CN116706650B - Laser temperature control method, device and system - Google Patents

Laser temperature control method, device and system Download PDF

Info

Publication number
CN116706650B
CN116706650B CN202310957835.5A CN202310957835A CN116706650B CN 116706650 B CN116706650 B CN 116706650B CN 202310957835 A CN202310957835 A CN 202310957835A CN 116706650 B CN116706650 B CN 116706650B
Authority
CN
China
Prior art keywords
water
laser
temperature
current
water flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202310957835.5A
Other languages
Chinese (zh)
Other versions
CN116706650A (en
Inventor
邓俊杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Raycus Fiber Laser Technologies Co Ltd
Original Assignee
Wuhan Raycus Fiber Laser Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan Raycus Fiber Laser Technologies Co Ltd filed Critical Wuhan Raycus Fiber Laser Technologies Co Ltd
Priority to CN202310957835.5A priority Critical patent/CN116706650B/en
Publication of CN116706650A publication Critical patent/CN116706650A/en
Application granted granted Critical
Publication of CN116706650B publication Critical patent/CN116706650B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/0407Liquid cooling, e.g. by water
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/20Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/024Arrangements for thermal management
    • H01S5/02407Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
    • H01S5/02423Liquid cooling, e.g. a liquid cools a mount of the laser

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Automation & Control Theory (AREA)
  • Lasers (AREA)

Abstract

The embodiment of the application discloses a temperature control method, a device and a system of a laser. The method comprises the following steps: acquiring the current output power of a laser and the current water flow of a water cooler for carrying out liquid cooling on the laser; if the current output power of the laser is not matched with the current water flow of the water cooler, adjusting the water flow of the water cooler to be a first water flow; based on the first water flow, adjusting the water flow of the water cooler according to a first curve of the temperature of the laser changing along with the output power so as to control the temperature of the laser; if the current output power of the laser is matched with the current water flow of the water cooler, the water flow of the water cooler is adjusted according to the first curve based on the current water flow of the water cooler, so that the temperature of the laser is controlled, the water cooler is prevented from being in a full-load working state all the time, the resource waste of the water cooler is reduced, and the liquid cooling cost of the laser is further reduced.

