CN116690308A - Method, device and system for detecting precision of multi-axis linkage track of ultra-precise machine tool - Google Patents
Method, device and system for detecting precision of multi-axis linkage track of ultra-precise machine tool Download PDFInfo
- Publication number
- CN116690308A CN116690308A CN202310849344.9A CN202310849344A CN116690308A CN 116690308 A CN116690308 A CN 116690308A CN 202310849344 A CN202310849344 A CN 202310849344A CN 116690308 A CN116690308 A CN 116690308A
- Authority
- CN
- China
- Prior art keywords
- track
- machine tool
- deviation
- tested
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 72
- 238000003754 machining Methods 0.000 claims abstract description 151
- 238000001514 detection method Methods 0.000 claims abstract description 70
- 238000012545 processing Methods 0.000 claims description 235
- 238000006073 displacement reaction Methods 0.000 claims description 44
- 230000001360 synchronised effect Effects 0.000 claims description 11
- 238000005070 sampling Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 description 6
- 238000004590 computer program Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011158 quantitative evaluation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/007—Arrangements for observing, indicating or measuring on machine tools for managing machine functions not concerning the tool
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Numerical Control (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Abstract
The invention provides a method, a device and a system for detecting the precision of a multi-axis linkage track of an ultra-precise machine tool, wherein the method comprises the following steps: in the running process of the machine tool to be tested, a first machining track and a second machining track of the machine tool to be tested are respectively obtained; the first machining track and the second machining track are synchronously acquired, the first machining track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second machining track comprises a second motion track detection value of a preset axis in a plurality of motion axes of the machine tool to be tested; determining a first track deviation of the machine tool to be measured based on the first machining track and a first target machining track of the machine tool to be measured, and determining a second track deviation of the machine tool to be measured based on the second machining track and the first target machining track; and when the first track deviation is determined to be effective based on the second track deviation, determining the track precision of the machine tool to be tested based on the first track deviation. The invention can comprehensively and accurately detect the multi-axis linkage track precision of the machine tool to be detected.
Description
Technical Field
The invention relates to the technical field of data processing, in particular to a method, a device and a system for detecting multi-axis linkage track precision of an ultra-precise machine tool.
Background
In recent years, optical elements having an axisymmetric aspherical surface or a free-form surface have been widely used in the fields of head-up displays, vehicle-mounted cameras, laser radars, and the like, and the demands for processing efficiency and accuracy of optical elements having an axisymmetric aspherical surface or a free-form surface have been increasing.
For this reason, cutting machining methods such as fast/slow turning servo have been developed specifically to achieve relatively high-speed and accurate machining. Meanwhile, the response speed of the ultra-precise machine tool using the linear motor is remarkably improved, and the possibility of machining complex aspheric shapes with high precision is increased. In ultra-high precision machining by multi-axis linkage control, the precision of the multi-axis linkage track of an ultra-precise machine tool is an important factor affecting the final shape precision of an axisymmetric aspheric surface or free-form surface.
Currently, track accuracy of ultra-precise machine tools is generally detected by using a sphere bar instrument, a laser interferometer, a cross-grid encoder, and the like. However, these methods have a large limitation in detecting the track accuracy of the ultra-high precision machine tool, for example, the club instrument cannot sufficiently reproduce the processing track of the ultra-high precision machine tool, the laser interferometer is affected by the air turbulence, only the single-axis track accuracy can be verified, and the cross-grid encoder has difficulty in detecting the processing track of the ultra-high precision machine tool with three or more axes.
Therefore, a method capable of comprehensively and accurately detecting the precision of the multi-axis linkage track of the ultra-precise machine tool is needed.
Disclosure of Invention
The invention provides a method, a device and a system for detecting the precision of a multi-axis linkage track of an ultra-precise machine tool, which are used for solving the defect that the precision of the multi-axis linkage track of the ultra-precise machine tool cannot be comprehensively and accurately detected in the prior art.
The invention provides a method for detecting the precision of a multi-axis linkage track of an ultra-precise machine tool, which comprises the following steps:
in the running process of a machine tool to be tested, respectively acquiring a first machining track and a second machining track of the machine tool to be tested; the first processing track and the second processing track are acquired synchronously, the machine tool to be tested comprises a plurality of motion axes, the first processing track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second processing track comprises a second motion track detection value of a preset axis in the plurality of motion axes of the machine tool to be tested;
determining a first track deviation of the machine tool to be measured based on the first machining track and a first target machining track of the machine tool to be measured, and determining a second track deviation of the machine tool to be measured based on the second machining track and the first target machining track;
And when the first track deviation is determined to be effective based on the second track deviation, determining the track precision of the machine tool to be tested based on the first track deviation.
According to the method for detecting precision of multi-axis linkage track of ultra-precise machine tool provided by the invention, the first track deviation of the machine tool to be detected is determined based on the first processing track and the first target processing track of the machine tool to be detected, and the method comprises the following steps:
acquiring a difference value between the first target processing track and the first processing track;
the first track deviation is determined based on a difference between the first target machining track and the first machining track.
According to the method for detecting precision of multi-axis linkage track of ultra-precise machine tool provided by the invention, the second track deviation of the machine tool to be detected is determined based on the second processing track and the first target processing track, and the method comprises the following steps:
acquiring a motion track target value of each preset shaft in the first target processing track to obtain a second target processing track; the first target machining track comprises a motion track target value of each motion axis of the machine tool to be tested;
and determining the second track deviation based on a difference between the second target processing track and the second processing track.
According to the method for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool, provided by the invention, the method for determining whether the first track deviation is effective or not based on the second track deviation comprises the following steps:
acquiring the track deviation corresponding to each preset shaft in the first track deviation to obtain a third track deviation;
determining whether the first track deviation is valid based on an absolute value of a difference of the third track deviation and the second track deviation.
