CN116717454A - Damping device and cryopump equipment - Google Patents
Damping device and cryopump equipment Download PDFInfo
- Publication number
- CN116717454A CN116717454A CN202310618559.XA CN202310618559A CN116717454A CN 116717454 A CN116717454 A CN 116717454A CN 202310618559 A CN202310618559 A CN 202310618559A CN 116717454 A CN116717454 A CN 116717454A
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- China
- Prior art keywords
- corrugated pipe
- shock
- damping
- shock absorbing
- cryopump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000013016 damping Methods 0.000 title claims abstract description 49
- 230000035939 shock Effects 0.000 claims description 82
- 238000010521 absorption reaction Methods 0.000 claims description 7
- 229920001971 elastomer Polymers 0.000 claims description 5
- 229920000459 Nitrile rubber Polymers 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 229920000058 polyacrylate Polymers 0.000 claims description 3
- 229920002379 silicone rubber Polymers 0.000 claims description 3
- 239000001307 helium Substances 0.000 abstract description 5
- 229910052734 helium Inorganic materials 0.000 abstract description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011238 particulate composite Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000004636 vulcanized rubber Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/0027—Pulsation and noise damping means
- F04B39/0044—Pulsation and noise damping means with vibration damping supports
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/0027—Pulsation and noise damping means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/121—Casings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/14—Provisions for readily assembling or disassembling
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention relates to a damping device and a cryopump apparatus, comprising a connection unit including a first connection member and a second connection member; the damping unit comprises an inner corrugated pipe and at least one outer corrugated pipe, wherein the pipe diameter of the inner corrugated pipe is smaller than that of the outer corrugated pipe, the first connecting piece and the second connecting piece are respectively arranged at two ends of the inner corrugated pipe, the outer corrugated pipe is sleeved on the inner corrugated pipe, a medium and a damping plate component for damping are arranged between the inner corrugated pipe and the outer corrugated pipe, and the damping plate component is arranged along the axial direction of the inner corrugated pipe. According to the invention, the existing low-temperature pump structure is not required to be changed, and the independent damping device is arranged on the low-temperature pump body to realize damping, so that the tight combination of the cold head and the pump body can be ensured, the performance of the low-temperature pump is not reduced, the problem of helium leakage is avoided, and the production stability and the product yield are improved.
Description
Technical Field
The invention relates to the technical field of low-temperature pump damping, in particular to a damping device and low-temperature pump equipment.
Background
The cryopump is a vacuum pump that condenses a gas by using a low-temperature surface, also called a condensing pump. The cryopump is a vacuum pump with the lowest ultimate pressure and the largest pumping rate for obtaining clean vacuum, and is widely applied to research and production of semiconductors and integrated circuits, molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, space simulation devices and the like. The cryopump is prone to vibration during operation and movement, which may lead to unstable equipment conditions, such as displacement of the thermocouple crucible, and the like, thereby affecting the normal operation of the equipment. In the prior art, the damping mode is realized by directly locking the cold head to the shockproof mechanism and then locking the shockproof mechanism to the cryopump main body.
A disadvantage of the prior art is that the extent of reduction of the vibrations is in fact very limited in the case of a rigid connection of the individual components. In addition, the shock-proof structure is not tight enough when being connected with the cold head, and looseness easily occurs when the shock is received, so that helium leakage is caused, and the shock is aggravated. Further, the existing vibration-proof structure may cause the distance between the coldhead and the cryopump main body to become long, thereby causing a deterioration in heat conduction effect and severely degrading the performance of the cryopump.
Disclosure of Invention
Therefore, the invention aims to solve the technical problems of overcoming the defects in the prior art and providing the damping device and the cryogenic pump equipment.
In order to solve the technical problems, the present invention provides a damping device for damping a cryopump, comprising,
a connection unit including a first connection member and a second connection member;
the damping unit comprises an inner corrugated pipe and at least one outer corrugated pipe, wherein the pipe diameter of the inner corrugated pipe is smaller than that of the outer corrugated pipe, the first connecting piece and the second connecting piece are respectively arranged at two ends of the inner corrugated pipe, the outer corrugated pipe is sleeved on the inner corrugated pipe, a medium and a damping plate component for damping are arranged between the inner corrugated pipe and the outer corrugated pipe, and the damping plate component is arranged along the axial direction of the inner corrugated pipe.
