric, piezoelectric and nonlinear optical properties and are important in the fields of semiconductor industry, optical communication, electric communication and the like; the alloy film material has the properties of high magnetic conductivity, high loss and the like, can be used for absorbing microwaves of a wide frequency band, and can be used for manufacturing wave-absorbing materials; the heterogeneous integrated material can simultaneously exert respective characteristics in the integrated material, so that the microwave technology can be simultaneously applied to different devices, and the requirements of high-power devices on the stability, the integration and the miniaturization of the material are met. The microwave performance of the film material is an important factor influencing the use of the film material in a device, the testing precision is improved, the accuracy of the film performance test is enhanced, and the use condition of the film material in the microwave device is directly influenced. In addition, the produced film material may have uneven or inconsistent microwave performance at different positions, and accurate testing of local small areas is also required.
The commonly used test methods for testing the dielectric properties of materials are a network parameter method and a resonant cavity method. The network parameter method is mainly to test scattering parameters or reflection parameters of a sample port network to be tested and solve the microwave performance of the material to be tested by using the parameters. The method can realize broadband sweep test, and when in implementation, some plane circuits and transmission structures in the network parameter method can be made into probe structures, so that local small areas can be detected, but the test sensitivity is low. In the resonant cavity method, a sample to be measured is usually placed in a cavity, after the sample is placed in the cavity, a resonant system in the cavity is disturbed, and the microwave performance of the sample is solved by measuring the change of resonant frequency and quality factor parameters. Because the solution method is more strict, the quality factor of the resonant cavity is high, so the sensitivity is high and the test result is more accurate. However, the processing difficulty is high when testing local small areas, and only multi-point frequency test can be performed, and when testing in different frequency bands, the size of the cavity needs to be redesigned.
The two test methods can be tested only after sample preparation, and are not applicable to application requirements with high requirements on uniformity and consistency of microwave parameters of film materials. Because in the testing of the uniformity and consistency of microwave parameters of thin film materials, on the one hand, the device is required to be able to detect locally small areas, and on the other hand, the device is required to have sufficient test sensitivity, and the properties of low-loss materials can be tested.
Disclosure of Invention
The invention aims at: the high-sensitivity coaxial resonance testing device for the small-area microwave test has the advantages that the high-sensitivity coaxial resonance testing device meets the testing requirements of small-area detection, and the application range is widened.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a high-sensitivity coaxial resonance testing device for small-area microwave testing comprises a coaxial resonant cavity, a short circuit cover plate, a coaxial connector with a flange and a probe;
the coaxial resonant cavity comprises an outer conductor, an inner conductor coaxial with the outer conductor is arranged in the outer conductor, and the outer wall of the inner conductor is not contacted with the inner wall of the outer conductor; the inner conductor is a combination of a cylinder and a cone, the cone is positioned at one end of the cylinder and is in seamless connection with the cylinder, and the other end of the cylinder is fixed at the center of the short circuit cover plate; the outer conductor is a combination of a hollow cylinder and a hollow truncated cone, the upper end surface of the hollow cylinder is fixedly connected with the short circuit cover plate, and the lower end surface of the hollow truncated cone is fixedly connected with the coaxial connector with the flange;
the short circuit cover plate is provided with two coupling devices which are symmetrically distributed on two sides of the central position of the short circuit cover plate and extend into the cavity of the outer conductor through the short circuit cover plate for coupling excitation and receiving;
the coaxial connector with the flange is also provided with an inner conductor and an outer conductor, and the outer conductor is connected with the outer conductor of the coaxial resonant cavity;
one end of the probe penetrates through the inner conductor of the coaxial connector with the flange and then is spliced with the inner conductor of the coaxial resonant cavity.
Furthermore, two coupling holes are formed in the short circuit cover plate, and the two coupling devices extend into the outer conductor cavity through one coupling hole.
Further, the two coupling devices are both SMA joint type magnetic coupling rings.
Furthermore, the coaxial connector with the flange is connected with the outer conductor of the coaxial resonant cavity in a mortise-tenon mode, so that good electrical continuity of the inner conductor is ensured, a high-order mode is reduced, and better impedance matching is realized.
Furthermore, the ratio of the cylindrical height to the conical height of the outer conductor and the inner conductor of the coaxial resonant cavity is 2:1.
