CN116719044B - Frequency modulation continuous wave laser radar - Google Patents
Frequency modulation continuous wave laser radar Download PDFInfo
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- CN116719044B CN116719044B CN202311001560.4A CN202311001560A CN116719044B CN 116719044 B CN116719044 B CN 116719044B CN 202311001560 A CN202311001560 A CN 202311001560A CN 116719044 B CN116719044 B CN 116719044B
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- 238000001514 detection method Methods 0.000 claims abstract description 92
- 238000007493 shaping process Methods 0.000 claims abstract description 72
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 45
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 45
- 239000010703 silicon Substances 0.000 claims abstract description 45
- 230000035559 beat frequency Effects 0.000 claims abstract description 29
- 238000012545 processing Methods 0.000 claims abstract description 21
- 230000010287 polarization Effects 0.000 claims description 67
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- 230000008878 coupling Effects 0.000 claims description 18
- 238000010168 coupling process Methods 0.000 claims description 18
- 238000005859 coupling reaction Methods 0.000 claims description 18
- 238000005253 cladding Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 12
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- 238000000465 moulding Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/50—Systems of measurement based on relative movement of target
- G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/4802—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using analysis of echo signal for target characterisation; Target signature; Target cross-section
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/4808—Evaluating distance, position or velocity data
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
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- Electromagnetism (AREA)
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- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
The application discloses a frequency modulation continuous wave laser radar, which comprises: the light engine comprises a light source module, a silicon optical chip and a TIA module which are packaged in the shell; the light guide and shaping module is connected with the silicon optical chip and is used for transmitting and guiding emergent light and return light and shaping light beams; the driving module is connected with the light source module, the silicon optical chip and the light guiding and shaping module and provides driving signals for the light source module, the silicon optical chip and the light guiding and shaping module; and the signal processing module is connected with the TIA module and is used for processing the beat frequency voltage signal amplified by the TIA module to obtain the distance and speed information of the target object. On the premise of not increasing the resource consumption additionally, the application improves the echo light receiving efficiency, reduces the influence of the walk-off effect on the detection distance of the laser radar, improves the detection distance and improves the utilization efficiency of the light source power.
Description
Technical Field
The application relates to the technical field of laser radars, in particular to a frequency modulation continuous wave laser radar.
Background
LiDAR (Laser detection and ranging, liDAR) is a remote sensing technology that utilizes laser light for target detection. Compared with the microwave radar, the laser radar has shorter emission signal wavelength and is positioned in an optical frequency band, so that the laser radar has better directivity and spatial resolution.
The detection mechanisms of the laser radar mainly comprise two types: incoherent detection and coherent detection. Incoherent detection belongs to direct detection, and the information such as the distance, reflectivity and the like of a reflector is analyzed by directly detecting the intensity of an echo signal. The coherent detection belongs to indirect detection, and utilizes heterodyne, internal difference or homodyne detection methods to obtain the frequency or phase difference of an echo signal and a local oscillation signal, and thus the information such as the distance, the reflectivity and the instantaneous speed of a reflector can be analyzed. Frequency modulated continuous wave (frequency modulated continuous waye, FMCW) lidar is a coherent detection type lidar that can operate at lower transmit power than TOF due to its inherent high sensitivity characteristics, and the doppler information contained in the difference frequency information also provides it with instantaneous velocity measurement capability.
One of the difficulties faced by fm continuous wave lidar is the walk-off effect, i.e. the scanning component continues to operate during the time of flight, resulting in an offset between the echo path of the echo light and the emission path of the emitted light, and the offset being related to the scanning speed of the scanning component and the distance between the object to be measured and the emission point, which results in a low receiving efficiency of the echo light, which in turn results in a limited detection distance.
The problem of walk-off effect is solved, and increasing the emitted light power is the simplest mode, but the mode has high requirements on the light emitting of a laser and the amplification of an optical amplifier, and power consumption and cost are increased. The scheme of multi-waveguide receiving can ensure the receiving efficiency of the echo light to the greatest extent, but the increase of the number of receiving channels greatly increases the hardware resource consumption and the signal processing difficulty of the rear end.
Disclosure of Invention
In order to solve at least one technical problem in the prior art, the application provides a frequency modulation continuous wave laser radar.
In order to achieve the aim of the application, the application adopts the following technical scheme: a frequency modulated continuous wave lidar comprising:
the optical engine comprises a light source module, a silicon optical chip and a TIA module which are packaged in a shell, the silicon optical chip is integrated with a signal receiving and transmitting module, the silicon optical chip comprises a spot-molding converter, a light splitting module, a receiving and transmitting detection module and a nonlinear calibration module, the spot-molding converter is respectively connected with the light source module and the light splitting module, the receiving and transmitting detection module is respectively connected with the light splitting module, the TIA module and the light guiding and shaping module, the nonlinear calibration module is connected with the light splitting module and the TIA module, the nonlinear calibration module is used for calibrating the frequency modulation nonlinearity of the light source, the light splitting module is used for dividing the light energy which is coupled into the silicon optical chip through the spot-molding converter into n+1 parts, wherein the N parts of light energy enters the receiving and transmitting detection module, the method comprises the steps that one part of light energy enters a nonlinear calibration module, the receiving and transmitting detection module is composed of N receiving and transmitting detection units, N is larger than or equal to 1, the receiving and transmitting detection units comprise an antenna, a mixer, a balance detector and a coupler, long-delay light and short-delay light in the receiving and transmitting detection module, the long-delay light and the short-delay light in the nonlinear calibration module enter the balance detector to perform heterodyne detection after being mixed by the mixer, the antenna adopts a grating antenna, the silicon optical chip comprises a substrate, an oxygen burying layer, a second waveguide layer, a second cladding layer, a first waveguide layer and a first cladding layer which are sequentially stacked from bottom to top, the antenna is arranged in the first waveguide layer, the coupler is arranged in the second waveguide layer, and the coupler utilizes back diffracted light of the grating antenna as light;
the light guide and shaping module is connected with the silicon optical chip and is used for transmitting and guiding emergent light and return light and shaping light beams;
the driving module is connected with the light source module, the silicon optical chip and the light guiding and shaping module and provides driving signals for the light source module, the silicon optical chip and the light guiding and shaping module;
and the signal processing module is connected with the TIA module and is used for processing the beat frequency voltage signal amplified by the TIA module to obtain the distance and speed information of the target object.