Preferably, the damper plate assembly comprises a plurality of first damper plates and a plurality of second damper plates which are axially arranged along the inner bellows, the plurality of first damper plates and the plurality of second damper plates are alternately arranged in sequence, and the planes of the first damper plates and the second damper plates are perpendicular to the direction of the axis of the inner bellows.
Preferably, a plurality of first through holes are formed in the first shock absorbing plate, a plurality of second through holes are formed in the second shock absorbing plate, and the projection area of the first through holes along the axial direction of the corrugated pipe is different from the projection area of the second through holes along the axial direction of the inner corrugated pipe.
Preferably, the shock absorbing unit further comprises at least two movable connecting rods, the two movable connecting rods are respectively arranged at two ends of the shock absorbing plate assembly and located between the shock absorbing plate assembly and the outer corrugated pipe, and the movable connecting rods are arranged along the direction of the shaft of the inner corrugated pipe.
Preferably, the movable connecting rod comprises a shell, an elastic piece and a telescopic rod, wherein the elastic piece and the telescopic rod are arranged in the shell, the telescopic rod is connected with the elastic piece, the shell is connected with the outer corrugated pipe, the telescopic rod is connected with the shock-absorbing plate assembly, and the telescopic rod can reciprocate along the length direction of the telescopic rod.
Preferably, the movable connecting rod comprises a cylinder, the cylinder is mounted on the outer corrugated pipe, and a push rod of the cylinder is connected with the shock absorbing plate assembly.
Preferably, the damping unit further comprises a pipeline assembly, wherein a medium inlet and a medium outlet are formed in the outer corrugated pipe, and the pipeline assembly comprises a first pipeline arranged at the medium inlet and a second pipeline arranged at the medium outlet.
Preferably, the first and second connectors comprise knife edge flanges.
Preferably, the medium comprises liquid nitrile rubber or composite rubber formed by mixing polyacrylate and silicon rubber.
The invention also provides a cryopump device, which comprises a cryopump body and the damping device, wherein the cryopump body is provided with a third connecting piece, and the cryopump body is connected with the damping unit through the third connecting piece.
Compared with the prior art, the technical scheme of the invention has the following advantages:
the shock absorbing device is provided with the connecting unit and the shock absorbing unit, the shock absorbing unit can be connected with the cryogenic pump body and other equipment through the connecting unit, when the cryogenic pump works, the generated shock is transmitted to the shock absorbing device, so that the inner corrugated pipe is contracted and released, and therefore, the shock absorbing plate component arranged in the inner corrugated pipe and a medium filled in the cavity are collided for a plurality of times, momentum exchange is carried out, the shock can be converted into internal energy, and the dissipated shock is absorbed by the outer corrugated pipe, so that a good shock absorbing effect is realized. Specifically, when the cryopump body works, the motion of the inner bellows, the medium and the shock absorbing plate assembly can reduce the vibration of the cryopump body along the axial direction, so that the vibration magnitude is effectively reduced. According to the invention, the existing low-temperature pump structure is not required to be changed, and the independent damping device is arranged on the low-temperature pump body to realize damping, so that the tight combination of the cold head and the pump body can be ensured, the performance of the low-temperature pump is not reduced, the problem of helium leakage is avoided, and the production stability and the product yield are improved.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings.
Fig. 1 is a schematic view of a first cross-section of a preferred embodiment of the present invention.
Fig. 2 is a schematic structural view of a second cross section of a preferred embodiment of the present invention.
Fig. 3 is a schematic structural view of a first shock absorbing plate according to a preferred embodiment of the present invention.
Fig. 4 is a schematic view of a second shock absorbing panel according to a preferred embodiment of the present invention.
Fig. 5 is a schematic sectional structure of a cylinder according to a preferred embodiment of the present invention.
Fig. 6 is a schematic structural view of a cryopump apparatus in accordance with a preferred embodiment of the present invention.
Description of the specification reference numerals: 11. a first connector; 12. a second connector; 13. a third connecting member; 2. the method comprises the steps of carrying out a first treatment on the surface of the An inner bellows; 3. an outer bellows; 21. a first shock absorbing plate; 22. a second shock absorbing plate; 4. a cylinder; 41. a push rod; 51. a first pipe; 52. a second pipe; 6. a cryopump body; 7. and (5) a cold head.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
Example 1
Referring to fig. 1 to 6, the present invention discloses a shock absorbing device for shock absorbing a cryopump, comprising,
a connection unit including a first connection member 11 and a second connection member 12;
the shock absorption unit comprises an inner corrugated pipe 2 and at least one outer corrugated pipe 3, wherein the pipe diameter of the inner corrugated pipe 2 is smaller than that of the outer corrugated pipe 3, the first connecting piece 11 and the second connecting piece 12 are respectively arranged at two ends of the inner corrugated pipe 2, and the outer corrugated pipe 3 is sleeved on the inner corrugated pipe 2. Specifically, the outer corrugated tube 3 is welded to the outer wall of the inner corrugated tube 2, and a cavity is formed between the inner corrugated tube 2 and the outer corrugated tube 3 because the pipe diameter of the outer corrugated tube 3 is larger than the pipe diameter of the inner corrugated tube 2.
The cavity is internally provided with a medium for damping and a damping plate assembly, and the damping plate assembly is arranged on the outer wall of the inner bellows 2 and is axially arranged along the inner bellows 2. The medium and shock absorbing plate assembly is capable of attenuating axial shock.
It can be seen that the shock absorbing device to be protected according to the present invention is provided with a connection unit and a shock absorbing unit, the shock absorbing unit can be connected with the cryopump body and other devices through the connection unit, and when the cryopump works, the generated shock is transmitted to the shock absorbing device, so that the inner bellows is contracted and released, so that the shock absorbing plate assembly provided in the inner bellows collides with the medium filled in the cavity for shock absorption for a plurality of times, thereby performing momentum exchange, converting the shock energy into internal energy, and the dissipated shock is absorbed by the outer bellows, thereby achieving a good shock absorbing effect. Specifically, when the cryopump body works, the motion of the inner bellows, the medium and the shock absorbing plate assembly can reduce the vibration of the cryopump body along the axial direction, so that the vibration magnitude is effectively reduced. According to the invention, the existing low-temperature pump structure is not required to be changed, and the independent damping device is arranged on the low-temperature pump body to realize damping, so that the tight combination of the cold head and the pump body can be ensured, the performance of the low-temperature pump is not reduced, the problem of helium leakage is avoided, and the production stability and the product yield are improved.
Further, the damper plate assembly includes a plurality of first damper plates 21 and a plurality of second damper plates 22 disposed along the axial direction of the inner bellows 2, and a plurality of first damper plates 21 and a plurality of second damper plates 22 are alternately disposed in sequence, and a plane in which the first damper plates 21 and the second damper plates 22 are disposed is perpendicular to a direction in which the axis of the inner bellows 2 is disposed. It should be noted that the ends of the damper plate assembly are the first damper plate 21, so that the overall structural stability of the damper plate assembly can be ensured. The first damper plate 21 and the second damper plate 22 are annular. The first damping plate 21 and the second damping plate 22 are provided with a plurality of mounting holes at opposite positions, and the plurality of mounting holes are symmetrically arranged along the radial direction of the first damping plate 21 and the second damping plate 22. It should be noted that a plurality of the mounting holes are provided on the first and second damper plates 21 and 22 at positions near edges, thereby facilitating assembly thereof and making mounting between the first and second damper plates 21 and 22 more stable and tight. The plurality of first shock absorbing plates 21 and the plurality of second shock absorbing plates 22 are fastened to each other by bolts.
Further, the first damper plate 21 is provided with a plurality of first through holes, and the plurality of first through holes are arranged at intervals along the circumferential direction of the first damper plate 21. The second shock absorbing plate 22 is provided with a plurality of second through holes, and a plurality of second through holes are arranged along the circumferential direction of the second shock absorbing plate 22. The projection area of the first through hole along the axial direction of the inner bellows 2 is different from the projection area of the second through hole along the axial direction of the inner bellows.
In this embodiment, from a detail point of view, the first through hole is a honeycomb hole, and the second through hole is a round hole, and a diameter of the round hole is smaller than a diagonal length of the honeycomb hole. Because the projection areas of the first through hole and the second through hole are different, and a plurality of the first shock absorbing plates 21 and a plurality of the second shock absorbing plates 22 are alternately arranged in sequence, so that a plurality of smaller spaces are formed in the shock absorbing plate assembly, the medium can pass through the first through hole and the second through hole, and the medium can collide between the honeycomb holes and the round holes for a plurality of times, so that momentum exchange is carried out, vibration energy is converted into internal energy, vibration energy is consumed, and the scattered and escaped vibration is absorbed by the outer corrugated pipe 3, so that a better shock absorbing effect is realized. In this embodiment, the first shock absorbing plate 21 is made of stainless steel, and the second shock absorbing plate 22 is made of vulcanized rubber.
