CN116735927A - Probe card - Google Patents
Probe card Download PDFInfo
- Publication number
- CN116735927A CN116735927A CN202310711242.0A CN202310711242A CN116735927A CN 116735927 A CN116735927 A CN 116735927A CN 202310711242 A CN202310711242 A CN 202310711242A CN 116735927 A CN116735927 A CN 116735927A
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- head
- push
- probe
- push head
- circuit board
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- 239000000523 sample Substances 0.000 title claims abstract description 94
- 230000007246 mechanism Effects 0.000 claims abstract description 41
- 230000000712 assembly Effects 0.000 claims abstract description 8
- 238000000429 assembly Methods 0.000 claims abstract description 8
- 238000012360 testing method Methods 0.000 claims abstract description 7
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 230000000149 penetrating effect Effects 0.000 claims abstract description 5
- 239000004065 semiconductor Substances 0.000 claims description 6
- 230000004308 accommodation Effects 0.000 description 6
- 238000013459 approach Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
A probe card, comprising: the circuit board is provided with a plurality of PIN PINs which are electrically conducted with a test circuit of the detection instrument; the holding mechanism is movably arranged on the circuit board and comprises a holding seat and a probe head detachably connected with the holding seat, the holding seat is provided with a containing groove penetrating through the holding seat, the probe head is positioned in the containing groove and is opposite to a plurality of PIN feet on the circuit board, and the holding seat and the probe head are detachably connected through a plurality of fixing assemblies and a plurality of positioning assemblies; and the fine tuning mechanism is used for adjusting the distances between the holding mechanism and a plurality of PIN PINs on the circuit board in the X direction and the Y direction respectively, and comprises a plurality of push heads, part of the push heads are movably arranged on the circuit board in the X direction, part of the push heads are movably arranged on the circuit board in the Y direction, and the holding mechanism is limited among the push heads. The application can realize the rapid and accurate alignment of the probe card.
Description
Technical Field
The application relates to the technical field of chip manufacturing, in particular to a probe card.
Background
The probe card is a test interface instrument for testing chips, the accurate alignment of probes and PIN PINs is a key technical difficulty of the products, and fig. 2 is a schematic diagram of the principle of the probe card.
The assembly process of the vertical probe card in the existing market is to fix the holding seat on the circuit board through bolts, then realize the positioning of the probe head and the holding seat through two positioning pins, and finally lock the probe head and the holding seat through screws. In order to accurately align the probe with the PIN, a technician needs to smear red lead on the needle during installation, confirm the offset direction of the probe through the impression of the needle, and then correct the probe step by adjusting the relative positions of the retaining seat and the circuit board. The assembly process has two technical difficulties, and the first difficulty is that the clearance fit between the probe head and the holding seat causes a movable clearance in connection between the probe head and the holding seat each time, and the relative positions of the probe head and the holding seat cannot be guaranteed not to change during each disassembly and assembly. The second difficulty is that when the relative position of the holder and the circuit board is adjusted, how much distance has been adjusted cannot be determined, the offset can be measured by the impression of the needle, but the adjustment is not observable, and matching of the adjustment and the offset cannot be achieved.
Disclosure of Invention
In order to solve the above problems, an object of the present application is to provide a probe card capable of achieving precise alignment adjustment that can be observed.
In order to achieve the above purpose, the application adopts the following technical scheme: a probe card electrically connected between a semiconductor wafer and a test instrument, comprising:
the circuit board is provided with a plurality of PIN PINs which are electrically conducted with a test circuit of the detection instrument;
the holding mechanism is movably arranged on the circuit board and comprises a holding seat and a probe head detachably connected with the holding seat, a plurality of probes for contacting a semiconductor wafer are accommodated and held on the probe head, the holding seat is provided with a containing groove penetrating through the holding seat, the probe head is positioned in the containing groove and opposite to a plurality of PIN feet on the circuit board, and the holding seat and the probe head are detachably connected through a plurality of fixing components and a plurality of positioning components; and
the fine tuning mechanism is used for adjusting the distances between the holding mechanism and the PIN PINs on the circuit board in the X direction and the Y direction respectively, and comprises a plurality of push heads, part of the push heads are movably arranged on the circuit board in the X direction, part of the push heads are movably arranged on the circuit board in the Y direction, and the holding mechanism is limited among the push heads.
Further preferably, the number of the fixing components is greater than or equal to three, the number of the positioning components is greater than or equal to three, a plurality of the fixing components and a plurality of the positioning components are located at the edge of the probe head and distributed at intervals, each fixing component comprises a threaded hole and a screw pin, the threaded holes are formed in the retaining base, the lower end parts of the screw pins penetrate through the probe head to be in threaded fit connection with the corresponding threaded holes, and the upper parts of the screw pins are in interference fit with the probe head.
Further preferably, each positioning assembly comprises a positioning hole and a positioning pin, wherein the positioning holes and the positioning pins are formed in the holding seat and the probe head, and the lower end parts of the positioning pins sequentially penetrate through the probe head and the holding seat and then are connected with the corresponding positioning holes in a matching manner.
Further preferably, the device comprises a first push head, a second push head, a third push head, a fourth push head and a plurality of adjusting components, wherein the first push head and the second push head are oppositely arranged along the X direction, the third push head and the fourth push head are oppositely arranged left and right along the Y direction, the first push head, the second push head and the third push head are respectively provided with an adjusting component, each adjusting component comprises a fixing seat fixed on the circuit board, a fixing ring fixedly connected to the fixing seat, and an adjusting knob rotationally connected to the fixing seat, and at least part of the adjusting knob passes through the fixing ring and is in threaded connection with the corresponding push head so as to drive the corresponding push head to move back and forth along the linear direction.
Further preferably, the adjusting knob is provided with graduation marks on the circumference, and the pushing head connected with the adjusting knob advances or retreats by a fixed distance when the adjusting knob rotates for one circle.
Further preferably, 100 graduation lines are arranged on the circumference of each adjusting knob, and the push head corresponding to each graduation line rotates for each adjusting knob to advance or retreat by 1-10 micrometers.
Further preferably, the third pushing head is rotatably provided with a large screw, one end part of the large screw is provided with a first gear positioned at the outer side of the third pushing head, the other end part of the large screw is in threaded connection with the fourth pushing head, and the fourth pushing head is configured to be close to or far away from the third pushing head when the large screw rotates around the self axis.
Further preferably, the third push head is further provided with a second gear meshed with the first gear and a locking nail for locking the second gear in a rotating mode, lock holes are formed in the third push head and the second gear, and the locking nail is provided with a locking position which is inserted into the lock holes of the second gear and the third push head at the same time and an unlocking position which is separated from the lock hole of the third push head.
Further preferably, the first pushing head and the second pushing head are respectively provided with an oblong slot hole for the large screw to penetrate.
Further preferably, the fixing base is further provided with a plurality of guide posts extending towards the corresponding pushing heads and parallel to each other, each pushing head is provided with a plurality of guide holes, and the number of the guide holes is consistent with that of the corresponding guide posts on the fixing base and is matched with the corresponding guide posts respectively.
Compared with the prior art, the application has the following beneficial effects:
the holding mechanism of the application rapidly limits the probe head on the holding seat through the plurality of positioning components and the plurality of fixing components without relative movement, and the fine adjustment mechanism can accurately adjust the displacement of the holding mechanism in the front-back direction and the left-right direction, thereby realizing the accurate alignment of the probe card.
Drawings
Fig. 1 is a schematic perspective view of a probe card according to an embodiment of the present application;
FIG. 2 is a schematic diagram of the probe card of FIG. 1;
FIG. 3 is a top view of the retention mechanism of FIG. 1;
FIG. 4 is a cross-sectional view taken along line A-A in FIG. 3;
FIG. 5 is a schematic perspective view of the fine adjustment mechanism in FIG. 1;
FIG. 6 is a front view of the fine adjustment mechanism of FIG. 5;
FIG. 7 is a cross-sectional view taken along line B-B in FIG. 6;
fig. 8 is a partially enlarged schematic view at C in fig. 7.
Wherein: 100. a probe card; 10. a holding mechanism; 1. a holding base; 11. a first accommodation groove; 12. a second accommodation groove; 2. a probe head; 21. a probe; 3. a fixing assembly; 31. a threaded hole; 32. a connection hole; 33. a screw pin; 4. a positioning assembly; 41. a first positioning hole; 42. a second positioning hole; 43. a positioning pin; 20. a fine adjustment mechanism; 5. a circuit board; 51. PIN number; 61. a first push head; 611. a slot hole; 62. a second push head; 63. a third push head; 64. a fourth push head; 7. adjusting a station; 81. a first adjustment assembly; 811. a first fixing seat; 8111. a guide post; 812. a first fixing ring; 813. a first adjustment knob; 8131. a knob portion; 8132. a connection part; 82. a second adjustment assembly; 821. the second fixing seat; 822. a second fixing ring; 823. a second adjustment knob; 83. a third adjustment assembly; 831. a third fixing seat; 832. a third fixing ring; 833. a third adjustment knob; 9. a clamping assembly; 91. a large screw; 911. a screw portion; 912. a knob portion; 92. a locking member; 921. a gear; 922. and (5) a screw.
Detailed Description
In order to describe the technical content, constructional features, objects and effects of the application in detail, the technical solutions of the embodiments of the present application will be described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments of the present application. In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a detailed description of various exemplary embodiments or implementations of the application. However, various exemplary embodiments may be practiced without these specific details or with one or more equivalent arrangements. Furthermore, the various exemplary embodiments may be different, but are not necessarily exclusive. For example, the specific shapes, configurations, and characteristics of the exemplary embodiments may be used or implemented in another exemplary embodiment without departing from the inventive concept.
Hereinafter, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.
The terms "upper", "lower", "left", "right", "front", "rear" as used herein refer to upper, lower, left, right, front and rear as shown in fig. 1.
In the present application, unless explicitly specified and limited otherwise, the term "connected" is to be construed broadly, and for example, "connected" may be either fixedly connected, detachably connected, or integrally formed; can be directly connected or indirectly connected through an intermediate medium.
The embodiment of the application provides a probe card capable of observing and accurately adjusting alignment, as shown in fig. 1 and 2, the probe card 100 is electrically connected between a semiconductor wafer and a detecting instrument for conducting power-on detection on the semiconductor wafer. The probe card 100 comprises a circuit board 5, a holding mechanism 10 and a fine adjustment mechanism 20, wherein the circuit board 5 is provided with a plurality of PIN PINs 51 communicated with a detection circuit, the holding mechanism 10 is provided with a probe head 2, the probe head 2 is provided with a plurality of probes 21, the holding mechanism 10 is used for quickly fixing and holding the probe head 2, the holding mechanism 10 is placed on the circuit board 5, and the distance between the probes 21 and the PIN PINs 51 is adjusted through the fine adjustment mechanism 20, so that quick alignment of the probes 21 and the PIN PINs 51 is realized.
As shown in fig. 3 and 4, the holding mechanism 10 includes a holder 1, a probe head 2, a plurality of fixing members 3, and a plurality of positioning members 4, the holder 1 has a first receiving groove 11 for receiving the probe head 2 on an upper surface thereof, a second receiving groove 12 communicating with the first receiving groove 11 on a lower surface thereof, the second receiving groove 12 is located on a lower side of the first receiving groove 11, and in the embodiment of the present application, the holder 1, the probe head 2, the first receiving groove 11, and the second receiving groove 12 are all circular and each have a center line X 1 For the axis setting, the diameter of the second accommodation groove 12 is smaller than the diameter of the first accommodation groove 11, and the diameter of the probe head 2 is larger than the diameter of the second accommodation groove 12 and smaller than the diameter of the first accommodation groove 11.
Multiple fixing assemblies 3 and multiple positioning groupsThe member 4 is connected between the holder 1 and the probe head 2, and the probe head 2 is restrained in the first receiving groove 11 of the holder 1 by the plurality of fixing members 3 and the plurality of positioning members 4. In the present application, the number of the fixing members 3 and the positioning members 4 is three or more, and a plurality of the fixing members 3 are wound around the center line X at the edge of the probe head 2 1 A plurality of positioning assemblies 4 are arranged in sequence at the edge center line X of the probe head 2 1 Are arranged in sequence, and each positioning assembly 4 is positioned between two adjacent fixing assemblies 3. Each of the fixing members 3 includes a screw hole 31 provided on the holder 1, a connection hole 32 provided on the probe head 2, and a screw pin 33, the screw pin 33 penetrating through the connection hole 32 of the probe head 2 and being coupled with the corresponding screw hole 31, and the plurality of fixing members 3 fix the probe head 2 on the holder 1. Each positioning assembly 4 comprises a first positioning hole 41 arranged on the holder 1, a second positioning hole 42 arranged on the probe head 2 and a positioning pin 43, wherein the positioning pin 43 sequentially penetrates through the second positioning hole 42 and the first positioning hole 41 and is matched with the second positioning hole 42 and the first positioning hole 41, the probe head 2 is positioned on the holder 1 through a plurality of positioning assemblies 4, and the probe head 2 is prevented from displacing relative to the holder 1 in the detection process. In the embodiment of the application, 8 fixing components 3 and 6 positioning components 4 are arranged between the probe head 2 and the holder 1, and the 8 fixing components 3 are arranged around the central line X 1 Are equiangularly distributed.
As shown in fig. 5 to 8, the fine adjustment mechanism 20 includes a circuit board 5, a first push head 61 and a second push head 62 disposed opposite to each other from front to back, and a third push head 63 and a fourth push head 64 disposed opposite to each other from left to right, the first push head 61, the second push head 62, the third push head 63, the fourth push head 64 and the circuit board 5 forming an adjustment station 7 accommodating the holding mechanism 10, a distance between the first push head 61 and the second push head 62 being variably disposed on the circuit board 5, and a distance between the third push head 63 and the fourth push head 64 being variably disposed on the circuit board 5.
The fine adjustment mechanism 20 further comprises a first adjustment assembly 81, a second adjustment assembly 82 and a third adjustment assembly 83, wherein the first adjustment assembly 81 is in transmission connection with the first push head 61, and the first adjustment assembly 81 is used for driving the first push head 61 to approach and depart from the second push head 62; the second adjusting component 82 is in transmission connection with the second push head 62, and the second adjusting component 82 is used for driving the second push head 62 to be close to and far away from the first push head 61; the third adjusting component 83 is in transmission connection with the third push head 63, and the third adjusting component 83 is used for driving the third push head 63 to move back and forth along the left-right direction.
The first adjusting assembly 81 includes a first fixing seat 811, a first fixing ring 812 and a first adjusting knob 813, the first fixing seat 811 is disposed at an outer side of the first push head 61 and fixedly disposed on the circuit board 5, the first fixing ring 812 is fixedly disposed on the first fixing seat 811, the first adjusting knob 813 has a knob portion 8131 and a connecting portion 8132 extending in a front-rear direction, the connecting portion 8132 passes through the first fixing ring 812 to be in threaded connection with the first push head 61, and when the first adjusting knob 813 rotates, the first push head 61 moves back and forth in the front-rear direction; the first fixing ring 812 supports the first adjusting knob 813 on the first fixing seat 811, and prevents the first adjusting knob 813 from falling off the first fixing seat 811. The circumference of the knob portion 8131 is provided with scale marks with the same interval, the first adjusting knob 813 is configured such that the first push head 61 advances or retreats by 0.1 mm-1 mm when the first adjusting knob 813 rotates one time, in the present application, the first push head 61 advances or retreats by 0.5mm in the front-rear direction when the first adjusting knob 813 rotates one time, the outer surface of the knob portion 8131 uniformly laser-engraves the scale marks with the interval of 50 lines, and there are 100 scales in total, and each time the first adjusting knob 813 rotates 1 scale, the first push head 61 advances or retreats by 5 μm, i.e., the probe card 100 can realize accurate positioning with the minimum of 5 μm.
The first fixing seat 811 is further provided with four guide posts 8111 extending toward the first push head 61, the first push head 61 is provided with four guide holes, the four guide holes are in one-to-one correspondence with the four guide posts 8111, each guide post 8111 can be arranged in a corresponding guide hole in a penetrating manner, and the guide posts 8111 are matched with the guide holes to guide the movement of the first push head 61.
The second adjusting assembly 82 comprises a second fixed seat 821, a second fixed ring 822 and a second adjusting knob 823, the second fixed seat 821 is arranged on the outer side of the second push head 62 and fixedly arranged on the circuit board 5, the second fixed ring 822 is fixedly arranged on the second fixed seat 821, and the second adjusting knob 823 drives the second push head 62 to move back and forth along the front-back direction; the third fixing seat 831 is disposed on the outer side of the third push head 63 and is fixedly disposed on the circuit board 5, the third fixing ring 832 is fixedly disposed on the third fixing seat 831, and the third adjusting knob 833 drives the third push head 63 to move back and forth along the left-right direction. The structures of the second adjusting assembly 82 and the third adjusting assembly 83 are consistent with the first adjusting assembly 81, the structures and the uses of the second fixing seat 821 and the third fixing seat 831 are consistent with those of the first fixing seat 811, the structures and the uses of the second fixing ring 822 and the third fixing ring 832 are consistent with those of the first fixing ring 812, the structures and the uses of the second adjusting knob 823 and the third adjusting knob 833 are consistent with those of the first adjusting knob 813, 100 scales are also arranged on the second adjusting knob 823 and the third adjusting knob 833, the second push head 62 advances or retreats by 0.5mm in the front-back direction when the second adjusting knob 823 rotates one round, and the third push head 63 advances or retreats by 0.5mm in the left-right direction when the third adjusting knob 833 rotates one round. The first push head 61, the second push head 62 and the third push head 63 realize that the offset of the holding mechanism 10 is matched with the adjustment amount of the adjusting knob under the adjustment of the corresponding adjusting knob.
A clamping assembly 9 is arranged between the third push head 63 and the fourth push head 64, the clamping assembly 9 comprises a large screw rod 91 and a locking member 92, the large screw rod 91 comprises a screw rod part 911 extending along the left-right direction and a knob part 912 arranged at one end part of the screw rod part 911, the screw rod part 911 sequentially passes through the third push head 63 and the fourth push head 64 along the left-right direction and is in threaded connection with the fourth push head 64, and when the large screw rod 91 rotates around the self axis, the fourth push head 64 is close to and far away from the third push head 63; the knob portion 912 is circumferentially arranged with splines. The lock member 92 has a locked state in which the large screw 91 is prevented from rotating and an unlocked state in which the large screw 91 is allowed to rotate, the lock member 92 includes a gear 921 that meshes with the knob portion 912, and a screw 922 that connects the gear 921 and the third push head 63, the screw 922 tightening the gear 921 on the third push head 63 when the lock member 92 is in the locked state; when the lock member 92 is in the unlocked state, the screw 922 is unscrewed from the gear 921.
The first push head 61 is further provided with an elliptical slot 611, the slot 611 is penetrated by the screw portion 911 of the large screw 91, so that the first push head 61 can move in the front-rear direction relative to the large screw 91, and in the present application, the second push head 62 is also provided with an elliptical slot.
As shown in fig. 1 and 2, the probe head 2 is provided with a plurality of probes 21, the upper surface of the circuit board 5 is provided with a plurality of PIN PINs 51, and the fine adjustment mechanism 20 adjusts the position of the holding mechanism 10 so as to align each probe 21 and PIN 51.
The probe head 2 is mounted in the first accommodating groove 11 of the holder 1, and the 6 positioning pins 43 sequentially pass through the corresponding second positioning holes 42 and the first positioning holes 41, so that the probe head 2 can not move back and forth relative to the holder 1 in a horizontal plane parallel to the probe head 2; 8 screw pins 33 pass through the corresponding connection holes 32 and are connected with the corresponding threaded holes 31 in a matching manner, and the 8 screw pins 33 are screwed to fix the probe head 2 on the holder 1 so that the probe head 2 cannot be displaced relative to the holder 1. Unscrewing the screw 922 so that the large screw 91 can rotate rotates the large screw 91 so that the fourth push head 64 approaches the third push head 63 until the fourth push head 64 and the third push head 63 clamp the holding seat 1. Screw 922 is tightened so that locking member 92 is in a locked state. Rotating the third adjusting knob 833 to enable the third push head 63 and the fourth push head 64 of the clamping and holding seat 1 to drive the holding mechanism 10 to adjust positions in the left-right direction, and controlling the distance of the holding mechanism 10 moving in the left-right direction through scales on the third adjusting knob 833; one of the first and second adjustment knobs 813 and 823 is rotated such that the corresponding push head is away from the holder 1, and the other of the first and second adjustment knobs 813 and 823 is rotated such that the corresponding push head pushes the holding mechanism 10 to approach the push head away from the holder 1, and the number of turns of each rotation of the first and second adjustment knobs 813 and 823 is the same to control the moving distance of the holding mechanism 10 in the front-rear direction.
The holding mechanism 10 of the application limits the probe head 2 on the holding seat 1 through the plurality of positioning components 4 and the plurality of fixing components 3 without relative movement, and the fine adjustment mechanism 20 can accurately adjust the displacement of the holding mechanism 10 in the front-back direction and the left-right direction, thereby realizing the accurate alignment of the probe card.
The foregoing has shown and described the basic principles, principal features and advantages of the application. It will be understood by those skilled in the art that the present application is not limited to the foregoing embodiments, which have been described in the foregoing embodiments and description merely illustrates the principles of the application, and various changes and modifications may be made therein without departing from the spirit and scope of the application, the scope of which is defined in the appended claims, specification and their equivalents.
Claims (10)
1. A probe card electrically connected between a semiconductor wafer and a test instrument, comprising:
the circuit board is provided with a plurality of PIN PINs which are electrically conducted with a test circuit of the detection instrument;
the holding mechanism is movably arranged on the circuit board and comprises a holding seat and a probe head detachably connected with the holding seat, a plurality of probes for contacting a semiconductor wafer are accommodated and held on the probe head, the holding seat is provided with a containing groove penetrating through the holding seat, the probe head is positioned in the containing groove and opposite to a plurality of PIN feet on the circuit board, and the holding seat and the probe head are detachably connected through a plurality of fixing components and a plurality of positioning components; and
the fine tuning mechanism is used for adjusting the distances between the holding mechanism and the PIN PINs on the circuit board in the X direction and the Y direction respectively, and comprises a plurality of push heads, part of the push heads are movably arranged on the circuit board in the X direction, part of the push heads are movably arranged on the circuit board in the Y direction, and the holding mechanism is limited among the push heads.
2. The probe card of claim 1, wherein the number of the fixing components is greater than or equal to three, the number of the positioning components is greater than or equal to three, a plurality of the fixing components and a plurality of the positioning components are positioned at the edge of the probe head and are distributed at intervals, each fixing component comprises a threaded hole and a screw pin which are arranged on the holding seat, the lower end part of the screw pin penetrates through the probe head to be in threaded fit connection with the corresponding threaded hole, and the upper part of the screw pin is in interference fit with the probe head.
3. The probe card of claim 2, wherein each of the positioning assemblies comprises positioning holes and positioning pins arranged on the holder and the probe head, and the lower ends of the positioning pins sequentially penetrate through the probe head and the holder and then are connected with the corresponding positioning holes in a matching manner.
4. The probe card of claim 1, wherein the fine adjustment mechanism comprises a first push head, a second push head, a third push head, a fourth push head and a plurality of adjustment assemblies, wherein the first push head and the second push head are oppositely arranged along the X direction, the third push head and the fourth push head are oppositely arranged along the Y direction, the first push head, the second push head and the third push head are respectively provided with an adjustment assembly, each adjustment assembly comprises a fixed seat fixed on the circuit board, a fixed ring fixedly connected to the fixed seat, and an adjustment knob rotatably connected to the fixed seat, and at least part of the adjustment knob is in threaded connection with the corresponding push head through the fixed ring so as to drive the corresponding push head to move back and forth along the straight line direction.
5. The probe card of claim 4, wherein the adjustment knob is marked with graduation marks in the circumferential direction, and the adjustment knob is configured such that the pusher coupled to the adjustment knob is advanced or retracted a fixed distance when the adjustment knob is rotated one turn.
6. The probe card of claim 5, wherein 100 graduation marks are provided on the circumference of each of the adjustment knobs, and each of the adjustment knobs rotates the push head corresponding to one graduation mark to advance or retract by 1-10 micrometers.
7. The probe card of claim 4, wherein the third pusher is rotatably provided with a large screw, one end of the large screw has a first gear located outside the third pusher, and the other end is in threaded connection with the fourth pusher, and the fourth pusher is configured to be moved closer to or farther from the third pusher when the large screw rotates around its own axis.
8. The probe card of claim 7, wherein the third pusher is further rotatably provided with a second gear engaged with the first gear and a locking pin for locking the second gear, the third pusher and the second gear are each provided with a locking hole, and the locking pin has a locking position inserted into the locking holes of the second gear and the third pusher at the same time and an unlocking position separated from the locking holes of the third pusher.
9. The probe card of claim 7, wherein the first pusher and the second pusher are each provided with an oblong slot through which the large screw passes.
10. The probe card of claim 7, wherein the fixing base is further provided with a plurality of guide posts parallel to each other and extending toward the corresponding pushing head, each pushing head is provided with a plurality of guide holes, and the number of the guide holes is identical to the number of the guide posts on the corresponding fixing base and is matched with the corresponding guide posts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310711242.0A CN116735927A (en) | 2023-06-15 | 2023-06-15 | Probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310711242.0A CN116735927A (en) | 2023-06-15 | 2023-06-15 | Probe card |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116735927A true CN116735927A (en) | 2023-09-12 |
Family
ID=87912984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310711242.0A Pending CN116735927A (en) | 2023-06-15 | 2023-06-15 | Probe card |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116735927A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118033199A (en) * | 2024-04-10 | 2024-05-14 | 深圳市森美协尔科技有限公司 | Probe assembly and probe platform |
-
2023
- 2023-06-15 CN CN202310711242.0A patent/CN116735927A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118033199A (en) * | 2024-04-10 | 2024-05-14 | 深圳市森美协尔科技有限公司 | Probe assembly and probe platform |
| CN118033199B (en) * | 2024-04-10 | 2024-06-14 | 深圳市森美协尔科技有限公司 | Probe assembly and probe platform |
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