Further, the light source module comprises a laser and an amplifier;
the laser is a narrow linewidth laser;
the amplifier is an erbium-doped fiber amplifier or a semiconductor optical amplifier.
Further, the spot-size converter is respectively connected with the light source module and the light splitting module, and is used for coupling the light source module and the silicon optical chip.
Further, the light splitting module is composed of a plurality of light splitters.
Further, the transceiving detection unit comprises an antenna, a mixer and a balance detector;
the antenna adopts a grating antenna.
Further, the antenna comprises a transmitting antenna and a receiving antenna;
the receiving antenna is connected with the light guide and shaping module and the mixer, the mixer is connected with the coupler and the balance detector, and the balance detector is connected with the TIA module.
Further, the antenna comprises a transmitting antenna, a receiving antenna x and a receiving antenna y;
the mixer comprises a mixer x and a mixer y;
the balance detector comprises a balance detector x and a balance detector y;
the receiving and transmitting detection unit further comprises a coupler, an equipartition device and a polarization rotator, wherein the transmitting antenna is respectively connected with the light splitting module, the light guiding and shaping module and the coupler, the equipartition device is respectively connected with the coupler, the mixer x and the mixer y, the receiving antenna x is respectively connected with the light guiding and shaping module and the mixer x, the receiving antenna y is respectively connected with the light guiding and shaping module and the polarization rotator, the polarization rotator is also connected with the mixer y, the balance detector x is respectively connected with the mixer x and the TIA module, and the balance detector y is respectively connected with the mixer y and the TIA module.
Further, the antenna is a receiving and transmitting antenna;
the receiving and transmitting detection unit further comprises a 2x2 light splitter and a coupler, the 2x2 light splitter is respectively connected with the light splitting module, the frequency mixer and the receiving and transmitting antenna, the receiving and transmitting antenna is further connected with the light guiding and shaping module and the coupler, the coupler is further connected with the frequency mixer, and the balance detector is respectively connected with the frequency mixer and the TIA module.
Further, the antenna comprises a receiving antenna and a transmitting antenna;
the mixer comprises a mixer x and a mixer y;
the balance detector comprises a balance detector x and a balance detector y;
the receiving and transmitting detection unit further comprises a 2x2 light splitter, a coupler and a polarization rotator, wherein the 2x2 light splitter is connected with the light splitting module, the frequency mixer x and the receiving and transmitting antenna respectively, the receiving antenna is connected with the light guiding and shaping module and the polarization rotator respectively, the frequency mixer y is connected with the coupler, the polarization rotator and the balance detector y respectively, the balance detector y is connected with the TIA module respectively, and the balance detector x is connected with the frequency mixer x and the TIA module respectively.
Further, the nonlinear calibration module is connected with the light splitting module and the TIA module and is used for calibrating the frequency modulation nonlinearity of the light source;
the nonlinear calibration module comprises an optical splitter, a waveguide delay line, a mixer and a balance detector.
Further, the light guiding and shaping module is used for transmitting, guiding and beam shaping of emergent light and return light, and is selected from one or more of a circulator, a dimming mirror group, a beam scanning module, a polarization beam splitter and a reflecting mirror.
Due to the application of the technical scheme, compared with the prior art, the application has the following advantages:
on the premise of not increasing the resource consumption additionally, the application improves the echo light receiving efficiency, reduces the influence of the walk-off effect on the detection distance of the laser radar, improves the detection distance and improves the utilization efficiency of the light source power.
Drawings
FIG. 1 is a block diagram of a connection of a frequency modulated continuous wave lidar according to a first embodiment;
FIG. 2 is a block diagram showing the connection of a nonlinear calibration module according to the first embodiment;
FIG. 3 is a data diagram of additional coupling loss due to offset of a grating type antenna and an end-face coupled type antenna;
FIG. 4 is a block diagram of a frequency modulated continuous wave lidar according to the second embodiment;
FIG. 5 is a diagram showing the structure of an antenna and a coupler in a silicon optical chip according to a second embodiment;
FIG. 6 is a block diagram showing a connection of a frequency modulated continuous wave laser radar according to a third embodiment;
fig. 7 is a structural arrangement of an antenna and a coupler in the light of a silicon optical chip and an optical path diagram in the third embodiment;
FIG. 8 is a block diagram showing a connection of a frequency modulated continuous wave laser radar according to a fourth embodiment;
fig. 9 is a structural arrangement of an antenna and a coupler in the light of a silicon optical chip and an optical path diagram in the fourth embodiment;
FIG. 10 is a block diagram of a frequency modulated continuous wave lidar according to a fifth embodiment;
fig. 11 is a structural arrangement of an antenna and a coupler in the light of a silicon optical chip and an optical path diagram in the fifth embodiment;
FIG. 12 is a block diagram showing a connection of a frequency modulated continuous wave laser radar according to a sixth embodiment;
fig. 13 is an arrangement of an antenna and a coupler in the light of a silicon optical chip and an optical path diagram in the sixth embodiment.
Detailed Description
In order that the above objects, features and advantages of the application will be more clearly understood, a more particular description of the application will be rendered by reference to the appended drawings and detailed description thereof, which are simplified schematic drawings which illustrate only the basic structure of the application and therefore show only those features which are relevant to the application, it being noted that embodiments of the application and features of the embodiments may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, but the present application may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited to the specific embodiments disclosed below.