Specifically, the damping unit further comprises at least two movable connecting rods, wherein the two movable connecting rods are respectively arranged at two ends of the damping plate assembly and located between the damping plate assembly and the outer corrugated pipe. The movable connecting rod is arranged along the direction of the axis of the inner bellows. One end of the movable connecting rod is connected with the inner wall of the outer corrugated pipe 3, and the other end of the movable connecting rod is abutted against the vibrating plate assembly. When the cryopump works, the inner bellows 2 can shrink due to vacuum action, the movable connecting rod can ensure that the shape of the inner bellows 2 cannot change too much to a certain extent, deformation of the inner bellows 2 is reduced, and meanwhile, a damping effect can be achieved.
Further, in one embodiment, the movable connecting rod includes a housing, an elastic member and a telescopic rod, where the elastic member is disposed in the housing, the telescopic rod is connected to the telescopic rod, and can reciprocate along a length direction of the telescopic rod under an external force, the housing is connected to the outer bellows 3, the telescopic rod is connected to the shock absorbing plate assembly, and the telescopic rod can reciprocate along the length direction of the telescopic rod. The elastic member is a spring.
Still further, in another embodiment, the movable connecting rod includes a cylinder 4, the cylinder 4 is mounted on the outer bellows 3, a push rod 41 of the cylinder is connected with the shock absorbing plate assembly, inert gas is disposed in the cylinder 4, and a sealing rubber ring is circumferentially disposed on the push rod 41 of the cylinder 4.
In detail, the damping unit further comprises a pipe assembly, wherein a medium inlet and a medium outlet are arranged on the outer corrugated pipe 3, and the pipe assembly comprises a first pipe 51 arranged at the medium inlet and used for allowing the medium to enter the cavity. The conduit assembly further comprises a second conduit 52 arranged at the medium outlet for discharging the medium.
The first pipe 51 is provided with a first valve, and the second pipe 52 is provided with a second valve. The medium comprises, but is not limited to, liquid nitrile rubber or granular composite rubber formed by mixing polyacrylate and silicon rubber, and other high damping materials can also be adopted for the medium. It should be noted that the particle diameter of the above-mentioned particulate composite rubber needs to be smaller than the pore diameters of the first through hole and the second through hole.
Specifically, the first and second connectors 11 and 12 include knife edge flanges. The size of the knife edge flange can be selected according to actual requirements. In this example, the knife edge flange is a standard CF10 inch flange.
It should be noted that, in order to further enhance the damping effect, the outer bellows 3 may be provided in plurality, the pipe diameter of the outer bellows 3 is sequentially increased, and the outer bellows 3 and the inner bellows 2 are coaxially provided.
Example 2
The invention also discloses a cryopump apparatus comprising a cryopump body 6 and a shock absorbing device as described above, wherein the cryopump body 6 is provided with a third connecting member 13 in detail, and the cryopump body is connected to the shock absorbing unit through the third connecting member 13.
Further, the third connecting member 13 and the first connecting member 11 of the shock absorbing device are fastened by bolts and nuts. The third connecting piece 13 is a pump body flange. The second connecting piece 12 of the damping device is connected with other equipment, such as semiconductor vacuum system equipment of MBE equipment, MOCVD, physical coating machines and the like.
Further, one end of the cryopump body 6 is connected to the shock absorbing device, and the other end is connected to the coldhead 7.