According to the method for detecting the multi-axis linkage track precision of the ultra-precise machine tool provided by the invention, the track precision of the machine tool to be detected is determined based on the first track deviation, and the method comprises the following steps:
determining the track precision corresponding to each motion axis respectively based on the track deviation corresponding to each motion axis in the first track deviation and the motion track target value of each motion axis in the first target processing track;
and determining the track precision of the machine tool to be tested based on the track precision corresponding to each motion axis.
The method for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool provided by the invention further comprises the following steps:
and sending one or more of the first processing track, the second processing track, the first track deviation, the second track deviation and the track precision of the machine tool to be tested to a preset terminal.
The invention also provides a device for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool, which comprises the following components:
the first processing module is used for respectively acquiring a first processing track and a second processing track of the machine tool to be tested in the running process of the machine tool to be tested; the first processing track and the second processing track are acquired synchronously, the machine tool to be tested comprises a plurality of motion axes, the first processing track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second processing track comprises a second motion track detection value of a preset axis in the plurality of motion axes of the machine tool to be tested;
the second processing module is used for determining a first track deviation of the machine tool to be tested based on the first machining track and a first target machining track of the machine tool to be tested, and determining a second track deviation of the machine tool to be tested based on the second machining track and the first target machining track;
and the third processing module is used for determining the track precision of the machine tool to be tested based on the first track deviation when the first track deviation is determined to be effective based on the second track deviation.
The invention also provides a system for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool, which comprises the following steps: the device comprises a first data acquisition device, a second data acquisition device and a data processing device;
The data processing device is used for sending a synchronous signal to the first data acquisition device and the second data acquisition device; the method is also used for determining a first track deviation of the machine tool to be measured based on a first machining track of the machine tool to be measured and a first target machining track of the machine tool to be measured, determining a second track deviation of the machine tool to be measured based on a second machining track of the machine tool to be measured and the first target machining track, and determining track precision of the machine tool to be measured based on the first track deviation when the first track deviation is determined to be effective based on the second track deviation;
the first data acquisition device is used for acquiring a first processing track of the machine tool to be tested based on the synchronous signal and transmitting the first processing track to the data processing device in the running process of the machine tool to be tested; the first machining track comprises a first motion track detection value of each motion axis of the machine tool to be tested;
the second data acquisition device is used for acquiring a second processing track of the machine tool to be tested based on the synchronous signal and transmitting the second processing track to the data processing device in the running process of the machine tool to be tested; the second machining track comprises a second motion track detection value of a preset shaft in a plurality of motion shafts of the machine tool to be tested.
According to the multi-axis linkage track precision detection system of the ultra-precise machine tool, the first data acquisition device comprises a data acquisition circuit and a data processing circuit;
the data acquisition circuit, the data processing circuit and the data processing device are sequentially connected; the data acquisition circuit is also connected with output ports of the positioning devices of all motion axes of the machine tool to be tested;
the data acquisition circuit is used for acquiring an initial machining track of the machine tool to be tested in real time and outputting the initial machining track to the data processing circuit;
the data processing circuit is used for carrying out signal sampling processing on the initial processing track based on the synchronous signal to obtain the first processing track and outputting the first processing track to the data processing device.
According to the multi-axis linkage track precision detection system of the ultra-precise machine tool, the second data acquisition device comprises displacement sensing devices arranged on all preset axes; the displacement sensing device is used for acquiring corresponding displacement signals of the preset shaft based on the synchronous signals.
According to the method, the device and the system for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool, the first machining track and the second machining track of the machine tool to be detected are respectively acquired in the running process of the machine tool to be detected, the first machining track comprises a first motion track detection value of each motion axis of the machine tool to be detected, the second machining track comprises a second motion track detection value of a preset axis in each motion axis of the machine tool to be detected, the first track deviation of the machine tool to be detected is determined based on the first machining track and the first target machining track of the machine tool to be detected, the second track deviation of the machine tool to be detected is determined based on the second machining track and the first target machining track, and when the first track deviation is determined to be effective, the track precision of the machine tool to be detected is determined based on the first track deviation, so that the precision of the multi-axis linkage track of the machine tool to be detected can be comprehensively and accurately detected.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a flow diagram of a method for detecting precision of multi-axis linkage tracks of an ultra-precise machine tool;
FIG. 2 is a schematic structural diagram of a multi-axis linkage track precision detection device of an ultra-precise machine tool;
FIG. 3 is a schematic structural diagram of the multi-axis linkage track precision detection system of the ultra-precise machine tool provided by the invention;
fig. 4 is a schematic structural diagram of an electronic device provided by the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The method for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool is described below with reference to fig. 1. The method for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool is executed by electronic equipment such as a computer, a server and the like or hardware and/or software in the electronic equipment. As shown in fig. 1, the method for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool at least comprises the following steps:
s101, respectively acquiring a first machining track and a second machining track of a machine tool to be tested in the running process of the machine tool to be tested; the first processing track and the second processing track are acquired synchronously, the machine tool to be tested comprises a plurality of motion axes, the first processing track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second processing track comprises a second motion track detection value of a preset axis in the plurality of motion axes of the machine tool to be tested;
s102, determining a first track deviation of the machine tool to be tested based on the first machining track and a first target machining track of the machine tool to be tested, and determining a second track deviation of the machine tool to be tested based on the second machining track and the first target machining track;
And S103, determining the track precision of the machine tool to be tested based on the first track deviation when the first track deviation is determined to be effective based on the second track deviation.
In this embodiment, the machine tool to be measured is an ultra-precise machine tool, and may include a plurality of motion axes to achieve high-speed and precise machining of an optical element of an axisymmetric aspherical surface or a free-form surface by multi-axis linkage. The plurality of movement axes of the machine tool to be measured may include a movement axis that makes a linear movement, and in addition, may include both a movement axis that makes a linear movement and a movement axis that makes a rotational movement. For example, the machine tool to be measured may comprise three axes of motion which are in linear motion and two axes of motion which are in rotational motion.