Description

Laser temperature control method, device and system
Technical Field
The present application relates to the field of laser technologies, and in particular, to a method, an apparatus, and a system for controlling a temperature of a laser.
Background
A laser is a device capable of emitting laser light, which is used as an excellent radiation source, and is widely used in fields of scientific research, industry, military, medical treatment, and the like. The laser may be classified into a gas laser, a solid laser, a dye laser, a semiconductor laser, and the like according to the working substance. Lasers have been developed to date with hundreds of output wavelengths ranging from near ultraviolet to far infrared, with radiation powers ranging from a few milliwatts to tens of kilowatts.
In the related art, a water cooling machine is generally used to perform liquid cooling heat dissipation on an operating laser. However, no matter the output power of the laser, the water cooler cannot adaptively adjust the water flow of the water cooler, and the water cooler always cools the laser in a full-load state, so that the resource waste of the water cooler is caused.
Disclosure of Invention
Aiming at the defects of the prior art, the application provides a temperature control method, a device and a system of a laser, and aims to solve the technical problem that the water cooling machine cannot adaptively adjust the water flow of the water cooling machine in the prior art, so that the resource of the water cooling machine is wasted.
In order to solve the above problems, in a first aspect, an embodiment of the present application provides a method for controlling a temperature of a laser, including:
acquiring the current output power of a laser and the current water flow of a water cooler for carrying out liquid cooling on the laser;
if the current output power of the laser is not matched with the current water flow of the water cooler, adjusting the water flow of the water cooler to be a first water flow;
based on the first water flow, adjusting the water flow of the water cooler according to a first curve of the temperature of the laser changing along with the output power so as to control the temperature of the laser;
and if the current output power of the laser is matched with the current water flow of the water cooler, adjusting the water flow of the water cooler according to the first curve based on the current water flow of the water cooler so as to control the temperature of the laser.
Further, in the method for controlling the temperature of the laser, after the current output power of the laser and the current water flow of the water cooler for cooling the laser are obtained, the method further includes:
acquiring a second curve of the water flow of the water cooler along with the change of the output power of the laser;
and determining whether the current output power of the laser is matched with the current water flow of the water cooler according to the second curve.
Further, in the method for controlling the temperature of the laser, before the second curve of the water flow rate of the water cooler changing with the output power of the laser is obtained, the method includes:
acquiring a first curve of the temperature of the laser along with the change of output power and a third curve of the water cooling temperature of the water cooling machine along with the change of water flow;
and constructing a second curve of the water flow of the water cooler along with the output power change of the laser according to the first curve and the third curve.
Further, in the method for controlling the temperature of the laser, the determining, according to the second curve, whether the current output power of the laser matches the current water flow of the water cooler includes:
determining a second water flow rate of the water cooler from the second curve according to the current output power;
acquiring a flow difference between the current water flow of the water cooler and the second water flow;
and determining whether the current output power of the laser is matched with the current water flow of the water cooler according to the flow difference.
Further, in the method for controlling a temperature of a laser, the adjusting the water flow rate of the water cooler to a first water flow rate includes:
acquiring the current temperature of the laser and the current water cooling temperature of the water cooling machine;
and adjusting the water flow of the water cooler to be a first water flow according to the current temperature of the laser and the current water cooling temperature of the water cooler.
Further, in the method for controlling the temperature of the laser, the adjusting the water flow rate of the water cooler to the first water flow rate according to the current temperature of the laser and the current water cooling temperature of the water cooler includes:
determining whether the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine;
and if the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine, adjusting the water flow of the water cooling machine to be a first water flow.
Further, in the method for controlling the temperature of the laser, after determining whether the current temperature of the laser matches the current water cooling temperature of the water cooling machine, the method further includes:
if the current temperature of the laser is not matched with the current water cooling temperature of the water cooling machine, adjusting the water flow of the water cooling machine to be a third water flow;
and after the temperature of the laser is matched with the water cooling temperature of the water cooler, adjusting the water flow of the water cooler from the third water flow to the first water flow.
In a second aspect, an embodiment of the present application further provides a temperature control device of a laser, including:
the first acquisition unit is used for acquiring the current output power of the laser and the current water flow of the water cooler for carrying out liquid cooling on the laser;
the first adjusting unit is used for adjusting the water flow of the water cooler to be a first water flow if the current output power of the laser is not matched with the current water flow of the water cooler;
the first control unit is used for adjusting the water flow of the water cooler according to a first curve of the temperature of the laser along with the change of output power based on the first water flow so as to control the temperature of the laser;
and the second control unit is used for adjusting the water flow of the water cooling machine according to the first curve based on the current water flow of the water cooling machine if the current output power of the laser is matched with the current water flow of the water cooling machine so as to control the temperature of the laser.