Further, the probe is in a cylindrical structure or a planar structure.
After the technical scheme is adopted, the invention has the following advantages:
1) The coaxial resonant cavity is connected with the probe to form a quarter-wavelength coaxial resonator, wherein the coaxial resonant cavity is partially filled with no medium, and has larger size and higher quality factor than the coaxial probe at the lower end, so that the coaxial resonant cavity has the advantage of high detection sensitivity; the probe has the advantage of small area detection, and the probe are connected through the coaxial connector with the flange, so that the device has the advantages of high sensitivity and small area detection.
2) The probe can adopt a cylindrical structure or a plane structure according to requirements, and in the setting process, the probe is connected with the inner conductor of the coaxial resonant cavity in an inserting mode and is matched with the coaxial connection with the flange, so that the replacement and stable work of the probes with different lengths are realized. The resonant frequency of the whole coaxial resonator is changed by changing the length of the probe, so that the testing device is not only limited to multi-frequency point testing, but also can test in a wide frequency band.
Drawings
FIG. 1 is a schematic diagram of a high-sensitivity coaxial resonance testing device for small-area microwave testing according to the present invention;
FIG. 2 is a schematic diagram of a coaxial resonant cavity inner conductor structure of a high-sensitivity coaxial resonant testing device for small-area microwave testing according to the present invention;
FIG. 3 is a schematic diagram of the outer conductor structure of a coaxial resonant cavity of a high-sensitivity coaxial resonant testing device for small-area microwave testing according to the present invention;
FIG. 4 is a schematic diagram of a test system of a high-sensitivity coaxial resonance test device for small-area microwave test according to the present invention;
FIG. 5 is a graph showing the results of a high-sensitivity coaxial resonance test device for small-area microwave test on a polyethylene film;
reference numerals:
1. the device comprises a coupling device 2, a short circuit cover plate 3, a coaxial resonant cavity 4, a shaft connector with a flange 5 and a probe; 2-1, a cylinder forming an inner conductor, 2-2, a cone forming the inner conductor, 2-3, and a cylindrical drilling hole; 3-1 outer conductor fixing holes, 3-2 outer conductor cavities, 3-3 bosses, 4-1 testing platforms, 4-2 three-dimensional moving platforms, 4-3L-shaped brackets, 4-4 sample lifting platforms and 4-5 coaxial resonance probe testers.
Detailed Description
The technical scheme of the invention is described in detail below with reference to the accompanying drawings and the specific embodiments.
As shown in fig. 1, 2 and 3, the high-sensitivity coaxial resonance testing device for testing small-area microwaves provided by the embodiment comprises a coaxial resonant cavity 3, a short-circuit cover plate 2, a coaxial connector 4 with a flange and a probe 5.
The coaxial resonant cavity comprises an outer conductor, and an inner conductor coaxial with the outer conductor is arranged in the outer conductor. The outer wall of the inner conductor is not contacted with the inner wall of the outer conductor; the inner conductor is a combination of a cylinder 2-1 and a cone 2-2, the cone 2-2 is positioned at one end of the cylinder 2-1 and is in seamless connection with the cylinder 2-1, the other end of the cylinder 2-1 is fixed at the center of the short circuit cover plate 2, a blind hole is formed in the cone tip of the cone 2-2 along the direction of the cylinder, and the blind hole is a cylindrical drilling hole 2-3; the outer conductor is a combination of a hollow cylinder and a hollow truncated cone, the upper end surface of the hollow cylinder is fixedly connected with the short circuit cover plate 2, and the lower end surface of the hollow truncated cone is fixedly connected with the coaxial connector 4 with a flange. The ratio of the length of the cylindrical part to the length of the conical part of the outer conductor and the inner conductor of the coaxial resonant cavity is 2:1. When the hollow cylinder of the outer conductor is fixed with the short circuit cover plate 2, the short circuit cover plate 2 can be provided with an outer conductor fixing hole 3-1, and the outer conductor fixing hole 3-1 is used for fixing.