The running process of the machine tool to be tested can be the normal operation process of the machine tool to be tested, so that the real-time monitoring of the machining precision of the machine tool to be tested can be realized through the detection of the multi-axis linkage track precision of the machine tool to be tested; meanwhile, when the multi-axis linkage track precision of the machine tool to be tested does not meet the requirement, the machine tool to be tested can be timely adjusted. The running process of the machine tool to be tested can also be a debugging process of the machine tool to be tested, so that the machine tool to be tested can be optimized or regulated according to the detection result of the multi-axis linkage track precision of the machine tool to be tested in the debugging process of the machine tool to be tested.
The first machining path of the machine tool to be measured may include a first motion path detection value for each motion axis of the machine tool to be measured. For any one of a plurality of movement axes of the machine tool to be measured, the first movement locus detection value of the movement axis may include a plurality of first timings, and first displacement amount detection values of the movement axis at the respective first timings. The preset axis may be one of a plurality of movement axes of the machine tool to be measured, for example, one or more of three movement axes may be one of the plurality of movement axes. The second machining track of the machine tool to be measured may include a second motion track detection value of each preset axis of the machine tool to be measured. The second movement locus detection value may include a plurality of second timings for any one of the one or more preset axes, and a second displacement amount detection value of the preset axis at each second timing. The first processing track and the second processing track are acquired synchronously, namely, the first moments in the first motion track detection values of different motion axes correspond to the same, the second moments in the second motion track detection values of different preset axes correspond to the same, and the first moments in the first motion track detection values correspond to the second moments in the second motion track detection values.
In practical application, the first processing track can be acquired by the first data acquisition device, and the second processing track can be acquired by the second data acquisition device. The first data acquisition device can acquire initial motion tracks acquired by the positioning device of each motion axis in the machine tool to be tested, and process the initial motion tracks of each motion axis to obtain a first processing track. The positioning device of the moving shaft itself may be a grating scale provided on the moving shaft. The second data acquisition device can comprise a displacement sensing device arranged on each preset shaft of the machine tool to be tested in a peripheral mode; wherein each displacement sensing device may be configured to obtain a second motion profile detection value for a corresponding motion axis.
The first target machining track of the machine tool to be tested includes a target value of a motion track of each motion axis of the machine tool to be tested, which may be a machining track set according to a machining requirement, for example, a machining track set in a control program of the machine tool to be tested. The locus target value of the motion axis may include a target value of a displacement amount of the motion axis at each time for any one of a plurality of motion axes of the machine tool to be measured.
In practical applications, a first track deviation of the machine tool to be measured may be determined based on the first machining track and the first target machining track, and a second track deviation of the machine tool to be measured may be determined based on the second machining track and the first target machining track. For example, a first track deviation may be determined based on a difference between the first target machining track and the first machining track, and a second track deviation may be determined based on a difference between the first target machining track and the second machining track.
After the first track deviation and the second track deviation are obtained, the validity of the first track deviation can be self-checked through the second track deviation, for example, the validity of the first track deviation can be self-checked based on the absolute value of the difference value between the second track deviation and the first track deviation. It can be appreciated that the reliability of the second processing track can be greater than that of the first processing track, so that the accuracy of the detection result of the track precision of the machine tool to be detected can be effectively improved.
The track precision of the machine tool to be measured can be the track precision of the machining track of the machine tool to be measured. If the first track deviation is effective, the track precision of the machine tool to be tested can be determined based on the first track deviation, and the first machining track comprises a first motion track detection value of each motion axis of the machine tool to be tested, so that the comprehensive detection of the track precision of the machine tool to be tested can be realized based on the first track deviation; meanwhile, the validity of the first track deviation is self-checked through the second track deviation, so that the accuracy of a detection result of the track precision of the machine tool to be tested is further ensured. For example, it is possible to determine the track accuracy of the movement track of each movement axis based on the first track deviation, and determine the track accuracy of the processing track of the machine tool to be measured based on the track accuracy of the movement track of each movement axis.
In addition, if the first track deviation is invalid, the first data acquisition device corresponding to the first processing track and/or the positioning device of each motion axis in the machine tool to be tested have overlarge errors or faults, and the machine tool to be tested can be controlled to stop working and timely remove faults.
According to the method, the first machining track and the second machining track of the machine tool to be tested are respectively acquired in the running process of the machine tool to be tested, the first machining track comprises a first motion track detection value of each motion axis of the machine tool to be tested, the second machining track comprises a second motion track detection value of a preset axis in each motion axis of the machine tool to be tested, the first track deviation of the machine tool to be tested is determined based on the first machining track and the first target machining track of the machine tool to be tested, the second track deviation of the machine tool to be tested is determined based on the second machining track and the first target machining track, and when the first track deviation is determined to be effective based on the second track deviation, the track precision of the machine tool to be tested is determined based on the first track deviation, so that the multi-axis linkage track precision of the machine tool to be tested can be comprehensively and accurately detected.
In an exemplary embodiment, the determining the first track deviation of the machine tool to be measured based on the first machining track and the first target machining track of the machine tool to be measured includes:
acquiring a difference value between the first target processing track and the first processing track;
the first track deviation is determined based on a difference between the first target machining track and the first machining track.
In this embodiment, in the process of determining the first track deviation of the machine tool to be measured, the difference between the first target machining track and the first machining track may be obtained. The first target track points corresponding to the first moments in the first processing track in the first target processing track can be determined, and for any one of the first moments, the corresponding first target track points comprise target values of displacement amounts of all motion axes of the machine tool to be tested at the first moment.
After the first target track points corresponding to the first moments are obtained, for any one first moment in the first moments, a first difference value between the first target track points corresponding to the first moments and the first track points corresponding to the first moments in the first processing track can be obtained, and the first difference value corresponding to the first moments forms a difference value between the first target processing track and the first processing track. The first track point corresponding to the first moment includes a first displacement detection value of each motion axis of the machine tool to be measured at the first moment, and the first displacement detection value at the first moment can be subtracted from a target value of the displacement of each motion axis at the first moment to obtain a first displacement deviation of each motion axis at the first moment, that is, a first difference value corresponding to the first moment includes the first displacement deviation of each motion axis of the machine tool to be measured at the first moment.
