CN116728433A - Wafer transfer robot with modularized design - Google Patents

Abstract

The application belongs to the field of semiconductor production industry, and particularly relates to a wafer transfer robot with a modularized design, which comprises an execution assembly, a rotary driving assembly and a linear driving assembly; the execution assembly is provided with an interface assembly used for being connected with the rotary driving assembly, and the linear driving assembly comprises a flange connecting plate and a lifting driving mounting plate which are respectively arranged at two ends of the guide rail connecting plate; an output shaft of the slewing drive assembly is connected with an interface assembly on the execution assembly and is used for driving the execution assembly to rotate; the linear driving assembly is arranged in the inner cavity below the lifting driving mounting plate, the output end of the linear driving assembly is connected with the rotary driving assembly and used for driving the rotary driving assembly to lift and move between the flange connecting plate and the lifting driving mounting plate, and the control assembly is also arranged in the inner cavity below the lifting driving mounting plate.

Description

Wafer transfer robot with modularized design

Technical Field

The application belongs to the field of semiconductor production industry, and particularly relates to a wafer transfer robot with a modularized design.

Background

In the chip manufacturing process, the wafer needs to be transported from the buffer cavity to the process cavity for processing in a vacuum environment, and the mechanical arms used for carrying the wafer are different due to different related processes and equipment differences.

The first prior art is: a planar articulated robot for conveying a flat object and a system for processing a flat object (grant publication No. CN 1329167C) are disclosed, wherein a robot arm is provided which can move a robot finger part fixed to a wrist part and holding the flat object in a substantially vertical direction relative to a front inlet surface of a target machine, and can prevent twisting of wiring and piping in the arm body due to excessive rotation.

And the second prior art is as follows: a connecting rod type double-arm direct-drive vacuum manipulator (publication number is CN 115122376A) discloses a connecting rod type double-arm direct-drive vacuum manipulator, which can fully meet the requirement of the volume of a cavity without additionally installing an external control cabinet in the cavity; the lifting driving piece is arranged on the bottom surface of the lifting driving piece mounting plate and is positioned at a position close to the controller component in the inner cavity of the manipulator shell, so that the whole volume of the manipulator is effectively reduced, and the driving and controlling integrated structure is realized. The application realizes the integration of the manipulator and the controller component, can greatly reduce the volume of the manipulator body, effectively increases the lifting stroke of the double-shaft arm driving piece and improves the working efficiency.

The integrated design of the manipulator in the prior art has the following defects:

1. the structure of the transmission shaft system is redundant, and the precision and repeatability of the assembly process are difficult to grasp;

2. the module fault is difficult to maintain, is unfavorable for locating the fault, and maintenance efficiency is low.

Disclosure of Invention

The application aims to provide a wafer transfer robot with a modularized design, which is used for carrying out modularized design on the robot, reducing the difficulty of simulation verification, assembly and fault maintenance of the functions of a manipulator and improving the production assembly efficiency and the fault positioning maintenance efficiency.

In order to achieve the above purpose, the present application provides the following technical solutions:

a wafer transfer robot with a modularized design comprises an execution assembly, a rotation driving assembly and a linear driving assembly;

the execution assembly is provided with an interface assembly used for being connected with the rotary driving assembly, and the linear driving assembly comprises a flange connecting plate and a lifting driving mounting plate which are respectively arranged at two ends of the guide rail connecting plate; the rotary driving assembly is arranged between the flange connecting plate and the lifting driving mounting plate, and an output shaft of the rotary driving assembly penetrates through the flange connecting plate to be connected with the interface assembly on the executing assembly and is used for driving the executing assembly to rotate; the linear driving assembly is arranged in the inner cavity below the lifting driving mounting plate, the output end of the linear driving assembly penetrates through the lifting driving mounting plate to be connected with the rotary driving assembly and used for driving the rotary driving assembly to conduct lifting movement between the flange connecting plate and the lifting driving mounting plate, and the control assembly is further arranged in the inner cavity below the lifting driving mounting plate.