The short circuit cover plate 2 is provided with two coupling devices 1, and the two coupling devices 1 are symmetrically distributed on two sides of the center position of the short circuit cover plate 2 and extend into the cavity 3-2 of the outer conductor through the short circuit cover plate 2 to perform coupling excitation and receiving. Both coupling means 1 are magnetic coupling rings in the form of SMA joints. The short-circuit cover plate 2 is provided with two coupling holes, and the two coupling devices respectively extend into the outer conductor cavity 3-2 through one coupling hole. The two coupling devices 1 are fixed in the coupling holes through screws, and after the two coupling devices are fixed, the central connecting line of the two coupling devices is perpendicular to the axis of the coaxial resonant cavity 2.
The flanged coaxial connector 4 is likewise provided with an inner conductor and an outer conductor, which outer conductor is connected to the coaxial resonator outer conductor. For easy disassembly and assembly, the coaxial connector 4 with flange and the coaxial resonant cavity outer conductor are connected together in a mortise-tenon mode in the embodiment. The bottom end of the hollow cone of the outer conductor of the coaxial resonant cavity is provided with a boss 3-3, and the shaft connector 4 with the flange is provided with a concave table matched with the boss 3-3. During assembly, the boss and the concave table are directly abutted to realize seamless connection between the boss and the concave table, so that the tightness of the coaxial resonant cavity is ensured. The probe 5 is in a cylindrical structure or a plane structure, and one end of the probe 5 passes through the inner conductor of the coaxial connector with the flange and then is inserted into the cylindrical drilling hole 2-3 of the inner conductor of the coaxial resonant cavity. When the coaxial connector is used, the inner conductor of the coaxial connector with the flange is used for guaranteeing the stability of connection between the probe and the coaxial resonant cavity.
Example 1
The high-sensitivity coaxial resonance test device for the small-area microwave test is prepared according to the following dimensions, specifically, the radius of a cylinder 2-1 of a coaxial resonant cavity inner conductor is 2.5mm, and the radius of the tail end of a cone is 0.9mm. The radius of the hollow cylinder of the outer conductor of the coaxial resonant cavity is 8.7mm, and the radius of the tail end of the hollow cone is 2.1mm. The height of the hollow cylinder of the outer conductor of the coaxial resonant cavity is 20mm, the height of the hollow cone frustum is 10mm, and the two coupling holes are symmetrically arranged at the position 7.3mm away from the axis of the coaxial resonant cavity 3; the coupling device 1 is a magnetic coupling ring of an SMA joint type, and the plane of the ring is perpendicular to the axis of the coaxial resonant cavity 3.
Based on the high-sensitivity coaxial resonance testing device for the small-area microwave test, a testing system is built in the embodiment. As shown in FIG. 4, the test system comprises a test platform 4-1, a three-dimensional moving platform 4-2, an L-shaped bracket 4-3, a sample lifting platform 4-4 and a coaxial resonance probe tester 4-5. The three-dimensional moving platform 4-2 and the sample lifting platform 4-4 are fixedly arranged on the test platform 4-1. The L-shaped bracket 4-3 is in an inverted L shape, one side of the L-shaped bracket is movably fixed on the three-dimensional moving platform 4-2, and the other side of the L-shaped bracket is parallel to the sample lifting platform 4-4. The high-sensitivity coaxial resonance testing device for the small-area microwave test is arranged on the other side of the L-shaped bracket 4-3, and a probe of the high-sensitivity coaxial resonance testing device is opposite to the sample lifting platform 4-4 after the installation is completed.
During testing, two ports of vector network analysis are respectively connected with a coupling device 1 in a high-sensitivity coaxial resonance testing device for small-area microwave testing, and resonance frequency points when materials are not added are measured; and placing a polyethylene film on the sample lifting platform 4-4, and adjusting the three-dimensional moving platform 4-2 to enable a probe of the coaxial resonance testing device 4-5 to be positioned on the polyethylene film, measuring a resonance frequency point at the moment, and observing the change condition of the resonance frequency point before and after the material is placed.
The test system tests the polyethylene film, the thickness of the polyethylene film is tens of micrometers, the resonance frequency change result diagram before and after the test is shown in fig. 5, and the resonance point can be seen to have obvious deviation, and the deviation amount is 16.26MHz.
In summary, the high-sensitivity coaxial resonance testing device for the small-area microwave test provided by the embodiment introduces a probe structure based on the traditional coaxial resonant cavity, so as to construct a quarter-wavelength coaxial resonator with one open end and one short circuit end. The connection of the coaxial probe and the coaxial cavity is equivalent to the extension of the original coaxial cavity, so that the coaxial resonator has a larger size. The coaxial resonant cavity is large in size and is not filled with medium, so that the device has a high quality factor and high test sensitivity; in the structure, the probe is connected with the inner conductor of the coaxial resonant cavity in an inserting mode, so that the probe can be replaced according to requirements. The length of the device is adjusted by changing probes with different lengths, so that the device is suitable for broadband test, and the problem of broadband test is solved; compared with the traditional half-wavelength or quarter-wavelength resonator, the resonance testing device of the embodiment fully considers the testing requirements of high sensitivity and small-area detection.
While the invention has been described in terms of specific embodiments, any feature disclosed in this specification may be replaced by alternative features serving the equivalent or similar purpose, unless expressly stated otherwise; all of the features disclosed, or all of the steps in a method or process, except for mutually exclusive features and/or steps, may be combined in any manner.
Claims (6)
1. A high sensitivity coaxial resonance testing arrangement for small area microwave test, includes coaxial resonant cavity, short circuit apron, has coaxial connector and the probe of flange, its characterized in that:
the coaxial resonant cavity comprises an outer conductor, an inner conductor coaxial with the outer conductor is arranged in the outer conductor, and the outer wall of the inner conductor is not contacted with the inner wall of the outer conductor; the inner conductor is a combination of a cylinder and a cone, the cone is positioned at one end of the cylinder and is in seamless connection with the cylinder, and the other end of the cylinder is fixed at the center of the short circuit cover plate; the outer conductor is a combination of a hollow cylinder and a hollow truncated cone, the upper end surface of the hollow cylinder is fixedly connected with the short circuit cover plate, and the lower end surface of the hollow cone is fixedly connected with the coaxial connector with the flange;
the short circuit cover plate is provided with two coupling devices which are symmetrically distributed on two sides of the central position of the short circuit cover plate and extend into the cavity of the outer conductor through the short circuit cover plate for coupling excitation and receiving;
the coaxial connector with the flange is also provided with an inner conductor and an outer conductor, and the outer conductor is connected with the outer conductor of the coaxial resonant cavity;
one end of the probe penetrates through the inner conductor of the coaxial connector with the flange and then is spliced with the inner conductor of the coaxial resonant cavity.
2. A high sensitivity coaxial resonance testing device for small area microwave testing as defined in claim 1, wherein: the short circuit cover plate is provided with two coupling holes, and the two coupling devices respectively extend into the outer conductor cavity through one coupling hole.
3. A high sensitivity coaxial resonance testing device for small area microwave testing as defined in claim 1, wherein: the two coupling devices are all SMA joint type magnetic coupling rings.
4. A high sensitivity coaxial resonance testing device for small area microwave testing as defined in claim 1, wherein: the coaxial connector with the flange is connected with the outer conductor of the coaxial resonant cavity in a mortise and tenon mode.
5. A high sensitivity coaxial resonance testing device for small area microwave testing as defined in claim 1, wherein: the ratio of the length of the cylindrical part to the length of the conical part of the outer conductor and the length of the inner conductor of the coaxial resonant cavity is 2:1.
6. A high sensitivity coaxial resonance testing device for small area microwave testing as claimed in any one of claims 1 to 5, wherein: the probe is in a cylindrical structure or a plane structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310502656.2A CN116735976A (en) | 2023-05-06 | 2023-05-06 | High-sensitivity coaxial resonance testing device for small-area microwave testing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310502656.2A CN116735976A (en) | 2023-05-06 | 2023-05-06 | High-sensitivity coaxial resonance testing device for small-area microwave testing |
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| Publication Number | Publication Date |
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| CN116735976A true CN116735976A (en) | 2023-09-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310502656.2A Pending CN116735976A (en) | 2023-05-06 | 2023-05-06 | High-sensitivity coaxial resonance testing device for small-area microwave testing |
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| CN (1) | CN116735976A (en) |
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2023
- 2023-05-06 CN CN202310502656.2A patent/CN116735976A/en active Pending
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