In a third aspect, an embodiment of the present application further provides a temperature control system of a laser, including: the device comprises a laser, a water cooler and a controller; wherein the controller is configured to execute the method for controlling the temperature of the laser according to the first aspect.
Further, in the temperature control system of the laser, a temperature monitoring unit is arranged in the laser and is used for monitoring the temperature of the laser in real time; the water cooling machine is internally provided with a temperature sensor, and the temperature sensor is used for monitoring the water cooling temperature of the water cooling machine in real time.
According to the temperature control method, device and system for the laser, after the current output power of the laser and the current water flow of the water cooler for carrying out liquid cooling on the laser are obtained, whether the current output power of the laser is matched with the current water flow of the water cooler or not is judged, if not, the water flow of the water cooler is adjusted to be the first water flow matched with the current output power of the laser, and then the water flow of the water cooler is adjusted through the first curve of the temperature change of the laser along with the output power, so that the temperature of the laser is controlled; if the water flows are matched, the water flow of the water cooling machine is adjusted through the first curve on the basis of the current water flow, so that the temperature of the laser is controlled, the water cooling machine is prevented from being in a full-load working state all the time, the resource waste of the water cooling machine is reduced, and the liquid cooling cost of the laser is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic block diagram of a temperature control system for a laser according to an embodiment of the present application;
FIG. 2 is a schematic block diagram of a method for controlling the temperature of a laser according to an embodiment of the present application;
FIG. 3 is another schematic block diagram of a method for controlling the temperature of a laser according to an embodiment of the present application;
FIG. 4 is another schematic block diagram of a method for controlling the temperature of a laser according to an embodiment of the present application;
FIG. 5 is another schematic block diagram of a method for controlling the temperature of a laser according to an embodiment of the present application;
FIG. 6 is another schematic block diagram of a method for controlling the temperature of a laser according to an embodiment of the present application;
FIG. 7 is another schematic block diagram of a method for controlling the temperature of a laser according to an embodiment of the present application;
FIG. 8 is another schematic block diagram of a method for controlling the temperature of a laser according to an embodiment of the present application;
fig. 9 is a schematic block diagram of a temperature control device of a laser according to an embodiment of the present application.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
It should be understood that the terms "comprises" and "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It is also to be understood that the terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
It should be further understood that the term "and/or" as used in the present specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes such combinations.
The embodiment of the application provides a temperature control method, device and system of a laser.
For easy understanding, a temperature control system of the laser is described first, and a method and a device for controlling the temperature of the laser are described in detail on the basis of the system.
Referring to fig. 1, fig. 1 is a schematic block diagram of a temperature control system of a laser according to an embodiment of the present application. The system comprises a laser 11, a water cooler 12 and a controller 13. The temperature monitoring unit is used for monitoring the temperature of the laser in real time; the laser is arranged on a water cooling plate of the water cooling machine. The controller receives detection data of the temperature monitoring unit and the temperature sensor in real time so as to control water flow of the water cooler, and the water cooler realizes liquid cooling of the laser through flowing cooling liquid.
After the temperature control system of the laser provided by the embodiment of the application is started, the controller executes the temperature control method of the laser provided by the embodiment to control the water flow of the water cooler, so that the temperature of the laser is controlled. Specifically, referring to fig. 2, fig. 2 is a schematic block diagram of a method for controlling a temperature of a laser according to an embodiment of the present application.
As shown in FIG. 2, the temperature control method of the laser includes steps S110 to S140.
S110, acquiring the current output power of a laser and the current water flow of a water cooler for carrying out liquid cooling on the laser;
s120, if the current output power of the laser is not matched with the current water flow of the water cooler, adjusting the water flow of the water cooler to be a first water flow;
s130, adjusting the water flow of the water cooler according to a first curve of the temperature of the laser along with the change of output power based on the first water flow so as to control the temperature of the laser;
and S140, if the current output power of the laser is matched with the current water flow of the water cooler, adjusting the water flow of the water cooler according to the first curve based on the current water flow of the water cooler so as to control the temperature of the laser.
Specifically, when the water cooling machine is used for cooling the laser, the laser is usually cooled in a full-load working state, that is, the laser is cooled by using the water cooling machine to adopt the maximum water flow. However, the laser may be in a full load state, i.e. operating at maximum output power, or in a non-full load state, i.e. operating at output power lower than the maximum output power of the laser during operation. At this time, the laser in the full-load state is cooled by the water cooler by adopting the maximum water flow, so that the waste of the water cooler resources is not necessarily caused, but the laser in the non-full-load state is cooled, and the laser is not necessarily cooled in the full-load working state.