Example 1
Referring to fig. 1 and 2, the application provides a frequency modulation continuous wave laser radar, which comprises an optical engine, a light guiding and shaping module, a driving module and a signal processing module, wherein the optical engine comprises a light source module, a silicon optical chip and a TIA module which are packaged in a shell, the light guiding and shaping module is connected with the silicon optical chip and used for transmitting and guiding emergent light and back wave light and shaping light beams, the driving module is respectively connected with the light source module, the silicon optical chip and the light guiding and shaping module and used for respectively providing working driving signals for the light source module, the silicon optical chip and the light guiding and shaping module, and the signal processing module is connected with the TIA module and used for processing beat frequency voltage signals amplified by the TIA module so as to obtain distance and speed information of a target object.
The light source module is used for providing a coherent frequency modulation signal, and the coherent frequency modulation signal can be output by an optical fiber or coupled by a lens.
The light source module includes a laser and an amplifier.
Preferably, the laser is a narrow linewidth laser; the amplifier is an erbium doped fiber amplifier (Erbium Doped Fiber Amplifier, EDFA) or a semiconductor optical amplifier (Semiconductor Optical Amplifier, SOA).
The silicon optical chip is integrated with the signal receiving and transmitting function and comprises a spot-size converter, a light splitting module, a receiving and transmitting detection module and a nonlinear calibration module.
The spot-size converter is respectively connected with the light source module and the light splitting module and is used for coupling the light source module and the silicon optical chip.
The light splitting module is used for dividing the light energy coupled into the silicon optical chip through the spot-size converter into N+1 parts, wherein N parts of light energy enter the receiving-transmitting detection module, and one part of light energy enters the nonlinear calibration module, and N is more than or equal to 1. And the beam splitting proportion is optimally designed according to the indexes such as the target ranging distance, the scanning frequency of the beam scanning module and the like. The beam splitting module consists of a plurality of beam splitters.
The receiving and transmitting detection module is connected with the light splitting module, the TIA module and the light guiding and shaping module and is used for emitting light beams, receiving light beams and detecting, the receiving and transmitting detection module is composed of N receiving and transmitting detection units, N is more than or equal to 1, and N is determined by parameters such as the angular resolution, the point frequency and the like of the laser radar complete machine.
The receiving and transmitting detection unit comprises an antenna, and the antenna adopts a grating antenna.
Compared with an end-face coupling type antenna, the grating type antenna has larger alignment tolerance, has forward effect on reducing the influence of walk-off effect on receiving efficiency, and can also utilize the back diffraction light of the grating as local oscillation light, so that the light power utilization rate is improved.
The data of the extra coupling loss caused by the shift of the fiber mode when the conventional end-face coupler and the grating coupler are coupled with the mode of the standard single-mode fiber is shown in fig. 3. In the figure, the offset is 0um, that is, the two couplers and the optical fiber mode are coupled to the optimal state, and the additional coupling loss is the difference between the coupling efficiency when the offset occurs and the coupling efficiency in the optimal state. Taking-1 dB extra loss as an example, the offset of the end face coupler and the grating coupler is about 1um and 5um, namely the optical fiber mode of the grating coupler is offset within the range of +/-2.5 um of the optimal state, and the extra loss is smaller than 1dB, in contrast, the optical fiber mode of the end face coupler can only be offset within the range of +/-0.5 um of the optimal state to ensure that the extra loss is smaller than 1 dB. Therefore, the grating coupler has better alignment tolerance than the end face coupler, and the characteristic has very good forward effect on reducing the influence of the walk-off effect on the receiving efficiency in the frequency modulation continuous wave laser radar.
The receiving and transmitting detection unit further comprises a mixer, wherein the mixer is used for mixing the echo light and the local oscillation light with a certain phase difference, and the phase difference between the echo light and the local oscillation light can be 90 degrees or 180 degrees.
The receiving and transmitting detection unit also comprises a balance detector, and the long-delay light and the short-delay light in the echo light and the local oscillation light or the nonlinear calibration module in the receiving and transmitting detection unit enter the balance detector to perform heterodyne detection after being mixed by the mixer. The nonlinear calibration module is connected with the light splitting module and the TIA module and is used for calibrating the frequency modulation nonlinearity of the light source so as to improve the linearity of the frequency modulation curve and the detection distance precision of the laser radar whole machine. The nonlinear calibration module comprises an optical splitter, a waveguide delay line, a mixer and a balance detector.
The TIA module is used for converting the beat current signal output by the balance detector into an amplified voltage signal. The TIA module consists of N+1 TIA units, wherein N TIA units are used for receiving and transmitting the detection module, and 1 TIA unit is used for the nonlinear calibration module.
The light guiding and shaping module is used for transmitting and guiding emergent light and return light and shaping light beams, and is selected from one or more of a circulator, a dimming mirror group, a light beam scanning module, a polarization beam splitter and a reflecting mirror.
The circulator is used for guiding the emergent light emitted from the transmitting antenna to the dimming lens group, and guiding the return light fed back by the dimming lens group out of the return port and guiding the return light to the receiving antenna through reflection of the reflecting mirror. Preferably, the circulator is a large caliber spatial light circulator.
The light-adjusting lens group is used for carrying out beam expansion collimation on emergent light emitted by the circulator and then transmitting the emergent light to the light beam scanning module so as to improve the directivity of light beams; the light-adjusting lens group is also used for converging and focusing the echo light reflected by the light beam scanning module and then directing the echo light to the circulator so as to improve the receiving efficiency of the echo light.
The light beam scanning module is used for receiving the emergent light after the beam expansion and collimation of the dimming lens group, projecting the emergent light to the target object, receiving the echo light reflected by the target object, and projecting the echo light to the dimming lens group for beam contraction and focusing. The light beam scanning module may be a swing mirror, a rotating mirror, a MEMS micro-vibration mirror, or the like, or a combination of the above.
Due to depolarization effect of the target object, the echo light contains two orthogonal polarization states of x and y, wherein the x polarization state is consistent with the local oscillation light, and the y polarization state is orthogonal with the local oscillation light. The polarization beam splitter is applied to a polarization diversity detection system and is used for dividing echo light into the x polarization state and the y polarization state and then respectively detecting the two polarization states.
The reflector is used for reflecting the return wave light so as to improve the receiving efficiency of the receiving antenna. In order to further ensure the receiving efficiency of the receiving antenna, the reflecting mirror can be provided with an angle-adjustable motor, and echo lights of different distances from the target objects adopt different reflecting angles.
The detection process of the application is as follows:
the frequency modulation light emitted by the light source module is coupled by the spot-size converter and then enters the silicon optical chip, the light splitting module is divided into N+1 paths, wherein N paths respectively enter N receiving and transmitting detection units, and 1 path enters the nonlinear calibration module. The outgoing light led out by the N receiving and transmitting detection units enters the light guiding and shaping module and then is emitted to the target object. The echo light of the target is transmitted back to the light guiding and shaping module and is received by N receiving antennas in the receiving and transmitting detection module, N paths of beat frequency photocurrent signals are output through coherent detection of the received N paths of echo light and N paths of local oscillation light in the receiving and transmitting detection module, the N paths of beat frequency photocurrent signals are converted into amplified beat frequency voltage signals through the TIA module, and the signal processing module performs signal processing on the amplified beat frequency voltage signals, so that speed and distance information of the target can be obtained.
Example two
Referring to fig. 4 and 5, in the first embodiment, the antenna includes a transmitting antenna and a receiving antenna, which are both grating antennas. Preferably, the transmitting antenna and the receiving antenna may employ an apodization grating to improve the receiving efficiency of the return light.
The receiving and transmitting detection unit further comprises a coupler, wherein the transmitting antenna is respectively connected with the light splitting module, the light guiding and shaping module and the coupler, the receiving antenna is respectively connected with the light guiding and shaping module and the mixer, the mixer is further connected with the coupler and the balance detector, and the balance detector is connected with the TIA module.
The light split by the light source module is transmitted to the light guide and shaping module through the transmitting antenna, part of the light is transmitted to the light guide and shaping module to form emergent light, and part of the emergent light is coupled into the waveguide in a mode of back diffraction light by the coupler to form local oscillation light. The echo light reflected by the target object is received by the receiving antenna, mixed with the local oscillation light by the mixer, enters the balance detector and outputs beat frequency photocurrent signals. The echo light includes not only a polarization component coincident with the outgoing light but also a polarization component partially orthogonal to the outgoing light due to the depolarization effect, and the former has a not small duty ratio. The embodiment adopts a single polarization receiving mode, namely only receives the part of the echo light with the same polarization direction as the emergent light.
The silicon optical chip comprises a substrate, an oxygen burying layer, a second waveguide layer, a second cladding layer, a first waveguide layer and a first cladding layer which are sequentially laminated from bottom to top, wherein a transmitting antenna and a receiving antenna are arranged in the first waveguide layer, and a coupler is arranged in the second waveguide layer.
Due to the inherent structural symmetry of the grating-type transmitting antenna, the beam is diffracted off-chip and has a diffraction component directed toward the bottom. The coupler is used for coupling the diffraction component towards the substrate into the waveguide and treating the light entering the waveguide as local oscillation light necessary for coherent detection. The coupler ensures that local oscillation light does not need to be split before the antenna, and inherent diffraction loss of the grating antenna is converted into the local oscillation light to be utilized, thereby improving the use efficiency of optical power.
Preferably, the coupler is an apodization grating coupler, and the apodization grating coupler can improve the coupling efficiency of the back diffraction light of the transmitting antenna and increase the local oscillation optical power.
The light guide and shaping module comprises a circulator, a light adjusting lens group, a light beam scanning module and a reflecting mirror, wherein the circulator is respectively connected with the transmitting antenna, the receiving antenna and the light adjusting lens group, the light adjusting lens group is connected with the light beam scanning module, and the reflecting mirror is arranged between the circulator and the receiving antenna and used for changing the path of the echo light. The emergent light enters the light inlet of the circulator, is led out from the light outlet, is shaped by the light adjusting lens group, is guided to the light beam scanning module, and finally is emitted to a distant target object. The reflected light reflected by the target returns to the original path, enters the circulator after being condensed and focused by the light adjusting lens group, is led out from the echo port of the circulator, and then enters the receiving antenna after being reflected by the reflecting mirror.
The detection process of the frequency modulation continuous wave laser radar of the embodiment is as follows:
the frequency modulation light emitted by the light source module is coupled into the silicon optical chip through the spot-size converter, and is divided into N+1 paths through the light splitting module, wherein the N paths respectively enter N receiving and transmitting detection units, and the 1 paths enter the nonlinear calibration module. The outgoing light led out by the N receiving and transmitting detection units enters the light guiding and shaping module and then is emitted to the target object. The echo light of the target is transmitted back to the light guiding and shaping module and is received by N receiving antennas in the receiving and transmitting detection module, the received N paths of echo light and N paths of local oscillation light in the receiving and transmitting detection module are coherently detected to output N paths of beat frequency photocurrent signals, the N paths of beat frequency photocurrent signals are converted into amplified beat frequency voltage signals through the TIA module, and the voltage signals are subjected to signal processing, so that the speed and distance information of the target can be obtained.
The echo light includes not only a polarization component coincident with the outgoing light but also a polarization component partially orthogonal to the outgoing light due to the depolarization effect, and the former has a not small duty ratio.
The embodiment adopts a single polarization receiving mode, namely only receives the part of the echo light with the same polarization direction as the emergent light.
Example III
Referring to fig. 6 and 7, in the first embodiment, the antenna includes a transmitting antenna, a receiving antenna x, and a receiving antenna y, wherein the transmitting antenna, the receiving antenna x, and the receiving antenna y are all grating antennas. Preferably, the receiving antenna x and the receiving antenna y may use an apodization grating to improve the receiving efficiency of the echo light.
The mixer comprises a mixer x and a mixer y;
the balance detector comprises a balance detector x and a balance detector y;
the receiving and transmitting detection unit further comprises a coupler, an equipartition device and a polarization rotator, wherein the transmitting antenna is respectively connected with the light splitting module, the light guiding and shaping module and the coupler, the equipartition device is respectively connected with the coupler, the frequency mixer x and the frequency mixer y, the receiving antenna x is respectively connected with the light guiding and shaping module and the frequency mixer x, the receiving antenna y is respectively connected with the light guiding and shaping module and the polarization rotator, the polarization rotator is further connected with the frequency mixer y, the balance detector x is respectively connected with the frequency mixer x and the TIA module, and the balance detector y is respectively connected with the frequency mixer y and the TIA module.
The polarization rotator is used for rotating the echo light y into the same polarization state as the local oscillation light, so that the back-end mixer works normally.
The light split by the light source module passes through the transmitting antenna, part of the light is transmitted to the light guiding and shaping module to form emergent light, and part of the emergent light is coupled by the coupler in a mode of back diffraction light and is equally divided by the equally dividing device to form local oscillation light x and local oscillation light y. The echo light reflected by the target object is divided into two orthogonal polarization states of echo light x and echo light y by a polarization beam splitter in a light guide and shaping module, the two orthogonal polarization states of the echo light x and the echo light y are respectively received by a receiving antenna x and a receiving antenna y, and then the two orthogonal polarization states of the echo light x and the echo light y are mixed with the local oscillation light x and the local oscillation light y through a mixer x and a mixer y respectively, and then enter a balanced detector y of a balanced deep detector x and a balanced detector y to output two beat frequency photocurrent signals. Since the polarization of the echo light y is orthogonal to that of the local oscillation light y, the echo light y needs to be rotated to the same polarization state as the local oscillation light y by using a polarization rotator.
The silicon optical chip comprises a substrate, an oxygen-buried layer, a second waveguide layer, a second cladding layer, a first waveguide layer and a first cladding layer which are sequentially laminated from bottom to top. The transmitting antenna, the receiving antenna x and the receiving antenna y are all arranged in the first waveguide layer, and the coupler is arranged in the second waveguide layer.
Due to the inherent structural symmetry of the grating-type transmitting antenna, the beam is diffracted off-chip and has a diffraction component directed toward the bottom. The coupler is used for coupling the diffraction component towards the substrate into the waveguide and treating the light entering the waveguide as local oscillation light necessary for coherent detection. The coupler ensures that local oscillation light does not need to be split before the antenna, and inherent diffraction loss of the grating antenna is converted into the local oscillation light to be utilized, thereby improving the use efficiency of optical power.
Preferably, the coupler is an apodization grating coupler, and the apodization grating coupler can improve the coupling efficiency of the back diffraction light of the transmitting antenna and increase the local oscillation optical power.
The light guiding and shaping module comprises a circulator, a light adjusting lens group, a light beam scanning module, a polarization beam splitter, a reflecting mirror x and a reflecting mirror y. The circulator is respectively connected with the transmitting antenna, the polarizing beam splitter and the dimming lens group, the dimming lens group is connected with the light beam scanning module, the polarizing beam splitter is respectively connected with the receiving antenna x and the receiving antenna y, the reflecting mirror x is arranged between the polarizing beam splitter and the receiving antenna x, and the reflecting mirror y is arranged between the polarizing beam splitter and the receiving antenna y.
The emergent light enters the light inlet of the circulator, is led out from the light outlet, is shaped by the light adjusting lens group, is guided to the light beam scanning module, and finally is emitted to a distant target object. The reflected light reflected by the target returns to the original path, enters the circulator after being condensed and focused by the light adjusting lens group, is guided out from the echo port of the circulator, is divided into polarized orthogonal echo light x and echo light y by the polarization beam splitter, and is finally guided to the receiving antenna by the reflecting mirror x and the reflecting mirror y respectively.
The detection process of the frequency modulation continuous wave laser radar of the embodiment is as follows:
the frequency modulation light emitted by the light source module is coupled into the silicon optical chip through the spot-size converter, and is divided into N+1 paths through the light splitting module, wherein the N paths respectively enter N receiving and transmitting detection units, and the 1 paths enter the nonlinear calibration module. The outgoing light led out by the N receiving and transmitting detection units enters the light guiding and shaping module and then is emitted to the target object. The echo light of the target is transmitted back to the light guiding and shaping module and is received by 2N receiving antennas in the receiving and transmitting detection module, the received 2N loop light and 2N path local oscillation light in the receiving and transmitting detection module are coherently detected to output 2N paths of beat frequency photocurrent signals, the beat frequency photocurrent signals are converted into amplified beat frequency voltage signals through the TIA module, and the voltage signals are subjected to signal processing, so that the speed and distance information of the target can be obtained.
In this embodiment, a polarization diversity mode is adopted, that is, two orthogonal polarization states in the echo light are separately received, and are subjected to aggregation processing in a signal processing module.
Example IV
Referring to fig. 8 and 9, in the first embodiment, a transceiver antenna is used as the antenna. The receiving and transmitting antenna is a receiving and transmitting same-way antenna and is used for radiating on-chip light to the outside of the chip and also used for coupling off-chip echo light into the chip. The receiving and transmitting antenna adopts a grating type antenna, and the grating type receiving and transmitting antenna can reduce the influence of the walk-off effect on the receiving efficiency and improve the echo light receiving efficiency. Preferably, the transceiver antenna can use an apodization grating to further improve the receiving efficiency of the echo light.