In summary, the shock absorbing device to be protected according to the present invention is provided with the connection unit and the shock absorbing unit, wherein the shock absorbing unit can be connected with the cryopump body and other devices through the connection unit, and when the cryopump works, the generated shock is transmitted to the shock absorbing device, so that the inner bellows is contracted and released, so that the shock absorbing plate assembly provided in the inner bellows collides with the medium filled in the cavity for multiple times, thereby performing momentum exchange, converting the shock energy into internal energy, and the dissipated shock is absorbed by the outer bellows, so as to achieve a better shock absorbing effect. Specifically, when the cryopump body works, the motion of the inner bellows, the medium and the shock absorbing plate assembly can reduce the vibration of the cryopump body along the axial direction, so that the vibration magnitude is effectively reduced. According to the invention, the existing low-temperature pump structure is not required to be changed, and the independent damping device is arranged on the low-temperature pump body to realize damping, so that the tight combination of the cold head and the pump body can be ensured, the performance of the low-temperature pump is not reduced, the problem of helium leakage is avoided, and the production stability and the product yield are improved.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (10)
1. The utility model provides a damping device for shock attenuation is carried out cryogenic pump, its characterized in that: comprising the steps of (a) a step of,
a connection unit including a first connection member and a second connection member;
the damping unit comprises an inner corrugated pipe and at least one outer corrugated pipe, wherein the pipe diameter of the inner corrugated pipe is smaller than that of the outer corrugated pipe, the first connecting piece and the second connecting piece are respectively arranged at two ends of the inner corrugated pipe, the outer corrugated pipe is sleeved on the inner corrugated pipe, a medium and a damping plate component for damping are arranged between the inner corrugated pipe and the outer corrugated pipe, and the damping plate component is arranged along the axial direction of the inner corrugated pipe.
2. A shock absorbing device as defined in claim 1, wherein: the shock-absorbing plate assembly comprises a plurality of first shock-absorbing plates and a plurality of second shock-absorbing plates which are axially arranged along the inner bellows, the first shock-absorbing plates and the second shock-absorbing plates are alternately arranged in sequence, and the planes of the first shock-absorbing plates and the second shock-absorbing plates are perpendicular to the direction of the axis of the inner bellows.
3. A shock absorbing device as claimed in claim 2, wherein: be equipped with a plurality of first through-holes on the first shock attenuation board, be equipped with a plurality of second through-holes on the second shock attenuation board, first through-hole is followed bellows axial projection area is different with the second through-hole is followed interior bellows axial projection area.
4. A shock absorbing device as defined in claim 1, wherein: the shock absorption unit further comprises at least two movable connecting rods, the two movable connecting rods are respectively arranged at two ends of the shock absorption plate assembly and located between the shock absorption plate assembly and the outer corrugated pipe, and the movable connecting rods are arranged along the direction of the shaft of the inner corrugated pipe.
5. The shock absorbing device as defined in claim 4, wherein: the movable connecting rod comprises a shell, an elastic piece and a telescopic rod, wherein the elastic piece and the telescopic rod are arranged in the shell, the telescopic rod is connected with the elastic piece, the shell is connected with the outer corrugated pipe, the telescopic rod is connected with the shock absorption plate assembly, and the telescopic rod can reciprocate along the length direction of the telescopic rod.
6. The shock absorbing device as defined in claim 4, wherein: the movable connecting rod comprises an air cylinder, the air cylinder is arranged on the outer corrugated pipe, and a push rod of the air cylinder is connected with the shock absorption plate assembly.
7. A shock absorbing device as defined in claim 1, wherein: the damping unit further comprises a pipeline assembly, a medium inlet and a medium outlet are formed in the outer corrugated pipe, and the pipeline assembly comprises a first pipeline arranged at the medium inlet and a second pipeline arranged at the medium outlet.
8. A shock absorbing device as defined in claim 1, wherein: the first and second connectors include knife edge flanges.
9. A shock absorbing device as defined in claim 1, wherein: the medium comprises liquid nitrile rubber or composite rubber formed by mixing polyacrylate and silicon rubber.
10. A cryopump apparatus, characterized in that: a shock absorbing device according to any one of claims 1 to 9, comprising a cryopump body provided with a third connecting member, the cryopump body being connected to the shock absorbing unit via the third connecting member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310618559.XA CN116717454A (en) | 2023-05-29 | 2023-05-29 | Damping device and cryopump equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310618559.XA CN116717454A (en) | 2023-05-29 | 2023-05-29 | Damping device and cryopump equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116717454A true CN116717454A (en) | 2023-09-08 |
Family
ID=87867113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310618559.XA Pending CN116717454A (en) | 2023-05-29 | 2023-05-29 | Damping device and cryopump equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116717454A (en) |
-
2023
- 2023-05-29 CN CN202310618559.XA patent/CN116717454A/en active Pending
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