Therefore, the current output power of the laser and the current water flow of the water cooler for carrying out liquid cooling on the laser are obtained, whether the current output power of the laser is matched with the current water flow of the water cooler or not is further determined, if so, the water flow of the water cooler can be regulated according to a first curve of the temperature of the laser changing along with the output power, and the temperature of the laser is further controlled; if the water flows are not matched, the current water flow of the water cooler is required to be adjusted to be the first water flow matched with the current output power of the laser, then the temperature of the laser is adjusted to be the temperature matched with the current output power on the basis of the first water flow, finally, the water flow of the water cooler can be adjusted by adopting a first curve of the temperature of the laser changing along with the output power, and then the temperature of the laser is controlled, so that the technical problem that the water cooler is wasted due to the fact that the water cooler cannot adaptively adjust the water flow of the water cooler in the prior art is solved, the situation that the water cooler is always in a full-load working state is avoided, the resource waste of the water cooler is reduced, and the liquid cooling cost of the laser is reduced.
In this embodiment, the first water flow is a water flow that can quickly adjust the current temperature of the laser to be matched with the current output power of the laser, and the first water flow can be the current water flow of the water cooling machine or the flow after the water flow adjustment of the water cooling machine. The first curve is a curve of the temperature of the laser as a function of output power. The laser is typically operated at a steady output power when in an operating state. However, when the output power of the laser in the working state is required to be adjusted, the temperature of the laser also changes along with the adjusted output power, so that after the current water flow of the water cooler is adjusted to be the water flow matched with the current output power of the laser, the temperature curve, namely the first curve, in the subsequent output power change process of the laser is required to be determined in advance, and then the water flow of the water cooler is adaptively adjusted according to the temperature curve in the subsequent output power change process of the laser, so that the temperature of the laser can be controlled.
In other embodiments of the application, as shown in fig. 3, steps S210 and S220 are further included before step S110.
S210, acquiring a second curve of the water flow of the water cooler along with the change of the output power of the laser;
s220, determining whether the current output power of the laser is matched with the current water flow of the water cooler according to the second curve.
In this embodiment, the second curve is a curve of the water flow rate of the water cooler along with the output power of the laser, that is, one output power of the laser corresponds to one water flow rate, and the water flow rate can control the temperature of the laser within a stable range, and the laser within the range can output stable wavelength. After the current output power of the laser and the current water flow of the water cooler for cooling the laser are obtained, comparing the current output power of the laser with the current water flow of the water cooler through a second curve, and further determining whether the current output power of the laser is matched with the current water flow of the water cooler or not.
In other embodiments of the application, as shown in fig. 4, steps S310 and S320 are further included before step S210.
S310, acquiring a first curve of the temperature of the laser along with the change of output power and a third curve of the water cooling temperature of the water cooling machine along with the change of water flow;
s320, constructing a second curve of the water flow of the water cooler along with the output power change of the laser according to the first curve and the third curve.
The device that generates heat in the laser instrument is equipped with temperature monitoring unit, and it realizes monitoring the temperature of laser instrument through the temperature of the device that generates heat in the detection laser instrument, is equipped with temperature sensor in the water-cooling machine, and it is used for detecting the water-cooling temperature in the water-cooling machine. The first curve is a curve of the temperature of a heating device in the laser along with the change of the output power of the laser, and the third curve is a curve of the water cooling temperature of the water cooling machine along with the change of the water flow.
In this embodiment, an output power of the laser corresponds to a temperature, and when the water cooling machine cools the laser with a water flow rate matching the output power, the water flow rate also corresponds to a temperature, and the two temperatures are not substantially equal, which has a temperature difference, that is, when there is a temperature difference between the laser and the water cooling machine, the laser can output a stable wavelength at an output power.
The temperature difference can be determined from the temperatures of the water cooling machine and the laser in the full-load working state. After the temperature difference is determined, a first curve of the temperature of the laser along with the change of the output power can be obtained, the curve of the temperature of the corresponding water cooler along with the change of the output power of the laser can be determined through the temperature difference and the first curve, then a third curve of the water cooling temperature of the water cooler along with the change of the water flow can be obtained according to the curve and the water flow of the water cooler in a full-load working state, and finally a second curve of the water flow of the water cooler along with the change of the output power of the laser can be constructed through the first curve and the second curve.
In other inventive embodiments, as shown in fig. 5, step S220 includes steps S221, S222, and S223.
S221, determining a second water flow of the water cooler from the second curve according to the current output power;
s222, acquiring a flow difference between the current water flow of the water cooler and the second water flow;
s223, determining whether the current output power of the laser is matched with the current water flow of the water cooler according to the flow difference.