As an alternative embodiment, the difference between the first target machining track and the first machining track may be represented in the form of a two-dimensional matrix.
After the difference value between the first target processing track and the first processing track is obtained, the difference value between the first target processing track and the first processing track can be directly used as the first track deviation, so that the first track deviation of the machine tool to be measured can be rapidly and effectively determined.
In an exemplary embodiment, the determining the second track deviation of the machine tool to be measured based on the second machining track and the first target machining track includes:
acquiring a motion track target value of each preset shaft in the first target processing track to obtain a second target processing track; the first target machining track comprises a motion track target value of each motion axis of the machine tool to be tested;
and determining the second track deviation based on a difference between the second target processing track and the second processing track.
In this embodiment, the first target processing track of the machine tool to be measured includes a motion track target value of each motion axis of the machine tool to be measured, and the motion track target value of each preset axis in the first target processing track may be used as the second target processing track.
In the process of determining the second track deviation of the machine tool to be measured, a difference value between the second target machining track and the second machining track can be obtained. And determining a second target track point corresponding to each second moment in the second processing track in the second target processing track, wherein for any one of the second moments, the corresponding second target track point comprises a target value of the displacement of each preset axis of the machine tool to be tested at the second moment.
After the second target track points corresponding to the second moments are obtained, for any one of the second moments, a second difference value between the second target track points corresponding to the second moments and the second track points corresponding to the second moments in the second processing track can be obtained, and the second difference value corresponding to the second moments forms a difference value between the second target processing track and the second processing track. The second track point corresponding to the second moment includes a second displacement detection value of each preset shaft of the machine tool to be measured at the second moment, and the second displacement detection value at the second moment can be subtracted from the target value of the displacement of each preset shaft at the second moment to obtain a second displacement deviation of each preset shaft at the second moment, that is, the second difference corresponding to the second moment includes the second displacement deviation of each preset shaft of the machine tool to be measured at the second moment.
As an alternative embodiment, when the number of preset axes is plural, the difference between the second target machining track and the second machining track may be represented in the form of a two-dimensional matrix.
After the difference value between the second target processing track and the second processing track is obtained, the difference value between the second target processing track and the second processing track can be directly used as the second track deviation, so that the second track deviation of the machine tool to be measured can be rapidly and effectively determined.
In an exemplary embodiment, a method of determining whether the first trajectory deviation is valid based on the second trajectory deviation includes:
acquiring the track deviation corresponding to each preset shaft in the first track deviation to obtain a third track deviation;
determining whether the first track deviation is valid based on an absolute value of a difference of the third track deviation and the second track deviation.
In this embodiment, the first track deviation of the machine tool to be measured includes a track deviation corresponding to each movement axis of the machine tool to be measured, and for any movement axis of the plurality of movement axes of the machine tool to be measured, the corresponding track deviation includes a first displacement deviation of the movement axis at each first moment. The track deviation corresponding to each preset axis in the first track deviation can be used as a third track deviation.
In determining whether the first track deviation is valid, an absolute value of a difference between the third track deviation and the second track deviation may be obtained. For any one of the second moments, the difference between the second difference at the second moment and the first difference at the first moment corresponding to the second moment may be obtained, and the absolute value of the third difference corresponding to the second moment is the absolute value of the difference between the third track deviation and the second track deviation. The absolute value of the third difference value corresponding to the second moment comprises the absolute value of the difference value between the first displacement deviation and the second displacement deviation of each preset shaft at the second moment.
In practical applications, it may be determined whether the first track deviation is valid based on an absolute value of a difference between the third track deviation and the second track deviation. For example, if the absolute value of the third difference value corresponding to each second moment is smaller than or equal to the preset value, the first track deviation is indicated to be valid, and if not, the first track deviation is indicated to be invalid. For any one of the second moments, when the absolute value of the difference value between the first displacement deviation and the second displacement deviation of each preset shaft at the second moment is smaller than or equal to the preset value, the absolute value of the third difference value corresponding to the second moment is determined to be smaller than or equal to the preset value, so that the validity of the first track deviation can be automatically checked rapidly and accurately, and the reliability of the detection result of the track precision of the machine tool to be detected is further ensured.
In an exemplary embodiment, the determining the trajectory accuracy of the machine tool to be measured based on the first trajectory deviation includes:
determining the track precision corresponding to each motion axis respectively based on the track deviation corresponding to each motion axis in the first track deviation and the motion track target value of each motion axis in the first target processing track;
and determining the track precision of the machine tool to be tested based on the track precision corresponding to each motion axis.
In this embodiment, for any one of a plurality of movement axes of a machine tool to be measured, the track deviation corresponding to the movement axis in the first track deviation includes a first displacement amount deviation of the movement axis at each first time, the track target value of the movement axis may include a target value of a displacement amount of the movement axis at each first time, the track precision corresponding to the movement axis at each first time may be determined based on the first displacement amount deviation of the movement axis at each first time and the target value of the displacement amount of the movement axis at each first time, for example, for any one of the first times, a ratio of an absolute value of the first displacement amount deviation of the movement axis at the first time to the target value of the displacement amount of the movement axis at the first time may be obtained, and the track precision corresponding to the movement axis at the first time may be determined based on the ratio.
After the track precision corresponding to the motion axis at each first time is obtained, the track precision corresponding to the motion axis can be determined based on the track precision corresponding to the motion axis at each first time. For example, the lowest track precision among the track precision corresponding to the movement axis at each first time may be used as the track precision corresponding to the movement axis, and the average value of the track precision corresponding to the movement axis at each first time may be used as the track precision corresponding to the movement axis.
After the track precision corresponding to each motion axis is obtained, the track precision of the machining track of the machine tool to be tested, namely, the track precision of the machine tool to be tested, can be determined based on the track precision corresponding to each motion axis, so that the track precision of the machine tool to be tested can be rapidly and effectively determined.
In practical application, the track precision corresponding to each motion axis can be weighted and summed based on the preset weight coefficient corresponding to each motion axis, so as to obtain the track precision of the machine tool to be measured; in addition, the track precision of each motion axis can be used as the track precision of the machine tool to be tested, namely, the track precision of the machine tool to be tested comprises the track precision of each motion axis, for example, the track precision of the machine tool to be tested can be represented in a matrix form, so that the quantitative evaluation of the track precision of the machine tool to be tested is realized.
In an exemplary embodiment, further comprising:
and sending one or more of the first processing track, the second processing track, the first track deviation, the second track deviation and the track precision of the machine tool to be tested to a preset terminal.
In this embodiment, the preset terminal may be a preset mobile terminal, for example, a mobile phone, a computer, a tablet, or a display device, for example, a display device disposed on a machine tool to be tested, or a display device disposed on a remote monitoring terminal.
One or more of the first machining track, the second machining track, the first track deviation, the second track deviation and the track precision of the machine tool to be tested can be sent to a preset terminal, so that the real-time monitoring of the working state of the machine tool to be tested can be realized, an operator can conveniently and timely adjust the machine tool to be tested, and the machining precision of the machine tool to be tested can be effectively guaranteed.
The multi-axis linkage track precision detection device of the ultra-precise machine tool provided by the invention is described below, and the multi-axis linkage track precision detection device of the ultra-precise machine tool and the multi-axis linkage track precision detection method of the ultra-precise machine tool described above can be correspondingly referred to each other. As shown in fig. 2, the multi-axis linkage track precision detection device of the ultra-precise machine tool at least comprises:
The first processing module 201 is configured to obtain a first processing track and a second processing track of a machine tool to be tested respectively during operation of the machine tool to be tested; the first processing track and the second processing track are acquired synchronously, the machine tool to be tested comprises a plurality of motion axes, the first processing track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second processing track comprises a second motion track detection value of a preset axis in the plurality of motion axes of the machine tool to be tested;
a second processing module 202, configured to determine a first track deviation of the machine tool to be measured based on the first processing track and a first target processing track of the machine tool to be measured, and determine a second track deviation of the machine tool to be measured based on the second processing track and the first target processing track;
and the third processing module 203 is configured to determine, based on the first track deviation, track accuracy of the machine tool to be measured when the first track deviation is determined to be effective based on the second track deviation.
In an exemplary embodiment, the second processing module 202 is specifically configured to:
acquiring a difference value between the first target processing track and the first processing track;
The first track deviation is determined based on a difference between the first target machining track and the first machining track.
In an exemplary embodiment, the second processing module 202 is specifically configured to:
acquiring a motion track target value of each preset shaft in the first target processing track to obtain a second target processing track; the first target machining track comprises a motion track target value of each motion axis of the machine tool to be tested;
and determining the second track deviation based on a difference between the second target processing track and the second processing track.
In an exemplary embodiment, the third processing module 203 is specifically configured to:
acquiring the track deviation corresponding to each preset shaft in the first track deviation to obtain a third track deviation;
determining whether the first track deviation is valid based on an absolute value of a difference of the third track deviation and the second track deviation.
In an exemplary embodiment, the third processing module 203 is specifically configured to:
determining the track precision corresponding to each motion axis respectively based on the track deviation corresponding to each motion axis in the first track deviation and the motion track target value of each motion axis in the first target processing track;
And determining the track precision of the machine tool to be tested based on the track precision corresponding to each motion axis.
In an exemplary embodiment, a fourth processing module is further included, the fourth processing module configured to:
and sending one or more of the first processing track, the second processing track, the first track deviation, the second track deviation and the track precision of the machine tool to be tested to a preset terminal.
The system for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool provided by the invention is described below, and the system for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool and the method for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool described above can be correspondingly referred to each other. As shown in fig. 3, the multi-axis linkage track precision detection system of the ultra-precise machine tool at least comprises: a first data acquisition device 301, a second data acquisition device 302 and a data processing device 303;
the data processing device 303 is configured to send a synchronization signal to the first data acquisition device 301 and the second data acquisition device 302; the method is also used for determining a first track deviation of the machine tool to be measured based on a first machining track of the machine tool to be measured and a first target machining track of the machine tool to be measured, determining a second track deviation of the machine tool to be measured based on a second machining track of the machine tool to be measured and the first target machining track, and determining track precision of the machine tool to be measured based on the first track deviation when the first track deviation is determined to be effective based on the second track deviation;
The first data acquisition device 301 is configured to acquire a first processing track of the machine tool to be tested based on the synchronization signal and transmit the first processing track to the data processing device 303 during the operation process of the machine tool to be tested; the first machining track comprises a first motion track detection value of each motion axis of the machine tool to be tested;
the second data acquisition device 302 is configured to acquire a second processing track of the machine tool to be tested based on the synchronization signal and transmit the second processing track to the data processing device 303 during the operation process of the machine tool to be tested; the second machining track comprises a second motion track detection value of a preset shaft in a plurality of motion shafts of the machine tool to be tested.
In an exemplary embodiment, the data processing device 303 is specifically configured to:
acquiring a difference value between the first target processing track and the first processing track;
the first track deviation is determined based on a difference between the first target machining track and the first machining track.
In an exemplary embodiment, the data processing device 303 is specifically configured to:
acquiring a motion track target value of each preset shaft in the first target processing track to obtain a second target processing track; the first target machining track comprises a motion track target value of each motion axis of the machine tool to be tested;
And determining the second track deviation based on a difference between the second target processing track and the second processing track.
In an exemplary embodiment, the data processing device 303 is specifically configured to:
acquiring the track deviation corresponding to each preset shaft in the first track deviation to obtain a third track deviation;
determining whether the first track deviation is valid based on an absolute value of a difference of the third track deviation and the second track deviation.
In an exemplary embodiment, the data processing device 303 is specifically configured to:
determining the track precision corresponding to each motion axis respectively based on the track deviation corresponding to each motion axis in the first track deviation and the motion track target value of each motion axis in the first target processing track;
and determining the track precision of the machine tool to be tested based on the track precision corresponding to each motion axis.
In an exemplary embodiment, the data processing device 303 is further configured to:
and sending one or more of the first processing track, the second processing track, the first track deviation, the second track deviation and the track precision of the machine tool to be tested to a preset terminal.
In an exemplary embodiment, the first data acquisition device 301 includes a data acquisition circuit and a data processing circuit;
the data acquisition circuit, the data processing circuit, and the data processing device 303 are sequentially connected; the data acquisition circuit is also connected with output ports of the positioning devices of all motion axes of the machine tool to be tested;
the data acquisition circuit is used for acquiring an initial machining track of the machine tool to be tested in real time and outputting the initial machining track to the data processing circuit;
the data processing circuit is configured to perform signal sampling processing on the initial processing track based on the synchronization signal, obtain the first processing track, and output the first processing track to the data processing device 303.
In this embodiment, the positioning device of each movement axis of the machine tool to be measured may be a grating ruler, for example, a grating ruler may be installed on each movement axis of the machine tool to be measured, so as to detect the first displacement information of the corresponding movement axis in real time through the grating ruler, and form an initial movement track of the movement axis, where the initial movement track of each movement axis forms an initial processing track of the machine tool to be measured. The machine tool to be tested can send the data acquired by the grating ruler on each motion axis to the control device of the machine tool to be tested, so as to be used as feedback of positioning control of the machine tool to be tested. It is understood that the signal output by the grating ruler can be a voltage signal with high frequency multiplication subdivision, namely, the initial motion track of each motion axis is an analog signal.
The input end of the data acquisition circuit can be connected with the output port of the positioning device of each motion axis of the machine tool to be tested so as to acquire the initial processing track of the machine tool to be tested in real time through the data acquisition circuit, the first output end of the data acquisition circuit can be connected with the data processing circuit, the second output end of the data acquisition circuit can be connected with the control device of the machine tool to be tested so as to output the acquired initial processing track of the machine tool to be tested to the data processing circuit and the control device of the machine tool to be tested at the same time through the data acquisition circuit, and data delay caused by the fact that the data acquisition circuit directly acquires the initial processing track of the machine tool to be tested from the control device of the machine tool to be tested is avoided, and instantaneity of the initial processing track output to the data processing circuit is guaranteed. Wherein the data acquisition circuit may employ a multiplication signal amplification circuit.
An input of the data processing circuit is connected to a first output of the data acquisition circuit and an output of the data processing circuit is connected to an input of the data processing device 303. The data processing circuit may include one or more data processing sub-circuits, where when there are multiple data processing sub-circuits, the multiple data processing sub-circuits are connected in parallel between the data acquisition circuit and the data processing device 303, and the sum of data output by the data acquisition circuit to each data processing sub-circuit is the initial processing track of the machine tool to be tested.
As an alternative embodiment, when the machine tool to be measured includes both a motion axis that performs a linear motion and a motion axis that performs a rotational motion, the number of the data processing sub-circuits is two, and the data acquisition circuit sends an initial motion trajectory corresponding to the motion axis that performs a linear motion to the first data processing sub-circuit, and sends an initial motion trajectory corresponding to the motion axis that performs a rotational motion to the other data processing sub-circuit.
The data processing circuit is configured to perform signal sampling processing on the initial processing track based on the synchronization signal, obtain a first processing track, and output the first processing track to the data processing device 303. The synchronization signal may be a pulse sequence transmitted at high frequency, and the data processing sub-circuit may determine each first moment based on the synchronization signal, sample an initial motion track of each motion axis in the received data based on each first moment, so as to obtain a first motion track detection value corresponding to the corresponding motion axis, and send the first motion track detection value to the data processing device 303. The first motion track detection values corresponding to all motion axes of the machine tool to be detected form a first processing track. The data processing circuit can adopt an encoder, and after sampling processing is performed on the high-frequency-multiplication subdivided voltage signals by the encoder, the first displacement detection values of the corresponding motion axes and the first moment corresponding to each first displacement detection value are output.
In an exemplary embodiment, the second data acquisition device 302 includes a displacement sensing device disposed on each of the predetermined axes; the displacement sensing device is used for acquiring corresponding displacement signals of the preset shaft based on the synchronous signals.
In this embodiment, the second data acquisition device 302 may include a displacement sensing device that is externally disposed on each preset axis of the machine tool to be measured, where the displacement sensing device may determine each second moment based on the synchronization signal, and acquire second displacement information of the corresponding movement axis at each second moment, so as to obtain a second movement track detection value of the movement axis.
The reliability of the data collected by the second data collection device 302 is higher than that of the data collected by the positioning device of each movement axis of the measuring machine tool. For example, the second data acquisition device 302 may adopt a displacement sensing device with a reference device or a reference plane, such as a laser interferometer, a radar laser, etc., so as to ensure the validity of the second track deviation, further ensure the reliability of the self-checking result of the validity of the first track deviation, and further improve the reliability of the determination result of the track precision of the machine tool to be tested.
Fig. 4 illustrates a physical schematic diagram of an electronic device, as shown in fig. 4, which may include: a processor (processor) 401, a communication interface (Communications Interface) 402, a memory (memory) 403 and a communication bus 404, wherein the processor 401, the communication interface 402 and the memory 403 complete communication with each other through the communication bus 404. The processor 401 may call logic instructions in the memory 403 to perform a method for ultra-precision machine multi-axis linkage trajectory precision detection, the method comprising: in the running process of a machine tool to be tested, respectively acquiring a first machining track and a second machining track of the machine tool to be tested; the first processing track and the second processing track are acquired synchronously, the machine tool to be tested comprises a plurality of motion axes, the first processing track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second processing track comprises a second motion track detection value of a preset axis in the plurality of motion axes of the machine tool to be tested;
Determining a first track deviation of the machine tool to be measured based on the first machining track and a first target machining track of the machine tool to be measured, and determining a second track deviation of the machine tool to be measured based on the second machining track and the first target machining track;
and when the first track deviation is determined to be effective based on the second track deviation, determining the track precision of the machine tool to be tested based on the first track deviation.
Further, the logic instructions in the memory 403 may be implemented in the form of software functional units and stored in a computer readable storage medium when sold or used as a stand alone product. Based on this understanding, the technical solution of the present invention may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution, in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
In another aspect, the present invention also provides a computer program product, where the computer program product includes a computer program, where the computer program can be stored on a non-transitory computer readable storage medium, and when the computer program is executed by a processor, the computer can execute the method for detecting multi-axis linkage track precision of an ultraprecise machine tool provided by the above methods, and the method includes: in the running process of a machine tool to be tested, respectively acquiring a first machining track and a second machining track of the machine tool to be tested; the first processing track and the second processing track are acquired synchronously, the machine tool to be tested comprises a plurality of motion axes, the first processing track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second processing track comprises a second motion track detection value of a preset axis in the plurality of motion axes of the machine tool to be tested;
determining a first track deviation of the machine tool to be measured based on the first machining track and a first target machining track of the machine tool to be measured, and determining a second track deviation of the machine tool to be measured based on the second machining track and the first target machining track;
And when the first track deviation is determined to be effective based on the second track deviation, determining the track precision of the machine tool to be tested based on the first track deviation.
In still another aspect, the present invention provides a non-transitory computer readable storage medium having stored thereon a computer program which, when executed by a processor, is implemented to perform the method for detecting precision of multi-axis linkage trajectories of an ultraprecise machine tool provided by the above methods, the method comprising: in the running process of a machine tool to be tested, respectively acquiring a first machining track and a second machining track of the machine tool to be tested; the first processing track and the second processing track are acquired synchronously, the machine tool to be tested comprises a plurality of motion axes, the first processing track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second processing track comprises a second motion track detection value of a preset axis in the plurality of motion axes of the machine tool to be tested;
determining a first track deviation of the machine tool to be measured based on the first machining track and a first target machining track of the machine tool to be measured, and determining a second track deviation of the machine tool to be measured based on the second machining track and the first target machining track;
And when the first track deviation is determined to be effective based on the second track deviation, determining the track precision of the machine tool to be tested based on the first track deviation.
The apparatus embodiments described above are merely illustrative, wherein the elements illustrated as separate elements may or may not be physically separate, and the elements shown as elements may or may not be physical elements, may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
From the above description of the embodiments, it will be apparent to those skilled in the art that the embodiments may be implemented by means of software plus necessary general hardware platforms, or of course may be implemented by means of hardware. Based on this understanding, the foregoing technical solution may be embodied essentially or in a part contributing to the prior art in the form of a software product, which may be stored in a computer readable storage medium, such as ROM/RAM, a magnetic disk, an optical disk, etc., including several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the method described in the respective embodiments or some parts of the embodiments.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. The method for detecting the precision of the multi-axis linkage track of the ultra-precise machine tool is characterized by comprising the following steps of:
in the running process of a machine tool to be tested, respectively acquiring a first machining track and a second machining track of the machine tool to be tested; the first processing track and the second processing track are acquired synchronously, the machine tool to be tested comprises a plurality of motion axes, the first processing track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second processing track comprises a second motion track detection value of a preset axis in the plurality of motion axes of the machine tool to be tested;
determining a first track deviation of the machine tool to be measured based on the first machining track and a first target machining track of the machine tool to be measured, and determining a second track deviation of the machine tool to be measured based on the second machining track and the first target machining track;
And when the first track deviation is determined to be effective based on the second track deviation, determining the track precision of the machine tool to be tested based on the first track deviation.
2. The method for detecting precision of multi-axis linkage trajectories of an ultraprecise machine tool according to claim 1, wherein the determining of the first trajectory deviation of the machine tool to be measured based on the first machining trajectory and the first target machining trajectory of the machine tool to be measured includes:
acquiring a difference value between the first target processing track and the first processing track;
the first track deviation is determined based on a difference between the first target machining track and the first machining track.
3. The method for detecting precision of multi-axis linkage trajectories of an ultraprecise machine tool according to claim 1, wherein the determining of the second trajectory deviation of the machine tool to be detected based on the second machining trajectory and the first target machining trajectory comprises:
acquiring a motion track target value of each preset shaft in the first target processing track to obtain a second target processing track; the first target machining track comprises a motion track target value of each motion axis of the machine tool to be tested;
And determining the second track deviation based on a difference between the second target processing track and the second processing track.
4. The method for detecting precision of a multi-axis linkage path of an ultraprecise machine tool according to claim 1, wherein the method for determining whether the first path deviation is valid based on the second path deviation comprises:
acquiring the track deviation corresponding to each preset shaft in the first track deviation to obtain a third track deviation;
determining whether the first track deviation is valid based on an absolute value of a difference of the third track deviation and the second track deviation.
5. The method for detecting precision of multi-axis linkage trajectories of an ultraprecise machine tool according to any one of claims 1 to 4, wherein the determining the precision of the trajectories of the machine tool to be detected based on the first trajectory deviation comprises:
determining the track precision corresponding to each motion axis respectively based on the track deviation corresponding to each motion axis in the first track deviation and the motion track target value of each motion axis in the first target processing track;
and determining the track precision of the machine tool to be tested based on the track precision corresponding to each motion axis.
6. The method for detecting precision of multi-axis linkage trajectories of an ultraprecise machine tool according to any one of claims 1 to 4, further comprising:
and sending one or more of the first processing track, the second processing track, the first track deviation, the second track deviation and the track precision of the machine tool to be tested to a preset terminal.
7. The utility model provides an ultraprecise lathe multiaxis linkage orbit precision detection device which characterized in that includes:
the first processing module is used for respectively acquiring a first processing track and a second processing track of the machine tool to be tested in the running process of the machine tool to be tested; the first processing track and the second processing track are acquired synchronously, the machine tool to be tested comprises a plurality of motion axes, the first processing track comprises a first motion track detection value of each motion axis of the machine tool to be tested, and the second processing track comprises a second motion track detection value of a preset axis in the plurality of motion axes of the machine tool to be tested;
the second processing module is used for determining a first track deviation of the machine tool to be tested based on the first machining track and a first target machining track of the machine tool to be tested, and determining a second track deviation of the machine tool to be tested based on the second machining track and the first target machining track;
And the third processing module is used for determining the track precision of the machine tool to be tested based on the first track deviation when the first track deviation is determined to be effective based on the second track deviation.
8. The utility model provides an ultra-precision machine tool multiaxis linkage orbit precision detection system which characterized in that includes: the device comprises a first data acquisition device, a second data acquisition device and a data processing device;
the data processing device is used for sending a synchronous signal to the first data acquisition device and the second data acquisition device; the method is also used for determining a first track deviation of the machine tool to be measured based on a first machining track of the machine tool to be measured and a first target machining track of the machine tool to be measured, determining a second track deviation of the machine tool to be measured based on a second machining track of the machine tool to be measured and the first target machining track, and determining track precision of the machine tool to be measured based on the first track deviation when the first track deviation is determined to be effective based on the second track deviation;
the first data acquisition device is used for acquiring a first processing track of the machine tool to be tested based on the synchronous signal and transmitting the first processing track to the data processing device in the running process of the machine tool to be tested; the first machining track comprises a first motion track detection value of each motion axis of the machine tool to be tested;
The second data acquisition device is used for acquiring a second processing track of the machine tool to be tested based on the synchronous signal and transmitting the second processing track to the data processing device in the running process of the machine tool to be tested; the second machining track comprises a second motion track detection value of a preset shaft in a plurality of motion shafts of the machine tool to be tested.
9. The system for detecting precision of multi-axis linkage tracks of an ultra-precise machine tool according to claim 8, wherein the first data acquisition device comprises a data acquisition circuit and a data processing circuit;
the data acquisition circuit, the data processing circuit and the data processing device are sequentially connected; the data acquisition circuit is also connected with output ports of the positioning devices of all motion axes of the machine tool to be tested;
the data acquisition circuit is used for acquiring an initial machining track of the machine tool to be tested in real time and outputting the initial machining track to the data processing circuit;
the data processing circuit is used for carrying out signal sampling processing on the initial processing track based on the synchronous signal to obtain the first processing track and outputting the first processing track to the data processing device.
10. The system for detecting precision of multi-axis linkage tracks of an ultra-precise machine tool according to claim 8, wherein the second data acquisition device comprises a displacement sensing device arranged on each preset axis; the displacement sensing device is used for acquiring corresponding displacement signals of the preset shaft based on the synchronous signals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310849344.9A CN116690308A (en) | 2023-07-11 | 2023-07-11 | Method, device and system for detecting precision of multi-axis linkage track of ultra-precise machine tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310849344.9A CN116690308A (en) | 2023-07-11 | 2023-07-11 | Method, device and system for detecting precision of multi-axis linkage track of ultra-precise machine tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116690308A true CN116690308A (en) | 2023-09-05 |
Family
ID=87829423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310849344.9A Pending CN116690308A (en) | 2023-07-11 | 2023-07-11 | Method, device and system for detecting precision of multi-axis linkage track of ultra-precise machine tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116690308A (en) |
-
2023
- 2023-07-11 CN CN202310849344.9A patent/CN116690308A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104390586A (en) | Device and method for detecting geometric errors of single-axis motions of machine tool | |
| CN109682626B (en) | Robot speed testing method and device | |
| CN111559372A (en) | Parking space detection performance evaluation method of parking system and electronic equipment | |
| CN101900531B (en) | Method for measuring and calculating binocular vision displacement measurement errors and measuring system | |
| CN102879032A (en) | Dynamic angle measurement accuracy measuring device | |
| CN104166373A (en) | Online detecting method and system for numerical control machine tool machining error | |
| CN115932530B (en) | Method for calibrating semiconductor detection equipment | |
| CN105911563A (en) | Method for detecting static GPS observation data mass in real time | |
| CN104236466A (en) | Measuring system for detecting repeated positioning accuracy of manipulators | |
| CN113419233A (en) | Method, device and equipment for testing perception effect | |
| CN112985867B (en) | Steering engine testing method, device, equipment and storage medium | |
| CN110381253A (en) | A kind of control method of quality testing, apparatus and system | |
| CN101566466B (en) | Profile analysis system and method | |
| CN108768605B (en) | Online synchronization method for detecting magnetic flux leakage and inertial navigation subsystem data in pipeline | |
| CN112816183B (en) | VR head-mounted display device movement characteristic detection device and method | |
| CN101762252A (en) | Virtual three-coordinate measuring instrument and use method thereof | |
| CN116690308A (en) | Method, device and system for detecting precision of multi-axis linkage track of ultra-precise machine tool | |
| CN101660895B (en) | Computer system and method for accurately positioning element to be measured | |
| CN207610673U (en) | A kind of surface shape detection apparatus of aspherical optical element | |
| CN113362456B (en) | Digital twinning technology-based measuring instrument construction method and system | |
| CN114536403A (en) | Positioning precision measurement system and method of joint module | |
| Bösemann | Industrial photogrammetry: challenges and opportunities | |
| CN110567489B (en) | Method and system for acquiring dynamic error of angle intersection measurement system | |
| CN103737428A (en) | System and method for measuring dynamic deformation of high-speed numerically-controlled machine tool | |
| CN110940352B (en) | Automatic calibration system of micro-electro-mechanical system inertia measurement unit and calibration verification method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |