CN116735976A - High-sensitivity coaxial resonance testing device for small-area microwave testing - Google Patents
High-sensitivity coaxial resonance testing device for small-area microwave testing Download PDFInfo
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Abstract
本发明公开了一种用于小区域微波测试的高灵敏度同轴谐振测试装置，属于微波、毫米波材料电磁参数测试技术领域。该装置是在传统同轴谐振腔的基础上，引入探针结构，以此构造出一端开路、一端短路的四分之一波长同轴谐振器。由于同轴谐振腔尺寸较大且没有介质填充，使得该装置有着高品质因数，测试灵敏度高；结构中探针与同轴谐振腔内导体采用插接方式连接，使其可以根据需求更换。通过更换不同长度的探针，调整装置长度来适用于宽频测试，解决了宽频测试的问题；相比传统的半波长或四分之一波长谐振器，本发明充分兼顾了高灵敏度和小区域检测的测试需求。
The invention discloses a high-sensitivity coaxial resonance testing device for small-area microwave testing, and belongs to the technical field of electromagnetic parameter testing of microwave and millimeter wave materials. This device is based on the traditional coaxial resonant cavity and introduces a probe structure to construct a quarter-wavelength coaxial resonator with one end open and one end short-circuited. Due to the large size of the coaxial resonant cavity and no dielectric filling, the device has a high quality factor and high test sensitivity; the probe in the structure is connected to the conductor in the coaxial resonant cavity in a plug-in manner, so that it can be replaced according to needs. By replacing probes of different lengths and adjusting the length of the device to be suitable for broadband testing, the problem of broadband testing is solved; compared with traditional half-wavelength or quarter-wavelength resonators, the present invention fully takes into account high sensitivity and small area detection testing requirements.
Description
技术领域Technical field
本发明属于微波、毫米波材料电磁参数测试技术领域，具体涉及一种用于小区域微波测试的高灵敏度同轴谐振测试装置。The invention belongs to the technical field of electromagnetic parameter testing of microwave and millimeter wave materials, and specifically relates to a high-sensitivity coaxial resonance testing device for small-area microwave testing.
背景技术Background technique
随着微波技术的不断发展，对微波器件的性能要求越来越高。微波器件、电路元器件都在向着微型化、集成化的方向发展。为了响应微型化、集成化电子元器件发展需求，薄膜材料应运而生。如:电介质薄膜材料，有着铁电性、压电性、非线性光学特性，在半导体工业、光通信、电通信等领域有重要应用；合金薄膜材料，有着高磁导率、高损耗等性质,可用于吸收宽频带的微波,能够用于制作吸波材料；异质集成材料，能同时发挥集成材料中各自的特性，使得微波技术能够同时应用于不同器件之中，以满足大功率器件对材料的稳定性、集成性、微型化的要求。薄膜材料的微波性能是影响其在器件中使用的重要因素，提升测试精度，增强薄膜性能测试的准确性，直接影响着薄膜材料在微波器件中的使用情况。此外，制作的薄膜材料，材料的不同位置可能会存在微波性能不均匀或者不一致的情况，也需要对其局部小区域进行准确测试。With the continuous development of microwave technology, the performance requirements for microwave devices are getting higher and higher. Microwave devices and circuit components are developing in the direction of miniaturization and integration. In response to the development needs of miniaturization and integrated electronic components, thin film materials emerged at the historic moment. For example: dielectric thin film materials, which have ferroelectricity, piezoelectricity, and nonlinear optical properties, have important applications in the semiconductor industry, optical communications, electrical communications and other fields; alloy thin film materials, which have properties such as high magnetic permeability and high loss, It can be used to absorb broadband microwaves and can be used to make absorbing materials; heterogeneous integrated materials can simultaneously exert the respective characteristics of integrated materials, allowing microwave technology to be applied to different devices at the same time to meet the requirements of high-power devices. requirements of stability, integration and miniaturization. The microwave performance of thin film materials is an important factor affecting their use in devices. Improving test accuracy and enhancing the accuracy of thin film performance testing directly affects the use of thin film materials in microwave devices. In addition, the microwave performance of the thin film material produced may be uneven or inconsistent at different locations of the material, and it is also necessary to accurately test local small areas.
常用的测试材料介电性能的测试方法有网络参数法和谐振腔法两种。网络参数法主要是通过测试待测样品端口网络的散射参数或者反射参数，利用这些参数求解待测材料的微波性能。该方法可以实现宽带扫频测试，实施时，网络参数法中的一些平面电路和传输结构，可以做成探针结构，能够检测局部小区域，但测试灵敏度低。谐振腔法通常是将待测样品放置于腔体内部，放入样品后，腔内的谐振系统会发生扰动，通过测量谐振频率与品质因数参数的变化来求解样品的微波性能。由于其求解法更为严格，谐振腔体品质因数高，所以灵敏度高、测试结果更精确。但是，测试局部小区域时加工难度大，并且只能进行多点频测试，在不同频段进行测试时，需要重新设计腔体的尺寸。Commonly used testing methods for testing the dielectric properties of materials include network parameter method and resonant cavity method. The network parameter method mainly tests the scattering parameters or reflection parameters of the port network of the sample to be tested, and uses these parameters to solve the microwave performance of the material to be tested. This method can realize broadband sweep testing. When implemented, some planar circuits and transmission structures in the network parameter method can be made into probe structures, which can detect small local areas, but the test sensitivity is low. The resonant cavity method usually places the sample to be tested inside the cavity. After the sample is placed, the resonant system in the cavity will be disturbed. The microwave performance of the sample is solved by measuring the changes in the resonant frequency and quality factor parameters. Because its solution method is more stringent and the quality factor of the resonant cavity is high, the sensitivity is high and the test results are more accurate. However, it is difficult to process when testing small local areas, and only multi-point frequency testing can be performed. When testing in different frequency bands, the size of the cavity needs to be redesigned.
上述两种测试方法均需制样后才能进行测试,这与薄膜材料微波参数均匀性和一致性要求较高的应用需求并不适用。因为在薄膜材料微波参数均匀性和一致性测试时，一方面需要装置能够检测局部小区域，另外一方面需要具有足够的测试灵敏度，对低损耗材料的性质也能进行测试。The above two testing methods require sample preparation before testing, which is not suitable for application requirements that require high uniformity and consistency of microwave parameters of thin film materials. Because when testing the uniformity and consistency of microwave parameters of thin film materials, on the one hand, the device needs to be able to detect small local areas, and on the other hand, it needs to have sufficient testing sensitivity to test the properties of low-loss materials.
发明内容Contents of the invention
本发明的目的在于：提供一种用于小区域微波测试的高灵敏度同轴谐振测试装置，该装置兼顾了高灵敏度和小区域检测的测试需求，提升了应用范围。The purpose of the present invention is to provide a high-sensitivity coaxial resonance testing device for small-area microwave testing, which takes into account the testing requirements of high sensitivity and small-area detection, and improves the scope of application.
为实现上述目的，本发明采用如下技术方案：In order to achieve the above objects, the present invention adopts the following technical solutions:
一种用于小区域微波测试的高灵敏度同轴谐振测试装置，包括同轴谐振腔、短路盖板、带有法兰的同轴连接器和探针；A high-sensitivity coaxial resonance testing device for small-area microwave testing, including a coaxial resonance cavity, a short-circuit cover, a coaxial connector with a flange, and a probe;
所述同轴谐振腔包括外导体，外导体内设有与外导体同轴的内导体，内导体的外壁与外导体的内壁之间互不接触；内导体为圆柱体和圆锥体的组合体，圆锥体位于圆柱体的一端，并与圆柱体无缝连接，圆柱体的另一端固定在短路盖板的中心位置；外导体为空心的圆柱和空心的圆锥台的组合体，空心圆柱上端面与短路盖板固定连接，空心圆锥台下端面与带有法兰的同轴连接器固定连接；The coaxial resonant cavity includes an outer conductor, and an inner conductor coaxial with the outer conductor is provided inside the outer conductor. The outer wall of the inner conductor and the inner wall of the outer conductor do not contact each other; the inner conductor is a combination of a cylinder and a cone. , the cone is located at one end of the cylinder and is seamlessly connected to the cylinder. The other end of the cylinder is fixed at the center of the short-circuit cover; the outer conductor is a combination of a hollow cylinder and a hollow truncated cone, and the upper end surface of the hollow cylinder It is fixedly connected to the short-circuit cover plate, and the lower end surface of the hollow truncated cone is fixedly connected to the coaxial connector with flange;
所述短路盖板上设有两个耦合装置，两个耦合装置对称分布在短路盖板中心位置的两侧，并穿过短路盖板伸入至外导体的空腔中，进行耦合激励和接收；The short-circuit cover is provided with two coupling devices. The two coupling devices are symmetrically distributed on both sides of the central position of the short-circuit cover and extend through the short-circuit cover into the cavity of the outer conductor for coupling excitation and reception. ;
所述带有法兰的同轴连接器同样设有内导体和外导体，外导体与同轴谐振腔外导体相连；The coaxial connector with flange is also provided with an inner conductor and an outer conductor, and the outer conductor is connected to the outer conductor of the coaxial resonant cavity;
所述探针的一端穿过带有法兰的同轴连接器的内导体后与同轴谐振腔内导体插接。One end of the probe passes through the inner conductor of the coaxial connector with a flange and then is plugged into the inner conductor of the coaxial resonant cavity.
进一步的，所述短路盖板上设有两个耦合孔，两个耦合装置各通过一个耦合孔伸入至外导体空腔中。Further, the short-circuit cover plate is provided with two coupling holes, and each of the two coupling devices extends into the outer conductor cavity through one coupling hole.
进一步的，所述两个耦合装置均为SMA接头式的磁耦合环。Furthermore, the two coupling devices are both SMA connector type magnetic coupling rings.
进一步的，所述带有法兰的同轴连接器与同轴谐振腔的外导体之间采用榫卯方式连接，以保证内导体良好的电联续性，减少高次模，实现更好的阻抗匹配，。Furthermore, the coaxial connector with flange and the outer conductor of the coaxial resonant cavity are connected using a mortise and tenon method to ensure good electrical continuity of the inner conductor, reduce high-order modes, and achieve better Impedance matching,.
进一步的，所述同轴谐振腔外导体和内导体的圆柱高度与圆锥高度比均为2:1。Further, the ratio of the cylinder height to the cone height of the outer conductor and the inner conductor of the coaxial resonant cavity is 2:1.
进一步的，所述探针为圆柱结构或平面结构。Further, the probe has a cylindrical structure or a planar structure.
采用上述技术方案后，本发明具有了以下优点：After adopting the above technical solution, the present invention has the following advantages:
1)本发明通过同轴谐振腔与探针相连，构造成四分之一波长同轴谐振器，其中同轴谐振腔部分由于内部无介质填充，相较于下端的同轴探针具有更大尺寸，和更高的品质因数，因此具有高检测灵敏度的优势；探针则具备小区域检测的优势，二者通过带有法兰的同轴连接器连接，使得该装置同时具备了高灵敏和小区域检测的优点。1) The present invention is connected to the probe through a coaxial resonant cavity and is constructed as a quarter-wavelength coaxial resonator. The coaxial resonant cavity part has a larger diameter than the coaxial probe at the lower end because there is no dielectric filling inside. size, and higher quality factor, so it has the advantage of high detection sensitivity; the probe has the advantage of small area detection, and the two are connected through a coaxial connector with a flange, so that the device has both high sensitivity and Advantages of small area detection.
2)本发明的探针可以根据需求选择采用圆柱结构或平面结构，设置过程中，探针采用插接方式与同轴谐振腔内导体相连，配合带有法兰的同轴连接，实现不同长度探针更换及稳定工作。通过改变探针的长度改变整个同轴谐振器的谐振频率，从而使得该测试装置不仅限于多频点测试，还可以在宽频内进行测试。2) The probe of the present invention can adopt a cylindrical structure or a planar structure according to the needs. During the setting process, the probe is connected to the conductor in the coaxial resonant cavity by plugging, and cooperates with the coaxial connection with flange to achieve different lengths. Probe replacement and stable operation. By changing the length of the probe, the resonant frequency of the entire coaxial resonator is changed, so that the test device is not limited to multi-frequency point testing, but can also be tested within a wide frequency range.
附图说明Description of drawings
图1为本发明提出的一种用于小区域微波测试的高灵敏度同轴谐振测试装置结构示意图；Figure 1 is a schematic structural diagram of a high-sensitivity coaxial resonance testing device for small-area microwave testing proposed by the present invention;
图2为本发明提出的一种用于小区域微波测试的高灵敏度同轴谐振测试装置的同轴谐振腔内导体结构示意图；Figure 2 is a schematic diagram of the conductor structure in the coaxial resonant cavity of a high-sensitivity coaxial resonance testing device for small-area microwave testing proposed by the present invention;
图3为本发明提出的一种用于小区域微波测试的高灵敏度同轴谐振测试装置的同轴谐振腔外导体结构示意图；Figure 3 is a schematic structural diagram of the outer conductor of the coaxial resonant cavity of a high-sensitivity coaxial resonance testing device for small-area microwave testing proposed by the present invention;
图4为本发明提出的一种用于小区域微波测试的高灵敏度同轴谐振测试装置的测试系统示意图；Figure 4 is a schematic diagram of the testing system of a high-sensitivity coaxial resonance testing device for small-area microwave testing proposed by the present invention;
图5为本发明提出的一种用于小区域微波测试的高灵敏度同轴谐振测试装置对聚乙烯薄膜测试的结果图；Figure 5 is a diagram showing the results of polyethylene film testing by a high-sensitivity coaxial resonance testing device for small-area microwave testing proposed by the present invention;
附图标记：Reference signs:
1、耦合装置，2、短路盖板，3、同轴谐振腔，4、带有法兰的轴连接器，5、探针；2-1、构成内导体的圆柱体，2-2、构成内导体的圆锥体，2-3、是圆柱形钻孔；3-1外导体固定孔，3-2外导体的空腔、3-3是凸台、4-1是测试平台、4-2是三维移动平台、4-3是L型支架、4-4是样品升降台、4-5是同轴谐振探针测试器。1. Coupling device, 2. Short-circuit cover, 3. Coaxial resonant cavity, 4. Shaft connector with flange, 5. Probe; 2-1. Cylinder constituting the inner conductor, 2-2. Composition The cone of the inner conductor, 2-3, is a cylindrical drilled hole; 3-1 the fixed hole of the outer conductor, 3-2 the cavity of the outer conductor, 3-3 is the boss, 4-1 is the test platform, 4-2 It is a three-dimensional mobile platform, 4-3 is an L-shaped bracket, 4-4 is a sample lifting platform, and 4-5 is a coaxial resonance probe tester.
具体实施方式Detailed ways
下面结合附图和具体实施方式对本发明的技术方案做详细说明。The technical solution of the present invention will be described in detail below with reference to the accompanying drawings and specific implementation modes.
如图1、图2、图3所示，本实施例提供的一种用于小区域微波测试的高灵敏度同轴谐振测试装置，包括同轴谐振腔3、短路盖板2、带有法兰的同轴连接器4和探针5。As shown in Figures 1, 2, and 3, this embodiment provides a high-sensitivity coaxial resonance testing device for small-area microwave testing, including a coaxial resonance cavity 3, a short-circuit cover 2, and a flange. coaxial connector 4 and probe 5.
所述同轴谐振腔包括外导体，外导体内设有与外导体同轴的内导体。内导体的外壁与外导体的内壁之间互不接触；内导体为圆柱体2-1和圆锥体2-2的组合体，圆锥体2-2位于圆柱体2-1的一端，并与圆柱体2-1无缝连接，圆柱体2-1的另一端固定在短路盖板2的中心位置,圆锥体2-2的锥尖沿圆柱体方向开有盲孔，盲孔为圆柱形钻孔2-3；外导体为空心圆柱和空心圆锥台的组合体，空心圆柱上端面与短路盖板2固定连接，空心圆锥台下端面与带有法兰的同轴连接器4固定连接。同轴谐振腔外导体和内导体的圆柱部分长度与锥形部分长度比均为2:1。外导体的空心圆柱在与短路盖板2固定时，可在短路盖板2上开设外导体固定孔3-1，通过外导体固定孔3-1实现固定。The coaxial resonant cavity includes an outer conductor, and an inner conductor coaxial with the outer conductor is disposed inside the outer conductor. The outer wall of the inner conductor and the inner wall of the outer conductor do not contact each other; the inner conductor is a combination of cylinder 2-1 and cone 2-2. Cone 2-2 is located at one end of cylinder 2-1 and is connected with the cylinder. The body 2-1 is seamlessly connected, and the other end of the cylinder 2-1 is fixed at the center of the short-circuit cover plate 2. The cone tip of the cone 2-2 has a blind hole along the direction of the cylinder, and the blind hole is a cylindrical drilled hole. 2-3; The outer conductor is a combination of a hollow cylinder and a hollow truncated cone. The upper end surface of the hollow cylinder is fixedly connected to the short-circuit cover 2, and the lower end surface of the hollow truncated cone is fixedly connected to the coaxial connector 4 with a flange. The ratio of the length of the cylindrical part to the length of the tapered part of the outer conductor and the inner conductor of the coaxial resonant cavity is 2:1. When the hollow cylinder of the outer conductor is fixed to the short-circuit cover plate 2, the outer conductor fixing hole 3-1 can be opened in the short-circuit cover plate 2 and fixed through the outer conductor fixing hole 3-1.
所述短路盖板2上设有两个耦合装置1，两个耦合装置1对称分布在短路盖板2中心位置的两侧，并穿过短路盖板2伸入至外导体的空腔3-2中，进行耦合激励和接收。两个耦合装置1均为SMA接头形式的磁耦合环。短路盖板2上设有两个耦合孔，两个耦合装置各通过一个耦合孔伸入至外导体空腔3-2中。两个耦合装置1均通过螺丝固定在耦合孔中，固定后，其中心连线垂直于同轴谐振腔2轴线。The short-circuit cover 2 is provided with two coupling devices 1. The two coupling devices 1 are symmetrically distributed on both sides of the central position of the short-circuit cover 2 and extend through the short-circuit cover 2 into the cavity 3- of the outer conductor. 2, coupled excitation and reception are performed. Both coupling devices 1 are magnetic coupling rings in the form of SMA connectors. The short-circuit cover plate 2 is provided with two coupling holes, and each of the two coupling devices extends into the outer conductor cavity 3-2 through a coupling hole. Both coupling devices 1 are fixed in the coupling holes through screws. After being fixed, their central connection lines are perpendicular to the axis of the coaxial resonant cavity 2.
所述带有法兰的同轴连接器4同样设有内导体和外导体，外导体与同轴谐振腔外导体相连。为便于拆卸按照安装，本实施例采用榫卯方式将带有法兰的同轴连接器4与同轴谐振腔外导体连接在一起。即在同轴谐振腔外导体空心圆锥台底端设有凸台3-3，带有法兰的轴连接器4上设有与凸台3-3相适配的凹台。组装时，直接将凸台与凹台对接即可实现两者之间的无缝连接，从而保证同轴谐振腔的密闭性。所述探针5为圆柱结构或平面结构，所述探针5的一端穿过带有法兰的同轴连接器的内导体后插入同轴谐振腔内导体的圆柱形钻孔2-3中。使用时，带有法兰的同轴连接器内导体用于保证探针与同轴谐振空腔之间连接的稳定性。The coaxial connector 4 with flange is also provided with an inner conductor and an outer conductor, and the outer conductor is connected to the outer conductor of the coaxial resonant cavity. In order to facilitate disassembly and installation, this embodiment uses a mortise and tenon method to connect the coaxial connector 4 with a flange to the outer conductor of the coaxial resonant cavity. That is, a boss 3-3 is provided at the bottom end of the hollow truncated cone of the outer conductor of the coaxial resonant cavity, and the shaft connector 4 with a flange is provided with a concave platform that matches the boss 3-3. During assembly, the seamless connection between the boss and the concave platform can be achieved by directly connecting the boss and the concave platform, thus ensuring the sealing of the coaxial resonant cavity. The probe 5 has a cylindrical structure or a planar structure. One end of the probe 5 passes through the inner conductor of the coaxial connector with a flange and then is inserted into the cylindrical drilling 2-3 of the conductor in the coaxial resonant cavity. . When in use, the inner conductor of the coaxial connector with flange is used to ensure the stability of the connection between the probe and the coaxial resonant cavity.
实施例1Example 1
按照如下尺寸制备上述用于小区域微波测试的高灵敏度同轴谐振测试装置，具体地，同轴谐振腔内导体的圆柱体2-1半径为2.5mm，圆锥体末端半径为0.9mm。同轴谐振腔外导体空心圆柱的半径为8.7mm，空心圆锥台末端半径为2.1mm。同轴谐振腔外导体空心圆柱体高度为20mm，空心圆锥台高度为10mm，两个耦合孔对称设置在距同轴谐振腔3轴线7.3mm处；耦合装置1为SMA接头式的磁耦合环，且环所在平面垂直于同轴谐振腔3轴线。The above-mentioned high-sensitivity coaxial resonance testing device for small-area microwave testing is prepared according to the following dimensions. Specifically, the radius of the cylinder 2-1 of the conductor in the coaxial resonance cavity is 2.5 mm, and the radius of the cone end is 0.9 mm. The radius of the hollow cylinder of the outer conductor of the coaxial resonant cavity is 8.7mm, and the radius of the end of the hollow truncated cone is 2.1mm. The height of the hollow cylinder of the outer conductor of the coaxial resonant cavity is 20mm, and the height of the hollow truncated cone is 10mm. The two coupling holes are symmetrically located 7.3mm away from the 3rd axis of the coaxial resonant cavity; the coupling device 1 is an SMA joint-type magnetic coupling ring. And the plane where the ring is located is perpendicular to the 3-axis of the coaxial resonant cavity.
基于上述用于小区域微波测试的高灵敏度同轴谐振测试装置，本实施例搭建了一个测试系统。如图4所示，所述测试系统，包括测试平台4-1，三维移动平台4-2，L型支架4-3，样品升降台4-4和同轴谐振探针测试器4-5。三维移动平台4-2和样品升降台4-4固设于测试平台4-1之上。L型支架4-3为倒“L”形，其一边可活动的固定在三维移动平台4-2之上，另一边与样品升降台4-4平行。上述用于小区域微波测试的高灵敏度同轴谐振测试装置安装在L型支架4-3的另一边，安装完成后其探针正对样品升降台4-4。Based on the above-mentioned high-sensitivity coaxial resonance testing device for small-area microwave testing, a testing system is built in this embodiment. As shown in Figure 4, the test system includes a test platform 4-1, a three-dimensional mobile platform 4-2, an L-shaped bracket 4-3, a sample lifting platform 4-4 and a coaxial resonance probe tester 4-5. The three-dimensional mobile platform 4-2 and the sample lifting platform 4-4 are fixed on the test platform 4-1. The L-shaped bracket 4-3 is in an inverted "L" shape, one side of which is movably fixed on the three-dimensional mobile platform 4-2, and the other side is parallel to the sample lifting platform 4-4. The above-mentioned high-sensitivity coaxial resonance testing device for small-area microwave testing is installed on the other side of the L-shaped bracket 4-3. After the installation is completed, its probe faces the sample lifting platform 4-4.
测试时，矢量网络分析的两个端口分别与小区域微波测试的高灵敏度同轴谐振测试装置中的耦合装置1连接，测量未加材料时的谐振频点；将聚乙烯薄膜放在样品升降台4-4上，通过调整三维移动平台4-2，使得同轴谐振测试装置4-5的探针位于聚乙烯薄膜上，测量此时的谐振频点，观察放入材料前后谐振频点的变化情况。During the test, the two ports of the vector network analysis are respectively connected to the coupling device 1 in the high-sensitivity coaxial resonance test device for small-area microwave testing, and the resonance frequency point is measured when no material is added; the polyethylene film is placed on the sample lifting platform. 4-4, adjust the three-dimensional mobile platform 4-2 so that the probe of the coaxial resonance testing device 4-5 is located on the polyethylene film, measure the resonance frequency point at this time, and observe the change of the resonance frequency point before and after placing the material Condition.
该测试系统对聚乙烯薄膜进行测试，聚乙烯薄膜厚度为几十微米，测试前后谐振频率变化结果图如图5所示，可以看到谐振点有明显的偏移，偏移量为16.26MHz。The test system tests the polyethylene film. The thickness of the polyethylene film is tens of microns. The resonant frequency change results before and after the test are shown in Figure 5. It can be seen that the resonance point has a significant offset, and the offset is 16.26MHz.
综上可见，本实施例提供的用于小区域微波测试的高灵敏度同轴谐振测试装置，是在传统同轴谐振腔的基础上，引入探针结构，以此构造出一端开路、一端短路的四分之一波长同轴谐振器。同轴探针与同轴腔的连接后相当于对原始同轴腔进行了延长，使同轴谐振器具有了更大尺寸。由于同轴谐振腔尺寸较大且没有介质填充，使得该装置有着高品质因数，测试灵敏度高；结构中探针与同轴谐振腔内导体采用插接方式连接，使其可以根据需求更换。通过更换不同长度的探针，调整装置长度来适用于宽频测试，解决了宽频测试的问题；相比传统的半波长或四分之一波长谐振器，本实施例的谐振测试装置充分兼顾了高灵敏度和小区域检测的测试需求。In summary, it can be seen that the high-sensitivity coaxial resonance testing device for small-area microwave testing provided in this embodiment is based on the traditional coaxial resonance cavity and introduces a probe structure to construct an open circuit at one end and a short circuit at the other end. Quarter wave coaxial resonator. The connection between the coaxial probe and the coaxial cavity is equivalent to extending the original coaxial cavity, making the coaxial resonator larger in size. Due to the large size of the coaxial resonant cavity and no dielectric filling, the device has a high quality factor and high test sensitivity; the probe in the structure is connected to the conductor in the coaxial resonant cavity in a plug-in manner, so that it can be replaced according to needs. By replacing probes of different lengths and adjusting the length of the device to be suitable for broadband testing, the problem of broadband testing is solved; compared with traditional half-wavelength or quarter-wavelength resonators, the resonance testing device of this embodiment fully takes into account high-frequency Testing needs for sensitivity and small area detection.
以上所述，仅为本发明的具体实施方式，本说明书中所公开的任一特征，除非特别叙述，均可被其他等效或具有类似目的的替代特征加以替换；所公开的所有特征、或所有方法或过程中的步骤，除了互相排斥的特征和/或步骤以外，均可以任何方式组合。The above are only specific embodiments of the present invention. Any feature disclosed in this specification, unless specifically stated, can be replaced by other equivalent or alternative features with similar purposes; all features disclosed, or All method or process steps, except mutually exclusive features and/or steps, may be combined in any way.
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