In this embodiment, the current output power of the laser is used to determine the water flow of the laser which needs to be subjected to liquid cooling, namely, the second water flow, from the second curve, then the second water flow is compared with the current water flow of the water cooler, so as to determine whether the flow difference between the second water flow and the current water flow of the water cooler is within a preset threshold value, and if the flow difference is within the preset threshold value, then the current output power of the laser can be determined to be matched with the current water flow of the water cooler; if the flow difference is not within the preset threshold, the fact that the current output power of the laser is not matched with the current flow of the water cooler can be determined.
In other inventive embodiments, as shown in fig. 6, step S120 includes steps S121 and S122.
S121, acquiring the current temperature of the laser and the current water cooling temperature of the water cooling machine;
s122, adjusting the water flow of the water cooler to be a first water flow according to the current temperature of the laser and the current water cooling temperature of the water cooler.
In this embodiment, the current temperature of the laser may or may not match the current output power of the laser. After the current temperature of the laser is obtained, whether the current temperature of the laser is matched with the current output power or not is determined through a first curve of the temperature of the laser changing along with the output power, and whether the water flow of the water cooling machine needs to be increased or decreased is further determined. Meanwhile, the current water cooling temperature of the water cooling machine can be matched with the current water flow of the water cooling machine, and the current water cooling temperature of the water cooling machine can be not matched. Therefore, after the current temperature of the laser is obtained, whether the current temperature of the water cooler is matched with the current water flow or not is determined through a third curve of the water cooling temperature of the water cooler along with the change of the water flow, so that the flow difference of the water cooler, which is required to be subjected to flow adjustment, is determined, and the water flow of the water cooler can be adjusted to be the water flow which can be matched with the current output power of the laser.
In other inventive embodiments, as shown in fig. 7, step S122 includes steps S1221 and S1222.
S1221, determining whether the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine;
s1222, if the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine, adjusting the water flow of the water cooling machine to be a first water flow.
In this embodiment, when determining whether the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine, specifically, determining whether the temperature difference between the current temperature of the laser and the current water cooling temperature of the water cooling machine is within a preset temperature difference range, if the temperature difference is not within the preset temperature difference range, determining that the current temperature of the laser is not matched with the current water cooling temperature of the water cooling machine, that is, the temperature of the laser is usually too high, the current water flow cannot control the temperature of the laser within a range, and then, the water flow of the water cooling machine needs to be rapidly increased to rapidly cool the laser; if the temperature difference is in the range of the preset temperature difference, the current temperature of the laser is determined to be matched with the current water cooling temperature of the water cooling machine, at the moment, the temperature of the laser is only slightly too high, the current water flow can control the temperature of the laser in a range, and at the moment, the temperature of the laser can be quickly reduced by only adjusting the water flow of the water cooling machine to be the first water flow.
In other embodiments of the application, as shown in fig. 8, steps S1223 and S1224 are further included after step S1221.
S1223, if the current temperature of the laser is not matched with the current water cooling temperature of the water cooling machine, adjusting the water flow of the water cooling machine to be a third water flow;
s1224, after the temperature of the laser is matched with the water cooling temperature of the water cooler, adjusting the water flow of the water cooler from the third water flow to the first water flow.
In this embodiment, the temperature difference between the current temperature of the laser and the current water cooling temperature of the water cooling machine is not in the range of the preset temperature difference, the current water flow cannot control the temperature of the laser in a range, at this time, the water flow of the water cooling machine needs to be rapidly increased to rapidly cool the laser, that is, only the current water flow of the water cooling machine is adjusted to be the first water flow, so that the laser cannot be rapidly cooled, the water flow of the water cooling machine needs to be continuously increased until the water flow of the water cooling machine is greater than the first water flow, that is, after the third water flow is greater than the first water flow, the rapid cooling of the laser can be realized. Meanwhile, after the laser is rapidly cooled through the third water flow, when the temperature of the laser is matched with the water cooling temperature of the water cooler, in order to reduce the waste of water cooler resources, the water flow of the water cooler can be adjusted from the third water flow to the first water flow, and then the water flow of the water cooler can be adjusted according to the first curve, so that the temperature of the laser is controlled.
According to the temperature control method of the laser, after the current output power of the laser and the current water flow of the water cooler for carrying out liquid cooling on the laser are obtained, whether the current output power of the laser is matched with the current water flow of the water cooler or not is judged, if not, the water flow of the water cooler is adjusted to be the first water flow matched with the current output power of the laser, and then the water flow of the water cooler is adjusted through a first curve of the temperature change of the laser along with the output power, so that the temperature of the laser is controlled; if the water flows are matched, the water flow of the water cooling machine is adjusted through the first curve on the basis of the current water flow, so that the temperature of the laser is controlled, the water cooling machine is prevented from being in a full-load working state all the time, the resource waste of the water cooling machine is reduced, and the liquid cooling cost of the laser is reduced.
Referring to fig. 9, fig. 9 is a schematic block diagram of a temperature control device of a laser according to an embodiment of the application. The control device can be operated in the controller and is used for controlling the water flow of the water cooling machine, so that the water cooling machine is prevented from working in a full-load state all the time, and the resource waste of the water cooling machine is avoided.
As shown in fig. 9, the temperature control device 100 of the laser includes: a first acquisition unit 110, a first adjustment unit 120, a first control unit 130, and a second control unit 140.
A first obtaining unit 110, configured to obtain a current output power of a laser, and a current water flow of a water cooler for performing liquid cooling on the laser;
the first adjusting unit 120 is configured to adjust the water flow rate of the water cooling machine to a first water flow rate if the current output power of the laser is not matched with the current water flow rate of the water cooling machine;
the first control unit 130 is configured to adjust, based on the first water flow, the water flow of the water cooler according to a first curve that the temperature of the laser changes with the output power, so as to control the temperature of the laser;
and the second control unit 140 is configured to adjust the water flow rate of the water cooling machine according to the first curve based on the current water flow rate of the water cooling machine if the current output power of the laser is matched with the current water flow rate of the water cooling machine, so as to control the temperature of the laser.
In one embodiment, the temperature control device 100 of the laser further includes: a second acquisition unit and a first determination unit.
The second acquisition unit is used for acquiring a second curve of the water flow of the water cooler along with the change of the output power of the laser;
and the first determining unit is used for determining whether the current output power of the laser is matched with the current water flow of the water cooler according to the second curve.
In one embodiment, the temperature control device 100 of the laser further includes: and a third acquisition unit and a construction unit.
The third acquisition unit is used for acquiring a first curve of the temperature of the laser along with the change of output power and a third curve of the water cooling temperature of the water cooling machine along with the change of water flow;
the construction unit is used for constructing a second curve of the water flow of the water cooler along with the output power change of the laser according to the first curve and the third curve.
In an embodiment, the first determining unit comprises: a second determination unit, a fourth acquisition unit, and a third determination unit.
The second determining unit is used for determining a second water flow of the water cooler from the second curve according to the current output power;
a fourth obtaining unit, configured to obtain a flow difference between the current water flow of the water cooler and the second water flow;
and the third determining unit is used for determining whether the current output power of the laser is matched with the current water flow of the water cooling machine according to the flow difference.
In an embodiment, the first adjusting unit 120 includes: a fifth acquisition unit and a second adjustment unit.
A fifth obtaining unit, configured to obtain a current temperature of the laser and a current water cooling temperature of the water cooling machine;
the second adjusting unit is used for adjusting the water flow of the water cooler to be the first water flow according to the current temperature of the laser and the current water cooling temperature of the water cooler.
In an embodiment, the second adjusting unit includes: a fourth determining unit and a third adjusting unit.
A fourth determining unit, configured to determine whether the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine;
and the third adjusting unit is used for adjusting the water flow of the water cooling machine to be the first water flow if the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine.
In an embodiment, the second adjusting unit further comprises: a fourth adjusting unit and a fifth adjusting unit.
A fourth adjusting unit, configured to adjust a water flow rate of the water cooling machine to a third water flow rate if the current temperature of the laser is not matched with the current water cooling temperature of the water cooling machine;
and the fifth adjusting unit is used for adjusting the water flow of the water cooler from the third water flow to the first water flow after the temperature of the laser is matched with the water cooling temperature of the water cooler.
The temperature control device 100 of the laser provided by the embodiment of the application is used for executing the current water flow of the water cooler for obtaining the current output power of the laser and carrying out liquid cooling on the laser; if the current output power of the laser is not matched with the current water flow of the water cooler, adjusting the water flow of the water cooler to be a first water flow; based on the first water flow, adjusting the water flow of the water cooler according to a first curve of the temperature of the laser changing along with the output power so as to control the temperature of the laser; and if the current output power of the laser is matched with the current water flow of the water cooler, adjusting the water flow of the water cooler according to the first curve based on the current water flow of the water cooler so as to control the temperature of the laser.
It should be noted that, as those skilled in the art can clearly understand, the specific implementation process of the temperature control device 100 and each unit of the laser may refer to the corresponding description in the foregoing method embodiment, and for convenience and brevity of description, the description is omitted here.
It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the apparatus and units described above may refer to corresponding procedures in the foregoing method embodiments, which are not described herein again.
The steps in the method of the embodiment of the application can be sequentially adjusted, combined and deleted according to actual needs.
The units in the device of the embodiment of the application can be combined, divided and deleted according to actual needs.
In addition, each functional unit in the embodiments of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units.
While the application has been described with reference to certain preferred embodiments, it will be understood by those skilled in the art that various changes and substitutions of equivalents may be made and equivalents will be apparent to those skilled in the art without departing from the scope of the application. Therefore, the protection scope of the application is subject to the protection scope of the claims.

Claims (7)

1. A method of controlling a temperature of a laser, comprising:
acquiring the current output power of a laser and the current water flow of a water cooler for carrying out liquid cooling on the laser;
if the current output power of the laser is not matched with the current water flow of the water cooler, adjusting the water flow of the water cooler to be a first water flow;
based on the first water flow, adjusting the water flow of the water cooler according to a first curve of the temperature of the laser changing along with the output power so as to control the temperature of the laser;
if the current output power of the laser is matched with the current water flow of the water cooler, adjusting the water flow of the water cooler according to the first curve based on the current water flow of the water cooler so as to control the temperature of the laser;
wherein, adjust the discharge of water-cooling machine to first discharge, include:
acquiring the current temperature of the laser and the current water cooling temperature of the water cooling machine;
adjusting the water flow of the water cooler to be a first water flow according to the current temperature of the laser and the current water cooling temperature of the water cooler;
the adjusting the water flow of the water cooler to a first water flow according to the current temperature of the laser and the current water cooling temperature of the water cooler comprises the following steps:
determining whether the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine;
if the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine, adjusting the water flow of the water cooling machine to be a first water flow;
if the current temperature of the laser is not matched with the current water cooling temperature of the water cooling machine, adjusting the water flow of the water cooling machine to be a third water flow;
and after the temperature of the laser is matched with the water cooling temperature of the water cooler, adjusting the water flow of the water cooler from the third water flow to the first water flow.
2. The method according to claim 1, further comprising, after the current output power of the laser is obtained and the current water flow rate of the water cooling machine for cooling the laser is obtained,:
acquiring a second curve of the water flow of the water cooler along with the change of the output power of the laser;
and determining whether the current output power of the laser is matched with the current water flow of the water cooler according to the second curve.
3. The method according to claim 2, further comprising, before the obtaining the second curve of the water flow rate of the water cooler according to the output power of the laser:
acquiring a first curve of the temperature of the laser along with the change of output power and a third curve of the water cooling temperature of the water cooling machine along with the change of water flow;
and constructing a second curve of the water flow of the water cooler along with the output power change of the laser according to the first curve and the third curve.
4. The method according to claim 2, wherein determining whether the current output power of the laser matches the current water flow rate of the water cooler according to the second curve comprises:
determining a second water flow rate of the water cooler from the second curve according to the current output power;
acquiring a flow difference between the current water flow of the water cooler and the second water flow;
and determining whether the current output power of the laser is matched with the current water flow of the water cooler according to the flow difference.
5. A temperature control device for a laser, comprising:
the first acquisition unit is used for acquiring the current output power of the laser and the current water flow of the water cooler for carrying out liquid cooling on the laser;
the first adjusting unit is used for adjusting the water flow of the water cooler to be a first water flow if the current output power of the laser is not matched with the current water flow of the water cooler;
the first control unit is used for adjusting the water flow of the water cooler according to a first curve of the temperature of the laser along with the change of output power based on the first water flow so as to control the temperature of the laser;
the second control unit is used for adjusting the water flow of the water cooler according to the first curve based on the current water flow of the water cooler if the current output power of the laser is matched with the current water flow of the water cooler so as to control the temperature of the laser;
wherein the first adjusting unit includes: a fifth acquisition unit and a second adjustment unit;
a fifth obtaining unit, configured to obtain a current temperature of the laser and a current water cooling temperature of the water cooling machine;
the second adjusting unit is used for adjusting the water flow of the water cooler to be the first water flow according to the current temperature of the laser and the current water cooling temperature of the water cooler;
the second adjusting unit includes: a fourth determining unit, a third adjusting unit, a fourth adjusting unit, and a fifth adjusting unit;
a fourth determining unit, configured to determine whether the current temperature of the laser is matched with the current water cooling temperature of the water cooling machine;
the third adjusting unit is used for adjusting the water flow of the water cooler to be a first water flow if the current temperature of the laser is matched with the current water cooling temperature of the water cooler;
a fourth adjusting unit, configured to adjust a water flow rate of the water cooling machine to a third water flow rate if the current temperature of the laser is not matched with the current water cooling temperature of the water cooling machine;
and the fifth adjusting unit is used for adjusting the water flow of the water cooler from the third water flow to the first water flow after the temperature of the laser is matched with the water cooling temperature of the water cooler.
6. A temperature control system for a laser, comprising: the device comprises a laser, a water cooler and a controller; wherein the controller is configured to perform the method of controlling the temperature of the laser of any one of claims 1-4.
7. The temperature control system of the laser according to claim 6, wherein a temperature monitoring unit is arranged in the laser, and the temperature monitoring unit is used for monitoring the temperature of the laser in real time; the water cooling machine is internally provided with a temperature sensor, and the temperature sensor is used for monitoring the water cooling temperature of the water cooling machine in real time.
CN202310957835.5A 2023-08-01 2023-08-01 Laser temperature control method, device and system Active CN116706650B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310957835.5A CN116706650B (en) 2023-08-01 2023-08-01 Laser temperature control method, device and system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310957835.5A CN116706650B (en) 2023-08-01 2023-08-01 Laser temperature control method, device and system

Publications (2)

Publication Number Publication Date
CN116706650A CN116706650A (en) 2023-09-05
CN116706650B true CN116706650B (en) 2023-10-20

Family

ID=87837745

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310957835.5A Active CN116706650B (en) 2023-08-01 2023-08-01 Laser temperature control method, device and system

Country Status (1)

Country Link
CN (1) CN116706650B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106969477A (en) * 2017-05-17 2017-07-21 北京创和世纪通讯技术股份有限公司 Air conditioning control method and air-conditioner controller
CN110881262A (en) * 2019-10-22 2020-03-13 广东申菱环境系统股份有限公司 Control method for cold source output capacity of liquid cooling system of data machine room
CN115551314A (en) * 2022-10-14 2022-12-30 北京百度网讯科技有限公司 Temperature monitoring method, system, device and medium
CN116358205A (en) * 2023-04-07 2023-06-30 武汉汉立制冷科技股份有限公司 Cooling capacity control method of water chiller based on average waste heat of laser
CN116466775A (en) * 2023-06-20 2023-07-21 湖南省通信建设有限公司 Liquid cooling control system of chip-level element based on genetic algorithm

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106969477A (en) * 2017-05-17 2017-07-21 北京创和世纪通讯技术股份有限公司 Air conditioning control method and air-conditioner controller
CN110881262A (en) * 2019-10-22 2020-03-13 广东申菱环境系统股份有限公司 Control method for cold source output capacity of liquid cooling system of data machine room
CN115551314A (en) * 2022-10-14 2022-12-30 北京百度网讯科技有限公司 Temperature monitoring method, system, device and medium
CN116358205A (en) * 2023-04-07 2023-06-30 武汉汉立制冷科技股份有限公司 Cooling capacity control method of water chiller based on average waste heat of laser
CN116466775A (en) * 2023-06-20 2023-07-21 湖南省通信建设有限公司 Liquid cooling control system of chip-level element based on genetic algorithm

Also Published As

Publication number Publication date
CN116706650A (en) 2023-09-05

Similar Documents

Publication Publication Date Title
US8834720B2 (en) Apparatus for the extracorporeal treatment of blood
JP4137972B2 (en) Gas composition abnormality judgment method and discharge excitation gas laser oscillator
US20060196653A1 (en) Apparatus and method for controlling temperature in a chuck system
US20110243177A1 (en) Gas laser device
CN116706650B (en) Laser temperature control method, device and system
CN108539574B (en) Low-power-consumption control method and control device for laser working temperature and optical module
CN115863223B (en) Process temperature control method and device for wafer rapid thermal processing process
EP1981134B1 (en) Laser unit having preparatory function for activating the unit and activation method for the unit
CN102842841B (en) Method and apparatus for controlling effective working temperature of laser system
US20080304533A1 (en) Startup method for gas laser unit and gas laser unit having startup function
KR100707976B1 (en) Chiller for semiconductor progress having control means for the amount of cooling water and heating means for coolant
US5880437A (en) Automatic control system and method using same
JP2000269576A (en) Solid-state laser
JP5153115B2 (en) Frequency stabilized gas laser
JP3694359B2 (en) Gas laser oscillator
JP4121361B2 (en) Chuck temperature control method
KR20150039029A (en) Apparatus for controlling of gas pressure of annealing furnace
JP2004273967A (en) Chamber temperature control system
US10278273B2 (en) X-ray generator and X-ray analyzer
JPH022199A (en) Dye circulator of dye laser
US11480981B2 (en) Temperature control apparatus, temperature control method, computer program, and recording medium
KR970059859A (en) Method for determining control parameters of heat treatment apparatus and apparatus therefor
JP2002140119A (en) Work temperature controller
JP2004130336A (en) Semiconductor laser apparatus and laser beam machine
KR102339630B1 (en) Chiller for semiconductor process device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant