CN116698259A - Three-dimensional four-axis multidimensional force sensor - Google Patents

Three-dimensional four-axis multidimensional force sensor Download PDF

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Publication number
CN116698259A
CN116698259A CN202310978411.7A CN202310978411A CN116698259A CN 116698259 A CN116698259 A CN 116698259A CN 202310978411 A CN202310978411 A CN 202310978411A CN 116698259 A CN116698259 A CN 116698259A
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China
Prior art keywords
dimensional
elastic
force sensor
overload prevention
elastic beam
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Pending
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CN202310978411.7A
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Chinese (zh)
Inventor
林剑青
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Ruima Electric Manufacturing Fujian Co ltd
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Ruima Electric Manufacturing Fujian Co ltd
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Priority to CN202310978411.7A priority Critical patent/CN116698259A/en
Publication of CN116698259A publication Critical patent/CN116698259A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T90/00Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation

Abstract

The invention discloses a three-dimensional four-axis multi-dimensional force sensor, which comprises: a stressed inner sphere; the stress inner sphere is provided with a first mounting hole for mounting a component to be tested; the elastic beams are intersected and extended from the stressed inner spheres to form four cuboid columnar structures, one sides of the four elastic Liang Yuanli stressed inner spheres are connected with the fixed spheres, the fixed spheres are respectively positioned at four vertexes of the regular tetrahedron, and the stressed inner spheres are positioned at the center of the regular tetrahedron; strain gauges are arranged on the elastic beams according to the Huygens bridge, and are used for sensing the deformation degree of the elastic beams and forming measurement bridge output stress data and/or moment data, and the four elastic beams comprise a main elastic beam and three auxiliary elastic beams; the radial direction of the main elastic beam is parallel to the first side surface of each auxiliary elastic beam. The invention can improve the isotropy effect of the multidimensional force sensor, reduce the inter-dimensional coupling and improve the measurement precision.

Description

Three-dimensional four-axis multidimensional force sensor
Technical Field
The invention relates to the field of force sensors, in particular to a three-dimensional four-axis multi-dimensional force sensor.
Background
The multi-dimensional force sensor refers to a force sensor capable of measuring force and moment components in more than two directions simultaneously, and force and moment can be respectively decomposed into three components in a Cartesian coordinate system, so that the most complete form of multi-dimensional force is a six-dimensional force/moment sensor, namely a sensor capable of measuring three force components and three moment components simultaneously, and the widely used multi-dimensional force sensor is the sensor. The six-dimensional force sensor can be used as a basic element for precise assembly, precise operation, precise control and man-machine interaction control because of being capable of detecting three-dimensional force and three-dimensional moment in a space. Meanwhile, the six-dimensional force sensor is also used for guaranteeing that the robot completes a contact operation task, such as a space detection technology, space manipulator force control, industrial robots, underwater robot remote control operation and the like, and a large-range high-precision six-dimensional force sensor is required.
At present, most multidimensional force sensors are difficult to truly realize smaller inter-dimensional coupling due to the structure, and are good in isotropy, so that force and moment measurement is not accurate enough.
Disclosure of Invention
The research of the applicant shows that: most of multidimensional force sensors on the market are in plane cross structures, and the overall structure is only symmetrical on a plane and has the characteristic of poor isotropy effect, so that the inter-dimensional coupling is large, and the measurement is inaccurate. If the multidimensional force sensor can adopt a structure which can be uniformly and symmetrically arranged in a plurality of dimensions, the isotropy effect can be improved. Meanwhile, the applicant also finds that in the structure of a part of three-dimensional multi-dimensional force sensor, the force and moment sensed by the strain gauge attached to the side surface can be influenced mutually due to the problem of the side surface orientation of the elastic beam in the use process, so that the measurement is inaccurate.
In view of the above-mentioned drawbacks of the prior art, the present invention is to provide a three-dimensional four-axis multi-dimensional force sensor, which aims to improve the isotropy effect of the multi-dimensional force sensor, reduce inter-dimensional coupling, and improve measurement accuracy.
To achieve the above object, the present invention discloses a stereoscopic four-axis multi-dimensional force sensor, comprising: a stressed inner sphere; a first mounting hole for mounting the component to be tested is formed in the stressed inner sphere; the elastic beams are intersected and extended from the stressed inner spheres to form four elastic beams with cuboid columnar structures, one sides of the four elastic beams, which are far away from the stressed inner spheres, are connected with fixed spheres, each fixed sphere is respectively positioned at four vertexes of a regular tetrahedron, and the stressed inner spheres are positioned at the center of the regular tetrahedron; the four elastic beams comprise a main elastic beam and three auxiliary elastic beams, wherein the radial direction of the main elastic beam is parallel to the first side surface of each auxiliary elastic beam.
Optionally, the straight line where the main elastic beam is located is an axis in a three-dimensional rectangular coordinate system, the center of the stressed inner sphere is the origin of the rectangular coordinate system, and the auxiliary elastic beam is used for measuring the stressed data and the moment data with corresponding dimensions to decompose and synthesize the axes on the three-dimensional rectangular coordinate system.
Optionally, each surface of each elastic beam is correspondingly stuck with two strain gauges, the strain gauges on opposite sides of the same elastic beam respectively form two measuring bridges for measuring the stress data and the moment data of corresponding dimensions, and the measuring bridges corresponding to the four elastic beams respectively measure the stress data and the moment data of four groups of different dimensions.
Optionally, the elastic beam is provided with a deformation cavity on the beam body, two strain gauges are respectively attached to four sides of the deformation cavity, the strain gauges on opposite sides in the same deformation cavity respectively form two measuring bridges for measuring the stress data and the moment data of corresponding dimensions, and the four measuring bridges corresponding to the elastic beam respectively measure the stress data and the moment data of four groups of different dimensions.
Optionally, a second mounting hole for fixing the fixing ball body is formed in the fixing ball body.
Optionally, the surface of the stressed inner sphere is provided with a plurality of first overload prevention posts, an overload prevention installation body is connected between the fixed spheres, a second overload prevention post corresponding to the first overload prevention post is installed on the overload prevention installation body, a gap with a preset distance is reserved between the first overload prevention post and the second overload prevention post, and the first overload prevention post and the second overload prevention post are of a concave-convex embedded structure.
Optionally, the arrangement positions of the first overload prevention posts are symmetrical in four extension directions of the elastic beam.
Optionally, the first mounting hole is disposed opposite the main elastic beam.
The invention has the beneficial effects that: 1. the elastic beams of four cuboid columnar structures are formed by intersecting and extending the stressed inner spheres, one sides of the four elastic Liang Yuanli stressed inner spheres are connected with the fixed spheres, the fixed spheres are respectively positioned at four vertexes of the regular tetrahedron, and the stressed inner spheres are positioned at the center of the regular tetrahedron. The invention realizes consistency and symmetry from each elastic beam side observation, thereby ensuring that the elastic beams show better isotropy during measurement, reducing inter-dimensional coupling and improving measurement accuracy. Meanwhile, for the conventional three-dimensional six-dimensional sensor, the structure is simplified on the premise that the same measuring effect can be basically achieved, and the manufacturing is more convenient.
2. The four elastic beams comprise a main elastic beam and three auxiliary elastic beams, wherein the radial direction of the main elastic beam is parallel to the first side surface of each auxiliary elastic beam. The radial direction of the main elastic beam is parallel to the first side surface of each auxiliary elastic beam, so that the mutual influence between the measured torsion and force can be reduced through the symmetrical arrangement, and the accuracy is improved. Meanwhile, the structure can simplify the algorithm when six-dimensional conversion is performed.
3. The straight line where the main elastic beam is positioned is an axis in a three-dimensional rectangular coordinate system, the center of the sphere in the stress is the origin of the rectangular coordinate system, and the auxiliary elastic beam is used for measuring stress data and moment data of corresponding dimensions to decompose and synthesize all axes on the three-dimensional rectangular coordinate system. Therefore, the multi-dimensional force sensor can be converted into a six-dimensional force sensor commonly used in the industry, and the adaptability is improved.
4. The elastic beam is provided with the deformation cavity, the four sides of the deformation cavity are respectively stuck with two strain gauges, the strain gauges on the opposite sides in the same deformation cavity respectively form two measuring bridges for measuring stress data and moment data of corresponding dimensions, and the measuring bridges corresponding to the four elastic beams respectively measure four groups of stress data and moment data of different dimensions. According to the invention, the strain gauge is stuck in the deformation cavity through the design of the deformation cavity, so that the strain gauge is more sensitive to deformation detection of the elastic beam, and the measurement accuracy is improved.
5. The surface of the stressed inner sphere is provided with a plurality of first overload prevention posts, an overload prevention installation body is connected between the fixed spheres, a second overload prevention post corresponding to the first overload prevention post is installed on the overload prevention installation body, a gap with a preset distance is reserved between the first overload prevention post and the second overload prevention post, and the first overload prevention post and the second overload prevention post are of a concave-convex embedded structure. The arrangement positions of the first overload prevention posts are symmetrical in four extension directions of the elastic beam. According to the invention, the first overload prevention column and the second overload prevention column are arranged, so that overload of the multidimensional force sensor caused by overscan use is avoided, and irreversible damage is caused. Meanwhile, the first overload prevention column and the second overload prevention column are made to be symmetrical, so that the problem of poor isotropy effect caused by asymmetry is avoided.
In conclusion, the isotropy effect of the multidimensional force sensor can be improved, the inter-dimensional coupling is reduced, and the measurement accuracy is improved.
Drawings
FIG. 1 is a schematic perspective view of a three-dimensional four-axis multi-dimensional force sensor according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a three-dimensional four-axis multi-dimensional force sensor according to an embodiment of the present invention, as viewed from a main elastic beam side.
Reference numerals illustrate: the stress inner sphere-1, the first mounting hole-2, the main elastic beam-31, the auxiliary elastic beam-32, the first side face-33 of the auxiliary elastic beam, the fixed sphere-4, the strain gauge-5 and the second mounting hole-6.
Detailed Description
The invention discloses a three-dimensional four-axis multi-dimensional force sensor, which can be realized by appropriately improving technical details by a person skilled in the art by referring to the content of the text. It is expressly noted that all such similar substitutions and modifications will be apparent to those skilled in the art, and are deemed to be included in the present invention. While the methods and applications of this invention have been described in terms of preferred embodiments, it will be apparent to those skilled in the relevant art that variations and modifications can be made in the methods and applications described herein, and in the practice and application of the techniques of this invention, without departing from the spirit or scope of the invention.
The research of the applicant shows that: most of multidimensional force sensors on the market are in plane cross structures, and the overall structure is only symmetrical on a plane and has the characteristic of poor isotropy effect, so that the inter-dimensional coupling is large, and the measurement is inaccurate. If the multidimensional force sensor can adopt a structure which can be uniformly and symmetrically arranged in a plurality of dimensions, the isotropy effect can be improved. Meanwhile, the applicant also finds that in the structure of a part of three-dimensional multi-dimensional force sensor, the force and moment sensed by the strain gauge attached to the side surface can be influenced mutually due to the problem of the side surface orientation of the elastic beam in the use process, so that the measurement is inaccurate.
Accordingly, an embodiment of the present invention provides a three-dimensional four-axis multi-dimensional force sensor, as shown in fig. 1 and 2, including: a stressed inner sphere 1; the stress inner sphere 1 is provided with a first mounting hole 2 for mounting a component to be tested; the elastic beams of four cuboid columnar structures are intersected and extended from the stressed inner sphere 1, one sides of the four elastic beams, which are far away from the stressed inner sphere 1, are connected with the fixed spheres 4, each fixed sphere 4 is respectively positioned at four vertexes of a regular tetrahedron, and the stressed inner sphere 1 is positioned at the center of the regular tetrahedron; the strain gauges 5 are arranged on the elastic beams according to the Huygens bridge, and the strain gauges 5 are used for sensing the deformation degree of the elastic beams and forming measurement bridge output stress data and/or moment data; the four spring beams comprise a main spring beam 31 and three auxiliary spring beams 32, wherein the radial direction of the main spring beam 31 is parallel to the first side 33 of each auxiliary spring beam 32.
The force-receiving inner sphere 1 corresponds to a center-axis stage (a member connecting the multidimensional force sensor and the force-to-be-measured assembly) in the prior art, and the fixed sphere 4 corresponds to a fixed mount (a member connecting the multidimensional force sensor and the fixed end). In a specific application, the stressed inner sphere 1 is linked with the tool end of the manipulator, and the fixed sphere 4 is linked with the fixed end of the manipulator. The radial direction of the primary spring beam 31 is parallel to the first side 33 of each secondary spring beam 32, the first side 33 being shown in particular in fig. 2. The first side 33 is a pair of opposed sides.
Through the structure, the embodiment of the invention ensures that the multidimensional force sensor is symmetrical and consistent in four dimensions, can effectively increase isotropy effect, reduce inter-dimensional coupling and improve measurement accuracy. Meanwhile, the four elastic beams are divided into the main elastic beam 31 and the three auxiliary elastic beams 32, and the main elastic beam 31 is used as a reference, and the side faces of the three auxiliary elastic beams 32 are arranged to face each other, so that the mutual influence between the measured moment and the force is reduced, and the isotropy effect is improved.
In a specific embodiment, the straight line where the main elastic beam 31 is located is an axis in the three-dimensional rectangular coordinate system, the center of the stressed inner sphere 1 is the origin of the rectangular coordinate system, and the auxiliary elastic beam 32 detects the stressed data and the moment data of the corresponding dimension and decomposes and synthesizes the axes in the three-dimensional rectangular coordinate system.
It should be noted that, the four groups of stress data and moment data with different dimensions correspondingly acquired by the embodiment of the invention are converted into the rectangular coordinates in three dimensions, so that the method can be suitable for application scenes of most six-dimensional force sensors on the market, and the adaptability is improved. Because of the structure and side arrangement of the main elastic beam 31 and the auxiliary elastic beam 32 in the embodiment of the invention, the embodiment of the invention can use a simpler algorithm to perform four-dimensional to three-dimensional conversion.
Further, the stress data and moment data detected by the auxiliary elastic beam 32 according to the embodiment of the present invention may be projected onto each plane of the three-dimensional right angle, and then calculated by adopting a trigonometric function.
In a specific embodiment, each surface of each elastic beam is correspondingly stuck with two strain gauges 5, the strain gauges 5 on opposite sides of the same elastic beam respectively form two measuring bridges for measuring stress data and moment data of corresponding dimensions, and the measuring bridges corresponding to the four elastic beams respectively measure four groups of stress data and moment data of different dimensions.
It should be noted that in the embodiment of the present invention, the strain gauges 5 on opposite sides of the same elastic beam respectively form two measuring bridges, which can be used to measure stress data and moment data in the same dimension.
In a specific embodiment, the elastic beam is provided with a deformation cavity on the beam body, two strain gauges 5 are respectively attached to four sides of the deformation cavity, the strain gauges 5 on opposite sides in the same deformation cavity respectively form two measuring bridges for measuring stress data and moment data of corresponding dimensions, and the measuring bridges corresponding to the four elastic beams respectively measure stress data and moment data of four groups of different dimensions.
In the embodiment of the invention, the strain gauge 5 is stuck in the deformation cavity by the design of the deformation cavity, so that the strain gauge 5 is more sensitive to deformation detection of the elastic beam, and the measurement accuracy is improved.
In a specific embodiment, the fixing sphere 4 is provided with a second mounting hole 6 for fixing the fixing sphere 4.
The second mounting hole 6 is used to link with the fixed end.
Further, the second mounting holes 6 are located opposite the corresponding elastic beams.
In a specific embodiment, a plurality of first overload prevention posts are arranged on the surface of the stressed inner sphere 1, an overload prevention installation body is connected between the fixed spheres 4, a second overload prevention post corresponding to the first overload prevention post is installed on the overload prevention installation body, a gap with a preset distance is reserved between the first overload prevention post and the second overload prevention post, and the first overload prevention post and the second overload prevention post are of a concave-convex embedded structure.
Further, the arrangement positions of the first overload prevention posts are symmetrical in four extension directions of the elastic beam.
It should be noted that, the first overload prevention post and the second overload prevention post can mutually withstand when the overload prevention post is used in an overrun range, and play a role in protection.
In a specific embodiment, the first mounting hole 2 is provided opposite the main elastic beam 31.
It should be noted that such an arrangement is more symmetrical, so that the influence of the arrangement position of the first mounting hole 2 on the measurement accuracy can be reduced.
According to the embodiment of the invention, the elastic beams with four cuboid columnar structures are formed by intersecting and extending the stressed inner sphere 1, one side, away from the stressed inner sphere 1, of the four elastic beams is connected with the fixed sphere 4, each fixed sphere 4 is respectively positioned at four vertexes of a regular tetrahedron, and the stressed inner sphere 1 is positioned at the center of the regular tetrahedron. According to the embodiment of the invention, consistency and symmetry are realized from the side observation of each elastic beam, so that the elastic beams can show better isotropy during measurement, the inter-dimensional coupling is reduced, and the measurement accuracy is improved. Meanwhile, for the conventional three-dimensional six-dimensional sensor, the embodiment of the invention simplifies the structure and is more convenient to manufacture on the premise of basically realizing the same measuring effect.
The four elastic beams in the embodiment of the invention comprise a main elastic beam 31 and three auxiliary elastic beams 32, the radial direction of the main elastic beam 31 is parallel to the first side surfaces 33 of the auxiliary elastic beams 32, and the mutual influence between the measured torsion and force can be reduced and the accuracy can be improved through the symmetrical arrangement. Meanwhile, the structure can simplify the algorithm when six-dimensional conversion is performed.
In the embodiment of the invention, the straight line where the main elastic beam 31 is located is an axis in a three-dimensional rectangular coordinate system, the center of the stressed inner sphere 1 is the origin of the rectangular coordinate system, and the auxiliary elastic beam 32 is used for measuring and decomposing and synthesizing stressed data and moment data with corresponding dimensions on each axis in the three-dimensional rectangular coordinate system. Therefore, the multi-dimensional force sensor provided by the embodiment of the invention can be converted into a six-dimensional force sensor commonly used in the industry, and the adaptability is improved.
The elastic beam of the embodiment of the invention is provided with the deformation cavity on the beam body, the four sides of the deformation cavity are respectively stuck with two strain gauges 5, the strain gauges 5 on the opposite sides in the same deformation cavity respectively form two measuring bridges for measuring stress data and moment data of corresponding dimensions, and the measuring bridges corresponding to the four elastic beams respectively measure four groups of stress data and moment data of different dimensions. According to the embodiment of the invention, the strain gauge 5 is stuck in the deformation cavity through the design of the deformation cavity, so that the strain gauge 5 is more sensitive to deformation detection of the elastic beam, and the measurement accuracy is improved.
The surface of the stressed inner sphere 1 is provided with a plurality of first overload prevention posts, the fixed spheres 4 are connected and provided with overload prevention installation bodies, the overload prevention installation bodies are provided with second overload prevention posts corresponding to the first overload prevention posts, and gaps with preset distances are reserved between the first overload prevention posts and the second overload prevention posts and are of concave-convex embedded structures. The arrangement positions of the first overload prevention posts are symmetrical in four extension directions of the elastic beam. According to the embodiment of the invention, the first overload prevention column and the second overload prevention column are arranged, so that the overload of the multidimensional force sensor caused by the use of an overscan is avoided, and the irreversible damage is caused. Meanwhile, the first overload prevention column and the second overload prevention column are made to be symmetrical, so that the problem of poor isotropy effect caused by asymmetry is avoided.
In summary, the embodiment of the invention can improve the isotropy effect of the multidimensional force sensor, reduce the inter-dimensional coupling and improve the measurement precision.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
In this specification, each embodiment is described in a related manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. In particular, for system embodiments, since they are substantially similar to method embodiments, the description is relatively simple, as relevant to see a section of the description of method embodiments.
The foregoing is merely illustrative of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims (8)

1. A stereoscopic four-axis multi-dimensional force sensor, characterized in that the stereoscopic four-axis multi-dimensional force sensor comprises: a stressed inner sphere; a first mounting hole for mounting the component to be tested is formed in the stressed inner sphere; the elastic beams are intersected and extended from the stressed inner spheres to form four elastic beams with cuboid columnar structures, one sides of the four elastic beams, which are far away from the stressed inner spheres, are connected with fixed spheres, each fixed sphere is respectively positioned at four vertexes of a regular tetrahedron, and the stressed inner spheres are positioned at the center of the regular tetrahedron; the elastic beams are respectively provided with a strain gauge according to the Huygens bridge, and the strain gauges are used for sensing the deformation degree of each elastic beam and forming measurement bridge output stress data and/or moment data; the four elastic beams comprise a main elastic beam and three auxiliary elastic beams; the radial direction of the main elastic beam is parallel to the first side surface of each auxiliary elastic beam.
2. The three-dimensional four-axis multi-dimensional force sensor according to claim 1, wherein the straight line where the main elastic beam is located is an axis in a three-dimensional rectangular coordinate system, the center of the sphere in the stress is the origin of the rectangular coordinate system, and the stress data and the moment data of corresponding dimensions measured by the auxiliary elastic beam are decomposed and synthesized on each axis in the three-dimensional rectangular coordinate system.
3. The three-dimensional four-axis multi-dimensional force sensor according to claim 1, wherein each face of each elastic beam is correspondingly stuck with two strain gauges, the strain gauges on opposite sides of the same elastic beam respectively form two measuring bridges for measuring the stress data and the moment data of corresponding dimensions, and the measuring bridges corresponding to four elastic beams respectively measure the stress data and the moment data of four groups of different dimensions.
4. The three-dimensional four-axis multi-dimensional force sensor according to claim 1, wherein the elastic beam is provided with a deformation cavity on the beam body, two strain gauges are attached to four sides of the deformation cavity, the strain gauges on opposite sides of the same deformation cavity respectively form two measuring bridges for measuring the stress data and the moment data of corresponding dimensions, and the measuring bridges corresponding to the four elastic beams respectively measure the stress data and the moment data of four groups of different dimensions.
5. The three-dimensional four-axis multi-dimensional force sensor according to claim 1, wherein the fixed sphere is provided with a second mounting hole for fixing the fixed sphere.
6. The three-dimensional four-axis multidimensional force sensor according to claim 1, wherein a plurality of first overload prevention posts are arranged on the surface of the stressed inner sphere, overload prevention installation bodies are connected and arranged between the fixed spheres, second overload prevention posts corresponding to the first overload prevention posts are arranged on the overload prevention installation bodies, and gaps with preset distances are reserved between the first overload prevention posts and the second overload prevention posts and are of concave-convex embedded structures.
7. The three-dimensional, four-axis, multi-dimensional force sensor according to claim 6, wherein the arrangement position of each of the first overload prevention posts is symmetrical in four directions of extension of the elastic beam.
8. The stereoscopic, four-axis, multi-dimensional force sensor of claim 1, wherein the first mounting hole is disposed opposite the primary spring beam.
CN202310978411.7A 2023-08-04 2023-08-04 Three-dimensional four-axis multidimensional force sensor Pending CN116698259A (en)

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