Preferably, for flexible transmission, the executing assembly comprises a first connecting rod, a second connecting rod and a third connecting rod which are sequentially connected, a belt wheel transmission mechanism is arranged between the first connecting rod and the second connecting rod, and a belt wheel transmission mechanism is arranged between the second connecting rod and the third connecting rod.

Preferably, the guide rail is installed on the guide rail connecting plate, the guide rail is provided with the slider connecting plate, the lifting connecting piece is installed on the motor cabinet on one side of the rotary driving assembly, and the lifting connecting piece is in sliding connection with the slider connecting plate.

Preferably, in order to realize quick and tight connection between the execution assembly and the rotation driving assembly, the interface assembly comprises a biaxial locking piece and an axial expansion sleeve connector, wherein the axial expansion sleeve connector is arranged below the first connecting rod, and the biaxial locking piece penetrates through the axial expansion sleeve connector and penetrates into the first connecting rod.

Further, a belt wheel is further arranged at the interface assembly and arranged on a belt wheel bearing seat, the belt wheel and the belt wheel bearing seat are both sleeved on the periphery of the biaxial locking piece, and the belt wheel bearing seat is arranged above the expansion sleeve connector; the rotary driving assembly comprises a first rotary motor and a second rotary motor, the first rotary motor is arranged above the second rotary motor, and a first motor shaft of the first rotary motor is sleeved on the outer side of a second motor shaft of the second rotary motor and is coaxially arranged with the second motor shaft; the upper end of the first motor shaft penetrates through the flange connecting plate to be connected with the first connecting rod and used for driving the first connecting rod to independently rotate around the first rotating shaft, the lower end of the first motor shaft is connected with the output end of the first rotating motor, the upper end of the second motor shaft penetrates through the flange connecting plate to be connected with the belt wheel and used for driving the second connecting rod to rotate around the second rotating shaft and the third connecting rod to rotate around the third rotating shaft, and the lower end of the second motor shaft is connected with the output end of the second rotating motor.

Preferably, in order to enable the first motor shaft and the second motor shaft to realize dynamic sealing under the condition of relative rotation, a two-shaft sealing ring is further arranged between the first motor shaft and the second motor shaft.

Preferably, in order to further enable the execution assembly to be in sealing connection with the rotary driving assembly, a corrugated pipe connecting piece is arranged on the rotary driving assembly, the corrugated pipe connecting piece is sleeved on the outer side of the first motor shaft, the corrugated pipe connecting piece is connected with the flange connecting plate through a corrugated pipe, and a shaft sealing piece is further arranged between the corrugated pipe connecting piece and the first motor shaft.

Further, the linear driving assembly comprises a lifting motor, a lifting motor support is arranged below the lifting driving mounting plate, the lifting motor is mounted on the lifting motor support, the output end of the lifting motor is connected with a lifting motor coupler, the lifting motor coupler is connected with a screw nut, and the other side of the screw nut extends to the inner side of the second motor shaft.

Preferably, in order to avoid excessive torsion of the manipulator of the execution assembly, the first rotating motor and the second rotating motor are respectively provided with an encoder for reading the rotation angle of the motor, and the encoder is electrically connected with the control assembly.

Further, in order to save assembly space, the axis central lines of the interface component, the flange connecting plate, the corrugated pipe, the first rotating motor, the second rotating motor, the lifting driving mounting plate, the linear driving component, the first motor shaft and the second motor shaft are all collinear.

The beneficial effects of the application are as follows: the transfer robot is in modularized design, so that production and assembly among modules are facilitated, production efficiency is improved, meanwhile, fault maintenance is facilitated by rapidly positioning the fault module, assembly among the modules is performed by adopting the interface assembly provided by the application, and the assembly is simple, efficient and good in tightness.

Drawings

The accompanying drawings are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate the application and together with the embodiments of the application, serve to explain the application. In the drawings:

FIG. 1 is a schematic perspective view of each module of the present application;

FIG. 2 is a schematic view of the structural framework of the present application;

FIG. 3 is a schematic diagram of a modular connection explosion of the present application;

FIG. 4 is a schematic diagram of the internal structure of the interface module of the present application;

FIG. 5 is a schematic view of the internal structure of an expansion joint connector;

FIG. 6 is a schematic diagram of the internal structure of the swing drive assembly;

FIG. 7 is a schematic diagram of the overall internal structure of the present application;

the labels in the figure: 100 is an executing assembly, 200 is a rotary driving assembly, 300 is a linear driving assembly, 110 is a first connecting rod, 120 is a second connecting rod, 130 is a third connecting rod, 140 is a first rotating shaft, 150 is a second rotating shaft, 160 is a third rotating shaft, 170 is an interface assembly, 101 is a belt pulley, 102 is a two-shaft locking member, 103 is a belt bearing seat, 104 is an axial account-cover connector, 141 is an outer ring, 142 is an inner ring, 143 is a bottom connecting plate, 201 is a motor seat, 202 is a lifting connecting member, 203 is a corrugated tube, 204 is a first motor shaft, 205 is a second motor shaft, 206 is a corrugated tube connecting member, 207 is a shaft sealing member, 208 is a bearing seat, 209 is a two-shaft sealing ring, 210 is a guide rail, 211 is a first rotating motor, 212 is a second rotating motor, 213 is a lower supporting plate, 301 is a slider connecting plate, 302 is a screw nut, 303 is a flange connecting plate, 304 is a guide rail connecting plate, 305 is a lifting driving mounting plate, 306 is a lifting motor bracket, 307 is a lifting motor coupling, 308 is a lifting motor, 309 is a control assembly, and 309 is a mounting seat of a machine.

Detailed Description

Example 1

1-7, as shown in FIG. 1, the wafer transfer robot of a modular design includes an actuating assembly 100, a swing drive assembly 200, and a linear drive assembly 300, wherein the actuating assembly 100 is provided with an interface assembly 170 for connecting with the swing drive assembly 200;

as shown in fig. 2, the executing assembly 100 includes a first connecting rod 110, a second connecting rod 120 and a third connecting rod 130 which are sequentially connected, a belt wheel transmission mechanism is arranged between the first connecting rod 110 and the second connecting rod 120, a belt wheel transmission mechanism is arranged between the second connecting rod 120 and the third connecting rod 130, and the belt wheel transmission mechanism is in the prior art and is not shown in the figure; the execution assembly is used for conveying the wafer to a plane position, and the length of each manipulator rod can be adjusted according to actual needs.

As shown in fig. 2-5 and fig. 7, the swing driving assembly 200 includes a first rotating motor 211 and a second rotating motor 212, the first rotating motor 211 is disposed above the second rotating motor 212, a lower support plate 213 is disposed below the second rotating motor 212, in one embodiment, each of the first rotating motor 211 and the second rotating motor 212 is provided with an encoder for reading a rotation angle of the motor, and the encoder is electrically connected with the control assembly 309; the first motor shaft 204 of the first rotating motor 211 is sleeved outside the second motor shaft 205 of the second rotating motor 212, is coaxially arranged with the second motor shaft 205, and is provided with a bearing seat 208 on the outer ring of the first motor shaft 204; the upper end of the first motor shaft 204 is connected with the first connecting rod 110 through the flange connecting plate 303, and is used for driving the first connecting rod 110 to independently rotate around the first rotating shaft 140, the lower end of the first motor shaft 204 is connected with the output end of the first rotating motor 211, the upper end of the second motor shaft 205 is connected with the belt pulley 101 through the flange connecting plate 303, and is used for driving the second connecting rod 120 to rotate around the second rotating shaft 150 and the third connecting rod 130 to rotate around the third rotating shaft 160, and the lower end of the second motor shaft 205 is connected with the output end of the second rotating motor 212; in fig. 2, the first rotating motor 211 is M2, the second rotating motor 212 is M3, pulley transmission mechanisms are arranged among the first rotating shaft 140, the second rotating shaft 150 and the third rotating shaft 160, when the second rotating motor 212 drives the second connecting rod 120 to rotate, the third connecting rod 130 follows the second connecting rod 120 in a certain proportion, and in fig. 2, the first rotating shaft 140 is at the central axes of the first motor shaft 204 and the second motor shaft 205.

In one embodiment, as shown in fig. 6, the upper end surface of the swing driving assembly 200 is further provided with a platform mounting seat 331, and the swing driving assembly 200 is mounted on the flange connection plate 303 through the platform mounting seat 331.

As shown in fig. 3, the linear driving assembly 300 includes a flange connection plate 303 and a lifting driving installation plate 305 respectively provided at both ends of a guide connection plate 304; the slewing drive assembly 200 is installed between the flange connection plate 303 and the lifting drive installation plate 305, and an output shaft of the slewing drive assembly 200 penetrates through the flange connection plate 303 to be connected with the interface assembly 170 on the execution assembly 100 and is used for driving the execution assembly 100 to rotate; the linear driving assembly 300 is installed in an inner cavity below the lifting driving installation plate 305, the output end of the linear driving assembly 300 penetrates through the lifting driving installation plate 305 to be connected with the slewing driving assembly 200 and is used for driving the slewing driving assembly 200 to perform lifting movement between the flange connection plate 303 and the lifting driving installation plate 305, the control assembly 309 is further installed in the inner cavity below the lifting driving installation plate 305, the linear driving assembly 300 comprises a lifting motor 308, a lifting motor bracket 306 is arranged below the lifting driving installation plate 305, the lifting motor 308 is installed on the lifting motor bracket 306, the output end of the lifting motor 308 is connected with a lifting motor coupler 307, the lifting motor coupler 307 is connected with a screw nut 302, and the other side of the screw nut 302 penetrates through the lower supporting plate 213 to extend to the inner side of the second motor shaft 205.

As shown in fig. 4, the interface assembly 170 includes a biaxial locker 102 and an axial expansion sleeve connector 104, the axial expansion sleeve connector 104 is disposed on the lower end surface of the first connecting rod 110, the biaxial locker 102 passes through the axial expansion sleeve connector 104 and is disposed in the first connecting rod 110, the interface assembly 170 is provided with a belt pulley 101, the belt pulley 101 is disposed on a belt pulley bearing block 103, the belt pulley 101 and the belt pulley bearing block 103 are both sleeved on the periphery of the biaxial locker 102, the belt pulley bearing block 103 is disposed above the expansion sleeve connector 104, as shown in fig. 5, the expansion sleeve connector 104 includes an outer ring 141, an inner ring 142 and a bottom connecting plate 143 sequentially disposed from top to bottom, wherein the inner ring 142 is an elastic member, when assembling the rotary driving assembly 200 with the executing assembly 100, the first motor shaft 204 sequentially passes through the bottom connecting plate 143 and the inner ring 142 of the expansion sleeve connector 104, the second motor shaft 205 passes through the expansion sleeve connector 104 to reach the biaxial locking piece 102, the conical surface of the second motor shaft 205 is inserted into the conical surface of the biaxial locking piece 102 for key connection, radial screws are arranged on the upper end face of the first connecting rod 110 to lock the second motor shaft 205, meanwhile, when the outer ring 141 and the bottom connecting plate 143 are locked through screw connection, the outer ring 141 and the bottom connecting plate produce extrusion movement to the inner ring 142 through inclined planes, and then the inner ring 142 inner ring produces radial force and friction force to the first motor shaft 204, so that the effect of tightly holding the first motor shaft 204 is achieved and a certain torque is transmitted, and the power transmission between the rotary driving assembly 200 and the executing assembly 100 is completed.

In one embodiment, the axial centerlines of the interface assembly 170, the flange connection plate 303, the first rotary motor 211, the second rotary motor 212, the lift drive mounting plate 307, the linear drive assembly 300, the first motor shaft 204, and the second motor shaft 205 are all collinear.

Example 2

On the basis of embodiment 1, as shown in fig. 2 and 7, a guide rail 210 is mounted on a guide rail connecting plate 304, a slide block connecting plate 301 is disposed on the guide rail, a lifting connecting member 202 is mounted on a motor base 201 on one side of a swing driving assembly 200, and the lifting connecting member 202 is slidingly connected with the slide block connecting plate 301, so that the execution assembly can flexibly lift during lifting movement.

Other components and principles of this embodiment are the same as those of embodiment 1.

Example 3

On the basis of embodiment 2, as shown in fig. 6 and 7, a bellows connecting piece 206 is arranged on the rotary driving assembly 200, the bellows connecting piece 206 is sleeved outside the first motor shaft 204, the bellows connecting piece 206 is arranged above a bearing seat 208, the bellows connecting piece 206 is connected with a flange connecting plate 303 through a bellows 203, a shaft sealing piece 207 is further arranged between the bellows connecting piece 206 and the first motor shaft 204, and a two-shaft sealing ring 209 is further arranged between the first motor shaft 204 and the second motor shaft 205; when the rotary driving assembly 200 and the executing assembly 100 are assembled, the executing assembly 100 is in a vacuum environment, the rotary driving assembly 200 is in an atmosphere environment, the two components are required to be sealed and isolated after being connected, a two-shaft sealing ring 209 is arranged between the first motor shaft 204 and the second motor shaft 205, dynamic sealing can be realized under the condition that the two shafts relatively rotate, a shaft sealing piece 207 is arranged in the corrugated pipe connecting piece 206, static sealing is realized by tightly attaching the outer annular surface of the shaft sealing piece 207 and the corrugated pipe connecting piece 206, and dynamic sealing contact is realized by the inner annular surface of the shaft sealing piece 207 and the rotating first motor shaft 204.

In one embodiment, the axial centerlines of the interface assembly 170, the flange connection plate 303, the bellows 203, the bellows connection 206, the first rotary motor 211, the second rotary motor 212, the lift drive mounting plate 307, the linear drive assembly 300, the first motor shaft 204, the second motor shaft 205, the primary shaft seal 207, and the secondary shaft seal ring 209 are all collinear.

Other components and principles of this embodiment are the same as those of embodiment 2.

The working principle of the application is as follows: the rotary driving assembly 200 and the executing assembly 100 are in quick sealing assembly connection through the interface assembly 170, the rotary driving assembly 200 drives the first connecting rod 110 to rotate through the first rotating motor 211, the third connecting rod 130 is driven to rotate in proportion with the second connecting rod 120 through the second rotating motor 212, and the linear driving assembly 300 is connected with the rotary driving assembly 200 through the screw nut 302 and is used for driving the rotary driving assembly 200 to perform lifting motion and indirectly driving the executing assembly 100 to achieve lifting motion.

The foregoing description is only a preferred embodiment of the present application, and the present application is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present application has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A wafer transfer robot of modular design, comprising an execution assembly (100), a swing drive assembly (200) and a linear drive assembly (300);

the actuating assembly (100) is provided with an interface assembly (170) for being connected with the rotary driving assembly (200), and the linear driving assembly (300) comprises flange connecting plates (303) and lifting driving mounting plates (305) which are respectively arranged at two ends of a guide rail connecting plate (304); the rotary driving assembly (200) is arranged between the flange connecting plate (303) and the lifting driving mounting plate (305), and an output shaft of the rotary driving assembly (200) penetrates through the flange connecting plate (303) to be connected with the interface assembly (170) on the executing assembly (100) and is used for driving the executing assembly (100) to rotate; the linear driving assembly (300) is arranged in an inner cavity below the lifting driving mounting plate (305), the output end of the linear driving assembly (300) penetrates through the lifting driving mounting plate (305) to be connected with the rotary driving assembly (200) and used for driving the rotary driving assembly (200) to perform lifting movement between the flange connecting plate (303) and the lifting driving mounting plate (305), and the inner cavity below the lifting driving mounting plate (305) is also provided with the control assembly (309).

2. The modularly designed wafer transfer robot of claim 1, wherein: the execution assembly (100) comprises a first connecting rod (110), a second connecting rod (120) and a third connecting rod (130) which are sequentially connected, a belt wheel transmission mechanism is arranged between the first connecting rod (110) and the second connecting rod (120), and a belt wheel transmission mechanism is arranged between the second connecting rod (120) and the third connecting rod (130).

3. The modularly designed wafer transfer robot of claim 1, wherein: the lifting device is characterized in that a guide rail (210) is arranged on the guide rail connecting plate (304), a slide block connecting plate (301) is arranged on the guide rail, a lifting connecting piece (202) is arranged on a motor base (201) on one side of the rotary driving assembly (200), and the lifting connecting piece (202) is in sliding connection with the slide block connecting plate (301).

4. A modularly designed wafer transfer robot according to claim 2, wherein: the interface assembly (170) comprises a biaxial locking piece (102) and an axial expansion sleeve connector (104), the axial expansion sleeve connector (104) is arranged on the lower end face of the first connecting rod (110), and the biaxial locking piece (102) penetrates through the axial expansion sleeve connector (104) and penetrates into the first connecting rod (110).

5. A modularly designed wafer transfer robot according to claim 4, wherein: the interface assembly (170) is further provided with a belt wheel (101), the belt wheel (101) is arranged on a belt wheel bearing seat (103), the belt wheel (101) and the belt wheel bearing seat (103) are sleeved on the periphery of the biaxial locking piece (102), and the belt wheel bearing seat (103) is arranged above the expansion sleeve connector (104); the slewing drive assembly (200) comprises a first rotating motor (211) and a second rotating motor (212), wherein the first rotating motor (211) is arranged above the second rotating motor (212), and a first motor shaft (204) of the first rotating motor (211) is sleeved on the outer side of a second motor shaft (205) of the second rotating motor (212) and is coaxially arranged with the second motor shaft (205); the upper end of the first motor shaft (204) penetrates through the flange connecting plate (303) to be connected with the first connecting rod (110) and used for driving the first connecting rod (110) to rotate independently around the first rotating shaft (140), the lower end of the first motor shaft (204) is connected with the output end of the first rotating motor (211), the upper end of the second motor shaft (205) penetrates through the flange connecting plate (303) to be connected with the belt wheel (101) and used for driving the second connecting rod (120) to rotate around the second rotating shaft (150) and the third connecting rod (130) to rotate around the third rotating shaft (160), and the lower end of the second motor shaft (205) is connected with the output end of the second rotating motor (212).

6. The modularly designed wafer transfer robot of claim 5, wherein: a two-shaft sealing ring (209) is further arranged between the first motor shaft (204) and the second motor shaft (205).

7. The modularly designed wafer transfer robot of claim 6, wherein: the rotary driving assembly (200) is provided with a corrugated pipe connecting piece (206), the corrugated pipe connecting piece (206) is sleeved on the outer side of the first motor shaft (204), the corrugated pipe connecting piece (206) is connected with the flange connecting plate (303) through a corrugated pipe (203), and a shaft sealing piece (207) is further arranged between the corrugated pipe connecting piece (206) and the first motor shaft (204).

8. The modularly designed wafer transfer robot of claim 5, wherein: the linear driving assembly (300) comprises a lifting motor (308), a lifting motor bracket (306) is arranged below the lifting driving mounting plate (305), the lifting motor (308) is mounted on the lifting motor bracket (306), the output end of the lifting motor (308) is connected with a lifting motor coupler (307), the lifting motor coupler (307) is connected with a screw nut (302), and the other side of the screw nut (302) extends to the inner side of the second motor shaft (205).

9. The modularly designed wafer transfer robot of claim 5, wherein: the first rotary motor (211) and the second rotary motor (212) are respectively provided with encoders for reading the rotation angles of the motors, and the encoders are electrically connected with the control assembly (309).

10. The modularly designed wafer transfer robot of claim 5, wherein: the axial center lines of the interface assembly (170), the flange connecting plate (303), the corrugated pipe (203), the first rotating motor (211), the second rotating motor (212), the lifting drive mounting plate (307), the linear drive assembly (300), the first motor shaft (204) and the second motor shaft (205) are all collinear.