The receiving and transmitting detection unit further comprises a 2x2 light splitter, the 2x2 light splitter is respectively connected with the light splitting module, the frequency mixer and the receiving and transmitting antenna, the receiving and transmitting antenna is further connected with the light guiding and shaping module, and the balance detector is respectively connected with the frequency mixer and the TIA module.
The light split by the light source module is split into two paths by a 2x2 beam splitter, wherein one path of the light is radiated outwards through a receiving and transmitting antenna, and the other path of the light is used as local oscillation light. The emergent light is emitted to the target object through the light guide and shaping module, and the echo light reflected by the target object is received by the receiving and transmitting antenna. The back wave light split by the 2x2 beam splitter mixes with the local oscillation light through the mixer, then enters the balance detector, and outputs beat frequency photocurrent signals.
The silicon optical chip comprises a substrate, an oxygen-buried layer, a second waveguide layer, a second cladding layer, a first waveguide layer and a first cladding layer which are sequentially laminated from bottom to top. The transmitting and receiving antenna is provided with a first waveguide layer, and emergent light of the transmitting and receiving antenna is coaxial with echo light and opposite in direction.
The light guide and shaping module comprises a dimming lens group and a light beam scanning module, and the dimming lens group is respectively connected with the receiving and transmitting antenna and the light beam scanning module.
The emergent light is shaped by the light-adjusting lens group and then guided to the light beam scanning module, and then is emitted to a distant target object. The reflected light reflected by the target returns to the original path, and enters the receiving and transmitting antenna after being condensed and focused by the light adjusting lens group.
The detection process of the frequency modulation continuous wave laser radar of the embodiment is as follows:
the frequency modulation light emitted by the light source module is coupled into the silicon optical chip through the spot-size converter, and is divided into N+1 paths through the light splitting module, wherein the N paths respectively enter N receiving and transmitting detection units, and the 1 paths enter the nonlinear calibration module. The outgoing light led out by the N receiving and transmitting detection units enters the light guiding and shaping module and then is emitted to the target object. The echo light of the target is transmitted back to the light guiding and shaping module and is received by N receiving and transmitting antennas in the receiving and transmitting detection module, the received N paths of echo light and N paths of local oscillation light in the receiving and transmitting detection module are coherently detected to output N paths of beat frequency photocurrent signals, the N paths of beat frequency photocurrent signals are converted into amplified beat frequency voltage signals through the TIA module, and the voltage signals are subjected to signal processing, so that the speed and distance information of the target can be obtained.
It should be noted that, the transmitting and receiving are coaxial in this embodiment, that is, the antenna is used for receiving while transmitting.
The embodiment adopts a single polarization receiving mode, namely only receives the part of the echo light with the same polarization direction as the emergent light.
Example five
Referring to fig. 10 and 11, in the first embodiment, a transceiver antenna is used as an antenna. The receiving and transmitting antenna is a receiving and transmitting same-way antenna and is used for radiating on-chip light to the outside of the chip and also used for coupling off-chip echo light into the chip. The receiving and transmitting antenna adopts a grating type antenna, the grating type receiving and transmitting antenna can improve the light power utilization efficiency of a light source, reduce the influence of the walk-off effect on the receiving efficiency, and improve the echo light receiving efficiency. Preferably, the transceiver antenna can use an apodization grating to further improve the receiving efficiency of the echo light.
The receiving and transmitting detection unit further comprises a 2x2 light splitter and a coupler, the 2x2 light splitter is respectively connected with the light splitting module, the frequency mixer and the receiving and transmitting antenna, the receiving and transmitting antenna is further connected with the light guiding and shaping module and the coupler, the coupler is further connected with the frequency mixer, and the balance detector is respectively connected with the frequency mixer and the TIA module.
The light split by the light source module is split into two paths by a 2x2 beam splitter, wherein one path of the light is radiated outwards through a receiving and transmitting antenna, and the other path of the light has no special purpose. The receiving and transmitting antenna radiates emergent light outwards, and part of energy is coupled into the waveguide in a mode of back diffraction light to serve as local oscillation light. The emergent light is emitted to the target object through the light guide and shaping module, and the echo light reflected by the target object is received by the receiving and transmitting antenna. The back wave light split by the 2x2 beam splitter mixes with the local oscillation light through the mixer, then enters the balance detector, and outputs beat frequency photocurrent signals.
The silicon optical chip comprises a substrate, an oxygen-buried layer, a second waveguide layer, a second cladding layer, a first waveguide layer and a first cladding layer which are sequentially laminated from bottom to top. The receiving and transmitting antenna is provided with a first waveguide layer, emergent light of the receiving and transmitting antenna is coaxial with echo light and opposite in direction, back diffracted light of the receiving and transmitting antenna is transmitted towards the substrate direction, and after passing through the second coating layer, the emergent light is coupled by a coupler positioned on the second waveguide layer to form the local oscillation light.
The light guide and shaping module comprises a dimming lens group and a light beam scanning module, and the dimming lens group is respectively connected with the receiving and transmitting antenna and the light beam scanning module.
The emergent light is shaped by the light-adjusting lens group and then guided to the light beam scanning module, and then is emitted to a distant target object. The reflected light reflected by the target returns to the original path, and enters the receiving and transmitting antenna after being condensed and focused by the light adjusting lens group.
The detection process of the frequency modulation continuous wave laser radar of the embodiment is as follows:
the frequency modulation light emitted by the light source module is coupled into the silicon optical chip through the spot-size converter, and is divided into N+1 paths through the light splitting module, wherein the N paths respectively enter N receiving and transmitting detection units, and the 1 paths enter the nonlinear calibration module. The outgoing light led out by the N receiving and transmitting detection units enters the light guiding and shaping module and then is emitted to the target object. The echo light of the target is transmitted back to the light guiding and shaping module and is received by N receiving and transmitting antennas in the receiving and transmitting detection module, the received N paths of echo light and N paths of local oscillation light in the receiving and transmitting detection module are coherently detected to output N paths of beat frequency photocurrent signals, the N paths of beat frequency photocurrent signals are converted into amplified beat frequency voltage signals through the TIA module, and the voltage signals are subjected to signal processing, so that the speed and distance information of the target can be obtained.
It should be noted that, the transmitting and receiving are coaxial in this embodiment, that is, the antenna is used for receiving while transmitting.
The embodiment adopts a single polarization receiving mode, namely only receives the part of the echo light with the same polarization direction as the residual light.
Example six
Referring to fig. 12 and 13, in the first embodiment, the antenna includes a transmitting antenna and a receiving antenna y, which are both grating antennas. Preferably, the receiving antenna y may employ an apodization grating to improve the receiving efficiency of the return light.
The mixer comprises a mixer x and a mixer y;
the balance detector comprises a balance detector x and a balance detector y;
the receiving and transmitting detection unit further comprises a 2x2 light splitter, a coupler and a polarization rotator, wherein the 2x2 light splitter is respectively connected with the light splitting module, the frequency mixer x and the receiving and transmitting antenna, the receiving antenna is also respectively connected with the light guiding and shaping module and the polarization rotator, the frequency mixer y is respectively connected with the coupler, the polarization rotator and the balance detector y, the balance detector y is also connected with the TIA module, and the balance detector x is respectively connected with the frequency mixer x and the TIA module.
The light split by the light source module is split into two paths by a 2x2 beam splitter, one path of the light is radiated outwards through a receiving and transmitting antenna, and the other path of the light is used as local oscillation light x. The transceiver antenna radiates emergent light outwards, and part of energy is coupled into the waveguide in a mode of back diffraction light by the coupler to serve as local oscillation light y. The emergent light is emitted to the target object through the light guiding and shaping module. The echo light reflected by the target object is divided into two orthogonal polarization states of echo light x and echo light y by a polarization beam splitter in a light guide and shaping module, the two orthogonal polarization states of the echo light x and the echo light y are respectively received by a receiving antenna and a receiving antenna y, and then the two orthogonal polarization states of the echo light x and the echo light y are mixed with the local oscillation light x and the local oscillation light y through a mixer x and a mixer y respectively, and then enter a balance detector x and a balance detector y to output two paths of beat frequency photocurrent signals. Since the polarization of the echo light y is orthogonal to that of the local oscillation light y, the echo light y needs to be rotated to the same polarization state as the local oscillation light y by using a polarization rotator.
The silicon optical chip comprises a substrate, an oxygen-buried layer, a second waveguide layer, a second cladding layer, a first waveguide layer and a first cladding layer which are sequentially laminated from bottom to top. The receiving antenna and the receiving antenna y are arranged in the first waveguide layer, and the coupler is arranged in the second waveguide layer.
Due to the inherent structural symmetry of the grating-type transmitting antenna, the beam is diffracted off-chip and has a diffraction component directed toward the substrate. The coupler is used for coupling the diffraction component towards the substrate into the waveguide and treating the light entering the waveguide as local oscillation light necessary for coherent detection. The coupler ensures that the inherent diffraction loss of the grating antenna is converted into local oscillation light to be utilized, thereby improving the use efficiency of optical power.
Preferably, the coupler is an apodization grating coupler, and the apodization grating coupler can improve the coupling efficiency of the back diffraction light of the receiving and transmitting antenna and increase the local oscillation optical power.
The light guide and shaping module comprises a polarization beam splitter, a light adjusting lens group, a light beam scanning module and a reflecting mirror, wherein the polarization beam splitter is respectively connected with the receiving antenna, the receiving antenna y and the light adjusting lens group, the light adjusting lens group is connected with the light beam scanning module, and the reflecting mirror is arranged between the circulator and the receiving antenna and used for changing the path of the return light.
The emergent light enters from the straight-through port of the polarization beam splitter, exits from the light-in port, is shaped by the light-adjusting lens group, is guided to the light beam scanning module, and finally is emitted to a distant target object. The reflected light reflected by the target returns to the original path, enters the light inlet of the polarization beam splitter after being condensed and focused by the light adjusting lens group, and is emitted from the straight-through port as echo light x, and is emitted from the coupling port as echo light y. The back wave light x enters the chip through the receiving and transmitting antenna, and the back wave light y is reflected by the reflecting mirror and is emitted to the receiving antenna y.
The detection process of the frequency modulation continuous wave laser radar of the embodiment is as follows:
the frequency modulation light emitted by the light source module is coupled into the silicon optical chip through the spot-size converter, and is divided into N+1 paths through the light splitting module, wherein the N paths respectively enter N receiving and transmitting detection units, and the 1 paths enter the nonlinear calibration module. The outgoing light led out by the N receiving and transmitting detection modules enters the light guiding and shaping module and then is emitted to the target object. The echo light of the target is transmitted back to the light guiding and shaping module and is received by 2N antennas in the receiving and transmitting detection module, the received 2N loop of echo light and 2N path of local oscillation light in the receiving and transmitting detection module are coherently detected to output 2N paths of beat frequency photocurrent signals, the 2N paths of beat frequency photocurrent signals are converted into amplified beat frequency voltage signals through the TIA module, and the beat frequency voltage signals are subjected to signal processing, so that the speed and distance information of the target can be obtained.
In this embodiment, a polarization diversity mode is adopted, that is, two orthogonal polarization states in the echo light are separately received, and are subjected to aggregation processing in a signal processing module.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art in a specific case.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to the embodiments described above will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A frequency modulated continuous wave lidar comprising:
the optical engine comprises a light source module, a silicon optical chip and a TIA module which are packaged in a shell, the silicon optical chip is integrated with a signal receiving and transmitting module, the silicon optical chip comprises a spot-molding converter, a beam-splitting module, a receiving and transmitting detection module and a nonlinear calibration module, the spot-molding converter is respectively connected with the light source module and the beam-splitting module, the receiving and transmitting detection module is respectively connected with the beam-splitting module, the TIA module and the light guiding and shaping module, the nonlinear calibration module is connected with the beam-splitting module and the TIA module, the nonlinear calibration module is used for calibrating the frequency modulation nonlinearity of the light source, the beam-splitting module is used for dividing the light energy coupled into the silicon optical chip through the spot-molding converter into n+1 parts, wherein the N parts of light energy enters the receiving and transmitting detection module, the device comprises a nonlinear calibration module, a receiving and transmitting detection module, a grating type antenna, a first optical chip and a second optical chip, wherein one part of light energy enters the nonlinear calibration module, the receiving and transmitting detection module is composed of N receiving and transmitting detection units, N is more than or equal to 1, the receiving and transmitting detection units comprise an antenna, a mixer, a balance detector and a coupler, echo light and local oscillation light in the receiving and transmitting detection units enter the balance detector to perform heterodyne detection after being mixed by the mixer, the silicon optical chip comprises a substrate, an oxygen burying layer, a second waveguide layer, a second cladding layer, a first waveguide layer and a first cladding layer which are sequentially stacked from bottom to top, the antenna is arranged in the first waveguide layer, the coupler is arranged in the second waveguide layer, and back diffraction light of the grating type antenna is utilized as local oscillation light by the coupler;
the light guide and shaping module is connected with the silicon optical chip and is used for transmitting and guiding emergent light and return light and shaping light beams;
the driving module is connected with the light source module, the silicon optical chip and the light guiding and shaping module and provides driving signals for the light source module, the silicon optical chip and the light guiding and shaping module;
and the signal processing module is connected with the TIA module and is used for processing the beat frequency voltage signal amplified by the TIA module to obtain the distance and speed information of the target object.
2. A frequency modulated continuous wave lidar as defined in claim 1,
the light source module comprises a laser and an amplifier;
the laser is a narrow linewidth laser;
the amplifier is an erbium-doped fiber amplifier or a semiconductor optical amplifier.
3. A frequency modulated continuous wave lidar as defined in claim 1,
the spot-size converter is respectively connected with the light source module and the light splitting module, and is used for coupling the light source module and the silicon optical chip.
4. A frequency modulated continuous wave lidar as defined in claim 1,
the light splitting module consists of a plurality of light splitters.
5. A frequency modulated continuous wave lidar as defined in claim 1,
the antenna comprises a transmitting antenna and a receiving antenna;
the transmitting antenna is respectively connected with the light splitting module, the light guiding and shaping module and the coupler, the receiving antenna is respectively connected with the light guiding and shaping module and the mixer, the mixer is also connected with the coupler and the balance detector, and the balance detector is connected with the TIA module.
6. A frequency modulated continuous wave lidar as defined in claim 1,
the antenna comprises a transmitting antenna, a receiving antenna x and a receiving antenna y;
the mixer comprises a mixer x and a mixer y;
the balance detector comprises a balance detector x and a balance detector y;
the receiving and transmitting detection unit further comprises a coupler, an equipartition device and a polarization rotator, wherein the transmitting antenna is respectively connected with the light splitting module, the light guiding and shaping module and the coupler, the equipartition device is respectively connected with the coupler, the mixer x and the mixer y, the receiving antenna x is respectively connected with the light guiding and shaping module and the mixer x, the receiving antenna y is respectively connected with the light guiding and shaping module and the polarization rotator, the polarization rotator is also connected with the mixer y, the balance detector x is respectively connected with the mixer x and the TIA module, and the balance detector y is respectively connected with the mixer y and the TIA module.
7. A frequency modulated continuous wave lidar as defined in claim 1,
the antenna is a receiving and transmitting antenna;
the receiving and transmitting detection unit further comprises a 2x2 light splitter and a coupler, the 2x2 light splitter is respectively connected with the light splitting module, the frequency mixer and the receiving and transmitting antenna, the receiving and transmitting antenna is further connected with the light guiding and shaping module and the coupler, the coupler is further connected with the frequency mixer, and the balance detector is respectively connected with the frequency mixer and the TIA module.
8. A frequency modulated continuous wave lidar as defined in claim 1,
the antenna comprises a receiving antenna and a transmitting antenna;
the mixer comprises a mixer x and a mixer y;
the balance detector comprises a balance detector x and a balance detector y;
the receiving and transmitting detection unit further comprises a 2x2 light splitter, a coupler and a polarization rotator, wherein the 2x2 light splitter is connected with the light splitting module, the frequency mixer x and the receiving and transmitting antenna respectively, the receiving antenna is connected with the light guiding and shaping module and the polarization rotator respectively, the frequency mixer y is connected with the coupler, the polarization rotator and the balance detector y respectively, the balance detector y is connected with the TIA module respectively, and the balance detector x is connected with the frequency mixer x and the TIA module respectively.
9. A frequency modulated continuous wave lidar as defined in claim 1,
the nonlinear calibration module is connected with the light splitting module and the TIA module and is used for calibrating the frequency modulation nonlinearity of the light source;
the nonlinear calibration module comprises an optical splitter, a waveguide delay line, a mixer and a balance detector.
10. A frequency modulated continuous wave lidar as defined in claim 1,
the light guiding and shaping module is used for transmitting, guiding and shaping the emergent light and the return light, and is selected from one or more of a circulator, a dimming mirror group, a light beam scanning module, a polarization beam splitter and a reflecting mirror.
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